Single crystal furnace and single crystal furnace control method

Abstract

The invention discloses a single crystal furnace and a control method of the single crystal furnace. The single crystal furnace comprises a crucible; the water cooling screen is arranged above the crucible, and the water cooling screen is annular; the splash-proof device comprises a protection part, the protection part is detachably arranged in the water cooling screen, and the protection part is annular and at least covers the inner peripheral wall of the end, close to the crucible, of the water cooling screen. According to the single crystal furnace disclosed by the invention, the protection part is detachably arranged in the water cooling screen, is annular and at least covers the inner peripheral wall of one end, close to the crucible, of the water cooling screen, so that the protection part can protect the water cooling screen, and the problems that silicon materials are attached to the water cooling screen and use of the water cooling screen is influenced and the like are solved; and in the processing process of the single crystal, the silicon liquid adsorbed on the water cooling screen is prevented from falling into the crucible to pollute the silicon liquid, the crystal forming rate of the single crystal is ensured, and the production quality of the single crystal is good.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal manufacturing, and more specifically, to a single crystal furnace and a control method of the single crystal furnace. Background Art

[0002] In the related technology, the hydrogen content in the silicon material required for single crystal manufacturing is relatively high. During the heat and melting process of the silicon material, hydrogen jumping phenomenon will occur, which can easily cause the silicon liquid to splash out, causing the silicon liquid to be adsorbed on the water cooling screen, reducing the crystallization rate of single crystal production and affecting the production process.

[0003] Referring to the relevant technical document CN202111642121.2, it is disclosed that a circular sheath is arranged at the lower end of the water-cooling screen, and the circular sheath is connected to the lower end of the water-cooling screen, and is fixed above the quartz crucible through the water-cooling screen and the circular sheath, so as to prevent the water-cooling screen from melting or bursting due to high temperature, and can extend the length of the water-cooling screen, extend the thermal refraction of the water-cooling screen, and effectively ensure a good temperature gradient in the single crystal furnace.

[0004] This single crystal furnace mainly extends the length of the water-cooling screen by means of a circular ring-shaped sheath to prevent the water-cooling screen from melting or bursting due to high temperature. However, this method still causes hydrogen jump of the silicon material, which can easily cause the silicon liquid to be adsorbed on the water-cooling screen, reducing the crystallization rate of crystal production and affecting the production process. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a single crystal furnace, which can ensure the normal use of the water cooling screen and improve the crystallization rate and production quality of the single crystal.

[0006] Another object of the present invention is to provide a control method for a single crystal furnace having the above-mentioned single crystal furnace.

[0007] According to an embodiment of the present invention, the single crystal furnace includes: a crucible; a water-cooling screen, which is arranged above the crucible and is annular; a splash-proof device, which includes a protective member, which is detachably arranged in the water-cooling screen, and is formed in an annular shape and covers at least the inner circumferential wall of the water-cooling screen at one end close to the crucible.

[0008] According to the single crystal furnace of the embodiment of the present invention, the protective part is detachably arranged in the water-cooling screen through the protective part. The protective part is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible, so that the protective part can protect the water-cooling screen, avoid the silicon material adhering to the water-cooling screen and affecting the use of the water-cooling screen, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen from falling into the crucible and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and ensuring the production quality of the single crystal.

[0009] In addition, the single crystal furnace according to the above embodiment of the present invention may also have the following additional technical features:

[0010] According to some embodiments of the single crystal furnace of the present invention, the inner circumferential wall of the water-cooling screen includes an inclined section, which is formed in a ring shape. In the direction from bottom to top, the inclined section extends obliquely in a direction away from the central axis of the water-cooling screen, and the protective member includes: an abutment portion, which is formed in a ring shape. In the direction from bottom to top, the abutment portion extends obliquely in a radially outward direction of the water-cooling screen to abut against the inner circumferential wall of the water-cooling screen.

[0011] According to some embodiments of the present invention, the inner circumferential wall of the water-cooling screen also includes a straight tube section, which is formed in a ring shape, the upper end of the straight tube section is connected to the lower end of the inclined section, and the straight tube section has the same inner diameter in the up and down directions. The protective member also includes: a straight tube portion, which is formed in a ring shape, the upper end of the straight tube portion is connected to the lower end of the abutment portion, the straight tube portion has the same outer diameter in the up and down directions, and the straight tube portion is located inside the straight tube section.

[0012] According to some embodiments of the present invention, the single crystal furnace includes a seed crystal rope, and the splash-proof device also includes: a pulling assembly, the pulling assembly includes a suspension rod assembly, the upper end of the suspension rod assembly is connected to the seed crystal rope, the suspension rod assembly is suitable for being movably arranged in the water-cooling shield along the up and down directions to place the protective element in the water-cooling shield, and the suspension rod assembly is detachably connected to the protective element.

[0013] According to some embodiments of the present invention, a connecting portion is provided on the inner circumferential wall of the protective member, the suspension rod assembly includes a fixing member and a mating segment provided on the fixing member, the upper end of the fixing member is connected to the seed crystal rope, one end of the mating segment is connected to the fixing member, and the other end of the mating segment extends radially outward from the fixing member, the connecting portions are multiple and are arranged at intervals along the circumferential direction of the protective member, the mating segments are multiple and are arranged at intervals along the circumferential direction of the fixing member, and the multiple mating segments are detachably connected to the multiple connecting portions.

[0014] According to some embodiments of the present invention, the fixing member is formed as a rod-shaped structure extending in an up-down direction.

[0015] According to some embodiments of the present invention, the plurality of mating segments are mated with the plurality of connecting parts in a one-to-one correspondence; or, the plurality of connecting parts are divided into a plurality of groups, each group of connecting parts includes a plurality of connecting parts, a plurality of connecting parts in the plurality of groups of connecting parts are alternately arranged along the circumferential direction of the protective member, and the plurality of connecting parts in each group of connecting parts are mated with the plurality of mating segments in a one-to-one correspondence.

[0016] According to some embodiments of the present invention, the lifting assembly also includes a lifting rod, which includes: a joint, the lower end of the joint is connected to the upper end of the suspension rod assembly, the upper end of the joint is provided with a limiting portion extending along the circumferential direction of the joint; a chuck, the upper end of the chuck is connected to the seed crystal rope, the chuck has a mounting hole extending along the axial direction, the chuck has a notch on the peripheral wall that is connected to the mounting hole, the width of the notch is larger than the maximum diameter of the joint, the inner wall of the mounting hole has a supporting protrusion, the supporting protrusion extends along the circumferential direction of the mounting hole, the joint is suitable for extending into the mounting hole through the notch, and the lower end of the limiting portion is suitable for abutting against the upper end of the supporting protrusion.

[0017] According to some embodiments of the present invention, a flange extending along the circumferential direction of the chuck is provided on the outer peripheral wall of the chuck, and the lifting rod also includes a sleeve, which is suitable for being sleeved outside the supporting protrusion and the limiting portion, and the lower end of the sleeve is abutted against the upper end of the flange.

[0018] According to some embodiments of the present invention, the protective member is a molybdenum member, a graphite member, a carbon-carbon member, a silicon carbide member, a fiber-reinforced ceramic matrix composite member, silicon nitride or a quartz member.

[0019] According to the control method of the single crystal furnace of the embodiment of the present invention, the single crystal furnace is the single crystal furnace according to the embodiment of the present invention, the splash-proof device also includes a pulling assembly, the pulling assembly includes a suspension rod assembly, and the control method includes: connecting the upper end of the suspension rod assembly to the seed crystal rope of the single crystal furnace, and preliminarily matching the protective piece with the lower end of the suspension rod assembly; controlling the seed crystal rope to drive the suspension rod assembly to move downward to place the protective piece in the water-cooled screen; controlling the protective piece to disengage from the lower end of the suspension rod assembly, and controlling the seed crystal rope to drive the suspension rod assembly to move upward; controlling the addition of silicon material into the crucible; after the chemical reaction is completed, controlling the seed crystal rope to drive the suspension rod assembly to move downward; matching the protective piece with the lower end of the suspension rod assembly; controlling the seed crystal rope to drive the suspension rod assembly to move upward to take out the protective piece.

