Low-temperature plasma jet generating device

Abstract

The invention discloses a low-temperature plasma jet generating device, which is applied to the field of plasma application and comprises a jet generating device main body, the jet flow generating device body is of a multi-layer sleeve structure formed by a plurality of hollow medium pipes with different diameters, and gaps exist between the adjacent hollow medium pipes. A conductive electrode is correspondingly arranged at each hollow medium tube, so that a potential difference exists between the adjacent conductive electrodes along the radial direction of the hollow medium tubes; a hollow medium tube for insulating and isolating the conductive electrodes is arranged between every two adjacent conductive electrodes; the jet generating device main body comprises a jet outlet and a gas inlet; the gas inlet is communicated with the jet flow outlet, an electric field generated due to the potential difference between the adjacent conductive electrodes exists in a communication path of the gas inlet and the jet flow outlet, and the hollow medium pipe has penetrability to the electric field. According to the invention, the structure for generating and emitting the plasma is divided into a plurality of separated structures, so that the overall sectional area of the plasma jet can be increased.

Description

Technical Field

[0001] The invention relates to the field of plasma application, and in particular to a low-temperature plasma jet generating device. Background Art

[0002] Atmospheric pressure low-temperature plasma jets are the main type. At present, atmospheric pressure low-temperature plasma jets are plasma jets generated by airflow and specific gas discharge methods under atmospheric pressure, such as corona discharge, dielectric barrier discharge, and radio frequency discharge. The cross-sectional diameter of existing atmospheric pressure low-temperature plasma jets is generally in the range of 1 mm to 8 mm. There is a problem of too small processing area, resulting in insufficient processing efficiency, which in turn limits the large-scale application of low-temperature plasma jets. The currently commonly used method to increase the cross-sectional area of ​​low-temperature plasma jets is to combine multiple low-temperature plasma jets into a jet array. However, when this method is used, there will be interactions between adjacent jet units, causing the jet to deflect and leaving obvious gaps, resulting in uneven action of the low-temperature plasma jet on the surface of the object.

[0003] Therefore, how to increase the cross-sectional area of ​​the jet generated by the low-temperature plasma jet generating unit is a technical problem that technical personnel in this field urgently need to solve. Summary of the invention

[0004] In view of this, the purpose of the present invention is to provide a low-temperature plasma jet generating device, which solves the problem that the cross-sectional diameter of the atmospheric pressure low-temperature plasma jet in the prior art is generally in the range of 1 mm to 8 mm, and the processing area is too small, resulting in insufficient processing efficiency, which in turn limits the large-scale application of low-temperature plasma jets.

[0005] In order to solve the above technical problems, the present invention provides a low-temperature plasma jet generating device, comprising a jet generating device body;

[0006] The jet generating device body comprises a multi-layer sleeve structure formed by a plurality of hollow medium tubes of different diameters, and there are gaps between adjacent hollow medium tubes;

[0007] A conductive electrode is correspondingly arranged at each of the hollow dielectric tubes, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube; and there is a hollow dielectric tube between two adjacent conductive electrodes to insulate and isolate the conductive electrodes;

[0008] The jet generating device body includes a plurality of hollow dielectric tubes, a jet outlet at at least one end along the axial direction, and a gas inlet for introducing a reaction gas into the gap; the gas inlet is connected to the jet outlet, and in the conductive path between the gas inlet and the jet outlet, there is an electric field generated by the potential difference between adjacent conductive electrodes, and the hollow dielectric tube is permeable to the electric field.

[0009] Optionally, the conductive electrode is arranged on the side surface of the corresponding hollow dielectric tube.

[0010] Optionally, in the hollow dielectric tubes, a central conductive electrode is axially arranged inside the innermost hollow dielectric tube;

[0011] The conductive electrodes are all arranged on the outer surfaces of the corresponding hollow medium tubes.

[0012] Optionally, along the radial direction of the hollow dielectric tube, the potential differences between all adjacent conductive electrodes are the same.

[0013] Optionally, the conductive electrodes disposed at every two adjacent hollow dielectric tubes are correspondingly configured as a grounded conductive electrode and a conductive electrode forming a potential difference with the grounded conductive electrode.

