Micro-motion stage and motion system having the same

Abstract

The present invention provides a micro-motion stage and a motion system having the same, including: a rotating mechanism, the rotating mechanism including a base and a rotating stage rotatably arranged on the base; a lifting mechanism, arranged on the rotating stage, the lifting part of the lifting mechanism being liftably arranged on the rotating stage; an adsorbent, arranged on the lifting part. The technical solution provided by the present invention can solve the technical problem in the prior art that the vertical motion stability of the overall micro-motion stage is not conducive to the use of a fixed top column structure.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor precision equipment, and in particular to a micro-motion stage and a motion system having the same. Background Art

[0002] At present, in the micro-motion stage of semiconductor precision equipment, the top column used for transferring silicon wafers is generally a fixed structure, and the top column will not rotate with the rotating stage.

[0003] However, with such a setting, it is often necessary to control the height of the suction cup through the vertical drive structure, so as to adjust the amount of the top column protruding from the suction cup. This will make the vertical displacement stroke of the vertical drive structure longer, and the stroke needs to cover the height of the top column. When the driving part of the vertical drive structure is at a higher position, the overall center of gravity of the vertical drive structure will be biased upward, which is not conducive to the overall operating stability of the vertical drive structure, and will cause downward swing under large acceleration. Summary of the invention

[0004] The main purpose of the present invention is to provide a micro-motion stage and a motion system having the same, so as to solve the technical problem in the prior art that the vertical motion stability of the entire micro-motion stage is not favorable due to the use of a fixed top column structure.

[0005] In order to achieve the above object, according to one aspect of the present invention, a micro-motion stage is provided, comprising:

[0006] A rotating mechanism, the rotating mechanism comprising a base and a rotating table rotatably arranged on the base;

[0007] A lifting mechanism is arranged on the rotating platform, and a lifting part of the lifting mechanism is arranged on the rotating platform in a liftable manner;

[0008] The adsorption member is arranged on the lifting part.

[0009] Furthermore, the lifting mechanism comprises:

[0010] A connecting piece, wherein the lifting portion is arranged on one side of the connecting piece;

[0011] A driving member is arranged on the other side of the connecting member, a driving end of the driving member is arranged to be liftable, and the driving end of the driving member is drivingly connected to the connecting member;

[0012] The guide member is arranged at the other side of the connecting member with a spacing from the driving member. The guide member extends along the lifting direction of the driving end. A guide hole matching the guide member is arranged on the rotating table. The guide member can be lifted and lowered in the guide hole.

[0013] Further, the connecting piece is a ring-shaped structure;

[0014] There are multiple lifting parts, and the multiple lifting parts are arranged at intervals on one side of the connecting member along the circumference of the connecting member; and / or,

[0015] There are multiple driving members, and the multiple driving members are arranged at intervals on the other side of the connecting member along the circumference of the connecting member.

[0016] Furthermore, the rotating table has mounting holes penetrating through two sides of the rotating table, and the micro-motion table further includes a guide sleeve, which is mounted in the mounting hole, and the guide sleeve has a guide hole;

[0017] Wherein, a limiting protrusion is provided on the guide member, and the limiting protrusion is used to abut against the end of the guide sleeve in a limiting manner; and / or,

[0018] The micro-motion stage further comprises a stopper, which is arranged below the rotating stage, and at least a portion of the stopper is arranged at the end of the mounting hole and is arranged opposite to at least a portion of the guide sleeve.

[0019] Further, the connecting member includes an annular plate and a connecting convex plate connected to each other, the connecting convex plate is arranged to protrude from the outer edge of the annular plate, there are multiple lifting parts, there are multiple driving members and multiple connecting convex plates, the multiple driving members are arranged in a one-to-one correspondence with the multiple connecting convex plates, and each driving member is installed on the corresponding connecting convex plate;

[0020] Wherein, a plurality of lifting portions are arranged on the annular plate at intervals along the circumference of the annular plate; and / or,

[0021] A plurality of connecting protrusions are arranged at intervals along the circumference of the annular plate; and / or,

[0022] The plurality of connecting protruding plates and the plurality of lifting portions are staggeredly arranged along the circumferential direction of the annular plate.

[0023] Furthermore, a limit member is provided on the rotating table, and the limit member is located above the connecting member; a first detection air circuit is provided on the connecting member, an air inlet of the first detection air circuit is used for introducing gas, an air outlet of the first detection air circuit is arranged relative to the limit member, and the connecting member can be moved up and down so that the air outlet of the first detection air circuit is in a first blocking position blocked by the limit member or a first avoidance position spaced from the limit member; the micro-motion table also includes a first air pressure detection member, a detection head of the first air pressure detection member is arranged at the first detection air circuit, and the first air pressure detection member is used to detect the air pressure of the first detection air circuit.

[0024] Furthermore, the lifting mechanism further includes a ventilator, which is connected to the air inlet of the first detection air path;

[0025] Wherein, the ventilator and the driving member are arranged at a distance from each other on the other side of the connecting member; and / or,

[0026] The rotating platform is provided with an avoidance groove matched with the ventilator.

[0027] Furthermore, a second detection air circuit is arranged on the rotating table, and an air inlet of the second detection air circuit is used for introducing gas, and an air outlet of the second detection air circuit is arranged relative to at least a part of the connecting piece, and the connecting piece can be moved up and down to be in a second blocking position for blocking the air outlet of the second detection air circuit or a second avoidance position spaced apart from the air outlet of the second detection air circuit; the micro-motion table also includes a second air pressure detection component, a detection head of the second air pressure detection component is arranged at the second detection air circuit, and the second air pressure detection component is used to detect the air pressure of the second detection air circuit.

[0028] Further, a limit member is provided on the rotating platform, the limit member is located above the connecting member, the limit member is arranged opposite to at least a part of one side of the connecting member, a first limit ball head is provided on one side of the limit member close to the connecting member or on one side of the connecting member, and the first limit ball head protrudes from one side of the limit member close to the connecting member or protrudes from one side of the connecting member; and / or,

[0029] The other side of the connecting member is arranged opposite to at least a part of the table body of the rotating table, and a second limiting ball head is arranged on one side of the table body of the rotating table close to the connecting member or on the other side of the connecting member, and the second limiting ball head protrudes from the one side of the table body of the rotating table close to the connecting member or on the other side of the connecting member.

[0030] Further, the rotating table includes a table body and a raised portion connected to each other, the raised portion is arranged above the table body, there are multiple raised portions, and the multiple raised portions are arranged at intervals along the circumference of the table body, and a positioning groove is formed between two adjacent table bodies; the connecting member includes an annular plate and a connecting convex plate connected to each other, the connecting convex plate is arranged at the outer periphery of the annular plate, the annular plate is arranged in the multiple raised portions, and the connecting convex plate is arranged in the positioning groove; the driving member is arranged on the connecting convex plate, and an avoidance recess matched with the driving member is arranged on the table body, and the driving member is arranged in the avoidance recess.

