A pipeline vibration reduction method for photolithography machine

Abstract

The present invention discloses a pipeline vibration reduction method for a photolithography machine, and belongs to the field of photolithography machines. In view of the problems of poor pipeline vibration reduction effect and high cost in existing photolithography machines, the present invention provides a pipeline vibration reduction method for a photolithography machine, which includes determining a first vibration zone, which is an area in the pipeline where the amplitude of vibration exceeds a first threshold; determining the vibration amplitude and vibration frequency of the first vibration zone, and setting the vibration amplitude exceeding the second threshold as a high-amplitude vibration zone; setting a dynamic vibration absorber in at least one high-amplitude vibration zone; the natural frequency of the dynamic vibration absorber matches the vibration frequency of the corresponding high-amplitude vibration zone. The present invention first selects the first vibration zone through preliminary screening, and then obtains an accurate and reliable high-amplitude vibration zone by finely measuring the first vibration zone, thereby determining the installation position of the dynamic vibration absorber; the operation is simple, which can not only ensure that the dynamic vibration absorber can achieve the best vibration reduction effect, but also avoid waste of resources to a certain extent.

Description

Technical Field

[0001] The present invention belongs to the technical field of photolithography machines, and more specifically, relates to a pipeline vibration reduction method for photolithography machines. Background Art

[0002] In existing photolithography machines, in order to ensure that the exposure system has relatively stable dynamic performance, active vibration dampers are usually configured for vibration isolation. The part supported above the active vibration damper is called the internal world, which includes many key subsystems such as the objective lens and the measurement system. In order to provide the necessary high-purity water and air to the internal world subsystem, more pipelines will enter the internal world from the external world. The frequent stretching of the pipeline will cause the internal world to be affected by the pulling force. The vibration damper needs to continuously apply thrust to offset the deviation caused by the pulling force of the pipeline, thereby generating unnecessary heat, causing the vibration reduction performance to deteriorate, affecting the exposure stability, and causing photolithography machine failure in severe cases. Currently, pipelines are usually fixed with rolling strips or pipe clamps. This method is limited by the size of the surrounding space, and the vibration reduction effect is accidental; and the pulling force and area of ​​the pipeline can only be qualitatively identified, and its dynamic parameters cannot be effectively identified, and it cannot be eliminated in principle.

[0003] Corresponding improvements have also been made to the above-mentioned problems, such as Chinese patent application number CN202223549705.8, published on April 25, 2023. The patent discloses a pipeline layout adjustment device. The pipeline layout adjustment device includes a first pipe clamp, a second pipe clamp and a third pipe clamp. The first pipe clamp is provided with multiple layers of first guide clamps, the second pipe clamp is provided with multiple layers of second guide clamps, and the third pipe clamp is provided with multiple layers of third guide clamps. The extension direction of the second guide clamp is the X direction, the arrangement direction of each layer of the second guide clamp is the Y direction, and the arrangement direction of the multiple layers of the second guide clamp is the Z direction; the first guide clamp and the second guide clamp are both located in the XZ plane, and each layer of the first guide clamp is arranged along the Y direction. The shortcomings of this patent are: although it can reduce the influence of the pipeline pulling force on the shock absorber, the structural composition is complex, and the maintenance and installation of multiple pipe clamps are relatively cumbersome.

[0004] Another example is Chinese patent application number CN202210776520.6, which was published on August 2, 2022. The patent discloses a distributed variable damping composite vibration reduction system and vibration reduction method based on LoRa communication, performs modal analysis and harmonic response analysis based on finite element technology, and uses the vibration isolator selection software in the centralized control platform to analyze the vibration isolation effect, which jointly guides the selection of vibration isolators. The present invention also designs spring magnetic fluid composite vibration isolators and rubber magnetic fluid vibration isolators for power equipment and pipelines respectively, and uses monitoring equipment integrated with LoRa wireless transmission technology to transmit data to the centralized control platform. The centralized control platform realizes online observation, online setting, and online regulation of parameters, establishes a mathematical relationship model between stiffness and current, and uses PLC for targeted programming according to control requirements. Through PID feedback control, an automatic vibration control system is established to realize intelligent and visual management of vibration and noise control in the machine room, and realizes a vibration reduction control method combining active control with passive control. The shortcomings of this patent are: large computing power resource consumption and high cost. Summary of the invention

[0005] 1. Problems to be solved

[0006] In view of the problem that pipeline vibration reduction effect is poor and cost is high in existing photolithography machines, the present invention provides a pipeline vibration reduction method for photolithography machines. The present invention first selects the first vibration zone through preliminary screening, and then obtains an accurate and reliable high-amplitude vibration zone by finely measuring the first vibration zone, thereby determining the installation position of the dynamic vibration absorber; the operation is simple, which can ensure that the dynamic vibration absorber can achieve the best vibration reduction effect and avoid waste of resources to a certain extent.

