Method, device and electronic equipment for modeling comprehensive processing errors of mass transfer equipment

Abstract

The present application relates to a method, apparatus, and electronic device for modeling comprehensive machining errors of mass transfer equipment, wherein the method comprises: establishing, under ideal conditions, a first coordinate system transformation matrix from the tool to the workpiece; establishing a second coordinate system transformation matrix from the tool to the workpiece while taking into account the gantry's rotation angle about the Z direction caused by the linear motor synchronization error, equating the displacement of the gantry's midpoint in the X direction with the displacement of the gantry's two ends in the X direction, and introducing geometric and thermal errors; and determining a comprehensive error motion matrix based on the first and second coordinate system transformation matrices from the tool to the workpiece. The method fully considers errors in multiple aspects, such as geometric errors, motion errors, and thermal errors, thereby providing an effective method for modeling comprehensive machining errors for mass transfer equipment.

Description

Technical Field

[0001] The present application relates to the field of processing error modeling, and in particular to a method, device and electronic equipment for modeling comprehensive processing errors of mass transfer equipment. Background Art

[0002] Min / MicroLED display technology uses tiny LEDs as backlights to achieve high-contrast and high-brightness displays, and is widely used in smartphones, tablets, TVs, and other electronic display devices. In traditional Min / MicroLED chip manufacturing, the precise transfer of the chip to the carrier substrate is a critical step, but the efficiency and accuracy of this process are often limited by equipment performance. With the increasing market demand for high-quality display products, high-speed mass transfer equipment has emerged to significantly improve production efficiency and reduce costs.

[0003] However, in the operation of high-speed, mass transfer equipment, geometric errors, motion errors, and thermal errors are key factors affecting the transfer accuracy of the equipment. The geometric error of the equipment refers to the deviation in geometric size and shape caused by imperfect construction, manufacturing, or assembly. The synchronous control error of the linear motor causes the equipment to produce motion errors, causing the actual processing posture to be inconsistent with the theoretical processing posture. In addition, the linear motor generates a large amount of heat after long-term high-frequency operation. The temperature increase causes the gantry beam to expand thermally and deform, resulting in thermal errors in the equipment processing. These errors combine to form the comprehensive processing error of the equipment, affecting the transfer accuracy of the equipment. In order to solve the above problems, it is particularly important to establish a comprehensive error model. This model aims to analyze and predict the error values ​​of high-speed, mass transfer equipment during the transfer process, and then implement error compensation based on the predicted error values, thereby effectively improving the transfer accuracy of the equipment.

[0004] There is currently a lack of comprehensive error modeling methods for machining of mass transfer equipment, and no effective solution has been proposed. Summary of the Invention

[0005] The present invention provides a method, device and electronic device for modeling comprehensive processing errors of mass transfer equipment to solve the problem that there is currently a lack of a method for modeling comprehensive processing errors of mass transfer equipment.

[0006] In a first aspect, the present invention provides a method for modeling comprehensive machining errors of a mass transfer device, wherein the mass transfer device includes a bed, a first gantry, a second gantry, a thorn mechanism, and a clamping mechanism, wherein both ends of the first gantry and the second gantry are slidably mounted on the bed along the X direction, the thorn mechanism is equipped with a tool and is slidably mounted on the first gantry along the Y direction, the clamping mechanism is used to clamp a workpiece and is slidably mounted on the second gantry along the Y direction, and the two ends of the first gantry, the two ends of the second gantry, the thorn mechanism, and the clamping mechanism are driven by different linear motors;

[0007] The comprehensive machining error modeling method includes:

[0008] Ideally, a first coordinate system transformation matrix from the tool to the workpiece is established;

[0009] Performing motion analysis on the mass transfer device to determine that the motion of the first gantry along the x-direction and the motion of the second gantry along the x-direction are both parallel motions, and establishing a parallel motion equivalent model of the first gantry and the second gantry;

[0010] The parallel kinematic equivalent model of the first gantry includes:

[0011]

[0012] The parallel kinematic equivalent model of the second gantry includes:

[0013]

[0014] Among them, x1 represents the displacement of the midpoint of the first gantry in the X direction, x 11 and x 112 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ A represents the rotation angle of the first gantry around the Z direction, x2 represents the displacement of the middle point of the second gantry in the X direction, and x 21 and x 22 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ B represents the rotation angle of the second gantry around the Z direction, and L represents the length between the first gantry and the second gantry;

[0015] Establishing a second coordinate system transformation matrix from the tool to the workpiece while taking into account the rotation angle of the gantry around the Z direction, equating the displacement of the gantry midpoint in the X direction with the displacement of the gantry ends in the X direction, and introducing geometric errors and thermal errors;

[0016] The comprehensive error motion matrix is ​​determined according to the first coordinate system transformation matrix and the second coordinate system transformation matrix from the tool to the workpiece. The comprehensive error motion matrix E is:

[0017]

[0018] in, is the first coordinate system transformation matrix from the tool to the workpiece, is the second coordinate system transformation matrix from the tool to the workpiece.

[0019] In a second aspect, the present invention provides a processing control method for a mass transfer device, comprising:

[0020] The ideal coordinate system transformation matrix between the tool and the workpiece of the mass transfer device is corrected by the comprehensive error motion matrix of the mass transfer device to obtain the actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer device. The comprehensive error motion matrix of the mass transfer device is obtained by the comprehensive processing error modeling method of the mass transfer device described in the first aspect.

[0021] The tool and the workpiece of the mass transfer device are controlled based on the actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer device.

[0022] In a third aspect, the present invention provides a comprehensive machining error modeling device for a mass transfer device, the mass transfer device comprising a bed, a first gantry, a second gantry, a thorn mechanism, and a clamping mechanism, wherein both ends of the first gantry and the second gantry are slidably mounted on the bed along the X direction, the thorn mechanism is equipped with a tool and is slidably mounted on the first gantry along the Y direction, the clamping mechanism is used to clamp a workpiece and is slidably mounted on the second gantry along the Y direction, and the ends of the first gantry, the ends of the second gantry, the thorn mechanism, and the clamping mechanism are driven by different linear motors;

[0023] The processing comprehensive error modeling device comprises:

[0024] A first matrix establishment module is used to establish a first coordinate system transformation matrix from the tool to the workpiece under ideal conditions;

[0025] a motion analysis module, configured to perform motion analysis on the mass transfer device, determine that the motion of the first gantry along the x-direction and the motion of the second gantry along the x-direction are both parallel motions, and establish a parallel motion equivalent model of the first gantry and the second gantry;

[0026] The parallel kinematic equivalent model of the first gantry includes:

[0027]

[0028] The parallel kinematic equivalent model of the second gantry includes:

[0029]

[0030] Among them, x1 represents the displacement of the midpoint of the first gantry in the X direction, x 11 and x 12 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ A represents the rotation angle of the first gantry around the Z direction, x2 represents the displacement of the second gantry midpoint in the X direction, and x 21 and x 22 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ B represents the rotation angle of the second gantry around the Z direction, and L represents the length between the first gantry and the second gantry;

[0031] A second matrix establishment module is used to establish a second coordinate system transformation matrix from the tool to the workpiece, taking into account the rotation angle of the gantry around the Z direction, equating the displacement of the gantry midpoint in the X direction with the displacement of the gantry ends in the X direction, and introducing geometric errors and thermal errors;

[0032] The third matrix establishment module is used to determine a comprehensive error motion matrix according to the first coordinate system transformation matrix and the second coordinate system transformation matrix from the tool to the workpiece. The comprehensive error motion matrix E is:

[0033]

[0034] in, is the first coordinate system transformation matrix from the tool to the workpiece, is the second coordinate system transformation matrix from the tool to the workpiece.

