An air flow control valve and a horizontal gallium nitride production system

Abstract

The present invention relates to the field of gallium nitride production, and specifically to an airflow control valve and a horizontal gallium nitride production system. In the airflow control valve, a first temporary storage mechanism is used to temporarily store gas in the upstream pipeline of the valve body. The second temporary storage mechanism is used to temporarily store gas in the downstream pipeline of the valve body. A connecting mechanism is connected between the first temporary storage mechanism and the second temporary storage mechanism to selectively connect the first temporary storage mechanism and the second temporary storage mechanism. A vibration detection mechanism is used to detect the vibration of the connecting mechanism when the connecting mechanism connects the first temporary storage mechanism and the second temporary storage mechanism. It can realize independent detection and monitoring of cavitation and vibration of valves in each gas path, so as to carry out personalized management for different gas paths and different valves, realize individualized management of gas path links in a large production equipment system, effectively ensure the safety of equipment operation, and help to extend the service life of the gas path as a whole.

Description

Technical Field

[0001] The present invention relates to the field of gallium nitride production, and in particular to an airflow control valve and a horizontal gallium nitride production system. Background Art

[0002] In the production process of GaN, especially when producing large quantities of GaN, the pipeline system for raw gas transportation will be very large, and the management workload of the gas pipeline will increase significantly. In different production stages, the supply amount of each raw gas is different, which requires the use of programmable valves to regulate and manage the flow of various raw gases.

[0003] In the work of air flow control management, when a small opening is required for air supply, the valve is at risk of cavitation and vibration. However, the actual critical opening values ​​for cavitation and vibration are different for different valves. In a production system with many air paths, management is quite difficult.

[0004] In view of this, this application is hereby filed. Summary of the invention

[0005] The first object of the present invention is to provide an airflow control valve, which can realize independent detection and monitoring of cavitation and vibration of valves in each air circuit, so as to carry out personalized management for different air circuits and different valves, and realize individualized management of air circuit links in a large production equipment system, effectively ensuring the safety of equipment operation and helping to extend the overall service life of the air circuit.

[0006] The second object of the present invention is to provide a horizontal gallium nitride production system, which can realize independent detection and monitoring of cavitation and vibration of valves in each gas circuit, so as to carry out personalized management for different gas circuits and different valves, and realize individualized management of gas circuit links in a large production equipment system, effectively ensuring the safety of equipment operation and helping to extend the overall service life of the gas circuit.

[0007] The embodiment of the present invention is achieved as follows:

[0008] An airflow control valve comprises: a valve body, a first temporary storage mechanism, a second temporary storage mechanism, a connecting mechanism and a vibration detection mechanism.

[0009] The valve body has an inlet pipe and an outlet pipe. The first temporary storage mechanism is selectively connected to the inlet pipe to temporarily store gas in the upstream pipeline of the valve body. The second temporary storage mechanism is selectively connected to the outlet pipe to temporarily store gas in the downstream pipeline of the valve body.

[0010] The connecting mechanism is connected between the first temporary storage mechanism and the second temporary storage mechanism to selectively connect the first temporary storage mechanism and the second temporary storage mechanism.

[0011] The vibration detection mechanism is used to detect the vibration condition of the connecting mechanism when the connecting mechanism connects the first temporary storage mechanism and the second temporary storage mechanism.

[0012] Furthermore, the connecting mechanism includes: a control sleeve, a control core, a first connecting pipe, a second connecting pipe and a driver.

[0013] The control core can be slidably matched in the control sleeve and the two are slidably sealed. The end of the control core is provided with a rotating member, and the rotating member is transmission-matched with the driver.

[0014] The first connecting pipe and the second connecting pipe are respectively arranged on both sides of the control sleeve and are both communicated with the control sleeve. The first connecting pipe is used to communicate with the first temporary storage mechanism, and the second connecting pipe is used to communicate with the second temporary storage mechanism.

[0015] The control core has a communicating hole opened along its radial direction, and a plurality of communicating holes are arranged at intervals along the axial direction of the control core, and the hole diameters of the communicating holes are different from each other.

[0016] A control ball is arranged in each connecting hole, the diameter of the control ball is larger than the hole diameter of the corresponding connecting hole, the control ball is arranged coaxially with the connecting hole, and the control ball is rotatably embedded in the hole wall of the connecting hole. The control ball is provided with a matching hole for passing through it.