[0007] 2. Technical solution

[0008] To solve the above problems, the present invention adopts the following technical solutions.

[0009] A pipeline vibration reduction method for a photolithography machine comprises the following steps:

[0010] S1: determining a first vibration zone, where the first vibration zone is a zone in the pipeline where the amplitude of vibration exceeds a first threshold;

[0011] S2: Determine the vibration amplitude and vibration frequency of the first vibration zone, and set the vibration amplitude exceeding the second threshold value to a high-amplitude vibration zone; the second threshold value is greater than the first threshold value;

[0012] S3: a dynamic vibration absorber is provided in at least one high-amplitude vibration zone; the natural frequency of the dynamic vibration absorber matches the vibration frequency of the corresponding high-amplitude vibration zone.

[0013] By adopting the above technical solution, the first vibration zone is first determined to quickly lock the area in the pipeline where the vibration is more obvious, so as to achieve rapid positioning and preliminary screening; then the high-amplitude vibration zone is obtained by accurately measuring the vibration amplitude and vibration frequency of the first vibration zone, so as to accurately and reliably obtain the installation position of the dynamic vibration absorber, and finally achieve the vibration elimination effect on the pipeline. Installing the dynamic vibration absorber in the high-amplitude vibration zone can more effectively absorb vibration energy and reduce the vibration level of the pipeline; avoid blindly installing the dynamic vibration absorber in all the first vibration zones, which will increase the cost and increase the pipeline load, which will easily cause a negative impact on the pipeline and then affect the stable performance of the lithography machine;

[0014] The whole method first selects the first vibration zone through preliminary screening, and then obtains an accurate and reliable high-amplitude vibration zone through fine measurement of the first vibration zone, thereby determining the installation position of the dynamic vibration absorber; the operation is simple, which can not only ensure that the dynamic vibration absorber can achieve the best vibration reduction effect, but also avoid waste of resources to a certain extent.

[0015] Furthermore, in step S3, the high-amplitude vibration zone with the maximum amplitude and the high-amplitude vibration zone with the minimum amplitude are determined according to the vibration amplitude of each high-amplitude vibration zone, and a dynamic vibration absorber is provided in at least one high-amplitude vibration zone except the high-amplitude vibration zone with the minimum amplitude.

[0016] By adopting the above technical scheme, although the high-frequency vibration zone with the smallest amplitude exceeds the second threshold, the overall vibration amplitude is small and will not cause adverse effects on the pipeline as a whole; by setting dynamic vibration absorbers for the high-amplitude vibration zones with larger vibration amplitudes, targeted vibration reduction can be achieved, which can more effectively reduce the vibration amplitude in these areas, thereby improving the stability and safety of the overall structure; while saving costs, it can also avoid the problem of excessive intervention caused by setting dynamic vibration absorbers in the high-frequency vibration zone with the smallest amplitude, such as increasing the overall weight of the pipeline or causing additional pipeline vibration.

[0017] Furthermore, the step S3 also includes determining the average vibration amplitude of all high-amplitude vibration areas, comparing the difference between the vibration amplitude of a single high-amplitude vibration area and the average vibration amplitude of all high-amplitude vibration areas, and if the difference exceeds a third threshold, setting a dynamic vibration absorber in the single high-amplitude vibration area.

[0018] By adopting the above technical scheme, the installation position of the dynamic vibration absorber is determined by comparing the difference between the vibration amplitude of a single high-amplitude vibration zone and the average vibration amplitude; by introducing the average vibration amplitude as a reference value, it is possible to avoid installing unnecessary dynamic vibration absorbers in areas where the vibration amplitude is close to the average level, thereby optimizing the use of resources and reducing costs; it is also possible to accurately identify which areas have abnormally high vibration amplitudes, thereby installing dynamic vibration absorbers in these areas to achieve targeted vibration reduction and improve the vibration reduction efficiency and effect of the pipeline; and as the vibration environment changes, the vibration amplitude of the high-frequency vibration zone may change. By calculating the average vibration amplitude and updating the difference threshold, the installation strategy of the dynamic vibration absorber can be flexibly adjusted to ensure that the vibration reduction effect is always maintained in the best state.

