Single crystal furnace

Abstract

The invention discloses a single crystal furnace, which comprises: a furnace body, the upper wall surface of which is provided with a charging hole; the crucible is arranged in the furnace body; the water cooling screen is arranged in the furnace body and is positioned above the crucible; the feeding device comprises a feeder and a feeding assembly, the feeder is arranged outside the furnace body, the feeding assembly comprises a feeding pipe communicated with the feeder, the feeding pipe is arranged in the feeding hole in a penetrating mode so as to extend into the furnace body, and a discharging opening of the feeding pipe extends to the position above the opening of the water cooling screen. According to the single crystal furnace provided by the invention, the operation step of re-feeding the silicon material can be simplified, the processing efficiency is improved, the heat loss is avoided, and the thermal insulation performance is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal manufacturing, and more specifically, to a single crystal furnace. Background Art

[0002] In the related art, when a single crystal is manufactured by a direct-pull single crystal method, silicon material is added to a crucible by carrying it through a quartz tube. However, due to the capacity limitation of the quartz tube, the weight of silicon material carried by the quartz tube at a time is small, and the quartz tube needs to carry the silicon material multiple times, resulting in a single re-addition requiring multiple repeated operations of the quartz tube to add material, and the single crystal needs to be taken out before silicon material can be re-added, which results in a certain waste of working hours and affects processing efficiency. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a single crystal furnace, which can simplify the operation steps of re-feeding silicon materials, improve processing efficiency, avoid heat loss, and ensure thermal insulation performance.

[0004] A single crystal furnace according to an embodiment of the present invention comprises: a furnace body, wherein an upper wall surface of the furnace body is provided with a feeding hole; a crucible, wherein the crucible is arranged in the furnace body; a water-cooling screen, wherein the water-cooling screen is arranged in the furnace body and is located above the crucible; a feeding device, wherein the feeding device comprises a feeder and a feeding assembly, wherein the feeder is arranged outside the furnace body, and the feeding assembly comprises a feeding pipe connected to the feeder, wherein the feeding pipe is passed through the feeding hole to extend into the furnace body, and wherein the discharge port of the feeding pipe extends to above the opening of the water-cooling screen.

[0005] According to the single crystal furnace of the embodiment of the present invention, a feeding hole is provided through the upper wall surface of the furnace body, a feeding pipe of the feeding device is passed through the feeding hole to extend into the furnace body, and a discharge port of the feeding pipe extends to above the opening of the water-cooling screen, so that the silicon material in the feeder can be added to the crucible through the feeding pipe, thereby avoiding the cumbersomeness of re-feeding silicon material through a quartz tube in the related art, simplifying the operation steps of re-feeding silicon material, saving working hours, improving processing efficiency, and avoiding the problem of heat loss caused by opening a hole in the insulation tube in the related art, thereby ensuring the insulation performance of the single crystal furnace, reducing power consumption, and ensuring the manufacturing demand for single crystals.

[0006] In addition, the single crystal furnace according to the above embodiment of the present invention may also have the following additional technical features:

[0007] According to the single crystal furnace of some embodiments of the present invention, one end of the feeding pipe away from the feeder extends downwardly and tiltedly.

[0008] According to some embodiments of the present invention, the feeding pipe includes: a fixed pipe, one end of which is connected to the feeder and the fixed pipe is connected to the furnace body; a movable pipe, at least part of which is located in the furnace body, the movable pipe is connected to the other end of the fixed pipe and can move along the length direction of the fixed pipe, and one end of the movable pipe away from the fixed pipe is configured as the discharge port.

[0009] According to some embodiments of the present invention, the feeding assembly further includes: a connecting pipe, which is disposed outside the furnace body and has two ends respectively connected to the feeder and the furnace body, and the feeding pipe is inserted into the connecting pipe.

