Radio frequency parameter acquisition circuit and radio frequency power supply system

Abstract

The invention provides a radio frequency parameter acquisition circuit and a radio frequency power supply system, and relates to the technical field of radio frequency, the radio frequency parameter acquisition circuit comprises a signal processing unit, an envelope peak value acquisition unit and an envelope effective value acquisition unit; the signal processing unit is used for being connected with an output path of a radio frequency power supply so as to acquire a voltage envelope signal when the radio frequency power supply outputs electric energy to a load, and a part with a voltage value greater than zero in a waveform of the voltage envelope signal is reserved as a forward envelope signal; the envelope peak value acquisition unit is used for acquiring an envelope peak value of the forward envelope signal; the envelope effective value acquisition unit is used for acquiring an envelope effective value of the forward envelope signal; wherein the radio frequency parameter at least comprises a reflection coefficient module value when the radio frequency power supply outputs electric energy to the load, and the reflection coefficient module value is calculated according to the envelope peak value and the envelope effective value. The radio frequency parameter acquisition requirement when the radio frequency power supply outputs electric energy to the load can be met.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency parameter acquisition circuit and a radio frequency power supply system having the radio frequency parameter acquisition circuit. Background Art

[0002] At present, with the popularization of radio frequency (RF) technology, more and more RF power supplies are used to provide power to various loads, and the impedance matching between the RF power supply and the load becomes more and more important, especially when the impedance of the load changes, it is also necessary to keep the RF parameters of the output path of the RF power supply stable at all times to ensure that the RF power supply and the load impedance match. Therefore, when the RF power supply outputs power to the load, the RF parameters are important parameters to determine whether the RF power supply and the load are impedance matched. How to meet the requirements for obtaining RF parameters including at least the reflection coefficient modulus value to better output power to the load has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency parameter acquisition circuit and a radio frequency power supply system, which can meet the radio frequency parameter acquisition requirements when the radio frequency power supply outputs electric energy to a load.

[0004] In a first aspect, a radio frequency parameter acquisition circuit is provided, the radio frequency parameter acquisition circuit comprising a signal processing unit, an envelope peak acquisition unit and an envelope effective value acquisition unit. The signal processing unit is used to connect to the output path of the radio frequency power supply to collect the voltage envelope signal when the radio frequency power supply outputs electric energy to the load, and retain the part of the waveform of the voltage envelope signal where the voltage value is greater than zero as the forward envelope signal. The envelope peak acquisition unit is connected to the signal processing unit, and the envelope peak acquisition unit is used to acquire the envelope peak value of the forward envelope signal. The envelope effective value acquisition unit is connected to the signal processing unit, and the envelope effective value acquisition unit is used to acquire the envelope effective value of the forward envelope signal. Wherein, the radio frequency parameters when the radio frequency power supply outputs electric energy to the load at least include a reflection coefficient modulus value, and the reflection coefficient modulus value is calculated based on the envelope peak value and the envelope effective value.

[0005] In a possible implementation manner, the reflection coefficient modulus is a ratio of a difference between the envelope peak value and the envelope effective value to the envelope effective value.

[0006] In a possible implementation, the envelope peak value acquisition unit includes an envelope peak value acquisition module, which is connected to the signal processing unit. The envelope peak value acquisition module has a first acquisition parameter, and is used to receive the forward envelope signal through an input end, and acquire a first signal value of the forward envelope signal according to the first acquisition parameter as the envelope peak value of the forward envelope signal.

[0007] In a possible implementation, the envelope peak value acquisition module includes a first capacitor and a first resistor, one end of the first capacitor and one end of the first resistor are both connected to a connection point between an input end and an output end of the envelope peak value acquisition module, and the other end of the first capacitor and the other end of the first resistor are both grounded. The first acquisition parameter is related to the capacitance value of the first capacitor and the resistance value of the first resistor.

[0008] In a possible implementation, the envelope effective value acquisition unit includes an envelope effective value acquisition module, and the envelope effective value acquisition module is connected to the signal processing unit. The envelope effective value acquisition module has a second acquisition parameter, and the envelope effective value acquisition module is used to receive the forward envelope signal through an input end, and acquire a second signal value of the forward envelope signal according to the second acquisition parameter to serve as the envelope effective value of the forward envelope signal.

