A microwave remote plasma source structure optimization design analysis method and related equipment

Abstract

The present application belongs to the technical field of plasma sources, and discloses a microwave remote plasma source structure optimization design and analysis method and related equipment. Based on numerical simulation technology, the microwave remote plasma source is parameterized and modeled, and the electromagnetic field distribution inside it is accurately simulated and analyzed, so as to quickly find the optimal design solution; it avoids the problem of excessive reliance on experimental verification and experience accumulation in traditional design methods, shortens the design cycle, reduces design costs, has little reliance on engineering experience, and can perform simulation analysis for different working conditions to quickly find a design solution with strong adaptability and superior performance, and has strong adaptability.

Description

Technical Field

[0001] The present application relates to the technical field of plasma sources, and in particular to a microwave remote plasma source structure optimization design and analysis method and related equipment. Background Art

[0002] The microwave remote plasma source is an advanced device that uses microwave energy to excite and maintain plasma at a location far away from the source. It transmits microwave energy to a specific area, so that the gas molecules in the area are excited and ionized to form a high-density, highly active plasma. This type of plasma has significant advantages such as efficient energy conversion, uniform plasma distribution, no electrode pollution and long life, and has shown wide application potential in many fields such as material processing, semiconductor manufacturing, environmental protection, and medical treatment.

[0003] At present, the structural design method of microwave remote plasma source mainly relies on experimental verification and experience accumulation. Designers usually optimize the excitation efficiency and stability of plasma by adjusting the geometry of the resonant cavity, material selection, microwave coupling method and other parameters according to specific application requirements. However, this traditional design method has many disadvantages: the design cycle is long and requires a lot of experimental data support, which leads to high costs; the experimental verification accuracy is limited, and it is difficult to accurately reflect the real impact of design parameters on plasma characteristics; the structural optimization process is overly dependent on the experience of designers, lacks theoretical support, and when the structure is complex, the optimization iteration is time-consuming and it is difficult to obtain the optimal solution.

[0004] In view of the above problems, the existing technology needs to be improved urgently. Summary of the invention

[0005] The purpose of this application is to provide a microwave remote plasma source structure optimization design analysis method and related equipment, which has a short design cycle, low cost, little dependence on engineering experience and strong adaptability.

[0006] In a first aspect, the present application provides a microwave remote plasma source structure optimization design analysis method, which is used to optimize the design of structural parameters of the microwave remote plasma source, wherein the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, wherein the inner cavity of the resonant cavity is a rectangular parallelepiped, and the resonant cavity is used to feed microwaves from the lower end to ionize the working gas in the quartz tube into plasma; the microwave remote plasma source structure optimization design analysis method comprises the steps of:

[0007] A1. Based on the initialized characteristic parameters, parameterized modeling is performed on the microwave remote plasma source to obtain a simplified model, and variable parameters are selected from the characteristic parameters;

[0008] A2. Meshing the simplified model;

[0009] A3. Setting material parameters of the simplified model;

[0010] A4. Setting the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field;

[0011] A5. Configuring a frequency domain solver to simulate the physical field under the boundary conditions;

[0012] A6. Based on the simulation results, configure the optimization solver, set the optimization target, and calculate the optimal solution of the variable parameters.

[0013] This method is based on numerical simulation technology, which parametrically models the microwave remote plasma source and accurately simulates and analyzes the electromagnetic field distribution inside it, so as to quickly find the optimal design solution. It avoids the problem of over-reliance on experimental verification and experience accumulation in traditional design methods, shortens the design cycle, reduces design costs, has little reliance on engineering experience, and can perform simulation analysis for different working conditions to quickly find a design solution with strong adaptability and superior performance. It has strong adaptability.

[0014] Preferably, the simplified model includes an inner cavity model of the resonant cavity, a tube body model of the quartz tube and an inner hole model of the quartz tube;

[0015] The characteristic parameters include the length, width and height of the inner cavity model, the wall thickness of the tube model, the radius of the inner hole model, and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model;

[0016] The variable parameters include the wall thickness of the tube model and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model.

