Large precision microseismic vibration isolator based on multiple sets of vertical magnetization space permanent magnet arrays

Abstract

The large precision micro-vibration isolation damper based on multiple sets of vertical magnetization space permanent magnet arrays belongs to the technical field of precision vibration isolation. The inner magnetic array and the outer magnetic array utilize four columns of multi-layer array arrangement and adjacent layer vertical magnetization of equal cross-section cubic permanent magnets to form a high magnetic density excitation magnetic field around the conductor plate. When the conductor plate moves relative to the inner magnetic array and the outer magnetic array, a strong eddy current effect is excited to generate high damping characteristics. The design of the vertical magnetization space permanent magnet array enhances the magnetic flux change and the eddy current density, greatly improves the damping force, accelerates the decay efficiency of vibration energy, and provides strong technical support for large ultra-precision manufacturing, cutting-edge scientific research experiments and other fields, and ensures the stability of high-end equipment.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of precision vibration isolation, and in particular to a large precision micro-vibration damper based on multiple groups of vertically magnetized spatial permanent magnet arrays. BACKGROUND

[0002] During the installation, adjustment, testing and experiment of precision instruments and equipment, low-frequency micro-amplitude vibration interference in the environment has become one of the key problems affecting research results. Providing a micro-vibration isolation platform for precision instruments and equipment has gradually become the main technical means for suppressing environmental micro-vibration in the field of precision engineering. As a key indicator for evaluating the performance of vibration isolation, damping directly affects the attenuation efficiency of vibration energy of the micro-vibration isolation platform. The greater the damping coefficient, the better the vibration isolation effect of the micro-vibration isolation platform on low-frequency micro-amplitude vibration interference. Therefore, how to effectively improve the damping characteristics of the micro-vibration isolation platform has become the core of enhancing the vibration isolation performance. At present, the research work of dampers mainly focuses on small optical micro-vibration isolation platforms and devices, and the mass of these platforms and devices is mostly between kilograms and hundreds of kilograms, rarely exceeding the ton level. When facing large-scale precision micro-vibration isolation platforms of hundreds of tons or more, the existing dampers exhibit low damping coefficients, and the effect of improving the damping performance of such large platforms is not significant.

[0003] Patent No. CN202210957290.3 discloses a magnetic rheological damper with a tooth-shaped flow channel. The tooth-shaped piston adopts a gear-like design, and the excitation coils are evenly distributed in three groups and wound in the inner layer of the piston cylinder to increase the utilization rate of magnetic flux. Patent No. CN202210441343.6 discloses a multi-excitation multi-disc magnetic rheological broadband vibration isolator, which replaces the liquid environment in the flow mode with a composite matrix magnetic rheological material based on non-woven fabric to expand the adjustable range of damping force and reduce the hardening effect under high-frequency excitation. In order to adjust the damping force, Patent No. CN202111522940.3 discloses a multi-stage excitation double-cylinder magnetic rheological damper and its control method. By arranging N magnetic yokes and (N-1) coils in the inner cylinder in an alternating array along the axial direction, and nesting the outer cylinder coaxially to construct (2N-1) flow paths for the magnetic rheological fluid, the number of flow gaps can be dynamically changed by adjusting the magnetic field to ensure damping adjustment. The application of magnetic rheological dampers in the field of large-scale precision micro-vibration isolation has limitations: 1) The shear yield strength of magnetic rheological dampers is low, making it difficult to generate sufficient damping to improve large-scale precision micro-vibration isolation of hundreds of tons or more. Increasing the number of excitation coils, excitation voltage / current, magnetic field effective area, and throttle passage length to increase damping will increase energy consumption and cost; 2) The properties of magnetic rheological fluid are unstable and easily affected by external environmental factors such as temperature and humidity. Its damping performance may change or even fail to work normally in high or low temperature environments; 3) Long-term use or improper use may cause residue in the magnetic rheological damper, affecting damping effect and service life.

