Infrared drying equipment for quartz furnace tubes used in photovoltaic applications

Abstract

The present invention relates to an infrared drying device for quartz furnace tubes used in photovoltaics, belonging to the technical field of quartz furnace tube drying devices, and includes a drying furnace, a conveying device, a handling device, an inner wall secondary cleaning and water removal device, and a trolley positioning device; air knives are installed on both sides of the furnace body inlet of the drying furnace, and infrared heating tubes are arranged inside the furnace body of the drying furnace; the inner wall secondary cleaning and water removal device is provided with a cleaning and drying mechanism, a water tank and a conveying mechanism, and a water spray nozzle and an air jet nozzle are rotatably arranged on the cleaning and drying mechanism; the present invention can perform water removal operations on the inner wall of a quartz furnace tube with one end blocked, solving the problem of difficult inner wall drying; the cleaning and drying mechanism can sweep away a large number of residual water droplets, reducing the formation of water scale, ensuring product quality, improving drying efficiency, and realizing an operation mode and layout of automatic production. At the same time, it solves the problems of large floor area and low efficiency of natural air drying.

Description

Technical Field

[0001] The present invention relates to an infrared drying device for quartz furnace tubes used in photovoltaics, belonging to the technical field of quartz furnace tube drying devices. Background Art

[0002] A quartz furnace tube is a tubular container made of quartz material, which is widely used in the fields of semiconductor manufacturing, photovoltaic industry, and electronics industry. During the processing of quartz furnace tubes, cleaning operations need to be carried out frequently. After the quartz furnace tubes are cleaned, there will be residual water stains on the surface, and they need to be dried before the next process can be carried out.

[0003] Since flame baking easily causes water to evaporate rapidly, precipitating hard carbonate scale adhering to the surface of the quartz furnace tube, and the presence of scale will affect the product quality. Therefore, drying before important processes often adopts natural air drying and wiping, but the methods of natural air drying and wiping have problems such as low efficiency, large floor area, and high labor cost, seriously affecting production capacity and cost.

[0004] The existing Chinese utility model patent quartz boat drying device with the publication number CN215638441U uses hot air drying. The heating principle is that a hot air blower blows hot air into the furnace body, heating the air in the furnace body through heat convection, so as to dry the workpieces in the furnace. The disadvantage of this heating method is that the air in the furnace needs to be heated to a certain temperature before drying can be carried out, and the heating process is very slow. Especially when the space in the furnace is large, the heating process becomes particularly difficult; since the length of the quartz furnace tube reaches 4 meters, and one end of some types of quartz furnace tubes is blocked, if the hot air drying method is adopted, it is difficult for the hot air to reach the deep inside of the tube, so the inner wall drying of the quartz furnace tube has become a difficult problem in the industry. Summary of the Invention

[0005] According to the deficiencies in the above prior art, the technical problem to be solved by the present invention is: to provide an infrared drying device for quartz furnace tubes used in photovoltaics, which can realize automated production, adopt an infrared heating drying method, can carry out inner wall cleaning and water removal operations on quartz furnace tubes with one end blocked, solve the problems of low inner wall drying efficiency and difficult drying, reduce the formation of scale during drying, and improve product quality.

[0006] The infrared drying device for quartz furnace tubes used in photovoltaics described in the present invention includes a drying furnace, a conveying device, a handling device, an inner wall secondary cleaning and water removal device, and a trolley positioning device;

[0007] The described conveying device is located on the front side of the furnace door of the drying furnace. An inner wall secondary cleaning and water removal device and a trolley positioning device are sequentially arranged on one side of the conveying device. The handling device straddles above the conveying device, the inner wall secondary cleaning and water removal device, and the trolley positioning device; the trolley positioning device is used to position the quartz furnace tube transportation trolley, the handling device is used to move the quartz furnace tube between various workstations, the inner wall secondary cleaning and water removal device is used to clean and remove water from the inside of the quartz furnace tube, and the conveying device is used to move the quartz furnace tube into or out of the drying furnace; on both sides of the furnace body inlet of the drying furnace, air knives are installed, and the air outlets of the air knives on both sides are arranged opposite to each other, and can blow high-speed air streams to dry most of the residual water stains on the outer wall of the quartz furnace tube; inside the furnace body of the drying furnace, several infrared heating tubes are provided for heating the quartz furnace tube;