[0020] According to the control method of the single crystal furnace of the embodiment of the present invention, the protective part is detachably arranged in the water-cooling screen, and the protective part is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible, so that the protective part can protect the water-cooling screen, avoid the silicon material adhering to the water-cooling screen and affecting the use of the water-cooling screen, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen from falling into the crucible and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and ensuring the production quality of the single crystal.

[0021] According to some embodiments of the present invention, the single crystal furnace also includes a feeding barrel, in which silicon material is provided, and controlling the addition of silicon material into the crucible includes: replacing the suspension rod assembly on the seed crystal rope with the feeding barrel; controlling the seed crystal rope to drive the feeding barrel to move downward; and controlling the feeding barrel to add silicon material into the crucible.

[0022] According to some embodiments of the present invention, the single crystal furnace includes a main chamber and a sub-chamber that are interconnected, the sub-chamber is located above the main chamber and the side of the sub-chamber facing the main chamber is open to form an open opening, the crucible and the water-cooling screen are arranged in the main chamber, the seed crystal rope is connected to the upper end of the sub-chamber, and a control valve for opening or closing the main chamber is provided between the main chamber and the sub-chamber, and replacing the suspension rod assembly on the seed crystal rope with the feeding barrel includes: controlling the control valve to close the main chamber; unscrewing the sub-chamber; controlling the seed crystal rope to drive the suspension rod assembly to move downward, and replacing the suspension rod assembly with the feeding barrel; controlling the seed crystal rope to drive the feeding barrel to move upward to place the feeding barrel in the sub-chamber; rotating the sub-chamber; controlling the control valve to open the main chamber.

[0023] According to some embodiments of the present invention, the single crystal furnace includes a main chamber and a sub-chamber which are interconnected, the sub-chamber is located above the main chamber and the side of the sub-chamber facing the main chamber is open to form an open opening, the crucible and the water-cooling screen are arranged in the main chamber, the seed crystal rope is connected to the upper end of the sub-chamber, and a control valve for opening or closing the main chamber is provided between the main chamber and the sub-chamber, and the upper end of the suspension rod assembly is connected to the seed crystal rope of the single crystal furnace and the protective member is initially matched with the lower end of the suspension rod assembly, comprising: controlling the control valve to close the main chamber; unscrewing the sub-chamber; controlling the seed crystal rope to move downward, connecting the upper end of the suspension rod assembly to the seed crystal rope, and initially matching the protective member with the lower end of the suspension rod assembly; controlling the seed crystal rope to drive the suspension rod assembly to move upward so that the protective member and the suspension rod assembly are located in the sub-chamber; rotating the sub-chamber; controlling the control valve to open the main chamber.

[0024] According to some embodiments of the present invention, after controlling the control valve to close the main chamber and before unscrewing the sub-chamber, the control method further comprises: inflating air into the sub-chamber to control the air pressure in the sub-chamber to be the same as the external air pressure.

[0025] According to some embodiments of the present invention, after rotating the sub-chamber and before controlling the control valve to open the main chamber, the control method further includes: evacuating the sub-chamber.

[0026] According to some embodiments of the present invention, after controlling the feeding barrel to add silicon material into the crucible, and before controlling the seed crystal rope to drive the suspension rod assembly to move downward after the material to be processed is completed, the control method includes: controlling the seed crystal rope to drive the feeding barrel to move upward; replacing the feeding barrel on the seed crystal rope with the suspension rod assembly.

[0027] According to some embodiments of the present invention, a connecting portion is provided on the inner circumferential wall of the protective member, the suspension rod assembly includes a fixing member and a mating segment provided on the fixing member, the upper end of the fixing member is connected to the seed crystal rope, one end of the mating segment is connected to the fixing member, and the other end of the mating segment extends radially outward from the fixing member, the connecting portion is a plurality of portions arranged at intervals along the circumferential direction of the protective member, the mating segment is a plurality of portions arranged at intervals along the circumferential direction of the fixing member, and when the mating segment and the connecting portion are mated, the plurality of mating segments are located below the plurality of connecting portions, and controlling the protective member to disengage from the lower end of the suspension rod assembly and controlling the seed crystal rope to drive the suspension rod assembly to move upward includes: continuing to control the seed crystal rope to drive the suspension rod assembly to move downward; controlling the seed crystal rope to rotate so that the connecting portion and the mating segment are staggered; and controlling the seed crystal rope to drive the suspension rod assembly to move upward.

[0028] According to some embodiments of the present invention, the mating of the protective member with the lower end of the suspension rod assembly includes: controlling the mating segment and the connecting portion to be staggered in the circumferential direction; controlling the seed crystal rope to drive the suspension rod assembly to move downward so that the mating segment is located below the connecting portion in the up and down direction; and controlling the seed crystal rope to rotate so that the mating segment is located directly below the connecting portion.

[0029] According to some embodiments of the present invention, the seed crystal rope is controlled to move downward to place the protective element in front of the water-cooling screen, and the control method further includes: raising the water-cooling screen from an initial position to an upper limit position.

[0030] According to some embodiments of the present invention, the seed crystal rope is controlled to drive the suspension rod assembly to move upward, and after the protective member is taken out, the control method includes: controlling the water-cooling screen to descend from the upper limit position to the initial position.

[0031] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0033] Figure 1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention;

[0034] Figure 2 yes Figure 1 The middle circle shows the enlarged structural schematic diagram of A;

[0035] Figure 3 is a schematic structural diagram of a splash-proof device for a single crystal furnace according to an embodiment of the present invention;

[0036] Figure 4 is a schematic structural diagram of a protective member of a single crystal furnace according to an embodiment of the present invention;

[0037] Figure 5 is a schematic structural diagram of a pulling assembly of a single crystal furnace according to an embodiment of the present invention;

[0038] Figure 6 is a schematic structural diagram of a chuck of a single crystal furnace according to an embodiment of the present invention;

[0039] Figure 7 is a schematic structural diagram of a joint of a single crystal furnace according to an embodiment of the present invention;

[0040] Figure 8 is a schematic structural diagram of a sleeve of a single crystal furnace according to an embodiment of the present invention;

[0041] Fig. 9 4 is a flow chart of a control method for a single crystal furnace according to an embodiment of the present invention.

[0042] Reference numerals:

[0043] 100. Anti-splash device; 200. Single crystal furnace;

[0044] 11. Crucible; 12. Water cooling screen; 13. Main chamber; 121. Inclined section; 122. Straight section;

[0045] 20. Protective member; 21. Straight tube portion; 22. Abutment portion; 23. Connecting portion;

[0046] 30. lifting assembly; 31. suspension rod assembly; 32. lifting rod; 311. fixing member; 312. matching section;

[0047] 41. Joint; 42. Chuck; 43. Sleeve; 411. Limiting portion; 421. Mounting hole; 422. Notch; 423. Support protrusion; 424. Flanging. DETAILED DESCRIPTION

[0048] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0049] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0050] In the description of the present invention, "first feature" and "second feature" may include one or more such features, "plurality" means two or more, a first feature "above" or "below" the second feature may include the first and second features being directly in contact, or may include the first and second features not being in direct contact but being in contact through another feature between them, and a first feature "above", "above" and "above" the second feature may include the first feature being directly above or diagonally above the second feature, or may simply mean that the first feature is horizontally higher than the second feature.

[0051] The single crystal furnace 200 according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0052] Reference Figure 1 and Figure 2 As shown, the single crystal furnace 200 according to the embodiment of the present invention may include: a crucible 11 and a water cooling shield 12 .