[0009] In a possible implementation, the envelope effective value acquisition module includes a second capacitor and a second resistor, one end of the second capacitor and one end of the second resistor are both connected to a connection point between an input terminal and an output terminal of the envelope effective value acquisition module, and the other end of the second capacitor and the other end of the second resistor are both grounded. The second acquisition parameter is related to the capacitance value of the second capacitor and the resistance value of the second resistor.

[0010] In a possible implementation manner, the second acquisition parameter is greater than the first acquisition parameter.

[0011] In a possible implementation, the envelope peak acquisition unit further includes a first isolation module, the first isolation module is connected between the signal processing unit and the input end of the envelope peak acquisition module, the first isolation module is used to allow the positive envelope signal output by the signal processing unit to be transmitted to the envelope peak acquisition module, and isolate the envelope effective value acquisition module from the envelope peak acquisition module. The envelope effective value acquisition module further includes a second isolation module, the second isolation module is connected between the signal processing unit and the input end of the envelope effective value acquisition module, the second isolation module is used to allow the positive envelope signal output by the signal processing unit to be transmitted to the envelope effective value acquisition module, and isolate the envelope peak acquisition module from the envelope effective value acquisition module.

[0012] In a possible implementation, the first isolation module includes a first diode, the anode of the first diode is connected to the signal processing unit, and the cathode of the first diode is connected to the input end of the envelope peak value acquisition module. The second isolation module includes a second diode, the anode of the second diode is connected to the signal processing unit, and the cathode of the second diode is connected to the input end of the envelope effective value acquisition module.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply and a radio frequency parameter acquisition circuit. The radio frequency parameter acquisition circuit comprises a signal processing unit, an envelope peak acquisition unit and an envelope effective value acquisition unit. The signal processing unit is used to connect with the output path of the radio frequency power supply to collect the voltage envelope signal when the radio frequency power supply outputs electric energy to the load, and retain the part of the waveform of the voltage envelope signal where the voltage value is greater than zero as the forward envelope signal. The envelope peak acquisition unit is connected to the signal processing unit, and the envelope peak acquisition unit is used to acquire the envelope peak value of the forward envelope signal. The envelope effective value acquisition unit is connected to the signal processing unit, and the envelope effective value acquisition unit is used to acquire the envelope effective value of the forward envelope signal. Wherein, the radio frequency parameters when the radio frequency power supply outputs electric energy to the load at least include the reflection coefficient modulus, and the reflection coefficient modulus is calculated based on the envelope peak value and the envelope effective value.

[0014] The RF parameter acquisition circuit and RF power supply system of the present application process the waveform of the voltage envelope signal by configuring a signal processing unit to retain the part of the voltage value greater than zero as the forward envelope signal, and calculate the reflection coefficient modulus value by configuring an envelope peak acquisition unit and an envelope effective value acquisition unit according to the envelope peak value and envelope effective value obtained from the forward envelope signal, respectively, to meet the acquisition requirements of the RF parameters including at least the reflection coefficient modulus value when the RF power supply outputs electric energy to the load, so as to better output electric energy to the load. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 It is a block diagram of a radio frequency parameter acquisition circuit in an embodiment of the present application.

[0017] Figure 2 Schematic diagram of waveforms of a voltage envelope signal and a positive envelope signal in an embodiment of the present application.

[0018] Figure 3 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a control unit.

[0019] Figure 4 It is a block diagram of a radio frequency parameter acquisition circuit in yet another embodiment of the present application.

[0020] Figure 5 Schematic diagram of a circuit of an envelope peak value acquisition unit in an embodiment of the present application.

[0021] Figure 6 It is a block diagram of a radio frequency parameter acquisition circuit in another embodiment of the present application.

[0022] Figure 7 Schematic diagram of a circuit of an envelope effective value acquisition unit in an embodiment of the present application.

[0023] Figure 8 It is a block diagram of a radio frequency parameter acquisition circuit in yet another embodiment of the present application.

[0024] Fig. 9 FIG. 4 is a circuit diagram of a signal processing unit in an embodiment of the present application.

[0025] Fig.10 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a total effective value acquisition unit.

[0026] Fig.11 It is a block diagram of a radio frequency power supply system in one embodiment of the present application.

