A magnetic levitation turntable with adjustable rotor suspension height and an adjustment method

Abstract

A magnetic levitation turntable capable of adjusting the suspension height of a rotor according to the present invention includes at least a stator and a rotor. A magnetic conductive part is arranged on the peripheral surface of the rotor. The stator includes at least a permanent magnet structure and a magnetic conductive component for conducting the magnetic field of the permanent magnet structure to the rotor. The magnetic conductive component, the permanent magnet structure, and the magnetic conductive part form a main magnetic flux path. The stator is provided with a plurality of ferromagnetic sheets with adjustable quantity. The ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets and the permanent magnet structure and the magnetic conductive component form a bypass magnetic flux path. By adjusting the quantity of the ferromagnetic sheets, the magnetic field intensity conducted by the magnetic conductive component is regulated, and further the suspension height of the rotor is adjusted. The present invention has the advantages that no additional energy is consumed, the magnetic field intensity acting on the rotor by the permanent magnet is adjusted by physical means, the axial position change of the stator caused by inconsistent magnetic field intensity is eliminated, thereby realizing precise control of the suspension height of the rotor and improving the interchangeability of stators in different batches.

Description

Technical Field

[0001] The present invention relates to the field of magnetic levitation technology, and particularly to a magnetic levitation turntable capable of adjusting the suspension height of a rotor and an adjustment method thereof. Background Art

[0002] In the field of semiconductor manufacturing, the cleanliness of wafers is of utmost importance as it directly affects the smooth progress of subsequent semiconductor processes and the final yield of products. To ensure an ultra-clean environment, wafers made of silicon or other semiconductor materials must be processed in a strictly controlled ultra-clean atmosphere. A key step in the wafer manufacturing process is to perform an annealing process on the wafer after ion implantation doping. The doping process generates strain in the crystal structure, and if these stresses cannot be quickly released, it will lead to unexpected changes in the resistivity of ion doping. Currently, the industry generally uses rapid thermal processing (RT) to effectively carry out this annealing step. On the other hand, the uniformity of wafer processing cannot be ignored. To achieve this goal, when processing wafers, they are usually rotated around the vertical axis passing through the center of the wafer. This rotation not only helps improve the processing uniformity but is also widely used in key processes such as chemical vapor deposition, heat treatment, ion implantation doping, and other technical doping. To meet the extremely high requirements for ultra-clean environment and processing uniformity in semiconductor process manufacturing, semiconductor heat treatment equipment preferably uses a magnetic levitation turntable with non-contact rotary drive. As disclosed in the structures of invention patents TW426873B and CN111341692A, the magnetic levitation turntable consists of two parts: a stator and a rotor. Among them, the stator generates a magnetic field through permanent magnets, endowing the rotor with the ability to levitate and rotate. Since this design does not require mechanical contact, it effectively avoids particle contamination and component wear caused by mechanical friction, and can also ensure high uniformity of the wafer during processing, thereby further improving the quality and performance of semiconductor products.

[0003] As a key component of the stator, the magnetic field intensity of the permanent magnet directly determines the suspension height of the rotor and its stable state. However, in the actual production process, the magnetic field intensity of the permanent magnet is affected by multiple factors such as material properties, manufacturing processes, and production batches, resulting in a certain deviation in magnetic field intensity between different batches. This deviation will cause slight changes in the height of the rotor in the free suspension state, and further cause differences in the axial positions between different stators and the same rotor, ultimately affecting the interchangeability of the stators.

[0004] In the prior art, to solve the problem of the change in the rotor suspension height caused by the inconsistent magnetic field intensity of the permanent magnet, it is usually adopted to adjust the axial position of the rotor by adjusting the magnetic field intensity of the axial coil. This method can compensate for the position deviation caused by the difference in the magnetic field intensity of the permanent magnet within a certain range, so that when different batches of stators are matched with the same rotor, the relative stable axial height consistency can still be maintained. However, some obvious defects and deficiencies are still exposed in the actual application process:

[0005] (1) Additional energy consumption

[0006] In order to adjust the magnetic field intensity of the axial coil to maintain the stable suspension of the rotor, the system must be continuously powered, which undoubtedly increases the additional energy consumption. This increase in energy consumption causes fluctuations in the energy efficiency performance of each magnetic levitation system under the same operating conditions, directly affecting the overall energy efficiency and operating cost of the equipment.

[0007] (2) Stator heating problem

[0008] During the continuous operation of the axial coil to precisely adjust the magnetic field, a large amount of heat energy will be generated, resulting in a significant increase in the temperature of the stator part. This excessive heating not only aggravates the cooling burden of the equipment and requires an additional cooling system to ensure stable operation, but also may damage the stator material, accelerate its aging process, thereby reducing the overall reliability and service life of the system, increasing the maintenance cost and downtime.

