Intelligent automatic thin film preparation characterization system

Abstract

The invention relates to an intelligent automatic thin film preparation characterization system which comprises a feeding device, a plurality of sample transfer cavity boxes, a plurality of vacuum mechanical arms and a plurality of sample transfer structures, the feeding device is used for being connected with the sample transfer cavity boxes, and the sample transfer structures are arranged between every two adjacent sample transfer cavity boxes and between the feeding device and the sample transfer cavity boxes. The sample transfer cavity box comprises a cavity box body, a plurality of observation windows and a plurality of interconnection flanges, the observation windows are arranged on the cavity box body at intervals, the lower ends of the observation windows downwards extend into the cavity box body, and the interconnection flanges are uniformly arranged along the peripheral side of the cavity box body at intervals and used for being connected with the sample transfer structure; the multiple vacuum mechanical arms are arranged in the multiple sample transferring cavity boxes and the feeding equipment in a one-to-one correspondence mode, and the clamping ends of the vacuum mechanical arms can stretch into the corresponding sample transferring structures. According to the invention, interconnection of vacuum and non-vacuum equipment and efficient assembly line sample transmission can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film preparation, and in particular to an intelligent automatic thin film preparation characterization system. Background Art

[0002] Thin films are key materials in the national economy, involving semiconductors, new energy, aerospace, optics, and machinery. How to improve the efficiency of thin film process exploration and the efficiency of discovering new thin film materials is an important issue in the current thin film industry. Traditional thin film preparation requires a lot of manual participation in the process exploration process, combined with manual operation of thin film structure and physical property characterization, to complete closed-loop feedback to optimize growth conditions. This method is inefficient, relies on individual experience of operation implementation, has a long feedback chain, and poor repeatability. The coating process of thin films involves energy fields, temperature fields, airflow fields, various vacuum structures and movements, etc., with many parameter conditions, and because the thin film formation process is a very microscopic atomic-level process, its complexity also exceeds conventional simulation and theoretical simulation.

[0003] The development of an automated, unattended, intelligent thin film preparation and characterization system can solve the traditional model of manual dependence, thereby greatly improving the efficiency of thin film preparation and promoting the development of the industry. Such a system requires the interconnection of coating equipment and characterization to achieve assembly line operation, so that parameter training can be combined with artificial intelligence. Using artificial intelligence learning methods to replace manual experience, the optimal growth conditions can be quickly found to prepare high-performance materials. At present, large-scale interconnection technologies include circular sample transfer system (RDC System) interconnection technology and vacuum rail trolley interconnection technology.

[0004] The circular sample transfer robot provides an economical and applicable solution for radially distributed sample transfer by rotating and retracting the robot arm. The vacuum track trolley interconnection technology arranges a V-shaped track in the vacuum pipeline, and the trolley is transported on the track to transfer the experimental samples to each chamber. The circular sample transfer system using the circular sample transfer robot has low sample transfer efficiency, and the interconnection technology using the vacuum track trolley is also prone to problems when passing through the flanges of various valves. Intelligent automated preparation and characterization systems involve vacuum equipment and non-vacuum equipment, because many characterization technologies are non-vacuum. Therefore, how to solve the interconnection of vacuum and non-vacuum equipment and efficient assembly line sample transfer is very critical for our development of intelligent automated thin film preparation and characterization systems. Summary of the invention

[0005] In order to solve the problems in the background technology, the present invention proposes an intelligent automated thin film preparation characterization system, which can solve the interconnection between vacuum and non-vacuum equipment and efficient pipeline sample transmission.