[0053] Specifically, the water cooling screen 12 is arranged above the crucible 11. The water cooling screen 12 is annular. During the single crystal manufacturing process, the water cooling screen 12 can quickly take away the heat at the root of the single crystal, thereby increasing the growth rate of the single crystal and accelerating the growth rate of the single crystal. For example, the single crystal is a silicon crystal used in the solar photovoltaic industry.

[0054] When a single crystal is manufactured by the Czochralski method, silicon material is placed in the crucible 11. Under vacuum conditions and the protection of inert gas, the heater of the single crystal furnace 200 generates heat to melt the silicon material in the single crystal furnace 200 to form silicon liquid. Then, a seed crystal is introduced into the silicon liquid. At a suitable temperature, the silicon atoms in the silicon liquid will form crystals at the solid-liquid interface according to the silicon atom arrangement structure of the seed crystal to form a single crystal. The seed crystal is rotated and lifted to finally crystallize into a single crystal rod. For example, the silicon material can be manufactured by a modified Siemens method or fluidized bed technology.

[0055] In the related art, when adding silicon material into a crucible or melting silicon material in a crucible, silicon material (such as solid silicon material, liquid silicon material or mixed silicon material) may splash onto the water cooling screen, resulting in silicon splashing. For example, when melting silicon material in a crucible, droplets or small particles containing bubbles in the silicon liquid in the crucible jump out of the liquid surface, causing the silicon liquid to splash onto the water cooling screen; or, when adding silicon material into a crucible, the silicon material falls into the silicon liquid and splashes the silicon liquid due to gravity, causing the silicon liquid to splash onto the water cooling screen.

[0056] For example, the silicon material is granular polysilicon produced by fluidized bed technology, that is, granular silicon. Granular silicon has the advantages of low production cost, high bulk density, and good fluidity. However, due to the high hydrogen content of granular silicon, hydrogen hopping phenomenon will occur in the process of melting when granular silicon is heated, making the silicon liquid easily adsorbed on the water-cooled screen. In the subsequent processes (such as seeding, shouldering, equal diameter and finishing), the silicon material adhering to the water-cooled screen will fall into the silicon liquid in the crucible due to factors such as airflow or gravity, which may easily cause the pulled single crystal to break and stop the pulling production, reduce the crystallization rate of single crystal production, and affect the efficiency of single crystal output of single crystal in single crystal furnace. The "hydrogen hopping phenomenon" is that when granular silicon is produced by silane fluidized bed method, the surface of granular silicon is easy to absorb more hydrogen, which may easily cause silicon liquid to splash out and affect the production process.

[0057] Therefore, in the present invention, if Figure 1 and Figure 2 As shown, the single crystal furnace 200 also includes a splash-proof device 100, which includes a protective member 20. The protective member 20 is detachably disposed in the water-cooling shield 12. The protective member 20 is formed in a ring shape, and the protective member 20 at least covers one end of the water-cooling shield 12 close to the crucible 11 (for example, Figure 1 The inner peripheral wall of the water cooling shield 12 is formed by the protective member 20 (shown in the figure below), so that the protective member 20 can protect the water cooling shield 12. When hydrogen jump occurs in the silicon material, the silicon material that has hydrogen jump can adhere to the protective member 20, isolating the splashed silicon material from falling on the water cooling shield 12, and avoiding the silicon material from adhering to the water cooling shield 12 and affecting the use of the water cooling shield 12. At the same time, before processing the single crystal, the protective member 20 is removed, so that there is no silicon material adhering to the inner wall of the water cooling shield 12, avoiding the influence of the silicon splashing phenomenon on the subsequent production of the single crystal, ensuring the crystallization rate of the single crystal, and ensuring the production quality of the single crystal.

[0058] In addition, compared with the solution of using small silicon materials as a bottom to reduce silicon splashing, the present invention absorbs splashed silicon materials through the protective part 20, and there is no need to adjust the size and material of the silicon materials. It can use a high proportion of silicon materials that are easy to splash (such as granular silicon), thereby reducing the cost of silicon materials, reducing carbon footprint, meeting production needs, and avoiding the problem of small silicon materials easily absorbing impurities, thereby increasing the minority carrier lifetime of the single crystal, which is beneficial to improving the quality of the single crystal.

[0059] For example, before the single crystal furnace 200 is charged for the second time, the protective member 20 is placed in the water-cooled shield 12. During the silicon material chemical reaction, the hydrogen-jumped silicon material will adhere to the protective member 20. After the chemical reaction is completed and there is no hydrogen jumping phenomenon, the protective member 20 is taken out of the water-cooled shield 12 to perform the crystal pulling operation. This can ensure the normal use of the water-cooled shield 12 and prevent the silicon liquid adsorbed on the water-cooled shield 12 from falling into the crucible 11 and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and improving the production quality of the single crystal.

[0060] In some embodiments, the protective member 20 can be cleaned. After the protective member 20 is at room temperature, the silicon material attached to the surface of the protective member 20 can be cleaned, which facilitates the continued use of the protective member 20 and prevents the silicone liquid from adhering to the water-cooled screen 12 when the protective member 20 is used again, which is beneficial to reducing production costs.

[0061] According to the single crystal furnace 200 of the embodiment of the present invention, the protective member 20 is detachably arranged in the water-cooling screen 12, and the protective member 20 is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen 12 close to the crucible 11, so that the protective member 20 can protect the water-cooling screen 12, and avoid the silicon material adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12. In addition, during the single crystal processing, the silicon liquid adsorbed on the water-cooling screen 12 is prevented from falling into the crucible 11 and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and ensuring the production quality of the single crystal.

[0062] In the embodiment of the present invention, the specific structure of the protective member 20 can be flexibly set according to the specific structure of the water-cooling shield 12 .

[0063] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the inner wall of the water-cooling shield 12 includes an inclined section 121, which is formed in a ring shape. From bottom to top, the inclined section 121 extends obliquely in a direction away from the central axis of the water-cooling shield 12, which is beneficial to improving the heat dissipation effect of the water-cooling shield 12 on the single crystal.

[0064] In addition, if Figure 1-Figure 4As shown, the protective member 20 includes an abutment portion 22, which is formed in a ring shape. In the direction from bottom to top, the abutment portion 22 extends obliquely in the radial outward direction of the water-cooling screen 12, which can meet the placement requirements of the protective member 20 in the water-cooling screen 12, and the abutment portion 22 can abut against the inner circumferential wall of the water-cooling screen 12 to prevent the protective member 20 from moving downward, so that the protective member 20 can be firmly placed in the water-cooling screen 12, ensuring that the protective member 20 has a good protective effect on the water-cooling screen 12.

[0065] In some embodiments, Figure 1-Figure 4 As shown, the inner wall of the water-cooled shield 12 also includes a straight section 122, which is formed in a ring shape. The upper end of the straight section 122 is connected to the lower end of the inclined section 121, and the straight section 122 has the same inner diameter in the up and down directions. The straight section 122 is used to guide the movement of the single crystal and to cool the single crystal.

[0066] In addition, if Figure 1-Figure 4 As shown, the protective member 20 also includes a straight-cylindrical portion 21, which is formed in a ring shape. The upper end of the straight-cylindrical portion 21 is connected to the lower end of the abutment portion 22. The straight-cylindrical portion 21 has the same outer diameter in the up and down directions. The straight-cylindrical portion 21 is located in the straight-cylindrical section 122, which is convenient for placing the protective member 20 in the water-cooled shield 12 and can meet the placement requirements of the protective member 20 in the water-cooled shield 12. The protective member 20 has a simple structure and is easy to process and manufacture, which is beneficial to reducing production costs.

