A rapid filtering device for semiconductor chemicals

Abstract

The present invention belongs to the field of semiconductor filtering technology, and discloses a semiconductor chemical rapid filtering device, including a base; an air intake assembly; a pressurizing assembly; a transverse filtering assembly; a decompression assembly and a longitudinal filtering assembly. The present invention has a newly designed longitudinal filtering assembly. When the fan wheel rotates clockwise, multiple air outlet points are integrated into a regular cyclone, which brushes the upper disc filter downward. The circular holes tilted from right to left will guide the wind direction to be rectified and present an oblique downward movement, thereby driving the upper disc filter to rotate clockwise. The wind direction continues to go downward, blowing the circular holes tilted from left to right on the lower disc filter. At this time, the pressurized gas passes through the upper and lower disc filters with different rotation directions for longitudinal filtration. The pressurized gas flows quickly to remove residual particles in the gas, solving the problem that when the gas with a small pressure value enters the filter shell, it takes a lot of time to fill the empty cavity and the filtration is slow.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor filtering, and in particular relates to a chemical rapid filtering device for semiconductors. Background Art

[0002] In the process of semiconductor manufacturing, some special gases are used to assist production, such as inert gas nitrogen, which is used to spray the channels and pipes of lithography equipment to remove residual oxygen. Argon is mainly used in the deposition and etching process in ultraviolet lithography lasers to make the smallest patterns on semiconductor chips, and hydrogen can be used for epitaxial deposition of silicon and silicon germanium. Before these special gases are used in semiconductor manufacturing, they need to be filtered for particles and dried to ensure their purity.

[0003] Existing chemical filtering devices for semiconductors will release and reduce the pressure of the high-pressure gas stored in the tank body before filtering through the filtering device. When the gas with a lower pressure value enters the filter shell, it takes a lot of time to fill the empty cavity. Only then can the filter element play its due role. However, the production process of semiconductors requires a large amount of special gases. This traditional filtering method cannot meet the increasingly accelerated production efficiency needs, so a device that can filter quickly is needed. Summary of the invention

[0004] The object of the present invention is to provide a rapid filtering device for semiconductor chemicals to solve the problems raised in the above background technology.

[0005] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a semiconductor chemical rapid filtering device, comprising a base, an air intake assembly is fixedly installed on the top of the base, and also comprises a linkage pressure increase and pressure reduction rapid filtering mechanism, which comprises a pressurizing assembly, the pressurizing assembly is fixedly installed on the right side of the air intake assembly, a lateral filtering assembly is fixedly installed on the right side of the pressurizing assembly, and a pressure reducing assembly is fixedly installed on the right side of the lateral filtering assembly;

[0006] A longitudinal filter assembly, the longitudinal filter assembly is fixedly installed on the right side of the transverse filter assembly, the longitudinal filter assembly includes a second filter shell, an umbrella-shaped rod is fixedly connected to the upper middle position of the inner side of the second filter shell, a fan wheel is rotatably installed on the top of the umbrella-shaped rod, and two disc filters are rotatably installed on the outer edge of the umbrella-shaped rod, and a plurality of circular holes are annularly opened inside the two disc filters, a first wheel is fixedly installed on the top of the upper disc filter, and a first movable tooth is meshed on the right side of the first wheel, and a second wheel is fixedly installed on the top of the lower disc filter, and a second movable tooth is meshed on the right side of the second wheel.

[0007] Preferably, the bottom end of the umbrella-shaped rod is fixedly connected to the bottom surface of the second filter shell, the circular holes opened on the upper side of the disc filter are inclined from right to left, and the circular holes opened on the lower side of the disc filter are inclined from left to right, and the teeth and grooves of the first wheel and the second wheel are symmetrical to each other.

[0008] Preferably, the air intake assembly comprises a plurality of curved pipes, the middle portions of the plurality of curved pipes are fixedly connected to two longitudinal pipes, and the middle portions of the two longitudinal pipes are fixedly connected to an air intake valve.

[0009] Preferably, the pressurizing assembly includes a pressurizing shell, which is fixedly mounted on the top of the base, the left side of the pressurizing shell is fixedly connected to a plurality of curved pipes, a roller is eccentrically mounted inside the pressurizing shell, a plurality of retractable blades are movably mounted inside the roller, a first pressure gauge is fixedly mounted on the front side of the pressurizing shell, and an air outlet duct is fixedly connected to the right side of the pressurizing shell.