[0031] Furthermore, the lifting mechanism also includes:

[0032] The vacuum pumping component is arranged at the other side of the connecting component with a spacing from the driving component, and the vacuum pumping component is communicated with the air path of the lifting part.

[0033] Furthermore, a connecting passage is provided on the connecting piece, there are multiple lifting parts, the multiple lifting parts are spaced apart on one side of the connecting piece, the air paths of the multiple lifting parts are all connected to the connecting passage, and the vacuum pump is connected to the connecting passage.

[0034] Furthermore, the micro-motion table further comprises a suction cup, which is arranged above the rotating table, and is provided with an avoidance hole adapted to the lifting part, and the lifting part can be lifted and lowered through the avoidance hole; the suction cup comprises a main body and a flexible connection part;

[0035] Among them, at least two annular grooves are arranged on the main body, at least two annular grooves are arranged at intervals along the radial direction of the main body, and at least one annular groove is arranged at the edge of the main body; there are at least two flexible connection parts, at least two flexible connection parts are arranged one-to-one corresponding to the at least two annular grooves, and each flexible connection part is arranged in the corresponding annular groove.

[0036] Further, the suction cup further comprises a vertical flexible seal, and the vertical flexible seal is arranged in the avoidance hole; and / or,

[0037] The main body is provided with an installation groove adapted to the flexible connection part. The flexible connection part includes a fixing part and a deformation part which are connected to each other. The fixing part is fixedly installed in the installation groove. At least part of the deformation part protrudes from the notch of the installation groove. A weakening groove is provided at the connection between the fixing part and the deformation part.

[0038] Furthermore, the micro-motion stage further comprises:

[0039] The suction cup is arranged above the rotating platform, and the rotating platform is drivingly connected to the suction cup to drive the suction cup to rotate;

[0040] The brake structure, at least part of which is movably arranged between the rotating platform and the suction cup, has a brake position in which at least part of the brake structure is in contact with the suction cup and a release position in which at least part of the brake structure is spaced apart from the suction cup.

[0041] Furthermore, the micro-motion platform further comprises a vertical stator part and a vertical mover part, the vertical mover part is arranged to be liftable relative to the vertical stator part, and the vertical stator part is drivingly connected to the base; the brake structure comprises:

[0042] The brake pad forms at least part of the brake structure, and an air passage is provided on the brake pad; when gas is passed into the air passage, the brake pad and the suction cup are spaced apart; when no gas is passed into the air passage or negative pressure is passed into the air passage, the brake pad and the suction cup are in contact;

[0043] A spring, a brake pad is mounted on the spring, and the spring is fixedly connected to the vertical mover portion;

[0044] The elastic support member is arranged on a side of the spring sheet away from the brake pad, one end of the elastic support member is used to support the brake pad or the spring sheet, and the other end of the elastic support member is connected to the vertical mover portion.

[0045] Further, the micro-motion platform further comprises a vertical stator part and a vertical mover part, the vertical stator part has a mounting groove, the vertical mover part is arranged in the mounting groove so as to be liftable relative to the vertical stator part, and the vertical stator part is drivingly connected to the base; the micro-motion platform further comprises:

[0046] A first cross roller guide rail is arranged on one side of the mounting groove, and two sides of the first cross roller guide rail are respectively connected to the vertical stator part and the vertical mover part;

[0047] A second cross roller guide is arranged on the other side of the mounting groove, the second cross roller guide is arranged opposite to the first cross roller guide, and two sides of the second cross roller guide are respectively connected to the vertical stator part and the vertical mover part;

[0048] Among them, one of the first cross roller guide and the second cross roller guide is in contact with the groove wall on one side of the mounting groove, and the other of the first cross roller guide and the second cross roller guide is spaced apart from the groove wall on one side of the mounting groove.

[0049] According to another aspect of the present invention, there is provided a motion system, comprising:

[0050] Coarse motion table;

[0051] The driving part of the fine-motion stage and the coarse-motion stage is drivingly connected to the fine-motion stage.

[0052] By applying the technical solution of the present invention, the lifting mechanism is arranged on the rotating table, and the lifting part of the lifting mechanism can be lifted and lowered relative to the rotating table, thereby driving the adsorption part to be lifted and lowered, and adsorbing the part to be processed through the adsorption part. With the structure in this embodiment, since the lifting mechanism itself has a lifting function, the vertical stroke of the rotating table is not required, thereby avoiding the situation where the vertical drive structure is prone to the overall center of gravity being biased upward at a higher position due to a long stroke, which affects the stability of the vertical drive structure, which is beneficial to improving the overall operation stability of the vertical drive structure and improving the stiffness of the overall structure in the Rx and Ry directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0054] Figure 1 A schematic structural diagram of a micro-motion stage provided according to an embodiment of the present invention is shown;

[0055] Figure 2 A schematic diagram of the installation structure of the lifting mechanism and the adsorption member provided according to an embodiment of the present invention is shown;

[0056] Figure 3 A schematic diagram of installing a guide member according to an embodiment of the present invention is shown;

[0057] Figure 4 A cross-sectional view of a part of the structure when the lifting mechanism and the limiting member provided in an embodiment of the present invention cooperate with each other is shown;

[0058] Figure 5A cross-sectional view of a part of the structure when the second limiting ball head provided in an embodiment of the present invention performs mechanical contact limiting is shown;

[0059] Figure 6 A schematic structural diagram of a position limiting member provided according to an embodiment of the present invention is shown;

[0060] Figure 7 A schematic diagram of the installation of a lifting mechanism provided according to an embodiment of the present invention is shown;

[0061] Figure 8 A schematic diagram of installing a guide sleeve according to an embodiment of the present invention is shown;

[0062] Fig. 9 A schematic diagram of the structure of a suction cup provided according to an embodiment of the present invention is shown;

[0063] Fig.10 shows a cross-sectional view of a suction cup provided according to an embodiment of the present invention;

[0064] Fig.11 A schematic structural diagram of a brake structure in one direction according to an embodiment of the present invention is shown;

[0065] Fig.12 A schematic structural diagram of a brake structure in another direction according to an embodiment of the present invention is shown;

[0066] Fig.13 A schematic diagram showing the position of a second detection gas path provided according to an embodiment of the present invention is shown.

