A corrosion life prediction method and device, a storage medium and an electronic device

Abstract

The application discloses a corrosion life prediction method and device, a storage medium and an electronic device, and is applied to the field of corrosion life prediction. The method comprises the following steps: based on the micro-gap size parameter of the object to be predicted, the preset temperature parameter of the target special gas environment and the preset special gas partial pressure parameter, a preset gas-liquid equivalent conversion coefficient model is used for calculation and processing to obtain a gas-liquid equivalent conversion coefficient; based on the relationship between the protection potential and the scanning speed of the object to be predicted, the relationship between the protection potential and the temperature parameter and the relationship between the open circuit potential and the time parameter, calculation and processing are carried out to obtain a pitting nucleation time; based on the pitting nucleation time, a preset pitting incubation time model is used for calculation and processing to obtain a pitting incubation time; and based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, the life prediction is carried out, and the corrosion life is obtained. The corrosion life prediction method can reasonably evaluate the material failure life, and plays a guiding role in equipment material selection, process optimization and component replacement cycle.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of corrosion life prediction, and particularly relates to a corrosion life prediction method and device, a storage medium and an electronic device. BACKGROUND

[0002] Stainless steel materials are widely used in special gas conveying pipelines, valve diaphragms, gas epitaxial reaction chambers and other components in semiconductor manufacturing equipment. Semiconductor industry manufacturing equipment usually uses electronic grade special gas (Cl2, HCl, HBr, HF, etc.) with strong corrosion, the special gas environment is a quasi-vacuum gas environment, usually containing special gas and water vapor with a volume concentration of ppm level, and the temperature is usually high. In the special gas environment, dynamic microdroplets are continuously evaporated and condensed on the surface of the stainless steel, causing electrochemical corrosion. The volatilization and shedding of corrosion products can produce impurity particles in the etching chamber, and the impurity particles pollute the flowing gas and enter the chamber along the gas path, reducing the wafer quality. Most of the existing corrosion life prediction methods use empirical or mechanism methods, the empirical method lacks corrosion mechanism, requires long-term field data, and the evaluation period is long and cannot be extended to other service environments. While the mechanism method can be extended for prediction, but it is generally aimed at solution environment and cannot be applied to special gas environment. SUMMARY

[0003] Therefore, the present application provides a corrosion life prediction method, device, storage medium and electronic device, which mainly aims to solve the problem that the existing corrosion life prediction methods mostly use empirical or mechanism methods, the empirical method lacks corrosion mechanism, requires long-term field data, and the evaluation period is long and cannot be extended to other service environments. While the mechanism method can be extended for prediction, but it is generally aimed at solution environment and cannot be applied to special gas environment.

[0004] To solve the above problems, the present application provides a corrosion life prediction method, comprising:

[0005] Based on the microslit size parameter of the object to be life predicted, the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment, a preset gas-liquid equivalent conversion coefficient model is used for calculation and processing to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted;

[0006] Based on the first function of the relationship between the protection potential and the scanning speed of the object to be life predicted, the second function of the relationship between the protection potential and the temperature parameter of the object to be life predicted, and the third function of the relationship between the open circuit potential and the time parameter of the object to be life predicted, calculation and processing are performed to obtain the pitting nucleation time;

[0007] Based on the pitting nucleation time, a preset pitting incubation time model is used for calculation and processing to obtain the pitting incubation time of the object to be life predicted;

[0008] performing life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, to obtain a corrosion life of the object to be life predicted in the target special gas environment.

[0009] Optionally, the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment are calculated and processed based on the micro-gap size parameter of the object to be life predicted, to obtain a gas-liquid equivalent conversion coefficient of the object to be life predicted, specifically including:

[0010] calculating and processing based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment, to obtain a water vapor saturation vapor pressure in the target special gas environment;

[0011] calculating and processing based on the micro-gap size parameter of the object to be life predicted and a predetermined water surface tension, to obtain an additional pressure at a micro-gap of the object to be life predicted;

[0012] calculating and processing based on the water vapor saturation vapor pressure and the additional pressure, to obtain an actual vapor pressure at the micro-gap of the object to be life predicted;

[0013] calculating and processing based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model, to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted.

[0014] Optionally, the gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model, specifically including:

[0015] calculating and processing based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure, to obtain a local relative humidity at the micro-gap of the object to be life predicted;

[0016] calculating and processing based on the local relative humidity using a first preset gas-liquid equivalent conversion coefficient model, to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted.

[0017] Optionally, the gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model, specifically including:

[0018] acquiring an actual relative humidity of the target special gas environment;

[0019] Based on the actual relative humidity, the water vapor saturation vapor pressure and the additional pressure, a second preset gas-liquid equivalent conversion coefficient model is used for calculation and processing to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted.