[0035] In a third aspect, the present invention provides an electronic device comprising a memory and a processor, wherein the memory stores a computer program, and the processor is configured to run the computer program to execute the method for modeling the comprehensive processing errors of the mass transfer equipment described in the first aspect.

[0036] In a fourth aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method for modeling the comprehensive processing errors of mass transfer equipment described in the first aspect.

[0037] Compared with the related art, the processing comprehensive error modeling method provided by the present invention can model and obtain the specific expression of the comprehensive error motion matrix in the mass transfer device, including the position and specific composition of each error term in the matrix. Since the errors of different mass transfer devices are not the same, for any mass transfer device, it is necessary to measure the specific error amount involved in each error term, and substitute the actual measured error amount into each error term to obtain the specific comprehensive error motion matrix of the mass transfer device. Among them, the processing comprehensive error modeling method fully considers errors in multiple aspects such as geometric error, motion error and thermal error, and the expression of the comprehensive error motion matrix obtained is relatively accurate, thus providing an effective processing comprehensive error modeling method for mass transfer devices, solving the problem that there is still a lack of processing comprehensive error modeling methods for mass transfer devices.

[0038] The details of one or more embodiments of the present application are set forth in the following drawings and description to make other features, objects, and advantages of the present application more readily apparent. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 This is a simplified diagram of the mass transfer equipment structure;

[0040] Figure 2 This is a diagram of the ideal motion relationship for mass transfer equipment;

[0041] Figure 3 This is a motion relationship diagram of the mass transfer equipment when there are errors;

[0042] Figure 4 This is the motion relationship diagram of Gantry 1;

[0043] Figure 5 This is the kinematic equivalent model diagram of Gantry 1;

[0044] Figure 6 This is the positive solution diagram of the four-degree-of-freedom series kinematics of Gantry 1;

[0045] Figure 7 This is the positive solution diagram of the parallel part of Gantry 1;

[0046] Figure 8 This is the motion relationship diagram of Longmen 2;

[0047] Figure 9 This is the kinematic equivalent model diagram of Gantry 2;

[0048] Figure 10 This is the positive solution diagram of the four-degree-of-freedom series kinematics of Gantry 2;

[0049] Figure 11 This is the positive solution diagram of the parallel part of Gantry 2;

[0050] Figure 12 Schematic diagram of the verticality error between coordinate systems. DETAILED DESCRIPTION

[0051] In order to more clearly understand the purpose, technical solutions and advantages of the present application, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments.

[0052] Unless otherwise defined, the technical terms or scientific terms involved in this application should have the general meaning understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "an", "a", "the", "these" and the like in this application do not indicate quantitative restrictions, and they can be singular or plural. The terms "include", "comprise", "have" and any variants thereof involved in this application are intended to cover non-exclusive inclusions; for example, a process, method and system, product or device comprising a series of steps or modules (units) is not limited to the listed steps or modules (units), but may include unlisted steps or modules (units), or may include other steps or modules (units) inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "plurality" involved in this application refers to two or more. "And / or" describes the relationship between related objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, and B exists alone. Generally, the character " / " indicates that the related objects are in an "or" relationship. The terms "first," "second," "third," etc. used in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0053] An embodiment of the present invention provides a method for modeling comprehensive processing errors of mass transfer equipment.

[0054] Figure 1 is a schematic diagram of the structure of a mass transfer device provided in an embodiment of the present invention, referring to Figure 1 The mass transfer equipment includes a bed, a first gantry, a second gantry, a thorn crystal mechanism and a clamping mechanism. Both ends of the first gantry and the second gantry can be slidably mounted on the bed along the X direction. The thorn crystal mechanism is equipped with a tool and can be slidably mounted on the first gantry along the Y direction. The clamping mechanism is used to clamp the workpiece and can be slidably mounted on the second gantry along the Y direction. The two ends of the first gantry, the two ends of the second gantry, the thorn crystal mechanism and the clamping mechanism are driven by different linear motors.

[0055] The process includes the following steps:

[0056] Step S110 : ideally, establishing a first coordinate system transformation matrix from the tool to the workpiece.

[0057] Step S120: Perform motion analysis on the mass transfer device to determine that the movement of the first gantry and the second gantry in the x-direction are both parallel motions, and that the movement of the crystal piercing mechanism and the clamping mechanism in the Y and Z directions are both serial motions. A parallel motion equivalent model for the first and second gantry is then established. For detailed motion analysis of the first and second gantry, please refer to the description in the subsequent embodiments.

[0058] The parallel kinematic equivalent model of the first gantry includes:

[0059]

[0060] The parallel kinematic equivalent model of the second gantry includes:

[0061]

[0062] Among them, x1 represents the displacement of the midpoint of the first gantry in the X direction, x 11 and x 12 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ A represents the rotation angle of the first gantry around the Z direction, x2 represents the displacement of the second gantry midpoint in the X direction, and x 21 and x 22 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ B It represents the rotation angle of the second gantry around the Z direction, and L represents the length of the first gantry and the second gantry.

[0063] Step 130 , establishing a second coordinate system transformation matrix from the tool to the workpiece, taking into account the gantry's rotation angle around the Z direction, equating the displacement of the gantry's midpoint in the X direction with the displacement of the gantry's two ends in the X direction, and introducing geometric errors and thermal errors.

[0064] The above three steps respectively establish the tool to workpiece coordinate system transformation matrix without considering the error and taking the error into consideration, that is, the transformation matrix of the tool coordinate system and the workpiece coordinate system. Through the above transformation matrix, the position information of the tool and the workpiece can be converted into the same coordinate system, so that the control system can accurately control the position of the two.