[0017] This improved method provides a more accurate parametric modeling basis for the structural optimization of microwave remote plasma source by defining the specific composition and characteristic parameters of the simplified model. The simplified model includes three key parts: the resonant cavity, the quartz tube body and the inner hole. This division can fully reflect the core structure of the microwave remote plasma source. The selection of characteristic parameters covers the key dimensions of each model part, including the three-dimensional size of the inner cavity, the wall thickness of the tube body, the radius of the inner hole, and the position of the center axis of the inner hole relative to the top surface of the inner cavity. These parameters jointly determine the geometric structure of the plasma source and have a direct impact on its performance. The selection of variable parameters focuses on the wall thickness of the tube body and the position of the center axis of the inner hole. These two parameters have a significant impact on microwave energy transmission and plasma generation efficiency.

[0018] Preferably, in step A2, the simplified model is meshed using a free tetrahedral mesh.

[0019] The simplified model is meshed using free tetrahedral mesh, which has good adaptability and can flexibly adapt to complex geometric structures.

[0020] Preferably, in step A3, the electromagnetic parameters of the inner cavity model are set to the electromagnetic parameters of air, the electromagnetic parameters of the tube model are set to the electromagnetic parameters of quartz, and the electromagnetic parameters of the inner hole model are set to the electromagnetic parameters of argon; the electromagnetic parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant.

[0021] Preferably, step A4 comprises:

[0022] The physical field is set as an electromagnetic wave field solved in the frequency domain, the solution domain is set as the model domain of the entire simplified model, and the constitutive relationship of the solution domain is set as relative magnetic permeability;

[0023] The bottom surface of the inner cavity model is used as a microwave feed port, the boundary condition of the microwave feed port is set as a rectangular port, and the input power and microwave resonance mode of the microwave feed port are set according to actual working conditions;

[0024] The boundary conditions of the other surfaces of the inner cavity model and the peripheral surface of the portion of the tube model extending out of the inner cavity model are set to be ideal metal conductors.

[0025] Preferably, step A5 comprises:

[0026] Configure the frequency domain solver and set the frequency to the actual frequency of the microwave fed into it;

[0027] Using the frequency domain solver to simulate the physical field under the boundary conditions to obtain the electric field distribution;

[0028] The rationality of the electric field distribution is judged by using a pre-trained recognition model. When the electric field distribution is unreasonable, the characteristic parameters are adjusted and steps A2 to A5 are performed again until the electric field distribution is reasonable.

[0029] Preferably, step A6 comprises:

[0030] Add an optimization solver based on the simulation results, select the optimization algorithm, set the optimization tolerance and the maximum number of solutions;

[0031] The optimization target is set to maximize the quadratic integral of the modulus of the electric field intensity at the central axis of the inner hole model in the space coordinate system;

[0032] Selecting a control parameter as the variable parameter, and setting upper and lower bounds of the control parameter;

[0033] The optimization solver is used to optimize and iteratively solve the control parameters based on the optimization target and the upper and lower bounds of the control parameters to obtain the optimal solution of the variable parameters.

[0034] In a second aspect, the present application provides a microwave remote plasma source structure optimization design analysis device, which is used to optimize the design of the structural parameters of the microwave remote plasma source, wherein the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, wherein the inner cavity of the resonant cavity is a rectangular parallelepiped, and the resonant cavity is used to input microwaves from the lower end to ionize the working gas in the quartz tube into plasma; the microwave remote plasma source structure optimization design analysis device comprises:

[0035] A modeling module, used for performing parameterized modeling on the microwave remote plasma source based on the initialized characteristic parameters to obtain a simplified model, and selecting variable parameters from the characteristic parameters;

[0036] A meshing module, used for meshing the simplified model;

[0037] A material parameter setting module, used to set the material parameters of the simplified model;

[0038] A condition setting module, used to set the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field;

[0039] A simulation module, used for configuring a frequency domain solver to simulate the physical field;

[0040] The iterative solution module is used to configure the optimization solver, set the optimization target, and calculate the optimal solution of the variable parameters based on the simulation results.

[0041] In a third aspect, the present application provides an electronic device comprising a processor and a memory, wherein the memory stores a computer program executable by the processor, and when the processor executes the computer program, it runs the steps in the microwave remote plasma source structure optimization design and analysis method as described above.

