Sample detection device and sample position detection method

Abstract

The invention provides a sample detection device and a sample position detection method. The sample detection device at least comprises a socket and a plurality of sensor groups, the socket is used for fixing samples and sensors, each sensor group comprises two oppositely arranged sensors, and each sensor comprises a transmitting module and a receiving module. The output light of each sensor is positioned on the same detection surface and is higher than the upper surface of the test sample which is horizontally placed in an ideal state. The invention further provides a sample position detection method, the test sample is placed in the sample detection device, whether the test sample is inclined or not is judged according to the light signal source received by the sensor group, and finally, high-accuracy sample position detection can be achieved.

Description

Technical Field

[0001] The present invention relates to the detection field, and in particular to a sample detection device and a sample position detection method. Background Art

[0002] In the semiconductor field, an electrical socket is a common electronic connector used to connect various devices to a circuit board. To ensure the normal operation of the equipment, a sensor is usually required to detect whether the chip is skewed. If the chip is skewed, but the sensor does not accurately detect the skew of the chip, it may cause problems such as poor welding in the subsequent semiconductor processing technology. There is also the possibility that the chip escapes from the socket and damages the semiconductor device. Therefore, how to accurately identify whether the chip in the socket is skewed has become one of the urgent problems to be solved by technicians in this field.

[0003] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present invention and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because these solutions are described in the background technology section of the present invention. Summary of the invention

[0004] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a sample detection device and a sample position detection method, which are used to solve the problem of high misjudgment rate when detecting sample skew in the prior art.

[0005] To achieve the above-mentioned purpose and other related purposes, the present invention provides a sample detection device, which at least includes: a socket and N sensor groups, N is a natural number greater than or equal to 2; the socket is used to fix the test sample and the sensor; each sensor group includes two sensors arranged opposite to each other, and each sensor includes a transmitting module and a receiving module; the two sensors in the same sensor group are located on both sides of the test sample, and the output light of each sensor constitutes the same detection surface, the detection surface is parallel to the upper surface of the test sample placed horizontally in an ideal state, and the detection surface is higher than the upper surface of the sample to be tested placed horizontally in an ideal state by a preset distance.

[0006] Optionally, the sensor is an infrared sensor.

[0007] Optionally, the preset distance ranges from [0.01mm-0.02mm].

[0008] Optionally, the light beam emission direction of each sensor is the same as the extension direction of a line from each sensor to the center of the test sample.

[0009] Optionally, the sensors are evenly arranged around the center of the test sample.

[0010] Optionally, when the value of N is 2, the sample detection device includes 4 sensors, and the direction in which each sensor emits a light signal is the same as the extension direction of a line from each sensor to the center of the test sample.

[0011] Optionally, the socket is an open slot structure, and the open slot is used to accommodate the test sample; the socket also includes channels corresponding to the sensors one by one, and each channel is respectively arranged in the side walls on both sides of the opening of the open slot; the channel includes a through exit port and a receiving cavity, the receiving cavity is used to accommodate the corresponding sensor, the exit port is used to provide an exit channel for the light signal emitted by the sensor, the exit port is arranged on the side close to the test sample, and the receiving cavity is arranged on the side away from the test sample.

[0012] More optionally, a metal cover is provided between the accommodating cavity and the sensor, and the metal cover is used to reduce wear of the sensor.

[0013] To achieve the above-mentioned purpose and other related purposes, the present invention also provides a sample position detection method, and the steps of the sample position testing method at least include: S1: providing the sample detection device, placing the test sample into the sample detection device, and each sensor emits a light signal; S2: judging whether the test sample is skewed based on whether the sensor group can receive the light signal.

[0014] Optionally, in step S2, when each sensor can receive the light signal, it is considered that the test sample is not skewed; otherwise, it is considered that the test sample is skewed and a warning signal is issued.

[0015] As described above, the sample detection device and the sample position detection method of the present invention have the following beneficial effects:

[0016] The present invention can accurately detect whether the test sample in the socket is skewed by setting a detection surface determined by multiple groups of sensors; and the present invention can effectively improve the detection accuracy of the test sample position by adjusting the preset distance between the detection surface and the upper surface of the test sample, thereby reducing the risk of the test sample escaping; in the case that the chip is skewed, the present invention can timely warn the staff and accurately and quickly find the chip for position adjustment, reducing the debugging time of the staff to find the skewed chip, and improving the operating stability and efficiency of the semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic top view of a specific structure of the sample detection device of the present invention is shown.

[0018] Figure 2 Shown is a schematic cross-sectional view of a planar structural socket of a sample detection device of the present invention.