[0010] According to some embodiments of the present invention, the connecting pipe includes: a first fixed section and a second fixed section separated from each other, one end of the first fixed section is connected to the furnace body, and one end of the second fixed section is connected to the feeder; an adjusting section, both ends of the adjusting section in the length direction are respectively connected to an end of the first fixed section away from the furnace body and an end of the second fixed section away from the feeder, the feeding pipe is sequentially inserted into the first fixed section, the adjusting section and the second fixed section, the length of the adjusting section is adjustable and the angle between the two end surfaces of the adjusting section in the axial direction is adjustable.

[0011] According to some embodiments of the present invention, the connecting pipe is sealedly connected to the furnace body.

[0012] According to some embodiments of the present invention, the feeder and the connecting pipe are detachably connected.

[0013] According to some embodiments of the present invention, a valve body is provided at one end of the connecting pipe facing away from the furnace body, and the end of the feeding pipe away from the furnace body is located on the side of the valve body close to the furnace body. After the feeder is disassembled, the valve body is used to seal the connecting pipe.

[0014] According to some embodiments of the present invention, a guide pipe section is provided at one end of the feeding pipe facing away from the furnace body, and the aperture of the guide pipe section gradually increases in the direction from the furnace body to the feeder, and the discharge pipe of the feeder is suitable for extending into the guide pipe section.

[0015] According to some embodiments of the present invention, the feeder is provided with a weighing device for detecting the weight of the silicon material in the feeder.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention, wherein the moving tube is retracted;

[0019] Figure 2 yes Figure 1 The middle circle shows the enlarged structural schematic diagram of A;

[0020] Figure 3 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention, wherein a movable tube is extended.

[0021] Reference numerals:

[0022] 100. Single crystal furnace;

[0023] 10. Furnace body; 11. Feeding hole;

[0024] 20. Crucible;

[0025] 30. Water cooling screen;

[0026] 40. Feeding device; 41. Feeder; 42. Feeding assembly; 411. Discharging pipe; 421. Feeding pipe; 422. Connecting pipe;

[0027] 51, fixed pipe; 52, movable pipe; 511, guide pipe section; 521, discharge port;

[0028] 61. First fixed section; 62. Second fixed section; 63. Adjustment section. DETAILED DESCRIPTION

[0029] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0031] In the description of the present invention, "first feature" and "second feature" may include one or more such features, "plurality" means two or more, a first feature "above" or "below" the second feature may include the first and second features being directly in contact, or may include the first and second features not being in direct contact but being in contact through another feature between them, and a first feature "above", "above" and "above" the second feature may include the first feature being directly above or diagonally above the second feature, or may simply mean that the first feature is horizontally higher than the second feature.

[0032] The single crystal furnace 100 according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0033] Reference Figure 1-Figure 3 As shown, the single crystal furnace 100 according to the embodiment of the present invention may include: a furnace body 10 , a crucible 20 and a water cooling shield 30 .

[0034] Specifically, the crucible 20 and the water-cooling shield 30 are arranged in the furnace body 10, and the water-cooling shield 30 is located above the crucible 20. During the single crystal manufacturing process, the water-cooling shield 30 can quickly take away the heat at the root of the single crystal, thereby increasing the growth rate of the single crystal and accelerating the growth rate of the single crystal.

[0035] When a single crystal is manufactured by the direct pulling single crystal method, in some related technologies, silicon material is added to a crucible by carrying it through a quartz tube. However, due to the capacity limitation of the quartz tube, the weight of silicon material carried by the quartz tube at a time is small, and the quartz tube needs to carry the silicon material multiple times. For example, the quartz tube can only hold about 100 kilograms at a time, while the total weight of silicon material re-added to the single crystal furnace at a time is more than 400 kilograms, resulting in the need to repeat the quartz tube addition operation multiple times for a single re-addition, and the single crystal needs to be taken out before the silicon material can be re-added, which results in a certain waste of working hours and affects the processing efficiency. For example, in the single crystal manufacturing process, the single crystal needs to be moved from the main chamber of the single crystal furnace to the sub-chamber of the single crystal furnace, and the quartz tube needs to enter the main chamber through the sub-chamber to add silicon material into the crucible. Therefore, the quartz tube needs to wait until the single crystal is cooled and taken out of the sub-chamber before it can be re-added with silicon material. Each time the quartz tube enters the sub-chamber, the sub-chamber needs to be opened and closed, and the sub-chamber needs to be purged with argon gas, which affects the processing efficiency.

