Showerhead assembly and showerhead plate

Abstract

Various embodiments of the present technology may provide a showerhead assembly including a showerhead tray having a plurality of through holes. Each through-hole has a tapered inlet and a tapered outlet. The showerhead tray may include a through-hole having a first size in a central region and a through-hole having a second size different from the first size in an outer region.

Description

Technical Field

[0001] The present disclosure generally relates to showerhead assemblies and showerhead plates. More particularly, the present disclosure relates to showerhead plates for use in semiconductor manufacturing tools. Background Art

[0002] A showerhead assembly can be used to provide uniform gas flow to the wafer during the deposition process. However, due to the arrangement of through holes in the showerhead disk and variations in gas flow velocity, wafer non-uniformity may occur. In particular, areas in the center of the wafer can exhibit different thicknesses relative to the outer edges of the wafer. Summary of the invention

[0003] Various embodiments of the present technology can provide a showerhead assembly including a showerhead disk having a plurality of through holes. Each through hole has a tapered inlet and a tapered outlet. The showerhead disk can include through holes having a first size in a central region and through holes having a second size different from the first size in an outer region.

[0004] According to one aspect, a showerhead disk includes: a top surface and an opposite bottom surface; a central area located at the geometric center of the showerhead disk, wherein the diameter of the central area is in the range of 10 mm to 60 mm; an outer area surrounding the central area and extending to the outer edge of the showerhead disk; a plurality of first through holes located in the central area and extending from the top surface to the bottom surface; a plurality of second through holes located in the outer area and extending from the top surface to the bottom surface; wherein the second through holes have a different shape from the first through holes.

[0005] In one embodiment of the showerhead disk, each second through hole includes a tapered inlet having a first size at a top surface and a tapered outlet having a first size at a bottom surface, and a linear channel connecting the inlet to the outlet.

[0006] In one embodiment of the showerhead disk, the linear channels have a length in the range of 11 mm to 17 mm, a diameter in the range of 0.5 mm to 1.5 mm, and a maximum diameter of the tapered inlet and outlet in the range of 8 mm to 9 mm.

[0007] In one embodiment of the showerhead disk, each first through hole includes a first tapered inlet having a first size at a top surface and a second tapered outlet having a second size at a bottom surface, and a linear channel connecting the inlet to the outlet, wherein the first size is different from the second size.

[0008] In one embodiment of the showerhead disk, the linear channels have a length in the range of 4 mm to 6 mm, a diameter in the range of 0.5 mm to 1.5 mm, and a maximum diameter of the tapered inlet and outlet in the range of 8 mm to 9 mm.

[0009] In one embodiment of the showerhead disk, the linear channels have a length in the range of 8 mm to 11 mm, a diameter in the range of 0.5 mm to 1.5 mm, and a maximum diameter of the tapered inlet and outlet in the range of 8 mm to 90 mm.

[0010] In one embodiment of the showerhead disk, the linear channels have a length in the range of 4 mm to 6 mm, a diameter in the range of 0.5 mm to 1.5 mm, and a maximum diameter of the tapered inlet and outlet in the range of 8 mm to 9 mm.

[0011] In one embodiment of the showerhead disk, the linear channel has a length ranging from 4 mm to 6 mm, a diameter ranging from 0.5 mm to 1.5 mm, a tapered inlet having a first maximum diameter, and an outlet having a second maximum diameter, wherein the second maximum diameter is greater than the first maximum diameter.

[0012] In one embodiment of the showerhead disk, the plurality of first holes has a number of first holes in the range of 18 to 20.

[0013] In one embodiment of the showerhead disk, the plurality of first holes has a number of first holes in the range of 28 to 32.

