External water cooling ring structure of reaction cavity
By designing the annular heat dissipation chamber and heat dissipation water channel structure outside the vacuum reaction chamber, the problems of high cost and poor cooling effect of the external heat dissipation water channel outside the vacuum reaction chamber are solved, and low-cost and high-efficiency cooling effect is achieved, and the inner ring wall thickness can be thinner , higher heat dissipation efficiency.
Patent Information
- Application Number
- CN202411180927.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-27
- Publication Date
- 2024-12-20
AI Technical Summary
In the prior art, the external heat dissipation water channel of the vacuum reaction chamber has high cost and poor cooling effect, making it difficult to effectively improve the cooling efficiency.
Design a water-cooled ring structure outside the reaction chamber. By forming an annular heat dissipation chamber between the inner and outer ring walls and setting a heat dissipation water channel therein, a closed structure is formed using the upper flange and the lower flange to improve cooling efficiency. At the same time, reduce production costs.
A low-cost and high-efficiency cooling effect is achieved, the inner ring wall thickness can be thinner, the heat dissipation efficiency is higher, and the cooling performance is further improved by preferential designs such as partition rings and flow channels.
Smart Images
Figure CN119164164A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of silicon wafer manufacturing equipment, and more specifically, to a water cooling ring structure outside a reaction chamber. Background Art
[0002] When silicon wafers react in a vacuum reaction chamber, in order to improve the cooling efficiency in the vacuum reaction chamber, heat dissipation channels are usually machined inside the wall thickness of the chamber or welded on the outer surface. The cost of machining heat dissipation channels inside is high, while directly welding channels on the outer surface increases the volume and reduces the cooling contact surface, resulting in poor cooling effect. Therefore, a cooling structure that can control the cost of external devices and improve cooling efficiency is urgently needed to solve the above technical problems. Summary of the invention
[0003] The present invention overcomes the shortcomings of the prior art of high cost and poor cooling effect of processing heat dissipation water channels outside the vacuum reaction chamber, and provides a water-cooling ring structure outside the reaction chamber, which can improve the cooling efficiency and has the advantage of low production cost.
[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions: a water-cooling ring structure outside a reaction chamber, comprising: an inner ring wall and an outer ring wall arranged concentrically, an annular heat dissipation chamber is formed between the inner ring wall and the outer ring wall, an upper flange and a lower flange are respectively arranged at both ends of the inner ring wall and the outer ring wall, and the upper flange and the lower flange make the annular heat dissipation chamber form a closed structure; a heat dissipation water channel is arranged in the annular heat dissipation chamber, a water inlet interface is arranged at one end of the heat dissipation water channel, and a water outlet interface is arranged at the other end of the heat dissipation water channel; cooling water enters the heat dissipation water channel from the water inlet interface and flows out from the water outlet interface.
[0005] In the present invention, an annular heat dissipation cavity is formed between the inner ring wall and the outer ring wall, and the upper flange and the lower flange are arranged at both ends of the annular heat dissipation cavity in the axial direction, so that the annular heat dissipation cavity is enclosed into a closed annular heat dissipation cavity under the cooperation between the inner ring wall and the outer ring wall, the upper flange and the lower flange. A heat dissipation water channel is arranged in the annular heat dissipation cavity, and a water inlet interface is arranged at one end of the heat dissipation water channel and a water outlet interface is arranged at the other end. After the cooling water enters the annular heat dissipation cavity from the water inlet interface, the cooling water flows in the cooling water channel, thereby taking away the heat in the reaction cavity at the middle position of the inner ring wall, thereby playing a role in heat dissipation, and then the cooling water flows out from the water outlet interface to complete the cooling of the inner ring wall and the outer ring wall. Compared with the prior art, the present application sets the shell of the reaction chamber to a structure containing an annular heat dissipation chamber. Therefore, compared with the prior art in which a heat dissipation water channel is set on the shell of the reaction chamber, the present application has the advantage of low cost, and the thickness of the inner ring wall can be thinner than the thickness of the shell of the reaction chamber in which the heat dissipation water channel is directly set on the shell of the reaction chamber, so that the heat dissipation efficiency can be higher.
[0006] Preferably, the heat dissipation water channel includes a plurality of baffle rings arranged along the axial direction, the plurality of baffle rings divide the annular heat dissipation cavity into a plurality of heat dissipation small ring cavities arranged along the axial direction, and the plurality of baffle rings are provided with at least one baffle perforation connecting adjacent heat dissipation small ring cavities; the water inlet interface is connected to the heat dissipation small ring cavity at the bottom end in the axial direction, and the water outlet interface is connected to the heat dissipation small ring cavity at the top end in the axial direction.
[0007] By arranging a plurality of baffle rings in the annular heat dissipation cavity and arranging baffle perforations on the baffle rings, the annular heat dissipation cavity is divided into a plurality of small heat dissipation ring cavities, and in the process of cooling water flowing into each small heat dissipation ring cavity through the baffle perforations, the length of the cooling water flow path can be increased, so that the cooling water can be fully utilized to dissipate heat from the inner ring wall. In addition, the water inlet interface is connected to the small heat dissipation ring cavity at the bottom, and the water outlet interface is connected to the small heat dissipation ring cavity at the top. When dissipating heat, the cooling water can fully fill the annular heat dissipation cavity, thereby improving the cooling efficiency.
