Grating structure, light guide device, optical module and head-mounted display equipment

Abstract

The embodiment of the invention provides a grating structure, a light guide device, an optical module and head-mounted display equipment. The grating structure comprises a substrate and a grating layer, the grating layer is arranged on one side of the substrate, and the grating layer comprises a plurality of grating units which are sequentially arranged at intervals; the grating layer can have target diffraction efficiency by regulating and controlling the refractive index of the interval between every two adjacent grating units; wherein the difference between the refractive index of the interval and the refractive index of the grating unit is a target value A, and 0 < A < = 2. According to the grating structure design scheme provided by the embodiment of the invention, the diffraction efficiency can be regulated and controlled on the basis of not changing the shape of the surface relief grating.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of optical technology. More specifically, the embodiments of the present application relate to a grating structure, a light guide device, an optical module and a head-mounted display device. Background Art

[0002] Among the many diffractive optical devices, diffractive optical waveguide is one of the mainstream technical solutions for realizing augmented reality. It uses the diffraction effect of the micro-nanostructured grating to couple in and out the light, and combines the total reflection effect of the transparent substrate to conduct the light. In the existing technology, the diffraction optical solution based on the grating basically adjusts the diffraction efficiency by changing the shape of the grating, which makes the adjustment of the diffraction efficiency of the grating not flexible enough. Summary of the invention

[0003] The purpose of this application is to provide a new technical solution for a grating structure, a light-guiding device, an optical module, and a head-mounted display device.

[0004] In a first aspect, an embodiment of the present application provides a grating structure. The grating structure includes:

[0005] a substrate; and,

[0006] A grating layer, wherein the grating layer is arranged on one side of the substrate, and the grating layer comprises a plurality of grating units arranged in sequence and at intervals;

[0007] By adjusting the refractive index of the interval between two adjacent grating units, the grating layer can have a target diffraction efficiency; wherein the difference between the refractive index of the interval and the refractive index of the grating unit is a target value A, and 0<A≤2.

[0008] Optionally, the type of the grating structure comprises a surface relief grating.

[0009] Optionally, the grating layer includes a rectangular grating layer, a blazed grating layer or a tilted grating layer.

[0010] Optionally, at least one material is filled in the gap by coating and / or deposition to adjust the refractive index of the gap.

[0011] Optionally, the space is filled with a first material, and the first material has a first refractive index to adjust the refractive index of the space, so that the difference between the adjusted refractive index of the space and the grating unit forms the target value A.

[0012] Optionally, the first material is filled to be flush with the grating unit, or overflows the space and covers the grating unit, so that the space has the first refractive index.

[0013] Optionally, a first material and a second material are filled in the gap, wherein the first material has a first refractive index and the second material has a second refractive index, so as to adjust the refractive index of the gap to be an average of the first refractive index and the second refractive index, and the difference between the refractive index of the gap and the grating unit after adjustment satisfies the target value A.

[0014] Optionally, the first material fills the gap, and the second material covers the first material; wherein the second material is flush with the grating unit or overflows the gap and covers the grating unit.

[0015] Optionally, the first material is deposited along the outer edge shape of the grating layer, and the second material fills the gap and covers the first material; wherein the second material is flush with the grating unit or overflows the gap and covers the grating unit.

[0016] Optionally, a metal layer is covered along the outer edge of the grating layer, and the metal layer is at least one of aluminum and silver.

[0017] Optionally, a side of the metal layer facing away from the grating layer is covered with an anti-oxidation layer;

[0018] Wherein, the anti-oxidation layer comprises silicon dioxide or titanium dioxide.

[0019] In a second aspect, an embodiment of the present application provides a light guide device. The light guide device comprises: a substrate and at least a first grating region and a second grating region disposed on the substrate;

[0020] The first grating region includes the grating structure as described in any one of the first aspects, and / or the second grating region includes the grating structure as partially described in the first aspect.