[0065] The motion feed axes at both ends of the first gantry are first X feed axes, the motion feed axes at both ends of the second gantry are second X feed axes, the motion feed axes of the tool are first Y feed axes and first Z feed axes, and the motion feed axes of the workpiece are second Y feed axes and second Z feed axes. For example, each motion feed axis can be implemented by a linear motor.

[0066] It should be noted that the current comprehensive machining error modeling method basically does not consider the errors caused by the parallel motion of the equipment. Specifically, the movement of a component along a certain direction can be divided into serial motion and parallel motion. Serial motion is a single-degree-of-freedom motion, which has only one degree of freedom drive. For example, in the mass transfer device targeted by the present invention, the movement of the crystal mechanism along the Y direction is driven by only one linear motor, and thus the movement of the crystal mechanism along the Y direction is a serial motion. Parallel motion is a multi-degree-of-freedom motion, which has at least two or more degrees of freedom drives. For example, in the mass transfer device targeted by the present invention, the movement of the two gantries along the X direction is driven by linear motors at both ends respectively, and thus the movement of the two gantries along the X direction is a parallel motion. However, in the current comprehensive machining error modeling method for similar equipment, the gantry motion is basically approximated as a serial motion, which will lose some error factors. The present invention focuses on establishing an equivalent model of the parallel motion of the two gantries, which can more accurately describe the movement of the gantry along the X direction, thereby more accurately determining the gantry motion error.

[0067] Specifically, the parallel motion equivalent model accounts for the gantry's rotation angle about the Z direction during its X-direction motion, caused by the linear motor synchronization error. This is the ratio of the difference in displacement between the two ends to the gantry length. If the gantry motion is considered as a serial motion, this rotation error is ignored. Furthermore, in the parallel motion equivalent model, the displacement of the gantry's midpoint is calculated using the positions of the two ends, i.e., the average of the displacements. If the gantry motion is considered as a serial motion, the displacement of the gantry's midpoint cannot be accurately calculated, or the displacement error of the gantry's midpoint is lost.

[0068] In summary, the present invention first establishes an equivalent parallel kinematic model for the two gantries. This model allows the determination of the gantry's rotation angle about the Z direction during its movement along the X direction and the more accurate calculation of the gantry midpoint displacement. These two aspects are not considered in existing methods for modeling comprehensive machining errors. Therefore, by considering the gantry's rotation angle about the X direction and equating the gantry midpoint displacement in the X direction with the displacement of the gantry's two ends in the X direction, a more accurate second coordinate system transformation matrix from the tool to the workpiece can be established. By comparing this with the first coordinate system transformation matrix, a more accurate determination of the comprehensive error motion matrix can be achieved.

[0069] The steps to establish the tool to workpiece coordinate system transformation matrix include:

[0070] Establish a coordinate system transformation matrix from the first X feed axis to the bed; establish a coordinate system transformation matrix from the first Y feed axis to the first X feed axis; establish a coordinate system transformation matrix from the first Z feed axis to the first Y feed axis; establish a coordinate system transformation matrix from the tool to the first Z feed axis; establish a coordinate system transformation matrix from the second X feed axis to the bed; establish a coordinate system transformation matrix from the second Y feed axis to the second X feed axis; establish a coordinate system transformation matrix from the second Z feed axis to the second Y feed axis; establish a coordinate system transformation matrix from the workpiece to the second Z feed axis. Furthermore, determine a coordinate system transformation matrix from the tool to the workpiece based on the coordinate system transformation matrices from the first X feed axis to the bed, the first Y feed axis to the first X feed axis, the first Z feed axis to the first Y feed axis, and the tool to the first Z feed axis, the second X feed axis to the bed, the second Y feed axis to the second X feed axis, the second Z feed axis to the second Y feed axis, and the tool to the second Z feed axis.

[0071] Regardless of whether the error is considered or not, the coordinate system transformation matrix from the tool to the workpiece can be established through the above steps.

[0072] Step 130: Determine a comprehensive error motion matrix based on the first coordinate system transformation matrix from the tool to the workpiece and the second coordinate system transformation matrix. The comprehensive error motion matrix E is:

[0073]

[0074] in, is the first coordinate system transformation matrix from tool to workpiece, is the second coordinate system transformation matrix from tool to workpiece.

[0075] Specifically, the first coordinate system transformation matrix from tool to workpiece is for:

[0076]

[0077] in, and They are the coordinate system transformation matrices from the tool to the first Z feed axis, the first Z feed axis to the first Y feed axis, the first Y feed axis to the first X feed axis, the first X feed axis to the bed, the bed to the second X feed axis, the second X feed axis to the second Y feed axis, the second Y feed axis to the second Z feed axis, and the second Z feed axis to the workpiece under ideal conditions.

[0078] In an ideal situation:

[0079]

[0080] Where x1 = x 11 =x 12, x1 represents the moving distance of the midpoint of the first gantry in the X direction, x 11 and x 12 The nominal feed distance of the two first X feed axes. Ideally, the movement of the two ends of the first gantry is completely synchronized.

[0081]

[0082] Wherein, y1 represents the nominal feed distance of the first Y feed axis.

[0083]

[0084] Where L represents the length of the tool.

[0085]

[0086] Where x2 = x 21 =x 22 , x2 represents the moving distance of the middle point of the second gantry in the X direction, x 21 and x 22 The nominal feed distances of the two second X feed axes respectively. Ideally, the motion of the two ends of the second gantry is completely synchronized.

[0087]

[0088] Wherein, y2 represents the nominal feed distance of the first Y feed axis.

[0089]

[0090] Wherein, z2 represents the nominal feed distance of the second Z feed axis.

[0091] It should be noted that the nominal feed distance is the ideal feed distance output by the control system. For example, if the control system outputs a control instruction of 10 cm (the nominal feed distance) to the linear motor in the X direction, then under ideal conditions, the actual feed distance of the linear motor in the X direction is 10 cm. However, due to the linear motor's installation errors (the feed direction is not completely parallel to the X direction) and its own execution errors, the actual feed distance of the linear motor in the X direction may not be equal to 10 cm.

[0092] The second coordinate system transformation matrix from tool to workpiece for:

[0093]

[0094] Among them, θ A is the deflection angle of the first gantry, θ B is the deflection angle of the second gantry, and They are the coordinate system transformation matrices from the tool to the first Z feed axis, the first Z feed axis to the first Y feed axis, the first Y feed axis to the first X feed axis, the first X feed axis to the bed, the bed to the second X feed axis, the second X feed axis to the second Y feed axis, the second Y feed axis to the second Z feed axis, and the second Z feed axis to the workpiece under the introduction of geometric errors and thermal errors.

[0095] When geometric and thermal errors are introduced:

[0096]

[0097]

[0098] It should be noted that the coordinate system transformation matrix from A to B and the coordinate system transformation matrix from B to A are inversely related.

