Diamond trimmer based on brazing process particle matrix graphical distribution and trimming device of diamond trimmer
Through the diamond trimmer and leveling device based on the pattern distribution of particle matrix based on the brazing process, combined with servo motor drive, vacuuming and cooling technology, the combination of dust and heat treatment during polishing pads is solved, and efficient grinding and reduction are achieved cost effect.
Patent Information
- Application Number
- CN202411650550.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-19
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2044-11-19
AI Technical Summary
In the prior art, dust treatment and heat treatment cannot be effectively combined during the polishing pad dressing, resulting in increased equipment costs and no competitive advantage in pricing of polishing pads.
Using a diamond trimmer and its leveling device based on the pattern distribution of particle matrix based on the brazing process, the synchronous transmission cooperation between the main synchronous wheel and the slave synchronous wheel is driven by the servo motor, and the grinding disc with axisymmetric staggered distribution is used to achieve efficient grinding, and combined with Drive bevel gears and vacuum cleaners for multi-point vacuum cleaning, and use a booster three-way valve and a refrigerator for heat cooling.
It realizes efficient dust and heat treatment, improves the grinding quality of polishing pads, reduces the rework rate, reduces equipment costs, and improves the grinding efficiency and competitiveness of polishing pads.
Smart Images

Figure CN119159509A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of polishing pad processing, and in particular to a diamond dresser and a flattening device thereof based on a brazing process particle matrix graphical distribution. Background Art
[0002] The diamond dresser is a dressing wheel on the polishing equipment. It is mainly placed on a matching polishing machine disk and rotates in a planetary motion. The diamond sheet on the dresser is used to grind the surface of the polishing pad so that the polishing pad meets the specified parameters. With the development of current industrial technology, the surface of the polishing pad can be ground and smoothed based on the graphical distribution of the brazing process particle matrix.
[0003] In the prior art (the patent application with announcement number CN218904866U and patent name of double-sided CMP polishing machine diamond dresser), the base wheel, mounting groove, tenon pin, gear ring, reinforcing plate, circular groove, diamond pellet and tenon interface are arranged to increase the overall strength of the dresser in a thinner range by the arrangement of the reinforcing plate. In the process of implementing the technical solution, it is found that the prior art at least has the problem of dust treatment and friction heat dissipation generated during polishing pad dressing that is not disclosed.
[0004] During the grinding of the polishing pad surface, traditional flattening devices, such as diamond dressers, mostly only grind the polishing pad surface flat, while the dust and heat generated by the grinding of the polishing pad surface are not solved. It is necessary to purchase dust removal equipment and heat dissipation equipment separately to solve the particulate dust and friction heat generated during the grinding of the polishing pad, which greatly increases the equipment cost and makes the pricing of the polishing pad not competitive. Summary of the invention
[0005] The present application aims to at least solve the technical problem in the prior art that it is not possible to use a combination of dust treatment, heat treatment and rapid feeding to achieve efficient grinding of polishing pads with axially symmetrically staggered distribution and different shapes of grinding discs. To this end, the present application proposes a diamond dresser and a flattening device based on a brazing process particle matrix graphical distribution.
[0006] According to the embodiment of the present application, the flattening device based on the graphical distribution of the particle matrix of the brazing process includes: a bracket, the top of which is fixedly connected to a ring frame, and the top of which is fixedly connected to a dust cover; The top of the dust cover is fixedly connected with a top cylinder, the bottom of the bracket is fixedly connected with a base, and the top of the base is connected with a bottom cylinder; The inner cavity of the annular frame is provided with a flattening assembly, and the flattening assembly includes a servo motor, and the servo motor is fixed to one side of the dust cover through a support, and the output shaft of the servo motor is fixedly connected to a main synchronous wheel, and the side of the main synchronous wheel away from the servo motor is connected to a slave synchronous wheel through a synchronous belt transmission, and the inner cavity of the slave synchronous wheel is fixedly connected to a rotating shaft that rotates with the dust cover, and the inner cavity of the top cylinder is provided with a dust collection assembly, and the dust collection assembly includes a driving bevel gear, and the driving bevel gear is fixed to the side of the rotating shaft close to the slave synchronous wheel, and the driving bevel gear A driven bevel gear is meshed with the top of the wheel, and the inner cavity of the driven bevel gear is fixedly connected to a concave rod frame, and a rotating sleeve is rotatably connected to the center of the concave rod frame, and a dust removal assembly is arranged on the side of the dust suction assembly away from the dust cover, and the dust removal assembly includes a dust exhaust pipe, and the dust exhaust pipe is connected to the exhaust port of the top cylinder, and an exhaust valve is arranged on the dust exhaust pipe, and the end of the dust exhaust pipe away from the top cylinder is connected to a dust collecting cylinder fixedly matched with the bracket, and the inner cavity of the dust collecting cylinder is respectively provided with an upper filter frame and a lower filter frame from top to bottom, and the inner cavity of the bottom cylinder is provided with a lifting assembly.
[0007] Preferably, a driving circular gear is fixedly connected to the bottom of the rotating shaft, and a first flattened toothed disc and a second flattened toothed disc are respectively meshed around the driving circular gear, and a fixed gear ring meshing with the first flattened toothed disc and the second flattened toothed disc is fixedly connected to the inner wall of the annular frame.
