A flexible dual-drive gantry equipment

Abstract

The present invention relates to a flexible dual-drive gantry device. The flexible dual-drive gantry device described in the present invention comprises: a beam extending along the Y direction; two groups of connecting components are respectively arranged at the two ends of the beam, which include a beam connecting plate and an elastic plate, the beam connecting plate is fixedly arranged at the end of the beam, the elastic plate includes a fixed area and a deformation area, and the fixed area is fixed to the beam connecting plate; a driving component is arranged at both ends of the beam and drives the beam to slide along the X direction, and the deformation area of ​​the elastic plate is connected to the driving component. The flexible dual-drive gantry device described in the present invention has the advantages of high precision, high stability and low wear when used in high-speed and high-frequency response occasions.

Description

Technical Field

[0001] The invention relates to the technical field of gantry, and in particular to a flexible dual-drive gantry device. Background Art

[0002] The gantry structure is widely used in equipment in the semiconductor and surface mount industries, such as packaging and testing equipment, AOI inspection equipment, placement machines, dispensing machines, etc. The gantry structure usually includes two drive rails and a beam that slides along the drive rails. During use, the beam needs to slide back and forth along the drive rails at high speed and high frequency, so there are high requirements for the accuracy of the drive rail product itself and the installation accuracy. Otherwise, the beam is prone to jamming, abnormal noise, or even blocking during the sliding process, which greatly affects the production efficiency of the equipment. However, in actual use, the error between the two drive rails cannot be completely avoided, and the temperature rise of the beam will cause deformation and elongation, so it is necessary to improve the connection method between the beam and the drive rail. In addition, as the equipment is constantly developing towards miniaturization, the equipment needs to have better positioning accuracy and higher operating efficiency during operation, which is something that current equipment cannot meet. Summary of the invention

[0003] Based on this, the object of the present invention is to provide a flexible dual-drive gantry device, which has the advantages of high precision, high stability and low wear when used in high-speed and high-frequency response occasions.

[0004] A flexible dual-drive gantry device, comprising:

[0005] a beam extending in the Y direction;

[0006] A connecting assembly, wherein the connecting assembly has two groups and is respectively arranged at both ends of the cross beam, and comprises a cross beam connecting plate and an elastic plate, wherein the cross beam connecting plate is fixedly arranged at the end of the cross beam, and the elastic plate comprises a fixed area and a deformation area, and the fixed area is fixed to the cross beam connecting plate;

[0007] The driving assembly has two groups and is arranged at both ends of the beam and drives the beam to slide along the X direction. The deformation area of ​​the elastic plate is connected to the driving assembly.

[0008] The flexible dual-drive gantry equipment described in the present invention realizes a flexible connection between a crossbeam and a driving assembly by arranging the deformation of an elastic plate, so that the crossbeam can be slightly deflected and extended relative to the driving assembly, thereby absorbing errors caused by assembly processing, asynchronous movement or temperature rise deformation, avoiding abnormal noise, wear and jamming caused by temperature rise deformation and asynchronous operation of the driving assembly, and ensuring high precision, high stability and low wear of the equipment in high-speed and high-frequency response situations.

[0009] Furthermore, the fixing area is arranged on both sides of the deformation area along the Z direction, so as to ensure that the elastic plate can be reset promptly and quickly when the external force is removed, thereby ensuring the stability of the equipment operation.

[0010] Furthermore, the fixing area is provided with an abutting boss, and the elastic plate is tightly fitted against the abutting boss. This structure allows the deformation area of ​​the elastic plate to be suspended, so that the elastic plate has a certain deformation space.

[0011] Furthermore, the driving assembly includes a track body and a slide plate sliding along the track body, the slide plate is provided with a clamping block, and the connecting assembly also includes a mounting plate, the mounting plate is fixed to the deformation area of ​​the elastic plate, and is clamped to the slide plate through the clamping block. This structure realizes the rapid connection between the slide plate and the connecting assembly.