[0099] Through the specific expressions of the transformation matrices of each coordinate system, the specific expression of the comprehensive error motion matrix E can be derived.

[0100]

[0101] Based on the small error assumption, the expression of the comprehensive error motion transformation matrix E is:

[0102]

[0103] Among them, Δδx, Δδy, and Δδz are the position errors of the tool coordinate system relative to the workpiece coordinate system; Δθx, Δθy, and Δθz are the rotation errors of the tool coordinate system relative to the workpiece coordinate system.

[0104] It should be noted that the specific expressions of the various error terms in the comprehensive error motion transformation matrix can be derived from the above formula. Due to the tedious derivation and calculation and the complex calculation results, the present invention only includes the low-order terms in the calculation results of the various error terms. Specifically, they are as follows:

[0105] Δθ x =((-ε x (y2)-ε x (z2))*cosθ B +(ε y (y2)+ε y (z2))*sinθ B +ε x (x1)-ε x (x2)-1)*cosθ A +((-ε y (y2)-ε y (z2))*cosθB +(-e x (y2)-e x (z2))*sinθ B +e y (x1)-e y (x2))*sinθ A +e x (y1)+ε x (z1)

[0106] Dth y =((e x (y1)+ε x (z1)+ε y (y1)+ε y (z1))*sinθ A +(e y (y1)+ε y (z1))*cosθ A e y (x1))*cosθ B +sinθ B *(e x (y1)+ε z (z1))*sinθ A +(-cosθ A *e x (y1)-e x (x1))*sinθ B

[0107] Dth z =(sinθ B *e x (x2)*cosθ A +(-e z (x2)-e z (y2)-e z (z2))*sinθ B +cosθ B +e x (x1)-e y (y1)-e y (z1)-1)*sinθ A +(e x (x2)*cosθ B *sinθ B +e x (x1)+e x (y1)+ε x (z1))*cosθ A +e y (y2)+ε y (z2)

[0108]

[0109] Dd z =y2*e x (y2)-d z (x2,t)-δ z (y2,t)-δ z (z2,t)-((ε y (y2)+ε y (z2))*cosθ B +(-e x (y2)+ε x (z2))*sinθ B +e y (x2))(L-z1)(-y1 sinθ A +x1)-(cosθ B *e x (y2)+(-ε y (y2)-e y (z2))*sinθ B +cosθ B *e x (x2)+e x (x2))*cosθ A -((e y (y2)+ε y (z2))*cosθ B +sinθ B *(e x (y2)+ε x (z2)))*x2-e y (x2)*x2+e x (z2)*y2-z1+L

[0110] d x (x1,t)=δ x (x1)+d xt (x1)

[0111] d y (y1,t)=δ y (y1)+δ yt (y1)

[0112] d z (z1,t)=δ z (z1)+δ zt (z1)

[0113] d x (x2,t)=δ x (x2)+dxt (x2)

[0114] δ y (y2,t)=δ y (y2)+δ yt (y2)

[0115] δ z (z2,t)=δ z (z2)+δ zt (z2)

[0116] As mentioned above, through the processing comprehensive error modeling method provided by the present invention, the specific expression of the comprehensive error motion matrix in the mass transfer device can be modeled, including the position and specific composition of each error term in the matrix. Since the errors of different mass transfer devices are not the same, for any mass transfer device, it is necessary to measure the specific error amount involved in each error term, and substitute the actual measured error amount into each error term to obtain the specific comprehensive error motion matrix of the mass transfer device. Among them, the processing comprehensive error modeling method fully considers errors in multiple aspects such as geometric error, motion error and thermal error, among which the establishment of the parallel motion equivalent model of the two gantries, and on this basis, considering the gantry's rotation angle around the Z direction and the displacement of the gantry midpoint in the X direction with the displacement of the gantry's two ends in the X direction is equivalent to the key to accurate modeling, and then the expression of the comprehensive error motion matrix obtained is relatively accurate, thus providing an effective processing comprehensive error modeling method for mass transfer equipment, solving the problem that there is still a lack of processing comprehensive error modeling methods for mass transfer equipment.

[0117] As follows, the method for modeling comprehensive processing errors of mass transfer equipment provided by the present invention is described through a specific embodiment.

[0118] In a specific embodiment, a method for modeling comprehensive processing errors of mass transfer equipment includes:

[0119] 1. Analyze the structure and movement of the mass transfer equipment.

[0120] Reference Figure 1The mass transfer equipment includes a bed, a substrate carrying platform, eight motion (feed) axes and two gantry beams. The first gantry (gantry 1) is equipped with a crystal pricking mechanism to perform crystal pricking movement during the processing, and the second gantry (gantry 2) is equipped with a clamping mechanism to clamp and fix the wafer. Each gantry is driven by two linear motors to move along the X-axis. At the same time, the movement of the mechanism on the gantry along the Y-axis is also controlled by two linear motors on the left and right. The two linear motors are connected by a drag chain. One side of one motor is equipped with an execution or clamping mechanism, and the other side motor has a counterweight to maintain the stability of the movement. In the process of mass transfer of MinLED chips, the main participants in the movement are the X-axis and the Y-axis. 11 Axis and X 12 Axis (corresponding to the first X feed axis), Y1 axis (corresponding to the first Y feed axis), X 21 Axis and X 22 There are 6 axes in total, including the X axis (corresponding to the second X feed axis) and the Y2 axis (corresponding to the second Y feed axis). In addition, there are also the Z1 axis and the Z2 axis (corresponding to the first Z feed axis and the second Z feed axis respectively). 11 and X 12 is the X-axis feed axis of the first gantry, Y1 is the Y-axis feed axis of the crystal mechanism on the first gantry, 21 and X 22 Y is the X-axis feed of the second gantry, and Y2 is the Y-axis feed of the clamping mechanism on the second gantry. These feed axes are driven by linear motors, so it can be understood that the linear motors are the feed axes. When the two gantry beams move to the designated position, the pricking mechanism on the first gantry performs an upward and downward pricking motion on the wafer clamped by the clamping mechanism on the second gantry. Simultaneously, the two gantries advance in the Y direction at a certain speed difference. After each row is processed, the two gantries also advance in the X direction at a certain speed difference.

[0121] 2. Perform kinematic analysis and modeling of mass transfer equipment.

[0122] 2.1 First establish the kinematic model of Gantry 1.

[0123] Draw the motion relationship diagram of Gantry 1, refer to Figure 4 Connect Gantry 1 to Linear Motor X 11 and X 12 The motion of the parallel part is regarded as the movement x of the gantry along the X direction and the rotation A around the Z axis, so the kinematic equivalent model of the gantry 1 can be obtained. Figure 5 , namely the four-degree-of-freedom serial motion of Gantry 1 and the linear motor X 11 and X 12 Next, the kinematic equivalent model of Gantry 1 is solved.