[0021] In a third aspect, an embodiment of the present application provides an optical module. The optical module comprises

[0022] The light guiding device according to the second aspect; and

[0023] An optical machine is used to project light to the light guiding device.

[0024] In a fourth aspect, an embodiment of the present application provides a head mounted display device. The head mounted display device comprises:

[0025] A front frame assembly including at least one lens mounting portion;

[0026] a wearing assembly, detachably connected to the front frame assembly; and

[0027] An optical module as described in the third aspect; wherein, the light guide device is arranged in the lens mounting portion, and the optical machine is arranged on the front frame assembly and is located on a side close to the wearing assembly.

[0028] The beneficial effects of this application are:

[0029] According to an embodiment of the present application, a new grating structure design scheme is provided, and the diffraction efficiency of the grating can be regulated by controlling the refractive index of the interval between adjacent grating units to meet different diffraction requirements of the diffraction element, wherein the difference between the refractive index of the interval and the grating unit is designed to be between 0 and 2 (excluding 0), which can increase the regulation range of the diffraction efficiency. Compared with the existing method of regulating the diffraction efficiency by changing the shape of the grating, the scheme proposed in the present application can regulate the diffraction efficiency without changing the grating shape. This regulation method is more flexible and easier to implement.

[0030] Other features and advantages of the present specification will become apparent from the following detailed description of exemplary embodiments of the present specification with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the specification and, together with the description, serve to explain the principles of the specification.

[0032] Figure 1 One of the schematic diagrams of a grating structure with air spacing;

[0033] Figure 2 for Figure 1 -1 order diffraction efficiency curve of the grating structure shown;

[0034] Figure 3 One of the structural schematic diagrams of the grating structure provided in the embodiment of the present application;

[0035] Figure 4 for Figure 3 -1 order diffraction efficiency curve of the grating structure shown;

[0036] Figure 5 The second schematic diagram of the grating structure with air spacers;

[0037] Figure 6 for Figure 5 -1 order diffraction efficiency curve of the grating structure shown;

[0038] Figure 7 The second structural schematic diagram of the grating structure provided in the embodiment of the present application;

[0039] Figure 8 for Figure 7-1 order diffraction efficiency curve of the grating structure shown;

[0040] Fig. 9 The third structural schematic diagram of the grating structure provided in the embodiment of the present application;

[0041] Fig.10 A fourth structural schematic diagram of the grating structure provided in an embodiment of the present application;

[0042] Fig.11 A fifth structural diagram of the grating structure provided in an embodiment of the present application;

[0043] Fig.12 The sixth structural diagram of the grating structure provided in the embodiment of the present application;

[0044] Fig.13 for Fig.12 The diffraction efficiency curve of the grating structure shown is applied to the coupled light;

[0045] Fig.14 The seventh structural diagram of the grating structure provided in the embodiment of the present application;

[0046] Fig.15 for Figure 5 The outcoupling efficiency curve when the grating structure is used to outcouple light;

[0047] Fig.16 for Figure 6 The outcoupling efficiency curve when the grating structure is applied to outcoupling light;

[0048] Fig.17 A schematic diagram of the structure of a light guide device provided in an embodiment of the present application.

[0049] Description of reference numerals:

[0050] 100, substrate; 101, grating unit; 102, air gap; 103, first material; 104, second material; 105, metal layer; 106, anti-oxidation layer;

[0051] 1. First grating area; 2. Second grating area; 3. Substrate. DETAILED DESCRIPTION

[0052] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application.

[0053] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or uses.

[0054] Techniques and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the techniques and equipment should be considered part of the specification.

[0055] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0056] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0057] The grating structure, light guide device, optical module and head-mounted display device provided in the embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0058] According to an embodiment of the present application, a grating structure is provided. Figure 3 , Figure 7 and Figure 9-11 The grating structure includes a substrate 100 and a grating layer, wherein the grating layer is arranged on one side of the substrate 100, and the grating layer includes a plurality of grating units 101 arranged in sequence and spaced apart from each other; by adjusting the refractive index of the interval between two adjacent grating units 101, the grating layer can have a target diffraction efficiency; wherein the difference between the refractive index of the interval and the refractive index of the grating unit 101 is a target value A, and 0<A≤2.

