Superlens focusing efficiency automatic test system and method

Abstract

The invention relates to the technical field of lens defect detection, in particular to a superlens focusing efficiency automatic test system and method, and the system comprises a data acquisition module, an analogue simulation module, a focusing detection module, an efficiency calculation module and a detection comparison module. The detection comparison module determines a focusing efficiency reference value according to the simulated focusing efficiency, and evaluates whether the super lens is qualified according to the focusing efficiency reference value and the actual focusing efficiency; multipoint detection is determined according to the distance between the center point of the simulation position of the focus point and the center point of the actual position and the size relation between the simulation size of the focus point and the actual size, and a plurality of incident light source detection points for multipoint detection are determined according to the position relation between the simulation position of the focus point and the actual position; and determining a reason for disqualification of the super lens according to a multi-point detection result. According to the system, the performance and possible defects of the super-lens are evaluated more comprehensively, the risk of misjudgment is reduced, and the reliability of super-lens testing is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of lens defect detection, and in particular to a superlens focusing efficiency automatic testing system and method. Background Art

[0002] Superlens is a new type of optical element, which has many unique advantages over traditional lenses. The structure of superlens usually includes the following parts: nanoscale structural units and high refractive index materials. The size and arrangement of nanoscale structural units determine the optical performance of superlens; high refractive index materials usually include silicon, etc. The focusing principle of superlens is based on the regulation of light by its unique nanostructure, which achieves the focusing of light by changing the propagation and phase of light at the nanoscale.

[0003] Chinese Patent Publication No. CN116539617A discloses a lens defect detection method, device and medium, which belongs to the technical field of lens defect detection. Lens pictures of the lens to be detected taken at multiple different focal lengths are obtained, and based on the image attributes of the lens pictures, it is determined whether there are suspected defects in all lens pictures, wherein the image attributes include the point information of the lens pictures; if there are suspected defects in all lens pictures, the suspected defects are determined to be the target defects of the lens to be detected. By focusing the camera at different depths and photographing the lens to be detected at different focal lengths, lens images with defects that may exist at different depths are obtained, and suspected defects in the lens pictures are identified. After determining that there are suspected defects in all lens pictures, the suspected defects can be determined to be target defects. By determining lens defects in this way, lens defects of different depths can be detected with high accuracy and can improve the efficiency of production line detection. It can be seen that the invention has the following problems:

[0004] Whether the finished product of the metalens meets its designed effect has not been determined by combining simulation and experiment, which leads to the problem of low detection accuracy. Summary of the invention

[0005] To this end, the present invention provides a metalens focusing efficiency automatic testing system and method, which are used to overcome the problem of low detection accuracy caused by the failure to determine whether the finished product of the metalens meets its designed effect through a method combining simulation and experiment in the prior art.

[0006] To achieve the above objectives, on the one hand, the present invention provides a metalens focusing efficiency automatic testing system, comprising:

[0007] A data acquisition module, used to acquire the design data of the metalens and the current ambient light data;

[0008] A simulation module, which is connected to the data acquisition module and is used to perform optical simulation using optical simulation software according to the design data and the ambient light data to determine the simulated focusing effect of the metalens;

[0009] A focusing detection module, which is connected to the data acquisition module and is used to perform an optical test on the metalens to be tested to determine the actual focusing effect of the metalens;

[0010] an efficiency calculation module, which is connected to the simulation module and the focus detection module respectively, and is used to determine a simulated focus efficiency according to the simulated focus effect, and to determine an actual focus efficiency according to the actual focus effect;

[0011] a detection and comparison module, which is respectively connected to the simulation module, the focus detection module and the efficiency calculation module, and is used to determine a focus efficiency reference value according to the simulated focus efficiency, and to evaluate whether the metalens is qualified according to the focus efficiency reference value and the actual focus efficiency, to determine to perform multi-point detection according to the distance between the center point of the simulated position of the focus point and the center point of the actual position and the size relationship between the simulated size and the actual size of the focus point, to determine a number of incident light source detection points for the multi-point detection according to the positional relationship between the simulated position and the actual position of the focus point, and to determine the reason why the metalens is unqualified according to the result of the multi-point detection;

[0012] The simulated focusing effect includes the simulated position, simulated size and simulated light intensity distribution of the focusing point, and the actual focusing effect includes the actual position, actual size and actual light intensity distribution of the focusing point.

