Multi-component mixed gas preparation device and use method

Abstract

The invention relates to a multi-component mixed gas preparation device which comprises a vacuumizing pipeline, a gas inlet pipeline, a gas distribution pipeline, a circulating pipeline and a filling pipeline which are connected through pipelines, the vacuumizing pipeline comprises a first vacuum pipeline and a second vacuum pipeline, and the gas inlet pipeline comprises a gas inlet main pipeline. A gas inlet branch pipeline, a first pressure gauge and a gas distribution and inlet main valve which are connected in sequence are arranged on the gas inlet main pipeline; the gas distribution pipeline is composed of a first parallel connection pipeline and a second parallel connection pipeline. The circulation pipeline comprises a first return gas circuit pipe, a return valve and a second return gas circuit pipe which are connected in sequence. The filling pipeline comprises a gas outlet main pipeline, and a gas distribution and outlet main valve, a film press, a filling valve and a filling container which are connected in sequence are arranged on the gas outlet main pipeline. According to the invention, the film pressing machine is used for uniformly mixing gas, so that the uniform mixing time is obviously shortened, and the production efficiency is improved; compared with a traditional method, the use of the film press reduces the labor intensity, and the operation is more convenient and efficient.

Description

Technical Field

[0001] The present invention relates to the technical field of mixed gas configuration, and in particular to a multi-component mixed gas configuration device and a use method thereof. Background Art

[0002] Mixed gases have high requirements on component content, especially in the field of semiconductor manufacturing. However, they are restricted by factors such as gas properties and gas distribution equipment, which seriously affect production efficiency or product performance indicators.

[0003] At present, the main methods for preparing mixed gas are weighing method, partial pressure method, etc. Weighing gas distribution uses high-precision weighing equipment to obtain higher gas distribution accuracy, but it requires a long time of static mixing, or high-intensity manual mixing, which greatly reduces production efficiency and increases labor intensity. Due to the influence of temperature, gas compression factor, etc. in partial pressure gas distribution, the accuracy of components cannot be guaranteed, and gas mixing requires a long time. Therefore, we propose a mixed gas configuration device and configuration method to solve the above problems. Summary of the invention

[0004] The object of the present invention is to provide a multi-component mixed gas preparation device and a method for using the same, so as to solve the technical problems of low gas preparation accuracy and long mixing time in the above-mentioned prior art.

[0005] The specific technical solutions of the present invention are as follows:

[0006] A multi-component mixed gas preparation device comprises a vacuum pipeline, an air intake pipeline, a gas distribution pipeline, a circulation pipeline and a filling pipeline connected by pipelines;

[0007] The vacuum pipeline comprises a first vacuum pipeline and a second vacuum pipeline, wherein the first vacuum pipeline and the second vacuum pipeline are connected;

[0008] The air intake pipeline comprises an air intake main pipeline, and the air intake main pipeline is provided with an air intake branch pipeline, a first pressure gauge, and an air distribution air intake main valve connected in sequence;

[0009] The gas distribution pipeline is composed of a first parallel pipeline and a second parallel pipeline, the first parallel pipeline is provided with a storage tank, the second parallel pipeline is provided with a gas distribution inlet valve, a fixed value tank and a gas distribution outlet valve, and a weighing device is provided under the fixed value tank;

[0010] The circulation pipeline comprises a return gas line pipe 1, a return valve and a return gas line pipe 2 which are connected in sequence;

[0011] The filling pipeline comprises a gas outlet main pipeline, on which a gas distribution gas outlet main valve, a membrane press, a filling valve and a filling container are sequentially connected;

[0012] The first vacuum pipeline is connected to the main air intake pipeline, and the second vacuum pipeline is connected to the main air outlet pipeline; one end of the first parallel pipeline and the second parallel pipeline is connected to the main air intake valve of the air distribution, and the other end is connected to the main air outlet pipeline; the return air circuit pipe 1 is connected to the main air intake valve of the air distribution, and the return air circuit pipe 2 is connected to the gas outlet of the membrane compressor.

[0013] Preferably, a first valve is provided on the first vacuum pipeline, and a second valve is provided on the second vacuum pipeline.

[0014] Preferably, the first parallel pipeline and the second parallel pipeline are equidistant in length, and the volume of the storage tank is 20-600 times that of the constant value tank; a second pressure gauge is provided on the storage tank, and a third pressure gauge is provided on the constant value tank.