[0019] Furthermore, by arranging an adjustment member on the dynamic vibration absorber, the natural frequency of the dynamic vibration absorber can be adjusted by the adjustment member.

[0020] By adopting the above technical solution, the dynamic vibration absorber is designed to be adjustable, and the natural frequency of the dynamic vibration absorber can be adjusted through the adjusting part to match the vibration frequency of the corresponding high-amplitude vibration zone, thereby ensuring that the dynamic vibration absorber can adapt to different vibration environments and achieve the best vibration reduction effect in different vibration environments; and the adjustable dynamic vibration absorber makes it unnecessary to replace the entire dynamic vibration absorber when the vibration characteristics of the main system change, and quick adjustment can be made through adjustment through the adjusting part, which reduces maintenance costs and simplifies the installation process, and is easy to use.

[0021] Furthermore, in step S3, the high-amplitude vibration zone with the maximum amplitude and the high-amplitude vibration zone with the minimum amplitude are determined according to the vibration amplitude of each high-amplitude vibration zone, and a dynamic vibration absorber is provided in the high-amplitude vibration zone with the maximum amplitude.

[0022] By adopting the above technical solution, by installing dynamic vibration absorbers only in the high-amplitude vibration area with the maximum amplitude, the vibration level in this area can be reduced most directly and effectively, thereby improving the vibration reduction efficiency and vibration reduction effect.

[0023] Furthermore, a dynamic vibration absorber is provided in the high-amplitude vibration zone adjacent to the high-amplitude vibration zone with the smallest amplitude, and a dynamic vibration absorber is provided in the high-amplitude vibration zone adjacent to the high-amplitude vibration zone with the largest amplitude.

[0024] By adopting the above technical solution, since the vibration of the pipeline tends to propagate between adjacent areas, by setting dynamic vibration absorbers in the high-amplitude vibration zone with the smallest amplitude and the adjacent high-amplitude vibration zone with the largest amplitude, the vibration can be effectively prevented from propagating between these areas, thereby reducing the vibration level of the entire pipeline; by installing dynamic vibration absorbers in key areas and their adjacent areas, the vibration reduction effect of the pipeline is ensured while ensuring the stable operation of the entire pipeline, thereby enhancing stability.

[0025] Furthermore, in step S3, a dynamic vibration absorber is provided in each high-amplitude vibration zone to reduce vibration in each high-amplitude vibration zone, thereby ensuring the overall vibration reduction effect of the pipeline, guaranteeing the stable operation of the pipeline, and then achieving stable and reliable operation of the lithography machine.

[0026] Furthermore, in step S1, the bends and / or inflection points of the pipeline are determined as the first vibration zone. Since the bends and inflection points of the pipeline have a certain pulling force, the abnormal vibration is obvious and intuitive when the pipeline is connected to the medium, ensuring that the staff can quickly locate the first vibration zone.

[0027] Furthermore, the first threshold value is 0.5 mm to 0.9 mm; the second threshold value is 1.0 mm to 2.5 mm.

[0028] Furthermore, in step S2, a vibration test is performed on the first vibration area to obtain the vibration amplitude and vibration frequency of the first vibration area.

[0029] By adopting the above technical scheme, the vibration amplitude and vibration frequency are obtained by vibration testing the first vibration zone, so as to ensure the accuracy and reliability of the measurement results; and by controlling the test conditions and parameters, different vibration environments and working conditions can be simulated, so as to more accurately evaluate the vibration characteristics of the first vibration zone, thereby ensuring the accuracy and reliability of the entire result, and playing a guarantee role in the subsequent adjustment of the natural frequency of the dynamic vibration absorber, ensuring that the dynamic vibration absorber can play the best vibration reduction effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the process of the present invention. DETAILED DESCRIPTION

[0031] The present invention is further described below in conjunction with specific embodiments and drawings.