[0006] To solve the above problems, the present invention adopts the following technical scheme: an intelligent automated thin film preparation characterization system, comprising a feeding device, a plurality of sample transfer chamber boxes, a plurality of vacuum mechanical arms and a plurality of sample transfer structures, wherein the feeding device is used to connect the sample transfer chamber box, and the sample transfer structure is arranged between two adjacent sample transfer chamber boxes and between the feeding device and the sample transfer chamber box, and the sample transfer structure is used to control the vacuum degree between the sample transfer chamber box and the feeding device and the vacuum degree between two adjacent sample transfer chamber boxes, the sample transfer chamber box comprises a chamber box body, a plurality of observation windows and a plurality of interconnecting flanges, the plurality of observation windows are arranged at intervals on the chamber box body and the lower ends extend downward into the interior of the chamber box body, the plurality of interconnecting flanges are evenly arranged at intervals along the circumference of the chamber box body for connecting the sample transfer structure, the plurality of vacuum mechanical arms are arranged one-to-one in the plurality of sample transfer chamber boxes and the feeding device, and the clamping ends of the vacuum mechanical arms can extend into the corresponding sample transfer structures.

[0007] Furthermore, the vacuum robot arm includes a telescopic base, a main shaft, a first arm, a secondary shaft, a second arm, a final shaft and an end clamping arm, the telescopic base is arranged inside the sample transfer chamber box, the main shaft is rotatably arranged on the telescopic base, one end of the first arm is connected to the main shaft, the other end of the first arm is rotatably connected to the secondary shaft, one end of the second arm is connected to the secondary shaft, the other end of the second arm is connected to the final shaft, the fixed end of the final clamping arm is connected to the final shaft, and the movable end of the final clamping arm is used to grab samples.

[0008] Furthermore, the feeding device is a vacuum feeding device, the sample transfer structure is a valve, and both ends of the valve are respectively connected to the vacuum feeding device and the corresponding sample transfer chamber box.

[0009] Furthermore, the feeding device is a non-vacuum feeding device, and the sample transfer structure includes an interconnected box body and two valves. A transition cavity is provided in the interconnected box body, and one end of the two valves are connected and arranged at two ends of the transition cavity in a one-to-one manner, and the other ends of the two valves are connected and connected to the non-vacuum feeding device and the sample transfer cavity box in a one-to-one manner.

[0010] Furthermore, the number of interconnecting flanges on the side of the sample transfer chamber box is 4-6.

[0011] Furthermore, the connection between the plurality of sample transfer chamber boxes and the plurality of sample transfer structures is linear interconnection.

[0012] Furthermore, the connection between the plurality of sample transfer chamber boxes and the plurality of sample transfer structures is a corner-type interconnection.

[0013] Furthermore, the connection mode between the multiple sample transfer chamber boxes and the multiple sample transfer structures is a straight-line and corner mixed interconnection.

[0014] Beneficial effects of the present invention: The present invention connects multiple sample transfer chamber boxes and between the sample transfer chamber box and the feeding device through a sample transfer structure. Since a vacuum mechanical arm is provided in each chamber box body and in the feeding device, the vacuum mechanical arm can transfer the sample in the feeding device in turn between the multiple sample transfer chamber boxes and the multiple sample transfer structures through the corresponding vacuum mechanical arm. The sample transfer structure plays the role of sample transfer on the one hand, and on the other hand, by changing the vacuum degree in the sample transfer structure, the sample of the feeding device in the vacuum state and the non-vacuum state can achieve a similar vacuum degree as the sample transfer chamber box in the vacuum state when the sample is transferred through the sample transfer structure. Since a vacuum mechanical arm is provided in each sample transfer chamber box, it is ensured that the vacuum mechanical arm can realize the transmission of samples in each sample transfer chamber box under the premise of having a small size, thereby realizing the long-distance and efficient transportation of samples. Compared with traditional sample transfer equipment, the present invention can solve the interconnection of vacuum and non-vacuum equipment and the efficient assembly line sample transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0016] Figure 1 It is a structural schematic diagram of the present invention;

[0017] Figure 2 It is a structural schematic diagram of the sample transfer chamber box;

[0018] Figure 3 for Figure 2 A top view of

[0019] Figure 4 It is a schematic diagram of the structure of the vacuum robot arm;

[0020] Figure 5 for Figure 4 Rear view of

[0021] Figure 6 is a schematic structural diagram of a first example of the present invention;

[0022] Figure 7 is a schematic structural diagram of a second example of the present invention;

[0023] Figure 8 FIG. 4 is a schematic diagram of the structure of the third example of the present invention.