[0014] Optionally, the gaps between all adjacent hollow medium tubes are the same.

[0015] Optionally, the hollow medium tube is a coaxial hollow medium tube.

[0016] Optionally, one end of the hollow medium tube along the axial direction is open and serves as the jet outlet.

[0017] Optionally, the hollow medium tube is fixed by an insulating fixing plug provided at one end axially facing away from the jet outlet;

[0018] The gas inlet is arranged on the side of the hollow medium tube.

[0019] Optionally, the hollow medium tube is an integrally prepared structure;

[0020] The gas inlet is arranged at one end of the hollow medium tube axially facing away from the jet outlet.

[0021] It can be seen that the low-temperature plasma jet generating device provided by the present invention includes a jet generating device body; the jet generating device body is a multilayer sleeve structure formed by multiple hollow dielectric tubes of different diameters, and there is a gap between adjacent hollow dielectric tubes; a conductive electrode is correspondingly arranged at each hollow dielectric tube, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube, and there is a hollow dielectric tube that insulates and isolates the conductive electrodes between two adjacent conductive electrodes; the jet generating device body includes a jet outlet arranged at at least one end of the multiple hollow dielectric tubes along the axial direction, and a gas inlet for introducing a reaction gas into the gap, the gas inlet is connected to the jet outlet, and there is an electric field generated by the potential difference between adjacent conductive electrodes in the conductive path between the gas inlet and the jet outlet, and the hollow dielectric tube has penetrability to the electric field. The present invention introduces a reaction gas into the electric field region to discharge the reaction gas to generate plasma and eject the plasma. The structure is arranged as a plurality of separation structures separated by a multi-layer sleeve structure. Independent plasma is formed in the gap between each two adjacent hollow dielectric tubes and ejected through the jet outlet. This can achieve more precise control of the formed plasma jet, improve the uniformity of plasma jet forming, and simultaneously increase the overall cross-sectional area of ​​the plasma jet. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0023] Figure 1 A schematic structural diagram of a low-temperature plasma jet generating device provided in an embodiment of the present invention;

[0024] Figure 2 A schematic structural diagram of another low-temperature plasma jet generating device provided by an embodiment of the present invention;

[0025] Figure 3 A top view of another low-temperature plasma jet generating device provided in an embodiment of the present invention;

[0026] Figure 4 A front view of another low-temperature plasma jet generating device provided by an embodiment of the present invention;

[0027] Figures 1 to 4 In the figure, the reference numerals are described as follows:

[0028] 10-Hollow medium tube;

[0029] 20-conductive electrode, 21-central conductive electrode;

[0030] 31- jet outlet, 32- gas inlet;

[0031] 40-Insulation fixing plug. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] Embodiment 1:

[0034] Please refer to Figure 1 , Figure 1 A schematic diagram of the structure of a low-temperature plasma jet generating device provided in an embodiment of the present invention. The device may include a jet generating device body;

[0035] The jet generating device body includes a multi-layer sleeve structure formed by a plurality of hollow medium tubes 10 of different diameters, and there are gaps between adjacent hollow medium tubes 10;

[0036] A conductive electrode 20 is correspondingly arranged at each hollow dielectric tube 10, so that there is a potential difference between adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10; there is a hollow dielectric tube 10 between two adjacent conductive electrodes 20 to insulate and isolate the conductive electrodes 20;

[0037] The main body of the jet generating device includes a plurality of hollow dielectric tubes 10, a jet outlet 31 at at least one end along the axial direction, and a gas inlet 32 ​​for introducing a reaction gas into the gap; the gas inlet 32 ​​is connected to the jet outlet 31, and in the conductive path between the gas inlet 32 ​​and the jet outlet 31, there is an electric field generated by the potential difference between adjacent conductive electrodes 20, and the hollow dielectric tube 10 is permeable to the electric field.