[0067] According to some embodiments of the present invention, Figure 3 and Figure 5 As shown, the single crystal furnace 200 includes a seed crystal rope, and the splash-proof device 100 also includes a lifting assembly 30. The lifting assembly 30 includes a suspension rod assembly 31. The upper end of the suspension rod assembly 31 is connected to the seed crystal rope. The suspension rod assembly 31 can be movably arranged in the water-cooling screen 12 in the up-down direction through the seed crystal rope. The suspension rod assembly 31 is detachably connected to the protective member 20. Therefore, when the suspension rod assembly 31 is connected to the protective member 20, the suspension rod assembly 31 can be movably arranged in the water-cooling screen 12 through the seed crystal rope, which is convenient for placing the protective member 20 in the water-cooling screen 12 or taking the protective member 20 out of the water-cooling screen 12, which is convenient for placing and taking out the protective member 20, which is conducive to improving the processing efficiency; when the protective member 20 is located in the water-cooling screen 12 and the suspension rod assembly 31 is disassembled from the protective member 20, it can avoid the suspension rod assembly 31 from interfering with subsequent operations, which is conducive to improving the processing efficiency.

[0068] For example, when the protective member 20 is located in the water-cooling shield 12 and the suspension rod assembly 31 is disassembled from the protective member 20 , it is convenient to add material into the crucible 11 . While the protective member 20 protects the water-cooling shield 12 , material addition is achieved, which is beneficial to improving processing efficiency.

[0069] In some embodiments of the present invention, Figure 2-Figure 5 As shown, a connecting portion 23 is provided on the inner wall of the protective member 20, and the suspension rod assembly 31 includes a fixing member 311, and the upper end of the fixing member 311 is connected to the seed crystal rope, which can realize the connection between the suspension rod assembly 31 and the seed crystal rope and ensure that the suspension rod assembly 31 and the seed crystal rope are reliably connected.

[0070] In addition, if Figure 3-Figure 5 As shown, the suspension rod assembly 31 also includes a matching section 312, which is arranged on the fixing member 311, one end of the matching section 312 is connected to the fixing member 311, and the other end of the matching section 312 extends in the radial outward direction of the fixing member 311. There are multiple connecting parts 23 and matching sections 312, and multiple connecting parts 23 are arranged at intervals along the circumferential direction of the protective member 20. Multiple matching sections 312 are arranged at intervals along the circumferential direction of the fixing member 311, and multiple matching sections 312 are detachably connected to multiple connecting parts 23. Therefore, through the cooperation of multiple matching sections 312 and multiple connecting parts 23, it can ensure that the suspension rod assembly 31 lifts the protective member 20 more stably, and avoids the problem of the protective member 20 falling off, and the suspension rod assembly 31 has a simple structure, which is easy to process and manufacture, and is conducive to reducing production costs.

[0071] In some embodiments, Figure 3 and Figure 4 As shown, the connecting portion 23 is formed as an arc segment, and the middle portion of the arc segment protrudes upward. When the matching segment 312 is matched with the connecting portion 23, the matching segment 312 is not easy to fall out of the connecting portion 23, ensuring that the suspension rod assembly 31 lifts the protective member 20 more stably.

[0072] According to some embodiments of the present invention, Figure 3 and Figure 5 As shown, the fixing member 311 is formed into a rod-shaped structure extending in the up-down direction, so that the fixing member 311 has a simple structure, is easy to process and manufacture, and is conducive to reducing production costs.

[0073] In some embodiments, when the matching section 312 needs to be disassembled from the connecting portion 23, the seed crystal rope is moved downward to drive the fixing member 311 to move downward, and then the seed crystal rope is rotated so that the seed crystal rope drives the fixing member 311 to rotate, so that the matching section 312 can be staggered with the connecting portion 23, and finally, the seed crystal rope is moved upward to drive the fixing member 311 to move upward, so as to realize the separation of the pulling component 30 from the protective member 20 and avoid the interference of the pulling component 30 with the subsequent operations; when the matching section 312 needs to be matched with the connecting portion 23, the seed crystal rope is moved downward to drive the fixing member 311 to rotate, so that the matching section 312 can be staggered with the connecting portion 23, and finally, the seed crystal rope is moved upward to drive the fixing member 311 to move upward, so as to realize the separation of the pulling component 30 from the protective member 20 and avoid the interference of the pulling component 30 with the subsequent operations. The dynamic fixing part 311 moves downward, and the matching section 312 is offset from the connecting part 23 and is located below the connecting part 23. Then, the seed crystal rope is rotated so that the seed crystal rope drives the fixing part 311 to rotate, so that the matching section 312 is opposite to the connecting part 23. Finally, the seed crystal rope is moved upward to drive the fixing part 311 to move upward, so as to achieve the matching between the matching section 312 and the connecting part 23. The seed crystal rope is further controlled to move upward to drive the fixing part 311 to move upward, so that the matching section 312 drives the connecting part 23 to move upward, so as to remove the protective part 20 from the water-cooled shield 12.

[0074] In some embodiments, Figure 3 and Figure 5 As shown, the fixing member 311 and the matching section 312 can be an integral part, which is easy to manufacture, so that the connection strength between the fixing member 311 and the matching section 312 is high, which is conducive to improving production efficiency.

[0075] In the embodiment of the present invention, the number of the connecting parts 23 can be flexibly set according to the actual situation. For example, the connecting parts 23 can be as follows: Figure 4 Four are shown, but there may be two, three, five, six or more, all of which are within the protection scope of the present invention.

[0076] In the embodiment of the present invention, the number of the matching segments 312 can be flexibly set according to actual conditions. For example, the matching segments 312 can be Figure 5 Five are shown, but there may be two, three, four, six or more, all of which are within the protection scope of the present invention.

[0077] According to some embodiments of the present invention, Figure 3 As shown, the multiple mating segments 312 and the multiple connecting parts 23 are matched one by one, so that the mating segments 312 and the connecting parts 23 can be matched more reliably, ensuring that the suspension rod assembly 31 can lift the protective part 20 more stably, avoiding the protective part 20 from tilting, facilitating the placement of the protective part 20, and avoiding the protective part 20 from colliding with other positions of the water-cooled screen 12 and causing damage.

[0078] Alternatively, the multiple connecting parts 23 can be divided into multiple groups (greater than or equal to two groups), each group of connecting parts 23 includes multiple connecting parts 23, and the multiple connecting parts 23 in the multiple groups of connecting parts 23 are alternately arranged along the circumferential direction of the protective part 20. The multiple connecting parts 23 in each group of connecting parts 23 are matched with the multiple matching sections 312 in a one-to-one manner, so that the matching sections 312 and the connecting parts 23 are more convenient to match, reducing the complexity of matching, which is beneficial to reducing the production cost of the suspension rod assembly 31, and at the same time can prevent the protective part 20 from being skewed, facilitate the placement of the protective part 20, and avoid the protective part 20 from colliding with other positions of the water cooling screen 12 and causing damage.

[0079] In some embodiments, Figure 3 As shown, there can be four matching sections 312 and four connecting parts 23. The four matching sections 312 and the four connecting parts 23 match one by one, so that the matching sections 312 and the connecting parts 23 match more reliably, ensuring that the suspension rod assembly 31 lifts the protective part 20 more stably and avoiding the protective part 20 from tilting.

[0080] In some embodiments, there can be two mating segments 312 and four connecting parts 23. The four connecting parts 23 can be divided into two groups, each group of connecting parts 23 includes two connecting parts 23, and the two connecting parts 23 in the two groups of connecting parts 23 are alternately arranged along the circumferential direction of the protective member 20. The two connecting parts 23 of one group of connecting parts 23 in the two groups can be matched with the two mating segments 312 in a one-to-one correspondence, so that the mating segments 312 and the connecting parts 23 are more convenient to match, reducing the complexity of matching, which is beneficial to reducing the production cost of the suspension rod assembly 31 and avoiding the protective member 20 from being skewed.

