Reflector adjustment device and motion stage positioning device

Abstract

The present application provides a reflector adjustment device and a motion stage positioning device, wherein the reflector adjustment device includes a bracket seat, a first flexible member, a first adjustment component, a second flexible member, a second adjustment component and a reflector. The reflector adjustment device of the present application, by means of the adjustment effect of the first adjustment component on the first flexible member, and by means of the adjustment effect of the second adjustment component on the second flexible member, at least realizes the multi-degree-of-freedom micro- and precise adjustment of the displacement of the reflector along the n direction and the rotation along the Rm direction, that is, at least realizes the micro-precise adjustment of the distance and angle of the reflector relative to the laser interferometer. The reflector adjustment device of the present application can realize multi-degree-of-freedom micro-precise adjustment of the reflector's posture, which helps to solve the problem of the reflector maintaining its own posture under high acceleration and deceleration and the problem of thermal deformation of the reflector caused by the laser heat source, improves the posture accuracy of the reflector, ensures that the laser interferometer does not lose light during measurement, and improves the positioning accuracy of the motion stage.

Description

Technical Field

[0001] The present application relates to the technical field of integrated circuit equipment manufacturing, and in particular to a reflector adjustment device and a motion stage positioning device. Background Art

[0002] In semiconductor motion stage systems, laser interferometers are usually used to perform precise position measurements in three directions (X, Y, and Z axes) in order to achieve precise control and measurement of the motion stage. This measurement technology is essential to ensure accurate positioning of the motion stage in the horizontal direction (X and Y axes, usually defined as the optical axis direction of the projection objective). In this system, the horizontal beam of the laser interferometer is reflected onto the horizontal reflector under the measurement frame, and then reflected back to the interferometer along the original optical path. The reference beam returns directly to the interferometer. Therefore, the position and posture of the reflector will affect the accuracy and precision of the motion measurement.

[0003] In the existing technology, when installing a reflector on a moving platform, after determining the installation position, the reflector can be installed at the corresponding position. The reflector may not be able to maintain its own posture for a long time under the high acceleration and deceleration of the moving platform, affecting the measurement accuracy. In addition, laser irradiation on the reflector will bring thermal stress, and the resulting thermal deformation will also affect the measurement accuracy. Summary of the invention

[0004] The purpose of the present application is to provide a reflector adjustment device and a motion stage positioning device, wherein the reflector adjustment device can realize multi-degree-of-freedom micro-precision adjustment of the reflector's posture, which helps to solve the problem of the reflector maintaining its own posture under high acceleration and deceleration, and the problem of thermal deformation of the reflector caused by laser heat source, improve the reflector's posture accuracy, further ensure that there is no light loss during laser interferometer measurement, and improve the positioning accuracy of the motion stage.

[0005] In a first aspect, the reflector adjustment device provided in the present application includes a bracket seat, a first flexible member, a first adjustment component, a second flexible member, a second adjustment component and a reflector.

[0006] Among them, the bracket seat includes a first end and a second end, and a mounting surface is arranged between the first end and the second end; the extension direction of the bracket seat is defined as the m direction, the direction perpendicular to the m direction and parallel to the mounting surface of the bracket seat is defined as the n direction, the direction perpendicular to the mounting surface is defined as the z direction, the direction of rotation around the m direction axis is defined as the Rm direction, the direction of rotation around the n direction axis is defined as the Rn direction, and the direction of rotation around the z direction axis is defined as the Rz direction.

[0007] The first flexible member is mounted on the mounting surface of the bracket seat and close to the first end; the first flexible member has flexibility to move along the Rm direction and flexibility to move along the n direction relative to the bracket seat. The first adjustment component is mounted on the first flexible member and is used to adjust the displacement of the first flexible member along the n direction and the rotation amount along the Rm direction.

[0008] The second flexible member is installed on the mounting surface of the bracket seat and close to the second end; the second flexible member has flexibility to move along the Rm direction relative to the bracket seat. The second adjustment component is installed on the second flexible member and is used to adjust the rotation amount of the second flexible member along the Rm direction. The reflector is a strip-shaped structure, one end of which is installed on the first flexible member and the other end is installed on the second flexible member. The reflective surface of the reflector extends along the m direction.

[0009] In an implementable solution, the first flexible member includes an outer frame, an A substrate, an A support plate, an A1 flexible connection structure, and an A2 flexible connection structure. The outer frame is mounted on the mounting surface of the bracket seat, the A substrate is placed inside the outer frame, one end of the A substrate along the m direction is connected to the inner side of the outer frame through the A1 flexible connection structure, the A support plate is located on the upper side of the A substrate, and the middle position of the bottom surface of the A support plate is connected to the middle position of the upper surface of the A substrate through the A2 flexible connection structure; wherein the A1 flexible connection structure enables the A substrate to have the flexibility to move in the n direction relative to the outer frame, and the A2 flexible connection structure enables the A support plate to have the flexibility to move in the Rm direction relative to the A substrate.

[0010] In an operative solution, the first adjustment assembly includes two A1 top holders and two A2 top holders. An A1 top holder is installed on the corresponding outer frames on both sides of the A substrate in the n direction, and the A1 top holder can move forward along the n direction. The two A1 top holders are respectively supported on the two side walls of the A substrate in the n direction. The two A2 top holders pass through the A substrate from the side away from the A support plate in the z direction, and the two A2 top holders can move forward along the z direction and support the bottom surface of the A support plate. The two A2 top holders are located on both sides of the A2 flexible connection structure in the n direction.

[0011] In an implementable solution, the reflector adjustment device includes an A drive device, and the bottom end side of each A2 top holding member is connected to an A drive device, and the A drive device is used to drive the A2 top holding members to feed along the z direction respectively.

[0012] In an implementable solution, the outer frame is a U-shaped structure, and the A substrate is placed inside the outer frame and close to the opening side of the U-shaped structure. The first flexible member also includes an A1 torsion spring, the middle spring end of the A1 torsion spring is installed on the outer frame, and the two ends of the A1 torsion spring are respectively connected to the two sides of the opening of the U-shaped structure to apply a force to the two sides of the opening of the U-shaped structure to approach each other. The first flexible member also includes an A2 torsion spring, the middle spring end of the A2 torsion spring is installed on the A substrate, and the two ends of the A2 torsion spring are respectively connected to the two sides of the A support plate along the n direction to apply a force to the two sides of the A support plate along the n direction to approach the upper surface of the A substrate.

[0013] In an implementable solution, the second flexible component includes a B substrate, a B support plate, and a B flexible connection structure. The B substrate is mounted on the mounting surface of the bracket seat, the B support plate is on the upper side of the B substrate, and the middle position of the bottom surface of the B support plate is connected to the middle position of the upper surface of the B substrate through the B flexible connection structure. Among them, the B flexible connection structure enables the B support plate to have the flexibility to move in the Rm direction relative to the B substrate. The second adjustment component includes two B top holding members, the two B top holding members pass through the B substrate from the side away from the B support plate along the z direction, and the two B top holding members can perform feeding movement along the z direction and hold on the bottom surface of the B support plate, and the two B top holding members are on both sides of the B flexible connection structure along the n direction.