[0038] It should be noted that, in this embodiment Figure 1It is a cross-sectional schematic diagram of the device, and its left and right parts, which are symmetrically arranged in the transverse direction, correspond to an integrated structure to form the same hollow medium tube. In this embodiment, the jet generating device body is provided with a multilayer sleeve structure formed by a plurality of hollow medium tubes 10 of different diameters, in which the hollow medium tube 10 with a large diameter is sleeved on the outside of the hollow medium tube 10 with a small diameter, that is, the hollow medium tube 10 with a large diameter is sleeved on the outside of the hollow medium tube 10 with a small diameter in sequence to obtain the multilayer sleeve structure. It should be further explained that in this embodiment, the diameters of the hollow medium tubes 10 are different. At this time, when the wall thickness of the hollow medium tube 10 is small, the influence of the wall thickness can be ignored. When the wall thickness of the hollow medium tube 10 is thick, it should be clear that the inner diameter of the hollow medium tube 10 arranged on the outside between different medium tubes is greater than the outer diameter of the hollow medium tube 10 arranged on the inside, so as to ensure that the hollow medium tube 10 with a larger diameter is sleeved on the outside of the hollow medium tube 10 with a smaller diameter. In this embodiment, a conductive electrode 20 is correspondingly arranged at each hollow dielectric tube 10, and there is a potential difference between adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10, so that an electric field is formed between two adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10, and the electric field is formed on the conduction path between the jet outlet 31 and the gas inlet 32. The gas entering the gap between adjacent hollow dielectric tubes 10 through the gas inlet 32 ​​discharges at the formed electric field to form plasma, and the plasma is ejected through the jet outlet 31. In this embodiment, the conductive electrode 20 arranged at the hollow dielectric tube 10 can be set as an annular conductive electrode 20 arranged along the circumference of the hollow dielectric tube 10, and the conductive electrode 20 can be fixed to the hollow dielectric tube 10 by bonding or spraying, and the hollow dielectric tube 10 can be selected from quartz hollow tubes, glass hollow tubes or nylon hollow tubes. In this embodiment, the gas introduced into the device through the gas inlet 32 ​​can be selected from helium, argon, air or mixed gas, which can discharge and generate plasma under the action of an electric field. The length and discharge intensity of the plasma jet formed above can be adjusted by controlling the driving power supply parameters and the air flow rate.

[0039] The present embodiment does not limit the specific number of hollow dielectric tubes 10, as long as a plurality of partitions capable of generating plasma are formed. That is, when there is no central conductive electrode 20 in the center of the multilayer sleeve structure, the number of hollow dielectric tubes 10 should be greater than 2 to form a partition structure with at least two layers of plasma jets, and when there is a central conductive electrode 20 in the center of the multilayer sleeve structure, the number of hollow dielectric tubes 10 can be greater than 1 to form a partition structure with at least two layers of plasma jets. The present embodiment does not limit the specific arrangement position of the conductive electrode 20 set at each hollow dielectric tube 10, as long as the adjacent conductive electrodes 20 set along the radial direction of the hollow dielectric tube 10 can be isolated by at least part of the thickness of the hollow dielectric tube 10. For example, each conductive electrode 20 can be set on the radial side surface of the corresponding hollow dielectric tube 10, or in theory, each conductive electrode 20 can also be set inside the corresponding hollow dielectric tube 10. In addition, the present embodiment does not limit the specific parameters of the potential difference formed between adjacent conductive electrodes 20, as long as the formed electric field can cause the passing gas to discharge and form plasma. Furthermore, among the three conductive electrodes 20 laid in sequence, it is necessary to ensure that no electric field is formed between the conductive electrodes 20 on both sides, or that the formed electric field does not affect the formation of plasma. This embodiment also does not limit the specific position of the gas inlet 32 ​​set in the jet generating device body, and it is only necessary to ensure that there is a certain conductive path between the gas inlet 32 ​​and the jet outlet 31, so that the above-mentioned electric field is formed in a partial area on the conductive path.

[0040] Finally, it should be noted that in this embodiment, since there is at least a portion of the thickness of the hollow dielectric tube 10 between adjacent conductive electrodes 20 disposed radially along the hollow dielectric tube 10, it is necessary to ensure that the above-mentioned hollow dielectric tube 10 has permeability to the electric field to ensure that an electric field is generated between adjacent conductive electrodes 20 disposed radially along the hollow dielectric tube 10. In this embodiment, the specific number of jet outlets 31 is not limited. For example, jet outlets 31 can be provided at both ends of the hollow dielectric tube 10 along the axial direction so that plasma jets can be ejected from both ends.