[0027] Description of the accompanying drawings: 1000, RF power supply system, RF, RF power supply, 10, RF parameter acquisition circuit, 100, signal processing unit, 110, signal sampling module, R3, third resistor, R4, fourth resistor, Ue, voltage envelope signal, 120, signal interception module, D3, third diode, Ue+, forward envelope signal, 200, envelope peak acquisition unit, 210, first isolation module, D1, first diode, 220, envelope peak acquisition module, C1, first capacitor, R1, first resistor, Uem, envelope peak, 300, envelope effective value acquisition unit, 310, second isolation module, D2, second diode, 320, envelope effective value acquisition module, C2, second capacitor, R2, second resistor, Uerms, envelope effective value, 400, control unit, 500, total effective value acquisition unit, Utrms, total effective value, GND, ground, RL, load. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0029] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0030] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0031] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0032] Please also read Figure 1 , Figure 2 , Figure 1 is a block diagram of a radio frequency parameter acquisition circuit in an embodiment of the present application, Figure 2 Schematic diagram of the waveform of the voltage envelope signal and the positive envelope signal in one embodiment of the present application. Figure 1 , Figure 2 As shown, the present application provides a radio frequency parameter acquisition circuit 10, and the radio frequency parameter acquisition circuit 10 includes a signal processing unit 100, an envelope peak acquisition unit 200, and an envelope effective value acquisition unit 300. The signal processing unit 100 is used to connect with the output path of the radio frequency power supply RF to collect the voltage envelope signal Ue when the radio frequency power supply RF outputs electric energy to the load RL, and retain the part of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the forward envelope signal Ue+. The envelope peak acquisition unit 200 is connected to the signal processing unit 100, and the envelope peak acquisition unit 200 is used to obtain the envelope peak value Uem of the forward envelope signal Ue+. The envelope effective value acquisition unit 300 is connected to the signal processing unit 100, and the envelope effective value acquisition unit 300 is used to obtain the envelope effective value Uerms of the forward envelope signal Ue+. Among them, the radio frequency parameters when the radio frequency power supply RF outputs electric energy to the load RL at least include the reflection coefficient modulus, and the reflection coefficient modulus is calculated based on the envelope peak value Uem and the envelope effective value Uerms.

[0033] Thus, the RF parameter acquisition circuit 10 in the present application processes the waveform of the voltage envelope signal Ue by configuring the signal processing unit 100 to retain the part of the voltage value greater than zero as the forward envelope signal Ue+, and configures the envelope peak acquisition unit 200 and the envelope effective value acquisition unit 300 to respectively obtain the envelope peak value Uem and the envelope effective value Uerms according to the forward envelope signal Ue+, and can calculate the reflection coefficient modulus value, so as to meet the acquisition requirements of the RF parameters including at least the reflection coefficient modulus value when the RF power supply RF outputs electrical energy to the load RL, so as to better output electrical energy to the load RL.

[0034] Specifically, the RF power source RF is used to generate a high-frequency sine wave with a certain power value, and transmits the high-frequency sine wave to the load RL through the output path of the RF power source RF, so as to output electrical energy to the load RL. However, the impedance matching state between the RF power source RF and the load RL will affect the waveform of the high-frequency sine wave. When the impedance of the RF power source RF and the load RL does not match, such as Figure 2 The amplitude of the high-frequency sine wave shown will also fluctuate, so by using the voltage envelope signal Ue to display the amplitude change of the high-frequency sine wave, the required RF parameters, especially the voltage standing wave ratio and the reflection coefficient, can be quickly and accurately obtained. In addition, when the impedance matching state between the RF power supply RF and the load RL does not change, the voltage envelope signal Ue is also a periodic signal.

[0035] It should be noted that if Figure 2 As shown, the waveform of the voltage envelope signal Ue is processed, and the portion of the waveform of the voltage envelope signal Ue with a voltage value greater than zero is retained as the positive envelope signal Ue+, that is, the voltage envelope signal Ue is rectified to retain the portion of the waveform of the voltage envelope signal Ue with a voltage value greater than zero, wherein the voltage value of the waveform of the voltage envelope signal Ue is greater than zero, indicating that the transmission direction of the voltage envelope signal Ue is from the radio frequency power supply RF to the load RL.

[0036] In one or more embodiments, the envelope peak value Uem of the positive envelope signal Ue+ acquired by the envelope peak value acquisition unit 200 is also the peak value of the positive envelope signal Ue+.