[0008] Preferably, a connecting rod is fixedly connected to the rotating sleeve, and the other end of the connecting rod is hinged with a piston that slides with the top cylinder, and the air suction port of the top cylinder is connected to a Y-shaped dust suction pipe, an air suction valve is provided on the Y-shaped dust suction pipe, and the bottom end of the Y-shaped dust suction pipe is connected to a large-diameter dust suction head used in conjunction with the dust cover.
[0009] Preferably, the bottom of the dust collecting cylinder is connected to a boosting three-way valve, and a pressure gauge is provided at the inner end of the boosting three-way valve, the bottom end of the boosting three-way valve is connected to a first boosting pipe used in conjunction with the base and the bottom cylinder, and the exhaust port of the bottom cylinder is connected to a pressure relief pipe, and a pressure relief valve is provided on the pressure relief pipe.
[0010] Preferably, the lifting assembly includes a vertical slot, which is opened on a side of the bracket close to the annular frame, and the inner cavity of the bottom cylinder is slidably connected to a sliding seat, the bottom of the sliding seat is fixedly connected to a return spring used in conjunction with the base, and the top of the sliding seat is fixedly connected to a lifting rod slidably matched with the bottom cylinder, the top of the lifting rod is fixedly connected to a dust collecting box, and the top of the dust collecting box is connected to a placing table used in conjunction with the annular frame, the placing table is fixedly connected with sliding blocks slidably matched with the vertical slots on all sides, and the inner cavity of the placing table is provided with a mesh plate used in conjunction with the driving circular gear, the first leveling toothed disc and the second leveling toothed disc.
[0011] Preferably, the first flattened toothed disc and the second flattened toothed disc are distributed in an axisymmetric and staggered state along the central axis of the driving circular gear, and the first flattened toothed disc and the second flattened toothed disc have the same ring diameter.
[0012] Preferably, the top and bottom of the driving circular gear are fixedly connected with anti-slip plates used in conjunction with the first and second leveling toothed discs, and the bottom of the inner cavity of the annular frame is fixedly connected with an extension end used in conjunction with the first and second leveling toothed discs.
[0013] Preferably, the Y-shaped dust suction tube and the large-diameter dust suction head are distributed in a triangular equidistant state along the central axis of the dust cover, and an arc chamfer is provided at the inner end of the dust cover close to the large-diameter dust suction head.
[0014] Preferably, pull-out boxes are arranged around the inner cavity of the dust box, convex card blocks are integrally formed around the bottom of the annular frame, and concave card slots for use with the convex card blocks are opened around the top of the placement table.
[0015] A diamond dresser based on the graphical distribution of brazing process particle matrix. According to the flattening device based on the graphical distribution of brazing process particle matrix, the top and bottom of the first flattening toothed disc inner cavity are provided with mounting grooves around them, and the inner cavity of the mounting grooves is respectively provided with fixed end covers and arc-shaped polishing blocks, and the inner cavity of the second flattening toothed disc inner cavity is provided with mounting holes around them, and the inner cavity of the mounting holes is provided with circular polishing blocks.
[0016] The beneficial effects of the present application are as follows: during the grinding of the polishing pad, the servo motor first provides a unified driving source, and the main synchronous wheel and the slave synchronous wheel are synchronously driven, and under the meshing transmission cooperation of the fixed gear ring, the rotating shaft drives the first and second flattening toothed discs symmetrically and staggeredly distributed through the driving circular gear to achieve efficient grinding of the polishing pad, so as to prevent omissions and inadequate grinding areas of the polishing pad, and no rework is required, thereby improving the grinding and forming quality of the polishing pad. Subsequently, the meshing transmission cooperation of the driving bevel gear and the three sets of driven bevel gears, the three sets of concave rod frames drive the three sets of rotating sleeves, connecting rods and pistons to perform reciprocating work, and the large-caliber dust suction heads on the three sets of Y-shaped dust suction pipes perform multi-point dust suction on the particulate dust generated during the grinding of the polishing pad to prevent the accumulation of particulate dust. The three sets of dust exhaust pipes will pressurize the absorbed particulate dust and discharge it into the three sets of dust collecting cylinders at the same time, and the three sets of upper filter frames and lower filter frames will perform double filtration treatment. The obtained pure gas will be pressurized again by the three sets of boosting three-way valves, and the boosting pressure will be provided by the three sets of first boosting pipes. Then, the boosted pressure gas in the three sets of first boosting pipes will be supplied to the bottom cylinder. Under the cooperation of pressure force, the three sets of slide seats, reset springs and lifting rods are forced to drive the three sets of dust collecting boxes and placement tables to achieve the lifting effect, which provides convenience for workers to place the polishing pads on the placement table and plays the role of fast loading and unloading. The combination of dust treatment, heat treatment and fast loading is adopted to achieve efficient grinding effect on the polishing pad with axially symmetrical and staggered distribution and different shapes of grinding discs.