[0042] In a fourth aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, runs the steps of the microwave remote plasma source structure optimization design and analysis method as described above.

[0043] Beneficial effects: The microwave remote plasma source structure optimization design and analysis method and related equipment provided in the present application, based on numerical simulation technology, parametrically model the microwave remote plasma source, and accurately simulate and analyze the electromagnetic field distribution inside it, so as to quickly find the optimal design solution; it avoids the problem of over-reliance on experimental verification and experience accumulation in traditional design methods, shortens the design cycle, reduces design costs, has little reliance on engineering experience, and can perform simulation analysis for different working conditions to quickly find a design solution with strong adaptability and superior performance, and has strong adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 A flow chart of a microwave remote plasma source structure optimization design and analysis method provided in an embodiment of the present application.

[0045] Figure 2 Schematic diagram of the structure of a microwave remote plasma source.

[0046] Figure 3 This is a simplified structural diagram of the model.

[0047] Figure 4 Schematic diagram of mesh generation for a simplified model.

[0048] Figure 5 is the initial electric field distribution inside the resonant cavity.

[0049] Figure 6 This is the initial electric field distribution in the inner hole of the quartz tube.

[0050] Figure 7 is the target convergence curve.

[0051] Figure 8 This is the optimized electric field distribution inside the resonant cavity.

[0052] Fig. 9 This is the optimized electric field distribution in the inner hole of the quartz tube.

[0053] Fig.10 A schematic structural diagram of a microwave remote plasma source structure optimization design and analysis device provided in an embodiment of the present application.

[0054] Fig.11 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application.

[0055] Explanation of reference numerals: 1. Modeling module; 2. Meshing module; 3. Material parameter setting module; 4. Condition setting module; 5. Simulation module; 6. Iterative solution module; 90. Resonant cavity; 91. Quartz tube; 92. Microwave feed port; 93. Copper sleeve; 94. Microwave source; 301. Processor; 302. Memory; 303. Communication bus. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0057] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0058] Please refer to Figure 1 In some embodiments of the present application, a microwave remote plasma source structure optimization design analysis method is used to optimize the structural parameters of the microwave remote plasma source. The microwave remote plasma source includes a resonant cavity 90 and a quartz tube 91 passing through the resonant cavity 90. The inner cavity of the resonant cavity 90 is a rectangular parallelepiped (such as Figure 2 As shown in FIG. 1 ), the resonant cavity 90 is used to feed microwaves from the lower end to ionize the working gas in the quartz tube 91 into plasma; the microwave remote plasma source structure optimization design analysis method includes the steps of:

[0059] A1. Based on the initialized characteristic parameters, parameterized modeling is performed on the microwave remote plasma source to obtain a simplified model, and variable parameters are selected from the characteristic parameters;

[0060] A2. Mesh the simplified model;

[0061] A3. Set the material parameters of the simplified model;

[0062] A4. According to the influence of the actual structure of microwave remote plasma source on the electric field, set the physical field and boundary conditions of the simplified model;

[0063] A5. Configure the frequency domain solver to simulate the physical field under boundary conditions.

[0064] A6. Based on the simulation results, configure the optimization solver, set the optimization goal, and calculate the optimal solution for the variable parameters.

[0065] This method is based on numerical simulation technology, which parametrically models the microwave remote plasma source and accurately simulates and analyzes the electromagnetic field distribution inside it, so as to quickly find the optimal design solution. It avoids the problem of over-reliance on experimental verification and experience accumulation in traditional design methods, shortens the design cycle, reduces design costs, has little reliance on engineering experience, and can perform simulation analysis for different working conditions to quickly find a design solution with strong adaptability and superior performance. It has strong adaptability.

[0066] Among them, reference Figure 2 The microwave remote plasma source also includes a microwave source 94 connected to the lower end of the resonant cavity 90 and used to feed microwaves into the microwave feeding port 92 of the resonant cavity 90; wherein the outer shell of the resonant cavity 90 is copper, and its inner cavity is filled with air; a copper sleeve 93 is attached to the peripheral wall of the part of the quartz tube 91 extending out of the resonant cavity 90; the working gas input into the inner hole of the quartz tube 91 (the inner hole of the quartz tube 91 is also called the reaction chamber) is generally argon.