[0020] Optionally, the first function based on the protection potential of the object to be life predicted and the scanning speed, the second function based on the protection potential of the object to be life predicted and the temperature parameter, and the third function based on the open circuit potential of the object to be life predicted and the time parameter are used for calculation and processing to obtain the pitting nucleation time, specifically including:

[0021] At the same temperature, the cyclic polarization method is used to scan the object to be life predicted at different scanning speeds to obtain the first protection potential corresponding to each scanning speed;

[0022] Based on each first protection potential, the first function is used for linear fitting to obtain the second protection potential value of the object to be life predicted at the scanning speed of zero at the same temperature, so as to obtain the second protection potential value corresponding to each sampling temperature parameter;

[0023] Based on each second protection potential value, the second function is used for linear fitting to obtain the third protection potential value corresponding to each different temperature parameter;

[0024] Based on the preset temperature parameter of the target special gas environment, each third protection potential value is screened to obtain a target protection potential value;

[0025] Based on the third function based on the open circuit potential of the object to be life predicted and the time parameter and the target protection potential value, the pitting nucleation time when the open circuit potential exceeds the target protection potential value is obtained.

[0026] Optionally, the pitting nucleation time and the preset pitting incubation time model corresponding to the preset temperature parameter are used for calculation and processing to obtain the pitting incubation time of the object to be life predicted, specifically including:

[0027] Based on the pitting nucleation time, the preset constraint condition and the preset pitting incubation time function in the preset pitting incubation time model, a function curve is constructed to generate a first curve of the relationship between the pitting induction time and the applied potential;

[0028] Based on the third function based on the open circuit potential and the time parameter in the preset pitting incubation time model, a function curve is constructed to generate a second curve;

[0029] Based on the first curve and the second curve, the target pitting induction time when the applied potential is equal to the open circuit potential is obtained;

[0030] The target pitting corrosion induction time is determined as the pitting incubation time.

[0031] Optionally, the life prediction is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain a corrosion life of the object to be life predicted in the target special gas environment, and specifically includes:

[0032] The gas-liquid equivalent conversion coefficient and the pitting incubation time are multiplied to obtain a corrosion life of the object to be life predicted in the target special gas environment.

[0033] To solve the above problems, the present application provides a corrosion life prediction device, which includes:

[0034] A gas-liquid equivalent conversion coefficient calculation module is configured to calculate the gas-liquid equivalent conversion coefficient of the object to be life predicted by using a preset gas-liquid equivalent conversion coefficient model based on a micro-gap size parameter of the object to be life predicted, a preset temperature parameter of the target special gas environment, and a preset special gas partial pressure parameter.

[0035] A pitting nucleation time calculation module is configured to calculate the pitting nucleation time by using a first function of a relationship between a protection potential and a scanning speed of the object to be life predicted, a second function of a relationship between a protection potential and a temperature parameter of the object to be life predicted, and a third function of a relationship between an open circuit potential and a time parameter of the object to be life predicted.

[0036] A pitting incubation time calculation module is configured to calculate the pitting incubation time of the object to be life predicted by using a preset pitting incubation time model based on the pitting nucleation time.

[0037] A life prediction module is configured to perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain a corrosion life of the object to be life predicted in the target special gas environment.

[0038] To solve the above problems, the present application provides a storage medium, which stores a computer program. When the computer program is executed by a processor, the steps of the corrosion life prediction method described above are implemented.

[0039] To solve the above problems, the present application provides an electronic device, which at least includes a memory and a processor. The memory stores a computer program, and the processor implements the steps of the corrosion life prediction method described above when executing the computer program stored in the memory.

[0040] The beneficial effects in the application: the application comprehensively considers the temperature, relative humidity, microstructure of the stainless steel surface and corrosion resistance of the special gas environment, establishes a mechanism model, and divides the corrosion life model of the stainless steel in the special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in solution. The gas-liquid equivalent conversion coefficient is determined through environmental factors, the corrosion of the stainless steel in the special gas environment is converted into a solution environment according to the gas-liquid equivalent conversion coefficient, the pitting incubation time of the stainless steel in the solution is predicted through the pitting incubation model, and finally the corrosion life of the stainless steel in the special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. The corrosion life prediction method of the stainless steel in the electronic-grade special gas environment established in the application can reasonably evaluate the material failure life, avoid affecting the wafer quality, and play a guiding role in equipment material selection, process optimization and replacement cycle of parts.

[0041] The above description is only a summary of the technical scheme of the application, in order to more clearly understand the technical means of the application, and to be implemented in accordance with the content of the specification, and in order to make the above and other purposes, characteristics and advantages of the application more obvious and easy to understand, the following specific embodiments of the application are described. BRIEF DESCRIPTION OF DRAWINGS

[0042] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a description of the preferred embodiments and are not meant to limit the present application. Furthermore, the same reference numerals are used throughout the several drawings to represent similar components. In the drawings:

[0043] Figure 1 A flowchart of a corrosion life prediction method provided by an embodiment of the application is shown;

[0044] Figure 2 A flowchart of a corrosion life prediction method provided by another embodiment of the application is shown;

[0045] Figure 3 A structure block diagram of a corrosion life prediction device provided by another embodiment of the application is shown. DETAILED DESCRIPTION

[0046] The various aspects and features of the application are described herein with reference to the accompanying drawings.

[0047] It should be understood that various modifications can be made to the embodiments of the application described herein. Therefore, the above description should not be considered limiting, but merely as an example of the embodiments. Those skilled in the art will think of other modifications within the scope and spirit of the application.