[0010] Preferably, the lateral filter assembly includes a first filter shell, the first filter shell is fixedly mounted on the right side of the pressurized shell, the left side of the first filter shell is fixedly connected to the air outlet pipe, the top of the first filter shell is fixedly connected with a diverter pipe, the right end of the diverter pipe is fixedly mounted inside the second filter shell, the bottom side of the first filter shell is fixedly mounted with a frame, the bottom of the frame is fixedly connected with two tracks, the inner sides of the two tracks are movably clamped with a plurality of movable plates, the other ends of the plurality of movable plates are movably hinged with connecting strips, the tops of the plurality of connecting strips are fixedly connected with a reversing plate, and the outer edges of the plurality of reversing plates are movably sleeved with filter screens.

[0011] Preferably, the rotating shaft of the reversing plate is installed through the frame, and the filter is fixedly installed on the top of the frame.

[0012] Preferably, the pressure reducing assembly includes a fixing plate, the fixing plate is fixedly installed on the right side of the second filter shell, a three-way pipe is fixedly installed on the front side of the fixing plate, a partition bar is fixedly installed at the middle position of the three-way pipe, the left end of the three-way pipe is fixedly connected to a connecting pipe, the left end of the connecting pipe is fixedly connected to the right side of the second filter shell, the top side of the three-way pipe is fixedly connected to a hydraulic rod, the outer edge of the telescopic end of the hydraulic rod is sleeved with a spring, the telescopic end of the hydraulic rod is fixedly connected to a pressure head, the top sides of the left and right ends of the three-way pipe are fixedly connected to pressure pipes, and the tail ends of the two pressure pipes are fixedly connected to second pressure gauges.

[0013] Preferably, a groove for the pressure head to abut is provided in the middle of the partition bar, and the two second pressure gauges are fixedly installed on the top of the three-way pipe.

[0014] The beneficial effects of the present invention are as follows:

[0015] 1. The present invention has a newly designed longitudinal filtering component. The fan wheel rotates clockwise to integrate multiple air outlet points into a regular cyclone, which brushes the upper disc filter downward. The circular holes tilted from right to left will guide the wind direction to be rectified and move obliquely downward, thereby driving the upper disc filter to rotate clockwise. The wind direction continues to be downward, blowing the circular holes tilted from left to right on the lower disc filter. At this time, the pressurized gas passes through the upper and lower disc filters with different rotation directions for longitudinal filtration. The pressurized gas flows quickly to remove residual particles in the gas, solving the problem that a large amount of time is needed to fill the empty cavity when the gas with a small pressure value enters the filter shell, resulting in slow filtration.

[0016] 2. The present invention is equipped with a transverse filter assembly. When the pressurized gas enters the transverse filter assembly, it will blow the filter screen from left to right in the first filter shell. The filter screen captures and filters the gas and simultaneously starts multiple movable plates. The movable plates slide in the track and push the reversing plates on the frame to rotate a certain angle through the connecting rod formed with the connecting strip. The reciprocating motion of multiple movable plates can realize the reciprocating rotation of multiple reversing plates. The high-pressure gas passes through the filtration system composed of multiple reversing plates and filter screens, and flows in a disorderly manner in the first filter shell to perform transverse particle filtration, thereby improving the filtration effect.

[0017] 3. The present invention is equipped with a decompression component. The gas after re-filtration enters the three-way pipe through the connecting pipe, and first stays in the left three-way pipe and the partition bar. By shortening the stroke of the hydraulic rod, the left and right cavities composed of the partition bar and the pressure head can be connected, and then the high-pressure gas is slowly released to achieve the effect of decompression. The two second pressure gauges can intuitively read the gas values ​​before and after decompression. The special gas that is decompressed and restored to normal pressure can be conveniently put into semiconductor production. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a cross-sectional view of the overall structure of the present invention;

[0019] Figure 2 For the present invention Figure 1 A magnified view of the structure at center;

[0020] Figure 3 For the present invention Figure 2 A magnified view of the structure at B in the middle;

[0021] Figure 4 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 5 It is a schematic diagram of the structure of the air intake assembly of the present invention;

[0023] Figure 6 A top view of the pressurizing assembly structure of the present invention;

[0024] Figure 7 It is a cross-sectional view of the structure of the transverse filtering assembly of the present invention;

[0025] Figure 8 This is a bottom view of the structure of the transverse filtering assembly of the present invention;

[0026] Fig. 9 This is a schematic diagram of the disc filter structure of the present invention;

[0027] Fig.10 It is a schematic diagram of the structure of the pressure reducing assembly of the present invention.