[0081] In some embodiments of the present invention, Figure 3 , Figure 5 and Figure 6 As shown, the lifting assembly 30 also includes a lifting rod 32, and the lifting rod 32 includes a joint 41 and a clamp 42. The upper end of the clamp 42 is connected to the seed crystal rope, so that the lifting rod 32 and the seed crystal rope can be connected. The lower end of the joint 41 is connected to the upper end of the suspension rod assembly 31, so that the lifting rod 32 and the suspension rod assembly 31 can be connected. The lifting rod 32 can be controlled to move up and down by moving the seed crystal rope up and down, so that the suspension rod assembly 31 connected to the lifting rod 32 moves up and down, which is convenient for placing and removing the protective part 20.

[0082] The chuck 42 has a mounting hole 421, and the mounting hole 421 is arranged along the axial direction (for example Figure 3), the peripheral wall of the chuck 42 is provided with a notch 422, the notch 422 is connected with the mounting hole 421, the width of the notch 422 is greater than the maximum diameter of the joint 41, the inner wall of the mounting hole 421 is provided with a support protrusion 423, the support protrusion 423 extends along the circumferential direction of the mounting hole 421, and the upper end of the joint 41 is provided with a limit portion 411, and the limit portion 411 extends along the circumferential direction of the joint 41. Thus, the joint 41 can extend into the mounting hole 421 through the notch 422, and the lower end of the limit portion 411 abuts against the upper end of the support protrusion 423, so that the chuck 42 can limit the joint 41, and the assembly of the joint 41 and the chuck 42 is realized, and the joint 41 and the chuck 42 are easy to install and disassemble, which is conducive to improving the assembly effect, and at the same time, it is convenient for the chuck 42 to be connected with other structures to meet different connection requirements. The structure of the joint 41 and the chuck 42 is simple, which is conducive to reducing the production cost.

[0083] In some embodiments, Figure 3 and Figure 5 As shown, the lower end of the joint 41 can be connected to the upper end of the fixing member 311 of the rod-shaped structure extending in the up-down direction; or, the lower end of the joint 41 can be connected to the upper end of the feeding barrel; or, there can be two joints 41, wherein the lower end of one joint 41 is connected to the upper end of the fixing member 311 of the rod-shaped structure extending in the up-down direction, and the lower end of the other joint 41 is connected to the upper end of the feeding barrel. By replacing the joint 41 that cooperates with the chuck 42, the connection requirements of the chuck 42 with different structures can be realized, which can meet the usage requirements in different situations.

[0084] In some embodiments, the chuck 42 may be a stainless steel chuck. The stainless steel has good high temperature resistance, meets the use requirements of the chuck 42 , and is conducive to extending the service life of the chuck 42 .

[0085] In some embodiments, the joint 41 and the suspension rod assembly 31 may be connected by threads to ensure that the joint 41 and the suspension rod assembly 31 are reliably connected and easy to disassemble.

[0086] According to some embodiments of the present invention, Figure 3 , Figure 5 , Figure 6 and Figure 8As shown, a flange 424 is provided on the outer peripheral wall of the chuck 42, and the flange 424 extends along the circumferential direction of the chuck 42, which is beneficial to improve the structural strength of the chuck 42. The lifting rod 32 also includes a sleeve 43, which is sleeved outside the supporting protrusion 423 and the limiting portion 411, and the lower end of the sleeve 43 abuts against the upper end of the flange 424. The sleeve 43 can limit the joint 41 to prevent the joint 41 from falling out of the chuck 42, ensuring that the joint 41 is reliably fixed in the chuck 42, and the flange 424 can limit the sleeve 43 to ensure that the sleeve 43 is reliably fixed on the chuck 42 to prevent it from falling off.

[0087] In some embodiments of the present invention, the protective member 20 may be a molybdenum member, a graphite member, a carbon-carbon member, a silicon carbide member, a silicon nitride member or a quartz member, all of which have good high temperature resistance, can meet the required requirements of the protective member 20, and are beneficial to extending the service life of the protective member 20.

[0088] According to the control method of the single crystal furnace 200 of the embodiment of the present invention, the single crystal furnace 200 is the single crystal furnace 200 of the embodiment of the present invention. The splash-proof device 100 further includes a lifting assembly 30 , and the lifting assembly 30 includes a suspension rod assembly 31 .

[0089] like Fig. 9 As shown, the control method includes:

[0090] Connect the upper end of the suspension rod assembly 31 to the seed crystal rope of the single crystal furnace 200, and preliminarily match the protective member 20 to the lower end of the suspension rod assembly 31, so that the seed crystal rope can be connected to the protective member 20 through the suspension rod assembly 31, which is convenient for subsequent operations on the protective member 20, for example, manually connect the suspension rod assembly 31 to the seed crystal rope, and manually match the protective member 20 to the lower end of the suspension rod assembly 31;

[0091] The seed crystal rope is controlled to drive the suspension rod assembly 31 to move downward, so that the protective member 20 can be placed in the water-cooled shield 12, that is, the protective member 20 is placed by driving the seed crystal rope, so that the protective member 20 is placed conveniently and reliably;

[0092] The protection member 20 is controlled to be disengaged from the lower end of the suspension rod assembly 31, and the seed crystal rope is controlled to drive the suspension rod assembly 31 to move upward, thereby enabling the suspension rod assembly 31 to be moved out of the water cooling screen 12, facilitating subsequent operations and preventing the suspension rod assembly 31 from interfering with subsequent operations;

[0093] Control the addition of silicon material into the crucible 11 to meet the material addition requirements in the crucible 11, and the water-cooling screen 12 can be protected by the protective member 20. When hydrogen jump occurs in the silicon material, the hydrogen-jumped silicon material can adhere to the protective member 20, isolating the splashed silicon material from falling on the water-cooling screen 12, thereby preventing the silicon material from adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12;

[0094] After the material is processed, the seed crystal rope is controlled to drive the suspension rod assembly 31 to move downward;

[0095] The protective member 20 is matched with the lower end of the suspension rod assembly 31 so that the protective member 20 is connected with the suspension rod assembly 31, which facilitates the subsequent operation of the protective member 20;

[0096] The seed crystal rope is controlled to drive the suspension rod assembly 31 to move upward, and the protective piece 20 is removed, so that there is no silicon material adhering to the inner wall of the water-cooled shield 12, thereby ensuring the normal use of the water-cooled shield 12, avoiding the influence of silicon splashing on the subsequent production of single crystals, facilitating subsequent operations such as crystal pulling, ensuring the crystallization rate of single crystals, and ensuring good production quality of single crystals.

[0097] Since the single crystal furnace 200 according to the embodiment of the present invention has the above-mentioned beneficial technical effects, the control method of the single crystal furnace 200 according to the embodiment of the present invention is configured such that the protective member 20 is detachably arranged in the water-cooling screen 12, and the protective member 20 is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen 12 close to the crucible 11, so that the protective member 20 can protect the water-cooling screen 12 to avoid problems such as silicon material adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12, and during the single crystal processing, the silicon liquid adsorbed on the water-cooling screen 12 is prevented from falling into the crucible 11 and polluting the silicon liquid, thereby ensuring the crystallization rate of the single crystal and ensuring the production quality of the single crystal.

[0098] In some embodiments of the present invention, Fig. 9 As shown, the single crystal furnace 200 further includes a feeding cylinder, in which silicon material is arranged, and controlling the addition of silicon material into the crucible 11 includes:

[0099] Replace the suspension rod assembly 31 on the seed crystal rope with a charging barrel. In other words, remove the suspension rod assembly 31 from the seed crystal rope so that the charging barrel is connected to the seed crystal rope.

[0100] Control the seed crystal rope to drive the feeding barrel to move downward;

[0101] The feeding cylinder is controlled to add silicon material into the crucible 11 to meet the feeding requirements in the crucible 11. Thus, the protective member 20 can be placed and the feeding cylinder can be moved up and down by the seed rope, so that the structure of the single crystal furnace 200 is simple and the single crystal furnace 200 is easy to control.