[0017] A control rod is embedded in the control core. The control rod is arranged along the axial direction of the control core. The control rod is fixedly connected to the control ball and is also fixedly connected to the rotating member.

[0018] The driver is used to drive the control core to move along the axial direction of the control sleeve to select the communication hole with the required aperture. The driver is also used to drive the rotating member to rotate to control the opening and closing of the corresponding communication hole through the control ball.

[0019] Furthermore, the vibration detection mechanism includes: a spherical shell, a reference seat, a matching ball, a conductive needle, a wrapping sleeve, a counterweight ball and a detection circuit.

[0020] The spherical shell is fixedly connected to the control sleeve, the reference seat is fixedly installed in the spherical shell, the matching ball can be universally rotatably matched with the reference seat, and the matching ball and the spherical shell are concentrically arranged.

[0021] The conductive needle is fixedly connected to the matching ball and arranged along the radial direction of the matching ball, and the tip of the conductive needle extends to the inner wall of the spherical shell. The inner wall of the spherical shell has a conductive belt, which starts from the bottom of the inner wall of the spherical shell, extends in a spiral shape along the inner wall of the spherical shell and is coiled around the lower half of the spherical shell. The central axis of the spiral line corresponding to the conductive belt is arranged along the axial direction of the control sleeve. In the conductive belt, the boundaries of adjacent spiral turns are in contact and insulated. The tip of the conductive needle is electrically connected to the conductive belt.

[0022] One end of the conductive tape is connected to one pole of the detection circuit, and the conductive needle is connected to the other pole of the detection circuit.

[0023] The wrapping sleeve can be universally rotatably wrapped around the spherical shell, the weighted ball is fixedly connected to the wrapping sleeve, and a magnetic component is embedded in the inner wall of the wrapping sleeve, and the magnetic component is arranged corresponding to the bottom of the inner wall of the spherical shell.

[0024] When the central axis of the control sleeve is set in the vertical direction, in the natural state, the conductive needle points to the bottom of the inner wall of the spherical shell under the magnetic force of the magnetic part and its own gravity. When vibration occurs, the weighted ball drives the wrapping sleeve to swing, and the conductive needle swings under the magnetic force of the magnetic part. The detection circuit determines the swing of the conductive needle according to the change of current, thereby determining the vibration intensity.

[0025] Furthermore, the control core is coaxially fixedly connected with a locking rod, the spherical shell is provided with a clearance opening for the locking rod to extend into, and the matching ball is provided with a locking hole for matching with the locking rod.

[0026] When the control core is located at one end of the control sleeve close to the spherical shell, the communicating hole is not connected with the first connecting tube and the second connecting tube, and at this time, the extending length of the locking rod into the spherical shell reaches the maximum.

[0027] When the conductive needle points to the bottom of the inner wall of the spherical shell, the locking rod and the locking hole are in a coaxial arrangement. When the insertion length of the locking rod reaches the maximum, the locking rod is matched with the locking hole to achieve locking of the matching ball. When the control core moves toward the end of the control sleeve away from the spherical shell, and there is a connecting hole connected with the first connecting pipe and the second connecting pipe, the locking rod withdraws from the locking hole.

[0028] Furthermore, the first temporary storage mechanism includes: a first temporary storage chamber and a first introduction pipe. The first introduction pipe connects the inlet pipe with the first temporary storage chamber. The first introduction pipe has a first air valve.

[0029] Furthermore, the second temporary storage mechanism includes: a second temporary storage chamber and a second inlet pipe. The second inlet pipe connects the outlet pipe with the second temporary storage chamber. The second inlet pipe has a second air valve.

[0030] Furthermore, the airflow control valve also includes: a closed chamber.

[0031] The closed bin cover is arranged on the valve body, and the first temporary storage mechanism, the second temporary storage mechanism, the connecting mechanism and the vibration detection mechanism are all arranged in the closed bin.

[0032] A horizontal gallium nitride production system comprises: the above-mentioned airflow control valve.

[0033] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0034] The vibration detection mechanism of the airflow control valve provided in the embodiment of the present invention is used to detect the vibration of the connecting mechanism after the connecting mechanism connects the first temporary storage mechanism and the second temporary storage mechanism. By collecting the vibration data within a period of time after the first temporary storage mechanism and the second temporary storage mechanism are connected, it can be used as a basis for evaluating the risk of cavitation and vibration after the valve body is opened with a corresponding opening.