[0067] The above drawings include the following reference numerals:

[0068] 10. Rotating mechanism; 11. Base; 12. Rotating table; 121. Second detection gas path; 122. Table body; 123. Protruding portion; 13. Rotating motor;

[0069] 20. Lifting mechanism; 21. Lifting part; 22. Connecting piece; 221. Ring plate; 222. Connecting convex plate; 223. First detection gas path; 224. Connecting flange; 23. Driving piece; 24. Guide piece; 241. Position limiting protrusion; 25. Ventilator; 26. Vacuuming piece;

[0070] 30. Adsorption parts;

[0071] 40. Guide sleeve;

[0072] 50. Stopper;

[0073] 60. Limiting parts;

[0074] 70. Suction cup; 71. Main body; 72. Annular groove; 73. Flexible connection part; 731. Fixing part; 732. Deformation part; 733. Weakening groove; 74. Avoidance hole; 75. Vertical flexible sealing member;

[0075] 80. brake structure; 81. brake pad; 811. air duct; 82. elastic support member; 821. connecting column; 822. elastic member; 83. spring leaf;

[0076] 91. vertical stator part; 911. stator plate; 92. vertical mover part;

[0077] 101. a first limiting ball head; 102. a second limiting ball head;

[0078] 110. First cross roller guide; 120. Second cross roller guide; 130. Sealing ring. DETAILED DESCRIPTION

[0079] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0080] like Figures 1 to 13 As shown, the first embodiment of the present invention provides a fine motion stage, which includes: a rotating mechanism 10, a lifting mechanism 20 and a suction member 30, wherein the rotating mechanism 10 includes a base 11 and a rotating table 12 rotatably arranged on the base 11; the lifting mechanism 20 is arranged on the rotating table 12, and the lifting part 21 of the lifting mechanism 20 is liftably arranged on the rotating table 12. The suction member 30 is arranged on the lifting part 21.

[0081] The micro-motion table provided in this embodiment is adopted, and the lifting mechanism 20 is arranged on the rotating table 12, so that the lifting part 21 of the lifting mechanism 20 can be lifted and lowered relative to the rotating table 12, thereby driving the adsorption member 30 to be lifted and lowered, and the adsorption member 30 is adsorbed on the workpiece. With the structure in this embodiment, since the lifting mechanism 20 itself has the lifting function, the vertical stroke of the rotating table 12 is not required, so that the vertical drive structure can be prevented from being easily biased upward due to the long stroke at a higher position, thereby affecting the stability of the vertical drive structure. This is beneficial to improving the overall operating stability of the vertical drive structure and improving the stiffness of the overall structure in the Rx and Ry directions. Therefore, the micro-motion table provided in this embodiment can solve the technical problem in the prior art that the vertical movement stability of the overall micro-motion table is not conducive to the use of a fixed top column structure.

[0082] In this embodiment, the lifting mechanism 20 includes a connecting member 22, a driving member 23 and a guide member 24. The lifting part 21 is arranged on one side of the connecting member 22; the driving member 23 is arranged on the other side of the connecting member 22, and the driving end of the driving member 23 is arranged to be liftable, and the driving end of the driving member 23 is connected to the connecting member 22. The guide member 24 is arranged on the other side of the connecting member 22 with a spacing from the driving member 23. The guide member 24 extends along the lifting direction of the driving end. A guide hole adapted to the guide member 24 is arranged on the rotating table 12, and the guide member 24 is arranged to be liftable in the guide hole. The use of such a structural setting can facilitate the optimization of the overall structural connection mode of the lifting mechanism 20 and improve the lifting operation stability of the lifting mechanism 20. In addition, the above setting method can optimize the overall structural layout of the lifting mechanism 20, save space, and ensure the flatness of the structure.

[0083] Specifically, the driving member 23 may be a driving cylinder or a lifting cylinder, and the cylinder may be a micro cylinder. Specifically, the guiding member 24 may be a guiding column.

[0084] Specifically, the connecting member 22 is an annular structure.

[0085] There are multiple lifting parts 21, and the multiple lifting parts 21 are arranged at intervals on one side of the connecting member 22 along the circumferential direction of the connecting member 22. In this way, the structural layout of the multiple lifting parts 21 can be improved, and the stability of the lifting operation can be improved by the multiple lifting parts 21.

[0086] Specifically, the plurality of lifting parts 21 are evenly distributed to further improve the stability of the lifting operation of the plurality of lifting parts 21. Specifically, there may be three lifting parts 21, and the angle between two adjacent lifting parts 21 is 120 degrees.

[0087] Specifically, there are multiple driving members 23, and the multiple driving members 23 are arranged at intervals along the circumference of the connecting member 22 on the other side of the connecting member 22, so as to better improve the operating stability of the lifting part 21 and optimize the layout of multiple driving structures.

[0088] Specifically, the multiple driving members 23 are evenly distributed to further improve the driving stability of the multiple driving members 23 .

[0089] In this embodiment, the rotating stage 12 has mounting holes penetrating through both sides of the rotating stage 12 , and the fine motion stage further includes a guide sleeve 40 , which is installed in the mounting holes and has a guide hole.

[0090] Among them, a limiting protrusion 241 is provided on the guide member 24, and the limiting protrusion 241 is used to limit the end of the guide sleeve 40. With such a setting, the lifting movement can be limited by the abutment between the limiting protrusion 241 and the guide sleeve 40 during the lifting movement, so as to avoid the situation where the guide member 24 and the guide sleeve 40 are separated due to the excessive stroke of the lifting movement, thereby ensuring the lifting operation stability of the lifting mechanism 20. In actual application, the limiting protrusion 241 can also facilitate installation, but the absence of the limiting protrusion 241 will not affect the normal use of the guide member 24.

[0091] In this embodiment, a ball bearing for guiding is arranged between the guide sleeve 40 and the guide member 24. Because of the existence of the roller, when the guide member 24 moves, the guide sleeve 40 will also move, but the strokes of the two are different.

[0092] Specifically, the micro-motion stage further includes a stopper 50, which is disposed below the rotating stage 12, and at least a portion of the stopper 50 is disposed at the end of the mounting hole and is disposed opposite to at least a portion of the guide sleeve 40. With such an arrangement, the guide sleeve 40 can be stopped by the stopper 50, so as to prevent the guide sleeve 40 from creeping and falling or sliding from the bottom end of the mounting hole after long-term movement, thereby improving the installation stability of the guide sleeve 40, thereby facilitating the guide stability of the guide sleeve 40, and ensuring the smooth operation of the jacking movement.