[0048] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the application and, together with the general description of the application given above, and the detailed description of the embodiments given below, serve to explain the principles of the present application.

[0049] These and other characteristics of the present application will become apparent from the following description of the preferred forms of the application given, by way of example only, with reference to the accompanying drawings.

[0050] It should also be understood that, although the present application has been described above with reference to particular means, materials and embodiments, the present application is by no means limited to the particulars described and as such extends to all alternative constructions falling within the scope of the application.

[0051] The above and other aspects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0052] Specific embodiments of the present application are described hereinafter, by way of example only, with reference to the accompanying drawings. It should be understood that the disclosed embodiments are merely representative of the application, which can be practiced in a variety of ways. Well-known and / or repetitive functions and structures are not described in detail to avoid obscuring the application unnecessarily.

[0053] The specification can use phrases such as "in one embodiment", "in another embodiment", "in yet another embodiment", or "in other embodiments", which can refer to one or more of the same or different embodiments of the application.

[0054] The embodiments of the present application provide a corrosion life prediction method, as shown in the accompanying drawings, comprising: Figure 1

[0055] Step S101: based on the micro-gap size parameters of the object to be life predicted, the preset temperature parameters of the target special gas environment, and the preset special gas partial pressure parameters, a preset gas-liquid equivalent conversion coefficient model is used for calculation and processing to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted;

[0056] ​In the implementation process, the object to be life predicted can be stainless steel and stainless steel products, the target special gas environment can be an electronic-grade special gas environment with strong corrosion, and the special gas environment includes a chlorine Cl2 special gas environment, a hydrogen chloride HCl special gas environment, a hydrogen bromide HBr special gas environment, and a hydrogen fluoride HF special gas environment. Based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment, the water vapor saturation vapor pressure in the target special gas environment is obtained. Based on the micro-gap size parameter of the object to be life predicted and the predetermined water surface tension, the additional pressure at the micro-gap of the object to be life predicted is obtained. Based on the water vapor saturation vapor pressure and the additional pressure, the actual vapor pressure at the micro-gap of the object to be life predicted is obtained. Based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model, the gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained.

[0057] Step S102: Based on the first function of the protection potential of the object to be life predicted and the scanning speed, the second function of the protection potential of the object to be life predicted and the temperature parameter, and the third function of the open circuit potential of the object to be life predicted and the time parameter, the pitting nucleation time is obtained.

[0058] In the implementation process, the object to be life predicted is scanned at different scanning speeds using the cyclic polarization method at the same temperature, and the first protection potential corresponding to each scanning speed is obtained. Based on each first protection potential, the first function is used for linear fitting to obtain the protection potential value of the object to be life predicted when the scanning speed is zero at the same temperature, so as to obtain the protection potential value corresponding to each temperature parameter. Based on the preset temperature parameter of the target special gas environment, each protection potential value is screened to obtain a target protection potential value. Based on the third function of the open circuit potential of the object to be life predicted and the time parameter and the target protection potential value, the pitting nucleation time when the open circuit potential exceeds the target protection potential value is obtained.

[0059] Step S103: Based on the pitting nucleation time, a preset pitting incubation time model is used for calculation to obtain the pitting incubation time of the object to be life predicted.

[0060] The step generates a first curve of the relationship between the pitting corrosion induction time and the impressed potential based on the pitting corrosion nucleation time, the preset constraint condition, and the preset pitting corrosion incubation time function in the preset pitting corrosion incubation time model; generates a second curve based on the third function of the open-circuit potential and the time parameter relationship in the preset pitting corrosion incubation time model; obtains a target pitting corrosion induction time when the impressed potential and the open-circuit potential are the same based on the first curve and the second curve; and determines the target pitting corrosion induction time as the pitting corrosion incubation time. The pitting corrosion incubation time is the target pitting corrosion induction time corresponding to the intersection of the first curve and the second curve.

[0061] Step S104: performing life prediction based on the gas-liquid equivalent conversion coefficient and the pitting corrosion incubation time to obtain the corrosion life of the object to be life predicted in the target special gas environment.

[0062] In the implementation process of the step, the gas-liquid equivalent conversion coefficient and the pitting corrosion incubation time are subjected to multiplication operation processing to obtain the corrosion life of the object to be life predicted in the target special gas environment.

[0063] The present application comprehensively considers factors such as the temperature, relative humidity, surface microstructure, and corrosion resistance of stainless steel in a special gas environment, establishes a mechanism model, divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting corrosion incubation model in a solution, determines the gas-liquid equivalent conversion coefficient through environmental factors, converts the corrosion of stainless steel in a special gas environment into a solution environment according to the gas-liquid equivalent conversion coefficient, predicts the pitting corrosion incubation time of stainless steel in the solution through the pitting corrosion incubation model, and finally determines the corrosion life of stainless steel in a special gas environment in combination with the liquid equivalent conversion coefficient and the pitting corrosion incubation model. The corrosion life prediction method of stainless steel in an electronic-grade special gas environment established by the present application can reasonably evaluate the failure life of the material, avoid affecting the wafer quality, and play a guiding role in the selection of materials, process optimization, and replacement cycle of parts.

