Oil mist treatment device for vacuum pump

Abstract

The invention discloses an oil mist treatment device for a vacuum pump, belonging to the technical field of oil mist treatment. The device comprises a vacuum pump body, an oil mist treatment chamber is fixedly installed on the oil mist output end on the side of the vacuum pump body, a primary oil shield and a secondary oil mist filter net are arranged inside the oil mist treatment chamber, and an oil mist reflux mechanism is arranged on the outer surface of the oil mist treatment chamber. Through the design of the separation module, the alternating use of two groups of annular filter core sleeves is realized. During the working process, one group of annular filter core sleeves performs oil mist filtering, while the other group performs cleaning. This alternating use mode enables the cleaning and filtering of the filter element to be performed simultaneously without stopping the machine to disassemble the entire oil mist treatment system, thereby avoiding the shutdown of the rotary vane vacuum pump and ensuring the continuity and efficiency of production. In addition, the design of the sealing sleeve and the partition plate in the separation module ensures that the cleaning and filtering processes do not affect each other.

Description

Technical Field

[0001] The invention relates to the technical field of oil mist treatment, and more particularly to an oil mist treatment device for a vacuum pump. Background Art

[0002] In precision machining and lubrication systems, vacuum pumps are needed to create and maintain a high vacuum environment to ensure the accuracy and reliability of the process. Rotary vane vacuum pumps are a type of vacuum pump. This type of vacuum pump does not directly include the function of the oil mist treatment system, but on the contrary, it is one of the sources of oil mist, which contains pollutants such as carbon deposits and metal particles. If these pollutants are not effectively treated, they will seriously affect the quality of the product and the stability of the process. Therefore, an oil mist treatment system is also attached to the vacuum pump to isolate large particle impurities in the oil mist.

[0003] In order to ensure the efficient operation of the vacuum pump and the purity of the semiconductor manufacturing environment, the oil mist treatment system in the existing technology generally adopts multi-level purification treatment, including primary filtration, high-voltage electrostatic field secondary filtration and high-density filter element reflux treatment. However, as the use time increases, the high-density filter element will gradually accumulate pollutants, resulting in a decrease in its filtration efficiency, an increase in resistance, and even possible complete failure. Therefore, regular cleaning of the high-density filter element is a necessary measure to ensure the long-term stable operation of the oil mist treatment system.

[0004] However, since most high-density filter elements are composed of multiple layers of fine fiber materials, the filter pores on their surfaces are very small and easily clogged by fine particles. It is difficult to completely remove these pollutants during cleaning, and enzyme cleaning agents are required to decompose organic pollutants for immersion cleaning. Such cleaning is not only time-consuming, but also requires the disassembly of the entire oil mist treatment system for cleaning, which causes the rotary vane vacuum pump to shut down, affecting production efficiency. Summary of the invention

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide an oil mist treatment device for a vacuum pump, aiming to solve the above technical problems.

[0006] To solve the above problems, the present invention adopts the following technical solutions.

[0007] An oil mist treatment device for a vacuum pump comprises a vacuum pump body, an oil mist treatment chamber is fixedly mounted on the oil mist output end of the side of the vacuum pump body, a primary oil shield and a secondary oil mist filter are arranged inside the oil mist treatment chamber, and an oil mist reflux mechanism is arranged on the outer surface of the oil mist treatment chamber;

[0008] The oil mist reflux mechanism comprises a protective outer shell, the inner bottom of the protective outer shell is provided with an oil mist inlet sleeve connected with the output end of the secondary oil mist filter, a tray base is fixedly installed on the upper surface of the oil mist inlet sleeve, two groups of annular filter core sleeves are placed on the upper surface of the tray base, two groups of electric servo telescopic rods are fixedly installed at the outer edge of the upper surface of the tray base, an annular sleeve frame is fixedly installed on the output end of the electric servo telescopic rod, a driving mechanism is arranged on the upper side of the annular sleeve frame, and a separation module facing the annular filter core sleeve is arranged at the output end of the driving mechanism;

[0009] Among them, the separation module includes a sealing sleeve, the inner wall of the sealing sleeve is fixedly connected with two groups of partition plates separated by 180 degrees, the upper surface of the sealing sleeve is located on one side of the partition plate and is provided with an external hose, and the other side is provided with a cleaning agent replenishing mechanism, the sealing sleeve is integrally covered on the outside of the annular filter core sleeve by an electric servo telescopic rod, and the separation effect of the partition plate is used to align one group of the annular filter core sleeves with the cleaning agent replenishing mechanism for immersion and cleaning, and the other group of the annular filter core sleeves are aligned with the external hose for continued filtering.