[0008] The described inner wall secondary cleaning and water removal device is provided with a cleaning and drying mechanism, a water tank and a conveying mechanism. The water tank is arranged at the front end of the cleaning and drying mechanism. The conveying mechanism surrounds the cleaning and drying mechanism, and the conveying mechanism can drive the cleaning and drying mechanism to move back and forth. The conveying mechanism includes but is not limited to linear motion mechanisms such as friction wheel drive, gear rack drive, and chain drive; the cleaning and drying mechanism is used for the secondary cleaning and high-pressure air water removal of the inner wall of the quartz furnace tube; a water spray nozzle and an air jet nozzle are rotatably arranged on the cleaning and drying mechanism. The inner wall of the quartz furnace tube is cleaned by spraying water through the water spray nozzle, and then water is removed by spraying high-pressure air through the air jet nozzle.

[0009] Preferably, the described drying furnace includes a furnace body, infrared heating tubes, a dehumidifying fan, inner furnace tracks, an outer sweeping air fan, air knives and a filter;

[0010] The furnace body is installed on a frame. The furnace body includes a heat insulation layer and a furnace door. When the furnace door is closed, a closed furnace cavity can be formed. A dehumidifying fan is installed on the top outside the furnace body, and a filter is provided at the bottom outside the furnace body. The inner furnace tracks are arranged at the lower part inside the furnace body; the outer sweeping air fan is fixed on the frame, and the outer sweeping air fan is connected to the air knives through a pipeline; during operation, the dehumidifying fan is turned on, a negative pressure is formed in the furnace cavity, air enters the furnace cavity through the filter, and an upward air flow is formed in the furnace, so as to discharge the water vapor generated during the drying process from the furnace body.

[0011] Preferably, the described inner wall secondary cleaning and water removal device includes a water tank, a water tank support frame, a lifting support, a cleaning and drying mechanism and a conveying mechanism;

[0012] The water tank is fixed on the water tank support frame. Two groups of lifting supports are installed on the water tank support frame. The first ends of the lifting supports penetrate the bottom surface of the water tank. The two groups of lifting supports are respectively driven by two sets of linear motion mechanisms and can be lifted independently. The lifting supports are used to support the quartz furnace tube; during the cleaning and water removal process, the inclination angle of the quartz furnace tube can be adjusted through the cooperation of the two groups of lifting supports, so as to facilitate drainage.

[0013] Further, the cleaning and drying mechanism includes an extension rod and a shaft, and the extension rod and the shaft are fixedly connected; a rotating body A and a rotating body B are sleeved on the shaft, and both the rotating body A and the rotating body B are rotatably connected to the shaft and are respectively sealed by rotary seals; a plurality of jet nozzles are circumferentially and uniformly distributed on the rotating body A, and a plurality of water spray nozzles are circumferentially and uniformly distributed on the rotating body B. The jet nozzles rotate together with the rotating body A, and the water spray nozzles rotate together with the rotating body B. The angles of the jet nozzles and the water spray nozzles can be freely adjusted.

[0014] Further, an air pipe and a water pipe are provided on the extension rod, and an air inlet and a water inlet are provided at the rear of the shaft. The air pipe is connected to the air inlet through a pipeline, and the water pipe is connected to the water inlet through a pipeline; an air channel and a water channel are provided inside the shaft, the air channel is connected to the air inlet and the rotating body A, and the water channel is connected to the water inlet and the rotating body B; when cleaning the inner wall of the quartz furnace tube, water enters from the water pipe, sequentially passes through the water inlet, the water channel and the rotating body B, and finally sprays out from the water spray nozzles; when drying the inner wall of the quartz furnace tube, high-pressure gas enters from the air pipe, sequentially passes through the air inlet, the air channel and the rotating body A, and finally sprays out from the jet nozzles; by adjusting the angles of the water spray nozzles or the jet nozzles, the direction of the water flow or the air flow can be changed, so that the ejected water or air flow generates a tangential reaction force to drive the rotating body to rotate automatically, thereby uniformly cleaning or drying the inner wall of the tube.