[0064] Another embodiment of the present application discloses another corrosion life prediction method, as shown in Figure 2 The method comprises the following steps:

[0065] Step S201: performing calculation processing based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment to obtain the water vapor saturation vapor pressure in the target special gas environment;

[0066] In the implementation process, the target special gas environment can be an electronic-grade special gas environment with strong corrosion, including a chlorine Cl2 special gas environment, a hydrogen chloride HCl special gas environment, a hydrogen bromide HBr special gas environment, and a hydrofluoric acid HF special gas environment, etc. When the target special gas is hydrogen chloride HCl special gas, the mathematical expression of the relationship between the preset temperature parameter, the preset special gas partial pressure parameter, and the water vapor saturation vapor pressure can be shown in formula (1) as follows:

[0067]

[0068] wherein T is the environmental temperature, P HCl is the preset special gas partial pressure parameter of HCl gas, P H2O,sa is the water vapor saturation vapor pressure in the special gas environment. Specifically, the known parameters, the preset special gas partial pressure parameter P HCl and the environmental temperature T, are substituted into formula (1) for calculation and processing to obtain the numerical value of the water vapor saturation vapor pressure P H2Osa .

[0069] Step S202: Based on the micro-gap size parameter of the object to be life predicted and the predetermined water surface tension, calculation and processing are performed to obtain the additional pressure at the micro-gap of the object to be life predicted.

[0070] In the implementation process, the object to be life predicted can be a stainless steel material and a stainless steel product or a stainless steel equipment, etc. The calculation mathematical formula of the additional pressure can be shown in formula (2) as follows:

[0071]

[0072] wherein P s is the additional pressure at the micro-gap, sigma is the predetermined water surface tension, and w is the micro-gap size parameter. The micro-gap size parameter extracted from the stainless steel surface microstructure and the predetermined water surface tension are substituted into formula (2) for calculation and processing to obtain the additional pressure.

[0073] Step S203: Based on the water vapor saturation vapor pressure and the additional pressure, calculation and processing are performed to obtain the actual vapor pressure at the micro-gap of the object to be life predicted.

[0074] In the implementation process, the calculation mathematical formula of the actual vapor pressure can be shown in formula (3) as follows:

[0075]

[0076] wherein P is the actual vapor pressure at the micro-gap, P0 is the saturated vapor pressure of water vapor in the special gas environment s P is the additional pressure at the micro gap.

[0077] Step S204: Based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model, the gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained through calculation processing.

[0078] In the specific implementation process, the local relative humidity at the micro gap of the object to be life predicted is obtained through calculation processing based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure. The mathematical expression of the local relative humidity RH' can be shown in the following formula (4):

[0079]

[0080] Wherein, P0 is the partial pressure of water vapor in the special gas environment, P is the actual vapor pressure at the micro gap.

[0081] Based on the local relative humidity, the first preset gas-liquid equivalent conversion coefficient model is used for calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted. The first preset gas-liquid equivalent conversion coefficient model can be shown in the following formula (5):

[0082]

[0083] Wherein, K is the gas-liquid equivalent conversion coefficient v moi is the condensation rate of microdroplets at the micro gap in the special gas environment; v sol is the condensation rate of microdroplets on the surface of the material in the solution environment; specifically, the condensation rate v moi of microdroplets at the micro gap in the special gas environment can be shown in the following formula (6):

[0084]

[0085] Wherein, v m is the volume of a single layer of water molecules on the surface of the material, and RH' is the local relative humidity. The faster the condensation of microdroplets, the faster the corrosion rate and the shorter the corrosion life. Therefore, the corrosion rate is proportional to the condensation rate of microdroplets, and inversely proportional to the corrosion life. The mathematical expression of the condensation rate v sol of microdroplets on the surface of the material in the solution environment can be shown in the following formula (7):

[0086]

[0087] Step S205: scanning at different scanning speeds by using the cyclic polarization method at the same temperature for the object to be life predicted to obtain a first protection potential corresponding to each scanning speed;

[0088] In the implementation process, the object to be life predicted is scanned by using the cyclic polarization method at different scanning speeds to obtain a first protection potential value corresponding to each different scanning speed.

[0089] Step S206: linear fitting is performed on each first protection potential by using the first function to obtain a second protection potential value of the object to be life predicted at a scanning speed of zero at the same temperature, so as to obtain a second protection potential value corresponding to each sampling temperature parameter;

[0090] In the implementation process, the mathematical expression of the first function reflecting the relationship between the protection potential and the scanning speed can be shown in the following formula (8):

[0091] E rp(v) = E rp(v＝0) + kv 1 / 2 (8);

[0092] wherein, E rp(v＝0) is the protection potential of the stainless steel in the natural environment, k is a constant, and v is the scanning speed during the test. Scanning is performed at different scanning speeds at each different temperature to obtain a first protection potential at each different scanning speed corresponding to each different sampling temperature. The first function is used to fit the several first protection potentials corresponding to different sampling temperatures to obtain a second protection potential value of the object to be life predicted at each sampling temperature parameter.