[0010] As a further solution of the present invention: the driving mechanism includes a lifting bent rod fixedly installed at the outer edge of the upper surface of the sealing sleeve, a first servo motor is fixedly installed on the outer end of the lifting bent rod, an embedded ring sleeve is fixedly installed on the inner wall of the circular ring of the circular ring frame, a circular ring plate is fixedly installed on the output end of the first servo motor, the circular ring plate is movably clamped in the inside of the embedded ring sleeve, the sealing sleeve is fixedly installed on the bottom of the circular ring plate, the interior of the sealing sleeve is fixedly connected to a first circular ring partition bin at a position on one side of the partition plate, and a second circular ring partition bin is fixedly connected at a position on the other side of the partition plate, and the surfaces of the first circular ring partition bin and the second circular ring partition bin are both in an open state.

[0011] As a further solution of the present invention: a partition column is fixedly connected at the inner center position of the sealing sleeve cover, and the partition plates on both sides of the inner wall of the sealing sleeve cover are fixedly connected to the outer surface position of the partition column. The side of the partition column facing the first circular separation chamber is in a cavity sealing state, and an automatic heating module is arranged in the cavity, and the side of the partition column facing the second circular separation chamber is a breathable mask. The cavity enclosed by the partition column and the first circular separation chamber and the cavity enclosed by the breathable mask and the second circular separation chamber are respectively used for inserting two groups of circular filter core sleeves.

[0012] As a further solution of the present invention: a top cylinder is fixedly installed at the very bottom of the dividing column, the top cylinder is communicated with one side of the second circular ring dividing bin, a plurality of leakage holes are sequentially opened on the bottom circular ring edge of the top cylinder, a sealing block module aligned with the top cylinder is arranged at the center position of the bottom circle of the tray base, the sealing block module includes a through-port pipe, the through-port pipe as a whole is a circular cavity structure, and a plurality of tightening spring rods are fixedly installed in the cavity in sequence, a sealing cover is fixedly installed on the outer side of the tightening spring rod, the sealing cover always keeps in close contact with the lower bottom surface of the through-port pipe under the tightening force of the tightening spring rod, and sealing rings are fixedly installed on the contact ends of the sealing cover and the lower bottom surface of the through-port pipe.

[0013] As a further solution of the present invention: a shock-absorbing ring is fixedly installed on the bottom of the circular ring frame and the output end of the electric servo telescopic rod, the circular filter core sleeve as a whole is two groups of independent circular filter core structures, two groups of spring buckles 180° apart are fixedly installed on the circular edge of the circular ring frame, a circular mouth sleeve plate is fixedly installed at the side position of the upper surface of the circular ring plate, the circular mouth on the surface of the circular mouth sleeve plate corresponds to the spring buckle head, a sealing bolt sleeve head that is rotatably fitted with the bolt sleeve mouth on the outer surface of the oil mist treatment chamber is fixedly installed at the bottom center position of the protective outer shell body, and two groups of detachable maintenance shell plates are fitted on the outer side surface of the protective outer shell body.

[0014] As a further solution of the present invention: an external hose is fixedly installed on the upper surface of the circular ring plate at a position on the same side of the second circular ring separation chamber, which passes into the cavity enclosed between the penetration mask and the second circular ring separation chamber, and the other end of the external hose extends outward and is fixedly installed with a second magnetic sealing sleeve, and two groups of reflux pipes are fixedly installed on the inner bottom of the protective outer shell, which are respectively aligned with the bottom of the first circular ring separation chamber and the second circular ring separation chamber, and each group of reflux pipes is fixedly installed with a first magnetic sealing sleeve corresponding to the adsorption of the second magnetic sealing sleeve, and two groups of interfaces connected to the reflux pipes are fixedly installed on the outer side of the oil mist treatment chamber.