[0013] Furthermore, the efficiency calculation module determines the focusing efficiency according to the ratio of the light intensity at the focus point to the incident light intensity, including:

[0014] Determine the focusing efficiency according to the ratio of the simulated focused point light intensity to the simulated incident light intensity;

[0015] The focusing efficiency is determined based on the ratio of the actual light intensity at the focus point to the actual incident light intensity;

[0016] The simulated incident light intensity is equal to the actual incident light intensity.

[0017] Furthermore, the detection and comparison module determines a focusing efficiency reference value according to the design accuracy of the metalens and the simulated focusing efficiency, wherein:

[0018] The design accuracy is negatively correlated with the difference between the simulated focusing efficiency and the focusing efficiency reference value.

[0019] Furthermore, the detection and comparison module evaluates whether the metalens is qualified according to the comparison result between the focusing efficiency reference value and the actual focusing efficiency, including:

[0020] If the actual focusing efficiency is greater than or equal to the focusing efficiency reference value, the metalens is evaluated as a qualified metalens;

[0021] If the actual focusing efficiency is less than the focusing efficiency reference value, the metalens is evaluated as an unqualified metalens.

[0022] Further, the detection comparison module determines whether to perform multi-point detection according to the evaluation result that the metalens is an unqualified metalens, combined with the positional relationship between the simulated position and the actual position of the focal point and the size relationship between the simulated size and the actual size of the focal point, including:

[0023] If the distance between the center point of the simulated position of the focus point and the center point of the actual position is less than the preset distance, and the difference in area corresponding to the simulated size and the actual size of the focus point is less than the preset difference, it is determined not to perform multi-point detection.

[0024] Further, the detection comparison module determines whether to perform multi-point detection according to the evaluation result that the metalens is an unqualified metalens, combined with the positional relationship between the simulated position and the actual position of the focal point and the size relationship between the simulated size and the actual size of the focal point, and also includes:

[0025] If the distance between the center point of the simulated position of the focus point and the center point of the actual position is greater than or equal to the preset distance, and / or the difference between the area corresponding to the simulated size and the actual size of the focus point is greater than or equal to the preset difference, it is determined to perform multi-point detection.

[0026] Further, the detection comparison module determines the position of the central incident light source detection point according to the positional relationship between the simulated position and the actual position of the focus point;

[0027] The position of the central incident light source detection point is centrally symmetric to the actual position about the simulated position.

[0028] Furthermore, the detection comparison module determines the positions of several surrounding incident light source detection points according to the position of the central incident light source detection point and the distance between the center point of the simulated position and the center point of the actual position.

[0029] Furthermore, the detection and comparison module performs multi-point detection on the metalens according to the positions of several incident light source monitoring points, obtains the focusing effect of the detection point corresponding to each incident light source detection point, determines the focusing effect of the multi-point detection according to the focusing effect of the detection point corresponding to each incident light source detection point, and determines whether the metalens has an overall defect according to the size of the focusing point of the multi-point detection and the center point of the focusing point position of the multi-point detection, wherein:

[0030] Determine the focus point size of multi-point detection according to the average value of the actual size of the focus point corresponding to each incident light source detection point;

[0031] The center point of the focus point position of the multi-point detection is determined according to the actual center point of the focus point corresponding to each incident light source detection point.