[0012] Furthermore, the connection component comprises:

[0013] A first connecting assembly, comprising a first crossbeam connecting plate and a first elastic plate, wherein a fixing area of ​​the first crossbeam connecting plate is fixed to the crossbeam, and a deformation area thereof is connected to an output end of the first driving assembly;

[0014] The second connecting assembly includes a second crossbeam connecting plate and a second elastic plate. The fixing area of ​​the second crossbeam connecting plate is fixed to the crossbeam, and the deformation area thereof is connected to the output end of the second driving assembly. The second crossbeam connecting plate is provided with a positioning boss, and the positioning boss abuts against the deformation area of ​​the second elastic plate. The second connecting assembly is provided with a positioning boss so that the second elastic plate can only be twisted to prevent the crossbeam from vibrating during high acceleration and deceleration. At the same time, this structure allows this end of the crossbeam to be used as a position reference for the crossbeam, ensuring that the driving assembly can accurately drive the sliding position of the crossbeam.

[0015] Furthermore, the positioning boss extends along the Z direction, so that when the second elastic plate is twisted, the positioning accuracy of this end of the beam in the X and Y directions is improved, ensuring that the driving component can accurately drive the sliding position of the beam.

[0016] Furthermore, the second connection assembly further comprises a positioning screw, the rod of which passes through the mounting plate and the second elastic plate and is connected to the second beam connecting plate. The screw makes the mounting plate and the second elastic plate fit tightly, and the second elastic plate only twists when the external force does not exceed the fitting force.

[0017] Furthermore, the second connection assembly further comprises an elastic member, the elastic member is sleeved outside the positioning screw, and the elastic member is compressed and arranged between the head of the positioning screw and the mounting plate. The structure can adjust the size of the fitting force by screwing in or out the positioning screw.

[0018] Furthermore, the positioning area of ​​the elastic plate is provided with an end nut pressing plate on the side away from the abutting boss to lock the locking screws penetrated on the beam connecting plate, and the deformation area of ​​the elastic plate is provided with a middle nut pressing plate to lock the locking screws penetrated on the mounting plate, and an avoidance groove is provided in the middle of the beam connecting plate, and the middle nut pressing plate is provided corresponding to the avoidance groove. This structure can realize the locking of the locking screw, achieve a compact structure and prevent it from falling off.

[0019] Furthermore, a third track body is arranged on the crossbeam, and the third track body enables the slide table to be slidably arranged, so that the slide table device can move quickly in the XY plane.

[0020] For better understanding and implementation, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is an axial view of the flexible dual-drive gantry device of the present invention;

[0022] Figure 2 for Figure 1 A partial enlarged view of the middle A area;

[0023] Figure 3 for Figure 1 A partial enlarged view of the middle B area;

[0024] Figure 4 is an exploded view of the first connection component;

[0025] Figure 5 is an exploded view of the second connection component;

[0026] Figure 6 An exploded diagram of the connection between the first connection component, the second connection component and the crossbeam;

[0027] Explanation of the accompanying drawings: 1. base; 2. first drive assembly; 21. first track body; 22. first slide plate; 23. first clamping block; 3. second drive assembly; 31. second track body; 32. second slide plate; 33. second clamping block; 4. third drive assembly; 41. beam; 42. third track body; 5. first connecting assembly; 51. first beam connecting plate; 511. first abutting boss; 512. first avoidance groove; 52. first elastic plate; 53. first mounting plate; 54. first end nut pressing plate; 55. first middle nut pressing plate; 6. second connecting assembly; 61. second beam connecting plate; 611. second abutting boss; 612. positioning boss; 613. second avoidance groove; 62. second elastic plate; 63. second mounting plate; 64. positioning screw; 65. elastic member; 66. second end nut pressing plate; 67. second middle nut pressing plate; 7. locking screw. DETAILED DESCRIPTION

[0028] The existing gantry equipment has difficulty in fully guaranteeing the synchronization between the drive rails, and the errors caused by the installation accuracy and product accuracy cannot be completely avoided. These factors will cause the beam to deflect slightly during use, making it difficult to ensure its verticality with the drive rail, which will lead to problems such as jamming of the beam movement. In addition, the temperature rise of the beam will cause the beam to elongate, which will also cause jamming of the beam movement.

