Diaphragm conveying device and scanning electron microscope with same

Abstract

The invention discloses a diaphragm conveying device and a scanning electron microscope with the same. A diaphragm conveying device belongs to the technical field of scanning electron microscopes and comprises a supporting piece, a pushing rod, a driving assembly and an actuating assembly, the supporting piece is provided with a supporting hole, the pushing rod penetrates through the supporting hole, the pushing rod is provided with a pushing end and a diaphragm connecting end, the pushing end and the diaphragm connecting end are located on the two axial sides of the supporting hole, the diaphragm connecting end is suitable for being connected with a diaphragm, and the actuating assembly is suitable for being connected with the diaphragm. The driving assembly is used for driving the pushing rod to move in the axial direction of the supporting hole, and when the pushing rod moves in the axial direction of the supporting hole, the actuating assembly is used for driving the pushing rod to swing, so that the diaphragm connecting end of the pushing rod forms orbital transfer curvilinear motion, abrasion of a diaphragm on the diaphragm connecting end is reduced, and the service life of the diaphragm is prolonged. Pollution of abrasive dust to the scanning electron microscope is reduced, and the service life of the scanning electron microscope is prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of scanning electron microscopes, and in particular to an aperture conveying device and a scanning electron microscope having the same. Background Art

[0002] A scanning electron microscope is a high-resolution electron microscope that can be used to observe the surface morphology and microstructure of samples. A scanning electron microscope can use electron beam imaging to provide higher resolution than an optical microscope.

[0003] In the related art, a movable diaphragm is usually provided at the objective port of a scanning electron microscope. When the diaphragm is engaged with and separated from the objective port, the diaphragm produces a flat rubbing motion relative to the objective port, causing the diaphragm to wear and reducing its service life. In addition, the wear debris generated by the friction between the diaphragm and the objective port will contaminate the scanning electron microscope and affect the imaging quality. Summary of the invention

[0004] The present invention aims to solve at least one of the above-mentioned technical problems in the prior art to a certain extent. To this end, the present invention provides an aperture conveying device that can reduce the wear of the aperture.

[0005] The present invention also provides a scanning electron microscope having the aperture conveying device.

[0006] According to an embodiment of the present invention, the aperture conveying device includes: a support member, the support member has a support hole; a push rod, the push rod is inserted into the support hole, the push rod has a push end and an aperture connecting end, the push end and the aperture connecting end are located on both axial sides of the support hole, and the aperture connecting end is suitable for being connected to the aperture; a driving assembly, the driving assembly is used to drive the push rod to move along the axial direction of the support hole; an actuating assembly, when the push rod moves along the axial direction of the support hole, the actuating assembly is used to drive the push rod to swing, so as to make the pushing end and the aperture connecting end move in opposite directions in the radial direction of the support hole.

[0007] According to the aperture conveying device of the embodiment of the present invention, the driving assembly can drive the push rod to move along the axial direction of the support hole. At the same time, the actuating assembly can drive the push rod to swing, so that the aperture connecting end of the push rod forms a track-changing curve motion, which is beneficial to reduce the wear of the aperture on the aperture connecting end, reduce the contamination of the scanning electron microscope by wear chips, and increase the service life of the scanning electron microscope.

[0008] According to some embodiments of the present invention, the driving assembly includes: a transmission member, which is movably connected to the pushing end; and a driving member, which is used to drive the transmission member to move along the axial direction of the supporting hole.

[0009] According to some embodiments of the present invention, the actuating assembly includes: a guide frame having a guide surface, wherein the guide surface is inclined relative to the axis of the support hole; and a guide member connected to the push rod, wherein the guide member is suitable for guiding and cooperating with the guide surface.

[0010] According to some embodiments of the present invention, the guide member includes: a mounting plate, the mounting plate is fixedly connected to the push rod; and a roller, the roller is rotatably connected to the mounting plate, and the roller is suitable for rolling along the guide surface.

[0011] According to some embodiments of the present invention, the guide frame is arranged between the support member and the pushing end, the guide surface is located above the pushing rod, and in the axial direction of the support hole, the guide surface has a guide front end close to the aperture connecting end and a guide rear end away from the aperture connecting end, and in the direction from the guide front end to the guide rear end, the distance between the guide surface and the pushing rod gradually increases.

[0012] According to some embodiments of the present invention, the actuating assembly further includes: an elastic member, which is respectively connected to the transmission member and the pushing end, and is used to apply an elastic force to the pushing end so that the guide member and the guide surface remain in abutment state.

[0013] According to another embodiment of the present invention, a scanning electron microscope includes: an electron gun chamber, the electron gun chamber having an objective lens port; a sample chamber, the sample chamber is connected to the electron gun chamber through the objective lens port; an aperture conveying device, the aperture conveying device is the above-mentioned aperture conveying device, and the aperture connecting end is located in the sample chamber; an aperture, the aperture is connected to the aperture connecting end, the aperture conveying device is used to drive the aperture to move to a first preset position and a second preset position, when the aperture moves to the first preset position, the aperture is sealed with the objective lens port, and when the aperture moves to the second preset position, the aperture is separated from the objective lens port; a vacuum pump, the vacuum pump is used to evacuate the electron gun chamber and the sample chamber.