[0041] Furthermore, in order to improve the uniformity of the electric field generated between each group of adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 , the potential differences between all adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 may be the same.

[0042] It should be noted that in this embodiment, the potential difference between all adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 is the same, that is, along the radial direction of the hollow dielectric tube 10, the electric field formed between each group of adjacent conductive electrodes 20 is the same, so as to ensure the uniformity of the formed electric field.

[0043] Furthermore, in order to avoid the problem that when the number of conductive electrodes 20 arranged in sequence is more than 2, the potential difference between the conductive electrodes 20 located on both sides or between non-adjacent conductive electrodes 20 affects the formation of plasma, and to reduce the complexity of the device, the conductive electrodes 20 arranged at each two adjacent hollow dielectric tubes 10 can be arranged to be a grounded conductive electrode 20 and a conductive electrode 20 that forms a potential difference with the grounded conductive electrode 20.

[0044] It should be noted that in this embodiment, the potentials of the conductive electrodes 20 on both sides of every three conductive electrodes 20 arranged in sequence along the radial direction of the hollow dielectric tube 10 are set to be the same, so as to avoid the formation of a potential difference between the conductive electrodes 20 on both sides, thereby affecting the potential difference between the adjacent conductive electrodes 20 in the three conductive electrodes 20 arranged in sequence, thereby reducing the complexity of the device. In this embodiment, three conductive electrodes 20 arranged in sequence along the radial direction of the hollow dielectric tube 10 are selected, which can be arranged in sequence as a grounded conductive electrode 20-a high-voltage conductive electrode 20-a grounded conductive electrode 20, or can also be arranged as a high-voltage conductive electrode 20-a grounded conductive electrode 20-a high-voltage conductive electrode 20, wherein the high-voltage conductive electrode 20 is the conductive electrode 20 that forms a potential difference with the grounded conductive electrode 20, and the potential of each high-voltage conductive electrode 20 is the same. In this embodiment, the conductive electrode 20 that forms a potential difference with the grounded conductive electrode 20 can be connected to a discharge drive source, and the discharge drive source can be an AC type drive source, a radio frequency type drive source, or a pulse type drive source.

[0045] Furthermore, in order to improve the uniformity of the plasma jet formed in the device, the gaps between all adjacent hollow dielectric tubes 10 may be set to be the same.

[0046] It should be noted that in this embodiment, the gaps between all adjacent hollow dielectric tubes 10 are set to be the same, that is, the size of each plasma forming partition is the same, and the size of each outlet for emitting plasma jets is the same, so as to improve the uniformity of the plasma jet finally formed.

[0047] Furthermore, in order to improve the uniformity of the plasma jet and improve the regularity of the assembly of multiple hollow dielectric tubes 10 in the device, the above-mentioned hollow dielectric tubes 10 can be set as coaxial hollow dielectric tubes 10.

[0048] It should be noted that in this embodiment, by arranging multiple hollow dielectric tubes 10 as coaxial hollow dielectric tubes 10, it is possible to ensure that the gaps between adjacent dielectric tubes are uniform everywhere along the circumferential direction, so as to ensure the uniformity of the plasma jet finally formed, while ensuring the regularity of the layout of the above-mentioned hollow dielectric tubes 10.

[0049] Furthermore, in order to ensure the simplicity of the device, one end of the hollow medium tube 10 along the axial direction may be opened to serve as the jet outlet 31 .

[0050] It should be noted that in this embodiment, one axial end of the hollow medium tube 10 is set as a jet outlet 31 to reduce the complexity of the device, and the jet outlet 31 is set in an open manner to ensure that the formed plasma jet is ejected smoothly.

[0051] Furthermore, in order to ensure the flexibility of disassembly of the device and ensure that the device smoothly generates a plasma jet, the hollow medium tube 10 may be fixed by an insulating fixing plug 40 arranged at one end axially facing away from the jet outlet 31;

[0052] The gas inlet 32 ​​is arranged on the side of the hollow medium tube 10 .