[0035] The test results show that the stronger the cavitation vibration, the higher the probability and damage of cavitation and vibration after the valve body is opened according to the corresponding opening. This can help managers formulate the usable opening range for each valve body, get rid of the dilemma of relying entirely on experience to judge, and greatly improve the flexibility and accuracy of production management.

[0036] In general, the airflow control valve provided in the embodiment of the present invention can realize independent detection and monitoring of the cavitation and vibration of the valves in each gas circuit, so as to perform personalized management for different gas circuits and different valves, and realize individualized management of the gas circuit links in the huge production equipment system, effectively ensuring the safety of equipment operation, and helping to extend the service life of the gas circuit as a whole. The horizontal gallium nitride production system provided in the embodiment of the present invention can realize independent detection and monitoring of the cavitation and vibration of the valves in each gas circuit, so as to perform personalized management for different gas circuits and different valves, and realize individualized management of the gas circuit links in the huge production equipment system, effectively ensuring the safety of equipment operation, and helping to extend the service life of the gas circuit as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 A schematic diagram of the overall structure of an airflow control valve provided in an embodiment of the present invention;

[0039] Figure 2 A schematic diagram of the coordination of the first temporary storage chamber, the second temporary storage chamber, the connecting mechanism and the vibration detection mechanism of the airflow control valve provided in an embodiment of the present invention;

[0040] Figure 3 for Figure 2 A magnified image of area A;

[0041] Figure 4 It is a structural schematic diagram of a vibration detection mechanism;

[0042] Figure 5 Schematic diagram of the arrangement of conductive strips in a spherical shell.

[0043] Description of reference numerals:

[0044] The valve body 100; the inlet pipe 110; the outlet pipe 120; the first temporary storage mechanism 200; the first temporary storage chamber 210; the first introduction pipe 220; the first air valve 230; the second temporary storage mechanism 300; the second temporary storage chamber 310; the second introduction pipe 320; the second air valve 330; the connecting mechanism 400; the control sleeve 410; the control core 420; the connecting hole 421; the control ball 422; the matching hole 423; the synchronization rod 424; the control rod 425; the rotating part 430; the first connecting pipe 440; the second connecting pipe 450; the driver 460; the vibration detection mechanism 500; the spherical shell 510; the conductive belt 511; the reference seat 512; the connecting arm 513; the matching ball 520; the locking hole 521; the conductive needle 530; the wrapping sleeve 540; the weighted ball 550; the fixing rod 551; the magnetic part 560; the locking rod 600; the closed chamber 700. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0048] The terms “first”, “second”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0049] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0050] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] In order to overcome the shortcomings of the prior art, please refer to Figure 1 This embodiment provides an airflow control valve, which includes: a valve body 100, a first temporary storage mechanism 200, a second temporary storage mechanism 300, a connecting mechanism 400 and a vibration detection mechanism 500.

[0052] The valve body 100 has an inlet pipe 110 and an outlet pipe 120. The valve body 100 is used to access the gas path of the raw gas, and the valve body 100 is used to control the opening and closing of the gas path and the opening degree when it is opened.

[0053] The first temporary storage mechanism 200 is selectively communicated with the inlet pipe 110 to temporarily store gas in the upstream pipeline of the valve body 100 .

[0054] The second temporary storage mechanism 300 is selectively communicated with the outlet pipe 120 to temporarily store gas in the pipeline downstream of the valve body 100 .

[0055] The connecting mechanism 400 is connected between the first temporary storage mechanism 200 and the second temporary storage mechanism 300 to selectively connect the first temporary storage mechanism 200 and the second temporary storage mechanism 300 .

[0056] It should be noted that "selective connection" in this application means that the connection state can be flexibly controlled according to actual needs, that is, the connection and disconnection states can be selected independently and switched between the connection and disconnection states, including but not limited to being achieved by setting an opening and closing structure (e.g., a valve).

[0057] The amount of gas that can be temporarily stored in the first temporary storage mechanism 200 and the second temporary storage mechanism 300 can be flexibly adjusted according to actual needs.

[0058] Before the test, the first temporary storage mechanism 200 is connected to the inlet pipe 110, and the second temporary storage mechanism 300 is connected to the outlet pipe 120, so that the gas located upstream of the valve body 100 smoothly enters the first temporary storage mechanism 200, and the gas located downstream of the valve body 100 smoothly enters the second temporary storage mechanism 300. Subsequently, the first temporary storage mechanism 200 is disconnected from the inlet pipe 110, and the second temporary storage mechanism 300 is disconnected from the outlet pipe 120. At this time, the gas collected and temporarily stored in the first temporary storage mechanism 200 and the second temporary storage mechanism 300 is isolated from the gas path of the raw gas.