[0029] Existing gantry structures usually use airbags, springs and other structures to achieve flexible connection between the crossbeam and the driving guide rail to supplement the distance change in the Y direction. However, when the crossbeam needs to be accelerated and decelerated quickly and at high frequency, the crossbeam will vibrate greatly, which has a great impact on the positioning accuracy of the gantry structure, and the wear is aggravated, affecting the service life. In this regard, the gantry device provided by the present application improves the connection structure, which can realize the deflection and extension of the crossbeam relative to the driving guide rail while ensuring the positioning accuracy of the crossbeam during high-frequency acceleration and deceleration.

[0030] Example 1

[0031] See also Figure 1-6 , Figure 1 This is an axial view of the flexible dual-drive gantry device of the present invention; Figure 2 for Figure 1 A partial enlarged view of the middle A area; Figure 3 for Figure 1 A partial enlarged view of the middle B area; Figure 4 is an exploded view of the first connection component; Figure 5 is an exploded view of the second connection component; Figure 6 It is an exploded diagram of the connection between the first connecting component, the second connecting component and the beam.

[0032] The present invention discloses a flexible dual-drive gantry device, comprising a base 1, a first drive assembly 2, a second drive assembly 3, a third drive assembly 4, a first connecting assembly 5 and a second connecting assembly 6. The first drive assembly 2 and the second drive assembly 3 are parallel to the X direction and are arranged on the base 1 at intervals, and the third drive assembly 4 is arranged between the first drive assembly 2 and the second drive assembly 3 and is perpendicular to the first drive assembly 2 and the second drive assembly 3. The two ends of the third drive assembly 4 are respectively connected to the output ends of the first drive assembly 2 and the second drive assembly 3 through the first connecting assembly 5 and the second connecting assembly 6, thereby forming a gantry structure.

[0033] The first driving assembly 2 includes a first track body 21 and a first slide 22, and the second driving assembly 3 includes a second track body 31 and a second slide 32. The first slide 22 or the second slide 32 can be driven by a motor, thereby driving the first slide 22 to slide along the first track body 21, and the second slide 32 to slide along the second track body 31. The third driving assembly 4 includes a crossbeam 41 and a third track body 42 arranged on the crossbeam 41, wherein the crossbeam 41 is placed along the Y axis, and the third track body 42 is used to set the slide driven by the flexible dual-drive gantry device.

[0034] The first connecting assembly 5 includes a first crossbeam connecting plate 51, a first elastic plate 52 and a first mounting plate 53. The first crossbeam connecting plate 51 is fixedly arranged at one end of the crossbeam 41, and a first abutting boss 511 is arranged on both the upper and lower sides thereof. The first elastic plate 52 is made of a thin plate with elasticity, such as a metal thin plate, etc. The thin plate should not be too thin, and it is necessary to ensure that it can be torsionally deformed only after a certain force is applied to it. The upper and lower sides of the first elastic plate 52 are fixed areas, which are fixed to the first abutting boss 511 by locking screws 7, and are tightly fitted with the first abutting boss 511. The middle part of the first elastic plate 52 is a deformation area, which is spaced a certain distance from the first crossbeam 41 connecting plate, so as to ensure that the first elastic plate 52 has sufficient deformation space. The first mounting plate 53 is fixedly arranged in the middle part of the first elastic plate 52 by locking screws 7, and its bottom surface is abutted and fitted with the surface of the first slide plate 22.

[0035] The first slide plate 22 is provided with a first clamping block 23 , which clamps the first mounting plate 53 , so that when the first slide plate 22 is deflected, the first mounting plate 53 can be driven to rotate by the first clamping block 23 , thereby causing the first elastic plate 52 to be twisted and deformed.

[0036] Preferably, to ensure stable connection, first end nut pressing plates 54 are provided on the upper and lower sides of the first elastic plate 52 on the side away from the first abutting boss 511, so as to lock the locking screw 7 passed through the connecting plate of the first beam 41. A first middle nut pressing plate 55 is provided on the middle part of the first elastic plate 52 on the side close to the connecting plate of the first beam 41, so as to lock the locking screw 7 passed through the first mounting plate 53. A first avoidance groove 512 is provided in the middle part of the first beam connecting plate 51, and the first middle nut pressing plate 55 is provided corresponding to the first avoidance groove 512.