[0102] According to some embodiments of the present invention, Figure 1 and Figure 2 As shown, the single crystal furnace 200 may include a main chamber 13 and a sub-chamber, the main chamber 13 and the sub-chamber are connected to each other, the sub-chamber is located above the main chamber 13, and one side of the sub-chamber facing the main chamber 13 (for example Figure 1The lower side (shown in the figure) is opened to form an open mouth, the crucible 11 and the water-cooled shield 12 are arranged in the main chamber 13, and the seed crystal rope is connected to the upper end of the sub-chamber. After the single crystal is pulled, it is convenient to move the single crystal from the main chamber 13 to the sub-chamber for placement through the seed crystal rope, thereby meeting the processing requirements of the single crystal.

[0103] In addition, a control valve is provided between the main chamber 13 and the sub-chamber, and the control valve is used to open or close the main chamber 13. When the sub-chamber needs to be opened, closing the main chamber 13 by the control valve can prevent external air from entering the main chamber 13 and affecting the environment inside the main chamber 13, thereby ensuring the normal use of the single crystal furnace 200.

[0104] like Fig. 9 As shown, replacing the suspension rod assembly 31 on the seed rope with a charging barrel includes:

[0105] The control valve is controlled to close the main chamber 13;

[0106] Unscrewing the auxiliary chamber, that is, opening the auxiliary chamber when the control valve closes the main chamber 13, can prevent external air from entering the main chamber 13 and affecting the environment in the main chamber 13;

[0107] Control the seed crystal rope to drive the suspension rod assembly 31 to move downward, and replace the suspension rod assembly 31 with a charging barrel. In other words, remove the suspension rod assembly 31 from the seed crystal rope so that the charging barrel is connected to the seed crystal rope, so as to facilitate the subsequent addition of silicon material to the crucible 11, and the seed crystal rope moves downward for easy replacement;

[0108] Control the seed crystal rope to drive the feeding barrel to move upward, so that the feeding barrel can be located in the auxiliary chamber, which is convenient for subsequent operations;

[0109] Swing back to the auxiliary room;

[0110] The control valve is controlled to open the main chamber 13 so that the main chamber 13 can be connected to the auxiliary chamber, which is convenient for the operation of moving the charging barrel downward. Thus, the suspension rod assembly 31 and the charging barrel are easily replaced, and the opening and closing of the main chamber 13 can be controlled by the control valve to meet different usage requirements.

[0111] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the single crystal furnace 200 includes a main chamber 13 and a sub-chamber, the main chamber 13 and the sub-chamber are connected to each other, the sub-chamber is located above the main chamber 13, and the side of the sub-chamber facing the main chamber 13 is open to form an open mouth, the crucible 11 and the water-cooled shield 12 are arranged in the main chamber 13, and the seed crystal rope is connected to the upper end of the sub-chamber. After the single crystal is pulled, it is convenient to move the single crystal from the main chamber 13 to the sub-chamber for placement through the seed crystal rope, so as to meet the processing requirements of the single crystal.

[0112] In addition, a control valve is provided between the main chamber 13 and the sub-chamber, and the control valve is used to open or close the main chamber 13. When the sub-chamber needs to be opened, closing the main chamber 13 by the control valve can prevent external air from entering the main chamber 13 and affecting the environment inside the main chamber 13, thereby ensuring the normal use of the single crystal furnace 200.

[0113] like Fig. 9 As shown, the upper end of the suspension rod assembly 31 is connected to the seed crystal rope of the single crystal furnace 200, and the protective member 20 is preliminarily matched with the lower end of the suspension rod assembly 31, including:

[0114] The control valve is controlled to close the main chamber 13;

[0115] Unscrewing the auxiliary chamber, that is, opening the auxiliary chamber when the control valve closes the main chamber 13, can prevent external air from entering the main chamber 13 and affecting the environment in the main chamber 13;

[0116] Control the seed crystal rope to move downward, connect the upper end of the suspension rod assembly 31 with the seed crystal rope, and preliminarily match the protective member 20 with the lower end of the suspension rod assembly 31, so as to realize the connection between the seed crystal rope and the suspension rod assembly 31, and the matching of the protective member 20 with the lower end of the suspension rod assembly 31, for example, by manually connecting the suspension rod assembly 31 with the seed crystal rope, and manually matching the protective member 20 with the lower end of the suspension rod assembly 31;

[0117] Control the seed crystal rope to drive the suspension rod assembly 31 to move upward, so that the protective element 20 and the suspension rod assembly 31 can be located in the auxiliary chamber, which is convenient for subsequent operations;

[0118] Swing back to the auxiliary room;

[0119] The control valve is controlled to open the main chamber 13 so that the main chamber 13 can communicate with the auxiliary chamber, which facilitates the downward movement of the suspension rod assembly 31 and the protective member 20. In this way, it is convenient to connect the seed crystal rope with the suspension rod assembly 31, and the suspension rod assembly 31 with the protective member 20, and the opening and closing of the main chamber 13 can be controlled by the control valve, which can meet different usage requirements.

[0120] In some embodiments, after controlling the control valve to close the main chamber 13 and before opening the auxiliary chamber, the control method further includes:

[0121] By inflating the auxiliary chamber, the air pressure in the auxiliary chamber can be controlled to be the same as the external air pressure, which facilitates the opening of the auxiliary chamber and avoids problems such as resistance caused by low air pressure in the auxiliary chamber. For example, argon gas can be injected into the auxiliary chamber to achieve the same air pressure in the auxiliary chamber as that outside.

[0122] According to some embodiments of the present invention, after the secondary chamber is swung back and before the control valve is controlled to open the main chamber 13, the control method further includes:

[0123] By evacuating the sub-chamber and opening the main chamber 13 with a control valve, it is possible to prevent external air in the sub-chamber from entering the main chamber 13 and affecting the environment in the main chamber 13 , thereby ensuring normal use of the single crystal furnace 200 .

[0124] In some embodiments, the sub-chamber is evacuated multiple times to ensure that the evacuation of the sub-chamber is more reliable, to prevent other gases from accumulating in the sub-chamber and entering the main chamber 13 to affect the environment in the main chamber 13, and to ensure the normal processing of the single crystal. For example, the sub-chamber is evacuated twice, first evacuating the sub-chamber, then flushing argon gas into the sub-chamber, and finally evacuating the sub-chamber again, which can ensure that no other gas accumulates in the sub-chamber, and to ensure the normal processing of the single crystal.

[0125] In some embodiments, when rotating the sub-chamber, manually controlling the seed rope to stabilize can prevent the seed rope from shaking and affecting subsequent operations, thereby ensuring reliable operation of the seed rope.

[0126] According to some embodiments of the present invention, an observation port is provided on the sub-chamber, through which the inside of the sub-chamber can be observed, and the seed crystal rope in the sub-chamber can be observed, so as to facilitate control of the seed crystal rope.

[0127] In some embodiments of manually controlling the stabilization of the seed rope, the seed rope can be manually stabilized by reaching into the observation port to ensure that the seed rope is stable and reliable, thereby facilitating control.

[0128] In some embodiments of the present invention, Fig. 9 As shown, after controlling the feeding cylinder to add silicon material into the crucible 11, and before controlling the seed crystal rope to drive the suspension rod assembly 31 to move downward after the material to be processed is finished, the control method includes:

[0129] The seed crystal rope is controlled to drive the feeding barrel to move upward. After the feeding barrel is filled with materials, the feeding barrel can be easily taken out by controlling the seed crystal rope;

[0130] The feeding cylinder on the seed crystal rope is replaced with the suspension rod assembly 31 . In other words, the feeding cylinder is removed from the seed crystal rope so that the suspension rod assembly 31 is connected to the seed crystal rope, which is convenient for subsequent operations and for removing the protective member 20 .