[0015] As a further solution of the present invention: the cleaning agent replenishing mechanism includes a fixedly installed annular shell, a first storage box and a second storage box are fixedly installed at the internal axial position of the annular shell, an annular sleeve frame is fixedly installed on the outer surface of the first storage box and the second storage box, an annular gear sleeve is movably sleeved on the surface of the annular sleeve frame, a second servo motor is fixedly installed at the middle position of the upper surface of the first storage box and the second storage box, a gear head is fixedly installed on the output end of the second servo motor, and a tooth opening corresponding to the gear head meshing is opened on the inner circular ring edge of the annular gear sleeve.

[0016] As a further solution of the present invention: a bevel gear ring is fixedly connected to the outer ring edge of the annular gear sleeve, and reciprocating extrusion modules are arranged at positions on both sides of the second servo motor on the outer sides of the first storage box and the second storage box. The reciprocating extrusion module includes a truncated cone gear head movably mounted on the outer sides of the first storage box and the second storage box, and the truncated cone gear heads on both sides are meshed with the bevel gear ring.

[0017] As a further solution of the present invention: a reciprocating threaded rod is fixedly installed on one side of the truncated cone gear head extending into the first storage box and the second storage box, a sealing card plate is meshingly installed on the outer surface of the reciprocating threaded rod, and a sliding groove for the sealing card plate to engage is opened on the inner side of the first storage box and the second storage box.

[0018] As a further solution of the present invention: the upper surfaces of the first storage box and the second storage box are fixedly installed with injection sleeves, the upper side of the circular ring shell is movably installed with an outward hinge plate, both sides of the bottom of the circular ring shell are fixedly installed with extended catheter warehouses, and the bottom of the first storage box and the second storage box are fixedly installed with an extended catheter on one side close to the center of the circular ring shell, and the extended catheters are extended into the semi-circular ring cavity surrounded by the first circular separation warehouse and the sealing cover through the extended catheter warehouse.

[0019] Compared with the prior art, the above technical solution provided by the present invention has at least the following beneficial effects:

[0020] (1) Through the design of the separation module, the two groups of annular filter core sleeves can be used alternately. During operation, one group of annular filter core sleeves performs oil mist filtration while the other group performs cleaning. This alternating use allows the cleaning and filtration of the filter element to be performed simultaneously without stopping the entire oil mist treatment system to be disassembled, thereby avoiding the shutdown of the rotary vane vacuum pump and ensuring the continuity and efficiency of production. In addition, the design of the sealing sleeve and partition plate in the separation module ensures that the cleaning and filtration processes do not affect each other, improves the stability and reliability of the system, and realizes online cleaning and continuous filtration of the filter element.

[0021] (2) The cleaning agent replenishment mechanism realizes the alternating supply of cleaning agent and auxiliary reagent, which greatly improves the cleaning effect. The cleaning agent can efficiently decompose the organic pollutants in the filter element, while the auxiliary reagents such as surfactants can reduce the surface tension of the cleaning agent, improve its wettability and permeability, and make it easier for the enzyme to contact and decompose the pollutants. This alternating supply method not only improves the utilization rate of the cleaning agent, but also ensures the thorough cleaning of the filter element. After cleaning, the automatic heating module in the partition column is used for high-temperature drying, which avoids the influence of residual moisture on the performance of the filter element and prolongs the service life of the filter element. In general, the device significantly improves the cleaning effect of the high-density filter element and the overall performance of the system through intelligent and multifunctional design. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which are incorporated herein and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, further serve to explain the principles of the invention and to enable those skilled in the relevant art to make and use the invention.

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 It is a structural schematic diagram of a half-section state of the oil mist treatment chamber of the present invention;

[0025] Figure 3 It is a schematic diagram of the overall structure of the oil mist reflux mechanism of the present invention;

[0026] Figure 4 It is a schematic diagram of the structure inside the oil mist reflux mechanism of the present invention;

[0027] Figure 5 It is a structural schematic diagram of the separation module of the present invention;

[0028] Figure 6 It is a structural schematic diagram of the drive mechanism of the present invention in a disassembled state;

[0029] Figure 7 It is a structural schematic diagram of the cleaning agent replenishing mechanism of the present invention in a disassembled state;

[0030] Figure 8 It is a schematic diagram of the structure of a half-section view of a first storage box of the present invention;

[0031] Fig. 9 It is a structural schematic diagram of the sealing block module of the present invention.