[0028] In the figure: 1, base; 2, air intake assembly; 3, pressurizing assembly; 4, transverse filtering assembly; 5, longitudinal filtering assembly; 6, pressure reducing assembly; 21, elbow; 22, longitudinal pipe; 23, air intake valve; 31, pressurizing shell; 32, roller; 33, telescopic blade; 34, first pressure gauge; 35, air outlet pipe; 41, first filtering shell; 42, shunt pipe; 43, frame; 44, track; 45, movable sheet; 46, connecting strip; 47. Reversing plate; 48. Filter screen; 51. Second filter shell; 52. Umbrella-shaped rod; 53. Fan wheel; 54. Disc filter screen; 55. Round hole; 56. First impeller; 57. First movable tooth; 58. Second impeller; 59. Second movable tooth; 61. Fixed plate; 62. Tee pipe; 63. Spacer; 64. Connecting pipe; 65. Hydraulic rod; 66. Spring; 67. Pressure head; 68. Pressure pipe; 69. Second pressure gauge. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] like Figures 1 to 10 As shown, an embodiment of the present invention provides a semiconductor chemical rapid filtering device, comprising a base 1, an air intake assembly 2 is fixedly installed on the top of the base 1, and also comprises a linkage pressure-increasing and pressure-reducing rapid filtering mechanism, which comprises a pressurizing assembly 3, the pressurizing assembly 3 is fixedly installed on the right side of the air intake assembly 2, a transverse filtering assembly 4 is fixedly installed on the right side of the pressurizing assembly 3, and a pressure-reducing assembly 6 is fixedly installed on the right side of the transverse filtering assembly 4;

[0031] The longitudinal filter assembly 5 is fixedly installed on the right side of the transverse filter assembly 4. The longitudinal filter assembly 5 includes a second filter shell 51. An umbrella-shaped rod 52 is fixedly connected to the upper middle position of the inner side of the second filter shell 51. A fan wheel 53 is rotatably installed on the top of the umbrella-shaped rod 52. Two disc filters 54 are rotatably installed on the outer edge of the umbrella-shaped rod 52. A plurality of circular holes 55 are annularly opened inside the two disc filters 54. A first The first wheel 56 is meshed with a first movable tooth 57 on the right side, and a second wheel 58 is fixedly installed on the top of the lower disc filter 54, and a second movable tooth 59 is meshed on the right side of the second wheel 58; the bottom end of the umbrella-shaped rod 52 is fixedly connected to the bottom surface of the second filter shell 51, the circular hole 55 opened in the upper disc filter 54 is inclined from right to left, and the circular hole 55 opened in the lower disc filter 54 is inclined from left to right, and the tooth grooves of the first wheel 56 and the second wheel 58 are symmetrical to each other;

[0032] After being evenly diverted through the diverter pipe 42, the high-pressure gas enters the second filter housing 51 and blows the fan wheel 53 downward, so that the fan wheel 53 can rotate clockwise. The fan wheel 53 integrates multiple air outlet points into a regular cyclone, and first blows the upper disc filter 54 downward. The circular hole 55 inclined from right to left will guide the wind direction to be rectified and move obliquely downward, thereby driving the upper disc filter 54 to rotate clockwise. The tooth grooves of the first wheel 56 and the first movable tooth 57 are only opened in the forward direction, ensuring that the upper disc The filter screen 54 can only rotate clockwise, and the wind direction continues downward, blowing the circular hole 55 of the lower disc filter screen 54 from left to right, and under the meshing of the second wheel 58 and the second movable tooth 59, the lower disc filter screen 54 can only rotate counterclockwise. At this time, the pressurized gas passes through the upper and lower disc filters 54 with different rotation directions to be longitudinally filtered to remove residual particles in the gas, solving the problem that when the gas with a small pressure value enters the filter shell, it takes a lot of time to fill the empty cavity, resulting in slow filtration;

[0033] The air intake assembly 2 includes a plurality of curved pipes 21, two longitudinal pipes 22 are fixedly connected to the middle of the plurality of curved pipes 21, and an air intake valve 23 is fixedly connected to the middle of the two longitudinal pipes 22;

[0034] The special gas to be filtered is fed through the air inlet valve 23. The gas first enters the longitudinal pipe 22 through the two air inlet valves 23. After the gas is evenly distributed to the multiple elbows 21 through the two longitudinal pipes 22, the gas is evenly fed into the pressurized shell 31 longitudinally.