[0131] In some embodiments, replacing the charging barrel on the seed rope with the boom assembly 31 includes:

[0132] The control valve is controlled to close the main chamber 13;

[0133] Unscrewing the auxiliary chamber, that is, opening the auxiliary chamber when the control valve closes the main chamber 13, can prevent external air from entering the main chamber 13 and affecting the environment in the main chamber 13;

[0134] The seed crystal rope is controlled to drive the feeding barrel to move downward, and the feeding barrel is replaced with the suspension rod assembly 31. In other words, the feeding barrel is removed from the seed crystal rope so that the suspension rod assembly 31 is connected to the seed crystal rope, which is convenient for the subsequent operation of taking out the protective element 20, and the seed crystal rope moves downward for easy replacement;

[0135] Control the seed crystal rope to drive the suspension rod assembly 31 to move upward, so that the suspension rod assembly 31 can be located in the auxiliary chamber, which is convenient for subsequent operations;

[0136] Swing back to the auxiliary room;

[0137] The control valve is controlled to open the main chamber 13 so that the main chamber 13 can communicate with the auxiliary chamber, which is convenient for the operation of moving the boom assembly 31 downward. As a result, the boom assembly 31 and the feeding barrel are easily replaced, and the opening and closing of the main chamber 13 can be controlled by the control valve to meet different usage requirements.

[0138] According to some embodiments of the present invention, Figure 2-Figure 5 As shown, a connecting portion 23 is provided on the inner wall of the protective member 20, and the suspension rod assembly 31 includes a fixing member 311, and the upper end of the fixing member 311 is connected to the seed crystal rope, which can realize the connection between the suspension rod assembly 31 and the seed crystal rope and ensure that the suspension rod assembly 31 and the seed crystal rope are reliably connected.

[0139] In addition, if Figure 3-Figure 5 As shown, the suspension rod assembly 31 also includes a matching section 312, which is arranged on the fixing member 311, one end of the matching section 312 is connected to the fixing member 311, and the other end of the matching section 312 extends in the radial outward direction of the fixing member 311. There are multiple connecting parts 23 and matching sections 312, and multiple connecting parts 23 are arranged at intervals along the circumferential direction of the protective member 20. Multiple matching sections 312 are arranged at intervals along the circumferential direction of the fixing member 311. When the matching sections 312 and the connecting parts 23 are matched, the multiple matching sections 312 are located below the multiple connecting parts 23. Therefore, through the matching of multiple matching sections 312 and multiple connecting parts 23, it can be ensured that the suspension rod assembly 31 lifts the protective member 20 more stably, and the protective member 20 can be prevented from falling off. In addition, the suspension rod assembly 31 has a simple structure, is easy to process and manufacture, and is conducive to reducing production costs.

[0140] like Fig. 9 As shown, controlling the protective member 20 to disengage from the lower end of the suspension rod assembly 31 and controlling the seed crystal rope to drive the suspension rod assembly 31 to move upwards includes:

[0141] Continue to control the seed crystal rope to drive the suspension rod assembly 31 to move downward, that is, after the protection member 20 is placed in the water-cooling shield 12, the suspension rod assembly 31 can be disengaged from the protection member 20;

[0142] Controlling the rotation of the seed rope can make the connection portion 23 and the matching section 312 staggered, which is convenient for the subsequent operation of the boom assembly 31;

[0143] Controlling the seed crystal rope to drive the boom assembly 31 to move upward can realize the retraction of the boom assembly 31, and prevent the boom assembly 31 from affecting subsequent operations. In addition, the removal control of the boom assembly 31 is simple, which facilitates the control of the single crystal furnace 200.

[0144] In some embodiments of the present invention, Fig. 9 As shown, the protection member 20 is matched with the lower end of the suspension rod assembly 31, including:

[0145] The matching section 312 and the connecting portion 23 are controlled to be staggered in the circumferential direction, so as to facilitate the movement of the suspension rod assembly 31 and avoid interference between the matching section 312 and the connecting portion 23;

[0146] Control the seed crystal rope to drive the suspension rod assembly 31 to move downward, so that the matching section 312 is located below the connecting portion 23 in the vertical direction, which is convenient for subsequent operations;

[0147] By controlling the rotation of the seed crystal rope, the mating section 312 can be located directly below the connecting portion 23. When the seed crystal rope is controlled to drive the suspension rod assembly 31 to move upward, the protective member 20 can be mated with the lower end of the suspension rod assembly 31, making the coordination between the protective member 20 and the suspension rod assembly 31 simple to control, thereby facilitating the control of the single crystal furnace 200 and the removal of the protective member 20.

[0148] According to some embodiments of the present invention, the seed crystal rope is controlled to move downward to place the protective member 20 in front of the water cooling shield 12, and the control method further includes:

[0149] The water-cooling shield 12 is raised from the initial position to the upper limit position. In other words, the position of the water-cooling shield 12 is raised to facilitate the placement of the protective member 20 , ensure that the protective member 20 is placed reliably, and avoid the protective member 20 from contacting the silicon liquid in the crucible 11 and causing damage.

[0150] It should be noted that the “initial position” refers to the position of the water-cooling shield 12 during the single crystal manufacturing process.

[0151] In some embodiments of the present invention, after controlling the seed crystal rope to drive the boom assembly 31 to move upward and taking out the protective member 20, the control method includes:

[0152] The water-cooling shield 12 is controlled to descend from the upper limit position to the initial position, which is convenient for the subsequent manufacture of the single crystal. When the water-cooling shield 12 is at the initial position, it is convenient to cool the single crystal, which is beneficial to improving production efficiency.

[0153] Other structures and operations of the single crystal furnace 200 and the control method of the single crystal furnace 200 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0154] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0155] In the description of this specification, the description with reference to the terms "embodiment", "specific embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0156] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A single crystal furnace, characterized in that: include: Crucible; A water cooling screen, which is arranged above the crucible and is in a ring shape; The splash-proof device comprises a protective member, which is detachably arranged in the water-cooling shield, and the protective member is formed in a ring shape and at least covers the inner peripheral wall of the water-cooling shield at one end close to the crucible.

2. The single crystal furnace according to claim 1, characterized in that: The inner peripheral wall of the water-cooling panel includes an inclined section, which is formed in a ring shape. In the direction from bottom to top, the inclined section extends obliquely in a direction away from the central axis of the water-cooling panel. The protective member includes: The abutting portion is formed in a ring shape. In a direction from bottom to top, the abutting portion extends obliquely toward the radial outward direction of the water-cooling panel to abut against the inner peripheral wall of the water-cooling panel.

3. The single crystal furnace according to claim 2, characterized in that: The inner peripheral wall of the water-cooling screen further includes a straight section, the straight section is formed in a ring shape, the upper end of the straight section is connected to the lower end of the inclined section, the straight section has the same inner diameter in the upper and lower directions, and the protective member further includes: The straight tube part is formed into a ring shape, the upper end of the straight tube part is connected to the lower end of the abutment part, the straight tube part has the same outer diameter in the up and down directions, and the straight tube part is located in the straight tube section.

4. The single crystal furnace according to claim 1, characterized in that: The single crystal furnace includes a seed crystal rope, and the splash-proof device also includes: A lifting assembly, the lifting assembly includes a suspension rod assembly, the upper end of the suspension rod assembly is connected to the seed crystal rope, the suspension rod assembly is suitable for being movably arranged in the water-cooling screen along the up and down directions to place the protective element in the water-cooling screen, and the suspension rod assembly is detachably connected to the protective element.

5. The single crystal furnace according to claim 4, characterized in that: A connecting portion is provided on the inner circumferential wall of the protective member, and the suspension rod assembly includes a fixing member and a mating segment provided on the fixing member, the upper end of the fixing member is connected to the seed crystal rope, one end of the mating segment is connected to the fixing member, and the other end of the mating segment extends radially outward from the fixing member, the connecting portions are multiple and are arranged at intervals along the circumferential direction of the protective member, the mating segments are multiple and are arranged at intervals along the circumferential direction of the fixing member, and the multiple mating segments are detachably connected to the multiple connecting portions.

6. The single crystal furnace according to claim 5, characterized in that: The fixing member is formed into a rod-shaped structure extending in an up-down direction.