[0017] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of a flattening device based on the graphical distribution of the particle matrix of the brazing process according to an embodiment of the present application; Figure 2 It is a bottom view of the structure of a flattening device based on the graphical distribution of the particle matrix of the brazing process according to an embodiment of the present application; Figure 3 It is a partial front view of the structure of a flattening device based on the graphical distribution of the particle matrix of the brazing process according to an embodiment of the present application; Figure 4is a side view of the structure of the annular frame, the dust cover and the leveling assembly according to an embodiment of the present application; Figure 5 is a top cross-sectional view of the annular frame, dust cover and leveling assembly structure according to an embodiment of the present application; Figure 6 is a bottom view of the flattening assembly structure according to an embodiment of the present application; Figure 7 This is a front view of the top cylinder, base, bottom cylinder, dust suction assembly, dust removal assembly, lifting assembly and cooling assembly according to an embodiment of the present application; Figure 8 It is a front cross-sectional view of the top cylinder, the leveling assembly and the dust collection assembly structure according to an embodiment of the present application; Fig. 9 is a rear view of the structure of the leveling assembly and the dust collection assembly according to an embodiment of the present application; Fig.10 is a partial bottom view of the structure of the leveling assembly and the dust collection assembly according to an embodiment of the present application; Fig.11 is a partial cross-sectional view of the bottom cylinder and the dust collection assembly structure according to an embodiment of the present application; Fig.12 is a side cross-sectional view of the dust removal assembly structure according to an embodiment of the present application; Fig.13 This is a front view of the base, bottom tube and lifting assembly structure according to an embodiment of the present application; Fig.14 is a bottom cross-sectional view of the base, bottom tube and lifting assembly structure according to an embodiment of the present application; Fig.15 is a partial exploded view of the lifting assembly structure according to an embodiment of the present application; Fig.16 This is a front view of the cooling component structure according to an embodiment of the present application; Fig.17 is a bottom view of the bracket, annular frame, dust cover and base structure according to an embodiment of the present application; Fig.18 is a top view of a first leveling toothed disc structure according to an embodiment of the present application; Fig.19 is an exploded view of the structure of a first leveling toothed disc according to an embodiment of the present application; Fig. 20 is a top view of a second leveling toothed disc structure according to an embodiment of the present application; Fig.21 It is a structural exploded view of the second leveling sprocket according to an embodiment of the present application.
[0020] Icons: 1. Bracket; 2. Ring frame; 3. Dust cover; 4. Top cylinder; 5. Base; 6. Bottom cylinder; 7. Leveling assembly; 71. Servo motor; 72. Main synchronous wheel; 73. Slave synchronous wheel; 74. Rotating shaft; 75. Driving circular gear; 76. First leveling gear plate; 77. Second leveling gear plate; 78. Fixed gear ring; 8. Dust suction assembly; 81. Driving bevel gear; 82. Driven bevel gear; 83. Concave rod frame; 84. Rotating sleeve; 85. Connecting rod; 86. Piston; 87. Y-type dust suction pipe; 88. Large-caliber dust suction head; 9. Dust removal assembly; 91. Dust exhaust pipe; 92. Dust collection cylinder; 93. Upper filter rack; 94. Lower filter rack; 95. Boost three-way valve; 96. Pressure gauge; 97. First boost pipe; 98. Pressure relief pipe; 1 0. Lifting assembly; 101. Vertical slot; 102. Sliding seat; 103. Reset spring; 104. Lifting rod; 105. Dust box; 106. Sliding block; 107. Placing table; 108. Screen plate; 11. Cooling assembly; 111. Second boost pipe; 112. Four-way joint; 113. Refrigerator; 114. Bend pipe; 115. Arc main pipe; 116. Air outlet; 117. First air guide port; 118. Second air guide port; 12. Pull-out box; 13. Convex card block; 14. Concave card slot; 15. Mounting slot; 16. Fixed end cover; 17. Arc polishing block; 18. Double-head screw; 19. Nut; 20. Mounting hole; 21. Single-head screw; 22. Round polishing block; 23. First cleaning head; 24. Second cleaning head. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.
[0022] In order to make the purpose, technical solutions and advantages of the implementation methods of this application clearer, the technical solutions in the implementation methods of this application will be clearly and completely described below in conjunction with the drawings in the implementation methods of this application. Obviously, the described implementation methods are part of the implementation methods of this application, not all of the implementation methods. Based on the implementation methods in this application, all other implementation methods obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0023] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0024] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0026] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0027] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0028] like Figure 1-Figure 21 As shown, the flattening device based on the graphical distribution of the particle matrix of the brazing process according to the embodiment of the present application includes: a bracket 1, a ring frame 2 is fixedly connected to the top of the bracket 1, and a dust cover 3 is fixedly connected to the top of the ring frame 2, so that a closed space is formed between the ring frame 2 and the dust cover 3, which is beneficial to the dust prevention work of the particle dust; The top of the dust cover 3 is fixedly connected with a top tube 4, and the bottom of the bracket 1 is fixedly connected with a base 5, the front of the base 5 is fixedly connected with a PLC controller, and the top of the base 5 is connected with a bottom tube 6, and an air inlet hole is left between the base 5 and the bottom tube 6; The inner cavity of the annular frame 2 is provided with a flattening assembly 7, wherein the flattening assembly 7 is provided with a polishing block as a grinding and flattening carrier. The polishing block can be an arc-shaped polishing block 17 and a circular polishing block 22, and the polishing blocks are arranged in an axially symmetrical staggered distribution manner. At the same time, the polishing blocks can be of different shapes, such as circular, arc-shaped, etc. The polishing block is pre-processed by a solder whose melting point is lower than that of the weldment and the weldment is heated to the melting temperature of the solder. Then, the gap of the solid workpiece is filled with liquid solder to connect the metals. The grinding particles on the polishing block processed by the brazing process are distributed in a matrix pattern and reach the micron level, making the polishing block structure more compact and stable. The inner cavity of the top cylinder 4 is provided with a dust suction component 8 used in conjunction with the dust cover 3, and a dust removal component 9 is provided on the side of the dust suction component 8 away from the dust cover 3. The particulate dust generated during the grinding of the polishing pad is first sucked and then dusted to prevent the particulate dust from accumulating in the annular frame 2 and the dust cover 3 and affecting the grinding effect of the polishing pad. The inner cavity of the bottom cylinder 6 is provided with a lifting component 10 to facilitate the turning over or loading and unloading of the polishing pad.
