Optical element cooling device

Abstract

The invention provides an optical element cooling device, which is characterized in that two side surfaces, adjacent to a light reflecting surface, of a plate-shaped optical element are respectively matched with the plate surface of a cooling plate in an attaching and pressing manner, and an elastic clamping mechanism is arranged between a fixed seat on a rack and the cooling plate; the elastic clamping force provided by the elastic clamping mechanism is perpendicular to the heat exchange face, matched with the cooling plate in an attached mode, of the optical element. According to the invention, the optical element and the cooling plate are pressed and matched in an attached manner, so that the optical element is subjected to a uniformly distributed load effect, and uniform heat exchange between the optical element and the cooling plate is ensured. The elastic clamping mechanism can automatically compensate the deformation quantity of the optical element when the optical element is affected by thermal expansion and cold contraction, the relatively constant clamping force on the optical element is kept, and the surface precision of the optical element is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of optical instrument manufacturing, and in particular to an optical element cooling device. Background Art

[0002] As the core component of optical instruments, the surface accuracy of the part that reflects or refracts the light source (also known as the reflection surface accuracy) of the optical element will directly affect the measurement accuracy of the optical instrument. Some optical elements will generate a large heat load when working, which will cause large thermal deformation, thereby reducing the working efficiency and accuracy of the optical instrument. For example, in the field of synchrotron radiation, X-rays irradiating the optical mirror surface will bring huge heat loads to the optical element, and the high temperature generated by the heat load will cause the mirror surface of the optical element to deform. Not only that, when the optical element expands due to heat or contracts due to cooling, the clamping force of the clamping device on the optical element cannot be kept constant, further aggravating the deformation of the optical element.

[0003] In order to solve the above problems, the prior art arranges a cooling clamping device on the optical element, for example, the technical solution disclosed in the patent entitled "A Weak Stress Clamping Structure for Reflectors in Synchrotron Radiation Light Sources" (CN118151326A), wherein the reflector 2 is penetrated with a through hole 3 along the height direction, and a long screw 5 passes through the cooling plate mounting holes 4 on the upper and lower cooling plates 1. The cooling plate mounting holes 4 are stepped, and are provided with a wave plate spring 42 sleeved on the long screw body and a retaining ring 41 of the wave plate spring 42. The screw head and nut 6 of the long screw 5 are both limited in the stepped mounting hole 4. The above solution realizes the elastic clamping of the reflector 2 by arranging the wave plate spring 42, and reduces the deformation of the mirror surface of the reflector caused by the clamping pressure or thermal expansion and contraction. However, the solution requires that a plurality of through holes 3 be arranged on the optical element, and the surface accuracy of the optical element is easily damaged during the drilling process. The elastic force generated by the wave plate spring 42 acts concentratedly on the bottom surface of the mounting hole 4. In fact, the force applied by the wave plate spring 42 to the reflector 2 is still a concentrated load rather than a uniformly distributed load. This concentrated load acting on the side of the reflector 2 will inevitably cause the reflector 2 to warp, and since the surface where the force is applied will inevitably be deformed, this will lead to an obvious difference in the tightness of the fitting between the fitting surfaces that need to be cooled, making it impossible to ensure the uniformity of cooling at various locations on the cooling surface of the reflector 2, which will also aggravate the deformation of the reflecting surface of the reflector 2. Summary of the invention

[0004] The object of the present invention is to provide an optical element cooling device, which ensures that the heat exchange surface of the optical element to be cooled is subjected to a uniformly distributed load to achieve uniform heat exchange.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: an optical element cooling device, a plate-shaped optical element is provided with a reflective surface, and the two side surfaces adjacent to the reflective surface are respectively pressed against the plate surface of the cooling plate, and a cooling pipe is connected to the cooling plate to avoid the projection and reflection areas of the working light source, and an elastic clamping mechanism is arranged between the fixed seat on the frame and the cooling plate, and the elastic clamping force provided by the elastic clamping mechanism is perpendicular to the heat exchange surface of the optical element and the cooling plate.