[0067] It should be noted that the microwave remote plasma source structure optimization design and analysis method can be designed and analyzed based on COMSOL Multiphysics software or other numerical simulation software.

[0068] Preferably, the simplified model includes an inner cavity model of the resonant cavity, a tube body model of the quartz tube, and an inner hole model of the quartz tube;

[0069] The characteristic parameters include the length, width and height of the inner cavity model, the wall thickness of the tube model, the radius of the inner hole model, and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model;

[0070] The variable parameters include the wall thickness of the tube model and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model (the top surface of the inner cavity model is the waveguide short-circuit surface).

[0071] This improved method provides a more accurate parametric modeling basis for the structural optimization of microwave remote plasma source by defining the specific composition and characteristic parameters of the simplified model. The simplified model includes three key parts: the resonant cavity, the quartz tube body and the inner hole. This division can fully reflect the core structure of the microwave remote plasma source. The selection of characteristic parameters covers the key dimensions of each model part, including the three-dimensional size of the inner cavity, the wall thickness of the tube body, the radius of the inner hole, and the position of the center axis of the inner hole relative to the top surface of the inner cavity. These parameters jointly determine the geometric structure of the plasma source and have a direct impact on its performance. The selection of variable parameters focuses on the wall thickness of the tube body and the position of the center axis of the inner hole. These two parameters have a significant impact on microwave energy transmission and plasma generation efficiency.

[0072] For example Figure 3is an exemplary simplified model, wherein T1 is the inner cavity model, T2 is the tube model, T3 is the inner hole model, a, b, l are the length, width and height of the inner cavity model respectively, △r is the wall thickness of the tube model, r is the radius of the inner hole model, and h is the height difference between the central axis of the inner hole model and the top surface of the inner cavity model.

[0073] Among them, a and b are mainly determined according to the resonance mode and working frequency of the fed microwave (or working microwave), and r is related to the working gas flow rate; in fact, the goal of this application is to use the optimization algorithm to adjust the structure so that the electric field intensity at the center of the inner hole of the quartz tube 91 is maximized, and the characteristic parameters that are highly correlated with this and less correlated with other performances of the microwave remote plasma source include △r and h. Therefore, △r and h are selected as variable parameters, and these two parameters are mainly optimized in the subsequent process.

[0074] The initialized characteristic parameters include initialized a, b, l, r, △r and h. Among them, a, b, l are initially set according to the resonance mode (TE mode or TM mode) and working frequency of the working microwave. For example, the preferred values ​​corresponding to different resonance modes and working frequencies can be determined in advance through experiments as recommended values ​​to form a recommendation table. Here, the recommended values ​​of a, b, and l are obtained by querying the recommendation table according to the resonance mode and working frequency of the working microwave, as the initialization values ​​of a, b, and l. r is initially set according to the required working gas flow rate. For example, the inner hole radius corresponding to different flow rates can be determined in advance through experiments to form a radius query table. Here, the radius query table is queried according to the required working gas flow rate to obtain the corresponding inner hole radius as the initialization value of r. The initialization values ​​of △r and h can be manually input or randomly generated within their respective preset ranges.

[0075] In step A2, the simplified model may be meshed using a free tetrahedral mesh.

[0076] The simplified model is meshed using free tetrahedral meshing, which is a mesh type with good adaptability and can flexibly adapt to complex geometric structures. Figure 4 Schematic diagram of the mesh division of the simplified model obtained by free tetrahedral meshing.

[0077] Since the inner cavity of the resonant cavity 90 is filled with air, the working gas is generally argon; therefore, in step A3, the electromagnetic parameters of the inner cavity model can be set to the electromagnetic parameters of air, the electromagnetic parameters of the tube model can be set to the electromagnetic parameters of quartz, and the electromagnetic parameters of the inner hole model can be set to the electromagnetic parameters of argon; wherein the electromagnetic parameters include relative permeability, electrical conductivity and relative dielectric constant. Specifically, the relative permeability of argon is 1, the electrical conductivity is 0, and the relative dielectric constant is 1; the relative permeability of air is 1, the electrical conductivity is 0, and the relative dielectric constant is 1; the relative permeability of quartz is 1, the electrical conductivity is 10 -14 S / m, and the relative dielectric constant is 4.2.