[0014] In an implementable solution, the reflector adjustment device includes a B driving device, and the bottom end side of each B top holding member is connected to a B driving device, and the B driving device is used to drive the B top holding members to feed along the z direction respectively.

[0015] In an implementable solution, the second flexible member also includes a B torsion spring, the middle spring end of the B torsion spring is installed on the B support plate, and the two ends of the B torsion spring are respectively connected to the two sides of the B support plate along the n direction to give the two sides of the B support plate along the n direction a force approaching the upper surface of the B substrate.

[0016] In an implementable scheme, the reflector adjustment device includes a total driving device, and the bottom ends of the A2 top holding member and the B top holding member at the same n direction coordinate position are connected to the same total driving device, and the total driving device is used to drive the A2 top holding member and the B top holding member at the same side along the n direction to feed simultaneously along the z direction.

[0017] In an implementable solution, the reflector adjustment device includes an A differential structure and a B differential structure. For the A2 top holding member and the B top holding member at the same n-direction coordinate position, the A2 top holding member is connected to the overall driving device through the A differential structure, and the B top holding member is connected to the overall driving device through the B differential structure. The output of the overall driving device is converted into different feed amounts of the A2 top holding member and the B top holding member along the z direction by the A differential structure and the B differential structure.

[0018] In an implementable solution, the reflector adjustment device further includes an Invar seat, the Invar seat is installed on the surface of the first flexible member and the surface of the second flexible member, and the reflector is installed on the Invar seat. The reflector adjustment device further includes a cutting piece, the cutting piece is arranged between the first flexible member and the Invar seat, and the cutting piece is arranged between the second flexible member and the Invar seat.

[0019] In an practicable solution, the support seat includes a bottom plate and a vertical plate structure disposed on the bottom plate and extending from a first end to a second end. The reflector adjustment device also includes at least one preload member, one end of which is mounted on the top side of the vertical plate structure, and the other end is pressed against the top surface of the reflector. The preload member is a leaf spring structure, and a convex point structure is provided on the surface of one side of the reflector pressed against the leaf spring structure. An elastic gasket is provided between the preload member and the reflector.

[0020] In an implementable scheme, the reflector adjustment device also includes a third adjustment component, which is installed on the vertical plate structure; the third adjustment component includes at least two C top holding members; multiple C top holding members are arranged along the m direction and installed on the vertical plate structure, the C top holding members pass through the vertical plate structure along the n direction, and the C top holding members can feed along the n direction and hold on the back of the reflector.

[0021] In a second aspect, the present application provides a motion stage positioning device, comprising a fixed seat and the two aforementioned reflector adjustment devices. The fixed seat has a fixed surface extending along mutually perpendicular x-directions and y-directions, and the direction perpendicular to the fixed surface is defined as the z-direction. The two reflector adjustment devices are respectively referred to as a first reflector adjustment device and a second reflector adjustment device.

[0022] The first reflector adjustment device is installed on the fixed surface of the fixed seat, the n direction of the first reflector adjustment device coincides with the x direction of the fixed seat, the m direction of the first reflector adjustment device coincides with the y direction of the fixed seat, and the z direction of the first reflector adjustment device coincides with the z direction of the fixed seat. The second reflector adjustment device is installed on the fixed surface of the fixed seat, the n direction of the second reflector adjustment device coincides with the y direction of the fixed seat, the m direction of the second reflector adjustment device coincides with the x direction of the fixed seat, and the z direction of the second reflector adjustment device coincides with the z direction of the fixed seat.

[0023] Compared with the prior art, the beneficial effects of the present application include at least the following:

[0024] The technical solution of the present application designs a reflector adjustment device, and with the help of the adjustment effect of the first adjustment component on the first flexible part and the adjustment effect of the second adjustment component on the second flexible part, at least a multi-degree-of-freedom micro- and precise adjustment of the displacement of the reflector along the n direction and the rotation of the reflector along the Rm direction is achieved, that is, at least a micro- and precise adjustment of the distance and angle of the reflector relative to the laser interferometer is achieved.

[0025] The reflector adjustment device of the present application can make micro-precise adjustments to the multi-degree-of-freedom position of the reflector, which helps to reduce the difficulty of adjusting the position of the reflector, solves the problem of the reflector maintaining its own position for a long time under high acceleration and deceleration, and helps to solve the problem of thermal deformation of the reflector, improves the position accuracy of the reflector, further ensures that there is no light loss during laser interferometer measurement, and improves positioning accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a structural diagram of a reflector adjustment device according to an embodiment of the present application.

[0028] Figure 2 for Figure 1 Structural diagram of the middle reflector adjustment device after removing the reflector.

[0029] Figure 3 The figure is a top view of a first flexible member according to an embodiment of the present application.

[0030] Figure 4 It is a side view structural diagram of a first flexible member according to an embodiment of the present application.

[0031] Figure 5 It is a side view structural diagram of a second flexible member according to an embodiment of the present application.

[0032] Figures 6 to 9 Structural diagrams of different reflectors.

[0033] Fig.10 It is a structural diagram of a reflector adjustment device with an anti-overturning structure according to an embodiment of the present application.

[0034] Fig.11 For Fig.10 Cross-sectional view along the m direction at the middle anti-overturning structure.

[0035] Fig.12 For Fig.11 Enlarged view of the middle anti-overturning structure.

[0036] Fig.13 It is a structural diagram of a reflector adjustment device with an independent driving device according to an embodiment of the present application.

[0037] Fig.14 The structure diagram of a reflector adjustment device with a total driving device according to an embodiment of the present application is shown.

[0038] Fig.15 The figure is a schematic diagram of an adjustment principle having a total drive device and a differential structure according to an embodiment of the present application.

[0039] Fig.16 The figure is a top view of a first flexible member having a torsion spring structure according to an embodiment of the present application.

[0040] Fig.17 It is a side view structural diagram of a first flexible member with a torsion spring structure according to an embodiment of the present application.

[0041] Fig.18 It is a side structural diagram of a second flexible member with a torsion spring structure according to an embodiment of the present application.

[0042] Fig.19 The figure is a diagram showing a connection structure between a reflector with a heat-conducting structure and a flexible member according to an embodiment of the present application.

[0043] Fig. 20 It is a structural diagram of a motion table positioning device according to an embodiment of the present application.

[0044] Fig.21 It is a structural diagram of another motion table positioning device according to an embodiment of the present application.

[0045] Fig. 22 It is a structural diagram of the connection between the support seat and the fixing seat of the reflector adjustment device according to an embodiment of the present application.