[0035] The pressurizing assembly 3 includes a pressurizing shell 31, which is fixedly mounted on the top of the base 1, and the left side of the pressurizing shell 31 is fixedly connected to the multiple curved pipes 21, a roller 32 is eccentrically mounted inside the pressurizing shell 31, and multiple telescopic blades 33 are movably mounted inside the roller 32, a first pressure gauge 34 is fixedly mounted on the front side of the pressurizing shell 31, and an air outlet pipe 35 is fixedly connected to the right side of the pressurizing shell 31;

[0036] By rotating the roller 32 clockwise, the multiple telescopic blades 33 are driven to rotate on the inner wall of the pressurizing shell 31. The low-pressure gas on the left side of the pressurizing shell 31 passes through the crescent-shaped air chamber formed by the pressurizing shell 31 and the telescopic blades 33, and is pressurized. The gas is discharged from the right side of the pressurizing shell 31 through the air outlet pipe 35. The first pressure gauge 34 can reflect the pressurization degree in this process.

[0037] The transverse filter assembly 4 comprises a first filter shell 41, which is fixedly mounted on the right side of the pressurized shell 31, and the left side of the first filter shell 41 is fixedly connected to the air outlet pipe 35. A shunt pipe 42 is fixedly connected to the top of the first filter shell 41, and the right end of the shunt pipe 42 is fixedly mounted inside the second filter shell 51. A frame 43 is fixedly mounted on the bottom side of the first filter shell 41, and two tracks 44 are fixedly connected to the bottom of the frame 43. Multiple movable sheets 45 are movably clamped on the inner sides of the two tracks 44, and the other ends of the multiple movable sheets 45 are movably hinged with connecting strips 46, and the tops of the multiple connecting strips 46 are fixedly connected with reversing plates 47, and the outer edges of the multiple reversing plates 47 are movably sleeved with filter screens 48; the rotating shaft of the reversing plate 47 is installed through the frame 43, and the filter screen 48 is fixedly mounted on the top of the frame 43;

[0038] When the pressurized gas enters the transverse filter assembly 4, it will blow the filter screen 48 from left to right in the first filter shell 41. The filter screen 48 captures and filters the gas and simultaneously starts multiple movable pieces 45. The movable pieces 45 slide in the track 44, and through the connecting rod formed with the connecting strip 46, the reversing plate 47 on the frame 43 is pushed to rotate a certain angle. The reciprocating motion of multiple movable pieces 45 can realize the reciprocating rotation of multiple reversing plates 47. The high-pressure gas passes through the filtering system composed of multiple reversing plates 47 and filter screens 48, and flows in a disordered manner in the first filter shell 41 to filter particles in the transverse direction.

[0039] Wherein, the pressure reducing assembly 6 comprises a fixing plate 61, which is fixedly mounted on the right side of the second filter shell 51, a three-way pipe 62 is fixedly mounted on the front side of the fixing plate 61, a partition bar 63 is fixedly mounted on the middle position of the three-way pipe 62, a connecting pipe 64 is fixedly connected to the left end of the three-way pipe 62, and the left end of the connecting pipe 64 is fixedly connected to the right side of the second filter shell 51, a hydraulic rod 65 is fixedly connected to the top side of the three-way pipe 62, a spring 66 is sleeved on the outer edge of the telescopic end of the hydraulic rod 65, a pressure head 67 is fixedly connected to the telescopic end of the hydraulic rod 65, pressure pipes 68 are fixedly connected to the top sides of the left and right ends of the three-way pipe 62, and the tail ends of the two pressure pipes 68 are fixedly connected to second pressure gauges 69; a groove for the pressure head 67 to abut is provided in the middle of the partition bar 63, and two second pressure gauges 69 are fixedly mounted on the top of the three-way pipe 62;

[0040] The gas after filtering again enters the three-way pipe 62 through the connecting pipe 64, and first stays in the left three-way pipe 62 and the partition bar 63. By shortening the stroke of the hydraulic rod 65, the left and right cavities composed of the partition bar 63 and the pressure head 67 can be connected, and then the high-pressure gas is slowly released, thereby achieving the effect of decompression. The two second pressure gauges 69 can intuitively read the gas values ​​before and after decompression.