[0036] In other related technologies, the silicon material is added from the side. Specifically, a hole is made in the insulation cylinder on the side of the single crystal furnace, and a feeding pipe is inserted. The silicon material is added to the crucible through the feeding pipe to achieve the addition of silicon material to the crucible. However, due to the hole made in the insulation cylinder, the heat in the furnace body is lost, the uniformity and stability of the thermal field are destroyed, thereby reducing the insulation performance of the single crystal furnace, increasing power consumption, and affecting the manufacturing of single crystals.

[0037] Therefore, in the present invention, if Figure 1-Figure 3 As shown, a feeding hole 11 is provided on the upper wall of the furnace body 10, and the single crystal furnace 100 also includes a feeding device 40, which includes a feeder 41 and a feeding assembly 42. The feeder 41 is arranged outside the furnace body 10, and the feeding assembly 42 includes a feeding pipe 421, which is connected to the feeder 41. The feeding pipe 421 is penetrated through the feeding hole 11 to extend into the furnace body 10, and the discharge port 521 of the feeding pipe 421 extends to above the opening of the water-cooling shield 30, so that the silicon material in the feeder 41 can enter the crucible 20 from the opening of the water-cooling shield 30 through the feeding pipe 421, thereby realizing the addition of silicon material into the crucible 20. As a result, the tediousness of re-feeding silicon material through a quartz tube in the related art is avoided, the operating steps of re-feeding silicon material are simplified, working hours are saved, processing efficiency is improved, and other structures in the quartz tube are prevented from rubbing against the silicon material and contaminating the silicon material, thereby improving the quality of the single crystal. At the same time, the single crystal can be re-fed with silicon material when the sub-chamber is cooling, reducing the workload. For example, a single re-feeding can save more than 1 hour.

[0038] In addition, the present invention provides a feeding hole 11 on the upper wall of the furnace body 10, and the discharge port 521 of the feeding pipe 421 extends to above the opening of the water-cooling screen 30, thereby avoiding the problem of heat loss caused by opening a hole in the insulation tube in the related art, ensuring the insulation performance of the single crystal furnace 100, reducing power consumption, and ensuring the manufacturing demand for single crystals.

[0039] According to the single crystal furnace 100 of the embodiment of the present invention, a feeding hole 11 is provided through the upper wall surface of the furnace body 10, and a feeding pipe 421 of the feeding device 40 is penetrated through the feeding hole 11 to extend into the furnace body 10, and a discharge port 521 of the feeding pipe 421 extends to above the opening of the water-cooling screen 30, so that the silicon material in the feeder 41 can be added to the crucible 20 through the feeding pipe 421, thereby avoiding the cumbersomeness of re-feeding silicon material through a quartz tube in the related art, simplifying the operation steps of re-feeding silicon material, saving working hours, improving processing efficiency, and avoiding the problem of heat loss caused by opening a hole in the insulation tube in the related art, thereby ensuring the insulation performance of the single crystal furnace 100, reducing power consumption, and ensuring the manufacturing demand for single crystals.

[0040] In some embodiments of the present invention, Figure 1-Figure 3 As shown, one end of the feeding tube 421 away from the feeder 41 extends downwardly at an angle, so that the feeding tube 421 can guide the silicon material, making it easier for the silicon material to enter the crucible 20 through the feeding tube 421, making feeding more convenient.