[0004] Professor Cui Junning of Harbin Institute of Technology proposed a kind of ultra-low frequency air spring vibration isolator (1. "Air spring vibration isolator based on electromagnetic negative stiffness structure", ZL202010605223.6; 2. Ultra-low frequency vibration isolator based on vertical magnetization magnetic ring negative stiffness structure, ZL202010605241.4; 3. Ultra-low frequency air spring vibration isolator based on axial magnetization magnetic ring negative stiffness structure, ZL202010606309.0; 4. Large load ultra-low frequency air spring vibration isolator based on negative stiffness magnetic spring, ZL202010605236.3), which can realize negative stiffness characteristics by using radially opposite magnetization, axially same direction magnetization or vertically magnetized inner and outer magnetic rings, and realize damping effect by using orifice and eddy current generated by relative motion of inner and outer magnetic rings. In the above scheme, the inner and outer magnetic rings are permanent magnets uniformly magnetized in a certain direction, and the excitation magnetic field has symmetry. In practical application, only one side of the magnetic field realizes the damping characteristic, while the other side of the magnetic field is in idle state, and the utilization rate of the magnetic field is low.

[0005] Guangxi University of Science and Technology proposed a kind of electromagnetic energy feedback and magnetorheological fluid composite damper (1. "Electromagnetic energy feedback type step magnetorheological damper", CN202310051772.7; 2. "Double cylinder embedded hybrid electromagnetic energy feedback damper", CN202210120495.6; 3. "Hybrid energy feedback electromagnetic damper", CN202210120558.8; 4. "Hybrid electromagnetic energy feedback damper", CN202210120502.2), by setting a step-shaped magnetorheological fluid damping gap between the inner side of the cylinder and the piston head, the effective damping channel length is increased; At the same time, composite electromagnetic energy feedback damping structure composed of Halbach permanent magnet array and coil is used to improve the damping amplitude and realize the adjustment of damping. Beijing University of Technology proposed a kind of damping rotary positioning spring (1. "Eddy current damping magnetic force spring based on multiple halbach permanent magnet arrays", CN201610855716.9; 2. "Eddy current damping magnetic force spring", CN201610857360.2), which utilizes the magnetic field generated by the face-to-face multiple coaxially nested Halbach permanent magnet arrays and the leakage magnetic field on the back surface to realize a damping rotary spring with high positioning stiffness and high speed switching. The characteristics of this technical scheme are: 1) for the Halbach permanent magnet array constituting the damping rotary positioning spring, the excitation magnetic field generated by it has significant imbalance, which can significantly improve the utilization rate of the magnetic field. 2) The eddy current damping part is constructed by using halbach permanent magnet array, which only has damping effect on rotary motion, and cannot isolate low frequency and small amplitude vibration interference in the environment of large precision instruments and equipment.

[0006] In summary, explore and develop a new device, the core lies in the structure and principle of innovation, aims to enhance the large precision vibration isolation damping performance, ensure that while maintaining its large bearing, effectively eliminate or weaken the negative impact of the external environment on the precision instruments and equipment of the micro-vibration. The design goal of this device is to optimize the working environment of precision instruments and equipment, so as to achieve the best state, and then realize the significant improvement of the working precision of the equipment. This innovative initiative is not only important to ensure the optimization of the working environment of precision instruments and equipment, but also can further promote the leap of its working precision, so as to better adapt to the growing demand for high precision in current scientific research and industrial field. SUMMARY

[0007] The core purpose of the present application is to solve the problem of lack of damping performance mechanism in large precision equipment, and innovatively proposes a large precision vibration isolation damper based on multiple vertical magnetization space permanent magnet array. The device uses multiple vertical array arrangement, adjacent layer vertical magnetization of equal cross section cubic permanent magnet composed of inner magnetic array, outer magnetic array to form high magnetic density excitation magnetic field, when the conductor plate moves relative to the high magnetic density excitation magnetic field, strong eddy current effect is excited, so as to produce high damping characteristics, significantly enhance the damping performance of large precision equipment in the micro-vibration environment, accelerate the dissipation of vibration energy, so as to realize the high performance vibration isolation effect, ensure that various precision instruments and equipment run in the optimal working environment, and then promote the further improvement of its precision and performance.