[0008] Preferably, one diaphragm ring is provided.
[0009] A partition ring is provided to divide the internal annular heat dissipation cavity into two small heat dissipation annular cavities, which is suitable for small vacuum reaction chambers.
[0010] Preferably, two parallel water channel baffles are arranged in the inner annular heat dissipation cavity along the axial direction, and the two water channel baffles cooperate to form an axial water channel; the small heat dissipation ring cavity at the bottom along the axial direction is connected to the water inlet interface; the small heat dissipation ring cavity at the top along the axial direction is connected to the axial water channel, and the bottom of the axial water channel is connected to the water outlet interface.
[0011] Through the above arrangement, the water inlet interface and the water outlet interface can be arranged at the same flange end, which facilitates the arrangement of the water inlet interface and the water outlet interface.
[0012] Preferably, the water inlet interface is arranged on the lower flange close to the axial water channel; a baffle perforation is arranged on several baffle rings, the baffle perforations on the baffle ring close to the lower flange are arranged on the other side of the axial water channel away from the water inlet interface, and the baffle perforations on adjacent baffle rings are staggered and distributed on both sides of the axial water channel.
[0013] Through the above-mentioned structural arrangement, the circumference of the flow path of the cooling water in the annular heat dissipation cavity can be increased, the area through which the cooling water flows can be increased, and the cooling efficiency can be improved.
[0014] Preferably, a guide channel is provided in the axial water channel, and the guide channel gradually narrows toward the water outlet interface.
[0015] The setting of the guide block can promote the water flow near the water outlet interface to fully absorb the heat and flow out faster. Preferably, a guide block is provided in the axial water channel, a guide surface is provided obliquely on the guide block, and the guide surface cooperates with a water channel baffle on one side to form a guide channel. Through the cooperation of the guide block, the setting of the guide block can promote the accelerated outflow of water that fully absorbs heat near the water outlet interface.
[0016] Preferably, several baffle rings are provided with several water filling holes at corresponding positions, and a buoyancy switch is provided in the water filling holes; the buoyancy switch includes a water filling slide bar, a buoyancy ball arranged at the upper end of the water filling slide bar and several water retaining covers arranged on the water filling slide bar; the water filling slide bar is penetrated into the water filling holes of several baffle rings in the same axial direction, the buoyancy ball is arranged in the topmost heat dissipation small ring cavity, and the number of water retaining covers corresponds to the number of baffle rings.
[0017] Through the cooperation of the buoyancy switch and the water injection perforation, when the annular heat dissipation cavity is initially injected with water, the water injection perforation is in an open state, so that the adjacent small heat dissipation ring cavity can be injected with water through the water injection perforation, thereby improving the efficiency of water injection; and when the topmost heat dissipation ring cavity is filled with water, the buoyancy of the buoyancy ball is relied on to block the water injection perforation, so that the heat dissipation water channel returns to a normal heat dissipation state.
[0018] Preferably, the water retaining cover is conical, and the lower end of the water filling hole is provided with a conical opening that matches the water retaining cover.
[0019] The conical water shield and conical mouth can better seal the water perforation. Preferably, a sealing ring is provided on the upper surface of the water shield, and an annular groove matching the sealing ring is provided in the conical opening.
[0020] The cooperation of the annular groove and the sealing ring can improve the sealing performance between the water retaining cover and the tapered hole.
[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention forms an annular heat dissipation cavity between the inner ring wall and the outer ring wall, and arranges the upper flange and the lower flange at both ends of the annular heat dissipation cavity in the axial direction, so that the annular heat dissipation cavity is enclosed into a closed annular heat dissipation cavity under the cooperation between the inner ring wall and the outer ring wall, the upper flange and the lower flange. A heat dissipation water channel is arranged in the annular heat dissipation cavity, and a water inlet interface is arranged at one end of the heat dissipation water channel and a water outlet interface is arranged at the other end. After the cooling water enters the annular heat dissipation cavity from the water inlet interface, the cooling water flows in the cooling water channel, thereby taking away the heat in the reaction cavity at the middle position of the inner ring wall, thereby playing a role in heat dissipation, and then the cooling water flows out from the water outlet interface to complete the cooling of the inner ring wall and the outer ring wall. Compared with the prior art, the present application sets the shell of the reaction chamber to a structure containing an annular heat dissipation chamber. Therefore, compared with the prior art in which a heat dissipation water channel is set on the shell of the reaction chamber, the present application has the advantage of low cost, and the thickness of the inner ring wall can be thinner than the thickness of the shell of the reaction chamber in which the heat dissipation water channel is directly set on the shell of the reaction chamber, so that the heat dissipation efficiency can be higher. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 It is the overall structural diagram of the present invention.
[0023] Figure 2 It is a three-dimensional structural diagram when the number of the partition ring in the present invention is one.