[0015] Preferably, the weighing equipment adopts a high-precision mass comparator.

[0016] Preferably, a first analysis pipeline is further provided on the main air inlet pipeline, and an analysis valve 1 is provided on the first analysis pipeline; a second analysis pipeline is further provided on the main air outlet pipeline, and an analysis valve 2 is provided on the second analysis pipeline.

[0017] Preferably, the air intake branch line comprises an air intake branch line 1 and an air intake valve 1 connected to each other, and at least one group of air intake branch lines is provided.

[0018] Preferably, the second parallel pipeline is detachably connected to the constant value tank; the filling container is detachably connected to the main gas outlet pipeline.

[0019] The present invention also provides a method for preparing and using a multi-component mixed gas, comprising the following steps:

[0020] S1. Open the second valve on the second vacuum pipeline to evacuate the storage tank and the fixed value tank, and record the empty tank mass of the fixed value tank on the weighing equipment;

[0021] S2, connect the first group of gas to the first intake valve, open the first valve on the first vacuum pipeline to evacuate, then close the first valve, open the first intake valve on the first intake branch line, open the gas distribution intake main valve to charge the storage tank and the fixed value tank with the first group of gas, then close the gas distribution intake main valve, and when the pressure of the first group of gas in the storage tank and the fixed value tank is equal, calculate the gas mass of the first group of gas according to the weighing value of the fixed value tank on the weighing device;

[0022] S3, connect the second component gas to the first air inlet valve, open the first valve on the first vacuum pipeline to evacuate, then close the first valve, open the first air inlet valve on the first air inlet branch line, open the main air inlet valve to charge the storage tank and the fixed value tank with the second component gas, then close the main air inlet valve, and when the pressure of the second component gas in the storage tank and the fixed value tank is equal, calculate the gas mass of the second component gas according to the weighing value of the fixed value tank on the weighing device;

[0023] S4, close the main gas inlet valve and the filling valve, open the main gas outlet valve and the return valve, start the membrane press to circulate and mix the mixed gas in the storage tank and the fixed value tank until the mixed gas is mixed, and close the membrane press;

[0024] S5. Close the return valve, open the filling valve, start the membrane press again, and fill the mixed gas in the storage tank and the fixed value tank into the filling container to obtain a mixed gas.

[0025] Preferably, when preparing a three-component or multi-component mixed gas, step S3 is repeated to obtain a three-component or multi-component mixed gas.

[0026] Preferably, after the component gases are filled in the storage tank and the fixed value tank, it is necessary to wait until the pressure difference between the storage tank and the fixed value tank is ≤0.05Mpa before weighing the fixed value tank; after the mixed gas is mixed, the content of each component in the storage tank and the fixed value tank is measured, and the deviation of the content of each component is ≤0.05%; the mixed gas in the storage tank and the fixed value tank is mixed by a membrane press 2-5 times / hour.

[0027] The multi-component mixed gas preparation device and use method of the present invention have the following advantages:

[0028] 1. The present invention adopts a membrane press to perform gas mixing operations, which significantly shortens the mixing time and improves production efficiency. Compared with traditional methods, the use of a membrane press reduces labor intensity and makes the operation more convenient and efficient.

[0029] 2. The present invention can accurately quantify the amount of each component gas filled in the storage tank by setting a constant value tank on the parallel pipeline and equipping it with a high-precision mass comparator. This design effectively avoids the influence of external factors such as temperature and gas compression factor on the accuracy of gas distribution, ensuring the high accuracy of gas distribution.

[0030] 3. The present invention can achieve the preparation of mixed gases of three or more components through simple repeated operation steps. When the device is designed with a single air intake branch line, the preparation of multi-component mixed gases can be completed by replacing the component gases and connecting them to the air intake branch line. When the device is designed with multiple air intake branch lines, it can not only complete the preparation of multi-component mixed gases, but also reduce the time for replacing component gases and improve production efficiency. The detachable connection between the air intake branch line and the constant value tank, as well as the detachable design of the filling container, increase the flexibility and applicability of the device.