[0053] It should be noted that in this embodiment, the end of the hollow dielectric tube 10 facing away from the jet outlet 31 in the axial direction is fixed by an insulating fixing plug 40 to ensure that the relative positions of all the hollow dielectric tubes 10 are fixed, and the insulating fixing plug 40 is provided to block the side of the hollow dielectric tube 10 facing away from the jet outlet 31 to prevent gas from leaking through the side of the hollow dielectric tube 10 facing away from the jet outlet 31, thereby ensuring that the plasma jet is prepared smoothly. This embodiment does not limit the specific position of the gas inlet 32 ​​on the side of the hollow dielectric tube 10, as long as it can form an electric field on the conductive path formed between the gas inlet 32 ​​and the jet outlet 31.

[0054] Furthermore, in order to reduce the complexity of the device, the hollow medium tube 10 may be provided as an integrally prepared structure;

[0055] The gas inlet 32 ​​is arranged at one end of the hollow medium tube 10 facing away from the jet outlet 31 in the axial direction.

[0056] It should be noted that in this embodiment, the hollow medium tube 10 is prepared as an integral structure, that is, the end of the hollow medium tube 10 facing away from the jet outlet 31 forms an integrally sintered baffle, and a gas inlet 32 ​​is arranged on the baffle, which can ensure that the gas flows directly toward the jet outlet 31 after entering through the gas inlet 32, that is, the direction of gas incidence is consistent with the flow direction after entering, thereby ensuring that the gas, i.e., the formed plasma jet, flows smoothly.

[0057] A low-temperature plasma jet generating device provided by an embodiment of the present invention includes a jet generating device body; the jet generating device body is a multilayer sleeve structure formed by multiple hollow dielectric tubes 10 of different diameters, and there is a gap between adjacent hollow dielectric tubes 10; a conductive electrode 20 is correspondingly arranged at each hollow dielectric tube 10, so that there is a potential difference between adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10, and there is a hollow dielectric tube 10 between two adjacent conductive electrodes 20 that insulates and isolates the conductive electrodes 20; the jet generating device body includes a jet outlet 31 arranged at at least one end of the multiple hollow dielectric tubes 10 along the axial direction, and a gas inlet 32 ​​for introducing a reaction gas into the gap, the gas inlet 32 ​​is connected to the jet outlet 31, and there is an electric field generated by the potential difference between adjacent conductive electrodes 20 in the conductive path between the gas inlet 32 ​​and the jet outlet 31, and the hollow dielectric tube 10 has penetrability to the electric field. The present invention introduces a reaction gas into the electric field region to discharge the reaction gas to generate plasma and eject the plasma. The structure is arranged as a plurality of separation structures separated by a multi-layer sleeve structure. The independent plasma formed in the gap between each two adjacent hollow dielectric tubes 10 is ejected through the jet outlet 31, which can achieve more precise control of the formed plasma jet, improve the uniformity of plasma jet forming, and at the same time increase the overall cross-sectional area of ​​the plasma jet.

[0058] In addition, the embodiment of the present invention ensures the uniformity of the formed electric field by setting the potential difference between all adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 to be the same; by setting the conductive electrodes 20 set at each of the above-mentioned two adjacent hollow dielectric tubes 10 to be correspondingly set as a grounded conductive electrode 20 and a conductive electrode 20 that forms a potential difference with the grounded conductive electrode 20, the complexity of the device is reduced, and the potential difference formed between non-adjacent conductive electrodes 20 set along the radial direction of the hollow dielectric tube 10 is avoided to affect the formation of plasma; by setting the gaps between all adjacent hollow dielectric tubes 10 to be the same, and the outlet size of each ejected plasma jet to be the same, the uniformity of the finally formed plasma jet can be improved; by setting multiple hollow dielectric tubes 10 as coaxial hollow dielectric tubes 10, it can be ensured that the gaps between adjacent dielectric tubes are uniform everywhere along the circumferential direction, thereby ensuring the uniformity of the finally formed plasma jet, and at the same time ensuring the regularity of the layout of the above-mentioned hollow dielectric tubes 10; One end of the core dielectric tube 10 along the axial direction is set as a jet outlet 31 to reduce the complexity of the device, and the jet outlet 31 is set as an open opening to ensure that the formed plasma jet is smoothly ejected; by setting the end of the hollow dielectric tube 10 along the axial direction facing away from the jet outlet 31 to be fixed by an insulating fixing plug 40 to ensure that the relative positions of all the hollow dielectric tubes 10 are fixed, and the insulating fixing plug 40 is set to block the side of the hollow dielectric tube 10 facing away from the jet outlet 31 to avoid gas leakage through the side of the hollow dielectric tube 10 facing away from the jet outlet 31, thereby ensuring that the plasma jet is successfully prepared; by making the hollow dielectric tube 10 an integrally prepared structure, at this time, the end of the hollow dielectric tube 10 facing away from the jet outlet 31 forms a baffle prepared by integral sintering, and at this time, a gas inlet 32 ​​is set on the baffle, which can ensure that the gas flows directly toward the jet outlet 31 after entering through the gas inlet 32, that is, the direction of gas incidence is consistent with the flow direction after entering, thereby ensuring that the gas, that is, the formed plasma jet, flows smoothly.