[0059] See also Figure 1 and Figure 5 In the grating structure shown, an air gap 102 is provided between two adjacent grating units 101 , that is, the gap between two adjacent grating units 101 is filled with air. At this time, the refractive index of the gap is the refractive index of air.

[0060] According to the above-mentioned embodiment of the present application, it is proposed to adjust the refractive index of the gap between two adjacent grating units 101 so that the difference between the refractive index of the gap and the refractive index of the grating unit 101 can meet the above-mentioned target value A, and 0<A≤2, thereby effectively improving the diffraction efficiency of the partial angle of the grating structure.

[0061] That is to say, according to the grating structure provided in the above embodiment, the diffraction efficiency of the grating structure can be adjusted by changing the refractive index of the gap between adjacent grating units 101, thereby improving the flexibility of the diffraction efficiency design of the grating structure.

[0062] The grating structure provided by the above embodiment can be applied to a diffractive optical device, and can be used as a coupling-in element or a coupling-out element of the diffractive optical device.

[0063] For example, when the grating structure is applied in the coupling region and used as a coupling element, the coupling diffraction efficiency can be improved by adjusting the refractive index of the interval so that it satisfies a certain difference with the refractive index of the grating unit 101, that is, the target value A mentioned in the above embodiment.

[0064] It should be noted that the diffraction optical waveguide solution currently generally has the disadvantage of low diffraction efficiency. The main reason is that the efficiency of its coupling part is low, which affects the efficiency of the entire diffraction device. The grating structure provided in the embodiment of the present application, when applied to the coupling part, can improve the coupling diffraction efficiency by adjusting the refractive index of the interval between adjacent grating units 101.

[0065] For example, when the grating structure is applied in the outcoupling area and used as an outcoupling element, it is required to have a suitable and low outcoupling diffraction efficiency such as <5%. The purpose can be achieved by reducing the refractive index difference between the grating unit 101 and the spacing to suppress the diffraction effect.

[0066] According to an embodiment of the present application, a new grating structure design scheme is provided, which can be applied to a diffraction optical scheme for display. By controlling the refractive index of the gap between adjacent grating units 101, the diffraction efficiency of the grating structure can be regulated to meet different diffraction requirements of the diffraction element. The difference between the refractive index of the gap and the grating unit 101 is designed to be between 0 and 2 (excluding 0), which can increase the regulation range of the diffraction efficiency. Compared with the existing method of regulating the diffraction efficiency by changing the shape of the grating, the scheme proposed in the present application can regulate the diffraction efficiency without changing the grating shape. This regulation method is more flexible and easier to implement.

[0067] See also Figure 1 ,exist Figure 1 In the grating structure shown, air gaps 102 are formed between adjacent grating units 101 , and the grating layers are rectangular grating layers, that is, the grating units 101 are rectangular gratings. Figure 2 for Figure 1 From the first-order diffraction efficiency curve of the grating structure shown, it can be seen that when the incident angle of the light is -15° to 4°, the first-order diffraction efficiency of the grating structure is very low, almost 0.

[0068] See also Figure 3 , Figure 3 The grating structure shown is Figure 1The difference of the grating structure shown is that the refractive index of the interval between adjacent grating units 101 is regulated, and the refractive index of the interval and the refractive index of the grating unit 101 are controlled within the above-mentioned target value A range. Figure 4 for Figure 3 From the diffraction efficiency curve of the grating structure -1, it can be seen that when the incident angle of the light is in the range of -15° to 4°, the diffraction efficiency of the grating structure -1 is significantly improved, and the diffraction efficiency of the -1 in the range of 4° to 15° is also improved. In other words, by changing the refractive index of the interval between adjacent grating units 101, the diffraction efficiency of the grating structure at some angles can be effectively improved.