[0024] Figure 3 It is a schematic diagram of the internal structure of the annular heat dissipation cavity of the present invention.
[0025] Figure 4 yes Figure 3 A partial enlarged view of the .
[0026] Figure 5 It is a schematic diagram of the structure in Example 3 of the present invention.
[0027] Figure 6 It is the cross-sectional view and its partial enlarged view in 5.
[0028] Figure 7 This is a front view of Example 3 of the present invention.
[0029] In the figure: 1. Inner ring wall; 2. Outer ring wall; 3. annular heat dissipation cavity, 31. water inlet interface, 32. water outlet interface, 33. baffle ring, 331. water filling perforation, 34. baffle perforation, 35. water channel baffle, 351. left baffle, 352. right baffle, 36. axial water channel, 37. water channel hole, 38. guide block; 4. Upper flange; 5. Lower flange; 6. buoyancy switch, 61. water filling slide bar, 62. buoyancy ball, 63. water retaining cover, 64. sealing ring, 65. ring groove. DETAILED DESCRIPTION
[0030] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: Reference Figures 1 to 3 As shown, a water-cooling ring structure outside a reaction chamber comprises: an inner ring wall 1 and an outer ring wall 2 arranged concentrically, an annular heat dissipation chamber 3 is formed between the inner ring wall 1 and the outer ring wall 2, an upper flange 4 and a lower flange 5 are respectively arranged at both ends of the inner ring wall 1 and the outer ring wall 2, and the upper flange 4 and the lower flange 5 make the annular heat dissipation chamber 3 form a closed structure; a heat dissipation water channel is arranged in the annular heat dissipation chamber 3, a water inlet interface 31 is arranged at one end of the heat dissipation water channel, and a water outlet interface 32 is arranged at the other end of the heat dissipation water channel; cooling water enters the heat dissipation water channel from the water inlet interface 31 and flows out from the water outlet interface 32.
[0031] In this embodiment, an annular heat dissipation cavity 3 is formed between the inner annular wall 1 and the outer annular wall 2, and the upper flange 4 and the lower flange 5 are arranged at both ends of the annular heat dissipation cavity 3 in the axial direction, so that the annular heat dissipation cavity 3 is enclosed into a closed annular heat dissipation cavity 3 under the cooperation between the inner annular wall 1 and the outer annular wall 2, and the upper flange 4 and the lower flange 5. A heat dissipation water channel is arranged in the annular heat dissipation cavity 3, and a water inlet interface 31 is arranged at one end of the heat dissipation water channel, and a water outlet interface 32 is arranged at the other end. After the cooling water enters the annular heat dissipation cavity 3 from the water inlet interface 31, the cooling water flows in the cooling water channel, thereby taking away the heat in the reaction cavity at the middle position of the inner annular wall 1, thereby playing a role in heat dissipation, and then the cooling water flows out from the water outlet interface 32 to complete the cooling of the inner annular wall 1 and the outer annular wall 2. Compared with the prior art, the present application sets the shell of the reaction chamber to a structure containing an annular heat dissipation chamber 3. Therefore, compared with the prior art in which a heat dissipation water channel is set on the shell of the reaction chamber, the present application has the advantage of low cost, and the thickness of the inner annular wall 1 can be thinner than the thickness of the shell of the reaction chamber in which the heat dissipation water channel is directly set on the shell of the reaction chamber, so that the heat dissipation efficiency can be higher.
[0032] Example 2: Reference Figures 1 to 4 As shown, a water-cooling ring structure outside a reaction chamber comprises: an inner ring wall 1 and an outer ring wall 2 arranged concentrically, an annular heat dissipation chamber 3 is formed between the inner ring wall 1 and the outer ring wall 2, an upper flange 4 and a lower flange 5 are respectively arranged at both ends of the inner ring wall 1 and the outer ring wall 2, and the upper flange 4 and the lower flange 5 make the annular heat dissipation chamber 3 form a closed structure; a heat dissipation water channel is arranged in the annular heat dissipation chamber 3, a water inlet interface 31 is arranged at one end of the heat dissipation water channel, and a water outlet interface 32 is arranged at the other end of the heat dissipation water channel; cooling water enters the heat dissipation water channel from the water inlet interface 31 and flows out from the water outlet interface 32.
[0033] When in use, the upper flange 4 and the lower flange 5 can cooperate with the upper cover and the lower cover respectively, so as to enclose the middle part of the inner ring wall 1 into a closed vacuum reaction chamber, so that the silicon wafer reacts in the vacuum reaction chamber.
[0034] In this embodiment, an annular heat dissipation cavity 3 is formed between the inner annular wall 1 and the outer annular wall 2, and the upper flange 4 and the lower flange 5 are arranged at both ends of the annular heat dissipation cavity 3 in the axial direction, so that the annular heat dissipation cavity 3 is enclosed into a closed annular heat dissipation cavity 3 under the cooperation between the inner annular wall 1 and the outer annular wall 2, and the upper flange 4 and the lower flange 5. A heat dissipation water channel is arranged in the annular heat dissipation cavity 3, and a water inlet interface 31 is arranged at one end of the heat dissipation water channel, and a water outlet interface 32 is arranged at the other end. After the cooling water enters the annular heat dissipation cavity 3 from the water inlet interface 31, the cooling water flows in the cooling water channel, thereby taking away the heat in the reaction cavity at the middle position of the inner annular wall 1, thereby playing a role in heat dissipation, and then the cooling water flows out from the water outlet interface 32 to complete the cooling of the inner annular wall 1.