[0019] Figure 3 It is a cross-sectional schematic diagram showing a first channel arrangement of an open slot structure socket of a sample detection device of the present invention.

[0020] Figure 4 It is a cross-sectional schematic diagram showing a second channel arrangement of the open slot structure socket of the sample detection device of the present invention.

[0021] Component number description

[0022] 1. Sample testing device

[0023] 11 Sensors

[0024] 111 First Sensor

[0025] 112 Second sensor

[0026] 113 Third Sensor

[0027] 114 Fourth Sensor

[0028] 12 Test samples

[0029] 13 Socket

[0030] 131 Locking screw

[0031] 132 exit

[0032] 133 Accommodation chamber

[0033] 1331 first accommodating chamber

[0034] 1332 second accommodating chamber

[0035] 134 Support Ball

[0036] 135 Open slot DETAILED DESCRIPTION

[0037] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0038] See also Figure 1-Figure 4It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0039] A group of sensors is set in the socket to detect whether the chip is skewed. When the light signal between a group of sensors set opposite to each other is blocked, it is considered that the chip position is skewed. However, the light of a group of sensors can only form a straight line, and the detection range of the straight line is relatively small, which cannot ensure the accuracy of the skew detection. Based on this, the present invention sets multiple groups of opposite sensors on different straight lines, and determines a detection surface through the emission light of multiple groups of opposite sensors, and the detection surface is parallel to the upper surface of the sample placed horizontally in an ideal state. The specific scheme of the present invention is as follows:

[0040] Embodiment 1

[0041] This embodiment provides a sample detection device 1, which includes a socket 13 and N sensor groups, where N is a natural number greater than or equal to 2.

[0042] like Figure 1 As shown, the socket 13 is used to fix the test sample 12 and the sensor 11, and the test sample 12 is horizontally arranged in the socket 13; further, the socket 13 is any one of an open slot structure and a planar structure; the material of the socket 13 is any one of plastic, metal or glass. In actual scenarios, the structure and material of the socket 13 can be set as needed, and are not limited to this embodiment.

[0043] As an example, Figure 2 As shown, the socket 13 is a planar structure, and the test sample 12 and the sensor 11 are fixed on the socket 13 .

[0044] As another example, Figure 3 As shown, the socket 13 is an open slot structure, and the test sample 12 is placed in the open slot 135; specifically, in this embodiment, the shape of the open slot 135 is any one of a U-shape, a rectangular shape, a circular shape or an elliptical shape. In actual scenarios, the shape of the open slot 135 can be set as needed, and is not limited to this embodiment. Figure 3 As shown, the socket 13 also includes a support ball 134 arranged at the bottom of the opening groove 135. The support ball 134 can provide necessary mechanical support for the test sample 12 and reduce the stress on the test sample 12 during the packaging process. The support ball 134 is usually made of electrically insulating material to ensure the electrical safety of the test sample 12.

[0045] As a specific embodiment of the open slot structure socket, Figure 3 As shown, in this embodiment, the socket 13 also includes channels corresponding to the sensors 11 one by one, and each channel is respectively arranged in the side walls on both sides of the opening slot 135; the channel includes a through-going emission port 132 and a receiving cavity 133, the receiving cavity 133 is used to accommodate the corresponding sensor 11, the receiving cavity 133 is arranged on the side away from the test sample 12, and the diameter of the receiving cavity 133 generally matches the general size of the sensor 11; the emission port 132 is used to provide an emission channel for the optical signal emitted by the sensor 11, the emission port 132 is arranged on the side close to the test sample 12, and the diameter of the emission port 132 is larger than the diameter of the light beam emitted by the sensor 11 and smaller than the diameter of the receiving cavity 133. Figure 3 As shown, the socket 13 is also provided with a locking screw 131; the locking screw 131 is located above the accommodating cavity 133, and the locking screw 131 is used to fix each sensor 11. As another example of the accommodating cavity 133, as shown in FIG. Figure 4 As shown, the accommodating cavity 133 also includes a first accommodating cavity 1331 and a second accommodating cavity 1332, the purpose of which is to match the sensor with a changing front and rear diameter; when the diameter of the sensor 11 close to the exit port 132 is larger and the diameter of the sensor 11 away from the exit port 132 is smaller, the diameter of the first accommodating cavity 1331 is larger than the diameter of the second accommodating cavity 1332; when the diameter of the sensor 11 close to the exit port 132 is smaller and the diameter of the sensor 11 away from the exit port 132 is larger, the diameter of the first accommodating cavity 1331 is smaller than the diameter of the second accommodating cavity 1332.