[0032] On the other hand, the present invention also provides a method for automatically testing the focusing efficiency of a metalens of a metalens focusing efficiency automatic testing system, comprising:

[0033] Step S1, obtaining design data of the metalens to be tested and current ambient light data;

[0034] Step S2, using optical simulation software to perform optical simulation to determine the simulated focusing effect of the metalens, and determining the simulated focusing efficiency according to the simulated focusing effect;

[0035] Step S3, performing an optical test on the metalens to determine an actual focusing effect of the metalens, and determining an actual focusing efficiency based on the actual focusing effect;

[0036] Step S4, determining a focusing efficiency reference value according to the simulated focusing efficiency, and comparing the focusing efficiency reference value with the actual focusing efficiency;

[0037] Step S5, evaluating whether the metalens is qualified according to the comparison result between the focusing efficiency reference value and the actual focusing efficiency;

[0038] Step S6, determining the distance between the center point of the simulated position of the focus point and the center point of the actual position and the size relationship between the simulated size and the actual size of the focus point to determine whether to perform multi-point detection;

[0039] Step S7, determining a number of incident light source detection points for multi-point detection according to the positional relationship between the simulated position and the actual position of the focus point;

[0040] Step S8, performing multi-point detection and determining the reason why the metalens is unqualified based on the results of the multi-point detection.

[0041] Compared with the prior art, the beneficial effect of the present invention is that the automatic testing system for the focusing efficiency of the metalens provided by the present invention accurately predicts the focusing effect of the metalens through a simulation module so that the performance of the metalens can be estimated before actual testing, thereby saving time and cost.

[0042] Furthermore, the system determines the focusing efficiency reference value according to the simulated focusing efficiency through the efficiency calculation module and compares it with the actual focusing efficiency to evaluate the qualification of the metalens, thereby reducing the subjectivity of the judgment, helping to identify and improve potential design or manufacturing defects, and determining whether there are problems in the design and manufacturing process of the metalens to improve the overall performance of the metalens.

[0043] Furthermore, the system adopts a multi-point detection method to comprehensively consider the position and size of the incident light source at each position of the metalens at the focal point, and compares it with the simulation results to more comprehensively evaluate the performance and possible defects of the metalens. This strategy effectively reduces the risk of misjudgment and improves the reliability and comprehensiveness of the metalens test.

[0044] Furthermore, the data and analysis results generated by this system can be used as a reference for designers, engineers, and manufacturers to support their decision-making during the design, manufacturing, and adjustment of metalenses. This data-driven approach helps optimize the performance and quality of metalenses and improve the competitiveness and market acceptance of the overall product. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a connection diagram of the automatic testing system for the focusing efficiency of a metalens according to an embodiment of the present invention;

[0046] Figure 2 This is a workflow diagram of the detection and comparison module according to an embodiment of the present invention;

[0047] Figure 3 1 is a step diagram of a method for automatically testing the focusing efficiency of a metalens according to an embodiment of the present invention. DETAILED DESCRIPTION

[0048] In order to make the objects and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with embodiments; it should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0049] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0050] It should be noted that, in the description of the present invention, terms such as "up", "down", "left", "right", "inside" and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings. This is merely for the convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention.

[0051] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] See also Figure 1 As shown, it is a connection diagram of the automatic testing system for focusing efficiency of a metalens according to an embodiment of the present invention. The present invention provides an automatic testing system for focusing efficiency of a metalens, comprising:

[0053] A data acquisition module is used to acquire the design data of the metalens and the current ambient light data. The design data includes the refractive index, size and shape. The current ambient light data includes the light source type (such as plane wave, point light source, etc.), incident light intensity (luminous flux per unit area, representing the intensity of light), wavelength (such as a wavelength within the visible light range), incident angle (usually vertical incidence) and polarization state (set as needed);