[0124] Reference Figure 6, solve the four-degree-of-freedom serial motion of Gantry 1 and obtain the coordinate transformation matrix from the tool to the machine tool:

[0125]

[0126] In formula (1), x1 represents the distance that gantry 1 moves along the x direction, y1 represents the distance that the thorn crystal mechanism on gantry 1 moves along the y direction, z1 represents the distance that the thorn crystal mechanism on gantry 1 moves along the z direction, and θ A Indicates the deflection angle of gantry 1.

[0127] Reference Figure 7 , for linear motor X 11 and X 12 The parallel kinematic solution of Gantry 1 is shown in Figure 2. The center point of Gantry 1 is constrained to move along the dotted line with two degrees of freedom. The displacement of the center point of Gantry 1 from the origin O is represented by x1. 11 and x 12 The gantry can also rotate around the Z axis, and the rotation angle is θ A express.

[0128]

[0129] x 12 -x 11 =Lθ A (4)

[0130] In formulas (2), (3), and (4), x1 represents the displacement of the center point of gantry 1 from the origin O along the X direction, and x 11 and x 12 Represents the distance the two linear motors move along the X direction, θ A It represents the rotation angle of gantry 1 around the Z axis, and L represents the length of gantry 1.

[0131] Formulas (5) and (6) can be obtained by combining formulas (2), (3), and (4).

[0132]

[0133] 2.2 Similarly, the kinematic model of Gantry 2 is established.

[0134] Draw the motion relationship diagram of Longmen 2, refer to Figure 8 Connect Gantry 2 with Linear Motor X 21 and X 22 The motion of the parallel part is regarded as the movement x of the gantry along the X direction and the rotation B around the Z axis, so the kinematic equivalent model of the gantry 1 can be obtained. Figure 9 , namely the four-degree-of-freedom serial motion of Gantry 2 and the linear motor X 21 and X 22Next, the kinematic equivalent model of Gantry 2 is solved.

[0135] Reference Figure 10 , solve the four-degree-of-freedom serial motion of Gantry 2 and obtain the coordinate transformation matrix from the workpiece to the machine tool:

[0136]

[0137] In formula (7), x2 represents the distance that gantry 2 moves along the x direction, y2 represents the distance that the thorn crystal mechanism on gantry 2 moves along the y direction, z2 represents the distance that the thorn crystal mechanism on gantry 2 moves along the z direction, and θ B Indicates the deflection angle of Gantry 2.

[0138] Reference Figure 11 , for linear motor X 21 and X 22 The parallel kinematic solution of Gantry 2 is that the center point of Gantry 2 is constrained to move along the dotted line with two degrees of freedom. The displacement of the center point of Gantry 2 from the origin O is represented by x2. 21 and x 22 The gantry can also rotate around the Z axis, and the rotation angle is θ B express.

[0139]

[0140] x 22 -x 21 =Lθ B (10)

[0141] In formulas (8), (9), and (10), x1 represents the displacement of the center point of gantry 1 from the origin O along the X direction, and x 11 and x 12 Represents the distance the two linear motors move along the X direction, θ B It represents the rotation angle of gantry 2 around the Z axis, and L represents the length of gantry 2.

[0142] Formulas (8), (9), and (10) can be combined to obtain formulas (11) and (12).

[0143]

[0144] 3. Establish a comprehensive processing error model for the equipment.

[0145] Based on the kinematic analysis of the equipment above, a comprehensive machining error model is established taking into account geometric errors and thermal errors. (Brief explanation, represents the coordinate transformation matrix from A to B under ideal conditions, Represents the coordinate transformation matrix from A to B when there is an error.)

[0146] 3.1 Tool motion chain coordinate transformation matrix.

[0147] The tool motion chain is: "bed R→X1 axis→Y1 axis→Z1 axis→tool T". Here, the transformation matrix is ​​given step by step in the order from bed to tool.

[0148] (a) Coordinate transformation matrix from X1 coordinate system to reference coordinate system R:

[0149] When X 11 Nominal displacement x of the axis on the bed 11 When, under ideal conditions, X 11 The transformation matrix from the coordinate system to the reference coordinate system R is:

[0150]

[0151] Similarly, under ideal conditions, X 12 The transformation matrix from the coordinate system to the reference coordinate system R is:

[0152]

[0153] In the ideal error-free case, x 11 =x 12＝ x1, so the coordinate transformation matrix from the X1 coordinate system to the reference coordinate system R is:

[0154]

[0155] In the presence of errors, X 11 Axis and X 12 There are six geometric errors and three thermal drift errors when the axis moves (thermal rotation error is ignored). For actual equipment, X 11 For example, the axis may produce six degrees of freedom motion errors when it moves to any position, namely three displacement errors: linear positioning error δ in the x-direction x (x 11 ), horizontal straightness error δ in the y direction y (x 11 ), vertical straightness error δ in z direction z (x 11 ) and three angular errors: rolling error ε around the x-axis x (x 11 ), pitch error ε around the y-axis y (x 11 ), the yaw error around the z-axis ε z (x 11 ), along x 11 When the axis moves, there are three other directions of thermal drift: xt (x11 ),δ yt (x 11 ),δ zt (x 11 ). Similarly, for any other axis a (a is X 11 / X 12 / X 21 / X 22 / Y1 / Y2 / Z1 / Z2), there are three displacement errors: linear positioning error δ in the x direction x (a) Horizontal straightness error δ in the y direction y (a) Vertical straightness error δ in the z direction z (a) and three angular errors: rolling error ε around the x-axis x (a) Pitch error ε around the y-axis y (a) The yaw error ε around the z-axis z (a), along x 11 When the axis moves, there are three other directions of thermal drift: xt (a), δ yt (a), δ zt (a).

[0156] According to the principle of homogeneous coordinate transformation, X 11 Coordinate system and X 12 Coordinate transformation matrix from coordinate system to reference coordinate system R and (See the previous embodiment for specific expressions).

[0157] Therefore, in the presence of errors, the coordinate transformation matrix from the X1 coordinate system to the reference coordinate system R is:

[0158]

[0159] The performance (positioning accuracy and repeatability) of the two linear motors along the X direction is not much different, and there is a counterweight on the other side of the thorn crystal mechanism on Gantry 1 during operation, so the load of the linear motors along the X direction on both sides is balanced when running.