[0046] As another implementation, in this embodiment, a metal cover is further provided between the accommodating cavity 133 and the sensor 11. When the sensor 11 is repeatedly installed and removed in the accommodating cavity 133, the friction between the sensor 11 and the accommodating cavity 133 will cause certain wear on the sensor 11, and the metal cover can effectively reduce the wear of the sensor. As an example, the metal cover is located on the inner wall of the accommodating cavity 133, and the material of the metal cover includes but is not limited to copper, aluminum or zinc and other metals with strong ductility. In actual scenarios, the material of the metal cover can be selected as needed, and is not limited to this embodiment.

[0047] like Figure 1As shown, each sensor group includes two sensors arranged opposite to each other, and the two sensors in the same sensor group are located on both sides of the test sample 12, and each sensor includes a transmitting module and a receiving module. In order to ensure the accuracy and efficiency of the detection, the light signal emitted by each sensor is always continuous; as an example, the sensor uses an infrared sensor, and the type of sensor can be selected as needed in the actual scene, which is not limited to this embodiment. Furthermore, the transmitting module and the receiving module of each sensor are controlled by the control module. As an example, the control module is a software module, and the software module encodes each sensor so that each sensor can only recognize the light signal from the opposite sensor of the same group.

[0048] Specifically, in this embodiment, the direction of the optical signal of each sensor is the same as the extension direction of the line from each sensor to the center of the test sample 12. When the optical signal of each sensor passes through the center of the test sample 12, missed detection caused by unilateral warping of the test sample 12 can be avoided.

[0049] Specifically, in this embodiment, the sensors are evenly arranged around the center of the test sample 12, in order to make the output light of each sensor cover the test sample 12 as much as possible. Figure 1 As shown, when the sensors are evenly arranged around the test sample 12 and the optical signals output by the sensors pass through the center of the test sample 12, the present invention can achieve high accuracy and large detection coverage by using at least 4 sensors.

[0050] Specifically, in this embodiment, when the value of N is 2, the sample detection device 1 includes 4 sensors, and the direction in which the light signal is emitted by each sensor is the same as the extension direction of the line from each sensor to the center of the test sample. In theory, when the value of N is larger, the detection accuracy of the sample detection device 1 is higher, but the cost of the sample detection device 1 will also be higher. The present invention can better balance the accuracy and manufacturing cost when the value of N is 2. As an example, Figure 1 As shown, the outer contour of the socket 13 is in the shape of a rectangle, and a sensor is arranged at each of the four vertices of the rectangle, namely, the first sensor 111, the second sensor 112, the third sensor 113 and the fourth sensor 114. The two sensors on the diagonal line form a group, that is, the first sensor 111 and the third sensor 113 form a group, and the second sensor 112 and the fourth sensor 114 form a group. The optical signals emitted by the sensors in the same group overlap, and the optical signals emitted by each group of sensors pass through the center of the test sample 12. In actual scenarios, the number and position of each sensor can be set as needed, which is not limited to this embodiment.

[0051] like Figure 2 , Figure 3 and Figure 4As shown, the output light of each sensor forms a detection surface, which is parallel to the upper surface of the test sample placed horizontally in an ideal state, and the detection surface is higher than the upper surface of the test sample placed horizontally in an ideal state by a preset distance.

[0052] Specifically, in this embodiment, the preset distance is [0.01mm-0.02mm], including but not limited to 0.012mm, 0.014mm, 0.016mm, and 0.018mm. When the distance between the upper surface of the test sample and the detection surface does not exceed the preset distance, it can be considered that the position of the test sample is not skewed. In actual scenarios, the preset height range can be set as needed, not limited to this embodiment.

[0053] Embodiment 2

[0054] This embodiment provides a sample position detection method, the sample position detection method comprises the following steps:

[0055] S1: Provide the sample detection device 1 of the first embodiment, put the test sample into the sample detection device 1, and each sensor emits a light signal.

[0056] Specifically, in this embodiment, before the test sample is placed, each sensor of the sample detection device 1 is controlled by the control module, and the control module encodes each sensor so that each sensor can only recognize the light signal of the sensor facing the sensor in the group. In actual use, after the control module completes the encoding of each sensor, the sample position detection method can repeat the detection of different test samples on this basis.

[0057] S2: Determine whether the test sample is skewed based on the light signal received by the sensor group.