[0015] Further, a probe is movably arranged at the center of the shaft, an elastic body is arranged behind the probe, and the probe extends out of the front end of the shaft under the action of the elastic body. A detection switch is fixed in the extension rod, and the detection switch is located at a position close to the tail of the probe. The power supply wire of the detection switch is led out through the wire tube on the extension rod; when the front end of the probe touches the bottom of the quartz furnace tube, the probe is pressed in, thereby triggering the detection switch at the tail of the probe, and the cleaning and drying mechanism stops moving forward, preventing the mechanism from hitting the workpiece due to excessive movement.

[0016] Preferably, the conveying device includes a gantry vehicle, a power device, a conveying track and a base; the conveying track is fixed on the base, the gantry vehicle is slidably arranged on the conveying track, the conveying track is docked with the inner track of the furnace body, and the power device can drive the gantry vehicle to slide on the conveying track and the inner track of the furnace body; the power device drives the gantry vehicle to run by means of chain drive, belt drive, wire rope drive or ball screw drive, etc.

[0017] Preferably, the handling device includes a gantry, a sliding table, upper and lower arms and a gripper; a guide rail is provided on the cross beam of the gantry, the sliding table is driven by a motor and is slidably arranged on the cross beam guide rail, the upper and lower arms are slidably connected to the sliding table and can move up and down in the vertical direction relative to the sliding table; the gripper is arranged at the bottom end of the upper and lower arms and controls the opening and closing of the gripper to clamp and release the quartz furnace tube.

[0018] Preferably, the trolley positioning device includes symmetrically arranged guiding frames and telescopic positioning elements. The telescopic positioning elements are fixed on the guiding frames, and the guiding frames are used for roughly positioning the quartz furnace tube transporting trolley; the telescopic positioning elements include air cylinders and V-shaped blocks, and the V-shaped blocks are fixed at the head end of the air cylinder rods; when the air cylinder rods extend, the V-shaped blocks can clamp the quartz furnace tube transporting trolley, so as to accurately position it.

[0019] The beneficial effects of the present invention compared with the prior art are as follows:

[0020] 1. The present invention adopts an innovative structure for secondary cleaning and water removal of the inner wall of the quartz furnace tube, and can perform the pre-stage water removal operation on the inner wall of the quartz furnace tube with one end blocked, solving the problem of difficult inner wall drying.

[0021] 2. The present invention adopts a drying method combining internal and external air blowing and infrared heating drying. The cleaning and air blowing mechanism can sweep away a large number of residual water droplets, reduce the formation of water scale during heating and drying, ensure product quality, and improve drying efficiency.

[0022] 3. The present invention is provided with a gantry gripper type automatic handling device, which can realize the operation mode and layout of automated production.

[0023] 4. The present invention simultaneously solves the problems of large floor area and low efficiency in natural drying after flame baking. Description of the Drawings

[0024] Figure 1 is the structural schematic diagram of the present invention;

[0025] Figure 2 is the top view of the present invention;

[0026] Figure 3 is the front view of the drying furnace;

[0027] Figure 4 is Figure 3 the A-A cross-sectional view of

[0028] Figure 5 is the structural schematic diagram of the inner wall secondary cleaning and water removal device;

[0029] Figure 6 is the cross-sectional view of the front view of the inner wall secondary cleaning and water removal device;

[0030] Figure 7 is the structural schematic diagram of the cleaning and air blowing mechanism;

[0031] Figure 8 is the structural schematic diagram of the conveying device;

[0032] Figure 9 is the structural schematic diagram of the handling device;

[0033] Figure 10 It is a schematic structural diagram of a trolley positioning device;

[0034] Figure 11 It is a schematic diagram of the self-rotation principle of the cleaning and drying mechanism.

[0035] In the figure: 1. Drying furnace; 11. Furnace body; 111. Heat insulation layer; 112. Furnace door; 12. Inner-rail in the furnace body; 13. Outer air-scavenging fan; 14. Air knife; 15. Infrared heating tube; 16. Filter; 17. Frame; 18. Dehumidifying fan; 2. Inner-wall secondary cleaning and water removal device; 21. Cleaning and drying mechanism; 211. Water spray nozzle; 212. Rotating body B; 213. Air duct; 214. Rotating body A; 215. Air inlet; 216. Detection switch; 217. Air pipe; 218. Wire pipe; 219. Extension rod; 2110. Water pipe; 2111. Water inlet; 2112. Shaft; 2113. Air jet nozzle; 2114. Water channel; 2115. Probe; 22. Water tank; 23. Lifting bracket; 24. Water tank support frame; 25. Conveying mechanism; 3. Trolley positioning device; 31. Telescopic positioning element; 32. Quartz furnace tube transporting trolley; 33. Guide frame; 4. Handling device; 41. Slide table; 42. Upper and lower arms; 43. Gantry; 44. Jaw; 5. Conveying device; 51. Bench truck; 52. Power device; 53. Base; 54. Conveying track; 6. Quartz furnace tube. Specific embodiments