[0093] Step S207: linear fitting is performed on each second protection potential value by using the second function to obtain a third protection potential value corresponding to each different temperature parameter;

[0094] In the implementation process, the mathematical expression of the second function can be shown in the following formula (9):

[0095]

[0096] wherein, E rp(v＝0) is the protection potential, is the adsorption energy of the chloride ion at a temperature of 25℃, and is -10.92 kJ / mol, is the adsorption enthalpy of chloride ion at temperature 25℃, and is 0.04 kJ / mol. Based on each of the second protection potential values, linear fitting is performed using the second function to obtain third protection potential values corresponding to each different temperature parameter. Linear fitting using the second function can extend the protection potential values corresponding to the missing sampling temperatures in the test process. Specifically, the protection potential values corresponding to each temperature parameter when the scanning speed is zero are obtained.

[0097] Step S208: screening each of the third protection potential values based on the preset temperature parameter of the target special gas environment to obtain a target protection potential value;

[0098] In the implementation process of this step, the target temperature parameter corresponding to the preset temperature parameter is obtained by screening each of the temperature parameters based on the preset temperature parameter. The protection potential value corresponding to the target temperature parameter is determined as the target protection potential value.

[0099] Step S209: calculating and processing based on a third function of the open circuit potential and time parameter relationship of the object to be life predicted and the target protection potential value to obtain a pitting nucleation time when the open circuit potential exceeds the target protection potential value;

[0100] In the implementation process of this step, the mathematical expression of the third function can be shown in the following formula (10):

[0101]

[0102] wherein, E OCP is the open circuit potential, Ee,H is the equilibrium potential of the cathodic reaction, Ecorr is the corrosion potential, A and B are constants, and γ is the Tafel slope of the cathodic reaction. Specifically, the time parameter when the open circuit potential is equal to the target protection potential value is determined as the pitting nucleation time by calculating and processing based on the third function and the target protection potential value.

[0103] Step S210: calculating and processing based on the pitting nucleation time using a preset pitting incubation time model to obtain the pitting incubation time of the object to be life predicted;

[0104] In the implementation process of this step, the first curve of the relationship between the pitting induction time and the applied potential is generated by function curve construction based on the pitting nucleation time, a preset constraint condition, and a preset pitting induction time function in the preset pitting incubation time model. The preset constraint condition is that the applied potential value is greater than the protection potential value and the open circuit potential is greater than the protection potential. The mathematical expression of the preset pitting induction time function can be shown in the following formula (11):

[0105]

[0106] wherein is the time for the open circuit potential to exceed the protection potential, A', B', C' are all fitting parameters, t ind is the point corrosion incubation time. A second curve is generated by function curve construction based on the third function of the preset parameter relationship between the open circuit potential and time in the point corrosion incubation time model; the target point corrosion incubation time when the impressed potential is the same as the open circuit potential is obtained by solving based on the first curve and the second curve; and the target point corrosion incubation time is determined as the point corrosion incubation time. Specifically, the time parameter corresponding to the intersection of the first curve and the second curve is the point corrosion incubation time t pit initiation .

[0107] Step S211: Life prediction is performed based on the gas-liquid equivalent conversion coefficient and the point corrosion incubation time to obtain the corrosion life of the object to be life predicted in the target special gas environment.

[0108] In the implementation process, multiplication operation processing is performed based on the gas-liquid equivalent conversion coefficient and the point corrosion incubation time to obtain the corrosion life of the object to be life predicted in the target special gas environment. The mathematical expression of the corrosion life can be shown in the following formula (12):

[0109] T Corr-lfe = K x t pit initiation (12);

[0110] wherein, T Corr-life is the corrosion life of the stainless steel, K is the gas-liquid equivalent conversion coefficient, t pit initiation is the point corrosion incubation time of the stainless steel.

[0111] In the implementation process, the gas-liquid equivalent conversion coefficient of the object to be life predicted can also be obtained in the following way:

[0112] Step one: The actual relative humidity of the target special gas environment is collected;

[0113] Specifically, the actual relative humidity can be calculated by using the local relative humidity, or the actual relative humidity can be collected on site.

[0114] Step two: The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained by calculation processing based on the actual relative humidity, the water vapor saturation vapor pressure and the additional pressure using a second preset gas-liquid equivalent conversion coefficient model.

[0115] Specifically, the mathematical expression of the second preset enterprise equivalent conversion coefficient model can be expressed as follows: (13)

[0116]

[0117] Among them, P s Apply pressure to the micro-gaps. It is the saturated vapor pressure of water vapor in a special atmospheric environment.

[0118] This application establishes a mechanistic model by comprehensively considering factors such as the temperature and relative humidity of the special gas environment, the microstructure of the stainless steel surface, and its inherent corrosion resistance. The corrosion lifetime model for stainless steel in special gas environments is divided into a gas-liquid equivalent coefficient model and a pitting corrosion inoculation model in solution. The gas-liquid equivalent conversion coefficient is determined through environmental factors. Based on this coefficient, the corrosion of stainless steel in the special gas environment is converted to a solution environment. The pitting corrosion inoculation time of stainless steel in solution is predicted using the pitting corrosion inoculation model. Finally, the corrosion lifetime of stainless steel in the special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting corrosion inoculation model. The corrosion lifetime prediction method for stainless steel in electronic-grade special gas environments established in this application can reasonably assess the material failure lifetime, avoid affecting wafer quality, and provide guidance for equipment material selection, process optimization, and component replacement cycles.