[0059] The first temporary storage mechanism 200 and the second temporary storage mechanism 300 are connected by the connecting mechanism 400, and the connecting mechanism 400 is set to the opening required for the experiment, which is equivalent to simulating the conveying state of the valve body 100 at the corresponding opening.

[0060] Once the first temporary storage mechanism 200 and the second temporary storage mechanism 300 are connected, the gas can flow from the first temporary storage mechanism 200 to the second temporary storage mechanism 300 via the connecting mechanism 400. During a period of time immediately after the connection, the gas flow condition can be used to reflect the flow state when the valve body 100 is opened at a corresponding opening. The length of time of "a period of time immediately after the connection" can be flexibly selected according to actual needs to meet different detection needs.

[0061] The vibration detection mechanism 500 is used to detect the vibration of the connecting mechanism 400 after the connecting mechanism 400 connects the first temporary storage mechanism 200 and the second temporary storage mechanism 300. By collecting the vibration data for a period of time after the first temporary storage mechanism 200 and the second temporary storage mechanism 300 are connected, it can be used as a basis for evaluating the risk of cavitation and vibration after the valve body 100 is opened with a corresponding opening.

[0062] The test results show that the stronger the cavitation vibration, the higher the probability and damage of cavitation and vibration after the valve body 100 is opened according to the corresponding opening. This can help managers to formulate the usable opening range for each valve body 100, get rid of the dilemma of relying entirely on experience to judge, and greatly improve the flexibility and accuracy of production management.

[0063] In general, the airflow control valve provided in this embodiment can realize independent detection and monitoring of cavitation and vibration of valves in each air circuit, so as to carry out personalized management for different air circuits and different valves, and realize individualized management of air circuit links in a large production equipment system, effectively ensuring the safety of equipment operation and helping to extend the overall service life of the air circuit.

[0064] Optionally, a data center may be set up to collect the detection data of each airflow control valve, thereby helping the management personnel to manage and control the actual available opening of different airflow control valves. The data center may be flexibly set up according to actual needs.

[0065] Please combine Figure 1~Figure 2 In this embodiment, the first temporary storage mechanism 200 includes: a first temporary storage chamber 210 and a first introduction pipe 220. The first introduction pipe 220 connects the inlet pipe 110 with the first temporary storage chamber 210. The first introduction pipe 220 has a first air valve 230. The first air valve 230 is used to achieve "selective communication" between the inlet pipe 110 and the first temporary storage chamber 210.

[0066] The second temporary storage mechanism 300 includes: a second temporary storage chamber 310 and a second introduction pipe 320. The second introduction pipe 320 connects the outlet pipe 120 with the second temporary storage chamber 310. The second introduction pipe 320 has a second air valve 330. The second air valve 330 is used to achieve "selective communication" between the outlet pipe 120 and the second temporary storage chamber 310.

[0067] The airflow control valve further includes a closed chamber 700. The closed chamber 700 is covered on the valve body 100, and the first temporary storage mechanism 200, the second temporary storage mechanism 300, the connecting mechanism 400 and the vibration detection mechanism 500 are all arranged inside the closed chamber 700. The closed chamber 700 can reduce the interference of the external environment on the detection process.

[0068] For details, please combine Figure 1~Figure 3 The connecting mechanism 400 includes: a control sleeve 410, a control core 420, a first connecting pipe 440, a second connecting pipe 450 and a driver 460.

[0069] The control core 420 is coaxially arranged with the control sleeve 410, and the control core 420 is cylindrical, and the control sleeve 410 is cylindrical. The control core 420 can be slidably fitted in the control sleeve 410, and the two are slidably sealed. Along the axial direction of the control sleeve 410, the control core 420 can be slidably fitted in the control sleeve 410; along the circumferential direction of the control sleeve 410, the control core 420 is fixedly fitted in the control sleeve 410.

[0070] The end of the control core 420 has a rotating member 430. The rotating member 430 is fixedly matched with the control core 420 along the axial direction of the control core 420; and the rotating member 430 is rotatably matched with the control core 420 along the circumferential direction of the control core 420. The rotating member 430 is arranged to coincide with the central axis of the control core 420 relative to the rotation axis of the control core 420.