[0046] In the figure: 100, reflector adjustment device; 1, bracket seat; 101, bottom plate; 102, vertical plate structure; 2, first flexible member; 21, outer frame; 22, A substrate; 23, A support plate; 24, A1 flexible connection structure; 25, A2 flexible connection structure; 26, A1 torsion spring; 27, A2 torsion spring; 3, first adjustment assembly; 31, A1 top holding member; 32, A2 top holding member; 4, second flexible member; 41, B substrate; 42, B support plate; 43, B flexible connection structure; 44 , B torsion spring; 5, second adjustment component; 51, B top support; 6, reflector; 61, vertical reflective surface; 62, inclined reflective surface; 7, third adjustment component; 71, C top support; 8, preload member; 81, convex point structure; 82, elastic gasket; 9, Invar seat; 10, blade; 11, A drive device; 12, B drive device; 13, total drive device; 200, fixed seat; 201, blade layer; 301, first reflector adjustment device; 302, second reflector adjustment device. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0049] like Figure 1 As shown, the present application first provides a reflector adjustment device 100 , including a bracket seat 1 , a first flexible member 2 , a first adjustment component 3 , a second flexible member 4 , a second adjustment component 5 and a reflector 6 .

[0050] The bracket seat 1 includes a first end and a second end, and a mounting surface is arranged between the first end and the second end. The extending direction of the bracket seat 1 is defined as the m direction, the direction perpendicular to the m direction and parallel to the mounting surface of the bracket seat 1 is defined as the n direction, the direction perpendicular to the mounting surface is defined as the z direction, the direction of rotation around the m direction axis is defined as the Rm direction, the direction of rotation around the n direction axis is defined as the Rn direction, and the direction of rotation around the z direction axis is defined as the Rz direction.

[0051] The first flexible member 2 is mounted on the mounting surface of the bracket seat 1 and close to the first end. The first flexible member 2 has flexibility to move along the Rm direction and flexibility to move along the n direction relative to the bracket seat 1. The first adjustment component 3 is mounted on the first flexible member 2 and is used to adjust the displacement of the first flexible member 2 along the n direction and the rotation amount along the Rm direction.

[0052] The second flexible member 4 is mounted on the mounting surface of the bracket seat 1 and close to the second end, and has the flexibility to move along the Rm direction relative to the bracket seat 1. The second adjustment component 5 is mounted on the second flexible member 4 and is used to adjust the rotation amount of the second flexible member 4 along the Rm direction.

[0053] The reflector 6 is in a strip-shaped structure, one end of which is mounted on the first flexible member 2, and the other end of which is mounted on the second flexible member 4. The reflective surface of the reflector 6 extends along the m direction.

[0054] It should be noted that the descriptions of "feed amount" and "rotation amount" appearing in this article include direction and value, and should not be understood as adjustment amounts along a single, fixed direction.

[0055] When the reflector adjustment device of the present application is in use, the bracket seat 1 of the reflector adjustment device is installed to a predetermined position (for example, a moving table or a mounting seat on a moving table), and the laser interferometer is turned on for measurement testing. If the current position and posture of the reflector 6 causes measurement inaccuracy, the first flexible part 2 is adjusted by the first adjustment component 3 and / or the second flexible part 4 is adjusted by the second adjustment component 5 according to the corresponding measurement results, thereby achieving multi-degree-of-freedom precise fine-tuning of the position and posture of the reflector 6, so that the position and posture of the reflector 6 meets the measurement requirements and improves the positioning accuracy.

[0056] Specifically, the first adjustment component 3 adjusts the displacement of the first flexible member 2 along the n direction to adjust the displacement of the reflector 6 along the n direction. The first adjustment component 3 adjusts the rotation of the first flexible member 2 along the Rm direction, and the second adjustment component 5 adjusts the rotation of the second flexible member 4 along the Rm direction to adjust the rotation of the reflector 6 along the Rm direction.

[0057] In summary, the technical solution of the present application designs a reflector adjustment device, and with the help of the adjustment effect of the first adjustment component 3 on the first flexible member 2, and with the help of the adjustment effect of the second adjustment component 5 on the second flexible member 4, at least the multi-degree-of-freedom micro- and precise adjustment of the displacement of the reflector 6 along the n direction and the rotation along the Rm direction is achieved, that is, at least the micro-precise adjustment of the distance and angle of the reflector 6 relative to the laser interferometer is achieved. The multi-degree-of-freedom micro-precise adjustment of the position and posture of the reflector 6 by the reflector adjustment device of the present application helps to reduce the difficulty of adjusting the position and posture of the reflector 6, improve the accuracy of the position and posture of the reflector 6, further ensure that the laser interferometer does not lose light during measurement, and improve the positioning accuracy. At the same time, the adjustment of the position and posture of the reflector 6 by the reflector adjustment device is not limited to adjusting the position and posture of the reflector 6 during the installation process, but is also applicable to adjusting the position and posture of the reflector during subsequent use.

[0058] For example, when the reflector 6 follows the motion platform to perform high acceleration and deceleration for a long time, it is difficult for the reflector 6 to maintain its original state. At this time, the measurement light loss problem may occur, resulting in inaccurate positioning. At this time, the motion platform can be stopped, the first flexible member 2 can be adjusted by the first adjustment component 3, and the second flexible member 4 can be adjusted by the second adjustment component 5 to achieve micro-precise adjustment of the distance and angle of the reflector 6 relative to the laser interferometer, so that the position and posture of the reflector 6 can meet the measurement requirements again and ensure the positioning accuracy. It can be seen from this that the reflector adjustment device of the present application can enable the reflector 6 to maintain the stability of its own posture for a long time under the high acceleration and deceleration of the motion platform through regular or irregular micro-precise position and posture adjustments.

[0059] For another example, during the use of the reflector 6, laser irradiation on the reflector 6 will bring thermal stress. Long-term laser irradiation causes thermal deformation of the reflector 6, which will also affect the measurement accuracy. At this time, the motion platform can be stopped, and the first flexible member 2 can be adjusted by the first adjustment component 3 according to the deformation of the reflector 6 itself, and the second flexible member 4 can be adjusted by the second adjustment component 5, thereby improving the excessive deformation of the reflector 6, so that the position and posture of the reflector 6 (especially the position and posture of the reflecting surface) can meet the measurement requirements again and ensure the positioning accuracy. It can be seen that the reflector adjustment device of the present application can solve the problem of thermal deformation of the reflector 6 caused by the laser heat source.

[0060] like Fig. 20 and Fig.21 As shown, the present application also provides a motion stage positioning device, including a fixing base 200 and two aforementioned reflector adjustment devices, which are respectively referred to as a first reflector adjustment device 301 and a second reflector adjustment device 302 .

[0061] The first reflector adjusting device 301 is mounted on the fixed surface of the fixing seat 200, the n direction of the first reflector adjusting device 301 coincides with the x direction of the fixing seat 200, the m direction of the first reflector adjusting device 301 coincides with the y direction of the fixing seat 200, and the z direction of the first reflector adjusting device 301 coincides with the z direction of the fixing seat 200. The second reflector adjusting device 302 is mounted on the fixed surface of the fixing seat 200, the n direction of the second reflector adjusting device 302 coincides with the y direction of the fixing seat 200, the m direction of the second reflector adjusting device 302 coincides with the x direction of the fixing seat 200, and the z direction of the second reflector adjusting device 302 coincides with the z direction of the fixing seat 200.