[0029] like Figures 4 to 16 As shown, the leveling component 7 includes a servo motor 71, which is fixed to one side of the dust cover 3 through a support, and the servo motor 71 provides a unified driving source, and the output shaft of the servo motor 71 is fixedly connected to a main synchronous wheel 72, and the side of the main synchronous wheel 72 away from the servo motor 71 is connected to a slave synchronous wheel 73 through a synchronous belt transmission, and the main synchronous wheel 72 and the slave synchronous wheel 73 are synchronously driven, and the inner cavity of the slave synchronous wheel 73 is fixedly connected to a rotating shaft 74 that rotates with the dust cover 3, and the bottom of the rotating shaft 74 is fixedly connected to a driving circular gear 75. The first flattening toothed disc 76 and the second flattening toothed disc 77 are respectively meshed around the driving circular gear 75, and the inner wall of the annular frame 2 is fixedly connected with a fixed gear ring 78 meshing with the first flattening toothed disc 76 and the second flattening toothed disc 77. Under the meshing transmission cooperation of the fixed gear ring 78, the rotating shaft 74 drives the first flattening toothed disc 76 and the second flattening toothed disc 77, which are symmetrically distributed and staggered, through the driving circular gear 75 to achieve efficient grinding effect on the polishing pad, so as to prevent the polishing pad from being missed and not in place, without rework, and improve the grinding and forming quality of the polishing pad; The first and second leveling toothed discs 76 and 77 are arranged in an axially symmetrical and staggered state along the central axis of the driving circular gear 75, and the polishing pad is staggeredly ground by the leveling discs of different shapes and arranged in an axially symmetrical and staggered state, and the first and second leveling toothed discs 76 and 77 have the same ring diameter, so that the two groups of first and second leveling toothed discs 76 and 77 can perform stable circular rotation along the fixed gear ring 78, and the polishing pad is comprehensively and effectively ground. Anti-dropping plates used in conjunction with the first and second leveling toothed discs 76 and 77 are fixedly connected around the top and bottom of the driving circular gear 75, and an extension end used in conjunction with the first and second leveling toothed discs 76 and 77 is fixedly connected to the bottom of the inner cavity of the annular frame 2. Under the premise that the first and second leveling toothed discs 76 and 77 can be installed normally, the first and second leveling toothed discs 76 and 77 are prevented from falling off, especially the stability of the polishing pad after unloading after grinding is completed.
[0030] The dust collection assembly 8 includes a driving bevel gear 81, which is fixed to the side of the rotating shaft 74 close to the synchronous wheel 73, and the top of the driving bevel gear 81 is meshed with a driven bevel gear 82. The meshing transmission of the driving bevel gear 81 and the three sets of driven bevel gears 82 is matched. The inner cavity of the driven bevel gear 82 is fixedly connected to a concave rod frame 83, and the center of the concave rod frame 83 is rotatably connected to a rotating sleeve 84. A connecting rod 85 is fixedly connected to the rotating sleeve 84, and the other end of the connecting rod 85 is hinged with a piston 86 that slides with the top cylinder 4. The three sets of concave rods The frame 83 drives the three sets of rotating sleeves 84, connecting rods 85 and pistons 86 to perform reciprocating work, and the air inlet of the top cylinder 4 is connected with a Y-shaped dust suction pipe 87, on which a suction valve is arranged, and the bottom end of the Y-shaped dust suction pipe 87 is connected with a large-caliber dust suction head 88 used in conjunction with the dust cover 3. The negative pressure suction force generated by the three sets of pistons 86 in the three sets of bottom cylinders 6 is used by the large-caliber dust suction heads 88 on the three sets of Y-shaped dust suction pipes 87 to perform multi-point dust suction treatment on the particulate dust generated during the grinding of the polishing pad, so as to prevent the accumulation of particulate dust from affecting the grinding quality of the polishing pad; The Y-shaped dust suction tube 87 and the large-diameter dust suction head 88 are distributed in a triangular equidistant state along the central axis of the dust cover 3, so that the Y-shaped dust suction tube 87 and the large-diameter dust suction head 88 are reasonably distributed, and the particulate dust dispersed in the dust cover 3 is comprehensively vacuumed. In addition, an arc chamfer is provided at the inner end of the dust cover 3 near the large-diameter dust suction head 88 to prevent the particulate dust from accumulating in the area of the dust cover 3 near the large-diameter dust suction head 88, which is beneficial to the vacuuming of the particulate dust.