[0008] The technical solution of the present application is:

[0009] The large precision micro-vibration isolation damper based on multiple sets of vertical magnetization space permanent magnet arrays can generate strong eddy current effect sufficient to improve the damping parameters of large precision micro-vibration isolation of more than 100 tons, dissipate vibration energy in the form of heat energy, and effectively isolate low-frequency micro-vibration interference; characterized in that it comprises a load platform, a large air floating micro-vibration isolator and a vertical magnetization space permanent magnet array, the large air floating micro-vibration isolator and the vertical magnetization space permanent magnet array support the load platform in parallel, the large air floating micro-vibration isolator comprises an upper cover plate, an elastic membrane, an air tank and compressed gas, the upper cover plate is fixedly connected with the load platform, and forms a closed air chamber with the elastic membrane and the air tank, and the closed air chamber is filled with compressed gas; the vertical magnetization space permanent magnet array comprises an inner magnetic array, an inner magnetic array mounting, an inner magnetic array cover plate, an outer magnetic array, an outer magnetic array fixing member and a conductor plate, the overall structure is not only about central symmetry, but also axisymmetric in front-back and left-right directions; the center lines of the inner magnetic array mounting, the conductor plate and the outer magnetic array fixing member all coincide with the symmetry axes, and are arranged outward in turn with equal gaps from the center lines; the inner magnetic array mounting is a cubic structure with inverted T-shaped cross section, the bottom is fixedly connected with the ground, and the top end is provided with a gap with the load platform; the conductor plate is a cubic structure with back-shaped cross section, the top end is fixedly connected with the load platform, and the bottom is provided with a gap with the ground; the outer magnetic array fixing member is a cubic structure with back-shaped cross section, four inner sides are provided with same-size cubic deep grooves; the inner magnetic array and the outer magnetic array each comprise four columns of permanent magnets, each column of permanent magnets is composed of 4n layers of array-arranged equal-cross-section cubic permanent magnets with vertical magnetization between adjacent layers, wherein n≥1, n∈N + , and the heights of odd-numbered layers of permanent magnets are equal, and the heights of even-numbered layers of permanent magnets are equal; the four columns of permanent magnets of the inner magnetic array are fixedly mounted on the four sides of the inner magnetic array mounting, and are fixedly pressed by the inner magnetic array cover plate; the inner magnetic array cover plate is a cubic structure with back-shaped cross section, and is sleeved on the conductor plate in a manner that the center line and the symmetry axis all coincide; the four columns of permanent magnets of the outer magnetic array are fixedly mounted in the deep grooves of the four inner sides of the outer magnetic array fixing member; the first layer of cubic permanent magnets of the inner magnetic array and the outer magnetic array are homodirectionally magnetized along the horizontal direction, in the right half of the front view, the magnetization direction of the inner permanent magnet rotates clockwise by 90°, and the magnetization direction of the outer permanent magnet rotates counterclockwise by 90° with each added layer.

[0010] Preferably, the bottom surface of the first layer of cubic permanent magnets in the inner magnetic array coincides with the bottom surface of the first layer of cubic permanent magnets in the outer magnetic array.

[0011] Preferably, the gap between the top end of the inner magnetic array mounting and the load platform and the gap between the bottom of the conductor plate and the ground are both greater than the sum of the floating height of the large air floating micro-vibration isolator and the maximum vibration amplitude of the load platform.

[0012] Preferably, the conductor plate is made of copper, aluminum, iron or nickel metal material, and periodic deep grooves are arranged on the outer side surface.

[0013] Preferably, the deep grooves of the conductor plate outer side array are rectangular, triangular or circular arc-shaped.

[0014] Preferably, the large air floating micro-vibration isolator adopts a steel ring seal, an O-ring seal, a diaphragm seal or a pressure self-sealing mode.

[0015] Preferably, the pressure of the compressed gas is 0.1 MPa to 0.8 MPa.

[0016] Preferably, the inner magnetic array mounting, the outer magnetic array fixing and the inner magnetic array cover plate are non-magnetic or weakly magnetic aluminum alloy or titanium alloy metal conductive materials.