[0054] A simulation module, which is connected to the data acquisition module, and is used to perform optical simulation using optical simulation software according to the design data and the ambient light data to determine the simulated focusing effect of the metalens; in implementation, the simulation module uses numerical simulation tools to perform accurate optical simulation, including ray tracing and wavefront propagation, and the optical simulation software includes any one of the FDTD algorithm in Lumerical software, FDTD Solutions software, Zemax software, and COMSOL Multiphysics software;

[0055] The simulation process includes: (1) setting the incident light source in the simulation software, including the wavelength (such as a wavelength in the visible light range), the incident angle (usually vertical incidence), and the polarization state (according to the actual setting); (2) defining the environment of the metalens as air or a specific medium, and setting the corresponding refractive index. In the implementation, the environment is set to air; (3) importing the designed metalens model (designed according to the design data of the metalens to be tested) into the simulation software to ensure that the model size, material and structure are consistent with the design; (4) starting the simulation program to allow light to propagate through the metalens model to simulate The software calculates the refraction, reflection and phase modulation processes of light in the metalens; (5) After the simulation is completed, observe and record the simulated focusing effect of the light behind the metalens, including the simulated position, simulated size and simulated light intensity distribution of the focal point (the simulation software provides a light intensity distribution diagram or data at the focal point). Since the focusing efficiency is usually defined as the light intensity within the range of three times the full width at half maximum (FWHM) of the focal plane divided by the total incident light intensity, the average light intensity within the focal point area is taken as the simulated focal point light intensity. Therefore, the simulated focal point light intensity is set to the average light intensity within the range of three times the full width at half maximum (FWHM) of the focal plane.

[0056] A focusing detection module is connected to the data acquisition module and is used to perform an optical test on the metalens to be tested to determine the actual focusing effect of the metalens. In practice, to determine the actual focusing effect, experimental equipment must be prepared first, including: (1) selecting a light source with a suitable wavelength and stable intensity, preferably a laser light source; (2) installing the metalens sample and ensuring that the surface of the metalens is clean and undamaged and then correctly installed on the test platform; (3) preparing an optical power meter to measure the actual focal point light intensity and the actual incident light intensity; (4) preparing an imaging system, which can be a microscope or a camera (preferably a camera), for observing and recording the focusing of light; (5) constructing an optical path to allow the light emitted by the light source to be incident on the metalens and ensure that the light can accurately form a focal point at the focal plane through the metalens;

[0057] In implementation, an imaging system is used to obtain a light intensity distribution image at a focal plane, and the actual focus point light intensity is set to the average light intensity within a range of three times the full width at half maximum (FWHM) of the focal plane;

[0058] an efficiency calculation module, which is connected to the simulation module and the focus detection module respectively, and is used to determine a simulated focus efficiency according to the simulated focus effect, and to determine an actual focus efficiency according to the actual focus effect;

[0059] a detection and comparison module, which is respectively connected to the simulation module, the focus detection module and the efficiency calculation module, and is used to determine a focus efficiency reference value according to the simulated focus efficiency, and to evaluate whether the metalens is qualified according to the focus efficiency reference value and the actual focus efficiency, to determine to perform multi-point detection according to the distance between the center point of the simulated position of the focus point and the center point of the actual position and the size relationship between the simulated size and the actual size of the focus point, to determine a number of incident light source detection points for the multi-point detection according to the positional relationship between the simulated position and the actual position of the focus point, and to determine the reason why the metalens is unqualified according to the result of the multi-point detection;

[0060] The simulated focusing effect includes the simulated position, simulated size and simulated light intensity distribution of the focusing point, and the actual focusing effect includes the actual position, actual size and actual light intensity distribution of the focusing point.

[0061] Specifically, the efficiency calculation module determines the focusing efficiency according to the ratio of the light intensity at the focus point to the incident light intensity, including:

[0062] Determine the focusing efficiency according to the ratio of the simulated focused point light intensity to the simulated incident light intensity;

[0063] The focusing efficiency is determined based on the ratio of the actual light intensity at the focus point to the actual incident light intensity;

[0064] The simulated incident light intensity is equal to the actual incident light intensity. It is understandable that, before simulation, the actual incident light intensity of the light source is determined first, and the simulated incident light intensity is set according to the incident light intensity.