[0024] 1. Sample transfer chamber box; 2. Vacuum robot arm; 3. Sample transfer structure; 4. Chamber box body; 5. Observation window; 6. Interconnection flange; 7. Telescopic base; 8. Main axis; 9. First arm; 10. Secondary axis; 11. Second arm; 12. Final axis; 13. End clamp arm; 14. Molecular beam epitaxy; 15. Laser molecular beam epitaxy; 16. Magnetron sputtering chamber; 17. Raman characterization chamber; 18. Interconnection transition chamber; 19. Reserved interface; 20. X-ray photoelectron spectroscopy; 21. Reserved characterization chamber; 22. Vacuum atmosphere transition chamber; 23. Glove box; 24. XRD; 25. Sample; 26. Valve; 101. First sample transfer chamber; 102. Second sample transfer chamber; 103. Third sample transfer chamber; 104. Fourth sample transfer chamber; 105. Fifth sample transfer chamber. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] The present invention connects multiple sample transfer chamber boxes 1 and sample transfer chamber boxes 1 with a feeding device through a sample transfer structure 3. Since a vacuum mechanical arm 2 is provided in each chamber box body 4 and in the feeding device, the vacuum mechanical arm 2 can transfer the sample in the feeding device in turn between multiple sample transfer chamber boxes 1 and multiple sample transfer structures 3 through the corresponding vacuum mechanical arm 2. The sample transfer structure 3 plays a role of sample transfer on the one hand, and on the other hand, by changing the vacuum degree in the sample transfer structure 3, the sample of the feeding device in the vacuum state and the non-vacuum state can achieve a similar vacuum degree as the sample transfer chamber box 1 in the vacuum state when the sample is transferred through the sample transfer structure 3. Since a vacuum mechanical arm 2 is provided in each sample transfer chamber box 1, it is ensured that the vacuum mechanical arm 2 can also realize the transmission of samples in each sample transfer chamber box 1 under the premise of having a small size, thereby realizing the long-distance and efficient transportation of samples. Compared with the traditional sample transfer device, the present invention can solve the interconnection of vacuum and non-vacuum equipment and the efficient assembly line sample transmission.

[0027] Specifically, Figures 1 to 5As shown, an intelligent automated film preparation characterization system comprises a feeding device, a plurality of sample transfer chamber boxes 1, a plurality of vacuum mechanical arms 2 and a plurality of sample transfer structures 3, wherein the feeding device is used to connect the sample transfer chamber box 1, and the sample transfer structure 3 is arranged between two adjacent sample transfer chamber boxes 1 and between the feeding device and the sample transfer chamber box 1, and the sample transfer structure 3 is used to control the vacuum degree between the sample transfer chamber box 1 and the feeding device and the vacuum degree between two adjacent sample transfer chamber boxes 1, the sample transfer chamber box 1 comprises a chamber box body 4, a plurality of observation windows 5 and a plurality of interconnecting flanges 6, a plurality of the observation windows 5 are arranged at intervals on the chamber box body 4 and the lower ends extend downward into the interior of the chamber box body 4, a plurality of the interconnecting flanges 6 are evenly arranged at intervals along the circumference of the chamber box body 4 for connecting the sample transfer structure 3, a plurality of the vacuum mechanical arms 2 are arranged one by one in the plurality of the sample transfer chamber boxes 1 and the feeding device, and the clamping ends of the vacuum mechanical arms 2 can extend into the corresponding sample transfer structures 3.