[0032] Reference numerals

[0033] 1. Vacuum pump body; 2. Oil mist treatment chamber; 3. Primary oil shield; 4. Secondary oil mist filter;

[0034] 5. Oil mist reflux mechanism; 51. Protective outer shell; 52. Sealing bolt sleeve; 53. Reflux pipe; 54. Maintenance shell plate; 55. First magnetic sealing sleeve; 56. Oil mist enters the sleeve; 57. Tray base; 58. Electric servo telescopic rod; 59. Shock-absorbing ring; 510. Ring frame;

[0035] 6. Ring filter element sleeve;

[0036] 7. Driving mechanism; 71. Lifting bending rod; 72. First servo motor; 73. Embedded ring sleeve; 74. Circular ring plate; 75. Circular sleeve plate; 76. Spring buckle head;

[0037] 8. Second magnetic sealing sleeve;

[0038] 9. Cleaning agent replenishing mechanism; 91. Circular ring casing; 92. First storage box; 93. Second storage box; 94. Circular ring assembly frame; 95. Circular ring gear sleeve; 96. Second servo motor; 97. Gear head; 98. Conical gear sleeve ring;

[0039] 99, reciprocating extrusion module; 991, truncated cone gear head; 992, reciprocating threaded rod; 993, sealing card plate; 994, slide groove; 995, injection sleeve;

[0040] 910, outward hinge plate; 911, outward extension catheter compartment; 912, outward extension catheter;

[0041] 10. External hose;

[0042] 11. Separation module; 111. Sealing cover; 112. Separation plate; 113. First annular separation chamber; 114. Second annular separation chamber; 115. Separation column; 116. Permeable cover; 117. Top cylinder; 118. Leakage hole;

[0043] 12. Sealing block module; 121. Through-port pipe; 122. Tightening spring rod; 123. Sealing cover; 124. Sealing ring.

[0044] As shown in the figure, in order to clearly implement the structure of the embodiment of the present invention, specific structures and devices are marked in the figure, but this is only for illustrative purposes and is not intended to limit the present invention to the specific structure, device and environment. According to specific needs, ordinary technicians in this field can adjust or modify these devices and environments. DETAILED DESCRIPTION

[0045] The following is a detailed description of an oil mist treatment device for a vacuum pump provided by the present invention in combination with the accompanying drawings and specific embodiments. At the same time, it is explained here that in order to make the embodiments more detailed, the following embodiments are listed as the best and preferred embodiments, and other alternatives can also be used by technicians in some well-known technical fields; and the accompanying drawings are only for more specific description of the embodiments, and are not intended to specifically limit the present invention.

[0046] like Figures 1 to 9 As shown, an embodiment of the present invention provides an oil mist treatment device for a vacuum pump, comprising a vacuum pump body 1, an oil mist treatment chamber 2 is fixedly mounted on the oil mist output end of the side of the vacuum pump body 1, a primary oil shield 3 and a secondary oil mist filter 4 are arranged inside the oil mist treatment chamber 2, and an oil mist reflux mechanism 5 is arranged on the outer surface of the oil mist treatment chamber 2;

[0047] The oil mist reflux mechanism 5 comprises a protective outer shell 51, the inner bottom of the protective outer shell 51 is provided with an oil mist inlet sleeve 56 connected with the output end of the secondary oil mist filter 4, a tray base 57 is fixedly installed on the upper surface of the oil mist inlet sleeve 56, two groups of annular filter core sleeves 6 are placed on the upper surface of the tray base 57, two groups of electric servo telescopic rods 58 are fixedly installed at the outer edge of the upper surface of the tray base 57, an annular sleeve frame 510 is fixedly installed on the output end of the electric servo telescopic rod 58, a driving mechanism 7 is arranged on the upper side of the annular sleeve frame 510, and a separation module 11 facing the annular filter core sleeve 6 is provided at the output end of the driving mechanism 7;

[0048] Among them, the separation module 11 includes a sealing sleeve 111, and the inner wall of the sealing sleeve 111 is fixedly connected with two groups of partition plates 112 separated by 180°. The upper surface of the sealing sleeve 111 is located on one side of the partition plate 112 and is provided with an external hose 10, and the other side is provided with a cleaning agent replenishing mechanism 9. The sealing sleeve 111 is integrally covered on the outside of the annular filter core sleeve 6 through an electric servo telescopic rod 58, and the separation effect of the partition plate 112 is used to align one group of the annular filter core sleeves 6 with the cleaning agent replenishing mechanism 9 for immersion cleaning, and the other group of the annular filter core sleeves 6 is aligned with the external hose 10 for continued filtering.