[0031] 4. During the gas distribution process, the pressure of the storage tank and the set-value tank is strictly controlled to ensure that the weighing is carried out when the pressure is equal, thereby improving the accuracy of gas distribution; after the mixed gas is mixed, the content of each component in the storage tank and the set-value tank is measured to ensure that the deviation of the content of each component is within a very small range, thereby ensuring the quality of the mixed gas.

[0032] 5. Through precise valve control and pressure gauge monitoring, the gas distribution operation process is optimized, making the operation easier and safer; manual intervention and waiting time are reduced, and the overall gas distribution efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a structural schematic diagram of the mixed gas preparation device of the present invention;

[0034] Explanation of the marks in the figure: 101, first vacuum pipeline; 102, second vacuum pipeline; 103, first valve; 104, second valve; 201, main air intake pipeline; 202, branch air intake pipeline; 2021, branch air intake pipeline 1; 2022, air intake valve 1; 2023, branch air intake pipeline 2; 2024, air intake valve 2; 203, first pressure gauge; 204, main air intake valve; 205, first analysis pipeline; 2051, analysis valve 1; 301, first parallel pipeline; 3011, storage tank; 3012, second pressure gauge; 302, second parallel pipeline; 3021, gas distribution inlet valve; 3022, constant value tank; 3023, gas distribution outlet valve; 3024, weighing equipment; 3025, third pressure gauge; 401, return gas line pipe one; 402, return valve; 403, return gas line pipe two; 501, main gas outlet pipeline; 502, gas distribution outlet main valve; 503, membrane press; 504, filling valve; 505, filling container; 506, second analysis pipeline; 5061, analysis valve two. DETAILED DESCRIPTION

[0035] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0036] Example 1

[0037] like Figure 1 , which is a schematic structural diagram of a multi-component mixed gas preparation device of the present invention;

[0038] A multi-component mixed gas preparation device comprises a vacuum pipeline, an air intake pipeline, a gas distribution pipeline, a circulation pipeline and a filling pipeline connected by pipelines;

[0039] The vacuum pipeline includes a first vacuum pipeline 101 and a second vacuum pipeline 102, and the first vacuum pipeline 101 and the second vacuum pipeline 102 are connected;

[0040] The first vacuum pipeline 101 is provided with a first valve 103 , and the second vacuum pipeline 102 is provided with a second valve 104 .

[0041] The air intake pipeline includes an air intake main pipeline 201, and the air intake main pipeline 201 is provided with an air intake branch pipeline 202, a first pressure gauge 203, and an air distribution air intake main valve 204 connected in sequence;

[0042] The air intake pipeline 202 is provided with a group, including an air intake pipeline 1 2021 and an air intake valve 1 2022 connected to each other, and the air intake pipeline 202 is detachably connected to each component gas.

[0043] The gas distribution pipeline is composed of a first parallel pipeline 301 and a second parallel pipeline 302. The first parallel pipeline 301 is provided with a storage tank 3011. The second parallel pipeline 302 is provided with a gas distribution inlet valve 3021, a constant value tank 3022 and a gas distribution outlet valve 3023. A weighing device 3024 is provided under the constant value tank 3022.

[0044] The first parallel pipeline 301 and the second parallel pipeline 302 are equidistant in length, and the capacity of the storage tank 3011 is 12m 3 , the volume of the constant value tank 3022 is 60L; a second pressure gauge 3012 is provided on the storage tank 3011, a third pressure gauge 3025 is provided on the constant value tank 3022, the second parallel pipeline 302 is detachably connected to the constant value tank 3022, and the range of the second pressure gauge 3012 and the third pressure gauge 3025 is -15 to 600psi;

[0045] The weighing device 3024 adopts a high-precision mass comparator with a maximum measuring range of 150kg and a minimum weighing mass of 0.05g.

[0046] The circulation pipeline includes a return gas line pipe 1 401, a return valve 402 and a return gas line pipe 2 403 which are connected in sequence;

[0047] The filling pipeline includes a main gas outlet pipeline 501, on which a main gas distribution outlet valve 502, a membrane press 503, a filling valve 504 and a filling container 505 are sequentially connected. The filling container 505 is detachably connected to the main gas outlet pipeline 501.