[0017] The technical innovation of the present application and the good effects produced are:

[0018] (1) The present application innovatively proposes a large-scale precision micro-vibration isolator with high damping characteristics based on a multi-group vertical magnetization spatial permanent magnet array. The inner magnetic array and the outer magnetic array composed of four columns of multi-layer array arrangement, adjacent layers of vertical magnetization and equal cross-section cubic permanent magnets effectively weaken the magnetic field strength of the non-working side, while enhancing the magnetic field strength of the working side, and construct a high magnetic density excitation magnetic field. The conductor plate is arranged in the high magnetic density excitation magnetic field constructed by the inner magnetic array and the outer magnetic array in a manner that the center line and the symmetry axis coincide. When the conductor plate moves relative to the inner magnetic array and the outer magnetic array, a strong eddy current effect is excited, high damping characteristics are achieved, and the magnetic field utilization rate and the vibration attenuation rate are greatly improved. This is one of the innovative points of the present application that distinguishes it from the prior art.

[0019] (2) The present application can improve the damping characteristics of large-scale precision micro-vibration isolators, enhance the vibration attenuation rate, accelerate the vibration energy attenuation, and provide a "super-quiet" working environment for advanced instruments and equipment, thereby effectively promoting the leap-forward improvement of the precision of precision instruments and equipment. By connecting the vertical magnetization spatial permanent magnet array and the large air floating micro-vibration isolator in parallel to support the load platform, the damping characteristics can be increased without changing the large load capacity of the vibration isolator, the vibration attenuation rate can be improved, the vibration energy can be attenuated faster and more effectively, the overall performance of the vibration isolation system can be improved, the errors and disturbances caused by vibration can be reduced, and the measurement accuracy and stability of the instrument and equipment can be improved. This is the second innovative point of the present application that distinguishes it from the prior art.

[0020] (3) The present application has fast response speed and high stability, and avoids the nonlinearity caused by friction. The vertical magnetization space permanent array uses electromagnetic induction principle to generate strong eddy current damping effect, not only has instant and sensitive response speed, but also has high stability, and the damping force is almost not disturbed by external environment (such as temperature fluctuation, humidity change). In addition, the non-contact magnetic suspension design has no mechanical friction, avoids the nonlinearity caused by friction, prolongs the service life, reduces the subsequent maintenance cost, and improves the economy of the device. This is the third innovation point of the present application which is different from the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a sectional view of the vertical magnetization space permanent array;

[0022] Figure 2 is a front sectional view of the vertical magnetization space permanent array;

[0023] Figure 3 is a top sectional view of the vertical magnetization space permanent array;

[0024] Figure 4 is a schematic view of the relative position of the inner magnetic array and the outer magnetic array;

[0025] Figure 5 is a three-dimensional view of a large precision micro-vibration isolation damper based on multiple groups of vertical magnetization space permanent arrays;

[0026] Figure 6 is a front sectional view of a large precision micro-vibration isolation damper based on multiple groups of vertical magnetization space permanent arrays;

[0027] Figures 7 to 9 is a front sectional view of the vertical magnetization space permanent array when the rectangular, triangular and circular arc deep grooves are respectively arranged on the outer side surface of the conductor plate 6.

[0028] Explanation of part numbers in the figure: 1 ground, 2 inner magnetic array, 3 inner magnetic array mounting, 4 outer magnetic array, 5 outer magnetic array fixing part, 6 conductor plate, 7 compressed gas, 8 load platform, 9 vertical magnetization space permanent array, 10 large air floatation micro-vibration isolator, 11 upper cover plate, 12 elastic film, 13 gas tank, 14 inner magnetic array cover plate. DETAILED DESCRIPTION