[0071] The rotating member 430 is in transmission cooperation with the driver 460. The driver 460 is used to drive the control core 420 to move along the axial direction of the control sleeve 410 through the rotating member 430. Meanwhile, the driver 460 can also be used to drive the rotating member 430 to rotate relative to the control core 420.

[0072] The first connecting pipe 440 and the second connecting pipe 450 are disposed on both sides of the control sleeve 410 and are both in communication with the control sleeve 410. The first connecting pipe 440 is used to communicate with the first temporary storage mechanism 200, specifically, the first temporary storage chamber 210. The second connecting pipe 450 is used to communicate with the second temporary storage mechanism 300, specifically, the second temporary storage chamber 310. Both the first connecting pipe 440 and the second connecting pipe 450 are disposed along the radial direction of the control sleeve 410, and the first connecting pipe 440 and the second connecting pipe 450 are coaxially disposed.

[0073] The control core 420 has a communicating hole 421 opened along its radial direction and passing through it. There are multiple communicating holes 421, and the multiple communicating holes 421 are arranged at intervals along the axial direction of the control core 420, and the apertures of the communicating holes 421 are different from each other. Optionally, along the axial direction of the control core 420, from the end where the rotating member 430 is located to the end away from the rotating member 430, the aperture of the communicating hole 421 gradually increases. The central axes of all the communicating holes 421 are parallel to each other and coplanar.

[0074] A control ball 422 is disposed in each communication hole 421. The diameter of the control ball 422 is larger than the diameter of the corresponding communication hole 421. The control ball 422 is coaxially disposed with the communication hole 421 and is rotatably embedded in the hole wall of the communication hole 421. The rotation axis of the control ball 422 coincides with the rotation axis of the rotating member 430, and a rotation seal is formed between the control ball 422 and the hole wall of the communication hole 421.

[0075] The control ball 422 is provided with a matching hole 423 that passes through it. When both ends of the matching hole 423 are connected to the connecting hole 421, the connecting hole 421 is in an open state. The direction of the connecting hole 421 can be changed by rotating the control ball 422. When both ends of the connecting hole 421 are in contact with the hole wall of the connecting hole 421, the control ball 422 blocks the connecting hole 421. Therefore, by rotating the control ball 422, the opening and closing of the connecting hole 421 can be controlled.

[0076] That is, by adjusting the axial position of the control core 420 in the control sleeve 410, the connecting holes 421 with different apertures can be selected to be connected to the first connecting tube 440 and the second connecting tube 450 (under the same state, at most only one connecting hole 421 can be connected to the first connecting tube 440 and the second connecting tube 450), or all the connecting holes 421 are not connected to the first connecting tube 440 and the second connecting tube 450, and then combined with the rotation control of the control ball 422, the opening and closing control of each connecting hole 421 is realized, and the connection relationship between the first temporary storage chamber 210 and the second temporary storage chamber 310 is controlled by the connecting mechanism 400, that is, the "selective connection" between the first temporary storage chamber 210 and the second temporary storage chamber 310 is realized. The above control process can be realized by the driver 460.

[0077] In the axial direction of the control core 420 , adjacent control balls 422 are fixedly connected by a synchronization rod 424 , and the synchronization rod 424 is rotatably embedded in the control core 420 . The rotation axis of the control rod 425 coincides with the rotation axis of the rotating member 430 .

[0078] The control core 420 is also embedded with a control rod 425, which is arranged along the axial direction of the control core 420 and rotatably matched with the control core 420, and the rotation axis of the control rod 425 coincides with the rotation axis of the rotating member 430. One end of the control rod 425 is fixedly connected to the rotating member 430, and the other end extends to the control ball 422 closest to the rotating member 430 and is fixedly connected to the control ball 422. When the rotating member 430 rotates, the control rod 425 and the synchronization rod 424 can realize the synchronous driving of all the control balls 422.

[0079] The diameter of the matching hole 423 of the control ball 422 is the same as the diameter of the connecting hole 421 in which it is located.

[0080] In general, the driver 460 is used to drive the control core 420 to move along the axial direction of the control sleeve 410 to select the communication hole 421 of the required aperture. The driver 460 is also used to drive the rotating member 430 to rotate, so as to control the opening and closing of the corresponding communication hole 421 through the control ball 422.

[0081] Further, please combine Figure 1~Figure 5 The vibration detection mechanism 500 includes: a spherical shell 510, a reference seat 512, a matching ball 520, a conductive needle 530, a wrapping sleeve 540, a weighted ball 550 and a detection circuit (not shown in the figure).