[0014] According to another aspect, a showerhead disk includes: a top surface and an opposite bottom surface; a central area located at the geometric center of the showerhead disk, wherein the diameter of the central area is in the range of 10 mm to 60 mm; an outer area surrounding the central area and extending to the outer edge of the showerhead disk; a plurality of first through holes located in the central area and extending from the top surface to the bottom surface, wherein each first through hole includes: a first inlet having a first conical shape and a first size on the top surface; a first outlet having a second conical shape and a second size on the bottom surface; and a first linear channel connecting the first inlet to the first outlet; wherein the first size is different from the second size; a plurality of second through holes located in the outer area and extending from the top surface to the bottom surface, wherein each second through hole includes: a second inlet having a first conical shape and a first size on the top surface; a second outlet having a first conical shape and a first size on the bottom surface; and a second linear channel connecting the second inlet to the second outlet.

[0015] In one embodiment of the showerhead disk, the second linear channel has a length ranging from 11 mm to 17 mm, a diameter ranging from 0.5 mm to 1.5 mm, and the second inlet and the second outlet each have a maximum diameter ranging from 8 mm to 9 mm.

[0016] In one embodiment of the showerhead disk, the first linear channel has a length ranging from 4 mm to 6 mm, a diameter ranging from 0.5 mm to 1.5 mm, and the first inlet and the first outlet each have a maximum diameter ranging from 8 mm to 9 mm.

[0017] In one embodiment of the showerhead disk, the first linear channel has a length ranging from 8 mm to 11 mm, a diameter ranging from 0.5 mm to 1.5 mm, and the first inlet and the first outlet each have a maximum diameter ranging from 8 mm to 9 mm.

[0018] In one embodiment of the showerhead disk, the first linear channel has a length ranging from 4 mm to 6 mm, a diameter ranging from 0.5 mm to 1.5 mm, and a maximum diameter of the first inlet and the first outlet ranging from 8 mm to 9 mm.

[0019] In one embodiment of the showerhead disk, the first linear channel has a length ranging from 4 mm to 6 mm, a diameter ranging from 0.5 mm to 1.5 mm, a tapered inlet having a first maximum diameter, and an outlet having a second maximum diameter, wherein the second maximum diameter is greater than the first maximum diameter.

[0020] In one embodiment of the showerhead disk, the plurality of first holes has a number of first holes in the range of 18 to 32.

[0021] According to another aspect, a showerhead assembly includes: a cover including a main inlet configured to be coupled to a gas source; a pressurized space connected to the main inlet and at least partially defined by the cover and a showerhead disk, wherein the showerhead disk includes: a top surface and an opposite bottom surface; a central area located at the geometric center of the showerhead disk, wherein the diameter of the central area is in the range of 10 mm to 60 mm; an outer area surrounding the central area and extending to the outer edge of the showerhead disk; a plurality of first through holes located in the central area and extending from the top surface to the bottom surface, wherein each first through hole includes: a conical first inlet; a conical first outlet; and a first linear channel connecting the inlet and the outlet; and a plurality of second through holes located in the outer area and extending from the top surface to the bottom surface, wherein each second through hole includes: a conical second inlet; a conical second outlet, wherein the second inlet and the second outlet have equal conical sizes; and a second linear channel connecting the inlet and the outlet; wherein the second through hole has a different shape from the first through hole; and wherein the length of the second linear channel is greater than the length of the first linear channel.

[0022] The reaction chamber of claim 18, wherein the plurality of first holes has a number of 18 to 32 first holes.

[0023] The reaction chamber of claim 18, wherein the length of the first linear channel is in the range of 4 mm to 12 mm, and the length of the second linear channel is in the range of 12 mm to 20 mm.