[0014] According to the scanning electron microscope of the embodiment of the present invention, the diaphragm conveying device is used to drive the diaphragm to move to a first preset position and a second preset position. When the diaphragm moves to the first preset position, the diaphragm is sealed and cooperated with the objective lens port, and the electron gun chamber and the sample chamber are evacuated by a vacuum pump. The scanning electron microscope can achieve compatibility and rapid switching between a standard vacuum working mode and a low vacuum working mode, thereby helping to enhance the product competitiveness of the scanning electron microscope.

[0015] According to some embodiments of the present invention, the aperture conveying device also includes: a sealing bellows, wherein the sealing bellows and the driving assembly are both arranged on the outside of the sample chamber, the sealing bellows is sleeved on the push rod, one end of the sealing bellows is connected to the sample chamber, and the other end of the sealing bellows is fixed and sealed to the push rod.

[0016] According to some embodiments of the present invention, the aperture includes: a rotating shaft seat, which is rotatably connected to the aperture connecting end around a first axis; and an aperture body, which is rotatably connected to the rotating shaft seat around a second axis, and the second axis is perpendicular to the first axis.

[0017] According to some embodiments of the present invention, the aperture further includes: a sealing ring, the sealing sleeve is provided on the aperture body, and when the aperture moves to the first preset position, the sealing ring is sealed and cooperated with the objective lens port.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a stereoscopic diagram of an aperture conveying device and an aperture according to an embodiment of the present invention;

[0020] Figure 2 yes Figure 1 The main view;

[0021] Figure 3 is a schematic diagram of a scanning electron microscope according to an embodiment of the present invention when the diaphragm moves to be separated from the objective lens port;

[0022] Figure 4 is a schematic diagram of a scanning electron microscope according to an embodiment of the present invention when the aperture moves to match with the objective lens port;

[0023] Figure 5 yes Figure 2 A magnified view at the guide surface;

[0024] Figure 6 is a schematic structural diagram of an aperture conveying device at a support member according to an embodiment of the present invention;

[0025] Figure 7 is a stereoscopic diagram of an aperture according to an embodiment of the present invention;

[0026] Figure 8 is an exploded view of a stop according to an embodiment of the present invention;

[0027] Fig. 9 is a cross-sectional view of an aperture body according to an embodiment of the present invention.

[0028] Reference numerals:

[0029] Support member 1; support hole 11; support base point 111; first mounting groove 12; second mounting groove 13;

[0030] Push rod 2; Push end 21; Aperture connection end 22;

[0031] Driving assembly 3; transmission member 31; driving member 32; motor 321; lead screw 322; guide rod 323;

[0032] Actuating assembly 4; guide frame 41; guide surface 411; guide front end 4111; guide rear end 4112; guide member 42; mounting plate 421; roller 422; elastic member 43;

[0033] Base 5;

[0034] First rolling connection member 6; first connection portion 61; first rolling portion 62;

[0035] Second rolling connection member 7; second connection portion 71; second rolling portion 72;

[0036] Sealing bellows 8; Sealing flange 9;

[0037] Aperture conveying device 10;

[0038] Electron gun chamber 20; objective lens port 201;

[0039] Sample chamber 30;

[0040] Aperture 40; shaft seat 401; first arm 4011; second arm 4012; connecting arm 4013; first shaft 4014; aperture body 402; adapter block 403; fastening screw 405; lubricating gasket 406; second shaft 407; sealing ring 408;

[0041] SEM 100. DETAILED DESCRIPTION

[0042] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0043] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by the terms "upper", "lower", "front", "back", "left", "right", "inside", "outside", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0044] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0045] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or can communicate with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] The aperture conveying device 10 and the scanning electron microscope 100 having the same according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0047] Reference Figure 1-Figure 4 As shown, the aperture conveying device 10 includes: a support member 1, a push rod 2, a drive assembly 3 and an actuating assembly 4, the support member 1 has a support hole 11, the push rod 2 is inserted into the support hole 11, the push rod 2 has a push end 21 and an aperture connecting end 22, the push end 21 and the aperture connecting end 22 are located on both axial sides of the support hole 11, the aperture connecting end 22 is suitable for being connected to the aperture 40, the drive assembly 3 is used to drive the push rod 2 to move along the axial direction of the support hole 11, when the push rod 2 moves along the axial direction of the support hole 11, the actuating assembly 4 is used to drive the push rod 2 to swing, so as to make the movement directions of the push end 21 and the aperture connecting end 22 opposite in the radial direction of the support hole 11.