[0031] The dust removal assembly 9 includes a dust exhaust pipe 91, which is connected to the exhaust port of the top cylinder 4, and an exhaust valve is provided on the dust exhaust pipe 91. One end of the dust exhaust pipe 91 away from the top cylinder 4 is connected to a dust collecting cylinder 92 fixedly matched with the bracket 1. The three groups of dust exhaust pipes 91 pressurize and discharge the absorbed particulate dust into the three groups of dust collecting cylinders 92, and the inner cavity of the dust collecting cylinder 92 is respectively provided with an upper filter frame 93 and a lower filter frame 94 from top to bottom. The three groups of upper filter frames 93 and lower filter frames 94 perform double filtering treatment to obtain pure gas. The bottom of the dust collecting cylinder 92 is connected to a boosting three-way valve 95, and the inner end of the boosting three-way valve 95 is provided with a pressure gauge 96, and the bottom end of the boosting three-way valve 95 is connected to a first boosting pipe 97 used in conjunction with the base 5 and the bottom cylinder 6. The obtained pure gas is pressurized again by three groups of boosting three-way valves 95, and the boosting pressure supply is provided through three groups of first boosting pipes 97, and the exhaust port of the bottom cylinder 6 is connected to a pressure relief pipe 98, and a pressure relief valve is provided on the pressure relief pipe 98, which is beneficial to the pressure relief work of the bottom pressure of the inner cavity of the bottom cylinder 6.
[0032] The lifting assembly 10 includes a vertical slot 101, which is opened on one side of the bracket 1 close to the annular frame 2, and the inner cavity of the bottom cylinder 6 is slidably connected with a slide seat 102, the bottom of the slide seat 102 is fixedly connected with a return spring 103 used in conjunction with the base 5, and the top of the slide seat 102 is fixedly connected with a lifting rod 104 that slidably cooperates with the bottom cylinder 6, the top of the lifting rod 104 is fixedly connected with a dust box 105, and the top of the dust box 105 is connected to a placement table 107 that is used in conjunction with the annular frame 2, and the placement table 107 is fixedly connected with sliders 106 that slidably cooperate with the vertical slot 101 on all sides, and the three groups of first increase The pressurized gas in the pressure tube 97 is supplied to the bottom tube 6. Under the pressure force, the three sets of slide seats 102, the return springs 103 and the lifting rods 104 are forced to drive the three sets of dust boxes 105 and the placement table 107 to achieve the lifting effect, which provides convenience for workers to place the polishing pad on the placement table 107 and plays a role in fast loading and unloading. The inner cavity of the placement table 107 is provided with a mesh plate 108 used in conjunction with the driving circular gear 75, the first flattening toothed disc 76 and the second flattening toothed disc 77, so that the granular dust generated on the bottom surface of the polishing pad can fall into the dust box 105 through the mesh plate 108, which is convenient for later cleaning. Pull-out boxes 12 are provided around the inner cavity of the dust box 105, and handles are fixedly connected to the outer side of the pull-out box 12 to remove and clean the particulate dust accumulated in the dust box 105. Convex card blocks 13 are integrally formed around the bottom of the annular frame 2, and concave card grooves 14 used in conjunction with the convex card blocks 13 are provided around the top of the placement table 107, which play a role in precise docking between the annular frame 2 and the placement table 107 to prevent the placement table 107 from being misaligned and skewed with the annular frame 2 during the lifting and lowering adjustment.
[0033] like Figure 7 and Fig.16As shown, during the grinding of the polishing pad, when the polishing pad is ground with a grinding disc, heat will be generated due to friction, resulting in heat accumulation in the polishing pad area, which cannot be effectively cooled and evacuated. Over time, under the dual influence of the friction grinding of the grinding disc and the condensed heat, the grinding quality of the polishing pad is affected, and even the polishing pad is deformed during grinding. A cooling component 11 is arranged around the annular frame 2, and the cooling component 11 includes a second boosting pipe 111, the second boosting pipe 111 is connected to the outer end of the boosting three-way valve 95, and the top end of the second boosting pipe 111 is connected to a four-way joint 112, and the top end of the four-way joint 112 is unidirectionally connected to a refrigerator 113, firstly, three groups of refrigerators 113 provide cold source supply, and then the three-way boosting gas in the three groups of second boosting pipes 111 boosts and transports the cold source; Both ends of the four-way joint 112 are connected with elbows 114, and one end of the elbow 114 away from the four-way joint 112 is connected with an arc main pipe 115 fixedly matched with the ring frame 2. The inner cavity of the ring frame 2 is provided with air blowing ports 116 used in conjunction with the arc main pipe 115. The three-way cold source of boosted transmission is transmitted to the ring frame 2 sealed by the dust cover 3 through three groups of elbows 114 and three groups of air blowing ports 116 on the arc main pipe 115, so as to cool down the polishing pad in the grinding state. Processing is performed to prevent the first flattening toothed disc 76 and the second flattening toothed disc 77 from overheating during the polishing pad grinding and causing quality problems, and the first flattening toothed disc 76 and the second flattening toothed disc 77 are provided with a first air guide port 117 and a second air guide port 118 used in conjunction with the air outlet 116 around them, which is beneficial to the diversion of the pressurized cold source in the first flattening toothed disc 76 and the second flattening toothed disc 77, so that the pressurized cold source is quickly and comprehensively distributed in the internal area of the annular frame 2, thereby improving the comprehensiveness and effectiveness of the cooling and heat dissipation of the polishing pad; like Figures 18 to 21 As shown, mounting grooves 15 are provided around the top and bottom of the inner cavity of the first leveling toothed disc 76, and the inner cavity of the mounting groove 15 is respectively provided with a fixed end cover 16 and an arc-shaped polishing block 17, so that the polishing pad is ground in an arc-shaped manner, and double-headed screws 18 used in conjunction with the fixed end cover 16 and the arc-shaped polishing block 17 are inserted around the mounting groove 15, and the fixed end cover 16 and the arc-shaped polishing block 17 are tightened and fixed to improve the installation stability of the fixed end cover 16 and the arc-shaped polishing block 17, and the top of the double-headed screw 18 is threadedly connected with a nut 19, and the double-headed screw 18 is tightened and fixed to prevent the double-headed screw 18 from falling off, and the first cleaning head 23 staggered with the arc-shaped polishing block 17 is provided around the bottom of the first leveling toothed disc 76, so as to clean the particles and dust on the surface of the polishing pad during grinding; The second leveling toothed disc 77 is provided with mounting holes 20 around its inner cavity, and a circular polishing block 22 is provided in its inner cavity. A single-head screw 21 threadably matched with the circular polishing block 22 is inserted into the inner cavity of the mounting hole 20 to tighten and fix the circular polishing block 22. The second leveling toothed disc 77 is provided with a second cleaning head 24 staggered with the circular polishing block 22 around its bottom to clean the granular dust on the surface of the polishing pad during grinding, especially the stubborn granular dust adhered to the polishing pad due to grinding and crushing by the first leveling toothed disc 76 and the second leveling toothed disc 77, to facilitate subsequent dust suction and dust removal.