[0062] The motion stage positioning device provided in the present application can realize the measurement and positioning of the motion stage in the xOy plane by integrating two reflector adjustment devices, namely the first reflector adjustment device 301 and the second reflector adjustment device 302. At the same time, the two reflector adjustment devices can respectively perform multi-degree-of-freedom precise posture fine-tuning on their own reflectors 6, thereby improving the posture accuracy of the reflector 6 corresponding to each set of reflector adjustment devices, further ensuring that the laser interferometer does not lose light during measurement, and improving the positioning accuracy of the motion stage when it moves in the xOy plane and the z direction.

[0063] In order to explain the structure, working principle, etc. of the reflector adjustment device and the motion stage positioning device in more detail, the present application provides the following embodiments. It should be noted that the technical features and technical solutions in the following embodiments can be used in combination with each other without conflict. Embodiment 1

[0064] like Figure 1 As shown, this embodiment provides a reflector adjustment device, including a bracket seat 1, a first flexible member 2, a first adjustment component 3, a second flexible member 4, a second adjustment component 5 and a reflector 6.

[0065] The bracket seat 1 includes a first end and a second end, and a mounting surface is arranged between the first end and the second end. The extending direction of the bracket seat 1 is defined as the m direction, the direction perpendicular to the m direction and parallel to the mounting surface of the bracket seat 1 is defined as the n direction, the direction perpendicular to the mounting surface is defined as the z direction, the direction of rotation around the m direction axis is defined as the Rm direction, the direction of rotation around the n direction axis is defined as the Rn direction, and the direction of rotation around the z direction axis is defined as the Rz direction.

[0066] The first flexible member 2 is mounted on the mounting surface of the bracket seat 1 and close to the first end. The first flexible member 2 has flexibility to move along the Rm direction and flexibility to move along the n direction relative to the bracket seat 1. The first adjustment component 3 is mounted on the first flexible member 2 and is used to adjust the displacement of the first flexible member 2 along the n direction and the rotation amount along the Rm direction.

[0067] The second flexible member 4 is mounted on the mounting surface of the bracket seat 1 and close to the second end, and has the flexibility to move along the Rm direction relative to the bracket seat 1. The second adjustment component 5 is mounted on the second flexible member 4 and is used to adjust the rotation amount of the second flexible member 4 along the Rm direction.

[0068] The reflector 6 is in a strip-shaped structure, one end of which is mounted on the first flexible member 2, and the other end of which is mounted on the second flexible member 4. The reflective surface of the reflector 6 extends along the m direction.

[0069] In this embodiment, the matching structure of the second flexible member 4 and the second adjustment assembly 5 can be provided in multiple groups. Figure 1 As shown, the matching structure of the second flexible member 4 and the second adjustment assembly 5 is provided with two groups, wherein the second flexible member 4 of one group is provided at the end of the reflector 6, and the second flexible member 4 of the other group is provided at the middle position of the reflector 6, so as to provide better support when the reflector 6 is in a certain position, and to help perform local adjustment according to the thermal deformation of the reflector 6.

[0070] When the reflector adjustment device of this embodiment is used, the support seat 1 of the reflector adjustment device is installed to a predetermined position (such as a moving platform or a mounting seat on the moving platform), and then the position of the reflector 6 is adjusted.

[0071] In general, because the first flexible part 2 has more degrees of freedom than the second flexible part 4, one end of the reflector 6 can be first fixed on the second flexible part 4 to make it a fixed end, and the other end of the reflector 6 is placed on the first flexible part 2 but not fixed to form a free end. At this time, it can be ensured that the adjustment of the reflector 6 has a certain constraint basis, which helps to improve the stability and accuracy of the adjustment process, and can also use the first flexible part 2 to achieve relatively multi-degree-of-freedom posture adjustment of the reflector 6.

[0072] In some cases, the reflector 6 can be installed and fixed on the first flexible part 2 and the second flexible part 4, and then the posture can be fine-tuned. At this time, the adjustment range will sacrifice some adjustment amount compared to the adjustment method in which one end is fixed and the other end is free. This situation is more suitable for installation scenarios with smaller component manufacturing errors and installation errors.

[0073] In this embodiment, when the position of the reflector 6 is adjusted, the displacement of the first flexible member 2 along the n direction is adjusted by the first adjustment component 3, so as to adjust the displacement of the reflector 6 along the n direction. The rotation of the first flexible member 2 along the Rm direction is adjusted by the first adjustment component 3, and the rotation of the second flexible member 4 along the Rm direction is adjusted by the second adjustment component 5, so as to adjust the rotation of the reflector 6 along the Rm direction.

[0074] In summary, it can be seen that the reflector adjustment device of the aforementioned embodiment, with the help of the adjustment effect of the first adjustment component 3 on the first flexible part 2 and the adjustment effect of the second adjustment component 5 on the second flexible part 4, at least achieves multi-degree-of-freedom micro- and precise adjustment of the displacement of the reflector 6 along the n direction and the rotation amount along the Rm direction, that is, at least achieves micro- and precise adjustment of the distance and angle of the reflector 6 relative to the laser interferometer.

[0075] The reflector adjustment device of this embodiment can make multi-degree-of-freedom micro-precise adjustments to the position of the reflector 6, which helps to reduce the difficulty of adjusting the position of the reflector 6. When the reflector 6 is thermally deformed, it is easier to correct the position of the reflector 6, which helps to solve the problem of thermal deformation of the reflector caused by the laser heat source, improve the position accuracy of the reflector 6, further ensure that there is no light loss during laser interferometer measurement, and improve positioning accuracy.

[0076] In addition, in subsequent use, if the laser interferometer has a light loss problem, the position of the first flexible part 2 can be adjusted by the first adjustment component 3, and / or the position of the second flexible part 4 can be adjusted by the second adjustment component 5, thereby achieving the position adjustment of the reflector 6 relative to the laser interferometer without the need to disassemble or replace the reflector 6. This helps solve the problem of the reflector maintaining its own posture for a long time under high acceleration.

[0077] In this embodiment, if Figure 3 and Figure 4As shown, the first flexible member 2 may include an outer frame 21, an A substrate 22, an A support plate 23, an A1 flexible connection structure 24, and an A2 flexible connection structure 25. The outer frame 21 is mounted on the mounting surface of the bracket seat 1, the A substrate 22 is placed inside the outer frame 21, one end of the A substrate 22 along the m direction is connected to the inside of the outer frame 21 through the A1 flexible connection structure 24, the A support plate 23 is on the upper side of the A substrate 22, and the middle position of the bottom surface of the A support plate 23 is connected to the middle position of the upper surface of the A substrate 22 through the A2 flexible connection structure 25.

[0078] The A1 flexible connection structure 24 enables the A substrate 22 to have the flexibility to move in the n direction relative to the outer frame 21 , and the A2 flexible connection structure 25 enables the A support plate 23 to have the flexibility to move in the Rm direction relative to the A substrate 22 .

[0079] It should be noted that the attached Figure 3 and Figure 4 The structure of the A1 flexible connection structure 24 and the A2 flexible connection structure 25 shown in the figure is only a feasible implementation scheme. The A1 flexible connection structure 24 and the A2 flexible connection structure 25 can also adopt other structural forms, which will not be listed one by one here.