[0160] (b) Coordinate transformation matrix from Y1 coordinate system to X1 coordinate system:

[0161] When the Y1 axis moves the nominal displacement y1 on the X1 axis, under ideal conditions, the transformation matrix from the Y1 coordinate system to the X1 coordinate system is:

[0162]

[0163] Reference Figure 12, in the presence of errors, compared with the X1 coordinate system, the Y1 coordinate system has an additional error S due to the verticality error between the two axes (x and y) xy In order to simplify the calculation, the coordinate transformation matrix caused by the vertical error S is assumed to be small under the assumption that the deformation of the equipment is small. xy The errors Δx and Δy caused are:

[0164] Δx=-y*sinS xy ≈-y*S xy

[0165] Δy=yy*cosS xy =y(1-cosS xy )≈0

[0166]

[0167] (c) Coordinate transformation matrix from Z1 coordinate system to Y1 coordinate system:

[0168] When the Z1 axis moves the nominal displacement z1 on the Y1 axis, under ideal conditions, the transformation matrix from the Z1 coordinate system to the Y1 coordinate system is:

[0169]

[0170] Similarly, when there is an error, the transformation matrix from the Z1 coordinate system to the Y1 coordinate system is:

[0171]

[0172] (d) Coordinate transformation matrix from tool coordinate system T to Z1 axis coordinate system:

[0173]

[0174] Assume that the tool is completely fixed on the Z1 axis, the tool length is L, there is no motion and rotation error, and no thermal error. Therefore, regardless of whether there is an error, its coordinate transformation matrix is:

[0175]

[0176] Ideally, the transformation matrix from the tool coordinate system T to the reference coordinate system R is:

[0177]

[0178] The transformation matrix from the tool coordinate system T to the reference coordinate system R in the presence of errors is:

[0179]

[0180] 3.2 Workpiece kinematic chain coordinate transformation matrix.

[0181] The workpiece motion chain is: "bed R→X2 axis→Y2 axis→Z2 axis→workpiece W". Here the transformation matrix is ​​given step by step in the order from bed to workpiece.

[0182] (a) Coordinate transformation matrix from X2 coordinate system to reference coordinate system R:

[0183] When X 21 Nominal displacement x of the axis on the bed 21 When, under ideal conditions, X 21 The transformation matrix from the coordinate system to the reference coordinate system R is:

[0184]

[0185] Similarly, under ideal conditions, X 22 The transformation matrix from the coordinate system to the reference coordinate system R is:

[0186]

[0187] In the ideal error-free case, x 21 =x 22 =x2, so the coordinate transformation matrix from the X2 coordinate system to the reference coordinate system R is:

[0188]

[0189] In the presence of errors, X 21 Axis and X 22 There are six geometric errors and three thermal drift errors when the axis moves (thermal rotation error is ignored). According to the principle of homogeneous coordinate transformation, X 21 Coordinate system and X 22 The coordinate transformation matrix from the coordinate system to the reference coordinate system R is and (See the previous embodiment for specific expressions).

[0190] Therefore, in the presence of errors, the coordinate transformation matrix from the X2 coordinate system to the reference coordinate system R is:

[0191]

[0192] The performance (positioning accuracy and repeatability) of the two linear motors along the Y direction is not much different, and there is a counterweight on the other side of the clamping mechanism on Gantry 2 during operation, so the load of the linear motors along the Y direction on both sides is balanced when running.

[0193] (b) Coordinate transformation matrix from Y2 coordinate system to X2 coordinate system:

[0194] When the Y2 axis moves the nominal displacement y2 on the X2 axis, under ideal conditions, the transformation matrix from the Y2 coordinate system to the X2 coordinate system is:

[0195]

[0196] In the presence of errors, the Y2 coordinate system has an additional error S due to the verticality error between the two axes compared to the X2 coordinate system. xy The coordinate transformation matrix caused by this is assumed to be a small angle, so in order to simplify the calculation, the vertical error S xy The errors Δx and Δy caused are:

[0197] Δx=-y*sinS xy ≈-y*S xy

[0198] Δy=yy*cosS xy =y(1-cosS xy )≈0

[0199]

[0200] (c) Coordinate transformation matrix from Z2 coordinate system to Y2 coordinate system:

[0201] When the Z2 axis moves the nominal displacement z2 on the Y2 axis, under ideal conditions, the transformation matrix from the Z2 coordinate system to the Y2 coordinate system is:

[0202]

[0203] Similarly, when there is an error, the transformation matrix from the Z2 coordinate system to the Y2 coordinate system is:

[0204]

[0205] (d) Coordinate transformation matrix from workpiece coordinate system W to Z2-axis coordinate system:

[0206] Assume that the workpiece is completely fixed on the Z2 axis, there is no motion and rotation error, and no thermal error. Therefore, regardless of whether there is an error, its coordinate transformation matrix is:

[0207]

[0208] Ideally, the transformation matrix from the workpiece coordinate system W to the reference coordinate system R is:

[0209]

[0210] The transformation matrix from the workpiece coordinate system W to the reference coordinate system R in the presence of errors is:

[0211]

[0212] 3.3 Establishment of comprehensive equipment error model.

[0213] Ideally, the needle tip and the theoretical pricking point on the workpiece coincide. In practice, the error motion of each kinematic pair causes a spatial deviation between the needle tip and the theoretical pricking point on the workpiece. This deviation is the comprehensive error of the device.

[0214] (1)Reference Figure 2 Under ideal conditions, the actual puncture point of the needle tip and the programmed point are the same point. The coordinate transformation matrix of the tool coordinate system T relative to the workpiece coordinate system W is:

[0215]

[0216] (2)Reference Figure 3 In the case of error, the actual puncture point of the needle tip is not the same as the programmed point. The coordinate transformation matrix of the tool coordinate system T relative to the workpiece coordinate system W is:

[0217]

[0218] In the presence of errors, the transformation matrix of the tool coordinate system T relative to the workpiece coordinate system W can be regarded as a comprehensive error motion matrix superimposed on the ideal motion, that is:

[0219]

[0220] but:

[0221]

[0222] E is the comprehensive error motion matrix. Based on the small error assumption, the expression of the comprehensive error motion transformation matrix is:

[0223]

[0224] Where: Δδx, Δδy, and Δδz are the position errors of the tool coordinate system relative to the workpiece coordinate system. Δθx, Δθy, and Δθz are the rotation errors of the tool coordinate system relative to the workpiece coordinate system.

[0225] From the above embodiments, it can be seen that the method for modeling comprehensive errors in processing of mass transfer equipment provided by the present invention has the following technical effects:

[0226] 1. The present invention's comprehensive error modeling method for mass transfer equipment analyzes the structure and kinematics of the equipment to establish a comprehensive error model that takes errors into account. This helps improve the transfer accuracy of mass transfer equipment and thus enhance product quality.

[0227] 2. The modeling method of the comprehensive machining error of the present invention not only takes into account the influence of geometric and thermal errors, but also takes into account the influence of the synchronization error of the gantry dual linear motor drive, which helps to improve the accuracy of modeling.