[0048] Among them, the aperture conveying device 10 can be used for the scanning electron microscope 100, the aperture connecting end 22 on the push rod 2 is suitable for connecting with the aperture 40, and the aperture conveying device 10 can drive the push rod 2 to move and swing to control the position of the aperture 40. When the aperture 40 cooperates with the electron gun objective lens port 201 of the scanning electron microscope 100, the scratch of the objective lens port 201 on the aperture 40 can be reduced, which is beneficial to reduce the wear of the aperture 40 and the objective lens port 201, reduce the contamination of the electron gun and the sample by the grinding debris, and improve the service life and scanning accuracy of the scanning electron microscope 100.

[0049] Specifically, the support hole 11 on the support member 1 is a through hole, and the axial direction of the support hole 11 is Figure 1-Figure 4 In the front-to-back direction, the support hole 11 can be clearance-matched with the push rod 2, and the push rod 2 is movably arranged in the support hole 11 along the axial direction of the support hole 11. In the axial direction of the support hole 11, one end of the push rod 2 is the push end 21, and the other end of the push rod 2 is the diaphragm connecting end 22. The driving component 3 can be connected to the pushing end 21, and the driving component 3 can drive the push rod 2 to move in the front-to-back direction, so that the diaphragm 40 connected to the diaphragm connecting end 22 moves along the front-to-back direction. At the same time, when the push rod 2 moves, the actuating component 4 drives the push rod 2 to swing, and the bottom contact point of the push rod 2 and the support hole 11 can be used as the support base point 111 for the swing of the push rod 2, and when the actuating component 4 drives the push rod 2 to swing around the support base point 111, in the radial direction of the support hole 11 (i.e. Figure 1-Figure 4 The pushing end 21 and the aperture connecting end 22 have opposite movement directions, that is, the aperture connecting end 22 can be tilted relative to the pushing end 21, so that the aperture connecting end 22 forms a track-changing curve movement, and when the aperture 40 on the aperture connecting end 22 cooperates with the objective lens port 201, the wear of the aperture 40 and the objective lens port 201 can be reduced.

[0050] Reference Figure 3 and Figure 4As shown, direction A is clockwise, and the opposite direction of direction A is counterclockwise. When the driving assembly 3 drives the push rod 2 to move forward, the actuating assembly 4 can drive the push rod 2 to swing clockwise. When the driving assembly 3 drives the push rod 2 to move backward, the actuating assembly 4 can drive the push rod 2 to swing counterclockwise. In other words, when the push end 21 moves forward, it also moves downward, and when the push end 21 moves backward, it also moves upward. When the diaphragm connecting end 22 moves forward, it also moves upward, and when the diaphragm connecting end 22 moves backward, it also moves downward. Movement, whereby, when the aperture conveying device 10 needs to convey the aperture 40 to cooperate with the objective lens port 201, the aperture 40 can move forward and upward along with the aperture connecting end 22, thereby reducing the wear of the aperture 40 and the objective lens port 201 when they are in contact with each other; when the aperture conveying device 10 needs to convey the aperture 40 to separate from the objective lens port 201, the aperture 40 can move backward and downward along with the aperture connecting end 22, thereby reducing the wear of the aperture 40 and the objective lens port 201 when they are separated, and avoiding the aperture 40 from blocking the objective lens port 201 after separation.

[0051] According to the aperture conveying device 10 of the embodiment of the present invention, the driving assembly 3 can drive the push rod 2 to move along the axial direction of the support hole 11. At the same time, the actuating assembly 4 can drive the push rod 2 to swing, so that the aperture connecting end 22 of the push rod 2 forms a track-changing curve motion, which is beneficial to reduce the wear of the aperture 40 on the aperture connecting end 22, reduce the contamination of the scanning electron microscope 100 by wear chips, and improve the service life of the scanning electron microscope 100.

[0052] In some embodiments of the present invention, reference Figure 1-Figure 4 As shown, the driving assembly 3 includes: a transmission member 31 and a driving member 32 . The transmission member 31 is movably connected to the pushing end 21 , and the driving member 32 is used to drive the transmission member 31 to move along the axial direction of the supporting hole 11 .

[0053] Among them, when the driving member 32 drives the transmission member 31 to move along the axial direction of the support hole 11, the transmission member 31 can drive the push rod 2 to move along the axial direction of the support hole 11, and the transmission member 31 is movably connected to the pushing end 21 to reduce or avoid interference between the push rod 2 and the transmission member 31 when the push rod 2 swings.

[0054] In some embodiments, reference Figure 1-Figure 4As shown, the transmission member 31 and the driving member 32 are a ball screw motion pair, and the driving member 32 includes a motor 321, a lead screw 322 and a guide rod 323. The lead screw 322 and the guide rod 323 both extend along the axial direction of the support hole 11, and the lead screw 322 and the guide rod 323 are both penetrated by the transmission member 31. The transmission member 31 is threadedly matched with the lead screw 322, and the transmission member 31 is guidedly matched with the guide rod 323. The motor 321 is used to drive the lead screw 322 to rotate, so that the transmission member 31 moves along the extension direction of the lead screw 322, wherein the motor 321 can be a high-resolution stepping motor to improve the movement accuracy of the transmission member 31.