[0009] (3) Consistency problem between systems

[0010] Due to the inherent difference in the magnetic field intensity of the permanent magnet, different systems need to apply different intensities of current to achieve the same suspension height. This difference leads to significant differences in energy consumption and thermal management requirements between systems, posing challenges to the interchangeability and maintainability of the equipment. In practical applications, this may mean that specific control strategies and cooling schemes need to be customized for each system, increasing the complexity and cost of system design, and at the same time reducing the flexibility and adaptability of the equipment in different application scenarios. Summary of the Invention

[0011] The technical problem to be solved by the present invention is: to provide a magnetic levitation turntable and an adjustment method for adjustable rotor suspension height that do not consume additional energy, adjust the magnetic field intensity of the permanent magnet acting on the rotor by physical means, eliminate the change in the axial position of the stator caused by inconsistent magnetic field intensity, thereby realizing precise control of the rotor suspension height, and improving the interchangeability of different batches of stators.

[0012] To solve the above technical problems, the technical solution provided by the present invention is a magnetic levitation turntable with adjustable rotor suspension height, which at least includes a stator and a rotor. A magnetic conductive part is arranged on the peripheral surface of the rotor. The stator at least includes a permanent magnet structure with an annular inner surface and a magnetic conductive group for conducting the magnetic field of the permanent magnet structure to the rotor. The magnetic conductive component, the permanent magnet structure, and the magnetic conductive part form a main magnetic flux path. The stator is provided with a plurality of ferromagnetic sheets with adjustable quantity. The ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets, the permanent magnet structure, and the magnetic conductive component form a bypass magnetic flux path. By adjusting the quantity of the ferromagnetic sheets, the magnetic field intensity conducted by the magnetic conductive component is regulated, and further the suspension height of the rotor relative to the stator is adjusted.

[0013] In a preferred embodiment, the thickness of the ferromagnetic sheet is 0.1 mm - 2 mm.

[0014] In a preferred embodiment, the material of the ferromagnetic sheet includes one or several combinations of silicon steel sheet, iron-nickel alloy, iron-aluminum alloy, iron-cobalt alloy, or amorphous alloy.

[0015] In a preferred embodiment, the magnetic conductive component at least includes a first silicon steel plate and a second silicon steel plate respectively adapted to the two pole ends of the permanent magnet structure.

[0016] The permanent magnet structure, the first silicon steel plate, the magnetic conductive part, and the second silicon steel plate form a main magnetic flux path.

[0017] In a preferred embodiment, the permanent magnet structure includes a permanent magnet with an annular inner surface.

[0018] In a preferred embodiment, the permanent magnet structure is formed by arranging a plurality of permanent magnet units uniformly along the circumferential direction. Any one of the permanent magnet units includes a plurality of permanent magnets with the same pole direction, a first magnetic conductive plate conducting with one pole end of the permanent magnet, and a second magnetic conductive plate conducting with the other pole end of the permanent magnet.

[0019] In a preferred embodiment, the ferromagnetic sheet is attached to the peripheral surface of the permanent magnet by magnetic attraction, and the ferromagnetic sheet and the permanent magnet form a first bypass magnetic flux path.

[0020] In a preferred embodiment, the ferromagnetic sheet is detachably connected between the first magnetic conductive plate and the second magnetic conductive plate, and the ferromagnetic sheet, the permanent magnet, the first magnetic conductive plate, and the second magnetic conductive plate form a second bypass magnetic flux path.

[0021] A preferred embodiment is that the ferromagnetic sheet is detachably connected between the first silicon steel sheet and the second silicon steel sheet, and the permanent magnet structure, the first silicon steel sheet, the ferromagnetic sheet and the second silicon steel sheet form a third bypass flux path.

[0022] A preferred embodiment further includes a displacement sensor, which is installed on the stator to obtain the suspension height of the rotor relative to the stator.

[0023] A preferred embodiment further includes a substrate fixedly connected to the stator and arranged horizontally, and the displacement sensor is installed on the stator through the substrate.

[0024] The present invention also provides an adjustment method for adjusting the suspension height of the rotor of the magnetic levitation turntable as described above, including the following steps:

[0025] Set preset parameters, where the preset parameters include the suspension height range of the rotor relative to the stator under the condition of meeting the interchangeability requirements;

[0026] Start the magnetic levitation turntable and obtain the suspension height of the rotor relative to the stator;

[0027] Based on the obtained suspension height and through the preset parameters, judge the state of the stator. If the suspension height is within the preset parameter range, the stator meets the interchangeability requirements and the adjustment ends; otherwise, the stator does not meet the interchangeability adjustment, and adjust the number of ferromagnetic sheets until the suspension height is within the preset parameter range.