[0036] The present invention will be further described below in conjunction with specific embodiments.

[0037] As Figures 1 to 11 shown, this embodiment is realized through the following technical solutions: including a drying furnace 1, a conveying device 5, a handling device 4, an inner-wall secondary cleaning and water removal device 2, and a trolley positioning device 3;

[0038] The conveying device 5 is located in front of the furnace door 112 of the drying furnace 1. On one side of the conveying device 5, the inner-wall secondary cleaning and water removal device 2 and the trolley positioning device 3 are arranged in sequence. The handling device 4 straddles above the conveying device 5, the inner-wall secondary cleaning and water removal device 2, and the trolley positioning device 3; the trolley positioning device 3 is used to position the quartz furnace tube transporting trolley 32, the handling device 4 is used to move the quartz furnace tube between each working station, the inner-wall secondary cleaning and water removal device 2 is used to clean and remove water from the inside of the quartz furnace tube, and the conveying device 5 is used to move the quartz furnace tube into or out of the drying furnace 1; Air knives 14 are installed on both sides of the inlet of the furnace body 11 of the drying furnace, and the air outlets of the two air knives 14 are arranged opposite to each other, and can spray high-speed air flow to blow dry most of the residual water stains on the outer wall of the quartz furnace tube; A number of infrared heating tubes 15 are arranged inside the furnace body 11 of the drying furnace, which are used to heat the quartz furnace tube;

[0039] The described inner wall secondary cleaning and water removal device 2 is provided with a cleaning and drying mechanism 21, a water tank 22, and a conveying mechanism 25. The water tank 22 is arranged at the front end of the cleaning and drying mechanism 21. The conveying mechanism 25 surrounds the cleaning and drying mechanism 21. The conveying mechanism 25 is a friction wheel drive mechanism, which is slidably connected to the cleaning and drying mechanism 21, and the conveying mechanism 25 can drive the cleaning and drying mechanism 21 to move back and forth. The cleaning and drying mechanism 21 is used for the secondary cleaning of the inner wall of the quartz furnace tube and water removal with high-pressure air. The cleaning and drying mechanism 21 is rotatably provided with a water spray nozzle 211 and an air jet nozzle 2113. The inner wall of the quartz furnace tube is cleaned by spraying water through the water spray nozzle 211, and then water is removed by spraying high-pressure air through the air jet nozzle 2113.

[0040] The described drying furnace 1 includes a furnace body 11, infrared heating tubes 15, a dehumidifying fan 18, an inner furnace track 12, an outer air blowing fan 13, an air knife 14, and a filter 16. The furnace body 11 is installed on a frame 17. The furnace body 11 includes a heat insulation layer 111 and a furnace door 112. When the furnace door 112 is closed, a closed furnace cavity can be formed. A dehumidifying fan 18 is installed at the top outside the furnace body 11, and a filter 16 is provided at the bottom outside the furnace body 11. The inner furnace track 12 is arranged at the lower part inside the furnace body 11. The outer air blowing fan 13 is fixed on the frame 17, and the outer air blowing fan 13 is connected to the air knife 14 through a pipeline. During operation, the dehumidifying fan 18 is turned on, a negative pressure is formed in the furnace cavity, air enters the furnace cavity through the filter 16, and an upward airflow is formed in the furnace, thereby discharging the water vapor generated during the drying process from the furnace body 11.