[0037] In one or more embodiments, the reflection coefficient modulus is the ratio of the difference between the envelope peak value Uem and the envelope effective value Uerms to the envelope effective value Uerms.

[0038] Therefore, the RF parameter acquisition circuit 10 in the present application performs a series of processing and value acquisition on the voltage envelope signal Ue by configuring the above-mentioned signal processing unit 100, envelope peak acquisition unit 200 and envelope effective value acquisition unit 300 to obtain the envelope peak value Uem and the envelope effective value Uerms, and performs simple subtraction and division operations on the envelope peak value Uem and the envelope effective value Uerms, that is, the reflection coefficient modulus value can be calculated.

[0039] Specifically, if the reflection coefficient modulus is |Γ|, then |Γ|=(Uem-Uerms) / Uerms.

[0040] In one or more embodiments, the radio frequency parameters further include a voltage standing wave ratio, and the voltage standing wave ratio is calculated based on the reflection coefficient modulus.

[0041] Therefore, the RF parameter acquisition circuit 10 in the present application can also calculate the Voltage Standing Wave Ratio (VSWR) according to the reflection coefficient modulus value, and can comprehensively determine the matching condition of the RF power supply RF and the load RL according to the Voltage Standing Wave Ratio and the reflection coefficient modulus value.

[0042] Specifically, if the voltage standing wave ratio is SWR, then SWR=(1+|Γ|) / (1-|Γ|).

[0043] See also Figure 3 , Figure 3 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a control unit. Figure 3As shown, the RF parameter acquisition circuit 10 may further include a control unit 400, which is respectively connected to the envelope peak acquisition unit 200 and the envelope effective value acquisition unit 300, and the control unit 400 is used to receive the envelope effective value Uerms and the envelope peak value Uem, and calculate the reflection coefficient modulus value based on the envelope effective value Uerms and the envelope peak value Uem.

[0044] See also Figure 4 , Figure 4 FIG. 1 is a block diagram of a radio frequency parameter acquisition circuit in another embodiment of the present application. Figure 4 As shown, the envelope peak value acquisition unit 200 includes an envelope peak value acquisition module 220, and the envelope peak value acquisition module 220 is connected to the signal processing unit 100. The envelope peak value acquisition module 220 has a first acquisition parameter, and the envelope peak value acquisition module 220 is used to receive the positive envelope signal Ue+ through the input end, and acquire the first signal value of the positive envelope signal Ue+ according to the first acquisition parameter, as the envelope peak value Uem of the positive envelope signal Ue+.

[0045] Therefore, the RF parameter acquisition circuit 10 in the present application can obtain the required envelope peak value Uem by configuring the envelope peak acquisition module 220 with the first acquisition parameter and acquiring the first signal value of the forward envelope signal Ue+ according to the first acquisition parameter.

[0046] The envelope peak value acquisition module 220 acquires the first signal value of the forward envelope signal Ue+ according to the first acquisition parameter, that is, when the first acquisition parameter of the envelope peak value acquisition module 220 changes, the first signal value of the forward envelope signal Ue+ may change.

[0047] Please also read Figure 5 , Figure 5 FIG. 1 is a circuit diagram of an envelope peak value acquisition unit in an embodiment of the present application. Figure 5 As shown, the envelope peak value acquisition module 220 includes a first capacitor C1 and a first resistor R1, one end of the first capacitor C1 and one end of the first resistor R1 are both connected to the connection point between the input end and the output end of the envelope peak value acquisition module 220, and the other end of the first capacitor C1 and the other end of the first resistor R1 are both grounded GND. Among them, the first acquisition parameter is related to the capacitance value of the first capacitor C1 and the resistance value of the first resistor R1.

[0048] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a radio frequency parameter acquisition circuit in another embodiment of the present application. Figure 6As shown, the envelope effective value acquisition unit 300 includes an envelope effective value acquisition module 320, and the envelope effective value acquisition module 320 is connected to the signal processing unit 100. The envelope effective value acquisition module 320 has a second acquisition parameter, and the envelope effective value acquisition module 320 is used to receive the forward envelope signal Ue+ through the input terminal, and acquire the second signal value of the forward envelope signal Ue+ according to the second acquisition parameter, as the envelope effective value Uerms of the forward envelope signal Ue+.