[0048] The first vacuum pipeline 101 is connected to the main air intake pipeline 201, and the second vacuum pipeline 102 is connected to the main air outlet pipeline 501; one end of the first parallel pipeline 301 and the second parallel pipeline 302 is connected to the main air intake valve 204, and the other end is connected to the main air outlet pipeline 501; the return air circuit pipe 1 401 is connected to the main air intake valve 204, and the return air circuit pipe 2 403 is connected to the gas outlet of the membrane press 503.

[0049] Example 2

[0050] On the basis of Example 1, the air intake branch line 202 is provided with two groups, including an air intake branch line 1 2021 and an air intake valve 1 2022 connected thereto, and an air intake branch line 2 2023 and an air intake valve 2 2024 connected thereto.

[0051] Different from Example 1, the volume of the storage tank 3011 is 1.2m 3 , the volume of the constant value tank 3022 is 60L.

[0052] Example 3

[0053] On the basis of Example 1, the air intake branch lines 202 are provided with multiple groups, including multiple connected air intake branch lines and air intake valves.

[0054] The difference from Example 1 is that the volume of the storage tank 3011 is 36m 3 , the volume of the constant value tank 3022 is 60L.

[0055] Example 4

[0056] A method for preparing a two-component mixed gas, using the preparation device of embodiment 1, comprises the following steps:

[0057] S1. Open the second valve 104 on the second vacuum pipeline 102 to evacuate the storage tank 3011 and the fixed value tank 3022, and record the empty tank mass of the fixed value tank 3022 on the weighing device 3024, which can be recorded as 0;

[0058] S2, connect the first group of gas to the air inlet valve 2022, open the first valve 103 on the first vacuum pipeline 101 to evacuate, then close the first valve 103, open the air inlet valve 2022 on the air inlet branch line 2021, open the air distribution air inlet main valve 204 to charge the storage tank 3011 and the fixed value tank 3022 with the first group of gas, then close the air distribution air inlet main valve 204, when the pressure of the first group of gas in the storage tank 3011 and the fixed value tank 3022 is equal, calculate the gas mass of the first group of gas according to the weighing value of the fixed value tank 3022 on the weighing device 3024, see Table 1 for details;

[0059] S3, connect the second component gas to the air inlet valve 2022, open the first valve 103 on the first vacuum pipeline 101 to evacuate, then close the first valve 103, open the air inlet valve 2022 on the air inlet branch line 2021, open the air distribution air inlet main valve 204 to charge the storage tank 3011 and the fixed value tank 3022 with the second component gas, then close the air distribution air inlet main valve 204, when the pressure of the second component gas in the storage tank 3011 and the fixed value tank 3022 is equal, calculate the gas charging mass of the second component gas according to the weighing value of the fixed value tank 3022 on the weighing device 3024, see Table 1 for details;

[0060] S4, close the main gas inlet valve 204 and the charging valve 504, open the main gas outlet valve 502 and the return valve 402, start the membrane press 503 to circulate and mix the mixed gas in the storage tank 3011 and the fixed value tank 3022, the mixed gas is mixed by the membrane press 503 2 times / hour, the content of each component in the storage tank 3011 and the fixed value tank 3022 is measured, the deviation of the content of each component is ≤0.05%, the mixed gas is mixed, and the membrane press 503 is closed;

[0061] S5. Close the return valve 402, open the filling valve 504, start the membrane press 503 again, and fill the mixed gas in the storage tank 3011 and the constant value tank 3022 into the filling container 505 to obtain a two-component mixed gas, see Table 1 for details.

[0062] Table 1 Two-component mixed gas filling mass and gas distribution volume concentration

[0063]

[0064] In the two-component mixed gas configured in Example 4, the main purpose of 20% fluorine gas / nitrogen gas is as a cleaning gas in semiconductor manufacturing process, cleaning silicon-containing chambers; the main purpose of 1% phosphine / hydrogen gas is as an N-type doping source for silicon materials in semiconductor manufacturing; the main purpose of 5% diborane / nitrogen gas is as a P-type doping source for silicon materials in semiconductor manufacturing, as well as epitaxial growth, passivation, diffusion and ion implantation of silicon and germanium.