[0028] A preferred embodiment, where based on the obtained suspension height and through the preset parameters, judge the state of the stator. If the suspension height is within the preset parameter range, the stator meets the interchangeability requirements and the adjustment ends; otherwise, the stator does not meet the interchangeability adjustment, and adjust the number of ferromagnetic sheets until the suspension height is within the preset parameter range. Specifically, it includes the following steps:

[0029] Step S301, based on the obtained suspension height and through the preset parameters, judge the state of the stator. If the suspension height is within the preset parameter range, the stator meets the interchangeability requirements and the adjustment ends;

[0030] If the suspension height is greater than the maximum value of the preset parameter range, perform step S302; if the suspension height is less than the minimum value of the preset parameter range, perform step S303;

[0031] Step S302: Increase the number of the ferromagnetic sheets, move the rotor axially along the inner annular surface of the permanent magnet towards the stator, reduce the suspension height of the rotor relative to the stator, and make the suspension height within the range of the preset parameters;

[0032] Step S303: Decrease the number of the ferromagnetic sheets, move the rotor axially along the inner annular surface of the permanent magnet away from the stator, increase the suspension height of the rotor relative to the stator, and make the suspension height within the range of the preset parameters.

[0033] The magnetic levitation turntable with adjustable rotor suspension height according to the present invention has the following beneficial effects compared with the prior art:

[0034] (1) The magnetic levitation turntable with adjustable rotor suspension height according to the present invention at least includes a stator and a rotor. The stator at least includes a permanent magnet structure having an inner annular surface and a magnetic conduction component connected to the permanent magnet structure for conducting the magnetic field of the permanent magnet structure to the rotor. The stator is provided with a plurality of ferromagnetic sheets with adjustable numbers. The ferromagnetic sheets form a bypass magnetic flux path with the permanent magnet structure, and / or the ferromagnetic sheets form a bypass magnetic flux path with the permanent magnet structure and the magnetic conduction component; the magnetic field intensity conducted by the magnetic conduction component is regulated by adjusting the number of the ferromagnetic sheets. With such a structural design, the traditional current regulation magnetic field method is abandoned, and instead, a physical regulation mechanism of ferromagnetic sheets is adopted. This transformation is of great significance: the traditional method requires continuous power supply to maintain the magnetic field intensity, while the present invention achieves precise control of the suspension height by directly adjusting the physical configuration of the permanent magnet magnetic field without relying on external power, thereby greatly reducing energy consumption. In addition, almost no additional heat is generated during the operation of this physical regulation method, effectively simplifying the complexity of the thermal management system. Compared with the coil heating problem commonly found in traditional current regulation systems, the present invention fundamentally avoids this problem and completely eliminates the complex and costly heat dissipation and cooling devices, further improving the overall efficiency and reliability of the system.

[0035] (2) The magnetic levitation turntable with adjustable rotor levitation height of the present invention adjusts the magnetic field intensity of the magnetic conduction component by adjusting the number of ferromagnetic sheets, thereby adjusting the levitation height of the rotor relative to the stator. Through the adjustment of the ferromagnetic sheets, the present invention effectively solves the problem of unavoidable magnetic field intensity differences during the manufacturing process of permanent magnets, significantly improving the consistency of the system and the interchangeability between batches. Specifically, even in the face of permanent magnets from different batches, by adjusting the number and configuration of ferromagnetic sheets, the magnetic field intensity of each system can be ensured to reach a highly unified standard. This not only eliminates performance fluctuations caused by differences in permanent magnets but also enables seamless replacement between systems, greatly improving the flexibility and maintainability of the system. Compared with traditional current adjustment systems, the physical magnetic field adjustment method of the present invention does not require complex current regulation of permanent magnets in each system. Instead, through simple and precise physical adjustment means, high consistency and interchangeability between batches can be achieved. This characteristic not only reduces the complexity and cost of the system but also significantly improves the long-term stability and reliability of the system.