[0082] The spherical shell 510 is fixedly connected to the control sleeve 410 . Specifically, the spherical shell 510 and the control sleeve 410 are coaxially arranged. The driver 460 is arranged at one end of the control sleeve 410 . The spherical shell 510 is fixedly connected to the end of the control sleeve 410 away from the driver 460 .

[0083] The reference seat 512 is fixedly installed in the spherical shell 510, and the matching ball 520 can be universally rotatably matched with the reference seat 512. The matching ball 520 is concentrically arranged with the spherical shell 510, and the universal rotation center point of the matching ball 520 coincides with the sphere of the spherical shell 510. The reference seat 512 is fixedly connected to the inner wall of the spherical shell 510 by the connecting arm 513.

[0084] The conductive needle 530 is fixedly connected to the matching ball 520 and disposed along the radial direction of the matching ball 520 . The tip of the conductive needle 530 extends to the inner wall of the spherical shell 510 .

[0085] For the convenience of detection, when installing the airflow control valve, the central axis of the control sleeve 410 is arranged in the vertical direction so that the spherical shell 510 is located at the lower end of the control sleeve 410 .

[0086] The inner wall of the spherical shell 510 has a conductive strip 511, which starts from the bottom of the inner wall of the spherical shell 510 (i.e., the intersection of the central axis of the control sleeve 410 and the side of the inner wall of the spherical shell 510 away from the control sleeve 410). The conductive strip 511 extends in a spiral shape along the inner wall of the spherical shell 510 and is coiled around the lower half of the spherical shell 510 (i.e., the half of the spherical shell 510 away from the control sleeve 410), and the central axis of the spiral line corresponding to the conductive strip 511 is set along the axial direction of the control sleeve 410.

[0087] In the conductive tape 511, the boundaries of adjacent spiral turns are in contact and insulated. The tip of the conductive needle 530 can contact and electrically connect with the conductive tape 511. At the same time, the conductive needle 530 can only contact and electrically connect with one point in at most one turn of the conductive tape 511.

[0088] One end of the conductive tape 511 is connected to one pole of the detection circuit, and the conductive needle 530 is connected to the other pole of the detection circuit, that is, a complete detection circuit is constructed by connecting one end of the conductive tape 511 and the conductive needle 530 to the detection circuit. The conductive tape 511 is made of a material with uniform resistance, that is, the resistance of the conductive tape 511 is proportional to the length of the conductive tape 511 connected to the circuit.

[0089] The wrapping sleeve 540 can be universally rotatably wrapped around the spherical shell 510 , and the rotation center of the wrapping sleeve 540 relative to the spherical shell 510 is arranged to coincide with the center of the spherical shell 510 .

[0090] The weight ball 550 is fixedly connected to the wrapping sleeve 540 by a fixing rod 551, and the fixing rod 551 is arranged along the radial direction of the spherical shell 510. In a natural state, under the gravity of the weight piece, the fixing rod 551 hangs down directly below the spherical shell 510, and the fixing rod 551 is in a vertical state.

[0091] A magnetic component 560 is embedded in the inner wall of the wrapping sleeve 540 , and the magnetic component 560 is arranged corresponding to the bottom of the inner wall of the spherical shell 510 .

[0092] When the central axis of the control sleeve 410 is arranged in the vertical direction, in a natural state, the conductive needle 530 points to the bottom of the inner wall of the spherical shell 510 under the magnetic force of the magnetic member 560 and its own gravity. When vibration occurs, the weighted ball 550 drives the wrapping sleeve 540 to swing, and the conductive needle 530 swings with the magnetic member 560 under the magnetic force of the magnetic member 560.

[0093] When the conductive needle 530 swings, the contact position between the conductive needle 530 and the conductive tape 511 changes, so that the actual connection length of the conductive tape 511 to the detection circuit changes, thereby changing the overall resistance and current of the detection circuit.

[0094] Since different positions in the length direction (spiral direction) of the conductive strip 511 correspond to different access lengths, different access lengths correspond to different resistances.

[0095] Therefore, the detection circuit can reversely determine the length of the conductive tape 511 connected to the circuit according to the change of the current, and thus determine the point where the conductive needle 530 contacts the conductive tape 511 according to the connected length of the conductive tape 511, so as to determine the swing of the conductive needle 530. According to the swing of the conductive needle 530, the vibration intensity can be determined.