[0078] Specifically, the inner cavity model is set to the electromagnetic parameters of air to simulate the air environment in the resonant cavity; the tube model is set to the electromagnetic parameters of quartz to reflect the material properties of the quartz tube; the inner hole model is set to the electromagnetic parameters of argon to simulate the actual working gas. By setting these electromagnetic parameters, including relative permeability, conductivity and relative dielectric constant, the behavior of each part of the material in the electromagnetic field can be more accurately reflected.

[0079] In some embodiments, step A4 comprises:

[0080] Set the physical field to the electromagnetic wave field solved in the frequency domain, set the solution domain to the model domain of the entire simplified model, and set the constitutive relation of the solution domain to relative permeability;

[0081] The bottom surface of the cavity model is used as the microwave feed port, the boundary condition of the microwave feed port is set as a rectangular port, and the input power and microwave resonance mode of the microwave feed port are set according to the actual working conditions;

[0082] The boundary conditions of the other surfaces of the inner cavity model and the peripheral surface of the tube model extending out of the inner cavity model are set as ideal metal conductors.

[0083] This technical solution simulates the actual working state of the microwave remote plasma source by setting physical fields and boundary conditions. The physical field is set as an electromagnetic wave field solved in the frequency domain, so that the propagation characteristics of microwaves in the resonant cavity can be accurately simulated. The entire simplified model is set as the solution domain to ensure the comprehensiveness of the simulation. Setting the constitutive relationship of the solution domain as relative permeability helps to accurately describe the magnetic properties of the material. The bottom surface of the inner cavity model is set as a microwave feed port and a rectangular port, which is consistent with the structure of the actual microwave remote plasma source. Setting the input power and microwave resonance mode according to the actual working conditions can more accurately simulate the actual working state. The other surfaces of the inner cavity model and the circumference of the part of the tube model extending out of the inner cavity model are set as ideal metal conductors, which conforms to the actual material properties of the resonant cavity 90 and the copper sleeve 93, and can simulate the reflection of microwaves in the cavity and the standing wave formation process.

[0084] The input power and microwave resonance mode are set according to the actual working conditions. For example, the input power is 100W and the microwave resonance mode is TE. 10 mode, but not limited to it.

[0085] Preferably, step A5 comprises:

[0086] Configure the frequency domain solver and set the frequency to the actual frequency of the microwave fed into it;

[0087] Use the frequency domain solver to simulate the physical field under boundary conditions to obtain the electric field distribution;

[0088] The rationality of the electric field distribution is judged by using a pre-trained recognition model. When the electric field distribution is unreasonable, the characteristic parameters are adjusted and steps A2 to A5 are performed again until the electric field distribution is reasonable.

[0089] The actual frequency of the microwaves fed into the microwave oven is adjusted according to actual needs. For example, in some embodiments, the actual frequency is set to 2.45 GHz, but is not limited thereto.

[0090] Among them, using the frequency domain solver to simulate the physical field and obtain the electric field distribution is a function equipped with COMSOL Multiphysics software or other numerical simulation software. After completing the frequency domain solver configuration, running the corresponding simulation calculation function can realize the simulation.

[0091] Among them, multiple electric field distribution data can be collected and calibrated to form a training data set for training a neural network model to obtain a pre-trained recognition model, and the recognition model can be used to quickly and accurately complete the rationality judgment of the electric field distribution. When adjusting the characteristic parameters, they can be automatically adjusted in sequence according to the preset step size within the preset variation range of each characteristic parameter until the electric field distribution is reasonable. At this time, the initialization values ​​of a, b, l, r, △r and h are updated to the values ​​after the last adjustment of the characteristic parameters. In fact, the electric field distribution results can also be output to manually judge the rationality of the electric field distribution and feedback the judgment results, as well as manually adjust the characteristic parameters. The reasonable electric field distribution obtained in step A5 is referred to as the initial electric field distribution below. By ensuring the rationality of the initial electric field distribution, a good foundation is provided for the subsequent optimization of variable parameters, and the reliability of the optimization results is guaranteed.