[0034] Specifically, the working principle of the diamond dresser and the flattening device based on the graphical distribution of the brazing process particle matrix is as follows: first, the fixed end cover 16 and the arc-shaped polishing block 17 are respectively installed on the upper and lower surfaces of the installation groove 15 on the first flattening toothed disc 76, and then the double-headed screw 18 is screwed into the reserved screw holes in the fixed end cover 16 and the arc-shaped polishing block 17, and the nut 19 is tightened on the top of the double-headed screw 18 using a hexagonal wrench, and then the first cleaning head 23 is installed at the bottom of the first flattening toothed disc 76, and the fixed end cover 16 and the arc-shaped polishing block 17 are completed. After the installation work on the plate 76, the single-head screw 21 and the circular polishing block 22 are respectively inserted into the upper and lower surfaces of the installation hole 20 on the second flattening toothed plate 77, and the single-head screw 21 is screwed into the circular polishing block 22 using the hexagonal wrench again, and then the second cleaning head 24 is installed at the bottom of the second flattening toothed plate 77, and the installation work of the single-head screw 21 and the circular polishing block 22 on the second flattening toothed plate 77 is completed, and the two sets of the first flattening toothed plates 76 and the second flattening toothed plates 77 that have been installed are meshed between the driving circular gear 75 and the fixed gear ring 78 in an axially symmetrical staggered distribution pattern; After the preparation work is completed, the servo motor 71 is controlled to start and drive the main synchronous wheel 72 to rotate. The main synchronous wheel 72 drives the rotating shaft 74 on the slave synchronous wheel 73 to rotate through the synchronous belt. The rotating shaft 74 drives the driving circular gear 75 to rotate. The driving circular gear 75 drives the two groups of first flattening toothed discs 76 and second flattening toothed discs 77 that are axially symmetrically staggered to rotate on the polishing pad along the fixed gear ring 78. Then, the two groups of first flattening toothed discs 76 and second flattening toothed discs 77 drive the two groups of arc-shaped polishing blocks 17 and circular polishing blocks 22 that are axially symmetrically staggered and have different shapes to perform rotational grinding on the polishing pad. The dust cover 3 seals and dust-proofs the annular frame 2. While the polishing pad is being polished, the rotating shaft 74 also drives the driving bevel gear 81 to rotate. The driving bevel gear 81 drives the concave rod frame 83 on the three sets of driven bevel gears 82 to rotate synchronously. The three sets of concave rod frames 83 drive the three sets of pistons 86 on the connecting rods 85 through the three sets of rotating sleeves 84 to perform reciprocating work in the three sets of top tubes 4. When the three sets of pistons 86 perform return suction in the three sets of top tubes 4, the suction valves on the three sets of Y-shaped dust suction pipes 87 are opened, and the exhaust valves on the three sets of dust exhaust pipes 91 are closed. Then, the negative pressure suction force generated by the three sets of pistons 86 in the three sets of top tubes 4 is sucked away by the large-caliber dust suction heads 88 on the three sets of Y-shaped dust suction pipes 87. When the three groups of pistons 86 are in the exhaust state in the three groups of top tubes 4, the suction valves on the three groups of Y-shaped dust suction pipes 87 are closed, and the exhaust valves on the three groups of dust exhaust pipes 91 are opened. Then, the three groups of pistons 86 will suck the particulate dust in the three groups of top tubes 4 through the three groups of dust exhaust pipes 91 and discharge them into the dust collecting tube 92 with pressure boost. Then, the three groups of upper filter racks 93 and lower filter racks 94 perform double filtration on the pressurized particulate dust. After the pressure of the filtered pressurized gas is pressurized again by the three groups of boosting three-way valves 95 and detected by the three groups of pressure gauges 96, it is supplied to the three groups of four-way joints 112 through the three groups of second boosting pipes 111, and the three groups of refrigerators 113 are controlled to open in advance and supply the cold source to the three groups of four-way joints 112 to merge with the filtered and pressurized boosted gas. Then, the three-way boosting cold source The arc main pipe 115 on the three sets of curved pipes 114 is supplied into the closed space formed by the annular frame 2 and the dust cover 3 through the blowing port 116. Under the guidance of the first air guide port 117 and the second air guide port 118 on the two sets of first leveling toothed discs 76 and second leveling toothed discs 77, the three-way booster cold source is quickly distributed in the annular frame 2 and the dust cover 3, and the heat generated during the polishing pad grinding is cooled down. At the same time, the particle dust generated during the polishing pad grinding is also blown away, and the first cleaning head 23 and the second cleaning head 24 under the two sets of first leveling toothed discs 76 and second leveling toothed discs 77 in a rotating state clean and lift the particle dust attached to the polishing pad, which provides convenience for the dust collection work of the three sets of large-caliber dust suction heads 88. After the polishing pad has completed the grinding, dust collection, dust removal and cooling work, the pressure relief valves on the three pressure relief pipes 98 are controlled to open, and the boosted pressure in the three bottom cylinders 6 is discharged by the three