[0036] (3) For the magnetic levitation turntable with adjustable rotor levitation height of the present invention, the magnetic conduction component at least includes a first silicon steel sheet and a second silicon steel sheet respectively adapted to the magnetic poles at both ends of the permanent magnet structure; the permanent magnet structure, the first silicon steel sheet, the magnetic conduction part, and the second silicon steel sheet form a main magnetic flux path. The permanent magnet structure includes a permanent magnet with an annular inner surface or is formed by arranging several permanent magnet units evenly along the circumferential direction. Any permanent magnet unit includes several permanent magnets with the same magnetic pole direction, a first magnetic conduction plate conducting with one end magnetic pole of the permanent magnet, and a second magnetic conduction plate conducting with the other end magnetic pole of the permanent magnet. The ferromagnetic sheets are attached to the outer peripheral surface of the permanent magnet by magnetic attraction, and the ferromagnetic sheets and the permanent magnet form a first bypass magnetic flux path; the ferromagnetic sheets are detachably connected between the first magnetic conduction plate and the second magnetic conduction plate, and the ferromagnetic sheets, the permanent magnet, the first magnetic conduction plate, and the second magnetic conduction plate form a second bypass magnetic flux path; the ferromagnetic sheets are detachably connected between the first silicon steel sheet and the second silicon steel sheet, and the permanent magnet structure, the first silicon steel sheet, the ferromagnetic sheets, and the second silicon steel sheet form a third bypass magnetic flux path. With such a structural design, the number configuration of the ferromagnetic sheets can be manually adjusted in various ways to control the magnetic field intensity, and the operation is simple and intuitive. Compared with the technology that traditionally relies on complex electronic control systems, the present invention does not require complex control algorithms and precision circuits. On the one hand, it greatly reduces the operation difficulty and system complexity, lowers the technical threshold of operation and maintenance, and makes the system easier to manage and maintain; on the other hand, it significantly improves the reliability of the system. There is no need to frequently use electronic components for adjustment, the failure rate of the system is reduced, and the service life of the equipment is extended.

[0037] (4)The magnetic levitation turntable with adjustable rotor levitation height of the present invention uses ferromagnetic sheets with a thickness between 0.1 mm and 2 mm. This design not only ensures the fineness of adjustment but also perfectly adapts to the control requirements of high-precision levitation height. The ultra-thin characteristics of the ferromagnetic sheets endow the adjustment process with extremely high sensitivity and precision, enabling each adjustment to be made in tiny and accurate steps, thus easily achieving fine adjustment of the levitation height. This flexibility in design means that the system can perform personalized levitation height settings according to different application scenarios and specific performance requirements. Description of the Drawings

[0038] Figure 1 Schematic diagram of the overall structure of Embodiment 1 of the rotor levitation height adjustment structure of a magnetic levitation turntable according to the present invention;

[0039] Figure 2 Overall structure sectional view of Embodiment 1 of the rotor levitation height adjustment structure of a magnetic levitation turntable according to the present invention;

[0040] Figure 3 For Figure 2 Schematic diagram of the structure of Area A in

[0041] Figure 4 Schematic diagram of the first bypass magnetic flux path formed by the ferromagnetic sheet and the permanent magnet in Embodiment 1 of the rotor levitation height adjustment structure of a magnetic levitation turntable according to the present invention;

[0042] Figure 5 Schematic diagram of the substrate and sensor installation structure in Embodiment 1 of the rotor levitation height adjustment structure of a magnetic levitation turntable according to the present invention;

[0043] Figure 6 Flowchart of the adjustment method in Embodiment 2 of the rotor levitation height adjustment structure of a magnetic levitation turntable according to the present invention.

[0044] Description of the reference numerals:

[0045] 1 - Stator; 11 - Permanent magnet structure; 111 - Permanent magnet; 112 - Permanent magnet unit; 1121 - First magnetic conduction plate; 1122 - Second magnetic conduction plate; 12 - Magnetic conduction component; 121 - First silicon steel plate; 122 - Second silicon steel plate; 13 - Ferromagnetic sheet; 14 - Main magnetic flux path; 15 - Second bypass magnetic flux path; 16 - Third bypass magnetic flux path; 17 - First bypass magnetic flux path;

[0046] 2 - Rotor; 21 - Magnetic conduction part;

[0047] 3 - Displacement sensor;

[0048] 4 - Substrate. Detailed Description of the Invention

[0049] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0050] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0051] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the communication inside two elements; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] Embodiment 1