[0024] According to another aspect, a showerhead assembly comprises: a cover including a main inlet configured to be coupled to a gas source; a pressurized space connected to the main inlet and at least partially defined by the cover and a showerhead disk, wherein the showerhead disk comprises: a top surface and an opposite bottom surface; a central area located at the geometric center of the showerhead disk, wherein the diameter of the central area is in the range of 10 mm to 60 mm; an outer area surrounding the central area and extending to the outer edge of the showerhead disk; a plurality of first through holes located in the central area and extending from the top surface to the bottom surface, wherein at least one of the plurality of first through holes comprises an inclined channel extending from a first inlet on the top surface to a tapered first outlet on the bottom surface; and a plurality of second through holes located in the outer area and extending from the top surface to the bottom surface, wherein each second through hole comprises: a tapered second inlet; a tapered second outlet, wherein the second inlet and the second outlet have equal tapered sizes; and a second linear channel connecting the inlet and the outlet; wherein the second through holes have a different shape from the first through holes. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] A more complete understanding of the present technology may be obtained by referring to the detailed description when considered in conjunction with the following illustrative drawings.In the following drawings, like reference numerals refer to like elements and steps throughout the drawings.

[0026] Figure 1 is a block diagram of various embodiments according to the present technology;

[0027] Figure 2 Representatively depicted are reactors according to various embodiments of the present technology;

[0028] Figure 3 shows a top view of a showerhead disk according to various embodiments of the present technology;

[0029] Figure 4 shows an isometric view of a portion of a showerhead disk according to an embodiment of the present technology;

[0030] Figure 5 shows a cross-sectional view of a central region of a showerhead disk according to various embodiments of the present technology;

[0031] Figure 6 shows a cross-sectional view of a central region of a showerhead disk according to an embodiment of the present technology;

[0032] Figure 7 shows a cross-sectional view of a central region of a showerhead disk according to an alternative embodiment of the present technology;

[0033] Figure 8 shows a cross-sectional view of a central region of a showerhead disk according to an alternative embodiment of the present technology;

[0034] Fig. 9A top view of a central region of a showerhead disk is shown in accordance with an alternative embodiment of the present technology;

[0035] Fig.10 Shown according to Fig. 9 A cross-sectional view of a central area of ​​a showerhead disk of an embodiment of the present invention;

[0036] Fig.11 Shown according to Fig. 9 A cross-sectional view of a central region of a showerhead disk of an embodiment of the present invention; and

[0037] Fig.12 Shown according to Fig. 9 Bottom view of a showerhead tray according to an embodiment. DETAILED DESCRIPTION

[0038] The present technology can be described in terms of functional block components and various processing steps. Such functional blocks can be implemented by any number of components configured to perform a specified function and achieve various results. For example, the present technology can use various reaction chambers, bases, valves, precursors, and delivery lines.

[0039] refer to Figure 1 , the exemplary system 100 may include a reactor 105 configured to process a substrate (e.g. Figure 2 225 in the wafer). For example, the reactor 105 can be configured to deposit a film on the wafer, perform etching, etc. The system 100 can also include a source container 110, which is configured to contain or hold chemicals (e.g., precursors or reactants) used in the semiconductor manufacturing process. The chemicals in the source container 110 can initially be solid, liquid, or gaseous. In the case of solid or liquid chemicals, the solid or liquid can be converted to a gas phase. For example, the source container 110 can include various devices and / or systems that convert solids or liquids into gases. The conversion to a gas phase can occur within the source container 110. In addition, the system 100 can further include a gas pipeline 120 to transport gas to the reactor 105. For example, the gas pipeline 120 can be coupled to the source container 110 at a first end and coupled to the reactor 105 at a second end. In various embodiments, the system 100 can further include a valve manifold 115, which is configured to provide mixing of multiple gas sources before entering the reactor 105. The valve manifold 115 may be directly coupled to the reactor 105 and may be coupled to the gas line 120 and configured to receive gas from the source vessel 110 .

[0040] refer to Figure 2 , the reactor 105 can include a reaction chamber 200 and a showerhead assembly 205. The reaction chamber 200 can include a susceptor 220 configured to support a wafer 225.

[0041] In various embodiments, the showerhead assembly 205 can be located above the reaction chamber 200. In an exemplary embodiment, the showerhead assembly 205 can include a cover 210 and a showerhead disk 215. The showerhead assembly 205 can further include a plenum 230 defined by the cover 210 and the showerhead disk 215. The cover 210 can include a main inlet configured to allow gas to enter the plenum 230 from the gas line 120 or the valve manifold 115.