[0093] In this embodiment, the connecting member 22 includes an annular plate 221 and a connecting convex plate 222 connected to each other, the connecting convex plate 222 is arranged to protrude from the outer edge of the annular plate 221, there are multiple lifting parts 21, there are multiple driving members 23 and connecting convex plates 222, multiple driving members 23 are arranged in a one-to-one correspondence with multiple connecting convex plates 222, and each driving member 23 is installed on the corresponding connecting convex plate 222. In this way, it is convenient to optimize the structural layout of the connecting member 22, and it is also convenient to install and connect the driving member 23.

[0094] Specifically, a plurality of lifting portions 21 are arranged on the annular plate 221 at intervals along the circumference of the annular plate 221 , so that the structural layout of the plurality of lifting portions 21 can be optimized and stable lifting can be performed through the joint action of the plurality of lifting portions 21 .

[0095] A plurality of connecting protrusions 222 are arranged at intervals along the circumference of the annular plate 221 to optimize the overall structural layout of the connecting member 22 .

[0096] A plurality of connecting protrusions 222 and a plurality of lifting portions 21 are staggered along the circumference of the annular plate 221, so that the lifting portion 21 can be staggered from the annular plate 221, and space is reserved on the side of the connecting member 22 away from the lifting portion 21, so as to reserve installation space for other structures subsequently connected to the lifting portion 21 (such as a structure for providing air pressure power, such as a ventilator 25), thereby facilitating the optimization of the spatial layout of the overall structure.

[0097] In this embodiment, a limiter 60 is provided on the rotating table 12, and the limiter 60 is located above the connecting member 22; a first detection gas path 223 is provided on the connecting member 22, and an air inlet of the first detection gas path 223 is used to pass gas, and an air outlet of the first detection gas path 223 is arranged opposite to the limiter 60, and the connecting member 22 can be moved up and down so that the air outlet of the first detection gas path 223 is in a first blocking position blocked by the limiter 60 or a first avoidance position spaced from the limiter 60. The micro-motion table also includes a first air pressure detection member, and a detection head of the first air pressure detection member is arranged at the first detection gas path 223, and the first air pressure detection member is used to detect the air pressure of the first detection gas path 223. With such a setting, when the connecting member 22 moves to make the first detection gas path 223 in the first blocking position, at this time, since the gas outlet of the first detection gas path 223 is blocked, the gas cannot flow out smoothly from the gas outlet of the first detection gas path 223, and thus the first air pressure detection member will detect the rise of the air pressure in the first detection gas path 223; when the connecting member 22 moves to make the first detection gas path 223 in the first avoidance position, at this time, since the gas outlet of the first detection gas path 223 is not blocked, the gas can flow out smoothly from the gas outlet, and the air pressure detected by the first air pressure detection member is relatively normal. Therefore, in the two different positions of the first blocking position and the first avoidance position, the air pressure detected by the first air pressure detection member will also be different, and correspondingly, the air pressure detected by the first air pressure detection member in the first blocking position is greater than the air pressure detected by the first air pressure detection member in the first avoidance position. Therefore, the size of the air pressure detected by the first air pressure detection component can facilitate the determination of the position of the air outlet of the first detection air path 223 , thereby realizing the determination of the operating position of the connecting component 22 .

[0098] Specifically, a sealing ring 130 is further provided at the gas outlet of the first detection gas path 223 , so as to more accurately judge the state of the first detection gas path 223 , thereby facilitating accurate judgment of the position of the connecting member 22 .

[0099] In this embodiment, the lifting mechanism 20 further includes a ventilator 25 , which is connected to the air inlet of the first detection air path 223 , so as to facilitate ventilation operation to the first detection air path 223 through the ventilator 25 .

[0100] The vent 25 and the driving member 23 are spaced apart on the other side of the connecting member 22 to optimize the structural layout of the vent 25, avoid the vent 25 occupying too much space on the upper side of the connecting member 22, and improve the compactness of the overall structural layout.

[0101] In this embodiment, an avoidance groove adapted to the vent cylinder 25 is provided on the rotating table 12 to facilitate the installation and fixation of the vent cylinder 25, improve the setting stability of the vent cylinder 25, and avoid the vent cylinder 25 occupying additional space. The overall height is reduced through the nested structural layout.

[0102] Specifically, a second detection gas circuit 121 is arranged on the rotating table 12, and the air inlet of the second detection gas circuit 121 is used for introducing gas, and the air outlet of the second detection gas circuit 121 is arranged relative to at least a part of the connecting piece 22, and the connecting piece 22 can be moved up and down to be in a second blocking position for blocking the air outlet of the second detection gas circuit 121 or a second avoidance position spaced apart from the air outlet of the second detection gas circuit 121; the micro-motion table also includes a second air pressure detection component, and the detection head of the second air pressure detection component is arranged at the second detection gas circuit 121, and the second air pressure detection component is used to detect the air pressure of the second detection gas circuit 121. With such a setting, when the connecting member 22 moves to make the second detection gas path 121 in the second blocking position, at this time, since the gas outlet of the second detection gas path 121 is blocked, the gas cannot flow out smoothly from the gas outlet of the second detection gas path 121, and thus the second air pressure detection member will detect the rise of the air pressure in the second detection gas path 121; when the connecting member 22 moves to make the second detection gas path 121 in the second avoidance position, at this time, since the gas outlet of the second detection gas path 121 is not blocked, the gas can flow out smoothly from the gas outlet of the second detection gas path 121, and the air pressure detected by the second air pressure detection member is relatively normal. Therefore, in the case of two different positions, the second blocking position and the second avoidance position, the air pressure detected by the second air pressure detection member will also be different, and correspondingly, the air pressure detected by the second air pressure detection member in the second blocking position is greater than the air pressure detected by the second air pressure detection member in the second avoidance position. Therefore, the size of the air pressure detected by the second air pressure detection component can facilitate the determination of the position of the air outlet of the second detection air path 121 , thereby achieving the determination of the operating position of the connecting component 22 .

[0103] In this embodiment, a limit member 60 is provided on the rotating table 12, and the limit member 60 is located above the connecting member 22. The limit member 60 is arranged opposite to at least a part of one side of the connecting member 22. A first limit ball head 101 is provided on one side of the limit member 60 close to the connecting member 22 or on one side of the connecting member 22, and the first limit ball head 101 protrudes from the side of the limit member 60 close to the connecting member 22 or on one side of the connecting member 22. With such a structural arrangement, it is convenient to realize the mechanical upper limit of the connecting member 22 through the first limit ball head 101. The above arrangement realizes point contact limit, and can also reduce the impact damage to the connecting member 22 when contacting the upper part of the connecting member 22, so as to provide certain protection to the upper part of the connecting member 22 and facilitate precise adjustment.