[0053] A magnetic levitation turntable with adjustable rotor suspension height according to this embodiment, as Figure 1 and Figure 3 shown, at least includes a stator 1 and a rotor 2. A magnetic conductive part 21 is arranged on the peripheral surface of the rotor; the stator at least includes a permanent magnet structure 11 with an annular inner surface and a magnetic conductive component 12 for conducting the magnetic field of the permanent magnet structure to the rotor. The magnetic conductive component 12, the permanent magnet structure 11, and the magnetic conductive part 21 form a main magnetic flux path. The stator 1 is provided with a plurality of ferromagnetic sheets 13 with adjustable quantity. The ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets and the permanent magnet structure, the magnetic conductive component form a bypass magnetic flux path; the magnetic field intensity conducted by the magnetic conductive component is regulated by adjusting the quantity of the ferromagnetic sheets. With such a structural design, the traditional method of adjusting the magnetic field by current is abandoned, and instead, a physical adjustment mechanism of ferromagnetic sheets is adopted. The traditional method requires continuous power supply to maintain the magnetic field intensity, while the embodiment shown in the present invention achieves precise control of the suspension height by directly adjusting the physical configuration of the permanent magnet magnetic field, without relying on external power, thereby greatly reducing the energy consumption. In addition, almost no extra heat is generated during the operation of this physical adjustment method, effectively simplifying the complexity of the thermal management system. Compared with the common problem of coil heating in the traditional current adjustment system, the embodiment shown in the present invention fundamentally avoids this problem, completely eliminating the complex and costly heat dissipation and cooling devices, and further improving the overall efficiency and reliability of the system.

[0054] In this embodiment, the magnetic field intensity conducted by the magnetic conduction component is regulated by adjusting the number of ferromagnetic sheets, and then the suspension height of the rotor 2 relative to the stator 1 is adjusted. The embodiment shown in the present invention effectively solves the problem of unavoidable magnetic field intensity differences during the manufacturing process of permanent magnets through the adjustment of ferromagnetic sheets. It significantly improves the consistency of the system and the interchangeability between batches. Specifically, even in the face of permanent magnets from different batches, by adjusting the number configuration of ferromagnetic sheets, it is possible to ensure that the magnetic field intensity of each system reaches a highly unified standard. This not only eliminates the performance fluctuations caused by permanent magnet differences but also enables seamless replacement between systems, greatly improving the flexibility and maintainability of the system. Compared with the traditional current regulation system, the physical magnetic field regulation method of the embodiment shown in the present invention does not require complex current regulation of permanent magnets in each system. Instead, through simple and precise physical regulation means, high consistency and interchangeability between batches can be achieved. This characteristic not only reduces the complexity and cost of the system but also significantly improves the long-term stability and reliability of the system.

[0055] It should be noted that the permanent magnet structure 11 has two structural forms. One is composed of a single permanent magnet 111 with an annular inner surface, which is used for uniform magnetic field distribution to ensure that the rotor is suspended at the designed height. The other is a permanent magnet structure with an annular inner surface formed by arranging several permanent magnet units 112 evenly along the circumferential direction. Any permanent magnet unit 112 includes several permanent magnets 111 with the same pole direction, a first magnetic conduction plate 1121 conducting with one end pole of the permanent magnet, and a second magnetic conduction plate 1122 conducting with the other end pole of the permanent magnet. This structural design can be flexibly adjusted according to specific application requirements. In this embodiment, the second structural method is adopted, and four permanent magnet units 112 are evenly arranged along the circumferential direction to form the permanent magnet structure 11. Between the first magnetic conduction plate 1121 and the second magnetic conduction plate 1122 of each permanent magnet unit, four permanent magnets 111 are evenly arranged along the tangential direction of the circumference to ensure that the magnetic field acts on the rotor evenly and forms a stable suspension force field.

[0056] In this embodiment, the magnetic field intensity of the permanent magnet structure 11 acting on the rotor is initially set to be higher than the system design requirements, leaving room for subsequent magnetic field intensity adjustment.

[0057] Such as Figure 1 、 Figure 2 and Figure 3As shown in the figure, the magnetic conduction component 12 includes a first silicon steel sheet 121 and a second silicon steel sheet 122 that are adapted to the magnetic poles at both ends of the permanent magnet structure 11. The silicon steel sheet has an extremely high magnetic permeability and can effectively conduct the magnetic field generated by the permanent magnet structure 11. The magnetic field generated by the permanent magnet structure is conducted to the rotor 2 through the first silicon steel sheet 121 and the second silicon steel sheet 122, avoiding magnetic field leakage or uneven distribution and ensuring the stability and efficiency of the system magnetic field.

[0058] A magnetic conduction part 21 is arranged on the outer peripheral surface of the rotor 2, and the magnetic conduction part is adapted to the ends of the first silicon steel sheet and the second silicon steel sheet away from the permanent magnet structure. The permanent magnet structure 11, the first silicon steel sheet 121, the magnetic conduction part 21, and the second silicon steel sheet 122 form a main magnetic flux path 14.