[0065] Example 5

[0066] A method for preparing a three-component mixed gas, using the configuration device of Example 1, repeating step S3 once on the basis of Example 4, in step S4, turning on the membrane press 503 to circulate and mix the mixed gas in the storage tank 3011 and the fixed value tank 3022, the mixed gas is mixed 3 times / hour by the membrane press 503, the content of each component in the storage tank 3011 and the fixed value tank 3022 is measured, the deviation of the content of each component is ≤0.05%, the mixed gas is mixed, and finally a three-component mixed gas is obtained, see Table 2 for details.

[0067] Table 2 Three-component mixed gas filling mass and gas distribution volume concentration

[0068]

[0069] In the three-component mixed gas configured in Example 5, 0.95% fluorine / 1.25% krypton / neon and 0.95% fluorine / 3.5% argon / neon are mainly used as laser gases for semiconductor lithography processes; 3% diborane / 5% hydrogen / boron trifluoride is mainly used in semiconductor ion implantation processes.

[0070] Example 6

[0071] A method for preparing a six-component mixed gas, using the configuration device of Example 1, repeating step S3 four times on the basis of Example 4, in step S4, turning on the membrane press 503 to circulate and mix the mixed gas in the storage tank 3011 and the fixed value tank 3022, the mixed gas is mixed by the membrane press 503 5 times / hour, the content of each component in the storage tank 3011 and the fixed value tank 3022 is measured, the deviation of the content of each component is ≤0.05%, the mixed gas is mixed, and finally a standard eight-component mixed gas is obtained, see Table 3 for details.

[0072] Six-component Rofin gas is 19% N2 / 6% CO / 4% CO2 / 3% Xe / 3% O2 / He. In Rofin gas, oxygen is an oxidizing gas and carbon monoxide is a flammable gas. The two are incompatible and are prone to fire if in direct contact. Therefore, the filling order of the mixed gas is: carbon monoxide, carbon dioxide, xenon, helium, oxygen, and nitrogen.

[0073] Table 3 Six-component mixed gas filling mass and gas distribution volume concentration

[0074]

[0075] In the six-component mixed gas configured in Example 6, the main purpose of Rofin gas is a carbon dioxide laser to generate a laser beam in the laser.

[0076] Comparative Example 1

[0077] The difference between the mixed gas configuration method in this comparative example and that in Example 4 is that the pressure gauge on the storage tank is used to set the component detection concentration and gas distribution error of the mixed gas, as shown in Table 4 for details.

[0078] Table 4 Comparison of gas distribution concentrations of Example 4 and Comparative Example 1

[0079]

[0080] It can be seen from Table 4 that the gas distribution concentration deviation of the mixed gas preparation device of the present invention is in the range of 0.01%-0.04%, while the gas distribution concentration deviation of Comparative Example 1 is in the range of 0.12%-1.8%. The gas distribution concentration deviation of the preparation device and method of the present invention is much lower than that of Comparative Example 1.

[0081] The difference between the mixed gas preparation method in this comparative example and that in Example 4 is that the storage tank is statically mixed at room temperature in the range of 15°C-30°C. The mixing time is detailed in Table 5.

[0082] Table 5 Comparison of mixing time between Example 4 and Comparative Example 1

[0083] Mixed gas Example 4 Mixing time Comparative Example 1 Mixing time 20% fluorine / nitrogen 0.5h 8.0h 1% Phosphine / Hydrogen 0.8h 14.1h 5% Diborane / Nitrogen 0.5h 8.2h

[0084] The present invention adopts a membrane press to perform gas mixing operations, which significantly shortens the mixing time and improves production efficiency; compared with traditional methods, the use of the membrane press reduces labor intensity and makes the operation more convenient and efficient.

[0085] Comparative Example 2

[0086] The difference between the mixed gas configuration method in this comparative example and that in Example 5 is that the pressure gauge on the storage tank is used to set the component detection concentration and gas distribution error of the mixed gas, as shown in Table 6 for details.

[0087] Table 6 Comparison of gas distribution concentrations of Example 5 and Comparative Example 2

[0088]

[0089] It can be seen from Table 6 that the gas distribution concentration deviation of the mixed gas preparation device of the present invention is in the range of 0%-0.05%, while the gas distribution concentration deviation of Comparative Example 2 is in the range of 0.11%-0.31%. The gas distribution concentration deviation of the preparation device and method of the present invention is much lower than that of Comparative Example 2.