[0104] The other side of the connecting member 22 is arranged opposite to at least part of the table body 122 of the rotating table 12, and a second limiting ball head 102 is arranged on one side of the table body 122 of the rotating table 12 close to the connecting member 22 or on the other side of the connecting member 22, and the second limiting ball head 102 protrudes from the one side of the table body 122 of the rotating table 12 close to the connecting member 22 or protrudes from the other side of the connecting member 22. In this way, the mechanical lower limiting of the connecting member 22 can be easily achieved through the second limiting ball head 102, and the above arrangement realizes point contact limiting, and can also reduce the impact damage to the other side of the connecting member 22 when the other side of the connecting member 22 contacts the second limiting ball head 102, so as to provide certain protection to the lower part of the connecting member 22 and facilitate precise adjustment.

[0105] Specifically, the rotating table 12 includes a table body 122 and a protrusion 123 connected to each other. The protrusion 123 is arranged above the table body 122. There are multiple protrusions 123, and the multiple protrusions 123 are arranged at intervals along the circumference of the table body 122, and a positioning groove is formed between two adjacent table bodies 122; the connecting member 22 includes an annular plate 221 connected to each other and a connecting convex plate 222. The connecting convex plate 222 is arranged at the outer periphery of the annular plate 221, and the annular plate 221 is arranged in the multiple protrusions 123, and the connecting convex plate 222 is arranged in the positioning groove; the driving member 23 is arranged on the connecting convex plate 222, and the table body 122 is provided with an avoidance recess adapted to the driving member 23, and the driving member 23 is arranged in the avoidance recess. With such a structural arrangement, it is convenient to optimize the structure of the rotating table 12, improve the compactness of the installation of the rotating table 12 structure and the connecting member 22, optimize the overall structural layout, reduce the height of the overall structure, and also facilitate to ensure the running stability of the connecting member 22.

[0106] In this embodiment, the lifting mechanism 20 further includes a vacuum pumping member 26, which is spaced apart from the driving member 23 on the other side of the connecting member 22, and the vacuum pumping member 26 is connected to the gas path of the lifting portion 21. With such a structural arrangement, it is easy to achieve vacuum adsorption (specifically, it can be used to adsorb silicon wafers) and ensure the adsorption effect. Specifically, the use of vacuum pumping hole members for adsorption can achieve adsorption of ordinary silicon wafers (silicon wafers with less warpage and relatively flat) and can also achieve adsorption of silicon wafers with greater warpage.

[0107] Specifically, the vacuum pumping member 26 is arranged at the outer edge of the annular plate 221, and the vacuum pumping member 26, the driving member 23 and the vent cylinder 25 are arranged at intervals around the outer edge of the annular plate 221. The connecting member 22 also includes a connecting flange 224, which is arranged at intervals with the connecting convex plate 222 along the periphery of the connecting member 22, and the connecting flange 224 is connected to the annular plate 221. There are at least two connecting flanges 224, and the vacuum pumping member 26 is installed on at least one of the two connecting flanges 224, and the vent cylinder 25 is installed on the other of the at least two connecting flanges 224.

[0108] Specifically, the connecting flange 224 and the connecting convex plate 222 can be provided in multiple numbers, and the multiple connecting flanges 224 and the multiple connecting convex plates 222 are alternately arranged. Specifically, there are three connecting flanges 224 and three connecting convex plates 222, and each of the three connecting convex plates 222 is provided with a driving member 23, a ventilator 25 is provided on one connecting flange 224, and a vacuum pumping member 26 is provided on another connecting flange 224, and another connecting flange 224 can be selectively provided with a ventilator 25 or a vacuum pumping member 26 according to actual conditions, so that the overall layout uniformity of the structural setting can be ensured.

[0109] Specifically, a connecting passage is provided on the connecting member 22, there are multiple lifting parts 21, and the multiple lifting parts 21 are arranged at intervals on one side of the connecting member 22. The gas paths of the multiple lifting parts 21 are all connected to the connecting passage, and the vacuum pump is connected to the connecting passage. With such a structural arrangement, it is easy to ensure that the adsorption parts 30 on each lifting part 21 can achieve stable adsorption, thereby improving adsorption stability.

[0110] In this embodiment, the micro-motion table further includes a suction cup 70, which is arranged above the rotating table 12. The suction cup 70 is provided with an avoidance hole 74 adapted to the lifting part 21, and the lifting part 21 can be lifted and lowered through the avoidance hole 74; the suction cup 70 includes a main body 71 and a flexible connection part 73. In this embodiment, at least two annular grooves 72 are provided on the main body 71, and at least two annular grooves 72 are arranged at intervals along the radial direction of the main body 71, and at least one annular groove 72 is arranged at the edge of the main body 71; there are at least two flexible connection parts 73, and at least two flexible connection parts 73 are arranged one-to-one with at least two annular grooves 72, and each flexible connection part 73 is arranged in a corresponding annular groove 72. With such a structural arrangement, it is easy to realize the adsorption of at least two structures of different sizes. Specifically, the above suction cup 70 can be used to adsorb silicon wafers of different sizes. Specifically, the flexible connection part 73 can be a silicone ring, and the flexible connection part 73 has a certain deformation ability. The flexible connection part 73 can be used to fit and contact the outer edge of silicon wafers of different sizes and shapes (especially for silicon wafers with large warpage) to achieve sealing at the outer edge, so as to protect the silicon wafer and ensure the adsorption effect of the silicon wafer. In other embodiments, the main body 71 can also be provided with only one annular groove, corresponding to which one flexible connection part is provided.

[0111] Specifically, the two annular grooves 72 in this embodiment correspond to 8 inches and 12 inches respectively, and multiple gas paths can be arranged, with each gas path being separated by a flexible connection portion 73 .

[0112] Specifically, the adsorption member 30 may be a nozzle structure. Preferably, the adsorption member 30 is a flexible nozzle to achieve vacuum adsorption.

[0113] Specifically, the suction cup 70 further includes a vertical flexible seal 75, which is disposed in the avoidance hole 74 to prevent air leakage at the avoidance hole 74. Alternatively, a sponge pad may be disposed in the avoidance hole 74 to prevent air leakage at the avoidance hole 74.

[0114] Specifically, the vertical flexible seal 75 is a seal that can be deformed in the vertical direction and can provide a sealing effect. It should be noted that the vertical direction in the vertical flexible seal 75 is consistent with the lifting direction of the lifting portion 21. Specifically, the vertical flexible seal 75 can be a seal in the shape of an accordion mouth.