[0029] The specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0030] The large precision micro-vibration isolation damper based on multiple sets of vertical magnetization space permanent magnet arrays can generate strong eddy current effect sufficient to improve the damping parameters of large precision micro-vibration isolation of more than 100 tons, dissipate vibration energy in the form of heat energy, and effectively isolate low-frequency micro-vibration interference; characterized in that it comprises a load platform 8, a large air floating micro-vibration isolator 10 and a vertical magnetization space permanent magnet array 9, the large air floating micro-vibration isolator 10 and the vertical magnetization space permanent magnet array 9 support the load platform 8 in parallel; the large air floating micro-vibration isolator 10 comprises an upper cover plate 11, an elastic membrane 12, an air tank 13 and compressed gas 7, the upper cover plate 11 is fixedly connected with the load platform 8, and forms a closed air chamber with the elastic membrane 12 and the air tank 13, and the closed air chamber is filled with the compressed gas 7; the vertical magnetization space permanent magnet array 9 comprises an inner magnetic array 2, an inner magnetic array mounting 3, an inner magnetic array cover plate 14, an outer magnetic array 4, an outer magnetic array fixing 5 and a conductor plate 6, the overall structure is not only about central symmetry, but also axis symmetry in front-back and left-right directions; the center lines of the inner magnetic array mounting 3, the conductor plate 6 and the outer magnetic array fixing 5 all coincide with the symmetry axes, and are arranged with equal gaps outward from the center lines; the inner magnetic array mounting 3 is a cubic structure with inverted T-shaped cross section, the bottom is fixedly connected with the ground 1, and the top end is provided with a gap with the load platform 8; the conductor plate 6 is a cubic structure with back-shaped cross section, the top end is fixedly connected with the load platform 8, and the bottom is provided with a gap with the ground 1; the outer magnetic array fixing 5 is a cubic structure with back-shaped cross section, four inner sides are provided with same size cubic deep grooves; the inner magnetic array 2 and the outer magnetic array 4 each comprise four columns of permanent magnets, each column of permanent magnets is composed of 4n layers of array, and adjacent layers are composed of equal cross section cubic permanent magnets with vertical magnetization, wherein n≥1, n∈N + , and the heights of odd layers of permanent magnets are equal, and the heights of even layers of permanent magnets are equal; the four columns of permanent magnets of the inner magnetic array 2 are fixedly installed on the four sides of the inner magnetic array mounting 3, and are tightly fixed by the inner magnetic array cover plate 14; the inner magnetic array cover plate 14 is a cubic structure with back-shaped cross section, and is sleeved on the conductor plate 6 in a manner that the center line and the symmetry axis all coincide; the four columns of permanent magnets of the outer magnetic array 4 are fixedly installed in the deep grooves of the four inner sides of the outer magnetic array fixing 5; the first layer of cubic permanent magnets of the inner magnetic array 2 and the outer magnetic array 4 are magnetized in the same direction along the horizontal direction, and in the right half of the front view, the magnetization direction of the inner permanent magnet rotates clockwise by 90°, and the magnetization direction of the outer permanent magnet rotates counterclockwise by 90° with each additional layer.

[0031] As a specific embodiment, the gap between the top end of the inner magnetic array mounting 3 and the load platform 8 and the gap between the bottom of the conductor plate 6 and the ground 1 are both greater than the sum of the floating height of the large air floating micro-vibration isolator 10 and the maximum vibration amplitude of the load platform 8.

[0032] As a specific embodiment, the bottom surface of the first layer of cubic permanent magnets in the inner magnetic array 2 coincides with the bottom surface of the first layer of cubic permanent magnets in the outer magnetic array 4.

[0033] As a specific embodiment, the conductor plate 6 is made of copper or aluminum or iron or nickel metal material, and the outer lateral surface array is provided with periodically arranged deep grooves.

[0034] As a specific embodiment, the deep grooves in the outer lateral surface array of the conductor plate 6 are rectangular, triangular or circular arc-shaped.

[0035] As a specific embodiment, the large air-floating micro-vibration isolator 10 adopts a steel ring seal, an O-ring seal, a diaphragm seal or a pressure self-sealing mode.

[0036] As a specific embodiment, the pressure of the compressed gas 7 is 0.1 MPa to 0.8 MPa.