[0035] In order to ensure the efficiency of heat dissipation, the thickness of the inner ring wall 1 in this embodiment is 6 mm to 4 mm, and the best thickness is preferably 5 mm to enhance the effect of heat absorption and heat dissipation.
[0036] In one embodiment, the heat dissipation water channel includes a plurality of baffle rings 33 arranged in the annular heat dissipation cavity 3 along the axial direction, the baffle rings 33 divide the annular heat dissipation cavity 3 into a plurality of heat dissipation small annular cavities arranged along the axial direction, the plurality of heat dissipation small annular cavities are arranged along the axial direction of the annular heat dissipation cavity 3, and at least one baffle perforation 34 is provided on the baffle rings 33 to connect adjacent heat dissipation small annular cavities. The water inlet interface 31 is connected to the heat dissipation small annular cavity at the bottom end in the axial direction, and the water outlet interface 32 is connected to the heat dissipation small annular cavity at the top end in the axial direction.
[0037] In this embodiment, the spacing between adjacent baffle rings 33 is the same. By arranging a plurality of baffle rings 33 in the annular heat dissipation cavity 3 and arranging baffle perforations 34 on the baffle rings 33, the annular heat dissipation cavity 3 is divided into a plurality of small heat dissipation annular cavities. When the cooling water flows into each small heat dissipation annular cavity through the baffle perforations 34, the length of the cooling water flow path can be increased, so that the cooling water can be fully utilized to dissipate heat from the inner ring wall 1. In addition, the water inlet interface 31 is connected to the small heat dissipation annular cavity at the bottom, and the water outlet interface 32 is connected to the small heat dissipation annular cavity at the top. When dissipating heat, the cooling water can be fully filled in the annular heat dissipation cavity 3, thereby improving the cooling efficiency.
[0038] In one embodiment, two parallel water channel baffles 35 are arranged in the annular heat dissipation cavity 3 along the axial direction, and the two water channel baffles 35 cooperate to form an axial water channel 36; the heat dissipation small annular cavity at the bottom along the axial direction is connected to the water inlet interface 31; the heat dissipation small annular cavity at the top along the axial direction is connected to the axial water channel 36, and the bottom of the axial water channel 36 is connected to the water outlet interface 32. Through the above arrangement, the water inlet interface 31 and the water outlet interface 32 can be arranged at the same flange end, which is convenient for the arrangement of the water inlet interface 31 and the water outlet interface 32.
[0039] The water inlet interface 31 passes through the lower flange 5 which is arranged near the axial water channel 36; each of the partition rings 33 is provided with only one partition hole 34, and the partition hole 34 on the partition ring 33 closest to the lower flange 5 is arranged on the other side of the axial water channel 36 away from the water inlet interface 31, and the partition holes 34 on adjacent partition rings 33 are staggeredly distributed on both sides of the axial water channel 36.
[0040] like Figure 2 As shown, at least one partition ring 33 is provided in this embodiment.
[0041] In this embodiment, three baffle rings 33 are provided. Taking three baffle rings 33 as an example, the three baffles are the first baffle ring 33, the second baffle ring 33 and the third baffle ring 33 from bottom to top, and the two water channel baffles 35 are the left baffle 351 and the right baffle 352. The water inlet interface 31 is provided on the lower flange 5 close to the right baffle 352, the baffle hole on the first baffle ring 33 is provided close to the left baffle 351, the baffle hole on the second baffle ring 33 is provided close to the right baffle 352, the baffle hole on the third baffle ring 33 is provided close to the left baffle 351, and a water channel hole 37 is provided on the top of the left baffle 351. Through the above-mentioned structural setting, the circumference of the flow path of the cooling water in the annular heat dissipation cavity 3 can be increased, the area through which it flows can be increased, and the cooling efficiency can be improved. In addition, a guide channel is provided in the axial water channel 36, and the guide channel gradually narrows toward the direction of the water outlet interface 32. A guide block 38 is arranged in the axial water channel 36 , and an inclined guide surface is arranged on the guide block 38 . The guide surface cooperates with a water channel partition 35 on one side to form a guide channel.
[0042] The setting of the guide block 38 can promote the accelerated outflow of water that fully absorbs heat near the water outlet interface 32. The inner and outer ring walls 2 are designed as thin plates with a thickness of 5 mm to enhance the heat absorption and heat dissipation effects. The upper flange 4 and the lower flange 5 are respectively matched and fixed with the upper cover and the lower cover. At the same time, the inner ring wall 1 and the outer ring wall 2 reduce the wall thickness. The inner ring wall 1 fully absorbs the heat of the reaction chamber, and the outer ring wall 2 cools the water to dissipate the heat. Compared with the prior art of reinstalling the heat dissipation water channel outside the reaction chamber, the cost of the whole set of equipment is relatively low, and it has the universality of different individuals of the same specification product, thereby greatly reducing the manufacturing cost of batch reaction chambers.