[0228] An embodiment of the present invention further provides a processing control method for a mass transfer device, comprising:

[0229] The ideal coordinate system transformation matrix between the tool and the workpiece of the mass transfer device is corrected by the comprehensive error motion matrix of the mass transfer device to obtain the actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer device. The comprehensive error motion matrix of the mass transfer device is obtained by the comprehensive processing error modeling method of the mass transfer device provided by the present invention.

[0230] The tool and the workpiece of the mass transfer device are controlled based on the actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer device.

[0231] Since the comprehensive error modeling method for processing the mass transfer equipment provided by the present invention can more accurately obtain the comprehensive error motion matrix of the mass transfer equipment, the actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer equipment can be more accurately obtained through this matrix, so that the control system can more accurately control the relative position of the tool and the workpiece, and achieve the coincidence of the tool tip and the theoretical crystal point on the workpiece.

[0232] In an embodiment of the present invention, a device for modeling the processing comprehensive errors of a mass transfer device is also provided. The device is used to implement the above-mentioned embodiments and preferred embodiments, and the details that have been described will not be repeated. The terms "module", "unit", "sub-unit", etc. used below can be a combination of software and / or hardware that can implement the predetermined functions. Although the devices described in the following embodiments are preferably implemented in software, implementation by hardware, or a combination of software and hardware, is also possible and conceivable.

[0233] Among them, the mass transfer equipment includes a bed, a first gantry, a second gantry, a thorn crystal mechanism and a clamping mechanism. Both ends of the first gantry and the second gantry can be slidably mounted on the bed along the X direction. The thorn crystal mechanism is installed with a tool and can be slidably mounted on the first gantry along the Y direction. The clamping mechanism is used to clamp the workpiece and can be slidably mounted on the second gantry along the Y direction. The two ends of the first gantry, the two ends of the second gantry, the thorn crystal mechanism and the clamping mechanism are driven by different linear motors.

[0234] The comprehensive machining error modeling device includes:

[0235] A first matrix establishment module is used to establish a first coordinate system transformation matrix from the tool to the workpiece under ideal conditions;

[0236] A motion analysis module is used to perform motion analysis on the mass transfer device, determine that the motion of the first gantry along the x-direction and the motion of the second gantry along the x-direction are both parallel motions, and establish an equivalent parallel motion model of the first gantry and the second gantry;

[0237] The parallel kinematic equivalent model of the first gantry includes:

[0238]

[0239] The parallel kinematic equivalent model of the second gantry includes:

[0240]

[0241] Among them, x1 represents the displacement of the midpoint of the first gantry in the X direction, x 11 and x 12 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ A represents the rotation angle of the first gantry around the Z direction, x2 represents the displacement of the second gantry midpoint in the X direction, and x 21 and x 22 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ B represents the rotation angle of the second gantry around the Z direction, and L represents the length between the first gantry and the second gantry;

[0242] The second matrix establishment module is used to establish the second coordinate system transformation matrix from the tool to the workpiece, taking into account the rotation angle of the gantry around the Z direction, equating the displacement of the gantry midpoint in the X direction with the displacement of the gantry ends in the X direction, and introducing geometric errors and thermal errors;

[0243] The third matrix establishment module is used to determine the comprehensive error motion matrix based on the first coordinate system transformation matrix and the second coordinate system transformation matrix from the tool to the workpiece. The comprehensive error motion matrix E is:

[0244]

[0245] in, is the first coordinate system transformation matrix from tool to workpiece, is the second coordinate system transformation matrix from tool to workpiece.

[0246] It should be noted that the above modules can be functional modules or program modules, and can be implemented through software or hardware. For modules implemented through hardware, the above modules can be located in the same processor; or the above modules can be located in different processors in any combination.

[0247] An embodiment of the present invention further provides an electronic device including a memory and a processor, wherein the memory stores a computer program, and the processor is configured to run the computer program to execute the method for modeling comprehensive processing errors of a mass transfer device provided by the present invention.

[0248] In an embodiment of the present invention, a computer-readable storage medium is further provided, on which a computer program is stored. When the computer program is executed by a processor, the steps of the method for modeling the processing comprehensive errors of mass transfer equipment provided by the present invention are implemented.

[0249] It should be understood that the specific embodiments described herein are only used to explain this application and are not used to limit it. Based on the embodiments provided in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0250] Obviously, the accompanying drawings are merely examples or embodiments of the present application. A person skilled in the art can also apply the present application to other similar situations based on these drawings without inventive effort. Furthermore, it is understandable that, although the work involved in this development process may be complex and lengthy, certain design, manufacturing, or production changes based on the technical content disclosed in this application are merely routine technical means for a person skilled in the art and should not be considered to constitute a deficiency in the disclosure of the present application.

Claims

1. A method for modeling comprehensive processing errors of mass transfer equipment, characterized in that: The mass transfer device includes a bed, a first gantry, a second gantry, a thorn crystal mechanism, and a clamping mechanism. Both ends of the first gantry and the second gantry are slidably mounted on the bed along the X direction. The thorn crystal mechanism is equipped with a tool and is slidably mounted on the first gantry along the Y direction. The clamping mechanism is used to clamp a workpiece and is slidably mounted on the second gantry along the Y direction. The two ends of the first gantry, the two ends of the second gantry, the thorn crystal mechanism, and the clamping mechanism are driven by different linear motors. The comprehensive machining error modeling method includes: Ideally, a first coordinate system transformation matrix from the tool to the workpiece is established; Performing motion analysis on the mass transfer device to determine that the movement of the first gantry along the X direction and the movement of the second gantry along the X direction are both parallel motions, and establishing a parallel motion equivalent model of the first gantry and the second gantry; The parallel kinematic equivalent model of the first gantry includes: The parallel kinematic equivalent model of the second gantry includes: Among them, x1 represents the displacement of the midpoint of the first gantry in the X direction, x 11 and x 12 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ A represents the rotation angle of the first gantry around the Z direction, x2 represents the displacement of the second gantry midpoint in the X direction, and x 21 and x 22 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ B represents the rotation angle of the second gantry around the Z direction, and L represents the length between the first gantry and the second gantry; A second coordinate system transformation matrix from the tool to the workpiece is established while taking into account the rotation angle of the gantry in the Z direction caused by the synchronization error of the linear motor, equating the displacement of the gantry midpoint in the X direction with the displacement of the gantry ends in the X direction, and introducing geometric errors and thermal errors. The comprehensive error motion matrix is ​​determined according to the first coordinate system transformation matrix and the second coordinate system transformation matrix from the tool to the workpiece. The comprehensive error motion matrix E is: in, is the first coordinate system transformation matrix from the tool to the workpiece, is the second coordinate system transformation matrix from the tool to the workpiece.