[0069] It should be noted that when the diffraction efficiency of a rectangular grating is adjusted, the existing solution is to change the height and width of the grating unit 101. However, since the rectangular grating has fewer controllable variables, the overall diffraction efficiency is low and difficult to improve. The solution of the present application can overcome this defect.

[0070] See also Figure 5 ,exist Figure 5 In the grating structure shown, there is an air gap 102 between adjacent grating units 101, and the grating layer is a tilted grating layer. Figure 6 , Figure 6 for Figure 5 From the -1st order diffraction efficiency curve of the grating structure shown, it can be seen that, for example, when the incident angle of the light is 6° to 10°, the -1st order diffraction efficiency of the grating structure is relatively low.

[0071] See also Figure 7 , Figure 7 The grating structure shown is Figure 5 The difference of the grating structure shown is that the refractive index of the interval between adjacent grating units 101 is regulated, and the refractive index of the interval and the refractive index of the grating unit 101 are controlled within the above-mentioned target value A range. Figure 8 for Figure 7 From the -1 order diffraction efficiency curve of the grating structure shown, it can be seen that when the incident angle of the light is in the range of 6° to 10°, the -1 order diffraction efficiency of the grating structure is significantly improved, and the -1 order diffraction efficiency in other ranges is also improved. In other words, for the tilted grating, a higher diffraction efficiency can be achieved by changing the refractive index of the gap between adjacent grating units 101.

[0072] For the outcoupling part of the diffractive optical device, it is required to have a suitable and low outcoupling diffraction efficiency, for example, the outcoupling diffraction efficiency is <5%. Fig.15 When the grating units 101 are separated by air, the diffraction outcoupling efficiency is relatively high within the range of 30° to 50°. Fig.16 By adjusting the air spacing between the grating units 101, the diffraction outcoupling efficiency in the range of 30° to 50° is reduced.

[0073] In some examples of the present application, the type of grating structure includes a surface relief grating.

[0074] Currently, the diffraction waveguide solutions based on surface relief grating basically achieve the control of diffraction efficiency by changing the shape of the surface relief grating.

[0075] According to the above examples, the solution provided in the embodiments of the present application is particularly suitable for regulating the diffraction efficiency of the surface relief grating, and can regulate the diffraction efficiency without changing the shape of the surface relief grating.

[0076] Optionally, see Figure 3 , Figure 7 ,as well as Fig.12 and Fig.14 The grating layer includes a rectangular grating layer, a blazed grating layer or a tilted grating layer.

[0077] The grating structure can be applied to the coupling part of a diffractive optical device. In this case, the grating structure has the function of coupling in external light, and usually adopts a rectangular grating, a blazed grating or a tilted grating, etc., which has low cost and simple production process.

[0078] In some examples of the present application, at least one material is filled in the gap by coating and / or deposition to adjust the refractive index of the gap.

[0079] According to the above example, when the filled material enters the gap, the refractive index of the gap can be changed / regulated. For example, the gap can have a refractive index that is the same as or close to that of the filled material. In other words, the refractive index of the gap is related to the refractive index of the filled material.

[0080] The filling material may be glue with different refractive indices.

[0081] It should be noted that the interval may be filled with one material or two or more materials, and the present application does not limit this. In practical applications, the design may be performed according to the need for regulating the refractive index. When two or more materials are filled in the interval, the refractive index of the interval is the average of the refractive indices of the multiple materials filled.

[0082] The coating process includes spin coating or spray coating.

[0083] Among them, the deposition process includes atomic layer deposition ALD, physical vapor deposition PVD, chemical vapor deposition CVD and the like.

[0084] The filling material is, for example, titanium dioxide TiO2.