[0032] In the field of photolithography, pipeline vibration reduction is a crucial link, because any tiny vibration may have a serious impact on the processing accuracy of the photolithography machine; the existing pipeline vibration reduction methods are to fix the pipeline with rolling strips or pipe clamps, which has poor vibration reduction effect; and to monitor the pipeline with various monitoring elements, but this method is costly and the effect is not satisfactory. Figure 1 As shown, the present application proposes a pipeline vibration reduction method for a lithography machine, comprising the following steps:

[0033] S1: Determine the first vibration zone, which is the area in the pipeline where the vibration amplitude exceeds the first threshold. Specifically, in this step, the first threshold is set based on the vibration amplitude value observable by the naked eye. The first vibration zone is the area where the vibration in the pipeline is clearly and intuitively observed by the naked eye. This method is simple and direct, and can quickly locate the first vibration zone, so as to achieve preliminary and rapid screening of areas with obvious vibration, which is intuitive and fast, and provides a direction for subsequent analysis and processing.

[0034] S2: Determine the vibration amplitude and vibration frequency of the first vibration zone, and set the vibration amplitude exceeding the second threshold as the high-amplitude vibration zone; the second threshold is greater than the first threshold; specifically, in this step, the setting basis of the second threshold is based on the actual situation on site, and can be determined by staff according to the situation; this step is to perform precise measurement operations on the first vibration zone, so as to determine the high-amplitude vibration zone, and then provide an accurate area for the setting position of the dynamic vibration absorber, so that it can achieve the best vibration reduction effect;

[0035] S3: A dynamic vibration absorber is set in at least one high-amplitude vibration zone; the natural frequency of the dynamic vibration absorber matches the vibration frequency of the corresponding high-amplitude vibration zone; specifically, in this step, the dynamic vibration absorber is a device that uses a resonance system to absorb the vibration energy of an object to reduce the vibration of the object. By adjusting the natural frequency of the dynamic vibration absorber, the vibration energy of the pipeline can be transferred to the additional dynamic vibration absorber to the greatest extent, thereby achieving the purpose of reducing the vibration of the main vibration system and improving the accuracy of pipeline vibration reduction. The dynamic vibration absorber itself belongs to the existing technology, so the existing dynamic vibration absorbers can be used in this application, and this application does not specifically limit its structural composition.

[0036] This application first determines the first vibration zone, quickly locks the area in the pipeline where the vibration is more obvious, and realizes rapid positioning and preliminary screening; then the high-amplitude vibration zone is obtained by accurately measuring the vibration amplitude and vibration frequency of the first vibration zone, so as to accurately and reliably obtain the installation position of the dynamic vibration absorber, and finally achieve the vibration reduction effect on the pipeline. Installing the dynamic vibration absorber in the high-amplitude vibration zone can more effectively absorb vibration energy and reduce the vibration level of the pipeline; avoiding the increase in cost and increase in pipeline load caused by blindly installing the dynamic vibration absorber in all the first vibration zones, which is easy to have a negative impact on the pipeline and then affect the stable performance of the lithography machine. The whole process is easy to operate, which can not only ensure that the dynamic vibration absorber can achieve the best vibration reduction effect, but also avoid waste of resources to a certain extent.

[0037] It should be explained here that a major innovation of the present application is that after determining the first vibration zone, the first vibration zone will be accurately measured to obtain the vibration amplitude and vibration frequency of the first vibration zone; since the first vibration zone is obtained after preliminary screening, if a dynamic vibration absorber is directly set at the position of the first vibration zone, the number of dynamic vibration absorbers installed will be greatly increased, resulting in an increase in cost, and not all areas of vibration require the same degree of control. If dynamic vibration absorbers are added, the pipeline will be subject to a huge load and may easily have a negative impact on the pipeline; and installing dynamic vibration absorbers in the entire first vibration zone may cause unnecessary interference to adjacent non-vibration-exceeding areas, thereby affecting the stable operation of the lithography machine; therefore, a high-amplitude vibration zone is introduced. The high-amplitude vibration zone is the area with the most violent vibration in the lithography machine pipeline, and is also a key factor affecting the accuracy and stability of the lithography machine. By determining the high-amplitude vibration zone, these key areas can be more accurately identified, providing guarantees for subsequent pipeline vibration reduction, ensuring the pipeline vibration reduction effect while maximizing the rational allocation of resources and reducing costs.