[0043] The working principle of the present application is as follows: the upper flange 4 and the lower flange 5 cooperate with the upper cover and the lower cover respectively to enclose the middle part of the inner ring wall 1 into a closed vacuum reaction chamber, and the silicon wafer reacts in the vacuum reaction chamber. When the reaction chamber needs to be cooled, cooling water flows into the annular heat dissipation chamber 3 from the water inlet interface 31, and first the cooling water is filled into the bottom heat dissipation small annular cavity, and then the cooling water fills the second heat dissipation small annular cavity from the partition perforation 34 at the position of the first partition close to the left partition 351. After the second heat dissipation small annular cavity is filled with cooling water, the cooling water fills the third heat dissipation small annular cavity from the partition perforation 34 at the position of the second partition close to the right partition 352. After the third heat dissipation small annular cavity is filled with cooling water, the cooling water fills the fourth heat dissipation small annular cavity from the partition perforation 34 at the position of the third partition close to the left partition 351. When the fourth heat dissipation small annular cavity is filled, the cooling water enters the axial water channel 36 from the water channel hole 37 at the top of the left partition 351, and then the cooling water flows out from the water outlet interface 32 at the bottom of the axial water channel 36. In the process of flowing in the heat dissipation water channel, the cooling water dissipates the inner annular wall and the outer annular wall 2.
[0044] Compared with the prior art, the present application sets the shell of the reaction chamber to a structure containing an annular heat dissipation chamber 3. Therefore, compared with the prior art in which a heat dissipation water channel is set on the shell of the reaction chamber, the present application has the advantage of low cost, and the thickness of the inner annular wall 1 can be thinner than the thickness of the shell of the reaction chamber in which the heat dissipation water channel is directly set on the shell of the reaction chamber, so that the heat dissipation efficiency can be higher.
[0045] Example 3: Reference Figures 1 to 7 As shown, a water-cooling ring structure outside a reaction chamber comprises: an inner ring wall 1 and an outer ring wall 2 arranged concentrically, an annular heat dissipation chamber 3 is formed between the inner ring wall 1 and the outer ring wall 2, an upper flange 4 and a lower flange 5 are respectively arranged at both ends of the inner ring wall 1 and the outer ring wall 2, and the upper flange 4 and the lower flange 5 make the annular heat dissipation chamber 3 form a closed structure; a heat dissipation water channel is arranged in the annular heat dissipation chamber 3, a water inlet interface 31 is arranged at one end of the heat dissipation water channel, and a water outlet interface 32 is arranged at the other end of the heat dissipation water channel; cooling water enters the heat dissipation water channel from the water inlet interface 31 and flows out from the water outlet interface 32.
[0046] When in use, the upper flange 4 and the lower flange 5 can cooperate with the upper cover and the lower cover respectively, so as to enclose the middle part of the inner ring wall 1 into a closed vacuum reaction chamber, so that the silicon wafer reacts in the vacuum reaction chamber.
[0047] In this embodiment, an annular heat dissipation cavity 3 is formed between the inner annular wall 1 and the outer annular wall 2, and the upper flange 4 and the lower flange 5 are arranged at both ends of the annular heat dissipation cavity 3 in the axial direction, so that the annular heat dissipation cavity 3 is enclosed into a closed annular heat dissipation cavity 3 under the cooperation between the inner annular wall 1 and the outer annular wall 2, and the upper flange 4 and the lower flange 5. A heat dissipation water channel is arranged in the annular heat dissipation cavity 3, and a water inlet interface 31 is arranged at one end of the heat dissipation water channel, and a water outlet interface 32 is arranged at the other end. After the cooling water enters the annular heat dissipation cavity 3 from the water inlet interface 31, the cooling water flows in the cooling water channel, thereby taking away the heat in the reaction cavity at the middle position of the inner annular wall 1, thereby playing a role in heat dissipation, and then the cooling water flows out from the water outlet interface 32 to complete the cooling of the inner annular wall 1.
[0048] In order to ensure the efficiency of heat dissipation, the thickness of the inner ring wall 1 in this embodiment is 6 mm to 4 mm, and the best thickness is preferably 5 mm to enhance the effect of heat absorption and heat dissipation.
[0049] In one embodiment, the heat dissipation water channel includes a plurality of baffle rings 33 arranged in the annular heat dissipation cavity 3 along the axial direction, the baffle rings 33 divide the annular heat dissipation cavity 3 into a plurality of heat dissipation small annular cavities arranged along the axial direction, the plurality of heat dissipation small annular cavities are arranged along the axial direction of the annular heat dissipation cavity 3, and at least one baffle perforation 34 is provided on the baffle rings 33 to connect adjacent heat dissipation small annular cavities. The water inlet interface 31 is connected to the heat dissipation small annular cavity at the bottom end in the axial direction, and the water outlet interface 32 is connected to the heat dissipation small annular cavity at the top end in the axial direction.