[0059] In this embodiment, the four magnetic conduction components 12 are respectively located at the joints of the four permanent magnet units 112. One end of the first silicon steel sheet 121 of the magnetic conduction component is connected to the first magnetic conduction plate 1121 of the permanent magnet unit 112, and the other end is connected to the first magnetic conduction plate 1121 of the adjacent permanent magnet unit 112; one end of the second silicon steel sheet 122 of the magnetic conduction component is connected to the second magnetic conduction plate 1122 of the permanent magnet unit 112, and the other end is connected to the second magnetic conduction plate 1122 of the adjacent permanent magnet unit 112.

[0060] It should be noted that for the two structural forms of the permanent magnet structure 11, the ferromagnetic sheet 13 can be attached to the outer peripheral surface of the permanent magnet 111 by magnetic attraction or adhesion, and the ferromagnetic sheet 13 and the permanent magnet form a first bypass magnetic flux path 17.

[0061] For the two structural forms of the permanent magnet structure 11, the ferromagnetic sheet 13 is detachably connected between the first silicon steel sheet 121 and the second silicon steel sheet 122 through slots, threaded holes, etc. provided on the first silicon steel sheet 121 and the second silicon steel sheet 122. The permanent magnet structure, the first silicon steel sheet, the ferromagnetic sheet, and the second silicon steel sheet form a third bypass magnetic flux path 16.

[0062] In the way that the permanent magnet structure 11 is formed by arranging a number of permanent magnet units 112 along the circumferential direction to form a permanent magnet structure with an annular inner surface, the ferromagnetic sheet 13 is detachably connected between the first magnetic conduction plate 1121 and the second magnetic conduction plate 1122 through slots, threaded holes, etc. provided on the first magnetic conduction plate 1121 and the second magnetic conduction plate 1122. The ferromagnetic sheet 13, the permanent magnet, the first magnetic conduction plate, and the second magnetic conduction plate form a second bypass magnetic flux path 15.

[0063] In this embodiment, as Figure 1 , Figure 3 and Figure 4, the ferromagnetic sheet 13 can form bypass magnetic flux in three ways. One is to adhere to the outer surface of the permanent magnet 111 by magnetic attraction, and the ferromagnetic sheet 13 and the permanent magnet form the first bypass magnetic flux path 17; the second is to be detachably connected between the first magnetic conduction plate 1121 and the second magnetic conduction plate 1122, and the ferromagnetic sheet 13, the permanent magnet, the first magnetic conduction plate and the second magnetic conduction plate form the second bypass magnetic flux path 15; the third is to be detachably connected between the first silicon steel plate 121 and the second silicon steel plate 122, and the permanent magnet structure, the first silicon steel plate, the ferromagnetic sheet and the second silicon steel plate form the third bypass magnetic flux path 16.

[0064] It should be noted that any ferromagnetic sheet 13 can be connected to the permanent magnet 111 by magnetic attraction or adhesion to form a detachable connection with the permanent magnet structure 11. It can also be through the slots or threaded holes provided on the first magnetic conduction plate 1121 and the second magnetic conduction plate 1122 of the permanent magnet unit 112. Any ferromagnetic sheet 13 forms a detachable connection with the permanent magnet structure 11 through mechanical connection methods such as slots or threaded holes. It can also be through the slots or threaded holes provided on the first silicon steel plate 121 and the second silicon steel plate 122 of the magnetic conduction component 12. Any ferromagnetic sheet 13 is detachably connected between the first silicon steel plate 121 and the second silicon steel plate through mechanical connection methods such as slots or threaded holes.

[0065] The embodiments shown in the present invention, such as Figure 1 and Figure 3 shown, the ferromagnetic sheet 13 adheres to the outer surface of the permanent magnet 111 by magnetic attraction. The main magnetic flux emits from the permanent magnet 111, passes through the first silicon steel plate connected to the first magnetic conduction plate 1121 and the magnetic conduction effect of the second silicon steel plate connected to the second magnetic conduction plate 1122, and then is transmitted to the magnetic conduction part 21 of the rotor 2 to form a stable magnetic field, keeping the rotor suspended. The ferromagnetic sheet 13 adheres to the outer surface of the permanent magnet 111. The main magnetic flux emitted from the permanent magnet 111, under the magnetic conduction effect of the ferromagnetic sheet 13, part of the magnetic flux is guided away from the main magnetic flux path to the first bypass magnetic flux path, reducing the magnetic field intensity acting on the rotor 2. With such a structural design, the magnetic field intensity can be controlled by manually adjusting the quantity configuration of the ferromagnetic sheets, and the operation is simple and intuitive. Compared with the traditional technology relying on complex electronic control systems, the embodiments shown in the present invention do not need to rely on complex control algorithms and precision circuits. On the one hand, the operation difficulty and system complexity are greatly reduced, the technical thresholds of operation and maintenance are lowered, making the system easier to manage and maintain; on the other hand, the reliability of the system is significantly improved. There is no need to frequently use electronic components for adjustment, the failure rate of the system is reduced, and the service life of the equipment is extended.