[0038] Another major innovation is that the present application does not use electronic components such as sensors to perform real-time and continuous work during the operation of the pipeline to monitor the vibration amplitude and vibration frequency of the pipeline and then determine the installation position of the dynamic vibration absorber; although this method has strong real-time performance and can perform continuous monitoring, since the pipeline in the present application is used in the field of lithography machine technology, and there are complex electromagnetic environments and mechanical vibrations inside the lithography machine, these factors will interfere with electronic components such as sensors. If electronic components are continuously set on the pipeline for monitoring, the error of the electronic components will be large, and the vibration frequency of the pipeline cannot be accurately monitored; and electronic components such as sensors are precision instruments. Long-term continuous operation will accelerate the wear and aging of the sensors, increase the frequency and cost of replacing the sensors, and real-time vibration monitoring requires a lot of electricity, which increases the energy consumption of the lithography machine and then increases the cost. Therefore, in the field of pipeline vibration reduction of lithography machines, it is relatively difficult to use electronic components to continuously monitor the vibration amplitude of the pipeline. Based on this, the present application determines the vibration amplitude and vibration frequency of the first vibration zone after determining the first vibration zone, and only obtains the high-amplitude vibration zone after accurately measuring the first vibration zone, and then determines the installation position of the dynamic vibration absorber. There is no real-time monitoring step, and there is no need to consider the life and cost factors of electronic components.

[0039] In a specific embodiment, in step S3, the high-amplitude vibration zone with the maximum amplitude and the high-amplitude vibration zone with the minimum amplitude are determined according to the vibration amplitude of each high-amplitude vibration zone, and a dynamic vibration absorber is set in at least one high-amplitude vibration zone except the high-amplitude vibration zone with the minimum amplitude.

[0040] Specifically, in this embodiment, no dynamic vibration absorber is set for the high-amplitude vibration zone with the smallest vibration amplitude. This is because although the vibration amplitude of the high-amplitude vibration zone with the smallest vibration amplitude exceeds the second threshold, its vibration amplitude is relatively small for the pipeline as a whole and will not have a bad impact on the pipeline as a whole. By setting a dynamic vibration absorber in the high-amplitude vibration zone with relatively large vibration amplitude, vibration reduction is carried out in a targeted manner in the area with large vibration amplitude, thereby improving the vibration reduction effect, ensuring that limited resources are used most effectively, and reducing costs.

[0041] In a specific embodiment, step S3 also includes determining the average vibration amplitude of all high-amplitude vibration areas, comparing the difference between the vibration amplitude of a single high-amplitude vibration area and the average vibration amplitude of all high-amplitude vibration areas, and if the difference exceeds a third threshold, a dynamic vibration absorber is set in the single high-amplitude vibration area.

[0042] Specifically, the benchmark concept of average vibration amplitude is introduced in this embodiment. The average vibration amplitude is the average value obtained by dividing the sum of the vibration amplitudes of all high-amplitude vibration zones by the number of high-amplitude vibration zones. By subtracting the vibration amplitude of a single high-amplitude vibration zone from the average vibration amplitude, it is possible to accurately identify which high-amplitude vibration zones have abnormally high vibration amplitudes, thereby achieving targeted vibration reduction operations; avoiding the installation of unnecessary dynamic vibration absorbers in areas where the vibration amplitudes are close to the average level, thereby optimizing the use of resources and reducing costs; and determining which high-amplitude vibration zones need to be installed with dynamic vibration absorbers through numerical calculations, providing a scientific basis to avoid deviations caused by subjective judgment, improving the accuracy of the entire process, and thereby ensuring the best vibration reduction effect of the dynamic vibration absorber; at the same time, it also reduces interference from the external environment. Since pipeline vibrations are easily affected by the external environment, the introduction of the concept of average vibration amplitude can better distinguish between external interference and the vibration characteristics of the structure itself, eliminate external interference factors, and thus ensure the accuracy of the results, so that the dynamic vibration absorber is installed in the best position to achieve the best pipeline vibration reduction effect.

[0043] In a specific embodiment, an adjusting member is provided on the dynamic vibration absorber, and the natural frequency of the dynamic vibration absorber is adjusted by the adjusting member.

[0044] Specifically, the adjusting member can be a screw, and the natural frequency of the dynamic vibration absorber can be adjusted by adjusting the degree of compression of the screw on the dynamic vibration absorber. It is easy to operate and has a simple structure and low manufacturing cost. It can play both the tightening and adjusting roles. Because the natural frequency of the dynamic vibration absorber is adjusted before it is installed on the pipeline to match the vibration frequency of the high-amplitude vibration zone where it is installed to achieve the best vibration reduction effect, the adjustable dynamic vibration absorber is easy to operate and can adapt to different vibration frequencies to achieve the best vibration reduction effect in different vibration environments. At the same time, quick adjustment can be made only through adjustment of the adjusting member, which reduces maintenance costs and simplifies the installation process, making it easy to use.