[0085] In some examples of this application, see Figure 3 , Figure 7 and Fig. 9 The gap is filled with a first material 103, and the first material 103 has a first refractive index, which can be used to adjust the refractive index of the gap, so that the difference between the adjusted refractive index of the gap and the grating unit 101 forms the target value A.

[0086] According to the above example, a material, namely the first material 103, is filled in the gap between the adjacent grating units 101, so that the gap has the refractive index of the first material 103, so that the diffraction efficiency of the grating structure can be regulated by filling a material in the gap. This regulation method is relatively simple and easy to implement.

[0087] Optionally, see Figure 3 and Figure 7 , the first material 103 is filled to be flush with the grating unit 101, or overflows the interval and covers the grating unit 101, so that the interval has the first refractive index, see Fig. 9 .

[0088] See also Figure 3 and Figure 7 For example, the first material 103 may be filled in the gap by spraying, and the first material 103 may be controlled to fill the gap, and the first material 103 may be flush with the grating unit 101, which is a better solution. At this time, there is no air in the gap, and the refractive index of the gap is the refractive index of the first material 103, that is, the refractive index of the gap is the first refractive index. It should be noted that the process of filling the first material 103 to be flush with the grating unit 101 is relatively complicated.

[0089] In actual production, the first material 103 can overflow from the gap to ensure that the first material 103 can fill the entire gap, and there is no air in the gap. This will not affect the effect of adjusting the diffraction efficiency of the grating structure and can also reduce the difficulty of production.

[0090] Specifically, see Fig. 9 , the first material 103 overflows the gap and covers the grating unit, the gap is completely filled with the first material 103, and the refractive index of the gap is the refractive index of the first material.

[0091] In some examples of this application, see Fig.10 and Fig.11 , a first material 103 and a second material 104 are filled in the gap, wherein the first material 103 has a first refractive index, and the second material 104 has a second refractive index, so as to adjust the refractive index of the gap to be an average of the first refractive index and the second refractive index, and the difference between the refractive index of the gap and the grating unit 101 after adjustment satisfies the target value A.

[0092] The gap includes but is not limited to being filled with only one material. Two or more materials with different refractive indices may be filled and the average of the refractive indices of different materials may be taken to allow the gap to obtain more refractive indices, which is conducive to achieving more flexible adjustment of the diffraction efficiency.

[0093] Optionally, see Fig.10 , the first material 103 is filled in the gap, and the second material 104 covers the first material 103 ; wherein the second material 104 is flush with the grating unit 101 or overflows the gap and covers the grating unit 101 .

[0094] According to the above example, the first material 103 can be first filled in the gap by spraying, and then the second material 104 can be used to cover the first material 103 by spin coating or deposition, and the second material 104 and the first material 103 fill the gap together. At this time, the refractive index of the gap is the average of the first refractive index and the second refractive index.

[0095] Optionally, see Fig.11 , the first material 103 is deposited along the outer edge shape of the grating layer, and the second material 104 fills the gap and covers the first material 103; wherein the second material 104 is flush with the grating unit 101 or overflows the gap and covers the grating unit 101.

[0096] According to the above example, the first material 103 can first be formed into a film layer of the first material along the outer edge shape of the grating layer by spin coating or deposition, and then the second material 104 can be sprayed in the gap. In this way, the refractive index of the gap can also be regulated by the first material 103 and the second material 104 so that the difference between the refractive index of the grating unit 101 and the target value A can be satisfied.

[0097] It should be noted that when two or more materials are filled in the interval, the order and method of filling the materials can be designed as needed and the present application does not impose any restrictions on this. The interval may not be filled with any material to introduce air, and the refractive index of the interval may also be adjusted.

[0098] For example, according to the aforementioned example, when the first material 103 is filled in the gap and the first material 103 does not fill the gap, there is still air in the gap, which is equivalent to two materials with different refractive indices mixed to fill the gap, and the refractive index of the gap is the average of the first refractive index of the first material 103 and the refractive index of the air.