[0065] In implementation, the light intensity within the area of ​​the focus point (light spot) is determined by dividing the total light energy within the area by the area of ​​the area.

[0066] Specifically, the detection comparison module determines the focusing efficiency reference value according to the design accuracy of the metalens and the simulated focusing efficiency, wherein:

[0067] The design accuracy is negatively correlated with the difference between the simulated focusing efficiency and the focusing efficiency reference value.

[0068] It can be understood that the higher the requirements of the metalens for its design accuracy, the closer the focusing efficiency reference value should be to the simulated focusing efficiency; in implementation, the difference between the simulated focusing efficiency and the focusing efficiency reference value is ≤ 10% of the simulated focusing efficiency; generally, the focusing efficiency reference value = 95% × simulated focusing efficiency; when the design accuracy requirements of the metalens are high, the focusing efficiency reference value = 98% × simulated focusing efficiency.

[0069] See also Figure 2As shown, it is a workflow diagram of the detection and comparison module of an embodiment of the present invention. Specifically, the detection and comparison module evaluates whether the metalens is qualified according to the comparison result between the focusing efficiency reference value and the actual focusing efficiency, including:

[0070] If the actual focusing efficiency is greater than or equal to the focusing efficiency reference value, the metalens is evaluated as a qualified metalens;

[0071] If the actual focusing efficiency is less than the focusing efficiency reference value, the metalens is evaluated as an unqualified metalens.

[0072] Specifically, the detection comparison module determines whether to perform multi-point detection based on the evaluation result that the metalens is an unqualified metalens, combined with the positional relationship between the simulated position and the actual position of the focus point and the size relationship between the simulated size and the actual size of the focus point, including:

[0073] If the distance between the center point of the simulated position of the focus point and the center point of the actual position is less than the preset distance, and the difference in area corresponding to the simulated size and the actual size of the focus point is less than the preset difference, it is determined not to perform multi-point detection.

[0074] In implementation, the preset distance is set to ≤5 mm, preferably 3 mm; the preset difference is ≤10% of the simulated size of the focus point, preferably 5% of the simulated size of the focus point.

[0075] It is understandable that when the actual focusing efficiency is less than the focusing efficiency reference value (due to the light intensity at the focus point), it is judged as unqualified, but the position and size of the focus point are not much different from the simulation results (within the allowable range). It is believed that the surface of the metalens may be damaged or contaminated, affecting the propagation and focusing effect of light, or there is an error in the manufacturing process of the metalens that does not meet the manufacturing standards and affects the focusing efficiency. Therefore, in this case, the metalens needs to be cleaned and re-tested. If the result of the re-test is that the actual focusing efficiency is greater than or equal to the focusing efficiency reference value, the metalens is judged to be qualified; if the actual focusing efficiency is still less than the focusing efficiency reference value, it is judged that there is an error in the manufacturing of the metalens, resulting in it not achieving the preset effect.

[0076] Specifically, the detection comparison module determines whether to perform multi-point detection according to the evaluation result that the metalens is an unqualified metalens, combined with the positional relationship between the simulated position and the actual position of the focus point and the size relationship between the simulated size and the actual size of the focus point, and also includes:

[0077] If the distance between the center point of the simulated position of the focus point and the center point of the actual position is greater than or equal to the preset distance, and / or the difference between the area corresponding to the simulated size and the actual size of the focus point is greater than or equal to the preset difference, it is determined to perform multi-point detection.

[0078] It is understandable that when the focusing efficiency does not match the simulation results, and the center position of the focal point and / or the size of the focal point do not match the simulation results, it can be considered that the metalens has a defect at the position of the incident light source. At this time, it is necessary to determine whether there are other points that meet the focusing effect matching the simulation results to determine whether there is a problem with the metalens as a whole or a defect in an individual position.