[0041] Working principle:

[0042] When using the present invention, the special gas to be filtered is first fed through the air inlet valve 23, and the gas first enters the longitudinal pipe 22 through the two air inlet valves 23, and after the gas is evenly distributed to the multiple elbows 21 through the two longitudinal pipes 22, the gas is evenly fed into the pressurized shell 31 longitudinally;

[0043] At this time, the roller 32 rotates clockwise, driving the multiple telescopic blades 33 to rotate on the inner wall of the pressurizing shell 31. The low-pressure gas on the left side of the pressurizing shell 31 passes through the crescent-shaped air chamber formed by the pressurizing shell 31 and the telescopic blades 33, and is pressurized. The gas is discharged from the right side of the pressurizing shell 31 through the air outlet pipe 35. The first pressure gauge 34 can reflect the pressurization degree in this process.

[0044] When the pressurized gas enters the transverse filter assembly 4, it will blow the filter screen 48 from left to right in the first filter shell 41. The filter screen 48 captures and filters the gas and simultaneously starts multiple movable pieces 45. The movable pieces 45 slide in the track 44, and through the connecting rod formed with the connecting strip 46, the reversing plate 47 is pushed on the frame 43 to rotate a certain angle. The reciprocating movement of multiple movable pieces 45 can realize the reciprocating rotation of multiple reversing plates 47. The high-pressure gas passes through the filtering system composed of multiple reversing plates 47 and filter screens 48, and flows in a disordered manner in the first filter shell 41 to filter the particles horizontally. The gas after filtering will gradually move upward and enter the shunt pipe 42 through the dome-shaped first filter shell 41;

[0045] The high-pressure gas filtered longitudinally is evenly diverted through the shunt pipe 42 and enters the second filter shell 51, where it blows the fan wheel 53 downward, allowing the fan wheel 53 to rotate clockwise. The fan wheel 53 integrates multiple air outlet points into a regular cyclone, and first blows the upper disc filter 54 downward. The circular hole 55 tilted from right to left will guide the wind direction to be rectified and move obliquely downward, thereby driving the upper disc filter 54 to rotate clockwise. The tooth grooves of the first impeller 56 and the first movable tooth 57 are only opened in the forward direction, ensuring that the upper disc filter 54 can only rotate clockwise. The wind direction continues to go downward, blowing the circular hole 55 tilted from left to right on the lower disc filter 54, and under the meshing of the second impeller 58 and the second movable tooth 59, the lower disc filter 54 can only rotate counterclockwise. At this time, the pressurized gas passes through the upper and lower disc filters 54 with different rotation directions for longitudinal filtration to remove residual particles in the gas.

[0046] The gas after being filtered again enters the three-way pipe 62 through the connecting pipe 64, and first stays in the left three-way pipe 62 and the partition bar 63. By shortening the stroke of the hydraulic rod 65, the left and right cavities composed of the partition bar 63 and the pressure head 67 can be connected, and then the high-pressure gas is slowly released to achieve the effect of decompression. The two second pressure gauges 69 can intuitively read the gas values ​​before and after decompression, and the workflow ends here.