[0041] The described inner wall secondary cleaning and water removal device 2 includes a water tank 22, a water tank support frame 24, a lifting support 23, a cleaning and drying mechanism 21, and a conveying mechanism 25. The water tank 22 is fixed on the water tank support frame 24. Two groups of lifting supports 23 are installed on the water tank support frame 24. The first ends of the lifting supports 23 penetrate the bottom surface of the water tank 22. The two groups of lifting supports 23 are respectively driven by two sets of linear motion mechanisms and can be independently lifted. The lifting supports 23 are used to support the quartz furnace tube. During the cleaning and water removal process, the inclination angle of the quartz furnace tube can be adjusted through the cooperation of the two groups of lifting supports 23, so as to facilitate drainage.

[0042] The described cleaning and drying mechanism 21 includes an extension rod 219 and a shaft 2112. The extension rod 219 and the shaft 2112 are fixedly connected. A rotating body A 214 and a rotating body B 212 are sleeved on the shaft 2112. The rotating body A 214 and the rotating body B 212 are both rotatably connected to the shaft 2112 and are respectively sealed by rotating seals. A number of air jet nozzles 2113 are circumferentially distributed on the rotating body A 214, and a number of water spray nozzles 211 are circumferentially distributed on the rotating body B 212. The air jet nozzles 2113 rotate together with the rotating body A 214, and the water spray nozzles 211 rotate together with the rotating body B 212. The angles of the air jet nozzles 2113 and the water spray nozzles 211 can be freely adjusted.

[0043] The extension rod 219 is provided with an air pipe 217 and a water pipe 2110. The rear part of the shaft 2112 is provided with an air inlet 215 and a water inlet 2111. The air pipe 217 is connected to the air inlet 215 through a pipeline, and the water pipe 2110 is connected to the water inlet 2111 through a pipeline. An air channel 213 and a water channel 2114 are arranged inside the shaft 2112. The air channel 213 is connected to the air inlet 215 and the rotating body A 214, and the water channel 2114 is connected to the water inlet 2111 and the rotating body B 212. When cleaning the inner wall of the quartz furnace tube, water enters from the water pipe 2110, successively passes through the water inlet 2111, the water channel 2114 and the rotating body B 212, and finally sprays out from the water spray nozzle 211. When drying the inner wall of the quartz furnace tube, high-pressure gas enters from the air pipe 217, successively passes through the air inlet 215, the air channel 213 and the rotating body A 214, and finally sprays out from the air jet nozzle 2113. By adjusting the angles of the water spray nozzle 211 or the air jet nozzle 2113, the direction of the water flow or the air flow can be changed, so that the ejected water or air flow generates a tangential reaction force to push the rotating body to rotate by itself, thereby uniformly cleaning or drying the inner wall of the tube.

[0044] A probe 2115 is movably arranged at the center of the shaft 2112. An elastic body is arranged behind the probe 2115 and extends out of the front end of the shaft 2112 under the action of the elastic body. A detection switch 216 is fixed in the extension rod 219. The detection switch 216 is located at a position close to the tail of the probe 2115. The power supply wire of the detection switch 216 is led out through the wire tube 218 on the extension rod. When the front end of the probe 2115 touches the bottom of the quartz furnace tube, the probe 2115 is pressed in, thereby triggering the detection switch 216 at the tail of the probe, and the cleaning and drying mechanism 21 stops moving forward, preventing the mechanism from hitting the workpiece due to excessive movement.

[0045] The conveying device 5 includes a gantry vehicle 51, a power device 52, a conveying track 54 and a base 53. The conveying track 54 is fixed on the base 53. The gantry vehicle 51 is slidably arranged on the conveying track 54. The conveying track 54 is docked with the inner track 12 of the furnace body. The power device 52 can drive the gantry vehicle 51 to slide on the conveying track 54 and the inner track 12 of the furnace body. The power device 52 drives the gantry vehicle 51 to run in a belt drive mode.

[0046] The handling device 4 includes a gantry 43, a sliding table 41, upper and lower arms 42 and a gripper 44. A guide rail is arranged on the cross beam of the gantry 43. The sliding table 41 is driven by a motor and is slidably arranged on the cross beam guide rail. The upper and lower arms 42 are slidably connected to the sliding table 41 and can move up and down relative to the sliding table 4 one in the vertical direction. The gripper 44 is arranged at the bottom end of the upper and lower arms 42 and is controlled by an opening and closing motor to open and close to clamp and release the quartz furnace tube.