[0099] In some examples of this application, see Fig.12 A metal layer 105 is covered along the outer edge of the grating layer, and the metal layer 105 is at least one of aluminum and silver.

[0100] The grating layer may be any one of a rectangular grating layer, a tilted grating layer and a blazed grating layer.

[0101] For example, at an angle of -15° to 15°, the light rays are incident on the non-deposited metal layer 105, the deposited metal aluminum and the deposited metal silver blazed grating layer, and the corresponding diffraction efficiency of the coupling part is as follows: Fig.13 As shown, Fig.13 Curve A in the middle is the diffraction efficiency curve of deposited metal aluminum, curve B is the diffraction efficiency curve of deposited metal silver, and curve C is the diffraction efficiency curve without deposited metal layer 105. It can be found that the overall diffraction efficiency is significantly improved after depositing aluminum and silver.

[0102] In some examples of this application, see Fig.14 The side of the metal layer 105 facing away from the grating layer is covered with an anti-oxidation layer 106; wherein the anti-oxidation layer includes silicon dioxide or titanium dioxide.

[0103] Since metals are prone to oxidation reaction with oxygen in the air, it is designed to deposit an anti-oxidation layer 106 on the surface of the metal layer 105. The anti-oxidation layer 106 is, for example, silicon dioxide, titanium dioxide or other stable substances in the air.

[0104] It should be noted that the coupling-in part of the diffractive optical device can utilize ALD, PVD, CVD, etc. to deposit aluminum, silver or other metals or a combination of these metals onto the surface of the grating structure, and at the same time, materials such as silicon dioxide, titanium dioxide, etc. can be deposited on the surface of the metal layer 105 for protection.

[0105] The grating structure of the deposited metal layer is usually used in the coupling part of the diffractive optical device to improve the diffraction efficiency.

[0106] According to one embodiment of the present application, a light guide device is provided. Fig.17The light guide device comprises a substrate 3 and at least a first grating region 1 and a second grating region 2 arranged on the substrate 3. The first grating region 1 is used to couple light into the substrate 3 and make the light propagate to the second grating region 2 through total reflection, and the second grating region 2 is used to couple light out; the first grating region 1 comprises the grating structure as described above, and / or the second grating region 2 comprises the grating structure as described above.

[0107] The first grating region 1 is a coupling-in portion, and the second grating region 2 is a coupling-out portion.

[0108] The grating structure with the metal layer 105 and the anti-oxidation layer 106, that is, Fig.12 and Fig.14 The grating structure shown is usually only used in the coupling part to improve the light efficiency. Fig.12 and Fig.14 The grating structure shown is usually not used in the outcoupling part.

[0109] According to the light-guiding device provided in the embodiment of the present application, it can be, for example, a diffraction light waveguide, which can be suitable for application in wearable devices, wherein the wearable devices include head mounted display devices (Head mounted display, HMD), such as AR head mounted display devices.

[0110] When the light guide device is a diffractive optical waveguide, the substrate 3 is a waveguide substrate. Of course, the light guide device can also be a diffractive optical element in other forms.

[0111] According to another embodiment of the present application, an optical module is provided.

[0112] The optical module includes the light guide device and an optical machine as described above; the optical machine is used to project light to the light guide device.

[0113] The light emitted by the optical machine can cover the entire first grating area 1.

[0114] The light emitted by the optical machine may be monochromatic light or polychromatic light.

[0115] The optical module provided in the embodiments of the present application can be used in, for example, a head-mounted display device, specifically in AR glasses or an AR helmet.

[0116] According to another embodiment of the embodiments of the present application, a head-mounted display device is provided, wherein the head-mounted display device includes a front frame assembly and a wearing assembly, wherein the front frame assembly includes at least one lens mounting portion, and the wearing assembly is detachably connected to the front frame assembly; the head-mounted display device also includes the optical module as described above; wherein the light guide device is disposed in the lens mounting portion, and the optical machine is disposed on the front frame assembly and is located on a side close to the wearing assembly.