[0028] Further, such as Figure 4 and Figure 5 As shown, the vacuum robot arm 2 includes a telescopic base 7, a main shaft 8, a first arm 9, a secondary shaft 10, a second arm 11, a final shaft 12 and a terminal clamp arm 13. The telescopic base 7 is arranged inside the sample transfer chamber box 1, the main shaft 8 is rotatably arranged on the telescopic base 7, one end of the first arm 9 is connected to the main shaft 8, the other end of the first arm 9 is rotatably connected to the secondary shaft 10, one end of the second arm 11 is connected to the secondary shaft 10, the other end of the second arm 11 is connected to the final shaft 12, the fixed end of the final clamp arm 13 is connected to the final shaft 12, and the movable end of the final clamp arm 13 is used to grab the sample. By setting the telescopic base 7, the main shaft 8, the secondary shaft 10 and the final shaft 12, the four-dimensional movement of the terminal clamp arm 13 can be realized to ensure the accuracy of the rotation of the terminal clamp arm 13 in the sample transfer chamber box 1.

[0029] Furthermore, the feeding device is a vacuum feeding device, and the sample transfer structure 3 is a valve, and the two ends of the valve are respectively connected to the vacuum feeding device and the corresponding sample transfer chamber box 1. Since the sample transfer chamber box 1 always maintains a vacuum, when the vacuum feeding device is connected to the sample transfer chamber box 1, no additional transition chamber space is required to change the vacuum degree. When the valve is opened to input the sample from the vacuum feeding device into the sample transfer chamber box 1, since the vacuum degrees on both sides of the valve are close, the vacuum transfer of the sample can be directly performed.

[0030] Furthermore, the feeding device is a non-vacuum feeding device, and the sample transfer structure 3 includes an interconnected box body and two valves. A transition cavity is provided in the interconnected box body, and one end of the two valves are connected and arranged at two ends of the transition cavity one by one, and the other ends of the two valves are connected and connected to the non-vacuum feeding device and the sample transfer cavity box 1 one by one. Since the sample transfer chamber box 1 is always kept in vacuum, when the non-vacuum feeding device is connected to the sample transfer chamber box 1, a transition chamber is required to avoid damage to the vacuum. When the non-vacuum feeding device is needed to transfer samples to the sample transfer chamber box 1, the transition chamber is first inflated to the same air pressure as the non-vacuum feeding device, the valve between the non-vacuum feeding device and the transition chamber is opened, and the sample in the non-vacuum feeding device is transferred to the transition chamber by the vacuum robot 2. When the vacuum robot 2 retracts into the non-vacuum feeding device, the valve is closed, and then the transition chamber is evacuated to a vacuum degree similar to that of the sample transfer chamber box 1. The valve between the sample transfer chamber box 1 and the transition chamber is opened, and the sample in the transition chamber is transported to the sample transfer chamber box 1 by the vacuum robot 2 in the sample transfer chamber box 1, thereby completing the non-vacuum transmission of the sample.

[0031] Further, if Figure 2 and Figure 3 As shown, the number of interconnection flanges 6 on the side of the sample transfer chamber box 1 is 4-6. Setting the number of interconnection flanges 6 to 4-6 makes the interconnection mode more flexible and can be better arranged according to the space of the use scene.

[0032] Furthermore, the connection between the plurality of sample transfer chamber boxes 1 and the plurality of sample transfer structures is linear interconnection, which allows the plurality of sample transfer chamber boxes 1 to be kept in a straight line, so that the feeding equipment can be more conveniently arranged on both sides of the straight line.

[0033] Furthermore, the connection between the plurality of sample transfer chamber boxes 1 and the plurality of sample transfer structures is a corner-type interconnection. The corner-type interconnection enables the plurality of sample transfer chamber boxes 1 to be arranged at different angles, which can meet the use requirements in different scenarios.

[0034] Furthermore, the connection mode between the plurality of sample transfer chamber boxes 1 and the plurality of sample transfer structures is a straight-line corner hybrid interconnection, which can meet the use requirements of the plurality of sample transfer chamber boxes 1 in a more complex environment.