[0080] In this embodiment, if Figure 3 and Figure 4 As shown, the first adjustment assembly 3 may include two A1 top holding members 31 and two A2 top holding members 32. An A1 top holding member 31 is respectively installed on the outer frame 21 corresponding to the two sides of the A substrate 22 in the n direction, and the A1 top holding member 31 can be fed along the n direction. The two A1 top holding members 31 are respectively held on the two side walls of the A substrate 22 in the n direction. The two A2 top holding members 32 pass through the A substrate 22 from the side away from the A support plate 23 along the z direction, and the two A2 top holding members 32 can be fed along the z direction and held on the bottom surface of the A support plate 23. The two A2 top holding members 32 are located on both sides of the A2 flexible connection structure 25 along the n direction.

[0081] It should be noted that the feeding of the A1 supporting member 31 and the A2 supporting member 32 can be achieved through a spiral feeding structure, a linear feeding structure, or other forms of feeding structures, which are not specifically limited here.

[0082] like Figure 3 As shown, by adjusting the feed amount of the two A1 supporting members 31 along the n direction respectively, the coordinate position of the A substrate 22 along the n direction can be adjusted, and the coordinate position of the A support plate 23 along the n direction will also change with the change of the coordinate position of the A substrate 22 along the n direction. Therefore, the coordinate position of the reflector 6 installed on the A support plate 23 along the n direction is adjusted.

[0083] like Figure 4As shown, by adjusting the feed amount of the two A2 top supports 32 on both sides of the A2 flexible connection structure 25 along the z direction, the A support plate 23 can be moved along the Rm direction relative to the A substrate 22, thereby adjusting the rotation amount of the A support plate 23 along the Rm direction. As a result, the rotation amount of the reflector 6 installed on the A support plate 23 along the Rm direction is adjusted.

[0084] In this embodiment, if Figure 5 As shown, the second flexible member 4 may include a B substrate 41, a B support plate 42, and a B flexible connection structure 43. The B substrate 41 is mounted on the mounting surface of the bracket seat 1, the B support plate 42 is located on the upper side of the B substrate 41, and the middle position of the bottom surface of the B support plate 42 is connected to the middle position of the upper surface of the B substrate 41 through the B flexible connection structure 43. Among them, the B flexible connection structure 43 enables the B support plate 42 to have the flexibility to move in the Rm direction relative to the B substrate 41.

[0085] It should be noted that the attached Figure 5 The structure of the B flexible connection structure 43 shown in the figure is only a feasible implementation scheme, and the B flexible connection structure 43 can also adopt other structural forms, which will not be listed one by one here.

[0086] In this embodiment, if Figure 5 As shown, the second adjustment component 5 may include two B top holding members 51, and the two B top holding members 51 pass through the B base plate 41 from the side away from the B support plate 42 along the z direction, and the two B top holding members 51 can feed along the z direction and be held on the bottom surface of the B support plate 42, and the two B top holding members 51 are located on both sides of the B flexible connection structure 43 along the n direction.

[0087] It should be noted that the feeding of the B holding member 51 can be achieved through a spiral feeding structure, a linear feeding structure, or other forms of feeding structures, which are not specifically limited here.

[0088] like Figure 5 As shown, by adjusting the feed amount of the two B top holding members 51 on both sides of the B flexible connection structure 43 along the z direction respectively, the B support plate 42 can be moved along the Rm direction relative to the B substrate 41, thereby adjusting the rotation amount of the B support plate 42 along the Rm direction. As a result, the rotation amount of the reflector 6 installed on the B support plate 42 along the Rm direction is adjusted.

[0089] In addition, it should be noted that when the first adjustment component 3 adjusts the rotation amount of the first flexible part 2 along the Rm direction, it will cause a small displacement along the z direction. When the second adjustment component 5 adjusts the rotation amount of the second flexible part 4 along the Rm direction, it will also cause a small displacement along the z direction. In this way, a slight adjustment of the rotation amount of the reflector 6 along the Rn direction can be achieved.

[0090] Specifically, in the first adjustment assembly 3, when the two A2 top supports 32 are fed along the z direction, in addition to causing the A support plate 23 to move relative to the A substrate 22 along the Rm direction, the coordinate position of the A support plate 23 in the z direction will also change slightly, thereby causing the coordinate position of the reflector 6 at the connection with the A support plate 23 to change in the z direction. In the second adjustment assembly 3, when the two B top supports 51 are fed along the z direction, in addition to causing the B support plate 42 to move relative to the B substrate 41 along the Rm direction, the coordinate position of the B support plate 42 in the z direction will also change slightly, thereby causing the coordinate position of the reflector 6 at the connection with the B support plate 42 to change in the z direction. Under this comprehensive adjustment, different displacements are generated at both ends of the reflector 6 along the z direction, so that a slight adjustment of the rotation amount of the reflector 6 along the Rn direction can be achieved.

[0091] Based on the above technical solutions of this embodiment, it can be known that the reflector adjustment device of this embodiment can realize precise micro-adjustment of the displacement of the reflector 6 along the n direction, the rotation along the Rm direction, and the rotation along the Rn direction.

[0092] In this embodiment, the first flexible member 2 and the second flexible member 4 can be made of a material with strong elastic deformation ability, such as spring steel, rubber, etc., to avoid stress deformation of the reflector 6 under thermal stress and cracking caused by internal stress concentration.

[0093] In this embodiment, the reflector 6 may include a vertical reflective surface perpendicular to the n direction, and / or include an inclined reflective surface that forms a predetermined angle with the mOn plane formed by the m direction and the n direction.

[0094] For example, see Figure 6 , the reflector 6 may only include a vertical reflective surface. Figure 7 , the reflector 6 may only include an inclined reflective surface. Figure 8 and Fig. 9 The reflector 6 can be composed of two independent reflector structures bonded together. Figure 8 In the embodiment, the reflector 6 with the inclined reflective surface is bonded to the surface of the reflector 6 with the vertical reflective surface. Fig. 9 In the embodiment, the reflector 6 with the inclined reflective surface and the reflector 6 with the vertical reflective surface are stacked together to form an integral reflector, so as to reduce the overturning moment and ensure the stability of the overall structure of the reflector 6. Embodiment 2

[0095] This embodiment provides a reflector adjustment device. Different from the first embodiment, the reflector adjustment device of this embodiment is provided with a structure to prevent the reflector 6 from tipping over.

[0096] Specifically, Fig.10 As shown, the support seat 1 of the reflector adjustment device of this embodiment includes a bottom plate 101 and a vertical plate structure 102 arranged on the bottom plate 101 and extending from a first end to a second end, and the reflective surface of the reflector 6 faces away from the vertical plate structure 102. The reflector adjustment device may also include at least one pre-tightening member 8, one end of the pre-tightening member 8 is mounted on the top side of the vertical plate structure 102, and the other end is pressed on the top surface of the reflector 6.