[0115] Specifically, the main body 71 is provided with a mounting groove adapted to the flexible connection part 73, and the flexible connection part 73 includes a fixing part 731 and a deforming part 732 connected to each other, the fixing part 731 is fixedly installed in the mounting groove, at least part of the deforming part 732 protrudes from the notch of the mounting groove, and a weakening groove 733 is provided at the connection between the fixing part 731 and the deforming part 732. With such a structural setting, it is convenient to improve the installation stability of the flexible connection part 73, and the weakening groove 733 can also effectively ensure that the deforming part 732 can be deformed smoothly to be in contact with the corresponding silicon wafer.

[0116] Specifically, the cross-sectional shape of the flexible connection part 73 can be set to a Z shape. When the silicon wafer is adsorbed, the silicone ring is pressed down and deformed to reserve space, and the silicone ring does not protrude from the upper surface of the suction cup 70. The fixing part 731 is a structure that fits the installation groove. The fixing part 731 is pressed to the suction cup 70 by the fixing ring, so that when the upper part of the silicone ring is deformed, the fixing part 731 does not separate and deform, causing the silicone ring to separate and be squeezed and deformed.

[0117] In this embodiment, the micro-motion platform further includes a suction cup 70 and a brake structure 80. The suction cup 70 is arranged above the rotating platform 12. The rotating platform 12 is drivingly connected to the suction cup 70 to drive the suction cup 70 to rotate. At least part of the brake structure 80 is movably arranged between the rotating platform 12 and the suction cup 70. The brake structure 80 has a brake position in which at least part of the brake structure 80 is in contact with the suction cup 70 and a release position in which at least part of the brake structure 80 is spaced from the suction cup 70. With such a structural arrangement, the suction cup 70 can be effectively attached or separated by the brake structure 80, so that the brake structure 80 can be smoothly switched to the brake position or the release position.

[0118] Specifically, the micro-motion platform also includes a vertical stator part 91 and a vertical mover part 92. The vertical mover part 92 is arranged to be liftable relative to the vertical stator part 91, and the vertical stator part 91 is drivingly connected to the base 11. The brake structure 80 includes a brake pad 81, a spring 83 and an elastic support member 82. The brake pad 81 forms at least part of the brake structure 80, and an air channel 811 is arranged on the brake pad 81. When gas is passed into the air channel 811, the brake pad 81 is spaced apart from the suction cup 70. When no gas is passed into the air channel 811 or negative pressure is passed into the air channel 811, the brake pad 81 fits the suction cup 70. The brake pad 81 is installed on the spring 83, and the spring 83 is fixedly connected to the vertical mover part 92. The elastic support member 82 is arranged on the side of the spring 83 away from the brake pad 81. One end of the elastic support member 82 is used to support the brake pad 81 or the spring 83, and the other end of the elastic support member 82 is connected to the vertical mover part 92. Such a structural setting can facilitate the optimization of the structure of the brake structure 80 to improve the ability of the brake structure 80 to stably perform corresponding operations on the suction cup 70, so that the brake structure 80 can smoothly switch to the brake position or the release position.

[0119] Specifically, the brake pad 81 is an annular structure.

[0120] Specifically, the surface of the brake pad 81 is a rough surface to provide a large friction force. The brake pad 81 is connected to the vertical mover part through the spring 83 and fixed on the vertical mover part 92. When the vertical mover part 92 moves, the brake pad 81 and the suction cup 70 keep moving up and down synchronously. The spring 83 provides a guide for the up and down movement of the brake ring. The elastic support member 82 at the bottom is a spring assembly, which pushes the brake pad 81 up to lean against the suction cup 70. When the power is off or the air is cut off, the brake pad 81 is close to the suction cup 70, so that the suction cup 70 cannot rotate for mechanical protection. When the brake pad 81 is passed through positive pressure, there is airflow between the brake pad 81 and the suction cup 70, which resists the bottom elastic support member 82 while ensuring that there is no contact with the suction cup 70, and the suction cup 70 can rotate. When negative pressure is passed, the brake pad 81 and the suction cup 70 are tightly together, and the suction cup 70 cannot rotate.

[0121] Specifically, the elastic support member 82 includes a connecting column 821 and an elastic member 822 connected to each other, one end of the connecting column 821 is used to support the brake pad 81 or the spring 83, and the other end of the connecting column 821 is connected to the elastic member 822. The elastic member 822 includes a first elastic strip, an elastic connector and a second elastic strip connected in sequence, the first elastic strip and the second elastic strip are respectively located at both ends of the elastic connector, one end of the first elastic strip away from the elastic connector and one end of the second elastic strip away from the elastic connector are both used to connect to the vertical mover portion 92, and the first elastic strip and the second elastic strip can both undergo elastic deformation.

[0122] In this embodiment, the fine motion stage further includes a vertical stator portion 91 and a vertical mover portion 92. The vertical stator portion 91 has a mounting groove. The vertical mover portion 92 is arranged in the mounting groove so as to be liftable relative to the vertical stator portion 91. The vertical stator portion 91 is drivingly connected to the base 11. The fine motion stage further includes a first cross roller guide 110 and a second cross roller guide 120. The first cross roller guide 110 is arranged on one side of the mounting groove. Both sides of the first cross roller guide 110 are respectively connected to the vertical stator portion 91 and the vertical mover portion 92. The second cross roller guide 120 is arranged on the other side of the mounting groove. The second cross roller guide 120 is arranged opposite to the first cross roller guide 110. Both sides of the second cross roller guide 120 are respectively connected to the vertical stator portion 91 and the vertical mover portion 92. Among them, one of the first cross roller guide 110 and the second cross roller guide 120 is in contact with the groove wall on one side of the installation groove, and the other of the first cross roller guide 110 and the second cross roller guide 120 is spaced from the groove wall on one side of the installation groove. Figure 1In this embodiment, the first cross roller guide 110 is in contact with the groove wall on one side of the installation groove; the second cross roller guide 120 is spaced from the groove wall on one side of the installation groove, with a gap between the two, preferably 0.5 mm, and the side of the guide with the gap is fastened with screws. With such a structural setting, it is convenient to optimize the overall structural layout, reduce the installation space of the vertical mover part 92, realize a nested structural layout, and reduce the height of the entire structure. In addition, the setting method of the first cross roller guide 110 and the second cross roller guide 120 can effectively ensure the smooth lifting and lowering of the vertical mover part 92, and can also ensure the smooth guiding of the vertical mover part 92. In addition, within a small stroke, the rigidity in the RX and RY directions can be greatly improved.