[0041] According to some embodiments of the present invention, Figure 2As shown, the feeding pipe 421 includes a fixed pipe 51 and a movable pipe 52, one end of the fixed pipe 51 is in communication with the feeder 41, and the fixed pipe 51 is connected to the furnace body 10, so that the fixed pipe 51 can be fixed, and the fixed pipe 51 is conveniently limited. At least part of the movable pipe 52 is located in the furnace body 10, and the movable pipe 52 is in communication with the other end of the fixed pipe 51, and one end of the movable pipe 52 away from the fixed pipe 51 is configured as a discharge port 521, so that the silicon material in the feeder 41 can pass through the fixed pipe 51 and the movable pipe 52 and be discharged from the discharge port 521, so as to add the silicon material into the crucible 20.

[0042] In addition, if Figure 1-Figure 3 As shown, the movable tube 52 can move along the length direction of the fixed tube 51, and can realize the extension and retraction of the feeding tube 421, so as to meet the processing and manufacturing requirements of the single crystal furnace 100 for the single crystal. When it is necessary to add silicon material to the crucible 20, the movable tube 52 is driven to move toward the side away from the fixed tube 51, so that the discharge port 521 extends to the top of the opening of the water-cooling screen 30, so that the silicon material can enter the crucible 20 through the opening of the water-cooling screen 30, so as to realize the addition of silicon material to the crucible 20; after the addition of silicon material to the crucible 20 is completed, the movable tube 52 is driven to move toward the side close to the fixed tube 51, so that the feeding tube 421 can be retracted, so as to avoid the interference between the feeding tube 421 and the single crystal, and avoid the interference between the feeding tube 421 and the up and down movement of the water-cooling screen 30, so as to ensure the processing and manufacturing safety of the single crystal by the single crystal furnace 100.

[0043] In some embodiments, the end of the feeding pipe 421 away from the feeder 41 extends downwardly and obliquely, such as Figure 1-Figure 3 As shown, the movable tube 52 moves along the length direction of the fixed tube 51, so that the movable tube 52 can move upward and toward the outside of the furnace body 10, so that the movable tube 52 can avoid interference with the single crystal and the water-cooled shield 30, thereby ensuring the safety of the single crystal furnace 100 in processing and manufacturing the single crystal.

[0044] In some embodiments, the single crystal furnace 100 also includes a driving device, which is located on the furnace body 10. The driving device can drive the movable tube 52 to move along the length direction of the fixed tube 51, thereby realizing the movement demand of the movable tube 52, ensuring that the movable tube 52 moves reliably, and realizing the extension and retraction of the feeding tube 421, which is convenient for controlling the extension and retraction of the feeding tube 421, and is beneficial to improving processing efficiency.

[0045] In some embodiments of the present invention, Figure 1-Figure 3As shown, the feeding assembly 42 also includes a connecting pipe 422, which is arranged outside the furnace body 10, and the two ends of the connecting pipe 422 are respectively connected to the feeder 41 and the furnace body 10, and the connection between the feeding assembly 42 and the feeder 41 can be achieved through the connecting pipe 422, ensuring that the feeder 41 is reliably limited. In addition, the feeding pipe 421 is inserted into the connecting pipe 422, and the feeding pipe 421 can be protected by the connecting pipe 422 to prevent the feeding pipe 421 from contacting with other structures and causing damage, which is conducive to extending the service life of the feeding pipe 421.

[0046] According to some embodiments of the present invention, Figure 2 As shown, the connecting pipe 422 may include a first fixed section 61, a second fixed section 62 and an adjusting section 63, the first fixed section 61 and the second fixed section 62 are spaced apart, one end of the first fixed section 61 is connected to the furnace body 10, one end of the second fixed section 62 is connected to the feeder 41, and both ends of the adjusting section 63 in the length direction are respectively connected to one end of the first fixed section 61 away from the furnace body 10 and one end of the second fixed section 62 away from the feeder 41, thereby realizing the connection between the connecting pipe 422 and the furnace body 10 and the feeder 41 respectively, ensuring reliable positioning of the feeder 41, and the feeding pipe 421 is sequentially penetrated through the first fixed section 61, the adjusting section 63 and the second fixed section 62, realizing that the feeding pipe 421 is penetrated into the connecting pipe 422, ensuring that the connecting pipe 422 reliably protects the feeding pipe 421, and the structure of the connecting pipe 422 is simple, which is convenient for processing and manufacturing.