[0037] The second connecting assembly 6 includes a second crossbeam connecting plate 61, a second elastic plate 62 and a second mounting plate 63. The second crossbeam connecting plate 61 is fixedly arranged at one end of the crossbeam 41, and a second abutting boss 611 is arranged on both the upper and lower sides thereof. The second elastic plate 62 is made of a thin plate with elasticity, such as a metal thin plate, etc. The thin plate should not be too thin, and it is necessary to ensure that it can be torsionally deformed only after a certain force is applied to it. The upper and lower sides of the second elastic plate 62 are fixed areas, which are fixed to the second abutting boss 611 by locking screws 7, and are tightly fitted with the second abutting boss 611. The middle part of the second elastic plate 62 is a deformation area, which is spaced a certain distance from the second crossbeam 41 connecting plate, so as to ensure that the second elastic plate 62 has enough deformation space. The second mounting plate 63 is fixedly arranged in the middle part of the second elastic plate 62 by locking screws 7, and its bottom surface is abutted and fitted with the surface of the second slide plate 32. The second slide plate 32 is provided with a second clamping block 33 , which clamps the second mounting plate 63 , so that when the second slide plate 32 is deflected, the second mounting plate 63 can be driven to rotate by the second clamping block 33 , thereby causing the second elastic plate 62 to twist and deform.

[0038] Since the gantry equipment sometimes needs to be accelerated or decelerated at high speed, the crossbeam 41 needs to be positioned, so it is necessary to avoid the crossbeam 41 from shaking during high-speed vibration, which affects the accuracy of the equipment. Preferably, a positioning boss 612 is provided on the connecting plate of the second crossbeam 41, and the positioning boss 612 extends in the vertical direction (i.e., the Z direction). A positioning screw 64 is passed through the second mounting plate 63, and an elastic member 65 is sleeved on the outside of the positioning screw 64. The elastic member 65 is compressed and arranged between the head of the positioning screw 64 and the second mounting plate 63. After the rod of the positioning screw 64 passes through the second mounting plate 63 and the second elastic plate 62, it is connected to the connecting plate of the second crossbeam 41, so that when screwed in, the second elastic plate 62 is pulled to press against the positioning boss 612, and the second elastic plate 62 rotates with the positioning boss 612 as the axis. The elastic member 65 can be a spring, a disc, etc.

[0039] The second elastic plate 62 is provided with second end nut pressing plates 66 on the upper and lower sides on the side away from the second abutting boss 611, so as to lock the locking screw 7 penetrated on the second beam connecting plate 61. The second elastic plate 62 is provided with a second middle nut pressing plate 67 in the middle part, and the second beam connecting plate 61 is provided with a second avoidance groove 613 corresponding to the second middle nut pressing plate 67, and the second middle nut pressing plate 67 locks the locking screw 7 penetrated on the second mounting plate 63.

[0040] When the equipment is running, the motor starts to make the crossbeam 41 slide along the X direction, specifically, by driving the first drive assembly 2 or the second drive assembly 3 to move the first slide plate 22 or the second slide plate 32. To ensure the positioning accuracy, the motor drives the drive assembly connected to the second connecting assembly 6, and uses the end where the second connecting assembly 6 is located as the positioning reference of the crossbeam 41. When the first slide plate 22 and the second slide plate 32 slide asynchronously, that is, when the crossbeam 41 rotates slightly relative to the first drive assembly 2 and the second drive assembly 3, the first mounting plate 53 or the second mounting plate 63 pulls the first elastic plate 52 or the second elastic plate 62 to twist relative to the crossbeam 41, so as to prevent the crossbeam 41 from getting stuck when moving.

[0041] When the spacing between the first and second slide plates 22 and 32 changes slightly due to installation or product errors, or the temperature rise deformation of the beam 41, the first mounting plate 53 or the second mounting plate 63 pulls the first elastic plate 52 or the second elastic plate 62 to deform its middle part along the Y direction to offset the sudden change in spacing. Due to high acceleration and deceleration during operation, the flexible connection components can easily cause the beam 41 to vibrate violently. At this time, the positioning screws 64 can be adjusted to make the second elastic plate 62 abut against the positioning boss 612, ensuring that the axis of the second elastic plate 62 is tightly against the positioning boss 612 when twisting, avoiding vibration-induced reduction in the accuracy of the beam 41 and improving the stability of the equipment.