[0123] Specifically, one side of the cross roller guide is fixed on the z-direction mover part (that is, the vertical mover part 92), and one side is fixed on the z-direction stator part (that is, the vertical stator part 91); the z-direction stator part is fixed on the base. This split design can avoid installation difficulties caused by poor parallelism of the mover. The vertical stator part 91 includes a stator plate 911, and the thickness direction of the stator plate 911 is generally set as a non-main motion direction, so that the main motion direction can have a higher rigidity. Two pairs of guide rails (the first cross roller guide 110 and the second cross roller guide 120) are set to the four vertices of the module to provide maximum rigidity. The four guide rails (corresponding to the two first cross roller guides 110 and the second cross roller guide 120) are all parallel to the stator plate 911 to provide the maximum rigidity in the length direction of the stator plate 911. The direction of the guide rail can also be changed according to actual needs so that the direction of the guide rail is perpendicular to the stator plate 911.

[0124] In this embodiment, a voice coil motor (also called a z-direction drive motor) is used as the drive of the vertical mover part 92 (also called a z-direction mover part); in other embodiments, it is not limited to a voice coil motor. The Z-direction voice coil motor is arranged in the center, and forms an embedded design with the hollow form of the connecting piece 22, which greatly reduces the Z-direction size, provides overall module stiffness and lowers the center of gravity. The Z-direction mover part is provided with a gravity compensation device (the gravity compensation device can be a spring / magnetic levitation), and the gravity compensation device is distributed on the outer ring (there are at least 2 gravity compensation devices) to compensate for all the power of the mover, reduce the load of the Z motor, reduce heat generation, and provide thermal stability for the entire module. The Z-direction mover part is connected to the base 11 of the rotating table 12 through a bearing.

[0125] In this embodiment, a rotating motor 13 and a rotating grating are arranged at the bottom of the rotating stage 12 .

[0126] The present invention also discloses a motion system, which comprises: a coarse motion stage and the fine motion stage provided in the above embodiment, wherein the driving part of the coarse motion stage is drivingly connected to the fine motion stage.

[0127] Among them, the thickness direction of the stator plate of the vertical stator part of the motion system stage is generally set as the non-main motion direction (the non-active direction is determined by the coarse motion stage; in the optical detection system, there are generally scanning directions and stepping directions, and the scanning direction of the coarse motion stage is the main motion direction), so that the main motion direction has higher rigidity. The brake system is also set in conjunction with the coarse motion stage. Its function is to brake the movement of the fine motion stage so that when the coarse motion stage moves with the fine motion stage, there will be no motion interference and the motion accuracy will be higher.

[0128] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects: compact structure layout, space saving, and improved structural stability of vertical movement.

[0129] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0130] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. Meanwhile, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to actual proportional relationships. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0131] In the description of the present application, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present application; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0132] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0133] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0134] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A micro-motion stage, characterized in that: include: A rotating mechanism (10), the rotating mechanism (10) comprising a base (11) and a rotating table (12) rotatably arranged on the base (11); A lifting mechanism (20) is arranged on the rotating platform (12); a lifting portion (21) of the lifting mechanism (20) is arranged on the rotating platform (12) in a liftable manner; An adsorption member (30) is arranged on the lifting portion (21); The lifting mechanism (20) comprises: A connecting member (22), wherein the lifting portion (21) is arranged on one side of the connecting member (22); A driving member (23) is arranged on the other side of the connecting member (22), the driving end of the driving member (23) being arranged to be liftable, and the driving end of the driving member (23) is drivingly connected to the connecting member (22); a guide member (24) arranged at a distance from the driving member (23) on the other side of the connecting member (22), the guide member (24) extending along the lifting direction of the driving end, the rotating table (12) being provided with a guide hole matched with the guide member (24), the guide member (24) being arranged in the guide hole in a liftable manner; The rotating table (12) has mounting holes penetrating through two sides of the rotating table (12), and the micro-motion table further comprises a guide sleeve (40), the guide sleeve (40) being mounted in the mounting hole, and the guide sleeve (40) having the guide hole; Wherein, a limiting protrusion (241) is provided on the guide member (24), and the limiting protrusion (241) is used to perform limiting abutment with the end of the guide sleeve (40); and / or, The micro-motion stage further comprises a stopper (50), wherein the stopper (50) is arranged below the rotating stage (12), and at least a portion of the stopper (50) is arranged at an end of the mounting hole and is arranged opposite to at least a portion of the guide sleeve (40).

2. The micro-motion stage according to claim 1, characterized in that: The connecting piece (22) is an annular structure; There are a plurality of the lifting portions (21), and the plurality of the lifting portions (21) are arranged at intervals along the circumference of the connecting member (22) on one side of the connecting member (22); and / or, There are a plurality of driving members (23), and the plurality of driving members (23) are arranged at intervals along the circumference of the connecting member (22) on the other side of the connecting member (22).

3. The micro-motion stage according to claim 1, characterized in that: The connecting member (22) comprises an annular plate (221) and a connecting convex plate (222) connected to each other, the connecting convex plate (222) is arranged to protrude from the outer edge of the annular plate (221), the lifting portion (21) is multiple, the driving member (23) and the connecting convex plate (222) are multiple, the multiple driving members (23) and the multiple connecting convex plates (222) are arranged in a one-to-one correspondence, and each driving member (23) is mounted on the corresponding connecting convex plate (222); Wherein, a plurality of the lifting portions (21) are arranged on the annular plate (221) at intervals along the circumference of the annular plate (221); and / or, A plurality of the connecting protrusions (222) are arranged at intervals along the circumference of the annular plate (221); and / or, The plurality of connecting protruding plates (222) and the plurality of lifting portions (21) are staggeredly arranged along the circumferential direction of the annular plate (221).

4. The micro-motion stage according to claim 1, characterized in that: A limit member (60) is arranged on the rotating table (12), and the limit member (60) is located above the connecting member (22); a first detection gas path (223) is arranged on the connecting member (22), an air inlet of the first detection gas path (223) is used for introducing gas, and an air outlet of the first detection gas path (223) is arranged opposite to the limit member (60), and the connecting member (22) can be moved up and down so that the air outlet of the first detection gas path (223) is located in a first blocking position blocked by the limit member (60) or in a first avoidance position spaced from the limit member (60); the micro-motion table also includes a first air pressure detection member, a detection head of the first air pressure detection member is arranged at the first detection gas path (223), and the first air pressure detection member is used to detect the air pressure of the first detection gas path (223).

5. The micro-motion stage according to claim 4, characterized in that: The lifting mechanism (20) further comprises a ventilator (25), wherein the ventilator (25) is in communication with an air inlet of the first detection air path (223); Wherein, the vent cylinder (25) and the driving member (23) are arranged at a distance from each other on the other side of the connecting member (22); and / or, The rotating platform (12) is provided with an avoidance groove adapted to the ventilator (25).