[0117] The front frame component is, for example, a frame or a main body of a helmet, and the wearing component is, for example, a temple or a strap.

[0118] The specific implementation of the light guide device and the optical module of the embodiment of the present application can refer to the above-mentioned light guide device embodiments, so it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here one by one.

[0119] The above embodiments focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0120] Although some specific embodiments of the present application have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are only for illustration, not for limiting the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. A grating structure, characterized in that: include: a substrate (100); and A grating layer, the grating layer being arranged on one side of the substrate (100), and the grating layer comprising a plurality of grating units (101) arranged in sequence and spaced apart from each other; By adjusting the refractive index of the interval between two adjacent grating units (101), the grating layer can have a target diffraction efficiency; wherein the difference between the refractive index of the interval and the refractive index of the grating unit (101) is a target value A, and 0<A≤2.

2. The grating structure according to claim 1, characterized in that The types of grating structures include surface relief gratings.

3. The grating structure according to claim 1 or 2, characterized in that: The grating layer includes a rectangular grating layer, a blazed grating layer or a tilted grating layer.

4. The grating structure according to claim 3, characterized in that At least one material is filled in the gap by coating and / or deposition to adjust the refractive index of the gap.

5. The grating structure according to claim 4, characterized in that: The space is filled with a first material (103), wherein the first material (103) has a first refractive index for adjusting the refractive index of the space, so that the difference between the adjusted refractive index of the space and the grating unit (101) forms the target value A.

6. The grating structure according to claim 5, characterized in that The first material (103) is filled to be flush with the grating unit (101), or overflows the space and covers the grating unit (101), so that the space has the first refractive index.

7. The grating structure according to claim 4, characterized in that A first material (103) and a second material (104) are filled in the gap, wherein the first material (103) has a first refractive index and the second material (104) has a second refractive index, so as to adjust the refractive index of the gap to be an average of the first refractive index and the second refractive index, and the difference between the refractive index of the gap and the grating unit (101) after adjustment satisfies the target value A.

8. The grating structure according to claim 7, characterized in that The first material (103) is filled in the gap, and the second material (104) covers the first material (103); wherein the second material (104) is flush with the grating unit (101) or overflows the gap and covers the grating unit (101).

9. The grating structure according to claim 7, characterized in that: The first material (103) is deposited along the outer edge shape of the grating layer, and the second material (104) fills the gap and covers the first material (103); wherein the second material (104) is flush with the grating unit (101) or overflows the gap and covers the grating unit (101).

10. The grating structure according to claim 3, characterized in that: A metal layer (105) is covered along the outer edge of the grating layer, and the metal layer (105) is at least one of aluminum and silver.

11. The grating structure according to claim 10, characterized in that The side of the metal layer (105) facing away from the grating layer is covered with an anti-oxidation layer (106); Wherein, the anti-oxidation layer comprises silicon dioxide or titanium dioxide.

12. A light guide device, characterized in that: It comprises a substrate (3) and at least a first grating region (1) and a second grating region (2) arranged on the substrate (3); The first grating region (1) is used to couple light into the substrate (3) and cause the light to be totally reflected and propagated to the second grating region (2), and the second grating region (2) is used to couple light out; The first grating region (1) comprises the grating structure according to any one of claims 1 to 11, and / or the second grating region (2) comprises the grating structure according to any one of claims 1 to 9.

13. An optical module, characterized in that: include: The light guide device as claimed in claim 12; as well as An optical machine is used to project light to the light guiding device.

14. A head mounted display device, characterized in that: include: A front frame assembly including at least one lens mounting portion; A wearing component, detachably connected to the front frame component; as well as, The optical module as described in claim 13; wherein the light guide device is arranged in the lens mounting portion, and the optical machine is arranged on the front frame assembly and is located on a side close to the wearing assembly.

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