[0055] In other embodiments, the driving member 32 may be a hydraulic rod, which may be retracted and retracted in the axial direction of the supporting hole 11 to drive the transmission member 31 to move in the axial direction.

[0056] In some embodiments, the active connection between the pushing end 21 and the transmission member 31 is a movably connected connection. For example, the transmission member 31 is provided with an installation square hole, the pushing end 21 is arranged in the installation square hole and is gap-matched with the installation square hole, the pushing end 21 is provided with a guide groove, the guide groove is opposite to the hole wall of the installation square hole, the extension direction of the guide groove is parallel to the radial direction of the support hole 11, and the transmission member 31 is provided with a connecting member inserted into the guide groove, so that when the push rod 2 swings, the pushing end 21 can move along the extension direction of the guide groove under the limit of the connecting member, so as to reduce the interference between the push rod 2 and the transmission member 31.

[0057] In other embodiments, the active connection between the pushing end 21 and the transmission member 31 is a movable and rotatable connection. For example, the transmission member 31 may be provided with a slide rail parallel to the radial direction of the support hole 11, and a slider is provided on the slide rail. The pushing end 21 is hinged to the slider so that when the pushing rod 2 swings, the pushing end 21 can move and rotate relative to the transmission member 31 to avoid interference between the pushing rod 2 and the transmission member 31.

[0058] In some embodiments of the present invention, reference Figure 1-Figure 5 As shown, the actuating assembly 4 includes: a guide frame 41 and a guide member 42. The guide frame 41 has a guide surface 411, and the guide surface 411 is inclined relative to the axis of the support hole 11. The guide member 42 is connected to the push rod 2, and the guide member 42 is suitable for guiding and cooperating with the guide surface 411.

[0059] Among them, when the driving component 3 drives the push rod 2 to move along the axial direction of the support hole 11, the guide member 42 on the push rod 2 cooperates with the guide surface 411 inclined relative to the axis of the support hole 11. Under the action of the guide surface 411 on the guide member 42, the push rod 2 is swung, and the structure of the actuating component 4 is simple and reliable.

[0060] In some other embodiments of the present invention, the actuating assembly 4 may also be a telescopic rod, one end of which is hinged to the middle section of the push rod 2, and the other end of the telescopic rod is hinged to the transmission member 31, so that the push rod 2 is driven to swing by the extension and retraction of the telescopic rod.

[0061] In some embodiments of the present invention, reference Figure 5 As shown, the guide member 42 includes: a mounting plate 421 and a roller 422 , the mounting plate 421 is fixedly connected to the push rod 2 , the roller 422 is rotatably connected to the mounting plate 421 , and the roller 422 is suitable for rolling along the guide surface 411 .

[0062] Among them, the roller 422 can be rotatably connected to the mounting plate 421 through the roller shaft. When the transmission member 31 drives the push rod 2 to move along the axis of the support hole 11, the roller 422 can roll on the guide surface 411 to realize the swing of the push rod 2. The roller 422 can reduce the resistance of the guide surface 411 to the guide member 42, thereby reducing the wear of the guide member 42 and the guide surface 411.

[0063] In other embodiments of the present invention, the guide member 42 is constructed as a guide block, which is suitable for sliding along the guide surface 411. The guide surface 411 and the guide block may be coated with a lubricating medium to reduce the resistance of the guide surface 411 to the guide member 42 and reduce the wear of the guide member 42 and the guide surface 411.

[0064] In some embodiments of the present invention, reference Figure 1-Figure 5 As shown, the guide frame 41 is arranged between the support member 1 and the pushing end 21, and the guide surface 411 is located above the pushing rod 2. In the axial direction of the supporting hole 11, the guide surface 411 has a guide front end 4111 close to the aperture connecting end 22 and a guide rear end 4112 away from the aperture connecting end 22. In the direction from the guide front end 4111 to the guide rear end 4112, the distance between the guide surface 411 and the pushing rod 2 gradually increases.

[0065] Specifically, in the direction from the guiding front end 4111 to the guiding rear end 4112, the distances between the guiding surface 411 and the pushing rod 2 are D1, D2...Dn, respectively, satisfying the relationship, D1<D2<...<Dn. When the driving component 3 drives the pushing rod 2 to move forward, the guiding member 42 moves from the guiding rear end 4112 to the guiding front end 4111, and the guiding member 42 gradually moves downward under the action of the guiding surface 411, thereby realizing that the pushing rod 2 swings clockwise while moving forward. When the driving component 3 drives the pushing rod 2 to move backward, the guiding member 42 moves from the guiding front end 4111 to the guiding rear end 4112, and the guiding member 42 gradually moves upward under the action of the guiding surface 411, thereby realizing that the pushing rod 2 swings counterclockwise while moving backward.

[0066] In the above embodiment, the guide frame 41 is arranged between the support member 1 and the pushing end 21, and the guide surface 411 is located above the pushing rod 2. The guide frame 41 is easy to install and maintain, and the guide frame 41 is not easy to interfere with the driving component 3.