[0047] The described trolley positioning device 3 includes symmetrically arranged guiding frames 33 and telescopic positioning elements 31. The telescopic positioning elements 31 are fixed on the guiding frames 33, and the guiding frames 33 are used for roughly positioning the quartz furnace tube transporting trolley 32. The telescopic positioning element 31 includes a cylinder and a V-shaped block, and the V-shaped block is fixed at the head end of the cylinder rod. When the cylinder rod extends, the V-shaped block can clamp the quartz furnace tube transporting trolley 32 to accurately position it.

[0048] The working process of the present invention is as follows:

[0049] 1. Workers push the quartz furnace tube transporting trolley 32 loaded with the quartz furnace tube 6 between the guiding frames 33 of the trolley positioning device 3. The telescopic positioning element 31 acts, and the V-shaped block clamps the quartz furnace tube transporting trolley 32 to accurately position it.

[0050] 2. The handling device 4 acts, grabs the quartz furnace tube 6 through the clamping jaws 44, and transports it to the water tank 22. The two groups of lifting brackets 23 act to adjust the quartz furnace tube 6 to an appropriate inclination angle, so as to facilitate later drainage.

[0051] 3. The conveying mechanism 25 acts to drive the cleaning and drying mechanism 21 to reciprocate inside the quartz furnace tube 6. At the same time, the spray nozzle 211 rotates and sprays water inside the quartz furnace tube 6 to uniformly clean the inner wall of the tube. After cleaning, the air jet nozzle 2113 rotates and sprays high-pressure gas inside the quartz furnace tube 6 to blow dry most of the water remaining on the inner wall of the tube.

[0052] 4. After the blowing is completed, the handling device 4 transports the quartz furnace tube 6 to the platform truck 51 of the conveying device 5 again. The power device 52 drives the platform truck 51 to move, and the platform truck 51 together with the quartz furnace tube 6 is transferred into the drying furnace 1. During the process of entering the drying furnace 1, the air knives 14 on both sides of the inlet of the furnace body 11 spray high-speed airflows to blow dry most of the residual water stains on the outer wall of the quartz furnace tube 6.

[0053] 5. After the quartz furnace tube 6 enters the drying furnace 1, the furnace door 112 is closed, the infrared heating tube 15 is turned on for heating, and at the same time the dehumidifying fan 18 is turned on. A negative pressure is formed in the furnace cavity, and air enters the furnace cavity through the filter 16, and an upward airflow is formed in the furnace to discharge the water vapor generated during the drying process from the furnace body 11.

[0054] 6. After the heating is completed, the furnace door 112 is opened, the platform truck 51 and the quartz furnace tube 6 are moved out of the drying furnace 1, and the handling device 4 transports the quartz furnace tube 6 onto the quartz furnace tube transporting trolley 32.