[0035] Specifically, the present invention is used as an example of an intelligent thin film preparation and characterization system structure, which integrates various types of thin film growth equipment and characterization equipment into an intelligent automated thin film preparation and characterization system. Figure 6As shown, the system integrates molecular beam epitaxy 14, laser molecular beam epitaxy 15, magnetron sputtering chamber 16, sample transfer chamber box 1, Raman characterization chamber 17, X-ray photoelectron spectroscopy 20, XRD (X-ray diffraction) 24 and glove box 23. Through various valves 26, vacuum atmosphere transition chamber 22, interconnected transition chamber 18 and vacuum robot 2, samples 25 can be transferred between various equipment components.

[0036] Specifically, the present invention is used for an example of transferring a sample from a magnetron cavity to an XRD cavity, such as Figure 7 As shown, the transfer process of this example is as follows: the magnetron sputtering chamber 16 is evacuated to ultra-high vacuum, and then the valve between the magnetron sputtering chamber 16 and the sample transfer chamber box 1 is opened, and the vacuum robot 2 in the first sample transfer chamber 101 grabs the sample 25 prepared by magnetron sputtering from the magnetron sputtering chamber 16; the valves between the first sample transfer chamber 101 and the second sample transfer chamber 102 are opened, and the sample 25 is transferred to the interconnected transition chamber 18 between the first sample transfer chamber 101 and the second sample transfer chamber 102 by the vacuum robot 2, and the sample 25 is stored in the interconnected transition chamber 18 at this time; the vacuum robot 2 in the second sample transfer chamber 102 grabs the sample 25 from the interconnected transition chamber 18 between the first sample transfer chamber 101 and the second sample transfer chamber 102, and puts it back into the second sample transfer chamber 102; the same method is used to transfer the sample 25 is sequentially transferred to the third sample transfer chamber 103, the fourth sample transfer chamber 104 and the fifth sample transfer chamber 105; the vacuum atmosphere transition chamber 22 is evacuated to a high vacuum, and then the valve between the vacuum atmosphere transition chamber 22 and the fifth sample transfer chamber 105 is opened, and the sample 25 is transferred to the vacuum atmosphere transition chamber 22 by the vacuum robot 2 in the fifth sample transfer chamber 105; the valve between the vacuum atmosphere transition chamber 22 and the fifth sample transfer chamber 105 is closed, and then the vacuum atmosphere transition chamber 22 is started to be vented until the pressure is balanced with the atmospheric pressure of XRD24, and then the valve between the vacuum atmosphere transition chamber 22 and XRD24 can be opened; finally, the vacuum robot 2 in XRD24 is used to grab the sample 25 from the vacuum atmosphere transition chamber 22 and place it on the XRD test bench; the XRD test is completed.

[0037] In addition, the present invention is used in an example of automated sample preparation, such as Figure 8 As shown, the vacuum robot 2 automatically transfers the sample 25 to the thin film preparation chamber, such as laser molecular beam epitaxy 15, and the equipment automatically adjusts various growth parameters, such as temperature, laser energy, and chamber oxygen partial pressure; then the sample preparation begins. After the preparation is completed, the sample is transferred to XRD24 through the vacuum robot to characterize the structure and obtain key parameters such as crystal quality and surface flatness.