[0097] If the center of mass of the reflector 6 is not above the flexible member, the reflector 6 will generate a certain degree of overturning moment, especially in the high acceleration and high deceleration stages of the motion platform, which will generate a large overturning moment, which may cause the reflector 6 to have a pitch angle relative to the bracket 1, thereby causing positioning measurement errors and affecting the motion accuracy of the motion platform. Figure 8 The reflector shown, whose center of mass displacement is not above the flexible member, will have a large overturning moment.

[0098] In this embodiment, the preload member 8 presses on the reflector 6, increasing the downward preload force and the static friction between the reflector 6 and the flexible member below, thereby suppressing the overturning moment of the reflector 6, ensuring that the reflector 6 does not tilt during operation and ensuring the measurement positioning accuracy.

[0099] In this embodiment, if Fig.10 As shown, a preload member 8 is provided at a corresponding position above each flexible member (first flexible member 2, second flexible member 4), and the preload force is substantially consistent with the upward support force of the flexible member unit in the z direction and appears in pairs to avoid causing additional torque to the reflector 6.

[0100] In this embodiment, if Figure 11-12 As shown, the preload member 8 can be a leaf spring structure, and a convex point structure 81 is provided on the surface of the leaf spring structure pressed on one side of the reflector 6. The convex point structure 81 makes the preload member 8 and the reflector 6 in point contact form, improving the poor contact and uneven pressure that may occur in surface contact.

[0101] In this embodiment, if Fig.11 As shown, an elastic gasket 82 can be arranged between the preload member 8 and the reflector 6. The preload force can be adjusted by increasing or decreasing the thickness of the precision gasket. The elastic gasket 82 can be made of plastics such as PEEK and POM. In addition to adjusting the preload force, the elastic gasket 82 can increase the force bearing area to avoid damaging the reflector. Embodiment 3

[0102] This embodiment provides a reflector adjustment device. Different from the second embodiment, the reflector adjustment device of this embodiment further includes a third adjustment component 7 .

[0103] Specifically, Figure 2As shown, the third adjustment component 7 is mounted on the vertical plate structure 102. The third adjustment component 7 is supported on the back side of the reflector 6 (opposite to the reflective surface) and is used to adjust the displacement of the reflector 6 along the n direction and the rotation along the Rz direction.

[0104] In this embodiment, if Figure 2 As shown, the third adjustment assembly 7 may include at least two C-holding members 71. A plurality of C-holding members 71 are arranged along the m direction and installed on the vertical plate structure 102. The C-holding members 71 pass through the vertical plate structure 102 along the n direction, and the C-holding members 71 can be fed along the n direction and held on the back of the reflector 6.

[0105] The C-supporting members 71 are fed in the same direction to adjust the displacement of the reflector 6 along the n direction. The C-supporting members 71 on both sides are fed in different directions to adjust the rotation of the reflector 6 along the Rz direction.

[0106] In this embodiment, if Figure 2 As shown, a C-top support 71 is installed at a position of the vertical plate structure 102 corresponding to the installation position of the first flexible member 2 , and a C-top support 71 is installed at a position of the vertical plate structure 102 corresponding to the installation position of the second flexible member 4 to avoid causing additional torque to the reflector 6 . Embodiment 4

[0107] This embodiment also provides a reflector adjustment device. Different from any one of the first to third embodiments, this embodiment is provided with a driving device for independently driving the A2 supporting member 32 or the B supporting member 51 .

[0108] Specifically, in this embodiment, Fig.13 As shown, the reflector adjustment device may include an A drive device 11, and the bottom end side of each A2 top holding member 32 is connected to an A drive device 11, and the A drive device 11 is used to drive the A2 top holding member 32 to feed along the z direction. The reflector adjustment device may also include a B drive device 12, and the bottom end side of each B top holding member 51 is connected to a B drive device 12, and the B drive device 12 is used to drive the B top holding member 51 to feed along the z direction.

[0109] Among them, the A drive device 11 or the B drive device 12 can be a linear displacement device such as a cylinder, a hydraulic cylinder, an electric push rod, a screw module, a piezoelectric actuator, etc. Through the A drive device 11 or the B drive device 12, the electric feed adjustment of the A2 top holding member 32 or the B top holding member 51 can be realized, and it is easier to control the feed amount and feed accuracy, so that the position adjustment of the reflector is more accurate. Embodiment 5

[0110] This embodiment also provides a reflector adjustment device. Different from the fourth embodiment, the A2 support member 32 and the B support member 51 in this embodiment are driven as a whole to achieve feeding.

[0111] Specifically, Fig.14 As shown, the reflector adjustment device of this embodiment may include a total driving device 13, and the bottom ends of the A2 top holding member 32 and the B top holding member 51 at the same n direction coordinate position are connected to the same total driving device 13, and the total driving device 13 is used to drive the A2 top holding member 32 and the B top holding member 51 at the same side along the n direction to feed simultaneously along the z direction.

[0112] In this embodiment, the overall driving device 13 can be a linear displacement device such as a cylinder, a hydraulic cylinder, an electric push rod, a screw module, a piezoelectric actuator, etc., and the overall driving device 13 can be connected to the A2 top holding member 32 and the B top holding member 51 by means of an intermediate member (such as a long connecting plate).

[0113] In this embodiment, if Fig.15 As shown, the reflector adjustment device may also include an A differential structure and a B differential structure. For the A2 top holding member 32 and the B top holding member 51 at the same n-direction coordinate position, the A2 top holding member 32 is connected to the overall drive device 13 via the A differential structure, and the B top holding member 51 is connected to the overall drive device 13 via the B differential structure. The output of the overall drive device 13 is converted into different feed amounts of the A2 top holding member 32 and the B top holding member 51 along the z direction by the A differential structure and the B differential structure. In this embodiment, the A differential structure or the B differential structure may be implemented by a differential consisting of a gear set.

[0114] Among them, the total drive device 13 cooperates with the A differential structure and the B differential structure to realize the synchronous and different-scale feed amount adjustment of the A2 top holding member 32 and the B top holding member 51 at the same n-direction coordinate position. First, the A2 top holding member 32 and the B top holding member 51 of this embodiment realize feeding by means of overall drive, and the centralized control strategy facilitates the realization of synchronous and coordinated actions, improves the response speed of each top holding member, and is conducive to reducing the adjustment lag of one top holding member relative to another top holding member, so as to adjust to the desired posture more quickly and accurately. Secondly, this design simplifies the structure, reduces the number of components, saves space, and makes the entire device more compact. In addition, the total drive device reduces the number of drive devices, reduces maintenance points and maintenance volume, helps to improve the reliability of the system, and can reduce costs to a certain extent. Embodiment 6

[0115] This embodiment also provides a reflector adjustment device. Different from any one of the first to fifth embodiments, a torsion spring pre-tightening structure is provided in the first flexible member 2 and the second flexible member 4 of this embodiment.