[0059] Embodiment 2:

[0060] Please refer to Figure 2 , Figure 2 A schematic diagram of the structure of another low-temperature plasma jet generating device provided in an embodiment of the present invention. Compared with the above-mentioned embodiment 1, the difference between the device and the embodiment 1 is that:

[0061] The conductive electrodes 20 are disposed on the side surfaces of the corresponding hollow medium tubes 10 .

[0062] It should be noted that, in this embodiment Figure 2: is a cross-sectional schematic diagram of the device, wherein the left and right parts thereof are symmetrically arranged in the transverse direction and correspond to an integrated structure, forming the same hollow dielectric tube. In this embodiment, the conductive electrode 20 is arranged on the side surface of the corresponding hollow dielectric tube 10, and while ensuring that an electric field is formed along the radial direction of the hollow dielectric tube 10, the efficiency of preparing the conductive electrode 20 can be improved, thereby reducing the complexity of device preparation.

[0063] Furthermore, in order to increase the diameter of the jet cross section in the jet generating device, a central conductive electrode 21 may be provided in the axial direction inside the innermost hollow medium tube 10 of the hollow medium tube 10;

[0064] The conductive electrodes 20 are all arranged on the outer surface of the corresponding hollow medium tube 10 .

[0065] It should be noted that the specific structure of the device in this embodiment can be referred to Figure 3 and Figure 4 , Figure 3 A top view of another low-temperature plasma jet generating device provided in an embodiment of the present invention; Figure 4 A front view of another low-temperature plasma jet generating device provided by an embodiment of the present invention. In this embodiment, a central conductive electrode 21 is axially arranged inside the innermost hollow dielectric tube 10, and there is a potential difference between the central conductive electrode 21 and the adjacent conductive electrode 20 arranged on the outer surface of the hollow dielectric tube 10 to form an electric field as described above for preparing plasma. Preferably, the central conductive electrode 21 can be arranged in a columnar shape, specifically on the central axis of the innermost hollow dielectric tube 10, to ensure the uniformity of plasma preparation and the regularity of the device.

[0066] The low-temperature plasma jet generating device provided by the embodiment of the present invention can improve the efficiency of preparing the conductive electrode 20 by setting the conductive electrode 20 on the side surface of the corresponding hollow dielectric tube 10, while ensuring that an electric field is formed in the radial direction of the hollow dielectric tube 10, thereby reducing the complexity of device preparation. In addition, the embodiment of the present invention can improve the preparation efficiency of the plasma jet generating device by setting a central conductive electrode 21 along the axial direction inside the innermost hollow dielectric tube 10, and there is a potential difference between the central conductive electrode 21 and the adjacent conductive electrode 20 set on the outer surface of the hollow dielectric tube 10, so as to form the above-mentioned electric field.