[0079] Specifically, the detection comparison module determines the position of the central incident light source detection point according to the positional relationship between the simulated position and the actual position of the focus point;

[0080] The position of the central incident light source detection point and the actual position are centrally symmetric with respect to the simulated position, and the distance between the position of the central incident light source detection point and the actual position is equal to the distance between the actual position and the simulated position.

[0081] It can be understood that the incident light source detection point (including the central incident light source detection point and the surrounding incident light source detection points) is a virtual point located on the focal plane, and the position of the light source at the time of incidence and the line connecting the incident light source detection point are perpendicular to the plane where the metalens is located.

[0082] Specifically, the detection comparison module determines the positions of several surrounding incident light source detection points according to the position of the central incident light source detection point and the distance between the center point of the simulated position and the center point of the actual position.

[0083] It can be understood that the surrounding incident light source detection points include a first type of surrounding incident light source detection points and a second type of surrounding incident light source detection points; the first distance between the first type of surrounding incident light source detection points and the central incident light source detection points is equal, and the first distance is equal to three times the half-height full width of the focal plane; the second distance between the second type of surrounding incident light source detection points and the central incident light source detection points is equal, and the second distance is equal to 2 times the three times the half-height full width of the focal plane. The number of the first type of incident light source detection points and the number of the second type of surrounding incident light source detection points are both even numbers, and the number of the first type of incident light source detection points is greater than the number of the second type of surrounding incident light source detection points; preferably, the number of the first type of incident light source detection points = 2 × the number of the second type of surrounding incident light source detection points. Usually, the number of the first type of incident light source detection points is set to 20, and the number of the second type of surrounding incident light source detection points is set to 10.

[0084] Specifically, the detection comparison module performs multi-point detection on the metalens according to the positions of several incident light source monitoring points, and obtains the focusing effect of the detection point corresponding to each incident light source detection point, and determines the focusing effect of the multi-point detection according to the focusing effect of the detection point corresponding to each incident light source detection point, wherein:

[0085] Determine the focal point size of the multi-point detection according to the average value of the actual size of the focal point corresponding to each incident light source detection point; in implementation, determine the average value of the actual size of the focal point corresponding to each incident light source detection point as the focal point size of the multi-point detection;

[0086] The center point of the focus point position of multi-point detection is determined according to the actual position center point of the focus point corresponding to each incident light source detection point; in implementation, the geometric center point of the figure formed by the lines connecting the actual position center points of the focus points corresponding to each incident light source detection point is determined as the center point of the focus point position of multi-point detection.

[0087] Specifically, the detection comparison module determines whether the metalens has an overall defect according to the focus point size of the multi-point detection and the center point of the focus point position of the multi-point detection.

[0088] In the implementation, the size of the focus point detected by multiple points is compared with the simulated size of the focus point, and the center point of the focus point position detected by multiple points is compared with the center point of the simulated position of the focus point;

[0089] When any one of the conditions that the distance between the center point of the simulated position of the focus point and the center point of the focus point position detected by multi-point detection is greater than or equal to the preset distance and the difference between the area corresponding to the simulated size of the focus point and the area corresponding to the size of the focus point detected by multi-point detection is greater than or equal to the preset difference is met, the metalens is judged to be unqualified as a whole.

[0090] When any one of the conditions that the distance between the center point of the simulated position of the focusing point and the center point of the focusing point position detected by multi-point detection is greater than or equal to the preset distance and the difference between the area corresponding to the simulated size of the focusing point and the area corresponding to the size of the focusing point detected by multi-point detection is greater than or equal to the preset difference is met, it is determined that the metalens is not unqualified as a whole but has individual point defects.