[0067] In other embodiments of the present invention, the guide frame 41 may also be arranged between the support member 1 and the aperture connecting end 22, and the guide surface 411 is located below the push rod 2. In the axial direction of the support hole 11, the guide surface 411 has a guide front end 4111 close to the aperture connecting end 22 and a guide rear end 4112 away from the aperture connecting end 22. In the direction from the guide front end 4111 to the guide rear end 4112, the distance between the guide surface 411 and the push rod 2 gradually increases, so as to realize that the push rod 2 swings clockwise at the same time when moving forward, and the push rod 2 swings counterclockwise at the same time when moving backward.

[0068] In some embodiments of the present invention, reference Figure 2-Figure 5 As shown, the actuating assembly 4 further includes: an elastic member 43, which is respectively connected to the transmission member 31 and the pushing end 21, and is used to apply elastic force to the pushing end 21 to keep the guide member 42 in abutment with the guide surface 411.

[0069] Among them, the elastic member 43 can be a coil spring, a gas spring, etc. The elastic force applied by the elastic member 43 to the pushing end 21 can keep the guide member 42 and the guide surface 411 in abutment state, so that the guide member 42 always maintains a guiding cooperation with the guide surface 411 to avoid failure of the actuator assembly 4.

[0070] In some other embodiments of the present invention, gravity can also be used to maintain the guide member 42 and the guide surface 411 in an abutting state. For example, the length of the push rod 2 from the support hole 11 to the aperture connecting end 22 is always greater than the length from the support hole 11 to the push end 21. Under the action of gravity, the push end 21 has a tendency to warp upward, so that the guide member 42 and the guide surface 411 maintain an abutting state.

[0071] In some embodiments of the present invention, reference Figure 1 and Figure 2 As shown, the aperture conveying device 10 further includes a base 5 , and the support member 1 , the driving member 32 and the guide frame 41 are all mounted on the base 5 to facilitate the assembly and use of the aperture conveying device 10 .

[0072] In some embodiments of the present invention, reference Figure 6As shown, the aperture conveying device 10 further includes a first rolling connection member 6, the support member 1 further includes a first mounting groove 12 connected to the support hole 11, the first rolling connection member 6 includes a first connecting portion 61 and a first rolling portion 62, the first connecting portion 61 is at least partially disposed in the first mounting groove 12, the first rolling portion 62 is at least partially disposed in the support hole 11, the push rod 2 passes through the support hole 11, the first rolling portion 62 stops between the first connecting portion 61 and the push rod 2, and the length of the first connecting portion 61 is retractable, when the push rod 2 is moved along the support hole 11 During axial movement, the first rolling portion 62 can reduce the wear of the push rod 2 and the support hole 11 by rolling relative to the push rod 2. At the same time, when the push rod 2 swings, the first rolling portion 62 can move between the push rod 2 and the first connecting portion 61. The length of the first connecting portion 61 can be expanded and contracted with the movement of the first rolling portion 62, so that the first rolling portion 62 maintains support for the push rod 2, reduces the resistance of the push rod 2 through the support hole 11 when it swings, and avoids damage to the push rod 2 and the support member 1 caused by the drive component 3 pushing the push rod 2 forcefully.

[0073] Reference Figure 6 As shown, the support member 1 is also provided with a plurality of second mounting grooves 13 connected with the supporting hole 11, and the aperture conveying device 10 also includes a plurality of second rolling connectors 7, and the plurality of second rolling connectors 7 correspond one by one to the plurality of second mounting grooves 13, and the second rolling connector 7 includes a second connecting portion 71 and a second rolling portion 72, and the second connecting portion 71 is at least partially arranged in the corresponding second mounting groove 13, and the second rolling portion 72 is at least partially arranged in the supporting hole 11, and the second rolling portion 72 stops between the second connecting portion 71 and the push rod 2, and the second rolling portion 72 can reduce the wear of the push rod 2 and the supporting hole 11 by rolling relative to the push rod 2, reduce the resistance of the push rod 2 when passing through the supporting hole 11, and reduce the energy consumption of the driving component 3.

[0074] As shown in Reference 6, the number of second mounting grooves 13 is two, and the angle between the extension direction of the first mounting groove 12 and the extension direction of any one of the second mounting grooves 13 is equal, that is, the first mounting groove 12 and the two second mounting grooves 13 can be arranged radially, and the angle between the extension direction of the first mounting groove 12 and the extension direction of any one of the second mounting grooves 13 is 120°, and the angle between the extension directions of the two second mounting grooves 13 is 120°. Therefore, the first rolling connector 6 and the two second rolling connectors 7 can support and limit the push rod 2 at three different positions in the radial direction of the push rod 2 to improve the stability of the push rod 2.

[0075] As shown in reference 6, in the up and down directions, the first mounting groove 12 is arranged above the support hole 11, and the second mounting groove 13 is arranged below the first mounting groove 12. The second rolling connector 7 can form a support base point 111 for the swing of the push rod 2 below the push rod 2, and the first rolling connector 6 is telescoped above the push rod 2 to avoid interfering with the swing of the push rod 2.