[0042] Example 2

[0043] This embodiment is basically the same as Embodiment 1, with the only difference being that: there are two groups of the first connecting components 5, and the two ends of the third driving component 4 are respectively connected to the first driving component 2 and the second driving component 3 through the first connecting components 5, thereby forming a gantry structure.

[0044] The flexible dual-drive gantry equipment described in the present invention realizes the flexible connection between the crossbeam and the drive assembly by setting the deformation of the elastic plate, so that the crossbeam can be slightly deflected and extended relative to the drive assembly, absorbing the errors caused by assembly processing, asynchronous movement or temperature rise deformation, avoiding abnormal noise wear and jamming caused by temperature rise deformation and asynchronous operation of the drive assembly, and ensuring high precision, high stability and low wear of the equipment in high-speed and high-frequency response occasions. At the same time, the equipment ensures that the drive assembly can accurately drive the sliding position of the crossbeam through the second connecting assembly, thereby ensuring the improvement of the accuracy of the equipment.

[0045] In the description of the present application, it should be understood that if the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0046] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0047] In this application, unless otherwise clearly specified and limited, if the terms "install", "connect", "connect", "fix", "set", etc. appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0048] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0049] The above-mentioned embodiments only express several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, and the present invention is also intended to include these modifications and modifications.

Claims

1. A flexible dual-drive gantry device, characterized in that: include: a beam extending in the Y direction; A connecting assembly, wherein the connecting assembly has two groups and is respectively arranged at both ends of the beam, and comprises a beam connecting plate and an elastic plate, wherein the beam connecting plate is fixedly arranged at the end of the beam, the elastic plate comprises a fixed area and a deformation area, the fixed area is fixed to the beam connecting plate, and the connecting assembly further comprises a mounting plate, wherein the mounting plate is fixed to the deformation area of ​​the elastic plate; A driving assembly, which has two groups and is disposed at both ends of the beam and drives the beam to slide along the X direction, and the deformation area of ​​the elastic plate is connected to the driving assembly; The connection component comprises: A first connecting assembly, comprising a first crossbeam connecting plate and a first elastic plate, wherein a fixing area of ​​the first crossbeam connecting plate is fixed to the crossbeam, and a deformation area thereof is connected to an output end of the first driving assembly; A second connecting assembly comprises a second crossbeam connecting plate and a second elastic plate, wherein a fixing area of ​​the second crossbeam connecting plate is fixed to the crossbeam, and a deformation area thereof is connected to an output end of the second driving assembly, and the second crossbeam connecting plate is provided with a positioning boss, and the positioning boss abuts against the deformation area of ​​the second elastic plate; The positioning boss extends along the Z direction; the second connecting component also includes a positioning screw, the rod of which passes through the mounting plate and the second elastic plate and is connected to the second beam connecting plate; the second connecting component also includes an elastic member, which is sleeved on the outside of the positioning screw and is compressed between the head of the positioning screw and the mounting plate. The second elastic plate is abutted against the positioning boss by adjusting the positioning screw to ensure that the axis of the second elastic plate is tightly abutted against the positioning boss when the second elastic plate is twisted.

2. A flexible dual-drive gantry device according to claim 1, characterized in that: The fixing area is arranged on both sides of the deformation area along the Z direction.

3. A flexible dual-drive gantry device according to claim 1, characterized in that: The fixing area is provided with an abutting boss, and the elastic plate is tightly fitted against the abutting boss.

4. A flexible dual-drive gantry device according to any one of claims 1 to 3, characterized in that: The driving assembly comprises a track body and a slide plate sliding along the track body, the slide plate is provided with a clamping block, and the mounting plate is clamped with the slide plate through the clamping block.

5. A flexible dual-drive gantry device according to claim 3, characterized in that: The positioning area of ​​the elastic plate is provided with an end nut pressure plate on the side away from the abutting boss to lock the locking screws passed through the beam connecting plate. The deformation area of ​​the elastic plate is provided with a middle nut pressure plate to lock the locking screws passed through the mounting plate. An avoidance groove is opened in the middle of the beam connecting plate, and the middle nut pressure plate is arranged corresponding to the avoidance groove.

6. A flexible dual-drive gantry device according to claim 1, characterized in that: The cross beam is provided with a third track body, and the third track body enables the slide table to be slidably arranged.

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