[0090] The present invention can accurately quantify the amount of each component gas filled in the storage tank by setting a constant value tank on the parallel pipeline and equipping it with a high-precision mass comparator. This design effectively avoids the influence of external factors such as temperature and gas compression factor on the accuracy of gas distribution, ensuring the high accuracy of gas distribution.

[0091] The difference between the mixed gas preparation method in this comparative example and that in Implementation 5 is that the storage tank is statically mixed at room temperature in the range of 15°C-30°C. The mixing time is detailed in Table 7.

[0092] Table 7 Comparison of mixing time between Example 5 and Comparative Example 2

[0093]

[0094] The present invention adopts a membrane press to perform gas mixing operations, which significantly shortens the mixing time and improves production efficiency; compared with traditional methods, the use of the membrane press reduces labor intensity and makes the operation more convenient and efficient.

[0095] Comparative Example 3

[0096] The difference between the mixed gas configuration method in this comparative example and that in Example 6 is that the pressure gauge on the storage tank is used to set the component detection concentration and gas distribution error of the mixed gas, as shown in Table 8.

[0097] Table 8 Comparison of gas distribution concentrations of Example 6 and Comparative Example 3

[0098]

[0099]

[0100] It can be seen from Table 8 that the gas distribution concentration deviation of the mixed gas preparation device of the present invention is in the range of 0%-0.03%, while the gas distribution concentration deviation of Comparative Example 3 is in the range of 0.05%-0.59%. The gas distribution concentration deviation of the preparation device and method of the present invention is much lower than that of Comparative Example 3.

[0101] The present invention can accurately quantify the amount of each component gas filled in the storage tank by setting a constant value tank on the parallel pipeline and equipping it with a high-precision mass comparator. This design effectively avoids the influence of external factors such as temperature and gas compression factor on the accuracy of gas distribution, ensuring the high accuracy of gas distribution.

[0102] The difference between the mixed gas preparation method in this comparative example and that in Implementation 6 is that the storage tank is statically mixed at room temperature in the range of 15°C-30°C. The mixing time is detailed in Table 9.

[0103] Table 9 Comparison of mixing time between Example 6 and Comparative Example 3

[0104] Mixed gas Example 6 Mixing time Comparative Example 3 Mixing time Rofin 1.2h 8.2h

[0105] The present invention adopts a membrane press to perform gas mixing operations, which significantly shortens the mixing time and improves production efficiency; compared with traditional methods, the use of the membrane press reduces labor intensity and makes the operation more convenient and efficient.

[0106] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A multi-component mixed gas preparation device, It is characterized in that Including vacuum pipelines, air intake pipelines, air distribution pipelines, circulation pipelines and filling pipelines connected by pipelines; The vacuum pipeline comprises a first vacuum pipeline (101) and a second vacuum pipeline (102), wherein the first vacuum pipeline (101) and the second vacuum pipeline (102) are connected; The air intake pipeline comprises an air intake main pipeline (201), and the air intake main pipeline (201) is provided with an air intake branch pipeline (202), a first pressure gauge (203), and an air distribution air intake main valve (204) which are connected in sequence; The gas distribution pipeline is composed of a first parallel pipeline (301) and a second parallel pipeline (302); a storage tank (3011) is arranged on the first parallel pipeline (301); a gas distribution inlet valve (3021), a constant value tank (3022) and a gas distribution outlet valve (3023) are arranged on the second parallel pipeline (302); a weighing device (3024) is arranged under the constant value tank (3022); The circulation pipeline comprises a return gas line pipe 1 (401), a return valve (402) and a return gas line pipe 2 (403) which are connected in sequence; The filling pipeline comprises a gas outlet main pipeline (501), on which a gas distribution gas outlet main valve (502), a membrane press (503), a filling valve (504) and a filling container (505) which are connected in sequence are arranged; The first vacuum pipeline (101) is connected to the main air intake pipeline (201), and the second vacuum pipeline (102) is connected to the main air outlet pipeline (501); one end of the first parallel pipeline (301) and the second parallel pipeline (302) are connected to the main air intake valve (204), and the other end is connected to the main air outlet pipeline (501); the return air line pipe 1 (401) is connected to the main air intake valve (204), and the return air line pipe 2 (403) is connected to the gas outlet of the membrane press (503).