[0049] Therefore, the RF parameter acquisition circuit 10 in the present application can obtain the required envelope effective value Uerms by configuring the envelope effective value acquisition module 320 to have a second acquisition parameter and obtaining the second signal value of the forward envelope signal Ue+ according to the second acquisition parameter.

[0050] The envelope effective value acquisition module 320 acquires the second signal value of the forward envelope signal Ue+ according to the second acquisition parameter, that is, when the second acquisition parameter of the envelope effective value acquisition module 320 changes, the second signal value of the forward envelope signal Ue+ may change.

[0051] Please also read Figure 7 , Figure 7 FIG. 1 is a circuit diagram of an envelope effective value acquisition unit in an embodiment of the present application. Figure 7 As shown, the envelope effective value acquisition module 320 includes a second capacitor C2 and a second resistor R2, one end of the second capacitor C2 and one end of the second resistor R2 are both connected to the connection point between the input end and the output end of the envelope effective value acquisition module 320, and the other end of the second capacitor C2 and the other end of the second resistor R2 are both grounded GND. The second acquisition parameter is related to the capacitance value of the second capacitor C2 and the resistance value of the second resistor R2.

[0052] In one or more embodiments, the second acquisition parameter is greater than the first acquisition parameter.

[0053] Therefore, the radio frequency parameter acquisition circuit 10 in the present application can acquire the required value in the forward envelope signal Ue+ by configuring the second acquisition parameter to be greater than the first acquisition parameter.

[0054] Furthermore, the difference between the second acquisition parameter and the first acquisition parameter is greater than the third preset value, so that the acquired envelope peak value Uem and envelope effective value Uerms are more accurate.

[0055] Furthermore, both the first acquisition parameter and the second acquisition parameter may be time constants to reflect the overall voltage change of the capacitor and the resistor.

[0056] Please refer again Figure 4 , Figure 6 .like Figure 4As shown, the envelope peak value acquisition unit 200 further includes a first isolation module 210, which is connected between the signal processing unit 100 and the input end of the envelope peak value acquisition module 220. The first isolation module 210 is used to allow the positive envelope signal Ue+ output by the signal processing unit 100 to be transmitted to the envelope peak value acquisition module 220, and to isolate the envelope effective value acquisition module 320 from the envelope peak value acquisition module 220. Figure 6 As shown, the envelope effective value acquisition module 320 also includes a second isolation module 310, which is connected between the signal processing unit 100 and the input end of the envelope effective value acquisition module 320. The second isolation module 310 is used to allow the positive envelope signal Ue+ output by the signal processing unit 100 to be transmitted to the envelope effective value acquisition module 320, and to isolate the envelope peak value acquisition module 220 from the envelope effective value acquisition module 320.

[0057] Therefore, the RF parameter acquisition circuit 10 in the present application can improve the accuracy of the envelope peak value Uem and the envelope effective value Uerms by configuring the first isolation module 210 to isolate the envelope effective value acquisition module 320 from the envelope peak acquisition module 220, and by configuring the second isolation module 310 to isolate the envelope peak acquisition module 220 from the envelope effective value acquisition module 320.

[0058] Please refer again Figure 5 , Figure 7 .like Figure 5 As shown, the first isolation module 210 includes a first diode D1, the anode of the first diode D1 is connected to the signal processing unit 100, and the cathode of the first diode D1 is connected to the input end of the envelope peak acquisition module 220. Figure 7 As shown, the second isolation module 310 includes a second diode D2 , an anode of the second diode D2 is connected to the signal processing unit 100 , and a cathode of the second diode D2 is connected to the input end of the envelope effective value acquisition module 320 .

[0059] The unidirectional conduction direction of the first diode D1 is from the anode to the cathode of the first diode D1, so as to isolate the envelope effective value acquisition module 320 from the envelope peak acquisition module 220. The unidirectional conduction direction of the second diode D2 is from the anode to the cathode of the second diode D2, so as to isolate the envelope peak acquisition module 220 from the envelope effective value acquisition module 320.