[0091] See also Figure 3 As shown, it is a step diagram of the method for automatically testing the focusing efficiency of a metalens according to an embodiment of the present invention. The embodiment of the present invention also provides a method for automatically testing the focusing efficiency of a metalens in an automatic testing system for the focusing efficiency of a metalens, comprising:

[0092] Step S1, obtaining design data of the metalens to be tested and current ambient light data;

[0093] Step S2, using optical simulation software to perform optical simulation to determine the simulated focusing effect of the metalens, and determining the simulated focusing efficiency according to the simulated focusing effect;

[0094] Step S3, performing an optical test on the metalens to determine an actual focusing effect of the metalens, and determining an actual focusing efficiency based on the actual focusing effect;

[0095] Step S4, determining a focusing efficiency reference value according to the simulated focusing efficiency, and comparing the focusing efficiency reference value with the actual focusing efficiency;

[0096] Step S5, evaluating whether the metalens is qualified according to the comparison result between the focusing efficiency reference value and the actual focusing efficiency;

[0097] Step S6, determining the distance between the center point of the simulated position of the focus point and the center point of the actual position and the size relationship between the simulated size and the actual size of the focus point to determine whether to perform multi-point detection;

[0098] Step S7, determining a number of incident light source detection points for multi-point detection according to the positional relationship between the simulated position and the actual position of the focus point;

[0099] Step S8, performing multi-point detection and determining the reason why the metalens is unqualified based on the results of the multi-point detection.

[0100] So far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present invention.

[0101] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An automatic testing system for focusing efficiency of a metalens, characterized in that: include: A data acquisition module, used to acquire the design data of the metalens and the current ambient light data; A simulation module, which is connected to the data acquisition module and is used to perform optical simulation using optical simulation software according to the design data and the ambient light data to determine the simulated focusing effect of the metalens; A focusing detection module, which is connected to the data acquisition module and is used to perform an optical test on the metalens to be tested to determine the actual focusing effect of the metalens; an efficiency calculation module, which is connected to the simulation module and the focus detection module respectively, and is used to determine a simulated focus efficiency according to the simulated focus effect, and to determine an actual focus efficiency according to the actual focus effect; a detection and comparison module, which is respectively connected to the simulation module, the focus detection module and the efficiency calculation module, and is used to determine a focus efficiency reference value according to the simulated focus efficiency, and to evaluate whether the metalens is qualified according to the focus efficiency reference value and the actual focus efficiency, to determine to perform multi-point detection according to the distance between the center point of the simulated position of the focus point and the center point of the actual position and the size relationship between the simulated size and the actual size of the focus point, to determine a number of incident light source detection points for the multi-point detection according to the positional relationship between the simulated position and the actual position of the focus point, and to determine the reason why the metalens is unqualified according to the result of the multi-point detection; The simulated focusing effect includes the simulated position, simulated size and simulated light intensity distribution of the focusing point, and the actual focusing effect includes the actual position, actual size and actual light intensity distribution of the focusing point.

2. The automatic testing system for focusing efficiency of a metalens according to claim 1, characterized in that: The efficiency calculation module determines the focusing efficiency according to the ratio of the light intensity at the focusing point to the incident light intensity, including: Determine the focusing efficiency according to the ratio of the simulated focused point light intensity to the simulated incident light intensity; The focusing efficiency is determined based on the ratio of the actual light intensity at the focus point to the actual incident light intensity; The simulated incident light intensity is equal to the actual incident light intensity.

3. The automatic testing system for focusing efficiency of a metalens according to claim 1, characterized in that: The detection comparison module determines a focusing efficiency reference value according to the design accuracy of the metalens and the simulated focusing efficiency, wherein: The design accuracy is negatively correlated with the difference between the simulated focusing efficiency and the focusing efficiency reference value.