[0045] In a specific embodiment, in step S3, the high-amplitude vibration zone with the maximum amplitude and the high-amplitude vibration zone with the minimum amplitude are determined according to the vibration amplitude of each high-amplitude vibration zone, and a dynamic vibration absorber is provided in the high-amplitude vibration zone with the maximum amplitude. In this embodiment, by providing a dynamic vibration absorber in the high-amplitude vibration zone with the maximum amplitude, the vibration of the area can be reduced most directly, and pipeline damage or performance degradation caused by excessive vibration can be prevented. This method is the simplest and most direct, easy to operate and easy to install the dynamic vibration absorber, thereby improving efficiency.

[0046] In a specific embodiment, a dynamic vibration absorber is provided in a high-amplitude vibration zone adjacent to a high-amplitude vibration zone with a minimum amplitude, and a dynamic vibration absorber is provided in a high-amplitude vibration zone adjacent to a high-amplitude vibration zone with a maximum amplitude.

[0047] Specifically, in the present embodiment, the high-amplitude vibration zone with the largest amplitude often means that the vibration energy in this zone is concentrated, which is likely to have a relatively obvious impact on the adjacent areas. Therefore, in addition to setting a dynamic vibration absorber in the high-amplitude vibration zone with the largest amplitude, a dynamic vibration absorber is also set in the high-amplitude vibration zone adjacent to it to effectively absorb and consume the vibration energy, thereby effectively curbing the vibration from propagating to the adjacent areas and ensuring the vibration reduction effect; the high-amplitude vibration zone with the smallest amplitude means that although its vibration amplitude exceeds the standard, its vibration energy is smaller than that of other areas and will not cause adverse effects on the pipeline as a whole; however, in order to avoid the problem of possible damage due to long-term vibration, a dynamic vibration absorber is set in the high-amplitude vibration zone adjacent to the high-amplitude vibration zone with the smallest amplitude, and in the adjacent high-amplitude vibration zone with a slightly larger vibration amplitude, resources can be used more effectively, vibration energy can be effectively absorbed and consumed, vibration reduction efficiency can be improved, and the overall vibration reduction effect of the pipeline can be ensured.

[0048] In a specific embodiment, a dynamic vibration absorber is provided in each high-amplitude vibration zone in step S3. Each high-amplitude vibration zone is subjected to vibration reduction by the dynamic vibration absorber, thereby ensuring the overall vibration reduction effect of the pipeline, guaranteeing the stable operation of the pipeline, and then achieving stable and reliable operation of the lithography machine.

[0049] In a specific embodiment, in step S1, the bend and / or inflection point of the pipeline is determined as the first vibration zone. It is explained here that since the bend or inflection point of the pipeline itself has a certain pulling force, it will cause abnormal vibration when the pipeline passes water, ventilation and other media, and the vibration is obvious and can be observed by the naked eye, ensuring that the staff can quickly locate the first vibration zone.

[0050] In a specific implementation, the first threshold value is 0.5 mm to 0.9 mm; the second threshold value is 1.0 mm to 2.5 mm.

[0051] In a specific implementation, in step S2, a vibration test is performed on the first vibration zone to obtain the vibration amplitude and vibration frequency of the first vibration zone.

[0052] Specifically, the present embodiment obtains the vibration amplitude and vibration frequency of the first vibration zone by performing a vibration test on the first vibration zone, rather than determining the vibration amplitude and vibration frequency of the first vibration zone when the first vibration zone is working; the accuracy and reliability of the vibration test results are relatively higher, because the vibration test is performed in a relatively stable test environment, avoiding various interference factors that occur during the working process; and directly measuring the vibration amplitude and vibration frequency of the first vibration zone during the working process of the pipeline will cause additional load or pressure on the pipeline system, affecting the quality of the pipeline; while the vibration test can be performed without interfering with the normal operation of the pipeline, avoiding damage to the pipeline. Moreover, by controlling the test conditions and parameters, different vibration environments and working conditions can be simulated, so as to more accurately evaluate the vibration characteristics of the first vibration zone, thereby ensuring the accuracy and reliability of the entire result, and playing a protective role in the subsequent adjustment of the natural frequency of the dynamic vibration absorber, ensuring that the dynamic vibration absorber can play the best vibration reduction effect.