[0060] See also Figure 8 , Figure 8 FIG. 1 is a block diagram of a radio frequency parameter acquisition circuit in yet another embodiment of the present application. Figure 8As shown, the signal processing unit 100 may include a signal sampling module 110 and a signal interception module 120, the input end of the signal sampling module 110 is used to connect to the output path of the radio frequency power supply RF, the output end of the signal sampling module 110 is connected to the input end of the signal interception module 120, and the output end of the signal interception module 120 is respectively connected to the envelope peak acquisition unit 200 and the envelope effective value acquisition unit 300. The signal sampling module 110 is used to collect the voltage envelope signal Ue when the radio frequency power supply RF outputs electric energy to the load RL. The signal interception module 120 is used to receive the voltage envelope signal Ue, and retain the part of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the positive envelope signal Ue+, and output the positive envelope signal Ue+ to the envelope peak acquisition unit 200 and the envelope effective value acquisition unit 300 respectively.

[0061] In one or more embodiments, the signal sampling module 110 has a high impedance, so that the power value of the voltage envelope signal Ue is small, and thus the RF parameter acquisition circuit 10 substantially does not affect the RF power supply RF from outputting electrical energy to the load RL.

[0062] See also Fig. 9 , Fig. 9 FIG. 1 is a circuit diagram of a signal processing unit in an embodiment of the present application. Fig. 9 As shown, the signal interception module 120 may include a third diode D3, the anode of the third diode D3 is connected to the input end of the signal interception module 120, and the cathode of the third diode D3 is connected to the output end of the signal interception module 120. The unidirectional conduction direction of the third diode D3 is from the anode to the cathode of the third diode D3, and the third diode D3 allows the portion of the voltage envelope signal Ue whose voltage value is greater than zero to pass through, and prohibits the portion of the voltage envelope signal Ue whose voltage value is less than or equal to zero to pass through.

[0063] like Fig. 9 As shown, the signal sampling module 110 may include a third resistor R3 and a fourth resistor R4, which are connected in series between the input end of the signal sampling module 110 and the ground GND in sequence, and the connection point between the third resistor R3 and the fourth resistor R4 is the output end of the signal sampling module 110.

[0064] The signal sampling module 110 is used to obtain the voltage envelope signal Ue according to the relationship between the resistance value of the third resistor R3 and the resistance value of the fourth resistor R4.

[0065] In one or more embodiments, the difference between the resistance value of the third resistor R3 and the resistance value of the fourth resistor R4 is greater than the first preset value, so that the power value of the voltage envelope signal Ue is less than the second preset value.

[0066] See also Fig.10 , Fig.10 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a total effective value acquisition unit. Fig.10 As shown, the RF parameter acquisition circuit 10 may further include a total effective value acquisition unit 500, which is connected to the signal processing unit 100, and is used to receive the voltage envelope signal Ue and acquire the total effective value Utrms of the voltage envelope signal Ue. The RF parameters also include a total power value, an incident power value, a reflected power value, and a forward power value, which are calculated based on the total effective value Utrms, the reflection coefficient modulus value, and the characteristic impedance value of the output path of the RF power supply RF.

[0067] Therefore, the RF parameter acquisition circuit 10 in the present application directly obtains the effective value of the voltage envelope signal Ue, that is, the total effective value Utrms, by configuring the total effective value acquisition unit 500, and can calculate the total power value, the incident power value, the reflected power value and the forward power value according to the total effective value Utrms, the reflection coefficient modulus value and the characteristic impedance value of the output path of the RF power supply RF.

[0068] In one or more embodiments, the total effective value acquisition unit 500 may be connected to the output terminal of the signal sampling module 110 to receive the voltage envelope signal Ue.

[0069] The total power value, incident power value, reflected power value and forward power value are all the total power value, incident power value, reflected power value and forward power value of the electric energy output by the radio frequency power supply RF to the load RL.

[0070] In one or more embodiments, the characteristic impedance value may be 50Ω, 75Ω, etc.

[0071] Specifically, the total power value is calculated based on the total effective value Utrms and the characteristic impedance value of the output path of the RF power supply RF, the incident power value and the reflected power value are calculated based on the total power value, the reflection coefficient modulus value and the characteristic impedance value, and the forward power value is calculated based on the incident power value and the reflected power value.