4. The automatic testing system for focusing efficiency of a metalens according to claim 3, characterized in that: The detection comparison module evaluates whether the metalens is qualified according to the comparison result between the focusing efficiency reference value and the actual focusing efficiency, including: If the actual focusing efficiency is greater than or equal to the focusing efficiency reference value, the metalens is evaluated as a qualified metalens; If the actual focusing efficiency is less than the focusing efficiency reference value, the metalens is evaluated as an unqualified metalens.

5. The automatic testing system for focusing efficiency of a metalens according to claim 4, characterized in that: The detection comparison module determines whether to perform multi-point detection based on the evaluation result that the metalens is an unqualified metalens, combined with the positional relationship between the simulated position and the actual position of the focus point and the size relationship between the simulated size and the actual size of the focus point, including: If the distance between the center point of the simulated position of the focus point and the center point of the actual position is less than the preset distance, and the difference in area corresponding to the simulated size and the actual size of the focus point is less than the preset difference, it is determined not to perform multi-point detection.

6. The automatic testing system for focusing efficiency of a metalens according to claim 5, characterized in that: The detection comparison module determines whether to perform multi-point detection according to the evaluation result that the metalens is an unqualified metalens, combined with the positional relationship between the simulated position and the actual position of the focus point and the size relationship between the simulated size and the actual size of the focus point, and also includes: If the distance between the center point of the simulated position of the focus point and the center point of the actual position is greater than or equal to the preset distance, and / or the difference between the area corresponding to the simulated size and the actual size of the focus point is greater than or equal to the preset difference, it is determined to perform multi-point detection.

7. The automatic testing system for focusing efficiency of a metalens according to claim 6, characterized in that: The detection comparison module determines the position of the central incident light source detection point according to the positional relationship between the simulated position and the actual position of the focus point; The position of the central incident light source detection point is centrally symmetric to the actual position about the simulated position.

8. The automatic testing system for focusing efficiency of a metalens according to claim 7, characterized in that: The detection comparison module determines the positions of several surrounding incident light source detection points according to the position of the central incident light source detection point and the distance between the center point of the simulated position and the center point of the actual position.

9. The automatic testing system for focusing efficiency of a metalens according to claim 8, characterized in that: The detection comparison module performs multi-point detection on the metalens according to the positions of several incident light source monitoring points, obtains the focusing effect of the detection point corresponding to each incident light source detection point, determines the focusing effect of the multi-point detection according to the focusing effect of the detection point corresponding to each incident light source detection point, and determines whether the metalens has an overall defect according to the size of the focusing point of the multi-point detection and the center point of the focusing point position of the multi-point detection, wherein: Determine the focus point size of multi-point detection according to the average value of the actual size of the focus point corresponding to each incident light source detection point; The center point of the focus point position of the multi-point detection is determined according to the actual center point of the focus point corresponding to each incident light source detection point.

10. A method for automatically testing the focusing efficiency of a metalens using the automatic testing system for focusing efficiency of a metalens according to claims 1 to 9, characterized in that: include: Step S1, obtaining design data of the metalens to be tested and current ambient light data; Step S2, using optical simulation software to perform optical simulation to determine the simulated focusing effect of the metalens, and determining the simulated focusing efficiency according to the simulated focusing effect; Step S3, performing an optical test on the metalens to determine an actual focusing effect of the metalens, and determining an actual focusing efficiency based on the actual focusing effect; Step S4, determining a focusing efficiency reference value according to the simulated focusing efficiency, and comparing the focusing efficiency reference value with the actual focusing efficiency; Step S5, evaluating whether the metalens is qualified according to the comparison result between the focusing efficiency reference value and the actual focusing efficiency; Step S6, determining the distance between the center point of the simulated position of the focus point and the center point of the actual position and the size relationship between the simulated size and the actual size of the focus point to determine whether to perform multi-point detection; Step S7, determining a number of incident light source detection points for multi-point detection according to the positional relationship between the simulated position and the actual position of the focus point; Step S8, performing multi-point detection and determining the reason why the metalens is unqualified based on the results of the multi-point detection.

Images