[0047] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0048] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor chemical rapid filtering device, comprising a base (1), characterized in that: An air intake assembly (2) is fixedly mounted on the top of the base (1), and further comprises: A linked pressure-increasing and pressure-reducing rapid filtering mechanism, comprising a pressurizing component (3), the pressurizing component (3) being fixedly mounted on the right side of the air intake component (2), a transverse filtering component (4) being fixedly mounted on the right side of the pressurizing component (3), and a pressure-reducing component (6) being fixedly mounted on the right side of the transverse filtering component (4); A longitudinal filter assembly (5), the longitudinal filter assembly (5) being fixedly mounted on the right side of the transverse filter assembly (4), the longitudinal filter assembly (5) comprising a second filter shell (51), an umbrella-shaped rod (52) being fixedly connected to the upper middle position of the inner side of the second filter shell (51), a fan wheel (53) being rotatably mounted on the top of the umbrella-shaped rod (52), two disc filter screens (54) being rotatably mounted on the outer edge of the umbrella-shaped rod (52), a plurality of circular holes (55) being annularly opened inside the two disc filter screens (54), a first wheel (56) being fixedly mounted on the top of the upper disc filter screen (54), a first movable tooth (57) being meshed on the right side of the first wheel (56), and a second wheel (58) being fixedly mounted on the top of the lower disc filter screen (54), a second movable tooth (59) being meshed on the right side of the second wheel (58); The bottom end of the umbrella-shaped rod (52) is fixedly connected to the bottom surface of the second filter shell (51); the circular hole (55) formed on the upper disc filter (54) is inclined from right to left; the circular hole (55) formed on the lower disc filter (54) is inclined from left to right; and the tooth grooves of the first wheel (56) and the second wheel (58) are symmetrical to each other.

2. A semiconductor chemical rapid filtration device according to claim 1, characterized in that: The air intake assembly (2) comprises a plurality of curved pipes (21), two longitudinal pipes (22) are fixedly connected at the middle positions of the plurality of curved pipes (21), and an air intake valve (23) is fixedly connected at the middle positions of the two longitudinal pipes (22).

3. A semiconductor chemical rapid filtration device according to claim 2, characterized in that: The pressurizing assembly (3) comprises a pressurizing shell (31), the pressurizing shell (31) being fixedly mounted on the top of the base (1), the left side of the pressurizing shell (31) being fixedly connected to a plurality of curved pipes (21), a roller (32) being eccentrically mounted inside the pressurizing shell (31), a plurality of telescopic blades (33) being movably mounted inside the roller (32), a first pressure gauge (34) being fixedly mounted on the front side of the pressurizing shell (31), and an air outlet pipe (35) being fixedly connected to the right side of the pressurizing shell (31).

4. A semiconductor chemical rapid filtration device according to claim 3, characterized in that: The transverse filter assembly (4) comprises a first filter shell (41), the first filter shell (41) being fixedly mounted on the right side of the pressurized shell (31), the left side of the first filter shell (41) being fixedly connected to the air outlet pipe (35), the top of the first filter shell (41) being fixedly connected to a shunt pipe (42), the right end of the shunt pipe (42) being fixedly mounted inside a second filter shell (51), the bottom side of the first filter shell (41) being fixedly mounted to a frame (43), the bottom of the frame (43) being fixedly connected to two rails (44), the inner sides of the two rails (44) being movably clamped with a plurality of movable sheets (45), the other ends of the plurality of movable sheets (45) being movably hinged with a connecting strip (46), the tops of the plurality of connecting strips (46) being fixedly connected to a reversing plate (47), and the outer edges of the plurality of reversing plates (47) being movably sleeved with a filter screen (48).

5. A semiconductor chemical rapid filtration device according to claim 4, characterized in that: The rotating shaft of the reversing plate (47) is installed through the frame (43), and the filter screen (48) is fixedly installed on the top of the frame (43).

6. The semiconductor chemical rapid filtration device according to claim 1, characterized in that: The pressure reducing assembly (6) comprises a fixing plate (61), the fixing plate (61) being fixedly mounted on the right side of the second filter housing (51), a three-way pipe (62) being fixedly mounted on the front side of the fixing plate (61), a spacer bar (63) being fixedly mounted at the middle position of the three-way pipe (62), a connecting pipe (64) being fixedly connected to the left end of the three-way pipe (62), the left end of the connecting pipe (64) being fixedly connected to the right side of the second filter housing (51), a hydraulic rod (65) being fixedly connected to the top side of the three-way pipe (62), a spring (66) being sleeved on the outer edge of the telescopic end of the hydraulic rod (65), a pressure head (67) being fixedly connected to the telescopic end of the hydraulic rod (65), pressure pipes (68) being fixedly connected to the top sides of both left and right ends of the three-way pipe (62), and second pressure gauges (69) being fixedly connected to the tail ends of the two pressure pipes (68).

7. A semiconductor chemical rapid filtration device according to claim 6, characterized in that: A groove for a pressure head (67) to abut against is provided in the middle of the partition bar (63), and the two second pressure gauges (69) are fixedly mounted on the top of the three-way pipe (62).

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