[0072] Furthermore, if the total power value is P, the incident power value is Pf, the reflected power value is Pr, the forward power value is Pd, and the characteristic impedance value is Z0, then P = Urms2 2 / Z0, and P=Pf+Pr, Pf=U+ 2 / Z0,Pr=|Γ| 2 ×U+ 2 / Z0, Pd=Pf-Pr. Wherein U+ is the forward wave voltage value, and the total power value is the ratio of the square of the total effective value Utrms to the characteristic impedance value. Furthermore, the forward wave voltage value can be calculated according to the total power value, the reflection coefficient modulus value and the characteristic impedance value, and the incident power value can be calculated according to the forward wave voltage value and the characteristic impedance value. The incident power value is the ratio of the square of the forward wave voltage value to the characteristic impedance value. The reflected power value can be calculated according to the forward wave voltage value, the reflection coefficient modulus value and the characteristic impedance value. The reflected power value is the product of the square of the reflection coefficient modulus value, the square of the forward wave voltage value and the inverse of the characteristic impedance value, and the forward power value is the difference between the incident power value and the reflected power value.

[0073] In one or more embodiments, Figure 3 The control unit 400 shown can also be connected to the total effective value acquisition unit 500, for receiving the total effective value Utrms, and calculating the total power value, incident power value, reflected power value and forward power value according to the total effective value Utrms, the reflection coefficient modulus value and the characteristic impedance value of the output path of the radio frequency power supply RF.

[0074] In one or more embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0075] In one or more embodiments, the circuit structure and function of the total effective value acquisition unit 500 may refer to the relevant content of the envelope effective value acquisition module 320 in any of the aforementioned embodiments, and will not be repeated here.

[0076] In one or more embodiments, the total effective value acquisition unit 500 may also include a fourth capacitor and a fifth resistor (not shown in the figure), and have a third acquisition parameter according to the capacitance value of the fourth capacitor and the resistance value of the fifth resistor, and acquire the total effective value Utrms of the voltage envelope signal Ue according to the third acquisition parameter.

[0077] In one or more embodiments, the third acquisition parameter may be greater than the second acquisition parameter, or the third acquisition parameter may be the same as the second acquisition parameter.

[0078] Furthermore, the third acquisition parameter may also be a time constant to reflect the overall voltage change of the capacitor and the resistor.

[0079] The RF parameter acquisition circuit 10 of the present application, through the above-mentioned structure, utilizes a series of waveform transformations and value taking of the voltage envelope signal Ue, and can meet the requirements for obtaining RF parameters including voltage standing wave ratio, reflection coefficient modulus, total power value, incident power value, reflected power value and forward power value when the RF power supply RF outputs electric energy to the load RL, so as to better output electric energy to the load RL.

[0080] See also Fig.11 , Fig.11 FIG. 1 is a block diagram of a radio frequency power supply system in an embodiment of the present application. Fig.11 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RF and a radio frequency parameter acquisition circuit 10 in any of the aforementioned embodiments.

[0081] Please refer again Figure 1 .like Figure 1 As shown, the RF parameter acquisition circuit 10 includes a signal processing unit 100, a peak value acquisition unit and a first effective value acquisition unit. The RF parameter acquisition circuit 10 includes a signal processing unit 100, an envelope peak value acquisition unit 200 and an envelope effective value acquisition unit 300. The signal processing unit 100 is used to connect to the output path of the RF power supply RF to collect the voltage envelope signal Ue when the RF power supply RF outputs electric energy to the load RL, and retain the part of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the positive envelope signal Ue+. The envelope peak value acquisition unit 200 is connected to the signal processing unit 100, and the envelope peak value acquisition unit 200 is used to obtain the envelope peak value Uem of the positive envelope signal Ue+. The envelope effective value acquisition unit 300 is connected to the signal processing unit 100, and the envelope effective value acquisition unit 300 is used to obtain the envelope effective value Uerms of the positive envelope signal Ue+. The radio frequency parameters when the radio frequency power supply RF outputs electric energy to the load RL at least include a reflection coefficient modulus value, and the reflection coefficient modulus value is calculated based on an envelope peak value Uem and an envelope effective value Uerms.

[0082] The more specific structure of the radio frequency parameter acquisition circuit 10 may refer to the relevant content of the radio frequency parameter acquisition circuit 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0083] like Fig.11 As shown, the radio frequency power source RF can be used to connect with the load RL to output electrical energy to the load RL.