2. A multi-component mixed gas preparation device according to claim 1, It is characterized in that The first vacuum pipeline (101) is provided with a first valve (103), and the second vacuum pipeline (102) is provided with a second valve (104).

3. A multi-component mixed gas preparation device according to claim 1, It is characterized in that The first parallel pipeline (301) and the second parallel pipeline (302) are equidistant in length, and the volume of the storage tank (3011) is 20-600 times that of the constant value tank (3022); a second pressure gauge (3012) is provided on the storage tank (3011), and a third pressure gauge (3025) is provided on the constant value tank (3022).

4. A multi-component mixed gas preparation device according to claim 1, It is characterized in that The weighing device (3024) adopts a high-precision mass comparator.

5. A multi-component mixed gas preparation device according to claim 1, It is characterized in that The main air inlet pipeline (201) is also provided with a first analysis pipeline (205), and an analysis valve 1 (2051) is provided on the first analysis pipeline (205); the main air outlet pipeline (501) is also provided with a second analysis pipeline (506), and an analysis valve 2 (5061) is provided on the second analysis pipeline (506).

6. A multi-component mixed gas preparation device according to claim 1, It is characterized in that The air intake branch line (202) comprises an air intake branch line 1 (2021) and an air intake valve 1 (2022) connected to each other, and at least one group of the air intake branch line (202) is provided.

7. A multi-component mixed gas preparation device according to claim 1, It is characterized in that The second parallel pipeline (302) is detachably connected to the constant value tank (3022); the filling container (505) is detachably connected to the main gas outlet pipeline (501).

8. A method for using the multi-component mixed gas preparation device according to any one of claims 1 to 7, It is characterized in that The following steps are involved: S1. Open the second valve (104) on the second vacuum pipeline (102) to evacuate the storage tank (3011) and the fixed value tank (3022), and record the empty tank mass of the fixed value tank (3022) on the weighing device (3024); S2, connecting the first component gas to the first intake valve (2022), opening the first valve (103) on the first vacuum pipeline (101) to evacuate, then closing the first valve (103), opening the first intake valve (2022) on the first intake branch line (2021), opening the gas distribution intake main valve (204) to inflate the storage tank (3011) and the fixed value tank (3022), then closing the gas distribution intake main valve (204), and when the pressure of the first component gas in the storage tank (3011) and the fixed value tank (3022) is equal, calculating the gas mass of the first component gas according to the weighing value of the fixed value tank (3022) on the weighing device (3024); S3, connecting the second component gas to the first intake valve (2022), opening the first valve (103) on the first vacuum pipeline (101) to evacuate, then closing the first valve (103), opening the first intake valve (2022) on the first intake branch line (2021), opening the gas distribution intake main valve (204) to inflate the storage tank (3011) and the fixed value tank (3022), then closing the gas distribution intake main valve (204), and when the pressure of the second component gas in the storage tank (3011) and the fixed value tank (3022) is equal, calculating the gas mass of the second component gas according to the weighing value of the fixed value tank (3022) on the weighing device (3024); S4, close the gas distribution inlet main valve (204) and the charging valve (504), open the gas distribution outlet main valve (502) and the return valve (402), start the membrane press (503) to circulate and mix the mixed gas in the storage tank (3011) and the constant value tank (3022) until the mixed gas is mixed, and close the membrane press (503); S5. Close the return valve (402), open the filling valve (504), start the membrane press (503) again, and fill the mixed gas in the storage tank (3011) and the constant value tank (3022) into the filling container (505) to obtain a mixed gas.

9. A method for using a multi-component mixed gas preparation device according to claim 8, It is characterized in that When preparing a three-component or multi-component mixed gas, repeat step S3 to obtain a three-component or multi-component mixed gas.

10. A method for using a multi-component mixed gas preparation device according to claim 8, It is characterized in that After the component gases are filled in the storage tank (3011) and the fixed value tank (3022), it is necessary to wait for the pressure difference between the storage tank (3011) and the fixed value tank (3022) to be ≤0.05Mpa before weighing the fixed value tank (3022); after the mixed gas is mixed, the content of each component in the storage tank (3011) and the fixed value tank (3022) is measured, and the deviation of the content of each component is ≤0.05%; the mixed gas in the storage tank (3011) and the fixed value tank (3022) is mixed by the membrane press (503) 2-5 times / hour.

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