[0053] In a specific embodiment, after determining the installation position of the dynamic vibration absorber, it also includes measuring the change in the vibration level of the pipeline before and after the dynamic vibration absorber is loaded to determine the vibration reduction effect. In this embodiment, a verification step is added to further verify the pipeline vibration reduction method to ensure that the dynamic vibration absorber is installed in the best position and has the best effect. If the vibration reduction effect is not obvious after installing the dynamic vibration absorber in a certain position, you can consider adjusting its installation position; through multiple measurements and comparisons, you can find the best installation position to maximize the vibration reduction effect of the dynamic vibration absorber; and the verification result shows that the vibration reduction effect is significant, indicating that the stability of the pipeline system has been improved, which is of great significance for ensuring production safety and improving production efficiency.

[0054] The examples described in the present invention are merely descriptions of the preferred implementation modes of the present invention, and are not intended to limit the concept and scope of the present invention. Without departing from the design concept of the present invention, various modifications and improvements made to the technical solutions of the present invention by engineers and technicians in this field should all fall within the protection scope of the present invention.

Claims

1. A pipeline vibration reduction method for a photolithography machine, characterized in that: The following steps are involved: S1: determining a first vibration zone, where the first vibration zone is a zone in the pipeline where the amplitude of vibration exceeds a first threshold; S2: Determine the vibration amplitude and vibration frequency of the first vibration zone, and the vibration amplitude exceeding the second threshold is set to a high-amplitude vibration zone; the second threshold is greater than the first threshold; in step S2, the vibration amplitude and vibration frequency of the first vibration zone are obtained by performing a vibration test on the first vibration zone; S3: a dynamic vibration absorber is arranged in at least one high-amplitude vibration zone; the natural frequency of the dynamic vibration absorber matches the vibration frequency of the corresponding high-amplitude vibration zone; In step S3, the high-amplitude vibration zone with the maximum amplitude and the high-amplitude vibration zone with the minimum amplitude are determined according to the vibration amplitude of each high-amplitude vibration zone, and a dynamic vibration absorber is arranged in at least one high-amplitude vibration zone except the high-amplitude vibration zone with the minimum amplitude.

2. A pipeline vibration reduction method for a photolithography machine according to claim 1, characterized in that: The step S3 also includes determining the average vibration amplitude of all high-amplitude vibration areas, comparing the difference between the vibration amplitude of a single high-amplitude vibration area and the average vibration amplitude of all high-amplitude vibration areas, and if the difference exceeds a third threshold, setting a dynamic vibration absorber in the single high-amplitude vibration area.

3. A pipeline vibration reduction method for a photolithography machine according to claim 1 or 2, characterized in that: By arranging an adjusting piece on the dynamic vibration absorber, the natural frequency of the dynamic vibration absorber can be adjusted through the adjusting piece.

4. The pipeline vibration reduction method for a photolithography machine according to claim 1, characterized in that: In step S3, a high-amplitude vibration zone with a maximum amplitude and a high-amplitude vibration zone with a minimum amplitude are determined according to the vibration amplitude of each high-amplitude vibration zone, and a dynamic vibration absorber is provided in the high-amplitude vibration zone with a maximum amplitude.

5. A pipeline vibration reduction method for a photolithography machine according to claim 4, characterized in that: A dynamic vibration absorber is arranged in a high-amplitude vibration zone adjacent to a high-amplitude vibration zone with a minimum amplitude, and a dynamic vibration absorber is arranged in a high-amplitude vibration zone adjacent to a high-amplitude vibration zone with a maximum amplitude.

6. A pipeline vibration reduction method for a photolithography machine according to claim 1, characterized in that: In the step S3, a dynamic vibration absorber is provided in each high-amplitude vibration zone.

7. A pipeline vibration reduction method for a photolithography machine according to claim 1, characterized in that: In the step S1, the bend of the pipeline and / or the inflection point of the pipeline is determined as the first vibration zone.

8. A pipeline vibration reduction method for a photolithography machine according to claim 1 or 7, characterized in that: The first threshold value is between 0.5 mm and 0.9 mm; the second threshold value is between 1.0 mm and 2.5 mm.

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