[0047] In addition, the length of the adjustment section 63 is adjustable, and the angle between the two end surfaces of the adjustment section 63 in the axial direction is adjustable, so that the second fixed section 62 can be adjusted by adjusting the adjustment section 63, so as to meet the connection requirements of the second fixed end and the feeder 41 at different angles and positions, and ensure that the feeder 41 is reliably connected to the connecting pipe 422. For example, the adjustment section 63 can be a compensator, etc.

[0048] In some embodiments of the present invention, the connecting tube 422 is sealed and connected to the furnace body 10, ensuring that the connecting tube 422 and the furnace body 10 are reliably sealed, avoiding heat loss in the furnace body 10, ensuring the thermal insulation performance of the single crystal furnace 100, reducing power consumption, and ensuring the manufacturing needs of single crystals.

[0049] According to some embodiments of the present invention, the feeder 41 and the connecting pipe 422 are detachably connected, so that the feeder 41 can add silicon material to the crucibles 20 of multiple single crystal furnaces 100, meet the demand of adding silicon material to the crucible 20, facilitate the recycling of the feeder 41, and help reduce production costs.

[0050] In some embodiments, a valve body is provided at the end of the connecting tube 422 facing away from the furnace body 10, and the end of the feeding tube 421 away from the furnace body 10 is located on the side of the valve body close to the furnace body 10. After the feeder 41 is disassembled, the valve body is used to seal the connecting tube 422, so that the valve body can seal the feeding hole 11, avoiding the connection between the furnace body 10 and the outside, ensuring the sealing effect of the furnace body 10, avoiding heat loss in the furnace body 10, ensuring the thermal insulation performance of the single crystal furnace 100, reducing power consumption, and ensuring the manufacturing demand for single crystals.

[0051] In some embodiments of the present invention, Figure 2 As shown, a guide pipe section 511 is provided at one end of the feeding pipe 421 which faces away from the furnace body 10. In the direction from the furnace body 10 to the feeder 41, the aperture of the guide pipe section 511 gradually increases, and the discharge pipe 411 of the feeder 41 can be extended into the guide pipe section 511. The discharge pipe 411 can be guided by the guide pipe section 511, making it more convenient for the discharge pipe 411 to extend into the guide pipe section 511, which is beneficial to improving the assembly efficiency.

[0052] In some specific embodiments, Figure 1-Figure 3 As shown, the feeder 41 and the connecting pipe 422 are detachably connected, and the connecting pipe 422 includes a first fixed section 61, a second fixed section 62 and an adjusting section 63. The first fixed section 61 and the second fixed section 62 are spaced apart, one end of the first fixed section 61 is connected to the furnace body 10, and one end of the second fixed section 62 is connected to the feeder 41. The two ends of the adjusting section 63 in the length direction are respectively connected to the end of the first fixed section 61 away from the furnace body 10 and the end of the second fixed section 62 away from the feeder 41. The length of the adjusting section 63 is adjustable and the angle between the two end surfaces of the adjusting section 63 in the axial direction is adjustable. By adjusting the adjusting section 63, the feeder 41 is easily connected to the connecting pipe 422, which can meet the connection requirements of the second fixed end and the feeder 41 at different angles and positions, thereby ensuring that the feeder 41 and the connecting pipe 422 are reliably connected.