Claims

1. An infrared drying device for a quartz furnace tube used in photovoltaics, characterized in that, It includes a drying furnace (1), a conveying device (5), a handling device (4), an inner wall secondary cleaning and water removal device (2), and a trolley positioning device (3); The said conveying device (5) is located at the front side of the furnace door of the drying furnace (1). An inner wall secondary cleaning and water removal device (2) and a trolley positioning device (3) are sequentially arranged on one side of the conveying device (5). The handling device (4) straddles above the conveying device (5), the inner wall secondary cleaning and water removal device (2), and the trolley positioning device (3); On both sides of the inlet of the furnace body (11) of the drying furnace, air knives (14) are installed, and the air outlets of the air knives (14) on both sides are arranged oppositely; Inside the furnace body (11) of the drying furnace, several infrared heating tubes (15) for heating are provided; The said inner wall secondary cleaning and water removal device (2) is provided with a cleaning and drying mechanism (21) for cleaning and water removal, a water tank (22), and a conveying mechanism (25). The water tank (22) is arranged at the front end of the cleaning and drying mechanism (21). The conveying mechanism (25) surrounds the cleaning and drying mechanism (21). The conveying mechanism (25) includes but is not limited to linear motion mechanisms such as friction wheel drive, gear rack drive, and chain drive; The cleaning and drying mechanism; A water spray nozzle (211) and an air jet nozzle (2113) are rotatably arranged on the cleaning and drying mechanism (21); The said drying furnace (1) includes a furnace body (11), infrared heating tubes (15), a dehumidifying fan (18), an inner furnace track (12), an outer sweeping air fan (13), air knives (14), and a filter (16); The furnace body (11) is installed on a frame (17). The furnace body (11) includes a heat insulation layer (111) and a furnace door (112). When the furnace door (112) is closed, a closed furnace cavity can be formed. A dehumidifying fan (18) is installed on the top outside of the furnace body (11). A filter (16) is provided at the bottom outside of the furnace body (11). The inner furnace track (12) is arranged at the lower part inside the furnace body (11); The outer sweeping air fan (13) is fixed on the frame (17), and the outer sweeping air fan (13) is connected to the air knife (14) through a pipeline; The said inner wall secondary cleaning and water removal device (2) includes a water tank (22), a water tank support frame (24), a lifting support (23), a cleaning and drying mechanism (21), and a conveying mechanism (25); The water tank (22) is fixed on the water tank support frame (24). Two groups of lifting supports (23) are installed on the water tank support frame (24). The first ends of the lifting supports (23) penetrate the bottom surface of the water tank (22). The two groups of lifting supports (23) are respectively driven by two sets of linear motion mechanisms; The described cleaning and drying mechanism (21) includes an extension rod (219) and a shaft (2112), and the extension rod (219) and the shaft (2112) are fixedly connected; a rotating body A (214) and a rotating body B (212) are sleeved on the shaft (2112), and both the rotating body A (214) and the rotating body B (212) are rotatably connected to the shaft (2112) and are respectively sealed by rotary seals; a plurality of air nozzles (2113) are circumferentially and evenly distributed on the rotating body A (214), and a plurality of water nozzles (211) are circumferentially and evenly distributed on the rotating body B (212). The air nozzles (2113) rotate together with the rotating body A (214), and the water nozzles (211) rotate together with the rotating body B (212). The angles of the air nozzles (2113) and the water nozzles (211) can be freely adjusted. An air pipe (217) and a water pipe (2110) are provided on the extension rod (219). An air inlet (215) and a water inlet (2111) are provided at the rear of the shaft (2112). The air pipe (217) is connected to the air inlet (215) through a pipeline, and the water pipe (2110) is connected to the water inlet (2111) through a pipeline; an air passage (213) and a water passage (2114) are provided inside the shaft (2112). The air passage (213) connects the air inlet (215) and the rotating body A (214), and the water passage (2114) connects the water inlet (2111) and the rotating body B (212). A probe (2115) is movably arranged at the center of the shaft (2112). An elastic body is provided behind the probe (2115), and the probe (2115) extends out of the front end of the shaft (2112) under the action of the elastic body. A detection switch (216) is fixed in the extension rod (219), and the detection switch (216) is located at a position close to the tail of the probe (2115). The power supply wire of the detection switch (216) is led out through a wire pipe (218) on the extension rod.

2. The infrared drying device for quartz furnace tubes used in photovoltaics according to claim 1, characterized in that, The described conveying device (5) includes a gantry vehicle (51), a power device (52), a conveying track (54) and a base (53); the conveying track (54) is fixed on the base (53), the gantry vehicle (51) is slidably arranged on the conveying track (54), and the conveying track (54) is docked with the inner track (12) of the furnace body; the power device (52) drives the gantry vehicle (51) to run by means of chain drive, belt drive, wire rope drive or ball screw drive, etc.

3. The infrared drying device for quartz furnace tubes used in photovoltaics according to claim 1, characterized in that, The described handling device (4) includes a gantry (43), a sliding table (41), upper and lower arms (42) and a gripper (44); a guide rail is provided on the cross beam of the gantry (43), the sliding table (41) is driven by a motor and is slidably arranged on the cross beam guide rail, the upper and lower arms (42) are slidably connected to the sliding table (41) and can move up and down relative to the sliding table (41) in the vertical direction; the gripper (44) is arranged at the bottom end of the upper and lower arms (42) and is controlled to open and close by an opening and closing motor.

4. The infrared drying device for quartz furnace tubes used in photovoltaics according to claim 1, wherein, The described trolley positioning device (3) includes symmetrically arranged guide frames (33) and telescopic positioning elements (31), and the telescopic positioning elements (31) are fixed on the guide frames (33); the telescopic positioning elements (31) include air cylinders and V-shaped blocks, and the V-shaped blocks are fixed at the head end of the air cylinder rod.

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