[0006] The present invention mainly sets the two side surfaces of the optical element to respectively fit and press against the plate surface of the cooling plate, so that the optical element is subjected to a uniform load, thereby ensuring uniform heat exchange between the optical element and the cooling plate. The elastic clamping force provided by the elastic clamping mechanism to the optical element is perpendicular to the heat exchange surface, thereby ensuring the stability of the fit and press between the optical element and the cooling plate, and automatically compensating for the deformation of the optical element when it is affected by thermal expansion and contraction, thereby maintaining a relatively constant clamping force on the optical element and ensuring the surface accuracy of the optical element. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 is an isometric view of the optical element cooling device;

[0008] Figure 2 Front view after removing the rack for the optical element cooling device;

[0009] Figure 3 for Figure 2 Cross-section at AA in the middle;

[0010] Figure 4 Isometric view of a cooling channel. DETAILED DESCRIPTION

[0011] See also Figures 1 to 4 In the optical element cooling device shown, the plate-shaped optical element 10 is provided with a reflective surface, and the two side surfaces adjacent to the reflective surface are respectively pressed against the plate surface of the cooling plate 20 in a fitted manner. The cooling plate 20 is connected with a cooling pipe 30 which is arranged to avoid the projection and reflection areas of the working light source. An elastic clamping mechanism is provided between the fixing seat 50 on the frame 1 and the cooling plate 20. The elastic clamping force provided by the elastic clamping mechanism is perpendicular to the heat exchange surface of the optical element 10 and the cooling plate 20 that fits well.

[0012] In the above solution, a cooling medium is introduced into the cooling pipe 30, such as Figure 1As shown, the cooling medium enters from the liquid inlet 301, passes through the cooling plate 20 to generate heat exchange, and then flows out from the liquid outlet 302 to complete the cycle. The cooling medium can be flexibly selected according to the cooling efficiency requirements of the optical element, such as liquid nitrogen or other coolants. In the working state, the reflective surface of the optical element 10 forms an acute angle with the horizontal plane. The reflective surface is located at the top of the plate-shaped optical element 10. The incident light is irradiated on the reflective surface along the horizontal line direction and then reflected. All components of the cooling device need to be arranged to avoid the projection and reflection areas of the working light source. In order to make the optical element subject to a uniformly distributed load, the two side surfaces of the optical element 10 adjacent to the reflective surface are respectively pressed against the plate surface of the cooling plate 20. This arrangement ensures that the bonding surface of the optical element 10 and the cooling plate 20 can exchange heat evenly. The optical element 10 and the cooling plate 20 are mounted on the fixing seat 50. The elastic clamping force provided by the elastic clamping mechanism between the fixing seat 50 and the cooling plate 20 to the optical element 10 is perpendicular to the heat exchange surface, thereby ensuring the stability of the fit and pressure between the optical element 10 and the cooling plate 20. During the operation of the optical instrument, the irradiation of the light source will bring a large heat load. The temperature of the optical element 10 will inevitably fluctuate during the heat exchange process with the cooling plate 20. The corresponding optical element 10 will also be affected by thermal expansion and contraction. At this time, the elastic clamping mechanism can automatically compensate for the deformation of the optical element 10, and always maintain a relatively constant clamping force on the optical element 10, thereby ensuring the surface accuracy of the reflective surface of the optical element 10.

[0013] A more specific solution is that the cross section of the fixing seat 50 is groove-shaped, the optical element 10 and the cooling plate 20 are installed in the groove cavity of the groove-shaped fixing seat 50, the groove of the fixing seat 50 faces the projection and reflection area of ​​the working light source, and the elastic clamping mechanism is composed of a spring group 40, one end of the spring group 40 abuts on the plate surface on the opposite side of the heat exchange surface of the cooling plate 20, and the other end abuts on the inner wall surface of the groove of the fixing seat 50, and the abutment position of the elastic unit of the spring group 40 and the cooling plate 20 is evenly distributed on the side plate surface. In the above solution, the elastic unit of the spring group 40 is preferably a disc spring. When the optical element 10 is affected by thermal expansion and contraction, the disc spring of the spring group 40 shrinks or stretches in a direction perpendicular to the heat exchange surface, automatically compensating for the deformation of the optical element 10, and maintaining a relatively constant clamping force on the optical element.