[0050] In this embodiment, the spacing between adjacent baffle rings 33 is the same. By arranging a plurality of baffle rings 33 in the annular heat dissipation cavity 3 and arranging baffle perforations 34 on the baffle rings 33, the annular heat dissipation cavity 3 is divided into a plurality of small heat dissipation annular cavities. When the cooling water flows into each small heat dissipation annular cavity through the baffle perforations 34, the length of the cooling water flow path can be increased, so that the cooling water can be fully utilized to dissipate heat from the inner ring wall 1. In addition, the water inlet interface 31 is connected to the small heat dissipation annular cavity at the bottom, and the water outlet interface 32 is connected to the small heat dissipation annular cavity at the top. When dissipating heat, the cooling water can be fully filled in the annular heat dissipation cavity 3, thereby improving the cooling efficiency.
[0051] In one embodiment, two parallel water channel baffles 35 are arranged in the annular heat dissipation cavity 3 along the axial direction, and the two water channel baffles 35 cooperate to form an axial water channel 36; the heat dissipation small annular cavity at the bottom along the axial direction is connected to the water inlet interface 31; the heat dissipation small annular cavity at the top along the axial direction is connected to the axial water channel 36, and the bottom of the axial water channel 36 is connected to the water outlet interface 32. Through the above arrangement, the water inlet interface 31 and the water outlet interface 32 can be arranged at the same flange end, which is convenient for the arrangement of the water inlet interface 31 and the water outlet interface 32.
[0052] The water inlet interface 31 passes through the lower flange 5 which is arranged near the axial water channel 36; each of the partition rings 33 is provided with only one partition hole 34, and the partition hole 34 on the partition ring 33 closest to the lower flange 5 is arranged on the other side of the axial water channel 36 away from the water inlet interface 31, and the partition holes 34 on adjacent partition rings 33 are staggeredly distributed on both sides of the axial water channel 36.
[0053] like Figure 2 As shown, at least one partition ring 33 is provided in this embodiment.
[0054] In this embodiment, three baffle rings 33 are provided. Taking three baffle rings 33 as an example, the three baffles are the first baffle ring 33, the second baffle ring 33 and the third baffle ring 33 from bottom to top, and the two water channel baffles 35 are the left baffle 351 and the right baffle 352. The water inlet interface 31 is provided on the lower flange 5 close to the right baffle 352, the baffle hole on the first baffle ring 33 is provided close to the left baffle 351, the baffle hole on the second baffle ring 33 is provided close to the right baffle 352, the baffle hole on the third baffle ring 33 is provided close to the left baffle 351, and a water channel hole 37 is provided on the top of the left baffle 351. Through the above-mentioned structural setting, the circumference of the flow path of the cooling water in the annular heat dissipation cavity 3 can be increased, the area through which it flows can be increased, and the cooling efficiency can be improved. In addition, a guide channel is provided in the axial water channel 36, and the guide channel gradually narrows toward the direction of the water outlet interface 32. A guide block 38 is arranged in the axial water channel 36 , and an inclined guide surface is arranged on the guide block 38 . The guide surface cooperates with a water channel partition 35 on one side to form a guide channel.
[0055] The setting of the guide block 38 can promote the accelerated outflow of water that fully absorbs heat near the water outlet interface 32. The inner and outer ring walls 2 are designed as thin plates with a thickness of 5 mm to enhance the heat absorption and heat dissipation effects. The upper flange 4 and the lower flange 5 are respectively matched and fixed with the upper cover and the lower cover. At the same time, the inner ring wall 1 and the outer ring wall 2 reduce the wall thickness. The inner ring wall 1 fully absorbs the heat of the reaction chamber, and the outer ring wall 2 cools the water to dissipate the heat. Compared with the prior art of reinstalling the heat dissipation water channel outside the reaction chamber, the cost of the whole set of equipment is relatively low, and it has the universality of different individuals of the same specification product, thereby greatly reducing the manufacturing cost of batch reaction chambers.
[0056] In Example 2, since a large number of baffle rings 33 are provided, and in order to increase the circumference of the heat dissipation water channel flow and improve the heat dissipation performance, only one baffle perforation 34 is provided on the baffle ring 33, and the baffle perforations 34 are arranged at intervals on both sides of the water channel baffle 35, so that the heat dissipation water channel forms a tortuous flow path. When there is no cooling water in the annular heat dissipation cavity 3 and cooling water needs to be injected, the tortuous flow path will increase the resistance to the flow of the liquid, so that the speed of cooling water injected into the annular heat dissipation cavity 3 is reduced, and when the liquid flows through the baffle perforations 34, the baffle perforations 34 will also hinder the flow of the liquid. This makes the efficiency of water injection very low when water is injected into the annular heat dissipation cavity 3 in the initial state. In order to solve the above technical problems, the following methods are adopted to solve them.