[0042] The showerhead disk 215 may be located above the susceptor 220 or the wafer 225 and may be configured to allow gas to pass through it and enter the reaction chamber 200. For example, referring to Figure 3 and Figure 4 , the showerhead assembly 205 may include a plurality of through holes 315 extending from a first surface 235 (e.g., a top surface) of the showerhead disk 215 to an opposite second surface 240 (e.g., a bottom surface) of the showerhead disk 215. Each through hole may be configured to allow gas to flow out of the showerhead disk 215, i.e., from the top surface 235 to the bottom surface 240. In various embodiments, the showerhead disk 215 may have a total thickness T in the range of 20 to 30 mm.

[0043] In an exemplary embodiment, reference Figure 3 , the showerhead disk 215 may include a central region 300 located at the geometric center of the showerhead disk 215. The showerhead disk 215 may further include an outer region 305 surrounding the central region 300 and extending toward the outer edge 310 of the showerhead disk 215. In various embodiments, the central region 300 may include a plurality of first through holes having a first size, and the outer region 305 may include a plurality of second through holes having a second size, wherein the first through holes are different in size from the second through holes.

[0044] In various embodiments, reference Figure 4-8 , each through hole 315 in the plurality of first through holes and the plurality of second through holes may include an inlet 400 having a tapered shape and an outlet 405 having a tapered shape. Each through hole 315 may also include a linear channel 410 connecting the inlet 400 to the outlet 405. The linear channel 410 may have a uniform diameter. In an exemplary embodiment, the diameter of the linear channel 410 may be in the range of 0.8 mm to 1.5 mm. In an exemplary embodiment, the diameter of the linear channel 410 is 1 mm. In addition, the linear channel 410 may be parallel to the vertical axis Z of the showerhead disk 215.

[0045] refer to Figure 5, each of the plurality of second through holes includes an inlet 400 (a) having a maximum diameter DI1 in the range of 8 mm to 9 mm and an outlet 405 (a) having a maximum diameter DO1 in the range of 8 mm to 9 mm. Each through hole may also include a linear channel 410 (a) having a height h1 in the range of 11 mm to 17 mm and a diameter DC1 in the range of 0.5 mm to 1.5 mm. In addition, the inlet conical shape is the same as the outlet conical shape. In particular, the inclined height CI1 of the conical inlet 400 (a) is the same as the inclined height CO1 of the conical outlet 405 (a).

[0046] In one embodiment, referring to Figure 6 , each of the plurality of first through holes may include an inlet 400 (b) having a maximum diameter DI2 in the range of 8 mm to 9 mm and an outlet 405 (b) having a maximum diameter DO2 in the range of 8 mm to 9 mm. In particular, DI2 is equal to DO2. Each through hole according to the present embodiment may also include a linear channel 410 (b) having a height H2 in the range of 8 mm to 11 mm and a diameter DC2 in the range of 0.5 mm to 1.5 mm. In addition, the inlet taper is different from the outlet taper. In particular, the inclined height CI2 of the tapered inlet 400 (b) is less than the inclined height CO2 of the tapered outlet 405 (b). The inclined height CI2 may be equal to the inclined height CI1. In the present embodiment, the central area 300 may include 31 through holes 400 (b).

[0047] In another embodiment, referring to Figure 7 , each of the plurality of first through holes may include an inlet 400 (c) having a maximum diameter DI3 in the range of 8 mm to 9 mm and an outlet 405 (c) having a maximum diameter DO3 in the range of 12 mm to 15 mm. Each through hole according to the present embodiment may also include a linear channel 410 (c) having a height H3 in the range of 4 mm to 6 mm and a diameter DC3 in the range of 0.5 mm to 1.5 mm. In addition, the inlet taper is different from the outlet taper. In particular, the inclined height CI3 of the tapered inlet 400 (c) is less than the inclined height CO3 of the tapered outlet 405 (c). The inclined height CI3 of the inlet 400 (c) may be equal to the inclined height CI1 of the inlet 400 (a). In the present embodiment, the central area 300 may include 19 through holes 400 (c).