[0058] Specifically, in this embodiment, in step S2, when the test sample is skewed, it will block the light signal of at least one group of sensors. Therefore, only when each sensor can receive the light signal, it is considered that the test sample does not block the light signal of each sensor, that is, the test sample is not skewed. Otherwise, it is considered that the test sample is skewed and a warning signal is issued.

[0059] As another implementation, the sample position detection method further includes:

[0060] Specifically, as an example, Figure 1As shown, each sensor emits a light signal into the socket. If only one group of sensors cannot receive the light signal, the sample detection device 1 will automatically stop working and send out a warning signal. When the staff receives the warning signal, they will immediately check it. If they find that the chip is crooked, they will adjust it to the correct position and start the sample detection device 1 again for detection. During the detection process, if two groups of sensors cannot receive the light signal, the sample detection device 1 will automatically withdraw the chip from the socket to prevent the chip from being crushed. At the same time, the sample detection device 1 will also retain the event log of the sample detection device 1 sending out the warning signal and withdrawing the chip from the socket for reference in subsequent maintenance.

[0061] In summary, the sample detection device of the present invention at least includes: a socket and a sensor group, the socket is used to fix the test sample and the sensor group, and the detection plane is determined by grouping each sensor and arranging each sensor group in different directions, and the detection plane is parallel to the upper surface of the test sample placed horizontally in an ideal state, and the detection plane is higher than the upper surface of the test sample placed horizontally in an ideal state by a preset distance; the sample position detection method of the present invention at least includes: placing the test sample into the sample detection device, and judging whether the test sample is skewed by judging the light signal received by each sensor. Based on the sample detection device and the sample position detection method of the present invention, the present invention can optimize the workflow of the staff, and when the chip is skewed, timely warn the staff to accurately find the skewed chip for adjustment, simplify the debugging time of the staff, greatly improve the accuracy of sample skew detection, reduce the risk of test sample escape, reduce the failure rate of the equipment and increase the service life of the equipment. Based on the above advantages, the present invention has a wide range of applications in the fields of electrical socket manufacturing, sensor equipment production and electronic equipment control. Therefore, the present invention effectively overcomes the various shortcomings in the prior art and has a high industrial utilization value.

[0062] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A sample detection device, characterized in that: The sample detection device at least comprises: A socket and N sensor groups, where N is a natural number greater than or equal to 2; The socket is used to fix the test sample and the sensor; Each sensor group includes two sensors arranged opposite to each other, and each sensor includes a transmitting module and a receiving module; the two sensors in the same sensor group are located on both sides of the test sample, and the output light of each sensor constitutes a detection surface, which is parallel to the upper surface of the test sample placed horizontally in an ideal state, and the detection surface is higher than the upper surface of the sample to be tested placed horizontally in an ideal state by a preset distance.

2. The sample detection device according to claim 1, characterized in that: The sensor is an infrared sensor.

3. The sample detection device according to claim 1, characterized in that: The range of the preset distance is [0.01mm-0.02mm].

4. The sample detection device according to claim 1, characterized in that: The light beam emission direction of each sensor is the same as the extension direction of the line from each sensor to the center of the test sample.

5. The sample detection device according to claim 1 or 4, characterized in that: The sensors are evenly spaced around the center of the test sample.

6. The sample detection device according to claim 1, characterized in that: When the value of N is 2, the sample detection device includes 4 sensors, and the direction in which each sensor emits a light signal is the same as the extension direction of a line from each sensor to the center of the test sample.

7. The sample detection device according to claim 1, characterized in that: The socket is an open slot structure, and the open slot is used to accommodate the test sample; the socket also includes channels corresponding to the sensors one by one, and each channel is respectively arranged in the side walls on both sides of the open slot; the channel includes a through exit port and a receiving cavity, and the receiving cavity is used to accommodate the corresponding sensor, and the exit port is used to provide an exit channel for the optical signal emitted by the sensor, and the exit port is arranged on the side close to the test sample, and the receiving cavity is arranged on the side away from the test sample.

8. The sample detection device according to claim 7, characterized in that: A metal cover is provided between the accommodating cavity and the sensor, and the metal cover is used to reduce the wear of the sensor.

9. A sample position detection method, characterized in that: The steps of the sample position testing method at least include: S1: providing a sample detection device according to any one of claims 1 to 8, placing a test sample into the sample detection device, and each sensor emitting a light signal; S2: Determine whether the test sample is skewed based on whether the sensor group can receive the light signal.

10. The sample position detection method according to claim 9, characterized in that: In step S2, when each sensor can receive the light signal, it is considered that the test sample is not skewed; otherwise, it is considered that the test sample is skewed and a warning signal is issued.

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