[0084] The RF parameter acquisition circuit 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, utilize a series of waveform transformations and value taking of the voltage envelope signal Ue to meet the requirements for obtaining RF parameters including voltage standing wave ratio, reflection coefficient modulus, total power value, incident power value, reflected power value and forward power value when the RF power supply RF outputs electrical energy to the load RL, so as to better output electrical energy to the load RL.

[0085] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency parameter acquisition circuit, characterized in that: include: A signal processing unit, connected to an output path of the RF power supply, to collect a voltage envelope signal when the RF power supply outputs electric energy to a load, and retain a portion of the voltage envelope signal waveform having a voltage value greater than zero as a positive envelope signal; An envelope peak value acquisition unit, connected to the signal processing unit, and configured to acquire an envelope peak value of the forward envelope signal; An envelope effective value acquisition unit, connected to the signal processing unit, and configured to acquire an envelope effective value of the forward envelope signal; The RF parameters when the RF power supply outputs electric energy to the load include at least a reflection coefficient modulus, and the reflection coefficient modulus is calculated based on the envelope peak value and the envelope effective value.

2. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The reflection coefficient modulus is a ratio of a difference between the envelope peak value and the envelope effective value to the envelope effective value.

3. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The envelope peak value acquisition unit includes an envelope peak value acquisition module, and the envelope peak value acquisition module is connected to the signal processing unit; Among them, the envelope peak acquisition module has a first acquisition parameter, and the envelope peak acquisition module is used to receive the forward envelope signal through an input end, and acquire a first signal value of the forward envelope signal according to the first acquisition parameter as the envelope peak value of the forward envelope signal.

4. The radio frequency parameter acquisition circuit according to claim 3, characterized in that: The envelope peak value acquisition module includes a first capacitor and a first resistor, one end of the first capacitor and one end of the first resistor are both connected to a connection point between an input end and an output end of the envelope peak value acquisition module, and the other end of the first capacitor and the other end of the first resistor are both grounded; The first acquisition parameter is related to the capacitance value of the first capacitor and the resistance value of the first resistor.

5. The radio frequency parameter acquisition circuit according to claim 3, characterized in that: The envelope effective value acquisition unit includes an envelope effective value acquisition module, and the envelope effective value acquisition module is connected to the signal processing unit; Among them, the envelope effective value acquisition module has a second acquisition parameter, and the envelope effective value acquisition module is used to receive the forward envelope signal through the input end, and acquire the second signal value of the forward envelope signal according to the second acquisition parameter as the envelope effective value of the forward envelope signal.

6. The radio frequency parameter acquisition circuit according to claim 5, characterized in that: The envelope effective value acquisition module includes a second capacitor and a second resistor, one end of the second capacitor and one end of the second resistor are both connected to a connection point between an input terminal and an output terminal of the envelope effective value acquisition module, and the other end of the second capacitor and the other end of the second resistor are both grounded; The second acquisition parameter is related to the capacitance value of the second capacitor and the resistance value of the second resistor.

7. The radio frequency parameter acquisition circuit according to claim 5, characterized in that: The second acquisition parameter is greater than the first acquisition parameter.

8. The radio frequency parameter acquisition circuit according to claim 5, characterized in that: The envelope peak value acquisition unit further includes a first isolation module, which is connected between the signal processing unit and the input end of the envelope peak value acquisition module, and is used to allow the positive envelope signal output by the signal processing unit to be transmitted to the envelope peak value acquisition module, and isolate the envelope effective value acquisition module from the envelope peak value acquisition module; The envelope effective value acquisition module also includes a second isolation module, which is connected between the signal processing unit and the input end of the envelope effective value acquisition module. The second isolation module is used to allow the positive envelope signal output by the signal processing unit to be transmitted to the envelope effective value acquisition module, and to isolate the envelope peak value acquisition module from the envelope effective value acquisition module.

9. The radio frequency parameter acquisition circuit according to claim 8, characterized in that: The first isolation module includes a first diode, an anode of the first diode is connected to the signal processing unit, and a cathode of the first diode is connected to an input end of the envelope peak value acquisition module; The second isolation module includes a second diode, an anode of the second diode is connected to the signal processing unit, and a cathode of the second diode is connected to an input end of the envelope effective value acquisition module.

10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and a radio frequency parameter acquisition circuit as described in any one of claims 1 to 9.

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