[0066] The material of the ferromagnetic sheet includes one or several combinations of silicon steel sheets, iron-nickel alloys, iron-aluminum alloys, iron-cobalt alloys or amorphous alloys.

[0067] The thickness of the ferromagnetic sheet is 0.1 mm - 2 mm. This design not only ensures the fineness of adjustment but also perfectly adapts to the control requirements of high-precision suspension height. The ultra-thin characteristic of the ferromagnetic sheet endows the adjustment process with extremely high sensitivity and precision, enabling each adjustment to be carried out in tiny and accurate steps, thus easily achieving fine-tuning of the suspension height. This flexibility in design means that the system can perform personalized suspension height settings according to different application scenarios and specific performance requirements.

[0068] As Figure 5 shown, a magnetic levitation turntable for adjusting the suspension height of a rotor in this embodiment further includes a displacement sensor 3, and the displacement sensor is installed on the stator 1 to obtain the suspension height of the rotor 2 relative to the stator.

[0069] Preferably, it further includes a substrate 4 fixedly connected to the stator 1 and arranged horizontally, and the displacement sensor is installed on the stator 1 through the substrate.

[0070] Embodiment Two

[0071] This embodiment provides an adjustment method for adjusting the suspension height of a rotor of a magnetic levitation turntable as described in any one of the above, as Figure 6 shown, including the following steps:

[0072] Step S1, set preset parameters, and the preset parameters include the suspension height range of the rotor 2 relative to the stator 1 under the condition of meeting the interchangeability requirements.

[0073] Step S2, start the magnetic levitation turntable and obtain the suspension height of the rotor 2 relative to the stator 1.

[0074] After the magnetic levitation turntable is started, the suspension height of the rotor relative to the stator is detected by a displacement sensor or a special height calibration tool.

[0075] Step S3, based on the obtained suspension height and through the preset parameters, judge the state of the stator. If the suspension height is within the preset parameter range, the stator meets the interchangeability requirements and the adjustment ends; otherwise, the stator does not meet the interchangeability requirements, and adjust the number of ferromagnetic sheets until the suspension height is within the preset parameter range. Specifically, it includes the following steps:

[0076] Step S301, based on the obtained suspension height and through the preset parameters, judge the state of the stator. If the suspension height is within the preset parameter range, the stator meets the interchangeability requirements and the adjustment ends; if the suspension height is greater than the maximum value of the preset parameter range, go to step S302; if the suspension height is less than the minimum value of the preset parameter range, go to step S303.

[0077] Step S302: Increase the number of ferromagnetic sheets, move the rotor 2 axially closer to the stator 1 along the annular inner surface of the permanent magnet structure, reduce the suspension height of the rotor relative to the stator, and make the suspension height within the range of preset parameters.

[0078] Specifically, add ferromagnetic sheets on the outer side or side surface of the permanent magnet 111 to guide more magnetic flux into the first bypass magnetic flux path. This part of the magnetic flux passes through the magnetic conduction of the ferromagnetic sheets, but it no longer acts on the rotor. As the magnetic flux in the first bypass path increases, the magnetic field strength in the main magnetic flux path weakens, the magnetic force acting on the rotor decreases, and the suspension height of the rotor decreases accordingly.

[0079] Step S303: Reduce the number of ferromagnetic sheets, move the rotor 2 axially away from the stator 1 along the annular inner surface of the permanent magnet structure, increase the suspension height of the rotor relative to the stator, and make the suspension height within the range of preset parameters.

[0080] Specifically, remove some ferromagnetic sheets to allow more magnetic flux to re-enter the main magnetic flux path. Through the magnetic conduction of the first silicon steel sheet and the second silicon steel sheet, the magnetic field strength in the main magnetic flux increases, the magnetic force acting on the rotor increases, and thus the suspension height of the rotor is increased.

[0081] In summary, the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetic suspension turntable with adjustable rotor suspension height, comprising at least a stator (1) and a rotor (2), wherein the outer surface of the rotor (2) is provided with a magnetic conductive portion (21), the stator at least comprising a permanent magnet structure (11) having an annular inner surface and a magnetic conductive component (12) for conducting the magnetic field of the permanent magnet structure to the rotor, the magnetic conductive component (12), the permanent magnet structure and the magnetic conductive portion forming a main magnetic flux path, characterized in that: The stator (1) is provided with a plurality of ferromagnetic sheets (13) of adjustable number, wherein the ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets and the permanent magnet structure and the magnetic conductive component form a bypass magnetic flux path; by adjusting the number of the ferromagnetic sheets, the intensity of the magnetic field conducted by the magnetic conductive component is regulated, thereby adjusting the suspension height of the rotor (2) relative to the stator (1); the thickness of the ferromagnetic sheets (13) is 0.1 mm-2 mm.