[0092] In some embodiments, step A6 comprises:

[0093] A601. Add an optimization solver based on the simulation results (i.e., based on the initial electric field distribution), select the optimization algorithm, set the optimization tolerance and the maximum number of solutions;

[0094] A602. Set the optimization target to maximize the quadratic integral of the modulus of the electric field intensity at the central axis of the inner hole model in the spatial coordinate system;

[0095] A603. Select the control parameter as a variable parameter and set the upper and lower bounds of the control parameter;

[0096] A604. Using the optimization solver, based on the optimization objective and the upper and lower bounds of the control parameters, the control parameters are optimized and solved iteratively to obtain the optimal solution for the variable parameters.

[0097] The optimization algorithm can be selected according to actual needs, such as selecting the BOBYQA algorithm, but not limited thereto. The optimization tolerance and the maximum number of solutions can be adjusted according to actual needs, such as the optimization tolerance is 0.01 and the maximum number of solutions is 1000, but not limited thereto.

[0098] In fact, in step A1, when establishing the simplified model, a probe can be set at the central axis of the inner hole model to detect the quadratic integral of the modulus of the electric field strength at the central axis of the inner hole model in the spatial coordinate system; thus, in step A602, the optimization objective function is set to the probe, and the optimization type is set to the maximization objective.

[0099] In step A603, △r and h are set as control parameters, and their upper and lower limits can be set according to actual needs.

[0100] Among them, in step A604, optimizing and iteratively solving the control parameters by using the optimization solver is a function equipped in COMSOL Multiphysics software or other numerical simulation software, and it is only necessary to run the corresponding function.

[0101] In a possible implementation, the initialization a=72.14mm, the initialization b=34.2mm, the initialization l=93.2mm, the initialization r=5mm, the initialization Δr=7mm, the initialization h=44mm; the resonance mode of the working microwave is TE 10 mode, the input power is 100W, the operating frequency is 2.45GHz; the physical field is simulated, and the initial electric field distribution is as follows Figure 5 , Figure 6 As shown (where Figure 5 is the initial electric field distribution in the resonant cavity, Figure 6is the initial electric field distribution in the inner hole of the quartz tube); based on the initial electric field distribution, an optimization solver is added, the optimization algorithm selects the BOBYQA algorithm, the optimization tolerance is set to 0.01, the maximum number of solutions is set to 1000, the lower limit of h is set to 20mm, the upper limit of h is set to 50mm, the lower limit of Δr is set to 2mm, and the upper limit of Δr is set to 10mm. Through the optimization iterative solution, the optimal variable parameters are h=38.87mm, Δr=2mm, and the target convergence curve (that is, the curve of the target changing with the number of iterations) is as follows: Figure 7 As shown in the figure, the target refers to the quadratic integral of the modulus of the electric field intensity at the central axis of the inner hole model in the spatial coordinate system. The final optimized electric field distribution is as follows: Figure 8 , Fig. 9 As shown (where Figure 8 is the optimized electric field distribution in the resonant cavity, Fig. 9 is the optimized electric field distribution in the inner hole of the quartz tube).

[0102] As can be seen from the above, the microwave remote plasma source structure optimization design and analysis method performs parametric modeling on the microwave remote plasma source based on the initialized characteristic parameters to obtain a simplified model, and selects variable parameters from the characteristic parameters; meshes the simplified model; sets the material parameters of the simplified model; sets the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field; configures a frequency domain solver to simulate the physical field; configures an optimization solver based on the simulation results, sets the optimization target, and calculates the optimal solution of the variable parameters; thereby, the design cycle is short, the cost is low, the dependence on engineering experience is small, and the adaptability is strong.