[0053] In addition, if Figure 2 As shown, a guide pipe section 511 is provided at one end of the feeding pipe 421 which faces away from the furnace body 10. In the direction from the furnace body 10 to the feeder 41, the aperture of the guide pipe section 511 gradually increases, ensuring that the discharge pipe 411 can be more reliably inserted into the guide pipe section 511, thereby avoiding the feeder 41 from being offset and causing the discharge pipe 411 and the feeding pipe 421 to be offset. This ensures that the discharge pipe 411 and the feeding pipe 421 can be reliably matched, which is beneficial to improving the connection reliability of the feeder 41 and the feeding assembly 42 and improving the assembly efficiency.

[0054] According to some embodiments of the present invention, a weighing device is provided on the feeder 41, and the weighing device is used to detect the weight of the silicon material in the feeder 41. The weighing device can obtain the weight of the silicon material added once or multiple times, thereby ensuring that the weight of the silicon material added to the crucible 20 is more accurate and meets the processing requirements of the single crystal.

[0055] Other structures and operations of the single crystal furnace 100 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0056] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] In the description of this specification, the description with reference to the terms "embodiment", "specific embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0058] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A single crystal furnace, characterized in that: include: A furnace body, wherein the upper wall surface of the furnace body is provided with a feeding hole; A crucible, wherein the crucible is disposed in the furnace body; A water cooling screen, the water cooling screen is arranged in the furnace body and located above the crucible; A feeding device, the feeding device includes a feeder and a feeding assembly, the feeder is arranged outside the furnace body, the feeding assembly includes a feeding pipe connected to the feeder, the feeding pipe is passed through the feeding hole to extend into the furnace body, and the discharge port of the feeding pipe extends to above the opening of the water-cooled screen.

2. The single crystal furnace according to claim 1, characterized in that: One end of the feeding pipe away from the feeder extends downwardly and obliquely.

3. The single crystal furnace according to claim 1, characterized in that: The feeding pipe comprises: A fixed pipe, one end of which is communicated with the feeder, and the fixed pipe is connected to the furnace body; A movable pipe, at least part of which is located in the furnace body, is communicated with the other end of the fixed pipe and can move along the length direction of the fixed pipe, and one end of the movable pipe away from the fixed pipe is configured as the discharge port.

4. The single crystal furnace according to claim 1, characterized in that: The feeding assembly also includes: A connecting pipe is arranged outside the furnace body and has two ends respectively connected to the feeder and the furnace body, and the feeding pipe is passed through the connecting pipe.

5. The single crystal furnace according to claim 4, characterized in that: The connecting pipe comprises: A first fixed section and a second fixed section are spaced apart, one end of the first fixed section is connected to the furnace body, and one end of the second fixed section is connected to the feeder; An adjusting section, both ends of the adjusting section in the length direction are respectively connected to an end of the first fixed section away from the furnace body and an end of the second fixed section away from the feeder, the feeding pipe is sequentially arranged in the first fixed section, the adjusting section and the second fixed section, the length of the adjusting section is adjustable and the angle between the two end surfaces of the adjusting section in the axial direction is adjustable.

6. The single crystal furnace according to claim 4, characterized in that: The connecting pipe is sealed and connected to the furnace body.

7. The single crystal furnace according to claim 4, characterized in that: The feeder and the connecting pipe are detachably connected.

8. The single crystal furnace according to claim 7, characterized in that: A valve body is provided at one end of the connecting pipe away from the furnace body, and one end of the feeding pipe away from the furnace body is located on a side of the valve body close to the furnace body. After the feeder is disassembled, the valve body is used to block the connecting pipe.

9. The single crystal furnace according to claim 7, characterized in that: A guide pipe section is provided at one end of the feeding pipe away from the furnace body. The aperture of the guide pipe section gradually increases in the direction from the furnace body to the feeder, and the discharge pipe of the feeder is suitable for extending into the guide pipe section.

10. The single crystal furnace according to claim 1, characterized in that: The feeder is provided with a weighing device for detecting the weight of the silicon material in the feeder.

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