[0119] Another embodiment of this application provides a corrosion lifetime prediction device, such as... Figure 3 As shown, it includes:

[0120] The gas-liquid equivalent conversion coefficient calculation module 1 is used to calculate the gas-liquid equivalent conversion coefficient of the object to be predicted based on the micro-gap size parameters of the object to be predicted, the preset temperature parameters of the target special gas environment, and the preset special gas partial pressure parameters using a preset gas-liquid equivalent conversion coefficient model.

[0121] The pitting nucleation time calculation module 2 is used to perform calculations based on a first function relating the protection potential of the object to be predicted to the scanning speed, a second function relating the protection potential of the object to be predicted to the temperature parameter, and a third function relating the open circuit potential of the object to be predicted to the time parameter, to obtain the pitting nucleation time.

[0122] The pitting incubation time calculation module 3 is used to calculate the pitting incubation time of the object to be predicted based on the pitting nucleation time using a preset pitting incubation time model.

[0123] The lifetime prediction module 4 is used to predict the lifetime based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, so as to obtain the corrosion lifetime of the object to be predicted in the target special gas environment.

[0124] In the specific implementation process, the gas-liquid equivalent conversion coefficient calculation module 1 is specifically configured to: based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment, perform calculation processing to obtain the water vapor saturation vapor pressure in the target special gas environment; based on the micro-gap size parameter of the to-be-life-predicted object and the predetermined water surface tension, perform calculation processing to obtain the additional pressure at the micro-gap of the to-be-life-predicted object; based on the water vapor saturation vapor pressure and the additional pressure, perform calculation processing to obtain the actual vapor pressure at the micro-gap of the to-be-life-predicted object; based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model, perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the to-be-life-predicted object.

[0125] In the specific implementation process, the gas-liquid equivalent conversion coefficient calculation module 1 is further configured to: based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure, perform calculation processing to obtain the local relative humidity at the micro-gap of the to-be-life-predicted object; based on the local relative humidity, perform calculation processing by using a first preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the to-be-life-predicted object.

[0126] In the specific implementation process, the gas-liquid equivalent conversion coefficient calculation module 1 is further configured to: acquire the actual relative humidity of the target special gas environment; based on the actual relative humidity, the water vapor saturation vapor pressure, and the additional pressure, perform calculation processing by using a second preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the to-be-life-predicted object.

[0127] In the specific implementation process, the pitting nucleation time calculation module 2 is specifically configured to: at the same temperature, for the to-be-life-predicted object, perform scanning at different scanning speeds by using a cyclic polarization method to obtain a first protection potential corresponding to each scanning speed; based on each first protection potential, perform linear fitting by using the first function to obtain a second protection potential value of the to-be-life-predicted object when the scanning speed is zero at the same temperature, so as to obtain a second protection potential value corresponding to each sampling temperature parameter; based on each second protection potential value, perform linear fitting by using the second function to obtain a third protection potential value corresponding to each different temperature parameter; based on the preset temperature parameter of the target special gas environment, screen each third protection potential value to obtain a target protection potential value; based on the third function of the open circuit potential and time parameter relationship of the to-be-life-predicted object and the target protection potential value, perform calculation processing to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value.

[0128] In the implementation process, the service life prediction module 4 is specifically configured to: perform multiplication operation processing based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion service life of the object to be predicted in the target special gas environment.

[0129] The present application comprehensively considers the temperature, relative humidity, stainless steel surface microstructure and self-corrosion resistance of the special gas environment, and establishes a mechanism model. The corrosion service life model of the stainless steel in the special gas environment is divided into a gas-liquid equivalent coefficient model and a pitting incubation model in solution. The gas-liquid equivalent conversion coefficient is determined by the environmental factors. The corrosion of the stainless steel in the special gas environment is converted into a solution environment according to the gas-liquid equivalent conversion coefficient. The pitting incubation time of the stainless steel in the solution is predicted by the pitting incubation model. Finally, the corrosion service life of the stainless steel in the special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. The corrosion service life prediction method of the stainless steel in the electronic-grade special gas environment established by the present application can reasonably evaluate the material failure life and avoid affecting the wafer quality. It plays a guiding role in equipment material selection, process optimization and component replacement cycle.

[0130] Another embodiment of the present application provides a storage medium storing a computer program, which is executed by a processor to implement the following method steps:

[0131] Step one, based on the micro-crack size parameters of the object to be predicted, the preset temperature parameters of the target special gas environment and the preset special gas partial pressure parameters, a preset gas-liquid equivalent conversion coefficient model is used for calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted;

[0132] Step two, based on the first function of the relationship between the protection potential and the scanning speed of the object to be predicted, the second function of the relationship between the protection potential and the temperature parameters of the object to be predicted, and the third function of the relationship between the open circuit potential and the time parameters of the object to be predicted, the pitting nucleation time is obtained by calculation processing;

[0133] Step three, based on the pitting nucleation time, a preset pitting incubation time model is used for calculation processing to obtain the pitting incubation time of the object to be predicted;

[0134] Step four, based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, the service life prediction is performed to obtain the corrosion service life of the object to be predicted in the target special gas environment.