[0057] like Figures 5 to 7 As shown, several baffle rings 33 are provided with several water filling holes 331 at corresponding positions, and a buoyancy switch 6 is provided in the water filling hole 331, and the buoyancy switch 6 comprises a water filling slide bar 61, a buoyancy ball 62 provided at the upper end of the water filling slide bar 61, and several water shields 63 provided on the water filling slide bar 61; the water filling slide bar 61 is provided in the water filling holes 331 of several baffle rings 33 in the same axial direction, the diameter of the water filling hole 331 is larger than the diameter of the water filling slide bar 61, and the diameter of the water filling hole 331 is smaller than the diameter of the water shield 63. The buoyancy ball 62 is provided in the topmost heat dissipation small ring cavity, and the number of the water shields 63 corresponds to the number of the baffle rings 33.
[0058] Taking the three partition rings 33 in this embodiment as an example, in the same axial direction, water filling holes 331 are provided on the three partition rings 33, and the water filling slide rod 61 is penetrated in the water filling holes 331 on the three partition rings 33 in the same axial direction. Three water retaining covers 63 are provided on the water filling slide rod 61, and the three water retaining covers 63 are respectively in the heat dissipation small ring cavity of the first layer, the heat dissipation small ring cavity of the second layer and the heat dissipation small ring cavity of the third layer; the buoyancy ball 62 can provide buoyancy to pull the buoyancy switch 6 upward.
[0059] The working principle of the buoyancy switch 6 is as follows: when the annular heat dissipation cavity 3 needs to be filled with water, since the top heat dissipation small annular cavity is not filled with cooling water, the buoyancy ball 62 and the water injection slide bar 61 are located at the lower position under the action of gravity, and the three water shields 63 are separated from the corresponding partition rings 33, and the cooling water can flow into the upper heat dissipation small annular cavity through the gap between the water injection perforations 331 and the water injection slide bar 61. When the top heat dissipation small annular cavity is also filled with cooling water, the buoyancy ball 62 is soaked in cooling water, and the buoyancy ball 62 floats upward, driving the water injection slide bar 61 to move upward, so that the water shield 63 also moves upward, so that the water shield 63 cooperates with its corresponding water injection perforations 331, and the water shield 63 closes the water injection perforations 331, so that the cooling water can only flow through the partition perforations 34 on the partition ring 33, so that the heat dissipation water channel returns to a normal operating state, and the circumference of the heat dissipation water channel is increased.
[0060] Therefore, through the cooperation of the buoyancy switch 6 and the water filling perforation 331, when the annular heat dissipation cavity 3 is initially filled with water, the water filling perforation 331 is in an open state, so that the adjacent small heat dissipation ring cavity can be filled with water through the water filling perforation 331, which can improve the efficiency of water filling; and when the topmost heat dissipation ring cavity is filled with water, the buoyancy of the buoyancy ball 62 is relied on to block the water filling perforation 331, so that the heat dissipation water channel returns to a normal heat dissipation state.
[0061] In this embodiment, three water injection holes 331 are provided on the partition ring 33 , and the angles between the three water injection holes 331 are ninety degrees.
[0062] The water shield 63 is conical, and the lower end of the water filling perforation 331 is provided with a tapered mouth that matches the water shield 63. The tapered water shield 63 and the tapered mouth cooperate to better seal the water filling perforation 331. A sealing ring 64 is provided on the upper surface of the water shield 63, and an annular groove 65 that matches the sealing ring 64 is provided in the tapered mouth. Through the cooperation of the annular groove 65 and the sealing ring 64, the sealing performance between the water shield 63 and the tapered hole can be improved.
[0063] The working principle of the present application is as follows: the upper flange 4 and the lower flange 5 cooperate with the upper cover and the lower cover respectively, and the middle part of the inner ring wall 1 is enclosed into a closed vacuum reaction chamber, and the silicon wafer reacts in the vacuum reaction chamber. When the reaction chamber needs to be cooled, cooling water flows into the annular heat dissipation chamber 3 from the water inlet interface 31, and the cooling water is first filled into the bottom heat dissipation small ring chamber. Since the buoyancy ball 62 and the water filling slide bar 61 are located at the bottom under the action of gravity at this time, the three water shields 63 are separated from the corresponding partition rings 33 at this time.
[0064] Therefore, the cooling water at this time not only fills the small heat dissipation ring cavity of the second layer from the partition perforation 34 at the position of the first partition ring close to the left partition 351, but also flows into the small heat dissipation ring cavity of the second layer through the gap between the water filling perforation 331 and the water filling slide rod 61.
[0065] After the cooling water fills the small heat dissipation ring cavity of the second layer, similarly, the cooling water not only fills the small heat dissipation ring cavity of the third layer from the partition perforation 34 of the second partition ring near the right partition 352, but also flows into the small heat dissipation ring cavity of the third layer through the gap between the water filling perforation 331 and the water filling slide rod 61.