[0014] The cooling device is not suitable for working in the atmosphere, because there is a lot of water vapor in the atmosphere, and the cooling pipe 30, the cooling plate and other components will be frosted and iced during the cooling process, affecting the use of the equipment. Therefore, the cooling medium is not introduced into the device during the installation process. After the installation of the optical element 10 is completed, the entire mechanism is placed in the vacuum chamber, and then the cooling medium is introduced into the cooling pipe 30.

[0015] In order to facilitate the adjustment of the angle of the reflective surface of the optical element 10, the cooling pipe 30 is fixed to the frame 1 through the pipe clamp 60, and the cooling pipe 30 connected to the liquid inlet and / or the liquid outlet of the cooling plate 20 is provided with a bellows section 31. In the above scheme, the bellows section 31 can be arranged at the corner of the cooling pipe 30, or on the straight pipe section of the cooling pipe 30. The bellows section 31 is a flexible pipe, and the angle of the reflective surface of the optical element 10 can be adjusted by adjusting the length or curvature of the bellows section 31.

[0016] Preferably, the side of the fixing seat 50 facing away from the reflective surface of the optical element 10 is connected with an adjustment seat 70, the adjustment seat 70 is connected to the frame 1, and an adjustment screw is provided on the adjustment seat 70. The bellows section 31 is provided on the straight section of the cooling pipe 30, and the length direction of the bellows section 31 is perpendicular to or at an angle to the reflective surface of the optical element 10. The posture of the fixing seat 50 is changed by adjusting the screw, and the angle of the reflective surface of the optical element 10 is adjusted. When the posture of the fixing seat 50 is adjusted, the bellows section 31 is extended or contracted accordingly, and the operation is simple and efficient.

[0017] In order to improve work efficiency, at least two optical elements 10 are provided, a cooling plate 20 is provided between two adjacent optical elements 10, and the heat exchange surfaces of the optical element 10 and the cooling plate 20 are arranged parallel to each other, and an elastic clamping mechanism is arranged on the outer plate surfaces of the two outermost cooling plates 20. In the above scheme, the bottom surface of the optical element 10 and the bottom surface of the groove of the fixing seat 50 can be arranged in close contact or at intervals. Since the mass of the optical element 10 is relatively small, the need for its fixed position can be met by only relying on the clamping of the cooling plate 20.

[0018] Regarding the connection scheme of the cooling pipe 30, different cooling plates 20 can be connected in series or in parallel through the cooling pipe 30. When connected in series, the arrangement of the cooling pipe 30 is more stable, and when connected in parallel, it can further ensure that the heat exchange efficiency of each cooling plate 20 and the optical element 10 is consistent.

[0019] As a preferred solution, set screws 51 penetrating the groove wall are provided on both sides or one side of the groove wall of the groove-shaped fixing seat 50, and a pressing block 52 is provided between the spring group 40 and the groove wall of the fixing seat 50, and the end of the set screw 51 presses against the pressing block 52. The pre-tightening force of the spring group 40 is adjusted by adjusting the position of the pressing block 52 through the set screw 51, thereby adjusting the clamping force of the cooling plate 20 on the optical element 10, and the operation is convenient and reliable.

[0020] In order to improve the cooling efficiency of the cooling plate 20, the heat exchange surfaces between the optical element 10 and the cooling plate 20 are all smooth surfaces, and the heat exchange surfaces are bonded by a heat conductive medium. In the above scheme, the heat conductive medium can be selected from thermal conductive glue, etc. The smooth surface of the heat exchange surface is conducive to the uniformity of heat exchange and the uniform distribution of the load on the optical element 10. However, the cost of fine processing is high, and it is difficult to achieve a completely ideal smooth surface on the processed surface. Therefore, filling thermal conductive glue between the heat exchange surfaces can reduce the difficulty of processing and have a more uniform heat transfer effect.

[0021] Preferably, a pressure plate 53 is provided on the top surface of the groove walls on both sides of the fixed seat 50. The plate surface of the pressure plate 53 extends to the groove cavity area of ​​the fixed seat 50 and abuts against the top surfaces of the two outermost cooling plates 20. The fixed seat 50 is connected to a heat insulation plate 80 on the side away from the groove. The heat insulation plate 80 is installed on the frame 1. At least two heat insulation plates 80 are provided and the plate surfaces are parallel to each other. Two adjacent heat insulation plates 70 are connected by heat insulation columns. The heat insulation columns in the gap between each layer of plates are distributed at the corners around the heat insulation plate 80. In the above scheme, the cooperation between the pressure plate 53 and the fixed seat 50 can realize the limitation of the outer cooling plate 20. The spaced arrangement of multiple layers of heat insulation plates 80 can reduce the heat exchange between the cooling plate 20 and other components such as the frame 1, and further improve the heat exchange efficiency of the cooling medium.