6. The micro-motion stage according to claim 1, characterized in that: The rotating table (12) is provided with a second detection gas circuit (121); an air inlet of the second detection gas circuit (121) is used for introducing gas; an air outlet of the second detection gas circuit (121) is arranged opposite to at least a part of the connecting member (22); the connecting member (22) can be moved up and down to be in a second blocking position for blocking the air outlet of the second detection gas circuit (121) or a second avoidance position spaced apart from the air outlet of the second detection gas circuit (121); the micro-motion table further comprises a second air pressure detection member, a detection head of the second air pressure detection member is arranged at the second detection gas circuit (121), and the second air pressure detection member is used for detecting the air pressure of the second detection gas circuit (121).

7. The micro-motion stage according to claim 1, characterized in that: A limiting member (60) is provided on the rotating platform (12), the limiting member (60) is located above the connecting member (22), the limiting member (60) is arranged opposite to at least a part of one side of the connecting member (22), a first limiting ball head (101) is provided on a side of the limiting member (60) close to the connecting member (22) or on a side of the connecting member (22), the first limiting ball head (101) protrudes from a side of the limiting member (60) close to the connecting member (22) or on a side of the connecting member (22); and / or, The other side of the connecting member (22) is arranged opposite to at least a part of the table body (122) of the rotating table (12); a second limiting ball head (102) is arranged on one side of the table body (122) of the rotating table (12) close to the connecting member (22) or on the other side of the connecting member (22); the second limiting ball head (102) protrudes from the side of the table body (122) of the rotating table (12) close to the connecting member (22) or on the other side of the connecting member (22).

8. The micro-motion stage according to claim 1, characterized in that: The rotating table (12) comprises a table body (122) and a protrusion (123) connected to each other, wherein the protrusion (123) is arranged above the table body (122), and there are a plurality of protrusions (123). The plurality of protrusions (123) are arranged at intervals along the circumference of the table body (122), and a positioning groove is formed between two adjacent table bodies (122); the connecting member (22) comprises an annular plate (221) and a connecting protrusion plate (221) connected to each other. 2), the connecting convex plate (222) is arranged at the outer periphery of the annular plate (221), the annular plate (221) is arranged in the plurality of convex portions (123), and the connecting convex plate (222) is arranged in the positioning groove; the driving member (23) is arranged on the connecting convex plate (222), the platform (122) is provided with an avoidance recess matched with the driving member (23), and the driving member (23) is arranged in the avoidance recess.

9. The micro-motion stage according to claim 1, characterized in that: The micro-motion stage further comprises a suction cup (70), the suction cup (70) being arranged above the rotating stage (12), the suction cup (70) being provided with an escape hole (74) adapted to the lifting portion (21), the lifting portion (21) being arranged in the escape hole (74) in a liftable manner; the suction cup (70) comprising a main body portion (71) and a flexible connection portion (73); Wherein, at least two annular grooves (72) are arranged on the main body (71), at least two of the annular grooves (72) are arranged at intervals along the radial direction of the main body (71), and at least one of the annular grooves (72) is arranged at the edge of the main body (71); there are at least two flexible connection parts (73), at least two of the flexible connection parts (73) are arranged in a one-to-one correspondence with the at least two annular grooves (72), and each of the flexible connection parts (73) is arranged in the corresponding annular groove (72).

10. The micro-motion stage according to claim 9, characterized in that: The suction cup (70) further comprises a vertical flexible seal (75), wherein the vertical flexible seal (75) is arranged in the avoidance hole; and / or, The main body (71) is provided with a mounting groove adapted to the flexible connection portion (73); the flexible connection portion (73) comprises a fixing portion (731) and a deforming portion (732) connected to each other; the fixing portion (731) is fixedly mounted in the mounting groove; at least part of the deforming portion (732) protrudes from a notch of the mounting groove; and a weakening groove (733) is provided at the connection between the fixing portion (731) and the deforming portion (732).

11. The micro-motion stage according to claim 1, characterized in that: The micro-motion stage also includes: A suction cup (70) is arranged above the rotating platform (12), and the rotating platform (12) is drivingly connected to the suction cup (70) to drive the suction cup (70) to rotate; A brake structure (80), wherein at least a portion of the brake structure (80) is movably disposed between the rotating platform (12) and the suction cup (70), and the brake structure (80) has a brake position in which at least a portion of the brake structure (80) is in contact with the suction cup (70), and a release position in which at least a portion of the brake structure (80) is spaced apart from the suction cup (70).

12. The micro-motion stage according to claim 11, characterized in that: The micro-motion platform further comprises a vertical stator portion (91) and a vertical mover portion (92); the vertical mover portion (92) is arranged to be liftable relative to the vertical stator portion (91); the vertical stator portion (91) is drivingly connected to the base (11); the brake structure (80) comprises: A brake pad (81) forms at least a portion of the brake structure (80), and an air passage (811) is provided on the brake pad (81); when air is passed into the air passage (811), the brake pad (81) and the suction cup (70) are spaced apart; when no air is passed into the air passage (811) or negative pressure is passed into the air passage (811), the brake pad (81) and the suction cup (70) are in contact with each other; A spring leaf (83), the brake pad (81) being mounted on the spring leaf (83), the spring leaf (83) being fixedly connected to the vertical mover portion (92); An elastic support member (82) is arranged on a side of the leaf spring (83) away from the brake pad (81), one end of the elastic support member (82) is used to support the brake pad (81) or the leaf spring (83), and the other end of the elastic support member (82) is connected to the vertical mover portion (92).

13. The micro-motion stage according to claim 1, characterized in that: The micro-motion platform further comprises a vertical stator portion (91) and a vertical mover portion (92), the vertical stator portion (91) having a mounting groove, the vertical mover portion (92) being arranged in the mounting groove so as to be liftable relative to the vertical stator portion (91), and the vertical stator portion (91) being drivingly connected to the base (11); the micro-motion platform further comprises: A first cross roller guide rail (110) is arranged on one side of the mounting groove, and two sides of the first cross roller guide rail (110) are respectively connected to the vertical stator portion (91) and the vertical mover portion (92); a second cross roller guide (120) arranged on the other side of the mounting groove, the second cross roller guide (120) being arranged opposite to the first cross roller guide (110), and two sides of the second cross roller guide (120) being respectively connected to the vertical stator portion (91) and the vertical mover portion (92); One of the first cross roller guide (110) and the second cross roller guide (120) is in contact with a groove wall on one side of the mounting groove, and the other of the first cross roller guide (110) and the second cross roller guide (120) is spaced apart from the groove wall on one side of the mounting groove.

14. A motion system, characterized in that: include: Coarse motion table; The fine movement stage according to any one of claims 1 to 13, wherein the driving portion of the coarse movement stage is drivingly connected to the fine movement stage.

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