7. The single crystal furnace according to claim 5, characterized in that: The plurality of matching sections match the plurality of connecting parts in a one-to-one correspondence; Alternatively, the multiple connecting parts are multiple groups, each group of connecting parts includes multiple connecting parts, the multiple connecting parts in the multiple groups of connecting parts are alternately arranged along the circumferential direction of the protective member, and the multiple connecting parts in each group of connecting parts are matched with the multiple matching sections one by one.

8. The single crystal furnace according to claim 4, characterized in that: The lifting assembly further includes a lifting rod, and the lifting rod includes: A joint, the lower end of which is connected to the upper end of the suspension rod assembly, and the upper end of the joint is provided with a limiting portion extending along the circumferential direction of the joint; A chuck, the upper end of which is connected to the seed crystal rope, the chuck having a mounting hole extending in an axial direction, the chuck having a notch on its peripheral wall which is connected to the mounting hole, the width of the notch being greater than the maximum diameter of the joint, the inner wall of the mounting hole having a supporting protrusion which extends in a circumferential direction of the mounting hole, the joint being suitable for extending into the mounting hole through the notch, and the lower end of the limiting portion being suitable for abutting against the upper end of the supporting protrusion.

9. The single crystal furnace according to claim 8, characterized in that: The outer peripheral wall of the chuck is provided with a flange extending along the circumferential direction of the chuck, and the lifting rod also includes a sleeve, which is suitable for being sleeved outside the supporting protrusion and the limiting portion, and the lower end of the sleeve is against the upper end of the flange.

10. The single crystal furnace according to claim 1, characterized in that: The protective part is a molybdenum part, a graphite part, a carbon-carbon part, a silicon carbide part, a fiber-reinforced ceramic-based composite material part, silicon nitride or a quartz part.

11. A method for controlling a single crystal furnace, characterized in that: The single crystal furnace is a single crystal furnace according to any one of claims 1 to 10, the splash-proof device further comprises a lifting assembly, the lifting assembly comprises a suspension rod assembly, and the control method comprises: Connecting the upper end of the suspension rod assembly to the seed crystal rope of the single crystal furnace, and preliminarily matching the protective member with the lower end of the suspension rod assembly; Controlling the seed crystal rope to drive the suspension rod assembly to move downward, so as to place the protective element in the water cooling shield; Controlling the protective member to disengage from the lower end of the suspension rod assembly, and controlling the seed crystal rope to drive the suspension rod assembly to move upward; Controlling the addition of silicon material into the crucible; After the material is processed, the seed crystal rope is controlled to drive the suspension rod assembly to move downward; engaging the guard with the lower end of the boom assembly; The seed crystal rope is controlled to drive the suspension rod assembly to move upward, and the protective piece is removed.

12. The control method of a single crystal furnace according to claim 11, characterized in that: The single crystal furnace further includes a feeding cylinder, in which silicon material is arranged, and the controlling of adding silicon material into the crucible includes: Replacing the suspension rod assembly on the seed crystal rope with the charging barrel; Controlling the seed crystal rope to drive the feeding barrel to move downward; The feeding cylinder is controlled to add silicon material into the crucible.

13. The control method of a single crystal furnace according to claim 12, characterized in that: The single crystal furnace comprises a main chamber and a sub-chamber which are interconnected, the sub-chamber being located above the main chamber and the side of the sub-chamber facing the main chamber being open to form an open opening, the crucible and the water cooling shield being arranged in the main chamber, the seed crystal rope being connected to the upper end of the sub-chamber, a control valve for opening or closing the main chamber being arranged between the main chamber and the sub-chamber, and the replacing of the suspension rod assembly on the seed crystal rope with the charging barrel comprising: controlling the control valve to close the main chamber; Unscrewing the auxiliary chamber; Control the seed crystal rope to drive the suspension rod assembly to move downward, and replace the suspension rod assembly with the feeding barrel; Controlling the seed crystal rope to drive the feeding cylinder to move upward so as to place the feeding cylinder in the auxiliary chamber; rotating the secondary chamber; The control valve is controlled to open the main chamber.

14. The control method of a single crystal furnace according to claim 11, characterized in that: The single crystal furnace comprises a main chamber and a sub-chamber which are interconnected, the sub-chamber being located above the main chamber and the side of the sub-chamber facing the main chamber being open to form an open opening, the crucible and the water cooling shield being arranged in the main chamber, the seed crystal rope being connected to the upper end of the sub-chamber, a control valve for opening or closing the main chamber being arranged between the main chamber and the sub-chamber, the upper end of the suspension rod assembly being connected to the seed crystal rope of the single crystal furnace, and the protective member being preliminarily matched with the lower end of the suspension rod assembly comprising: controlling the control valve to close the main chamber; Unscrewing the auxiliary chamber; Control the seed crystal rope to move downward, connect the upper end of the suspension rod assembly with the seed crystal rope, and preliminarily match the protective member with the lower end of the suspension rod assembly; Controlling the seed crystal rope to drive the suspension rod assembly to move upward so as to place the protective element and the suspension rod assembly in the auxiliary chamber; rotating the secondary chamber; The control valve is controlled to open the main chamber.

15. The control method of a single crystal furnace according to claim 13 or 14, characterized in that: After controlling the control valve to close the main chamber and before opening the secondary chamber, the control method further includes: The auxiliary chamber is filled with air to control the air pressure in the auxiliary chamber to be the same as the external air pressure.

16. The control method of a single crystal furnace according to claim 13 or 14, characterized in that: After rotating the secondary chamber and before controlling the control valve to open the main chamber, the control method further includes: A vacuum is drawn into the secondary chamber.

17. The control method of a single crystal furnace according to claim 12, characterized in that: After controlling the feeding cylinder to add silicon material into the crucible, and before controlling the seed crystal rope to drive the suspension rod assembly to move downward after the material to be processed is finished, the control method includes: Controlling the seed crystal rope to drive the feeding barrel to move upward; The charging barrel on the seed rope is replaced with the boom assembly.

18. The control method of a single crystal furnace according to claim 11, characterized in that: A connecting portion is provided on the inner circumferential wall of the protective member, the suspension rod assembly includes a fixing member and a matching segment provided on the fixing member, the upper end of the fixing member is connected to the seed crystal rope, one end of the matching segment is connected to the fixing member, and the other end of the matching segment extends radially outward from the fixing member, the connecting portion is a plurality of connecting portions arranged at intervals along the circumferential direction of the protective member, the matching segments are a plurality of matching segments arranged at intervals along the circumferential direction of the fixing member, when the matching segments and the connecting portion are matched, the plurality of matching segments are located below the plurality of connecting portions, and the controlling the protective member to disengage from the lower end of the suspension rod assembly and controlling the seed crystal rope to drive the suspension rod assembly to move upwards comprises: Continue to control the seed crystal rope to drive the suspension rod assembly to move downward; Controlling the seed crystal rope to rotate so that the connecting portion and the matching section are staggered; The seed crystal rope is controlled to drive the suspension rod assembly to move upward.

19. The control method of a single crystal furnace according to claim 18, characterized in that: The step of matching the guard with the lower end of the boom assembly comprises: Controlling the matching section and the connecting portion to be staggered in the circumferential direction; Controlling the seed crystal rope to drive the suspension rod assembly to move downward, so that the matching section is located below the connecting portion in the up-down direction; The seed rope is controlled to rotate so that the matching section is located directly below the connecting portion.

20. The control method of a single crystal furnace according to claim 11, characterized in that: Controlling the seed crystal rope to move downward to place the protective element in front of the water cooling screen, the control method further includes: The water cooling screen is raised from the initial position to the upper limit position.

21. The control method of a single crystal furnace according to claim 20, characterized in that: After controlling the seed crystal rope to drive the suspension rod assembly to move upward and taking out the protective element, the control method includes: The water cooling screen is controlled to descend from the upper limit position to the initial position.

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