pressure relief pipes 98. Then, the three slide seats 102 that have lost the pressure force are pulled by the elastic reset of the three reset springs 103 to quickly drive the dust boxes 105 and the placement table 107 on the three lifting rods 104 to move down and reset to the lowest state. After the placement table 107 moves down to the right position, the polishing pad that has been ground is separated from the two groups of first flattening toothed discs 76 and second flattening toothed discs 77 to the initial state through the mesh plate 108. Then, the worker removes the polishing pad that has been ground from the mesh plate 108. If it is necessary to grind the other side of the polishing pad, the polishing pad can be ground directly with the ground side facing downward and the other side that has not been ground facing upward. The pressure relief valves on the three pressure relief pipes 98 are controlled to close. If a new polishing pad needs to be replaced, similarly, the pressurized gas in the three groups of booster three-way valves 95 is supplied to the three groups of bottom cylinders 6 on the base 5 through the three groups of first booster pipes 97. With the continuous supply of three-way booster gas and the formation of booster pressure force at the bottom of the inner cavity of the three groups of bottom cylinders 6, under the action of the booster pressure force, the three groups of vertical grooves 101 and the slider 106 provide sliding limit compensation for the placement table 107. Then, the booster pressure force in the three groups of bottom cylinders 6 forces the three groups of slide seats 102 to drive the dust box 105 and the placement table 107 on the three groups of lifting rods 104 to slide upward in the three groups of bottom cylinders 6, and drives the three complex rods 104 to slide upward. The positioning spring 103 is stretched upward until the convex block 13 on the annular frame 2 is clamped with the concave groove 14 in the placement table 107, and the newly replaced polishing pad is re-fitted with the arc-shaped polishing block 17 and the circular polishing block 22 on the two sets of first leveling toothed discs 76 and second leveling toothed discs 77, and so on. The polishing pads are subjected to batch grinding operations, and the granular dust generated below during the grinding of the polishing pads falls into the dust collecting box 105 through the mesh plate 108, and then the three sets of pull-out boxes 12 are regularly pulled out of the dust collecting box 105, and the granular dust accumulated in the dust collecting box 105 can be cleaned.
[0035] It should be noted that the specific models and specifications of the servo motor 71 and the refrigerator 113 need to be selected and determined according to the actual specifications of the device, and the specific selection calculation method adopts the existing technology in the field, so it will not be described in detail.
[0036] The power supply and principles of the servo motor 71, the refrigerator 113, the boost three-way valve 95 and the pressure gauge 96 are clear to those skilled in the art and will not be described in detail herein.
[0037] The above are only embodiments of the present application and are not intended to limit the scope of protection of the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0038] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.
Claims
1. A flattening device based on the graphical distribution of the particle matrix of the brazing process, characterized in that: include: A bracket (1), wherein the top of the bracket (1) is fixedly connected to a ring frame (2), and the top of the ring frame (2) is fixedly connected to a dust cover (3); The top of the dust cover (3) is fixedly connected to a top cylinder (4), and the bottom of the bracket (1) is fixedly connected to a base (5), and the top of the base (5) is connected to a bottom cylinder (6); The inner cavity of the annular frame (2) is provided with a flattening assembly (7), the flattening assembly (7) comprising a servo motor (71), the servo motor (71) being fixed to one side of the dust cover (3) via a support, and the output shaft of the servo motor (71) being fixedly connected to a main synchronous wheel (72), the side of the main synchronous wheel (72) away from the servo motor (71) being connected to a slave synchronous wheel (73) via a synchronous belt transmission, and the inner cavity of the slave synchronous wheel (73) being fixedly connected to a rotating shaft (74) that is rotatably matched with the dust cover (3), and the inner cavity of the top cylinder (4) being provided with a dust collection assembly (8), the dust collection assembly (8) comprising a driving bevel gear (81), the driving bevel gear (81) being fixed to a side of the rotating shaft (74) close to the slave synchronous wheel (73), and the driving bevel gear (81) ) is meshed with a driven bevel gear (82) at the top of the top cylinder (4), the inner cavity of the driven bevel gear (82) is fixedly connected to a concave rod frame (83), and a rotating sleeve (84) is rotatably connected to the center of the concave rod frame (83), and a dust removal assembly (9) is provided on the side of the dust suction assembly (8) away from the dust cover (3), the dust removal assembly (9) comprises a dust exhaust pipe (91), the dust exhaust pipe (91) is connected to the exhaust port of the top cylinder (4), and an exhaust valve is provided on the dust exhaust pipe (91), the end of the dust exhaust pipe (91) away from the top cylinder (4) is connected to a dust collecting cylinder (92) fixedly matched with the bracket (1), and the inner cavity of the dust collecting cylinder (92) is respectively provided with an upper filter frame (93) and a lower filter frame (94) from top to bottom, and the inner cavity of the bottom cylinder (6) is provided with a lifting assembly (10).
2. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 1 is characterized in that: A driving circular gear (75) is fixedly connected to the bottom of the rotating shaft (74), and a first flattening toothed disc (76) and a second flattening toothed disc (77) are respectively meshed around the driving circular gear (75), and a fixed gear ring (78) meshing with the first flattening toothed disc (76) and the second flattening toothed disc (77) is fixedly connected to the inner wall of the annular frame (2).
3. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 2 is characterized in that: The rotating sleeve (84) is fixedly connected to a connecting rod (85), and the other end of the connecting rod (85) is hingedly connected to a piston (86) that is slidably matched with the top cylinder (4), and the air suction port of the top cylinder (4) is connected to a Y-shaped dust suction pipe (87), and the Y-shaped dust suction pipe (87) is provided with an air suction valve, and the bottom end of the Y-shaped dust suction pipe (87) is connected to a large-caliber dust suction head (88) used in conjunction with the dust cover (3).
4. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 3 is characterized in that: The bottom of the dust collecting cylinder (92) is connected to a boosting three-way valve (95), and a pressure gauge (96) is provided at the inner end of the boosting three-way valve (95); the bottom end of the boosting three-way valve (95) is connected to a first boosting pipe (97) used in conjunction with the base (5) and the bottom cylinder (6); and the exhaust port of the bottom cylinder (6) is connected to a pressure relief pipe (98), and a pressure relief valve is provided on the pressure relief pipe (98).
5. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 4 is characterized in that: The lifting assembly (10) comprises a vertical groove (101), the vertical groove (101) being provided on a side of the bracket (1) close to the annular frame (2), and the inner cavity of the bottom cylinder (6) being slidably connected to a sliding seat (102), the bottom of the sliding seat (102) being fixedly connected to a return spring (103) used in conjunction with the base (5), and the top of the sliding seat (102) being fixedly connected to a lifting rod (104) slidably matched with the bottom cylinder (6), the top of the lifting rod (104) being fixedly connected to a dust collecting box (105), and the top of the dust collecting box (105) being connected to a placing table (107) used in conjunction with the annular frame (2), the placing table (107) being fixedly connected to sliders (106) slidably matched with the vertical groove (101) on all sides thereof, and the inner cavity of the placing table (107) being provided with a screen plate (108) used in conjunction with the driving circular gear (75), the first leveling toothed disc (76) and the second leveling toothed disc (77).
6. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 5 is characterized in that: The first flattening toothed disc (76) and the second flattening toothed disc (77) are distributed in an axisymmetric and staggered state along the central axis of the driving circular gear (75), and the first flattening toothed disc (76) and the second flattening toothed disc (77) have the same ring diameter.
7. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 6 is characterized in that: Anti-dropout plates for use with the first flattening toothed disc (76) and the second flattening toothed disc (77) are fixedly connected to the top and bottom of the driving circular gear (75), and an extension end for use with the first flattening toothed disc (76) and the second flattening toothed disc (77) is fixedly connected to the bottom of the inner cavity of the annular frame (2).
8. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 7 is characterized in that: The Y-shaped dust suction pipe (87) and the large-caliber dust suction head (88) are distributed in a triangular equidistant state along the central axis of the dust cover (3), and an arc-shaped chamfer is provided at the inner end of the dust cover (3) close to the large-caliber dust suction head (88).
9. The flattening device based on the graphical distribution of the brazing process particle matrix according to claim 8, characterized in that: The inner cavity of the dust collecting box (105) is provided with a pull-out box (12) on all sides, and the bottom of the annular frame (2) is integrally formed with a convex card block (13) on all sides, and the top of the placement platform (107) is provided with a concave card slot (14) for use with the convex card block (13) on all sides.
10. Diamond trimmer based on brazing process particle matrix graphical distribution, according to claim 9, the trimming device based on brazing process particle matrix graphical distribution, characterized in that, The top and bottom of the inner cavity of the first flattening toothed disc (76) are provided with mounting grooves (15) on all sides, and the inner cavity of the mounting grooves (15) is provided with fixed end covers (16) and arc-shaped polishing blocks (17), respectively. The inner cavity of the second flattening toothed disc (77) is provided with mounting holes (20) on all sides, and the inner cavity of the mounting holes (20) is provided with circular polishing blocks (22).
Citation Information
Patent Citations
Polishing device for automobile part production
CN118513984A
Road edge stone fixed-thickness polishing assembly line technology
CN118650498A
Bonding-wire-free chip packaging substrate automatic feeding device and feeding method
CN118824919A
Polishing pad trimming assembly and polishing equipment
CN217943022U
Diamond trimmer of double-sided CMP polishing machine
CN218904866U