[0116] Specifically, in this embodiment, Fig.16 As shown, the outer frame 21 of the first flexible member 2 may be a U-shaped structure, and the A substrate 22 is placed inside the outer frame 21 and close to the opening side of the U-shaped structure. The first flexible member 2 may also include an A1 torsion spring 26, the middle spring end of the A1 torsion spring 26 is mounted on the outer frame 21, and the two ends of the A1 torsion spring 26 are respectively connected to the two sides of the opening of the U-shaped structure to give the two sides of the opening of the U-shaped structure a force to approach each other, increase the preload force, and ensure the stability of the position during adjustment.

[0117] In this embodiment, if Fig.17 As shown, the first flexible member 2 may further include an A2 torsion spring 27, the middle spring end of the A2 torsion spring 27 being mounted on the A substrate 22, and the two ends of the A2 torsion spring 27 being respectively connected to both sides of the A support plate 23 along the n direction, so as to give the A support plate 23 a force along the n direction to move both sides toward the upper surface of the A substrate 22, thereby increasing the preload force and ensuring the stability of the position during adjustment.

[0118] In this embodiment, if Fig.18 As shown, the second flexible member 4 may further include a B torsion spring 44, the middle spring end of the B torsion spring 44 is mounted on the B support plate 42, and the two ends of the B torsion spring 44 are respectively connected to the two sides of the B support plate 42 along the n direction, so as to give the two sides of the B support plate 42 along the n direction a force to approach the upper surface of the B substrate 41, thereby increasing the preload force and ensuring the stability of the position during adjustment. Embodiment 7

[0119] This embodiment provides a reflector adjustment device. Different from any one of the first to sixth embodiments, a special heat transfer structure is provided at the connection between the flexible part and the reflector of the reflector adjustment device of this embodiment.

[0120] Specifically, Fig.19 As shown, the reflector adjustment device further includes an Invar seat 9, which is mounted on the surface of the first flexible member 2 and the surface of the second flexible member 4, and the reflector 6 is mounted on the Invar seat 9. In addition, the reflector adjustment device further includes a cutting piece 10, which is arranged between the first flexible member 2 and the Invar seat 9, and between the second flexible member 4 and the Invar seat 9.

[0121] In this embodiment, the reflector 6 can transfer part of the heat to the Invar seat 9 to reduce the thermal deformation of the reflector 6. Since the linear expansion coefficient of the Invar material is small, the thermal deformation of the Invar seat 9 is also small, thereby minimizing the change in thermal stress of the reflector 6 itself.

[0122] Furthermore, since the thermal resistance of the blade material is low and the heat conduction effect is good, adding the blade 10 below the invar seat 9 can conduct the heat source out in time and reduce the change of the thermal stress of the reflector 6 itself to a certain extent.

[0123] In addition, the blade 10 is a soft metal that can be completely fitted to the surface and even embedded in the mounting structure. When the reflector adjustment device is used in a vacuum environment, it can also achieve good heat transfer and conduction effects. Embodiment 8

[0124] This embodiment provides a motion stage positioning device, which uses any one of the reflector adjustment devices in embodiments one to seven.

[0125] Specifically, Fig. 20 and Fig.21 As shown, the motion stage positioning device of this embodiment includes a fixing seat 200 and two reflector adjustment devices.

[0126] The fixing seat 200 has a fixing surface extending along the x direction and the y direction perpendicular to each other, and the direction perpendicular to the fixing surface is defined as the z direction. The two reflector adjustment devices are respectively referred to as the first reflector adjustment device 301 and the second reflector adjustment device 302.

[0127] The first reflector adjusting device 301 is mounted on the fixed surface of the fixing seat 200, the n direction of the first reflector adjusting device 301 coincides with the x direction of the fixing seat 200, the m direction of the first reflector adjusting device 301 coincides with the y direction of the fixing seat 200, and the z direction of the first reflector adjusting device 301 coincides with the z direction of the fixing seat 200. The second reflector adjusting device 302 is mounted on the fixed surface of the fixing seat 200, the n direction of the second reflector adjusting device 302 coincides with the y direction of the fixing seat 200, the m direction of the second reflector adjusting device 302 coincides with the x direction of the fixing seat 200, and the z direction of the second reflector adjusting device 302 coincides with the z direction of the fixing seat 200.

[0128] In this embodiment, if Fig. 20 As shown, the reflectors 6 of the first reflector adjusting device 301 and the second reflector adjusting device 302 can both be reflectors with vertical reflective surfaces.

[0129] In this embodiment, if Fig.21 As shown, the reflector 6 of the first reflector adjusting device 301 may be a reflector with a vertical reflective surface, and the reflector 6 of the second reflector adjusting device 302 may be a reflector with a combination of a vertical reflective surface and an inclined reflective surface.

[0130] In this embodiment, if Fig. 22As shown, a lamella layer 201 may be disposed at the junction of the support seat 1 and the fixing seat 200 of the reflector adjustment device to enhance the heat conduction effect.

[0131] In this embodiment, the fixing seat 200 and the bracket seat 1 of the reflector adjustment device are preferably made of the same material. In this way, when they expand due to heat, the materials are the same and the expansion coefficients are consistent, thereby reducing the impact on the reflector 6.

[0132] The above description is only a partial embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A reflector adjustment device, characterized in that: include: A bracket seat (1) comprises a first end and a second end, and a mounting surface is provided between the first end and the second end; The extension direction of the support seat (1) is defined as the m direction, the direction perpendicular to the m direction and parallel to the mounting surface of the support seat (1) is defined as the n direction, the direction perpendicular to the mounting surface is defined as the z direction, the direction of rotation around the axis in the m direction is defined as the Rm direction, the direction of rotation around the axis in the n direction is defined as the Rn direction, and the direction of rotation around the axis in the z direction is defined as the Rz direction; A first flexible member (2) is mounted on the mounting surface of the support seat (1) and close to the first end; the first flexible member (2) has flexibility to move along the Rm direction and flexibility to move along the n direction relative to the support seat (1); A first adjustment component (3) is mounted on the first flexible member (2) and is used to adjust the displacement of the first flexible member (2) along the n direction and the rotation amount along the Rm direction; A second flexible member (4) is mounted on the mounting surface of the bracket seat (1) and close to the second end; the second flexible member (4) has the flexibility to move along the Rm direction relative to the bracket seat (1); A second adjustment component (5) is mounted on the second flexible member (4) and is used to adjust the rotation amount of the second flexible member (4) along the Rm direction; A reflector (6) having a strip-shaped structure, one end of which is mounted on the first flexible member (2) and the other end of which is mounted on the second flexible member (4), and a reflective surface of the reflector (6) extends along the m direction; The first flexible member (2) comprises an outer frame (21), an A substrate (22), an A support plate (23), an A1 flexible connection structure (24), and an A2 flexible connection structure (25); the outer frame (21) is mounted on a mounting surface of the bracket seat (1); the A substrate (22) is placed inside the outer frame (21); one end of the A substrate (22) along the m direction is connected to the inside of the outer frame (21) via the A1 flexible connection structure (24); the A support plate (23) is placed inside the outer frame (21); The A1 flexible connection structure (24) enables the A substrate (22) to have the flexibility to move in the n direction relative to the outer frame (21), and the A2 flexible connection structure (25) enables the A support plate (23) to have the flexibility to move in the Rm direction relative to the A substrate (22); The first adjustment component (3) comprises two A1 top holding members (31) and two A2 top holding members (32); one A1 top holding member (31) is respectively mounted on the outer frame (21) corresponding to the two sides of the A substrate (22) in the n direction, and the A1 top holding member (31) can perform feeding movement along the n direction, and the two A1 top holding members (31) respectively hold the two side walls of the A substrate (22) in the n direction; the two A2 top holding members (32) pass through the A substrate (22) from the side away from the A support plate (23) in the z direction, and the two A2 top holding members (32) can perform feeding movement along the z direction and hold the bottom surface of the A support plate (23), and the two A2 top holding members (32) are located on both sides of the A2 flexible connection structure (25) in the n direction; The second flexible member (4) comprises a B substrate (41), a B support plate (42), and a B flexible connection structure (43); the B substrate (41) is mounted on the mounting surface of the bracket seat (1), the B support plate (42) is located on the upper side of the B substrate (41), and the middle position of the bottom surface of the B support plate (42) is connected to the middle position of the upper surface of the B substrate (41) via the B flexible connection structure (43); wherein the B flexible connection structure (43) enables the B support plate (42) to have the flexibility to move in the Rm direction relative to the B substrate (41); The second adjustment assembly (5) comprises two B top holding members (51); the two B top holding members (51) pass through the B base plate (41) from the side away from the B support plate (42) along the z direction, and the two B top holding members (51) can move in a feeding manner along the z direction and hold the bottom surface of the B support plate (42), and the two B top holding members (51) are located on both sides of the B flexible connection structure (43) along the n direction.