[0048] In another embodiment, referring to Figure 8, each of the plurality of first through holes may include an inlet 400 (d) having a maximum diameter DI4 in the range of 8 mm to 9 mm and an outlet 405 (d) having a maximum diameter DO4 in the range of 8 mm to 9 mm. In particular, DI4 is equal to DO4. Each through hole according to the present embodiment may also include a linear channel 410 (d) having a height H4 in the range of 4 mm to 6 mm and a diameter DC4 in the range of 0.5 mm to 1.5 mm. In addition, the inlet taper is different from the outlet taper. In particular, the inclined height CI4 of the tapered inlet 400 (d) is less than the inclined height CO4 of the tapered outlet 405 (d). The inclined height CI4 of the inlet 400 (d) may be equal to the inclined height CI1 of the inlet 400 (a). In the present embodiment, the central area 300 may include 31 through holes 400 (d).

[0049] In yet another embodiment, referring to Figure 9-12 , the central area 300 may include a plurality of third through holes 920 and a plurality of fourth through holes 905. The outer area 305 may include a plurality of fifth through holes 925. For example, the central area 300 may include 12 third through holes 920 and 6 fourth through holes 905. The central area 300 may further include at least one sixth through hole 900. In this embodiment, the maximum width of the central area 300 is in the range of 30 mm to 60 mm. For example, the distance between the opposing third through holes 920 may be about 40 mm.

[0050] In the present embodiment, each through hole 920 of the plurality of third through holes may include an inlet having a tapered shape at the first surface 235 and an outlet having a tapered shape at the second surface 240. In the present embodiment, a maximum diameter DI5 of the inlet may be smaller than a maximum diameter DO5 of the outlet.

[0051] In this embodiment, each through hole 905 in the plurality of fourth through holes may include a tubular inlet at the first surface 235 and a tapered outlet at the second surface 240. Each through hole 905 includes a channel 1100 having a length extending from the inlet to the outlet and having a uniform diameter along the length. For example, the channel 1100 may have a diameter in the range of 1.0 mm to 1.1 mm. In an exemplary embodiment, the diameter is 1.04 mm. In addition, the channel 1100 may be angled relative to the vertical axis Z and angled inwardly toward the center of the showerhead disk 215.

[0052] In the present embodiment, the sixth through hole 900 may include a tubular inlet at the first surface 235 and a tapered outlet 910 at the second surface 240. The sixth through hole 900 includes a channel 930 having a length extending from the inlet to the outlet 910 and having a uniform diameter along the length. For example, the channel 930 may have a diameter in the range of 1.0 mm to 1.2 mm. In an exemplary embodiment, the diameter is 1.0 mm. The outlet 910 of the sixth through hole 900 may be located at the geometric center of the showerhead disk 215. The channel 930 is angled relative to the vertical axis Z and is angled inwardly toward the outlet 910 and connected to the outlet 910.

[0053] In the foregoing description, the technology has been described with reference to specific exemplary embodiments. The specific embodiments shown and described are illustrations of the technology and its best mode and are not intended to limit the scope of the technology in any way. In fact, for the sake of brevity, the conventional manufacturing, connection, preparation and other functional aspects of the method and system may not be described in detail. In addition, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and / or steps between the various elements. In actual systems, there may be many alternative or additional functional relationships or physical connections.