[0076] Reference Figure 1-Figure 4 As shown, a scanning electron microscope 100 according to another embodiment of the present invention includes: an electron gun chamber 20, a sample chamber 30, an aperture conveying device 10, an aperture 40 and a vacuum pump. The electron gun chamber 20 has an objective lens port 201, and the sample chamber 30 is connected to the electron gun chamber 20 through the objective lens port 201. The aperture conveying device 10 is the aperture conveying device 10 of the above-mentioned embodiment. The aperture connecting end 22 is located in the sample chamber 30, and the aperture 40 is connected to the aperture connecting end 22. The aperture conveying device 10 is used to drive the aperture 40 to move to a first preset position and a second preset position. When the aperture 40 moves to the first preset position, the aperture 40 is sealed with the objective lens port 201. When the aperture 40 moves to the second preset position, the aperture 40 is separated from the objective lens port 201. The vacuum pump is used to evacuate the electron gun chamber 20 and the sample chamber 30.

[0077] Among them, Figure 4 As shown, when the diaphragm 40 moves to the first preset position, the diaphragm 40 is sealed with the objective lens port 201, and the diaphragm 40 can reduce the flow area between the electron gun chamber 20 and the sample chamber 30 at the objective lens port 201. When the vacuum pump has different powers for evacuating the electron gun chamber 20 and the sample chamber 30, a pressure difference can be formed between the electron gun chamber 20 and the sample chamber 30, that is, there is a pressure difference on both sides of the diaphragm 40, and the electron gun chamber 20 and the sample chamber 30 have different vacuum degrees. For example, the power of the vacuum pump for evacuating the electron gun chamber 20 can be greater than the power of the vacuum pump for evacuating the sample chamber 30, so that the electron gun chamber 20 is in a high vacuum state (for example, the pressure is less than 10 -3 Pa) to reduce the attenuation of the electron beam. The sample chamber 30 is in a low vacuum state (for example, the pressure is 10 -3 Pa~10 -1 Pa), so as to facilitate the scanning of some samples containing water, porous, not resistant to electron beam burns, not suitable for gold spraying or biological samples, and avoid damage to the samples. At the same time, since the aperture 40 reduces the leakage rate of the electron gun chamber 20 at the objective lens port 201, the demand for the vacuum pump on the vacuum pumping speed of the electron gun chamber 20 can be reduced, thereby reducing the production cost of the product.

[0078] In addition, the power of the vacuum pump for evacuating the electron gun chamber 20 can also be equal to the power of the vacuum pump for evacuating the sample chamber 30, so that the vacuum degree of the electron gun chamber 20 and the sample chamber 30 is higher, so as to facilitate scanning of conventional samples in a high vacuum environment to ensure scanning accuracy.

[0079] Therefore, the scanning electron microscope 100 can achieve compatibility and fast switching between the standard vacuum working mode and the low vacuum working mode, which has great economic value and can enhance the product competitiveness of the scanning electron microscope 100.

[0080] It is understandable that when the sample can withstand a high vacuum environment, the scanning electron microscope 100 can be switched to a standard vacuum working mode, and the vacuum pump pumps the electron gun chamber 20 and the sample chamber 30 to a high vacuum state to ensure scanning accuracy. For samples that cannot withstand a high vacuum environment, the scanning electron microscope 100 can be switched to a low vacuum working mode, and at this time, the vacuum pump pumps the electron gun chamber 20 to a high vacuum state and the sample chamber 30 to a low vacuum state, thereby avoiding damage to the sample.

[0081] Reference Figure 3 As shown, when the diaphragm 40 moves to the second preset position, the diaphragm 40 is separated from the objective lens port 201 to facilitate inspection and maintenance of the diaphragm 40. When the diaphragm conveying device 10 drives the diaphragm 40 to move from the second preset position to the first preset position, the diaphragm 40 can move forward and upward along with the diaphragm connecting end 22, thereby reducing the wear of the diaphragm 40 and the objective lens port 201 when they contact each other.

[0082] According to the scanning electron microscope 100 of the embodiment of the present invention, the diaphragm conveying device 10 is used to drive the diaphragm 40 to move to a first preset position and a second preset position. When the diaphragm 40 moves to the first preset position, the diaphragm 40 is sealed and matched with the objective lens port 201. The electron gun chamber 20 and the sample chamber 30 are evacuated by a vacuum pump. The scanning electron microscope 100 can achieve compatibility and rapid switching between a standard vacuum working mode and a low vacuum working mode, which is beneficial to improving the product competitiveness of the scanning electron microscope 100.

[0083] In some embodiments of the present invention, reference body 3 and Figure 4 As shown, the aperture conveying device 10 also includes: a sealing bellows 8, the sealing bellows 8 and the driving assembly 3 are both arranged on the outside of the sample chamber 30, the sealing bellows 8 is sleeved on the pushing rod 2, one end of the sealing bellows 8 is connected to the sample chamber 30, and the other end of the sealing bellows 8 is fixed and sealed to the pushing rod 2.