[0096] Furthermore, a locking rod 600 is coaxially fixedly connected to one end of the control core 420 close to the spherical shell 510 . The spherical shell 510 is provided with a clearance opening for the locking rod 600 to extend into. The locking rod 600 extends into the spherical shell 510 through the clearance opening of the spherical shell 510 .

[0097] The matching ball 520 is provided with a locking hole 521 for matching with the locking rod 600 , and the diameter of the locking hole 521 is matched with the diameter of the locking rod 600 .

[0098] When the control core 420 is located at one end of the control sleeve 410 close to the spherical shell 510, all the communication holes 421 are not connected to the first connecting tube 440 and the second connecting tube 450, and at this time, the extension length of the locking rod 600 into the spherical shell 510 reaches the maximum.

[0099] When the conductive needle 530 points to the bottom of the inner wall of the spherical shell 510 (i.e., hanging vertically), the locking rod 600 is coaxially arranged with the locking hole 521. When the insertion length of the locking rod 600 reaches the maximum, the locking rod 600 is matched in the locking hole 521 to achieve locking of the matching ball 520.

[0100] In this state, the first temporary storage chamber 210 and the second temporary storage chamber 310 are disconnected from each other, and no vibration test will be performed in this state. Locking the conductive needle 530 can reduce the mechanical loss of the conductive needle 530 and the conductive belt 511, and can maintain the stability of the detection circuit. In this way, the movement of the weighted ball 550 and the wrapping sleeve 540 will not be restricted, and the weighted ball 550 and the wrapping sleeve 540 can play a role in reducing vibration and promoting vibration elimination during normal use of the valve body 100.

[0101] When the control core 420 moves toward the end of the control sleeve 410 away from the spherical shell 510, and the connecting hole 421 is connected with the first connecting tube 440 and the second connecting tube 450, the locking rod 600 withdraws from the locking hole 521. That is, when vibration detection is required, the conductive needle 530 is automatically released and unlocked.

[0102] This embodiment also provides a horizontal gallium nitride production system, which includes the above-mentioned gas flow control valve. In the horizontal gallium nitride production system, each gas path of the raw gas is provided with the above-mentioned gas flow control valve to achieve independent management and control of the actual available opening range of each gas path.

[0103] In summary, the airflow control valve provided in the embodiment of the present invention can realize independent detection and monitoring of the cavitation and vibration of the valves in each gas circuit, so as to perform personalized management for different gas circuits and different valves, and realize individualized management of the gas circuit links in the huge production equipment system, effectively ensuring the safety of equipment operation, and helping to extend the service life of the gas circuit as a whole. The horizontal gallium nitride production system provided in the embodiment of the present invention can realize independent detection and monitoring of the cavitation and vibration of the valves in each gas circuit, so as to perform personalized management for different gas circuits and different valves, and realize individualized management of the gas circuit links in the huge production equipment system, effectively ensuring the safety of equipment operation, and helping to extend the service life of the gas circuit as a whole.

[0104] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An air flow control valve, characterized in that: include: A valve body, a first temporary storage mechanism, a second temporary storage mechanism, a connecting mechanism and a vibration detection mechanism; The valve body has an inlet pipe and an outlet pipe; the first temporary storage mechanism is selectively connected to the inlet pipe to temporarily store gas in the upstream pipeline of the valve body; the second temporary storage mechanism is selectively connected to the outlet pipe to temporarily store gas in the downstream pipeline of the valve body; The connecting mechanism is connected between the first temporary storage mechanism and the second temporary storage mechanism, so as to selectively connect the first temporary storage mechanism and the second temporary storage mechanism; The vibration detection mechanism is used to detect the vibration of the connecting mechanism when the connecting mechanism connects the first temporary storage mechanism and the second temporary storage mechanism; The communication mechanism comprises: a control sleeve, a control core, a first connecting pipe, a second connecting pipe and a driver; The control core can be slidably matched in the control sleeve and the two are slidably sealed, and the end of the control core has a rotating member, and the rotating member is in transmission cooperation with the driver; The first connecting pipe and the second connecting pipe are respectively arranged on both sides of the control sleeve and are both communicated with the control sleeve; the first connecting pipe is used to communicate with the first temporary storage mechanism, and the second connecting pipe is used to communicate with the second temporary storage mechanism; The control core has a communication hole opened along its radial direction, a plurality of the communication holes are arranged at intervals along the axial direction of the control core, and the hole diameters of the communication holes are different from each other.