[0135] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program. The computer program can be stored in a non-volatile computer readable storage medium, and when the computer program is executed, the processes of the above-mentioned embodiments of the methods can be included. Any reference to memory, storage, database or other medium used in the embodiments provided in the present application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration but not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0136] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the above-mentioned division of functional units and modules is exemplified, and in actual application, the above-mentioned functions can be completed by different functional units and modules according to needs, that is, the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above.

[0137] The specific implementation process of the above method steps can be referred to the embodiments of any of the above-mentioned corrosion life prediction methods, which will not be repeated here.

[0138] The present application comprehensively considers the factors such as special gas environment temperature, relative humidity, stainless steel surface microstructure and corrosion resistance, establishes a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, the corrosion of stainless steel in a special gas environment is converted into a solution environment according to the gas-liquid equivalent conversion coefficient, the pitting incubation time of stainless steel in the solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in the special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. The corrosion life prediction method of stainless steel in an electronic-grade special gas environment established by the present application can reasonably evaluate the material failure life and avoid affecting the wafer quality, which plays a guiding role in equipment material selection, process optimization and component replacement cycle.

[0139] Another embodiment of the present application provides an electronic device, which can be a server, comprising a processor, a memory, a network interface and a database connected by a system bus. The processor of the electronic device is configured to provide computing and control capabilities. The memory of the electronic device comprises a non-volatile storage medium and / or an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for running the operating system and the computer program in the non-volatile storage medium. The network interface of the electronic device is configured to communicate with an external client through a network connection. The electronic device program is executed by the processor to implement the functions or steps of the server side of the corrosion life prediction method.

[0140] In one embodiment, an electronic device is provided, which can be a client. The electronic device comprises a processor, a memory, a network interface, a display screen and an input device connected by a system bus. The processor of the electronic device is configured to provide computing and control capabilities. The memory of the electronic device comprises a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for running the operating system and the computer program in the non-volatile storage medium. The network interface of the electronic device is configured to communicate with an external server through a network connection. The electronic device program is executed by the processor to implement the functions or steps of the client side of the corrosion life prediction method.

[0141] Another embodiment of the present application provides an electronic device comprising at least a memory and a processor. The memory stores a computer program. The processor implements the following method steps when executing the computer program stored in the memory:

[0142] Step one, based on the microcrack size parameters of the object to be life predicted, the preset temperature parameters of the target special gas environment and the preset special gas partial pressure parameters, a preset gas-liquid equivalent conversion coefficient model is used for calculation and processing to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted;

[0143] Step two, based on the first function of the relationship between the protection potential of the object to be life predicted and the scanning speed, the second function of the relationship between the protection potential of the object to be life predicted and the temperature parameters, and the third function of the relationship between the open circuit potential of the object to be life predicted and the time parameters, calculation and processing are performed to obtain the pitting nucleation time;

[0144] Step three, based on the pitting nucleation time, a preset pitting incubation time model is used for calculation and processing to obtain the pitting incubation time of the object to be life predicted;

[0145] Step four, based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, the corrosion life of the object to be life predicted in the target special gas environment is obtained.

[0146] The specific implementation process of the above method steps can be seen from the above-mentioned embodiments of any corrosion life prediction method, and will not be repeated here.

[0147] The present application comprehensively considers the temperature, relative humidity, stainless steel surface microstructure and self-corrosion resistance and other factors in the special gas environment, establishes a mechanism model, and divides the corrosion life model of stainless steel in the special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in solution. The gas-liquid equivalent conversion coefficient is determined by the environmental factors, the corrosion of stainless steel in the special gas environment is converted into a solution environment according to the gas-liquid equivalent conversion coefficient, the pitting incubation time of stainless steel in the solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in the special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. The corrosion life prediction method of stainless steel in the electronic-grade special gas environment established by the present application can reasonably evaluate the material failure life and avoid affecting the wafer quality, and plays a guiding role in the selection of equipment materials, process optimization and replacement cycle of parts.

[0148] The above embodiments are only exemplary embodiments of the present application and are not used to limit the present application, and the protection scope of the present application is defined by the claims. Those skilled in the art can make various modifications or equivalent replacements to the present application within the spirit and protection scope of the present application, and such modifications or equivalent replacements shall also be considered to fall within the protection scope of the present application.