[0067] In a feasible embodiment, the above-mentioned low-temperature plasma jet generating device may specifically include a jet generating device body;

[0068] The jet generating device body comprises a multi-layer coaxial sleeve structure formed by a plurality of hollow dielectric tubes of different diameters, and there are gaps between adjacent hollow dielectric tubes; a central conductive electrode is axially arranged on the inner central axis of the innermost hollow dielectric tube;

[0069] Conductive electrodes are correspondingly arranged on the outer surface of each hollow dielectric tube, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube, and there is a potential difference between the central conductive electrode and the adjacent conductive electrodes along the radial direction of the hollow dielectric tube; there is a hollow dielectric tube between two adjacent conductive electrodes to insulate and isolate the conductive electrodes;

[0070] The jet generating device body comprises a plurality of hollow dielectric tubes, one end of which is open in the axial direction and serves as a jet outlet; the plurality of hollow dielectric tubes are fixed by an insulating fixing plug arranged at one end of the axial direction facing away from the jet outlet, and a gas inlet is arranged on the side of the hollow dielectric tube; the gas inlet is connected to the jet outlet, and in the conductive path between the gas inlet and the jet outlet, there is an electric field generated by the potential difference between adjacent conductive electrodes, and an electric field generated between the central conductive electrode and the adjacent conductive electrode along the radial direction of the hollow dielectric tube; the hollow dielectric tube has penetrability to the electric field;

[0071] Along the radial direction of the hollow dielectric tube, the potential difference between all adjacent conductive electrodes and the potential difference between the central conductive electrode and the adjacent conductive electrode are the same, and the gaps between all adjacent hollow dielectric tubes and the gaps between the central conductive electrode and the adjacent hollow dielectric tubes are the same;

[0072] Along the radial direction of the hollow dielectric tube, each of two adjacent conductive electrodes, as well as the central conductive electrode and the adjacent conductive electrode, are correspondingly provided with a grounded conductive electrode and a conductive electrode forming a potential difference with the grounded conductive electrode.

[0073] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0074] In addition, it should be noted that, in this article, relationships such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variants are intended to cover non-exclusive inclusions.

[0075] The above is a detailed introduction to a low-temperature plasma jet generating device provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the structure of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A low-temperature plasma jet generating device, characterized in that: It includes a jet generating device body; The jet generating device body comprises a multi-layer sleeve structure formed by a plurality of hollow medium tubes of different diameters, and there are gaps between adjacent hollow medium tubes; A conductive electrode is correspondingly arranged at each of the hollow dielectric tubes, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube; and there is a hollow dielectric tube between two adjacent conductive electrodes to insulate and isolate the conductive electrodes; The jet generating device body includes a plurality of hollow dielectric tubes, a jet outlet at at least one end along the axial direction, and a gas inlet for introducing a reaction gas into the gap; the gas inlet is connected to the jet outlet, and in the conductive path between the gas inlet and the jet outlet, there is an electric field generated by the potential difference between adjacent conductive electrodes, and the hollow dielectric tube is permeable to the electric field.

2. The low-temperature plasma jet generating device according to claim 1, characterized in that: The conductive electrodes are arranged on the side surfaces of the corresponding hollow dielectric tubes.

3. The low-temperature plasma jet generating device according to claim 2, characterized in that: In the hollow dielectric tube, a central conductive electrode is axially arranged inside the innermost hollow dielectric tube; The conductive electrodes are all arranged on the outer surfaces of the corresponding hollow medium tubes.

4. The low-temperature plasma jet generating device according to claim 1, characterized in that: Along the radial direction of the hollow dielectric tube, the potential differences between all adjacent conductive electrodes are the same.

5. The low-temperature plasma jet generating device according to claim 4, characterized in that: The conductive electrodes arranged at each two adjacent hollow dielectric tubes are correspondingly arranged as a grounded conductive electrode and a conductive electrode forming a potential difference with the grounded conductive electrode.

6. The low-temperature plasma jet generating device according to claim 4, characterized in that: The gaps between all adjacent hollow medium tubes are the same.

7. The low-temperature plasma jet generating device according to claim 1, characterized in that: The hollow medium tube is a coaxial hollow medium tube.

8. The low-temperature plasma jet generating device according to claim 1, characterized in that: One end of the hollow medium tube along the axial direction is open and serves as the jet outlet.

9. The low-temperature plasma jet generating device according to claim 8, characterized in that: The hollow medium tube is fixed by an insulating fixing plug provided at one end axially facing away from the jet outlet; The gas inlet is arranged on the side of the hollow medium tube.

10. The low-temperature plasma jet generating device according to claim 1, characterized in that: The hollow medium tube is an integrally prepared structure; The gas inlet is arranged at one end of the hollow medium tube axially facing away from the jet outlet.

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