[0103] refer to Fig.10 The present application provides a microwave remote plasma source structure optimization design and analysis device, which is used to optimize the structural parameters of the microwave remote plasma source. The microwave remote plasma source includes a resonant cavity 90 and a quartz tube 91 passing through the resonant cavity 90. The inner cavity of the resonant cavity 90 is a rectangular parallelepiped (such as Figure 2 As shown in FIG. 1 ), the resonant cavity 90 is used to feed microwaves from the lower end to ionize the working gas in the quartz tube 91 into plasma; the microwave remote plasma source structure optimization design and analysis device includes:

[0104] Modeling module 1, used for parameterizing the microwave remote plasma source based on the initialized characteristic parameters to obtain a simplified model, and selecting variable parameters from the characteristic parameters (for the specific process, refer to step A1);

[0105] Meshing module 2, used for meshing the simplified model (refer to step A2 for the specific process);

[0106] Material parameter setting module 3, used to set the material parameters of the simplified model (refer to step A3 for the specific process);

[0107] Condition setting module 4, used to set the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field (refer to step A4 for the specific process);

[0108] Simulation module 5, used to configure the frequency domain solver to simulate the physical field (refer to step A5 for the specific process);

[0109] The iterative solution module 6 is used to configure the optimization solver, set the optimization target, and calculate the optimal solution of the variable parameters based on the simulation results (for the specific process, refer to step A6).

[0110] Please refer to Fig.11 , is a structural schematic diagram of an electronic device provided in an embodiment of the present application. The present application provides an electronic device, including: a processor 301 and a memory 302. The processor 301 and the memory 302 are interconnected and communicate with each other through a communication bus 303 and / or other forms of connection mechanisms (not shown). The memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to execute the microwave remote plasma source structure optimization design and analysis method in any optional implementation of the above embodiment to achieve the following functions: based on the initialized characteristic parameters, parameterize the microwave remote plasma source to obtain a simplified model, and select variable parameters from the characteristic parameters; mesh the simplified model; set the material parameters of the simplified model; set the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field; configure a frequency domain solver to simulate the physical field; based on the simulation results, configure an optimization solver, set the optimization target, and calculate the optimal solution of the variable parameters.

[0111] An embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the microwave remote plasma source structure optimization design and analysis method in any optional implementation of the above-mentioned embodiment is executed to achieve the following functions: based on the initialized characteristic parameters, parameterized modeling of the microwave remote plasma source is performed to obtain a simplified model, and variable parameters are selected from the characteristic parameters; the simplified model is meshed; the material parameters of the simplified model are set; according to the influence of the actual structure of the microwave remote plasma source on the electric field, the physical field and boundary conditions of the simplified model are set; a frequency domain solver is configured to simulate the physical field; based on the simulation results, an optimization solver is configured, an optimization target is set, and the optimal solution of the variable parameters is calculated. Among them, the computer-readable storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable red-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk or optical disk.

[0112] In the embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of the devices or units can be electrical, mechanical or other forms.

[0113] In addition, the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, and may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0114] Furthermore, the functional modules in the various embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0115] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0116] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A microwave remote plasma source structure optimization design analysis method, used for optimizing the structural parameters of the microwave remote plasma source, the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, the inner cavity of the resonant cavity is a rectangular parallelepiped, the resonant cavity is used to feed microwaves from the lower end to ionize the working gas in the quartz tube into plasma; characterized in that: The microwave remote plasma source structure optimization design and analysis method comprises the following steps: A1. Based on the initialized characteristic parameters, parameterized modeling is performed on the microwave remote plasma source to obtain a simplified model, and variable parameters are selected from the characteristic parameters; A2. Meshing the simplified model; A3. Setting material parameters of the simplified model; A4. Setting the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field; A5. Configuring a frequency domain solver to simulate the physical field under the boundary conditions; A6. Based on the simulation results, configure the optimization solver, set the optimization target, and calculate the optimal solution of the variable parameters; The simplified model includes an inner cavity model of the resonant cavity, a tube body model of the quartz tube, and an inner hole model of the quartz tube; The characteristic parameters include the length, width and height of the inner cavity model, the wall thickness of the tube model, the radius of the inner hole model, and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model; The variable parameters include the wall thickness of the tube model and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model; Step A6 includes: Add an optimization solver based on the simulation results, select the optimization algorithm, set the optimization tolerance and the maximum number of solutions; The optimization target is set to maximize the quadratic integral of the modulus of the electric field intensity at the central axis of the inner hole model in the space coordinate system; Selecting a control parameter as the variable parameter, and setting upper and lower bounds of the control parameter; The optimization solver is used to optimize and iteratively solve the control parameters based on the optimization target and the upper and lower bounds of the control parameters to obtain the optimal solution of the variable parameters.