2. The method for modeling comprehensive processing errors of mass transfer equipment according to claim 1, characterized in that: The motion feed axes at both ends of the first gantry are first X feed axes, the motion feed axes at both ends of the second gantry are second X feed axes, the motion feed axes of the tool are first Y feed axis and first Z feed axis, and the motion feed axes of the workpiece are second Y feed axis and second Z feed axis; The steps of establishing the coordinate system transformation matrix from the tool to the workpiece include: Establishing a coordinate system transformation matrix from the first X feed axis to the bed; Establishing a coordinate system transformation matrix from the first Y feed axis to the first X feed axis; Establishing a coordinate system transformation matrix from the first Z feed axis to the first Y feed axis; Establishing a coordinate system transformation matrix from the tool to the first Z feed axis; Establishing a coordinate system transformation matrix from the second X feed axis to the bed; Establishing a coordinate system transformation matrix from the second Y feed axis to the second X feed axis; Establishing a coordinate system transformation matrix from the second Z feed axis to the second Y feed axis; Establishing a coordinate system transformation matrix from the workpiece to the second Z feed axis; The coordinate system transformation matrix from the tool to the workpiece is determined according to the coordinate system transformation matrices from the first X feed axis to the bed, the first Y feed axis to the first X feed axis, the first Z feed axis to the first Y feed axis, the tool to the first Z feed axis, the second X feed axis to the bed, the second Y feed axis to the second X feed axis, the second Z feed axis to the second Y feed axis, and the tool to the second Z feed axis.

3. The method for modeling comprehensive processing errors of mass transfer equipment according to claim 2, characterized in that: The first coordinate system transformation matrix from the tool to the workpiece for: in, and They are the coordinate system transformation matrices from the tool to the first Z feed axis, the first Z feed axis to the first Y feed axis, the first Y feed axis to the first X feed axis, the first X feed axis to the bed, the bed to the second X feed axis, the second X feed axis to the second Y feed axis, the second Y feed axis to the second Z feed axis, and the second Z feed axis to the workpiece under ideal conditions; The second coordinate system transformation matrix from the tool to the workpiece for: Among them, θ A is the deflection angle of the first gantry, θ B is the deflection angle of the second gantry, and They are the coordinate system transformation matrices from the tool to the first Z feed axis, the first Z feed axis to the first Y feed axis, the first Y feed axis to the first X feed axis, the first X feed axis to the bed, the bed to the second X feed axis, the second X feed axis to the second Y feed axis, the second Y feed axis to the second Z feed axis, and the second Z feed axis to the workpiece under the introduction of geometric errors and thermal errors.

4. The method for modeling comprehensive processing errors of mass transfer equipment according to claim 3, characterized in that: In an ideal situation: Where x1 = x 11 =x 12 , x1 represents the moving distance of the midpoint of the first gantry in the X direction, x 11 and x 12 The nominal feed distances of the two first X feed axes respectively; Wherein, y1 represents the nominal feed distance of the first Y feed axis; Wherein, L represents the length of the tool; Where x2 = x 21 =x 22 , x2 represents the moving distance of the midpoint of the first gantry in the X direction, x 21 and x 22 The nominal feed distances of the two second X feed axes respectively; Wherein, y2 represents the nominal feed distance of the first Y feed axis; Wherein, z2 represents the nominal feed distance of the second Z feed axis.

5. The method for modeling comprehensive processing errors of mass transfer equipment according to claim 4, characterized in that: When geometric and thermal errors are introduced: 。 6. The method for modeling comprehensive processing errors of mass transfer equipment according to any one of claims 1 to 5, characterized in that: Also includes: An error measurement is performed on the mass transfer device to determine an element value of each element in the comprehensive error motion matrix.

7. A processing control method for a mass transfer device, characterized in that: include: Correcting an ideal coordinate system transformation matrix between a tool and a workpiece of the mass transfer device by using a comprehensive error motion matrix of the mass transfer device to obtain an actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer device, wherein the comprehensive error motion matrix of the mass transfer device is obtained by the comprehensive machining error modeling method of the mass transfer device according to claim 6; The tool and the workpiece of the mass transfer device are controlled based on the actual coordinate system transformation matrix between the tool and the workpiece of the mass transfer device.

8. A comprehensive error modeling device for processing of mass transfer equipment, characterized in that: The mass transfer device includes a bed, a first gantry, a second gantry, a thorn crystal mechanism, and a clamping mechanism. Both ends of the first gantry and the second gantry are slidably mounted on the bed along the X direction. The thorn crystal mechanism is equipped with a tool and is slidably mounted on the first gantry along the Y direction. The clamping mechanism is used to clamp a workpiece and is slidably mounted on the second gantry along the Y direction. The two ends of the first gantry, the two ends of the second gantry, the thorn crystal mechanism, and the clamping mechanism are driven by different linear motors. The processing comprehensive error modeling device comprises: A first matrix establishment module is used to establish a first coordinate system transformation matrix from the tool to the workpiece under ideal conditions; a motion analysis module, configured to perform motion analysis on the mass transfer device, determine that the motion of the first gantry along the X direction and the motion of the second gantry along the X direction are both parallel motions, and establish a parallel motion equivalent model of the first gantry and the second gantry; The parallel kinematic equivalent model of the first gantry includes: The parallel kinematic equivalent model of the second gantry includes: Among them, x1 represents the displacement of the midpoint of the first gantry in the X direction, x 11 and x 12 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ A represents the rotation angle of the first gantry around the Z direction, x2 represents the displacement of the second gantry midpoint in the X direction, and x 21 and x 22 Respectively represent the displacement of the two ends of the first gantry in the X direction, θ B represents the rotation angle of the second gantry around the Z direction, and L represents the length between the first gantry and the second gantry; A second matrix establishment module is used to establish a second coordinate system transformation matrix from the tool to the workpiece, taking into account the rotation angle of the gantry around the Z direction, equating the displacement of the gantry midpoint in the X direction with the displacement of the gantry ends in the X direction, and introducing geometric errors and thermal errors; The third matrix establishment module is used to determine a comprehensive error motion matrix according to the first coordinate system transformation matrix and the second coordinate system transformation matrix from the tool to the workpiece. The comprehensive error motion matrix E is: in, is the first coordinate system transformation matrix from the tool to the workpiece, is the second coordinate system transformation matrix from the tool to the workpiece.

9. An electronic device comprising a memory and a processor, characterized in that: A computer program is stored in the memory, and the processor is configured to run the computer program to execute the processing comprehensive error modeling method for a mass transfer device according to any one of claims 1 to 6 or the processing control method for a mass transfer device according to claim 7.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method for modeling comprehensive errors in processing of a mass transfer device according to any one of claims 1 to 6 or the method for controlling processing of a mass transfer device according to claim 7 are implemented.

Images