[0084] Among them, one end of the sealing bellows 8 is connected to the sample chamber 30, and the other end of the sealing bellows 8 is fixed and sealed with the push rod 2. The inside of the sealing bellows 8 is a low-pressure vacuum environment, and the force of the external atmospheric pressure on the bellows is directed to the sample chamber 30, so that the sealing bellows 8 exerts a pulling force on the push rod 2 in the direction of the sample chamber 30.

[0085] When the driving component 3 is a ball screw motion pair, the pulling force of the sealing bellows 8 on the push rod 2 can eliminate the backlash difference between the screw 322 of the driving member 32 and the nut (transmission member 31). Then, a high-resolution stepper motor and a linear guide rail are used to improve the motion accuracy of the driving component 3 and the aperture 40.

[0086] In addition, when the driving assembly 3 is other motion pairs, the pulling force of the sealing bellows 8 on the push rod 2 can eliminate the virtual position of the driving assembly 3 to improve the motion accuracy of the driving assembly 3 and the diaphragm 40.

[0087] In some embodiments of the present invention, reference Figure 1 and Figure 2 As shown, the aperture conveying device 10 also includes: a sealing flange 9, the sealing flange 9 and the support member 1 are both arranged outside the sample chamber 30, the support member 1 is sealed with the outer wall of the sample chamber 30 through the sealing flange 9, the aperture connecting end 22 passes through the supporting hole 11, the sealing flange 9 and the outer wall of the sample chamber 30 in sequence and then enters the sample chamber 30, one end of the sealing bellows 8 is sealedly connected to the side of the support member 1 away from the sealing flange 9, the other end of the sealing bellows 8 is fixed and sealed with the pushing end 21, the sealing bellows 8 is connected with the sample chamber 30 through the supporting hole 11 and the sealing flange 9, thereby reducing the risk of air leakage between the sealing bellows 8 and the sample chamber 30.

[0088] In some embodiments of the present invention, reference Figure 7-Figure 9 As shown, the aperture 40 includes: a rotating shaft seat 401 and an aperture body 402, the rotating shaft seat 401 is rotatably connected to the aperture connecting end 22 around a first axis, the aperture body 402 is rotatably connected to the rotating shaft seat 401 around a second axis, and the second axis is perpendicular to the first axis.

[0089] Among them, the aperture body 402 can control the intensity and diameter of the electron beam, the aperture body 402 is suitable for sealing with the objective lens port 201, the shaft seat 401 can form a two-axis self-compensation structure, when the aperture body 402 is tilted relative to the objective lens port 201, under the push of the aperture connecting end 22, the aperture body 402 can automatically rotate to fit and seal with the objective lens port 201 after contacting with the objective lens port 201, thereby helping to improve the fitting effect between the aperture body 402 and the end face of the objective lens port 201, and reducing the amount of air leakage at the objective lens port 201.

[0090] In some embodiments of the present invention, reference Figure 7 and Figure 8As shown, the diaphragm 40 also includes an adapter block 403, and the shaft seat 401 is connected to the diaphragm connecting end 22 through the adapter block 403. The diaphragm connecting end 22 can be a standard external thread structure to improve the versatility of the diaphragm connecting end 22. When the diaphragm 40 is in use, one end of the adapter block 403 is connected to the diaphragm connecting end 22, and the other end of the adapter block 403 is connected to the shaft seat 401. In addition, the diaphragm 40 can be removed from the diaphragm connecting end 22, and then accessories such as a backscatter detection chip and an electron gun pole shoe can be installed on the diaphragm connecting end 22, which is beneficial to broaden the scope of use of the diaphragm conveying device 10.

[0091] Reference Figure 8 As shown, the shaft seat 401 includes a first arm 4011, a second arm 4012, a connecting arm 4013 and a first shaft 4014. The first arm 4011 and the second arm 4012 are arranged opposite to each other in the second axis direction. The connecting arm 4013 is connected between the first arm 4011 and the second arm 4012. The first shaft 4014 is connected to the connecting arm 4013. The axis of the first shaft 4014 is the first axis. The first shaft 4014 is connected to the adapter block 405 by a fastening screw 405. 03 rotational connection. In the extension direction of the first axis, lubricating gaskets 406 are provided between the fastening screws 405 and the adapter block 403, as well as between the connecting arm 4013 and the adapter block 403, so as to reduce the wear of the shaft seat 401 and the adapter block 403. The aperture body 402 is arranged between the first arm 4011 and the second arm 4012. In the direction of the second axis, the first arm 4011 and the second arm 4012 are rotationally connected to the two sides of the aperture body 402 through the corresponding second rotating shaft 407.

[0092] In some embodiments of the present invention, reference Figure 7 and Figure 8 As shown, the diaphragm 40 further includes: a sealing ring 408 , which is provided on the diaphragm body 402 . When the diaphragm 40 moves to the first preset position, the sealing ring 408 is sealed and matched with the objective lens port 201 .