2. A magnetic suspension turntable with adjustable rotor suspension height according to claim 1, characterized in that: The material of the ferromagnetic thin sheet (13) includes one or a combination of silicon steel sheet, iron-nickel alloy, iron-aluminum alloy, iron-cobalt alloy or amorphous alloy.

3. A magnetic suspension turntable with adjustable rotor suspension height according to any one of claims 1-2, characterized in that: The magnetic conductive component (12) comprises at least a first silicon steel plate (121) and a second silicon steel plate (122) respectively adapted to the magnetic poles at both ends of the permanent magnet structure (11); The permanent magnet structure (11), the first silicon steel plate (121), the magnetic conductive portion (21) and the second silicon steel plate (122) form a main magnetic flux path (14).

4. A magnetic suspension turntable with adjustable rotor suspension height according to claim 3, characterized in that: The permanent magnet structure (11) comprises a permanent magnet (111) having an annular inner surface; Alternatively, the permanent magnet structure (11) is formed by a plurality of permanent magnet units (112) arranged evenly along a circumferential direction; any of the permanent magnet units (112) comprises a plurality of permanent magnets (111) having the same magnetic pole direction, a first magnetic conductive plate (1121) conductive to the magnetic pole at one end of the permanent magnet, and a second magnetic conductive plate (1122) conductive to the magnetic pole at the other end of the permanent magnet.

5. A magnetic suspension turntable with adjustable rotor suspension height according to claim 4, characterized in that: The ferromagnetic sheet (13) is adhered to the outer surface of the permanent magnet (111) by magnetic attraction, and the ferromagnetic sheet (13) and the permanent magnet form a first bypass magnetic flux path (17).

6. A magnetic suspension turntable with adjustable rotor suspension height according to claim 4, characterized in that: The ferromagnetic sheet (13) is detachably connected between the first magnetic conductive plate (1121) and the second magnetic conductive plate (1122), and the ferromagnetic sheet (13), the permanent magnet, the first magnetic conductive plate and the second magnetic conductive plate form a second bypass magnetic flux path (15); Alternatively, the ferromagnetic thin sheet (13) is detachably connected between the first silicon steel plate (121) and the second silicon steel plate (122), and the permanent magnet structure, the first silicon steel plate, the ferromagnetic thin sheet and the second silicon steel plate form a third bypass magnetic flux path (16).

7. A magnetic suspension turntable with adjustable rotor suspension height according to any one of claims 1-2 or 4-6, characterized in that: It also comprises a displacement sensor (3), which is mounted on the stator (1) and is used to obtain the suspension height of the rotor (2) relative to the stator.

8. A method for adjusting the rotor suspension height of a magnetic suspension turntable according to any one of claims 1 to 7, characterized in that: The steps include: Setting preset parameters, the preset parameters including a range of a suspension height of the rotor (2) relative to the stator (1) when interchangeability is satisfied; Starting the magnetic suspension turntable and obtaining the suspension height of the rotor (2) relative to the stator (1); Based on the obtained suspension height, the state of the stator is judged by preset parameters; if the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed; otherwise, the stator does not meet the interchangeability condition and the number of the ferromagnetic sheets (13) is adjusted until the suspension height is within the preset parameter range.

9. The method for adjusting the rotor suspension height of a magnetic suspension turntable according to claim 8, characterized in that: Based on the obtained suspension height, the state of the stator is judged by preset parameters. If the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed. Otherwise, the stator does not meet the interchangeability condition and the number of the ferromagnetic sheets (13) is adjusted until the suspension height is within the preset parameter range. Specifically, the steps include: Step S301, judging the state of the stator based on the obtained suspension height and preset parameters, if the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment ends; If the levitation height is greater than the maximum value of the preset parameter range, proceed to step S302; if the levitation height is less than the minimum value of the preset parameter range, proceed to step S303; Step S302, increasing the number of the ferromagnetic sheets, so that the rotor (2) moves axially along the annular inner surface of the permanent magnet structure toward the stator (1), and reducing the levitation height of the rotor relative to the stator, so that the levitation height is within the range of the preset parameters; Step S303, reducing the number of the ferromagnetic sheets, causing the rotor (2) to move away from the stator (1) along the axial direction of the annular inner surface of the permanent magnet structure, increasing the levitation height of the rotor relative to the stator, and causing the levitation height to be within the range of the preset parameters.

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