Claims

1. An optical element cooling device, characterized in that: The plate-shaped optical element (10) is provided with a reflective surface, and the two side surfaces adjacent to the reflective surface are respectively pressed against the plate surface of the cooling plate (20) in a close-fitting manner; the cooling plate (20) is connected with a cooling pipe (30) arranged to avoid the projection and reflection area of ​​the working light source; an elastic clamping mechanism is provided between a fixing seat (50) on the frame (1) and the cooling plate (20); the elastic clamping force provided by the elastic clamping mechanism is perpendicular to the heat exchange surface of the optical element (10) and the cooling plate (20) in a close-fitting manner.

2. The optical element cooling device according to claim 1, characterized in that: The cross section of the fixing seat (50) is groove-shaped, the optical element (10) and the cooling plate (20) are installed in the groove cavity of the groove-shaped fixing seat (50), the groove opening of the fixing seat (50) faces the projection and reflection area of ​​the working light source, and the elastic clamping mechanism is composed of a spring group (40), one end of the spring group (40) abuts against the plate surface on the side opposite to the heat exchange surface of the cooling plate (20), and the other end abuts against the inner wall surface of the groove of the fixing seat (50), and the abutment position of the elastic unit of the spring group (40) and the cooling plate (20) is evenly distributed on the side plate surface.

3. The optical element cooling device according to claim 1, characterized in that: The cooling pipe (30) is fixed on the frame (1) via a pipe clamp (60), and the cooling pipe (30) connected to the liquid inlet and / or liquid outlet of the cooling plate (20) is provided with a corrugated pipe section (31).

4. The optical element cooling device according to claim 1, characterized in that: The cooling plates (20) are connected in series via cooling pipes (30).

5. The optical element cooling device according to claim 1, characterized in that: The cooling plates (20) are connected in parallel via cooling pipes (30).

6. The optical element cooling device according to claim 1, characterized in that: At least two optical elements (10) are provided, a cooling plate (20) is provided between two adjacent optical elements (10), and the heat exchange surfaces of the optical elements (10) and the cooling plates (20) are arranged parallel to each other, and an elastic clamping mechanism is arranged on the outer plate surfaces of the two outermost cooling plates (20).

7. The optical element cooling device according to claim 2, characterized in that: The groove walls on both sides or one side of the groove-shaped fixing seat (50) are provided with set screws (51) penetrating the groove walls, a pressing block (52) is provided between the spring assembly (40) and the groove wall of the fixing seat (50), and the end of the set screw (51) is pressed against the pressing block (52).

8. The optical element cooling device according to claim 3, characterized in that: An adjustment seat (70) is connected to a side of the fixing seat (50) facing away from the reflective surface of the optical element (10); the adjustment seat (70) is connected to the frame (1); an adjustment screw is arranged on the adjustment seat (70); the bellows section (31) is arranged on a straight section of the cooling pipe (30); and the length direction of the bellows section (31) is perpendicular to or at an angle to the reflective surface of the optical element (10).

9. The optical element cooling device according to claim 1 or 6, characterized in that: The heat exchange surfaces between the optical element (10) and the cooling plate (20) are both smooth surfaces, and the heat exchange surfaces are bonded together by a heat conducting medium.

10. The optical element cooling device according to claim 2, characterized in that: A pressure plate (53) is provided on the top surface of the groove walls on both sides of the fixed seat (50). The plate surface of the pressure plate (53) extends to the groove cavity area of ​​the fixed seat (50) and abuts against the top surfaces of the two outermost cooling plates (20). A heat insulation plate (80) is connected to the side of the fixed seat (50) away from the groove. The heat insulation plate (80) is installed on the frame (1). At least two heat insulation plates (80) are provided and the plate surfaces are parallel to each other. Two adjacent heat insulation plates (70) are connected by heat insulation columns. The heat insulation columns in the gap between each layer of plates are distributed at the corners around the heat insulation plate (80).

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