[0037] As a specific embodiment, the inner magnetic array mounting 3, the outer magnetic array fixing 5 and the inner magnetic array cover plate 14 are made of non-magnetic or weakly magnetic aluminum alloy or titanium alloy metal conductive material.

[0038] An embodiment of the present application is described below. Figures 1 to 6 An embodiment of the present application is described below.

[0039] The large precision micro-vibration isolator based on multiple sets of vertically magnetized spatial permanent magnetic arrays is composed of a load platform 8, a vertically magnetized spatial permanent magnetic array 9 and a large air-floating micro-vibration isolator 10. The large air-floating micro-vibration isolator 10, as the core equipment of the ultra-precision air-floating micro-vibration technology, is a non-metallic spring that realizes elastic support by filling compressed gas 7 in the elastic film 12. In structure, the large air-floating micro-vibration isolator 10 is composed of an upper cover plate 11, an elastic film 12, a gas tank 13 and compressed gas 7. The upper cover plate 11 is fixedly connected with the load platform 8 and forms a closed gas chamber with the elastic film 12 and the gas tank 13 through a steel ring seal, an O-ring seal, a diaphragm seal or a pressure self-sealing mode. The closed gas chamber is filled with 0.1 MPa to 0.8 MPa of compressed gas 7. When external micro-vibration interference acts on the large air-floating micro-vibration isolator 10, the compressed gas 7 in the closed gas chamber will be compressed and expanded according to the frequency and amplitude of the micro-vibration, thereby effectively absorbing and dissipating vibration energy and realizing the vibration isolation effect. At the same time, by adjusting the pressure of the compressed gas 7 in the closed gas chamber, stable support and high-performance mid-high frequency band vibration isolation effect of different mass vibration isolation devices can be realized.

[0040] The vertical magnetization space permanent array 9 includes the inner magnetic array 2, the inner magnetic array mounting 3, the inner magnetic array cover plate 14, the outer magnetic array 4, the outer magnetic array fixing 5 and the conductor plate 6. The overall structure is not only about the center symmetry, but also the axis symmetry in the front and back, left and right directions. The center lines of the inner magnetic array mounting 3, the conductor plate 6 and the outer magnetic array fixing 5 coincide with the symmetry axis, and are arranged with equal intervals outward from the center line. The inner magnetic array mounting 3, the outer magnetic array fixing 5 and the inner magnetic array cover plate 14 are all non-magnetic or weakly magnetic aluminum alloy or titanium alloy metal conductive materials. The inner magnetic array mounting 3 is a cube structure with inverted T-shaped cross section, the bottom is fixedly connected with the ground, and the top end keeps a gap of 30mm-100mm with the load platform 8. The gap is greater than the sum of the floating height of the large air floating micro-vibration isolator 10 and the maximum vibration amplitude of the load platform 8. The conductor plate 6 is a cube structure with a back-shaped cross section made of copper, aluminum, iron or nickel metal material, the top end is fixedly connected with the load platform 8, and the bottom keeps a gap of 30mm-100mm with the ground. The gap is greater than the sum of the floating height of the large air floating micro-vibration isolator 10 and the maximum vibration amplitude of the load platform 8. The inner magnetic array 2 and the outer magnetic array 4 each contain four columns of permanent magnets, each column of permanent magnets is composed of 4n layers of array arranged, equal cross section cube permanent magnets with vertical magnetization between adjacent layers, wherein n≥1, n∈N + , and the heights of the odd layers of permanent magnets are equal, and the heights of the even layers of permanent magnets are equal. The permanent magnets are all N44H grade ferrite boron, the residual magnetism is 13.54kGs, the intrinsic coercive force is 12.66kOe, and the relative permeability μr=1.23. The length and width of the inner magnetic array 2 are 30mm and 55mm respectively, and the heights of the odd layers and even layers of moving magnets are 20mm and 34mm respectively. The horizontal gap of the inner magnetic array 2 and the outer magnetic array 4 is 6mm, the length and width of the outer magnetic array 4 are 35mm and 65mm respectively, and the heights of the odd layers and even layers of fixed magnets are 20mm and 34mm respectively. The first layer of moving magnet and fixed magnet are magnetized in the same direction along the horizontal direction, in the right half of the front view, the magnetization direction of the inner permanent magnet rotates 90° clockwise, and the magnetization direction of the outer permanent magnet rotates 90° counterclockwise with each increasing layer.