[0038] When the present invention is used, multiple sample transfer chamber boxes 1 and sample transfer chamber boxes 1 and feeding equipment are connected through sample transfer structures 3. Since vacuum mechanical arms 2 are arranged in each chamber box body 4 and in the feeding equipment, the vacuum mechanical arms 2 can sequentially transfer the samples in the feeding equipment between multiple sample transfer chamber boxes 1 and multiple sample transfer structures 3 through the corresponding vacuum mechanical arms 2. The sample transfer structure 3 plays the role of sample transfer on the one hand, and on the other hand, by changing the vacuum degree in the sample transfer structure 3, the samples of the feeding equipment in the vacuum state and the non-vacuum state can achieve a similar vacuum degree as the sample transfer chamber box 1 in the vacuum state when the samples are transferred through the sample transfer structure 3. Since vacuum mechanical arms 2 are arranged in each sample transfer chamber box 1, it is ensured that the vacuum mechanical arms 2 can also realize the transmission of samples in each sample transfer chamber box 1 under the premise of having a small size, thereby realizing the long-distance and efficient transportation of samples. Compared with traditional sample transfer equipment, the present invention can solve the interconnection of vacuum and non-vacuum equipment and the efficient assembly line sample transmission.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An intelligent automated thin film preparation and characterization system, characterized in that: The invention comprises a feeding device, a plurality of sample transfer chamber boxes (1), a plurality of vacuum mechanical arms (2) and a plurality of sample transfer structures (3), wherein the feeding device is used to connect the sample transfer chamber boxes (1), the sample transfer structures (3) are arranged between two adjacent sample transfer chamber boxes (1) and between the feeding device and the sample transfer chamber boxes (1), the sample transfer structures (3) are used to control the vacuum degree between the sample transfer chamber boxes (1) and the feeding device and the vacuum degree between two adjacent sample transfer chamber boxes (1), the sample transfer chamber box (1) comprises a chamber box body ( 4), a plurality of observation windows (5) and a plurality of interconnecting flanges (6), wherein the plurality of observation windows (5) are arranged at intervals on the chamber box body (4) and the lower ends thereof extend downward into the interior of the chamber box body (4), and the plurality of interconnecting flanges (6) are evenly arranged at intervals along the circumference of the chamber box body (4) for connecting the sample transfer structure (3), and the plurality of vacuum robot arms (2) are arranged one by one in the plurality of sample transfer chamber boxes (1) and the feeding device, and the clamping end of the vacuum robot arm (2) can extend into the corresponding sample transfer structure (3).

2. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The vacuum mechanical arm (2) comprises a telescopic base (7), a main shaft (8), a first support arm (9), a secondary shaft (10), a second support arm (11), a final shaft (12) and a final clamp arm (13); the telescopic base (7) is arranged inside the sample transfer chamber box (1); the main shaft (8) is rotatably arranged on the telescopic base (7); one end of the first support arm (9) is connected to the main shaft (8); the other end of the first support arm (9) is rotatably connected to the secondary shaft (10); one end of the second support arm (11) is connected to the secondary shaft (10); the other end of the second support arm (11) is connected to the final shaft (12); the fixed end of the final clamp arm (13) is connected to the final shaft (12); and the movable end of the final clamp arm (13) is used for grabbing samples.

3. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The feeding device is a vacuum feeding device, the sample transfer structure (3) is a valve, and the two ends of the valve are respectively connected to the vacuum feeding device and the corresponding sample transfer chamber box (1).

4. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The feeding device is a non-vacuum feeding device, and the sample transfer structure (3) comprises an interconnected box body and two valves. A transition cavity is provided in the interconnected box body, one end of the two valves are connected and arranged at two ends of the transition cavity in a one-to-one correspondence, and the other ends of the two valves are connected and connected to the non-vacuum feeding device and the sample transfer cavity box (1) in a one-to-one correspondence.

5. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The number of the interconnecting flanges (6) on the side of the sample transfer chamber box (1) is 4-6.

6. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The connection mode between the plurality of sample transfer chamber boxes (1) and the plurality of sample transfer structures (3) is linear interconnection.

7. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The connection mode between the plurality of sample transfer chamber boxes (1) and the plurality of sample transfer structures (3) is corner-type interconnection.

8. The intelligent automated thin film preparation and characterization system according to claim 1, characterized in that: The connection mode between the plurality of sample transfer chamber boxes (1) and the plurality of sample transfer structures (3) is a straight-line and corner mixed interconnection.

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