[0054] The technology has been described with reference to specific exemplary embodiments. However, various modifications and changes may be made without departing from the scope of the technology. The description and drawings are to be regarded as illustrative rather than restrictive, and all such modifications are intended to be included within the scope of the technology. Therefore, the scope of the technology should be determined by the general embodiments described and their legal equivalents, rather than solely by the specific examples described above. For example, the steps described in any method or process embodiment may be performed in any order unless otherwise expressly specified, and are not limited to the explicit order presented in the specific examples. In addition, the components and / or elements described in any device embodiment may be assembled or otherwise operably configured in various arrangements to produce substantially the same results as the technology, and are therefore not limited to the specific configurations described in the specific examples.

[0055] Benefits, other advantages, and solutions to problems have been described above with respect to specific embodiments. However, any benefit, advantage, solution to a problem, or any element that may cause any particular benefit, advantage, or solution to occur or become more significant should not be construed as a critical, required, or essential feature or component.

[0056] The terms "comprises," "comprising," or any variations thereof, are intended to refer to non-exclusive inclusion, such that a process, method, article, composition, or apparatus that includes a list of elements includes not only those elements listed, but may also include other elements not expressly listed or inherent to such process, method, article, composition, or apparatus. Other combinations and / or modifications of the above-described structures, arrangements, applications, proportions, elements, materials, or components used in the practice of the present technology, except those not specifically recited, may be changed or otherwise specially adapted to a particular environment, manufacturing specifications, design parameters, or other operating requirements without departing from the general principles thereof.

[0057] The present technology has been described above with reference to exemplary embodiments. However, changes and modifications may be made to the exemplary embodiments without departing from the scope of the present technology. These and other changes or modifications are intended to be included within the scope of the present technology, as expressed in the following claims.

Claims

1. A shower head tray, comprising: a top surface and an opposing bottom surface; a central region located at the geometric center of the showerhead disk, wherein the diameter of the central region is in the range of 10 mm to 60 mm; an outer region surrounding the central region and extending to the outer edge of the showerhead pan; a plurality of first through holes located in the central region and extending from the top surface to the bottom surface; a plurality of second through holes located within the outer region and extending from the top surface to the bottom surface; The second through hole has a different shape from the first through hole.

2. The showerhead disk according to claim 1, wherein: Each second through hole includes a tapered inlet having a first size at the top surface and a tapered outlet having a first size at the bottom surface, and a linear channel connecting the inlet to the outlet.

3. The showerhead disk according to claim 2, wherein: The linear channel has a length in the range of 11 mm to 17 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the maximum diameter of the tapered inlet and outlet is in the range of 8 mm to 9 mm.

4. The showerhead disk according to claim 1, wherein: Each first through hole includes a first tapered inlet at the top surface having a first size and a second tapered outlet at the bottom surface having a second size, and a linear channel connecting the inlet to the outlet, wherein the first size is different from the second size.

5. The showerhead disk according to claim 4, wherein: The linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the maximum diameter of the tapered inlet and outlet is in the range of 8 mm to 9 mm.

6. The showerhead disk according to claim 4, wherein: The linear channel has a length in the range of 8 mm to 11 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the maximum diameter of the tapered inlet and outlet is in the range of 8 mm to 9 mm.

7. The showerhead disk according to claim 4, wherein: The linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the maximum diameter of the tapered inlet and outlet is in the range of 8 mm to 9 mm.

8. The showerhead disk according to claim 4, wherein: The linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the tapered inlet has a first maximum diameter and the outlet has a second maximum diameter, wherein the second maximum diameter is greater than the first maximum diameter.

9. The showerhead disk according to claim 8, wherein: The plurality of first holes has a number of first holes in the range of 18 to 20.

10. The showerhead disk according to claim 4, wherein: The plurality of first holes has a number of first holes in the range of 28 to 32.