[0041] The large air-floating micro-vibration isolator 10 and the vertical magnetization space permanent magnetic array 9 support the load platform 8 in parallel. The large air-floating micro-vibration isolator 10 stably supports the load platform 8 of more than 100 tons in an air-floating manner, effectively isolates the vibration in the medium and high frequency bands, and provides a solid support foundation for precision equipment. The vertical magnetization space permanent magnetic array 9 generates high eddy current damping characteristics by using magnetic suspension, which not only enhances the stability of the system, but also accelerates the attenuation of vibration energy, further improving the vibration isolation effect. When the load platform 8 vibrates up and down due to vibration interference, it will drive the conductor plate 6 to move relative to the excitation magnetic field of the inner magnetic array 2 and the outer magnetic array 4. In this process, the conductor plate 6 cuts the magnetic induction lines, causing the internal magnetic flux to change, thereby exciting a ring-shaped eddy current on the surface of the conductor. These eddy currents immediately exert a damping force on the conductor plate 6, which is opposite to the direction of motion and proportional to the speed of motion. From the perspective of energy conversion, the eddy current generates a damping force in the magnetic field that is proportional to the speed, which effectively converts the kinetic energy of the load platform 8 into electrical energy inside the conductor plate 6. Subsequently, this electrical energy is dissipated in the form of heat energy, achieving the effect of energy dissipation and vibration reduction.

[0042] The vertical magnetization space permanent magnetic array 9 is a non-contact high-stability damping structure, which is characterized by no mechanical friction, thereby avoiding the non-linear problem caused by friction, and preventing the introduction of additional stiffness, without affecting the stiffness characteristics of the vibration isolation system, fully ensuring the vibration isolation bandwidth. In addition, this structure exhibits excellent dynamic performance in the low-speed region, and the damping characteristics have high linearity, which is particularly effective for micro-vibration isolation. The large air-floating micro-vibration isolator 10 and the vertical magnetization space permanent magnetic array 9 support the load platform 8 in parallel, which can reduce the vibration interference in the resonance region and the low frequency band without affecting the carrying capacity, improve the vibration isolation performance, and provide a "super-quiet" working environment for advanced instruments and equipment such as ultra-precision lithography machines, high-resolution satellite cameras, and ultra-precision machine tools.

[0043] Figures 7 to 9 The vertical magnetization space permanent magnetic array is a rectangular, triangular, and circular arc deep groove array on the outer side of the conductor plate 6. These deep grooves are arranged periodically to optimize electromagnetic performance and heat dissipation efficiency.