2. The microwave remote plasma source structure optimization design and analysis method according to claim 1, characterized in that: In step A2, the simplified model is meshed using a free tetrahedral mesh.

3. The microwave remote plasma source structure optimization design and analysis method according to claim 1, characterized in that: In step A3, the electromagnetic parameters of the inner cavity model are set to the electromagnetic parameters of air, the electromagnetic parameters of the tube model are set to the electromagnetic parameters of quartz, and the electromagnetic parameters of the inner hole model are set to the electromagnetic parameters of argon; the electromagnetic parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant.

4. The microwave remote plasma source structure optimization design and analysis method according to claim 3, characterized in that: Step A4 includes: The physical field is set as an electromagnetic wave field solved in the frequency domain, the solution domain is set as the model domain of the entire simplified model, and the constitutive relationship of the solution domain is set as relative magnetic permeability; The bottom surface of the inner cavity model is used as a microwave feed port, the boundary condition of the microwave feed port is set as a rectangular port, and the input power and microwave resonance mode of the microwave feed port are set according to actual working conditions; The boundary conditions of the other surfaces of the inner cavity model and the peripheral surface of the portion of the tube model extending out of the inner cavity model are set to be ideal metal conductors.

5. The microwave remote plasma source structure optimization design and analysis method according to claim 4, characterized in that: Step A5 includes: Configure the frequency domain solver and set the frequency to the actual frequency of the microwave fed into it; Using the frequency domain solver to simulate the physical field under the boundary conditions to obtain the electric field distribution; The rationality of the electric field distribution is judged by using a pre-trained recognition model. When the electric field distribution is unreasonable, the characteristic parameters are adjusted and steps A2 to A5 are performed again until the electric field distribution is reasonable.

6. A microwave remote plasma source structure optimization design and analysis device, used for optimizing the structural parameters of the microwave remote plasma source, the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, the inner cavity of the resonant cavity is a rectangular parallelepiped, the resonant cavity is used to input microwaves from the lower end to ionize the working gas in the quartz tube into plasma; characterized in that, The microwave remote plasma source structure optimization design and analysis device comprises: A modeling module, used for performing parameterized modeling on the microwave remote plasma source based on the initialized characteristic parameters to obtain a simplified model, and selecting variable parameters from the characteristic parameters; A meshing module, used for meshing the simplified model; A material parameter setting module, used to set the material parameters of the simplified model; A condition setting module, used to set the physical field and boundary conditions of the simplified model according to the influence of the actual structure of the microwave remote plasma source on the electric field; A simulation module, used for configuring a frequency domain solver to simulate the physical field under the boundary conditions; An iterative solution module is used to configure an optimization solver, set optimization targets, and calculate and obtain the optimal solution of the variable parameters based on the simulation results; The simplified model includes an inner cavity model of the resonant cavity, a tube body model of the quartz tube, and an inner hole model of the quartz tube; The characteristic parameters include the length, width and height of the inner cavity model, the wall thickness of the tube model, the radius of the inner hole model, and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model; The variable parameters include the wall thickness of the tube model and the height difference between the central axis of the inner hole model and the top surface of the inner cavity model; The iterative solution module configures the optimization solver based on the simulation results, sets the optimization target, and calculates the optimal solution of the variable parameters. Specifically, the following steps are performed: Add an optimization solver based on the simulation results, select the optimization algorithm, set the optimization tolerance and the maximum number of solutions; The optimization target is set to maximize the quadratic integral of the modulus of the electric field intensity at the central axis of the inner hole model in the space coordinate system; Selecting a control parameter as the variable parameter, and setting upper and lower bounds of the control parameter; The optimization solver is used to optimize and iteratively solve the control parameters based on the optimization target and the upper and lower bounds of the control parameters to obtain the optimal solution of the variable parameters.

7. An electronic device, characterized in that: It comprises a processor and a memory, wherein the memory stores a computer program executable by the processor, and when the processor executes the computer program, it runs the steps in the microwave remote plasma source structure optimization design and analysis method as described in any one of claims 1 to 5.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the microwave remote plasma source structure optimization design and analysis method as described in any one of claims 1 to 5 are executed.

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