Claims

1. A method of corrosion life prediction, characterized by, The method comprises the following steps: Based on the micro-gap size parameter of the object to be life predicted, the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment, a preset gas-liquid equivalent conversion coefficient model is used for calculation and processing to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted; Based on the first function of the relationship between the protection potential of the object to be life predicted and the scanning speed, the second function of the relationship between the protection potential of the object to be life predicted and the temperature parameter, and the third function of the relationship between the open circuit potential of the object to be life predicted and the time parameter, calculation and processing are performed to obtain the pitting nucleation time; Based on the pitting nucleation time, a preset pitting incubation time model is used for calculation and processing to obtain the pitting incubation time of the object to be life predicted; Based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, life prediction is performed to obtain the corrosion life of the object to be life predicted in the target special gas environment; The calculation and processing based on the first function of the relationship between the protection potential of the object to be life predicted and the scanning speed, the second function of the relationship between the protection potential of the object to be life predicted and the temperature parameter, and the third function of the relationship between the open circuit potential of the object to be life predicted and the time parameter to obtain the pitting nucleation time specifically comprises: At the same temperature, the cyclic polarization method is used to scan the object to be life predicted at different scanning speeds to obtain the first protection potential corresponding to each scanning speed; Based on each first protection potential, linear fitting is performed on the first function to obtain the second protection potential value of the object to be life predicted when the scanning speed is zero at the same temperature, so as to obtain the second protection potential value corresponding to each sampling temperature parameter; Based on each second protection potential value, linear fitting is performed on the second function to obtain the third protection potential value corresponding to each different temperature parameter; Based on the preset temperature parameter of the target special gas environment, each third protection potential value is screened to obtain a target protection potential value; Based on the third function of the relationship between the open circuit potential of the object to be life predicted and the time parameter and the target protection potential value, calculation and processing are performed to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value.

2. The method of claim 1, wherein, The calculation and processing based on the micro-gap size parameter of the object to be life predicted, the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment using the preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be life predicted specifically comprises: Based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment, calculation and processing are performed to obtain the water vapor saturation vapor pressure in the target special gas environment; Based on the micro-gap size parameter of the object to be life predicted and the predetermined surface tension of water, calculation and processing are performed to obtain the additional pressure at the micro-gap of the object to be life predicted; Based on the water vapor saturation vapor pressure and the additional pressure, calculation and processing are performed to obtain the actual vapor pressure at the micro-gap of the object to be life predicted; The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model.

3. The method of claim 2, wherein, The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model. The local relative humidity at the micro-gap of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure. The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the local relative humidity and the first preset gas-liquid equivalent conversion coefficient model.

4. The method of claim 2, wherein, The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model. The pitting incubation time of the object to be life predicted is obtained based on the pitting nucleation time and the preset pitting incubation time model corresponding to the preset temperature parameter. A first curve of the relationship between the pitting induction time and the impressed potential is generated based on the pitting nucleation time, a preset constraint condition, and a preset pitting induction time function in the preset pitting incubation time model.

5. The method of claim 1, wherein, A second curve is generated based on the third function of the relationship between the open circuit potential and the time parameter in the preset pitting incubation time model. The target pitting induction time when the impressed potential is equal to the open circuit potential is obtained based on the first curve and the second curve. The target pitting induction time is determined as the pitting incubation time. The corrosion life of the object to be life predicted in the target special gas environment is obtained based on the gas-liquid equivalent conversion coefficient and the pitting incubation time. The corrosion life of the object to be life predicted in the target special gas environment is obtained based on the multiplication operation processing of the gas-liquid equivalent conversion coefficient and the pitting incubation time.

6. The method of claim 1, wherein, The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model. The gas-liquid equivalent conversion coefficient of the object to be life predicted is obtained based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure, and the preset gas-liquid equivalent conversion coefficient model.

7. An apparatus for predicting corrosion life, characterized by comprising: a corrosion life prediction device according to any one of claims 1 to 6; and a display device for displaying the predicted corrosion life. ​ ​ The pitting nucleation time calculation module is configured to perform calculation processing based on a first function of a relationship between a protection potential of the object to be subjected to life prediction and a scanning speed, a second function of a relationship between the protection potential of the object to be subjected to life prediction and a temperature parameter, and a third function of a relationship between an open circuit potential of the object to be subjected to life prediction and a time parameter, to obtain the pitting nucleation time. Specifically, the first function is used to perform linear fitting based on the first protection potential corresponding to each scanning speed, to obtain a second protection potential value of the object to be subjected to life prediction at a scanning speed of zero at the same temperature, so as to obtain the second protection potential value corresponding to each sampling temperature parameter. The second function is used to perform linear fitting based on the second protection potential value corresponding to each temperature parameter, to obtain a third protection potential value corresponding to each different temperature parameter. The target protection potential value is obtained by screening the third protection potential value based on a preset temperature parameter of the target special gas environment. The third function of the relationship between the open circuit potential of the object to be subjected to life prediction and the time parameter is used to perform calculation processing based on the target protection potential value, to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value. The pitting incubation time calculation module is configured to perform calculation processing based on the pitting nucleation time by using a preset pitting incubation time model, to obtain the pitting incubation time of the object to be subjected to life prediction. The life prediction module is configured to perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time, to obtain the corrosion life of the object to be subjected to life prediction in the target special gas environment.

8. A storage medium, characterized by The storage medium stores a computer program, and the computer program is executed by the processor to implement the steps of the corrosion life prediction method in any one of claims 1-6.

9. An electronic device, comprising: The device at least includes a memory and a processor, the memory stores a computer program, and the processor implements the steps of the corrosion life prediction method in any one of claims 1-6 when executing the computer program stored in the memory.

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