Claims

1. A large-scale precision micro-vibration isolation damper based on multiple sets of vertically magnetized spatial permanent magnet arrays, which can generate strong eddy current effects sufficient to improve the damping parameters of large-scale precision micro-vibration isolation of more than 100 tons, dissipating vibration energy in the form of heat energy, thereby effectively isolating low-frequency micro-vibration interference; characterized in that The system includes a load platform (8), a large air-floating micro-vibrator (10), and a vertically magnetized spatial permanent magnet array (9). The large air-floating micro-vibrator (10) and the vertically magnetized spatial permanent magnet array (9) are connected in parallel to support the load platform (8). The large air-floating micro-vibrator (10) includes an upper cover plate (11), an elastic membrane (12), an air tank (13), and compressed gas (7). The upper cover plate (11) is fixedly connected to the load platform (8) and forms a sealed air chamber with the elastic membrane (12) and the air tank (13). Compressed gas (7) is introduced into the sealed air chamber. The vertically magnetized spatial permanent magnet array (9) includes an inner magnetic array (2), an inner magnetic array mounting component (3), an inner magnetic array cover plate (14), an outer magnetic array (4), an outer magnetic array fixing component (5), and a conductor plate (6). The overall structure is not only symmetrical about the center, but also symmetrical in the front and back, and left and right directions. The inner magnetic array mounting component (3), conductor plate (6), and outer magnetic array fixing component (5) are symmetrical about the axis of symmetry and are arranged with equal gaps from the center line outwards. The inner magnetic array mounting component (3) is a cubic structure with an inverted T-shaped cross section. Its bottom is fixedly connected to the ground (1) and its top is separated from the load platform (8). The conductor plate (6) is a cubic structure with a U-shaped cross section. Its top is fixedly connected to the load platform (8) and its bottom is separated from the ground (1). The outer magnetic array fixing component (5) is a cubic structure with a U-shaped cross section. Its four inner sides are provided with cubic deep grooves of the same size. Both the inner magnetic array (2) and the outer magnetic array (4) contain four columns of permanent magnets. Each column of permanent magnets is composed of 4n layers of arrayed cubic permanent magnets with equal cross sections and perpendicular magnetization between adjacent layers, where n≥1 and n∈N. + The heights of the odd-numbered permanent magnets are all equal, and the heights of the even-numbered permanent magnets are all equal. The four columns of permanent magnets of the inner magnetic array (2) are fixedly installed on the four sides of the inner magnetic array mounting part (3) and pressed and fixed by the inner magnetic array cover plate (14). The inner magnetic array cover plate (14) is a cubic structure with a cross-section of a square, and is fitted onto the conductor plate (6) in such a way that the center line and the axis of symmetry are coincident. The four columns of permanent magnets of the outer magnetic array (4) are fixedly installed in the deep grooves on the four inner sides of the outer magnetic array fixing part (5). The first layer of cubic permanent magnets of the inner magnetic array (2) and the outer magnetic array (4) are magnetized in the same direction along the horizontal direction. On the right half of the front sectional view, for each additional layer, the magnetization direction of the inner permanent magnet rotates 90° clockwise and the magnetization direction of the outer permanent magnet rotates 90° counterclockwise.

2. The large scale precision microseismic vibration isolator based on multiple groups of vertical magnetization spatial permanent magnetic arrays according to claim 1, characterized in that: The bottom surface of the first layer of cubic permanent magnets in the inner magnetic array (2) coincides with the bottom surface of the first layer of cubic permanent magnets in the outer magnetic array (4).

3. The large scale precision microseismic vibration isolator based on multi-group vertical magnetization spatial permanent magnetic array according to claim 1, characterized in that: The gap between the top end of the inner magnetic array mount (3) and the load platform (8) and the gap between the bottom of the conductor plate (6) and the ground (1) are both greater than the sum of the floating height of the large air floating micro-vibration isolator (10) and the maximum vibration amplitude of the load platform (8).

4. The large scale precision microseismic vibration isolator based on multi-group vertical magnetization spatial permanent magnetic array according to claim 1, characterized in that: The conductor plate (6) is made of copper, aluminum, iron or nickel metal material, and the outer side surface array is provided with periodically arranged deep grooves.

5. The large scale precision microseismic vibration isolator based on multi-group vertical magnetization space permanent magnet array according to claim 1 or 3 or 4, characterized in that: The deep grooves in the outer side surface array of the conductor plate (6) are rectangular, triangular or circular arc-shaped.

6. The large scale precision microseismic vibration isolator based on multi-group vertical magnetization space permanent magnet array according to claim 1 or 2, characterized in that: The large air floating micro-vibration isolator (10) adopts a steel ring sealing, O-shaped sealing, diaphragm sealing or pressure self-sealing mode.

7. The large precision microseismic vibration isolator based on multi-group vertical magnetization space permanent magnet array according to claim 1, characterized in that: The pressure of the compressed gas (7) is 0.1-0.8 MPa.

8. The large precision microseismic vibration isolator based on multi-group vertical magnetization space permanent magnet array according to claim 1, characterized in that: The inner magnetic array mount (3), the outer magnetic array fixing member (5) and the inner magnetic array cover plate (14) are made of non-magnetic or weakly magnetic aluminum alloy or titanium alloy metal conductive material.

Images