2. The air flow control valve according to claim 1, characterized in that: A control ball is arranged in each of the communicating holes, the diameter of the control ball is larger than the hole diameter of the corresponding communicating hole, the control ball is arranged coaxially with the communicating hole, and the control ball is rotatably embedded in the hole wall of the communicating hole; the control ball is provided with a matching hole for passing through it; A control rod is embedded in the control core, and the control rod is arranged along the axial direction of the control core. The control rod is fixedly connected to the control ball, and the control rod is also fixedly connected to the rotating member; The driver is used to drive the control core to move along the axial direction of the control sleeve to select the connecting hole with the required aperture; the driver is also used to drive the rotating member to rotate to control the opening and closing of the corresponding connecting hole through the control ball.

3. The air flow control valve according to claim 2, characterized in that: The vibration detection mechanism comprises: a spherical shell, a reference seat, a matching ball, a conductive needle, a wrapping sleeve, a weighted ball and a detection circuit; The spherical shell is fixedly connected to the control sleeve, the reference seat is fixedly installed inside the spherical shell, the matching ball can be universally rotatably matched with the reference seat, and the matching ball and the spherical shell are concentrically arranged; The conductive needle is fixedly connected to the matching ball and arranged along the radial direction of the matching ball, and the tip of the conductive needle extends to the inner wall of the spherical shell; the inner wall of the spherical shell has a conductive belt, and the conductive belt starts from the bottom of the inner wall of the spherical shell, and the conductive belt extends in a spiral shape along the inner wall of the spherical shell and is coiled around the lower half of the spherical shell, and the central axis of the spiral line corresponding to the conductive belt is arranged along the axial direction of the control sleeve; in the conductive belt, the boundaries of adjacent spiral turns are in contact and insulated; the tip of the conductive needle is electrically connected to the conductive belt; One end of the conductive strip is connected to one pole of the detection circuit, and the conductive needle is connected to the other pole of the detection circuit; The wrapping sleeve can be universally rotatably wrapped around the spherical shell, the weighted ball is fixedly connected to the wrapping sleeve, and a magnetic member is embedded in the inner wall of the wrapping sleeve, and the magnetic member is arranged corresponding to the bottom of the inner wall of the spherical shell; When the central axis of the control sleeve is set in the vertical direction, in a natural state, the conductive needle points to the bottom of the inner wall of the spherical shell under the action of the magnetic force of the magnetic part and its own gravity; when vibration occurs, the counterweight ball drives the wrapping sleeve to swing, and the conductive needle swings under the action of the magnetic force of the magnetic part, and the detection circuit determines the swing of the conductive needle according to the change of current, thereby determining the vibration intensity.

4. The air flow control valve according to claim 3, characterized in that: The control core is coaxially fixedly connected with a locking rod, the spherical shell is provided with a clearance opening for the locking rod to extend into, and the matching ball is provided with a locking hole for matching with the locking rod; When the control core is located at one end of the control sleeve close to the spherical shell, the communication hole is not connected with the first connecting tube and the second connecting tube, and at this time, the extension length of the locking rod into the spherical shell reaches the maximum; When the conductive needle points to the bottom of the inner wall of the spherical shell, the locking rod and the locking hole are in a coaxial arrangement; when the extension length of the locking rod reaches the maximum, the locking rod cooperates with the locking hole to lock the matching ball; when the control core moves toward one end of the control sleeve away from the spherical shell, and the connecting hole is connected with the first connecting tube and the second connecting tube, the locking rod withdraws from the locking hole.

5. The air flow control valve according to claim 1, characterized in that: The first temporary storage mechanism includes: a first temporary storage chamber and a first introduction pipe; the first introduction pipe connects the inlet pipe with the first temporary storage chamber; the first introduction pipe has a first air valve.

6. The air flow control valve according to claim 1, characterized in that: The second temporary storage mechanism includes: a second temporary storage chamber and a second introduction pipe; the second introduction pipe connects the outlet pipe with the second temporary storage chamber; and the second introduction pipe has a second air valve.

7. The air flow control valve according to claim 1, characterized in that: The airflow control valve further comprises: a closed compartment; The closed chamber cover is arranged on the valve body, and the first temporary storage mechanism, the second temporary storage mechanism, the connecting mechanism and the vibration detection mechanism are all arranged inside the closed chamber.

8. A horizontal gallium nitride production system, characterized in that: include: An air flow control valve as claimed in any one of claims 1 to 7.

Images