2. The reflector adjustment device according to claim 1, characterized in that: It comprises an A drive device (11), the bottom end side of each A2 top holding member (32) is connected to an A drive device (11), and the A drive device (11) is used to drive the A2 top holding member (32) to feed along the z direction.

3. The reflector adjustment device according to claim 1, characterized in that: The outer frame (21) is in a U-shaped structure, and the A substrate (22) is placed inside the outer frame (21) and close to the opening side of the U-shaped structure; The first flexible member (2) further comprises an A1 torsion spring (26), wherein a middle spring end of the A1 torsion spring (26) is mounted on the outer frame (21), and two ends of the A1 torsion spring (26) are respectively connected to two sides of the opening of the U-shaped structure, so as to exert a force on the two sides of the opening of the U-shaped structure to move closer to each other; The first flexible member (2) further comprises an A2 torsion spring (27), wherein a middle spring end of the A2 torsion spring (27) is mounted on the A substrate (22), and two ends of the A2 torsion spring (27) are respectively connected to two sides of the A support plate (23) along the n direction, so as to exert a force on the two sides of the A support plate (23) along the n direction to move closer to the upper surface of the A substrate (22).

4. The reflector adjustment device according to claim 1, characterized in that: It comprises a B driving device (12), wherein the bottom end side of each B top holding member (51) is connected to a B driving device (12), and the B driving device (12) is used to drive the B top holding member (51) to feed along the z direction.

5. The reflector adjustment device according to claim 1, characterized in that: The second flexible member (4) further comprises a B torsion spring (44), wherein the middle spring end of the B torsion spring (44) is mounted on the B support plate (42), and the two ends of the B torsion spring (44) are respectively connected to two sides of the B support plate (42) along the n direction, so as to exert a force on the two sides of the B support plate (42) along the n direction to approach the upper surface of the B substrate (41).

6. The reflector adjustment device according to claim 1, characterized in that: The invention comprises a total driving device (13), wherein the bottom ends of the A2 top holding member (32) and the B top holding member (51) at the same n-direction coordinate position are connected to the same total driving device (13), and the total driving device (13) is used to drive the A2 top holding member (32) and the B top holding member (51) at the same side along the n-direction to feed simultaneously along the z-direction.

7. The reflector adjustment device according to claim 6, characterized in that: It comprises an A differential structure and a B differential structure, wherein for the A2 top holding member (32) and the B top holding member (51) at the same n-direction coordinate position, the A2 top holding member (32) is connected to the overall drive device (13) via the A differential structure, and the B top holding member (51) is connected to the overall drive device (13) via the B differential structure; The output of the total driving device (13) is converted by the A differential structure and the B differential structure into different feed amounts of the A2 top holding member (32) and the B top holding member (51) along the z direction.

8. The reflector adjustment device according to claim 1, characterized in that: The reflector adjustment device further comprises an Invar seat (9), the Invar seat (9) being mounted on the surface of the first flexible member (2) and the surface of the second flexible member (4), respectively, and the reflector (6) being mounted on the Invar seat (9); The reflector adjustment device further comprises a cutting piece (10), wherein the cutting piece (10) is arranged between the first flexible member (2) and the Invar seat (9), and the cutting piece (10) is arranged between the second flexible member (4) and the Invar seat (9).

9. The reflector adjustment device according to any one of claims 1 to 8, characterized in that: The support seat (1) comprises a bottom plate (101) and a vertical plate structure (102) arranged on the bottom plate (101) and extending from a first end to a second end; The reflector adjustment device further comprises at least one pre-tightening member (8), one end of the pre-tightening member (8) being mounted on the top side of the vertical plate structure (102) and the other end being pressed on the top surface of the reflector (6); The preload member (8) is a leaf spring structure, and the leaf spring structure is pressed against a surface of one side of the reflector (6) to provide a convex point structure (81); An elastic gasket (82) is provided between the pre-tightening member (8) and the reflector (6).

10. The reflector adjustment device according to claim 9, characterized in that: It also includes a third adjustment component (7), wherein the third adjustment component (7) is installed on the vertical plate structure (102); The third adjustment assembly (7) comprises at least two C-supporting members (71); A plurality of the C-holding members (71) are arranged along the m direction and mounted on the vertical plate structure (102); the C-holding members (71) pass through the vertical plate structure (102) along the n direction; and the C-holding members (71) can move forward along the n direction and hold the back of the reflector (6).

11. A sports table positioning device, characterized in that: include: The fixing seat (200) has a fixing surface extending along an x-direction and a y-direction perpendicular to each other, and a direction perpendicular to the fixing surface is defined as a z-direction; Two reflector adjustment devices according to any one of claims 1 to 10, respectively referred to as a first reflector adjustment device (301) and a second reflector adjustment device (302); Wherein, the first reflector adjusting device (301) is mounted on a fixing surface of the fixing seat (200), the n direction of the first reflector adjusting device (301) coincides with the x direction of the fixing seat (200), the m direction of the first reflector adjusting device (301) coincides with the y direction of the fixing seat (200), and the z direction of the first reflector adjusting device (301) coincides with the z direction of the fixing seat (200); The second reflector adjusting device (302) is mounted on a fixing surface of the fixing seat (200); the n direction of the second reflector adjusting device (302) coincides with the y direction of the fixing seat (200); the m direction of the second reflector adjusting device (302) coincides with the x direction of the fixing seat (200); and the z direction of the second reflector adjusting device (302) coincides with the z direction of the fixing seat (200).

Images