[0093] The sealing ring 408 may be a rubber sealing ring, which can improve the sealing performance between the aperture 40 and the objective lens port 201, thereby further reducing the air leakage at the objective lens port 201, reducing the vacuum pump's requirement on the pumping speed of the electron gun chamber 20, and thus reducing the product production cost.

[0094] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0095] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A diaphragm conveying device, characterized in that: include: A support member (1), wherein the support member (1) has a support hole (11); A push rod (2), the push rod (2) being inserted into the support hole (11), the push rod (2) comprising a push end (21) and an aperture connection end (22), the push end (21) and the aperture connection end (22) being located on both sides of the support hole (11) in the axial direction, and the aperture connection end (22) being suitable for being connected to the aperture (40); A driving assembly (3), the driving assembly (3) being used to drive the push rod (2) to move along the axial direction of the supporting hole (11); An actuating assembly (4) is used to drive the pushing rod (2) to swing when the pushing rod (2) moves along the axial direction of the supporting hole (11), so as to make the pushing end (21) and the aperture connecting end (22) move in opposite directions in the radial direction of the supporting hole (11).

2. The aperture conveying device according to claim 1, characterized in that The driving assembly (3) comprises: A transmission member (31), the transmission member (31) being movably connected to the pushing end (21); A driving member (32), wherein the driving member (32) is used to drive the transmission member (31) to move along the axial direction of the supporting hole (11).

3. The aperture conveying device according to claim 2, characterized in that The actuating assembly (4) comprises: A guide frame (41), the guide frame (41) having a guide surface (411), the guide surface (411) being arranged obliquely relative to the axis of the support hole (11); A guide member (42), wherein the guide member (42) is connected to the push rod (2), and the guide member (42) is suitable for guiding and cooperating with the guide surface (411).

4. The aperture conveying device according to claim 3, characterized in that The guide member (42) comprises: A mounting plate (421), wherein the mounting plate (421) is fixedly connected to the push rod (2); A roller (422), the roller (422) being rotatably connected to the mounting plate (421), and the roller (422) being suitable for rolling along the guide surface (411).

5. The aperture conveying device according to claim 3, characterized in that The guide frame (41) is arranged between the support member (1) and the pushing end (21), and the guide surface (411) is located above the pushing rod (2). In the axial direction of the support hole (11), the guide surface (411) has a guide front end (4111) close to the aperture connecting end (22) and a guide rear end (4112) away from the aperture connecting end (22). In the direction from the guide front end (4111) to the guide rear end (4112), the distance between the guide surface (411) and the pushing rod (2) gradually increases.

6. The aperture conveying device according to any one of claims 3 to 5, characterized in that: The actuating assembly (4) further comprises: an elastic member (43), wherein the elastic member (43) is respectively connected to the transmission member (31) and the pushing end (21), and the elastic member (43) is used to apply an elastic force to the pushing end (21) so as to keep the guide member (42) in abutment with the guide surface (411).

7. A scanning electron microscope, characterized in that: include: An electron gun chamber (20), wherein the electron gun chamber (20) has an objective lens port (201); A sample chamber (30), the sample chamber (30) being in communication with the electron gun chamber (20) through the objective lens port (201); An aperture conveying device, wherein the aperture conveying device is the aperture conveying device according to any one of claims 1 to 6, and the aperture connecting end (22) is located in the sample chamber (30); An aperture (40), wherein the aperture (40) is connected to the aperture connection end (22), and the aperture conveying device is used to drive the aperture (40) to move to a first preset position and a second preset position, and when the aperture (40) moves to the first preset position, the aperture (40) is sealed and matched with the objective lens port (201), and when the aperture (40) moves to the second preset position, the aperture (40) is separated from the objective lens port (201); A vacuum pump is used to evacuate the electron gun chamber (20) and the sample chamber (30).

8. The scanning electron microscope according to claim 7, characterized in that: The aperture conveying device also includes: a sealing bellows (8), the sealing bellows (8) and the driving assembly (3) are both arranged on the outside of the sample chamber (30), the sealing bellows (8) is sleeved on the pushing rod (2), one end of the sealing bellows (8) is connected to the sample chamber (30), and the other end of the sealing bellows (8) is fixed and sealed to the pushing rod (2).

9. The scanning electron microscope according to claim 7, characterized in that: The aperture (40) comprises: A rotating shaft seat (401), the rotating shaft seat (401) being rotatably connected to the aperture connection end (22) around a first axis; An aperture body (402), wherein the aperture body (402) is rotatably connected to the rotating shaft seat (401) around a second axis, and the second axis is perpendicular to the first axis.

10. The scanning electron microscope according to claim 9, characterized in that: The diaphragm (40) further comprises: a sealing ring (408), wherein the sealing sleeve is arranged on the diaphragm body (402), and when the diaphragm (400) moves to the first preset position, the sealing ring (408) is in sealing cooperation with the objective lens port (201).

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