[0066] After the third layer of heat dissipation small ring cavity is filled with cooling water, the cooling water fills the fourth layer of heat dissipation small ring cavity from the partition perforation 34 at the position of the third partition near the left partition 351. When the fourth layer of heat dissipation small ring cavity is filled, the buoyancy ball 62 is soaked in the cooling water, and the buoyancy ball 62 floats upward, driving the water filling slide bar 61 to move upward, thereby causing the water retaining cover 63 to move upward as well, thereby causing the water retaining cover 63 to cooperate with its corresponding water filling perforation 331. The water retaining cover 63 closes the water filling perforation 331, so that the cooling water can only flow through the partition perforation 34 on the partition ring 33.
[0067] Afterwards, the cooling water enters the axial water channel 36 from the water channel hole 37 at the top of the left partition 351, and then flows out from the water outlet interface 32 at the bottom of the axial water channel 36. The cooling water dissipates heat from the inner ring wall 1 and the outer ring wall 2 during the flow of the cooling water channel.
[0068] Compared with the prior art, the present application sets the shell of the reaction chamber to a structure containing an annular heat dissipation chamber 3. Therefore, compared with the prior art in which a heat dissipation water channel is set on the shell of the reaction chamber, the present application has the advantage of low cost, and the thickness of the inner annular wall 1 can be thinner than the thickness of the shell of the reaction chamber in which the heat dissipation water channel is directly set on the shell of the reaction chamber, so that the heat dissipation efficiency can be higher.
[0069] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.
Claims
1. A water-cooling ring structure outside a reaction chamber, characterized in that: include: An inner annular wall and an outer annular wall are arranged concentrically, and an annular heat dissipation cavity is formed between the inner annular wall and the outer annular wall. An upper flange and a lower flange are respectively arranged at both ends of the inner annular wall and the outer annular wall, and the upper flange and the lower flange make the annular heat dissipation cavity form a closed structure; a heat dissipation water channel is arranged in the annular heat dissipation cavity, a water inlet interface is arranged at one end of the heat dissipation water channel, and a water outlet interface is arranged at the other end of the heat dissipation water channel; cooling water enters the heat dissipation water channel from the water inlet interface and flows out from the water outlet interface.
2. The external water-cooling ring structure of the reaction chamber according to claim 1 is characterized in that: The heat dissipation water channel includes a plurality of baffle rings arranged along the axial direction, the plurality of baffle rings divide the annular heat dissipation cavity into a plurality of heat dissipation small ring cavities arranged along the axial direction, and at least one baffle perforation for connecting adjacent heat dissipation small ring cavities is arranged on the plurality of baffle rings; the water inlet interface is connected to the heat dissipation small ring cavity at the bottom end in the axial direction, and the water outlet interface is connected to the heat dissipation small ring cavity at the top end in the axial direction.
3. The external water-cooling ring structure of the reaction chamber according to claim 2 is characterized in that: A diaphragm ring is provided.
4. The external water-cooling ring structure of the reaction chamber according to claim 2 or 3, characterized in that: Two parallel water channel baffles are arranged in the inner annular heat dissipation cavity along the axial direction, and the two water channel baffles cooperate to form an axial water channel; the heat dissipation small ring cavity at the bottom along the axial direction is connected with the water inlet interface; the heat dissipation small ring cavity at the top along the axial direction is connected with the axial water channel, and the bottom of the axial water channel is connected with the water outlet interface.
5. The external water-cooling ring structure of the reaction chamber according to claim 4 is characterized in that: The water inlet interface is arranged on the lower flange close to the axial water channel; a baffle perforation is arranged on several baffle rings, the baffle perforations on the baffle ring close to the lower flange are arranged on the other side of the axial water channel away from the water inlet interface, and the baffle perforations on adjacent baffle rings are staggered and distributed on both sides of the axial water channel.
6. The external water cooling ring structure of the reaction chamber according to claim 4 is characterized in that: A flow guide channel is arranged in the axial water channel, and the flow guide channel gradually narrows toward the water outlet interface.
7. The external water-cooling ring structure of the reaction chamber according to claim 6 is characterized in that: A guide block is arranged in the axial water channel, a guide surface is arranged obliquely on the guide block, and the guide surface cooperates with a water channel partition on one side to form a guide channel.
8. The reaction chamber external water cooling ring structure according to claim 2 or 3, characterized in that: Several baffle rings are provided with several water filling holes at corresponding positions, and a buoyancy switch is provided in the water filling holes; the buoyancy switch comprises a water filling slide bar, a buoyancy ball arranged at the upper end of the water filling slide bar, and several water retaining covers arranged on the water filling slide bar; the water filling slide bar is passed through the water filling holes of several baffle rings in the same axial direction, the buoyancy ball is arranged in the topmost heat dissipation small ring cavity, and the number of the water retaining covers corresponds to the number of the baffle rings.
9. The reaction chamber external water cooling ring structure according to claim 8 is characterized in that: The water retaining cover is in a cone shape, and the lower end of the water filling perforation is provided with a cone-shaped opening matched with the water retaining cover.
10. The reaction chamber external water cooling ring structure according to claim 8, characterized in that: A sealing ring is arranged on the upper surface of the water retaining cover, and a ring groove matched with the sealing ring is arranged in the conical mouth.