11. A shower head tray, comprising: a top surface and an opposing bottom surface; a central region located at the geometric center of the showerhead disk, wherein the diameter of the central region is in the range of 10 mm to 60 mm; an outer region surrounding the central region and extending toward an outer edge of the showerhead disk; A plurality of first through holes are located in the central region and extend from the top surface to the bottom surface, wherein each first through hole comprises: a first inlet located on the top surface having a first conical shape and a first size; a first outlet at the bottom surface having a second conical shape and a second size; and a first linear channel connecting the first inlet to the first outlet; wherein the first dimension is different from the second dimension; A plurality of second through holes are located in the outer region and extend from the top surface to the bottom surface, wherein each second through hole comprises: a second inlet located on the top surface having a first conical shape and a first size; a second outlet located at the bottom surface having a first conical shape and a first size; and A second linear channel connecting the second inlet to the second outlet.

12. The showerhead disk according to claim 11, wherein: The second linear channel has a length in the range of 11 mm to 17 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the second inlet and the second outlet each have a maximum diameter in the range of 8 mm to 9 mm.

13. The showerhead tray according to claim 11, wherein: The first linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the first inlet and the first outlet each have a maximum diameter in the range of 8 mm to 9 mm.

14. The showerhead tray according to claim 11, wherein: The first linear channel has a length in the range of 8 mm to 11 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the first inlet and the first outlet each have a maximum diameter in the range of 8 mm to 9 mm.

15. The showerhead tray according to claim 11, wherein: The length of the first linear channel is in the range of 4 mm to 6 mm, the diameter is in the range of 0.5 mm to 1.5 mm, and the maximum diameter of the first inlet and the first outlet is in the range of 8 mm to 9 mm.

16. The showerhead tray according to claim 11, wherein: The first linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the tapered inlet has a first maximum diameter and the outlet has a second maximum diameter, wherein the second maximum diameter is greater than the first maximum diameter.

17. The showerhead tray according to claim 11, wherein: The plurality of first holes has a number of first holes in the range of 18 to 32.

18. A shower head assembly, comprising: a cover including a main inlet configured to be coupled to a gas source; a plenum space in communication with the primary inlet and at least partially defined by the cover and the shower head disk, wherein the shower head disk comprises: a top surface and an opposing bottom surface; a central region located at the geometric center of the showerhead disk, wherein the diameter of the central region is in the range of 10 mm to 60 mm; an outer region surrounding the central region and extending to the outer edge of the showerhead pan; A plurality of first through holes are located in the central region and extend from the top surface to the bottom surface, wherein each first through hole comprises: Conical first inlet; a conical first outlet; and a first linear passage connecting the inlet and the outlet; and A plurality of second through holes are located in the outer region and extend from the top surface to the bottom surface, wherein each second through hole comprises: Conical second inlet; a tapered second outlet, wherein the second inlet and the second outlet have equal tapered dimensions; and a second linear passage connecting the inlet and the outlet; wherein the second through hole has a different shape from the first through hole; and The length of the second linear channel is greater than the length of the first linear channel.

19. The reaction chamber of claim 18, wherein: The plurality of first holes has a number of first holes in a range of 18 to 32; and The length of the first linear channel is in the range of 4 mm to 12 mm, and the length of the second linear channel is in the range of 12 mm to 20 mm.

20. A shower head assembly, comprising: a cover including a main inlet configured to be coupled to a gas source; a plenum space in communication with the primary inlet and at least partially defined by the cover and the shower head disk, wherein the shower head disk comprises: a top surface and an opposing bottom surface; a central area, which is located at the geometric center of the sprinkler head disk; an outer region surrounding the central region and extending to the outer edge of the showerhead pan; a plurality of first through holes located in the central region and extending from the top surface to the bottom surface, wherein at least one hole of the plurality of first through holes comprises an inclined passage extending from a first inlet located at the top surface to a tapered first outlet located at the bottom surface; and A plurality of second through holes are located in the outer region and extend from the top surface to the bottom surface, wherein each second through hole comprises: Conical second inlet; a tapered second outlet, wherein the second inlet and the second outlet have equal tapered dimensions; and a second linear passage connecting the inlet and the outlet; The second through hole has a different shape from the first through hole.

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