[0049] In order to solve the problem that the high-density filter element in the existing vacuum pump needs to disassemble the processing system when cleaning, causing the rotary vane vacuum pump to stop and affecting the production efficiency, the above technical solution is now adopted to solve the problem. The above technical solution is mainly composed of a vacuum pump body 1, an oil mist treatment chamber 2, a first-level oil shield 3, a second-level oil mist filter 4, an oil mist reflux mechanism 5, a driving mechanism 7 and a separation module 11. The vacuum pump body 1 is a vacuum pump structure in the prior art, including but not limited to a rotary vane vacuum pump. The oil mist treatment chamber 2 is a sealing cover structure sealed and installed on the oil mist outlet side of the pump body, and the first-level oil shield 3 and the second-level oil mist filter 4 are filtering structures arranged inside the oil mist treatment chamber 2. The first-level oil shield 3 is a filtering structure composed of a coarse filter and a cyclone separator in the prior art, which is used to remove large particles and impurities and reduce the burden on subsequent filters. The second-level oil mist filter 4 is a steel mesh structure composed of a high-voltage power supply and an electrode plate in the prior art, which ionizes oil mist and particles, so that they are deposited on the collection plate under the action of the electric field, and small particles and impurities are filtered out. The oil mist reflux mechanism 5 is attached to the outside of the oil mist treatment chamber 2 and is used to connect to the secondary oil mist filter 4 for further filtering. It includes a protective outer shell 51, an oil mist inlet sleeve 56, a tray base 57, and an electric servo telescopic rod 58. The separation module 11 is configured at the output end of the driving mechanism 7 and is used to separate the two groups of annular filter core sleeves 6.

[0050] The separation module 11 includes a sealing sleeve 111 and a partition plate 112. The sealing sleeve 111 is divided into two processing chambers, one on the left and one on the right, with the partition plate 112 as the boundary. The upper surface of the sealing sleeve 111 is located on one side of the partition plate 112 and is provided with an external hose 10. The side processing chamber is used to cooperate with the annular filter core sleeve 6 for adsorption filtration, and the other side is provided with a cleaning agent replenishing mechanism 9. The side processing chamber is used to cooperate with the cleaning agent replenishing mechanism 9 for separated cleaning, so that one side of the device can be filtered while the other side can be cleaned, and the two sides can be switched back and forth in sequence to achieve the purpose of cyclic filtration and cleaning, so that the device does not need to be stopped for processing during the cleaning process.

[0051] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9As shown, the driving mechanism 7 includes a lifting bent rod 71 fixedly installed at the outer edge position of the upper surface of the sealing sleeve 111, the outer end of the lifting bent rod 71 is fixedly installed with a first servo motor 72, the inner wall of the circular ring frame 510 is fixedly installed with an embedded ring sleeve 73, the output end of the first servo motor 72 is fixedly installed with a circular plate 74, the circular plate 74 is movably clamped in the inside of the embedded ring sleeve 73, the sealing sleeve 111 is fixedly installed at the bottom of the circular plate 74, the interior of the sealing sleeve 111 is fixedly connected with a first circular partition chamber 113 at a position on one side of the partition plate 112, and is fixedly connected with a second circular partition chamber 114 at the other side of the partition plate 112, and the surfaces of the first circular partition chamber 113 and the second circular partition chamber 114 are both in an open state.

[0052] Among them, the configured lifting bent rod 71 is used to raise the height of the rod upward to avoid the problem that the rod will interfere with the cleaning agent replenishing mechanism 9 during the process of driving the circular plate 74 to rotate at the output end of the first servo motor 72, and in order to ensure that the external hose 10 on the other side does not interfere with the lifting bent rod 71, the first servo motor 72 controls the circular plate 74 to only rotate 180° back and forth. The surface of the configured second circular ring separation chamber 114 is in an open state so that when working, the oil mist on this side can be discharged to the outside after being adsorbed and filtered by the circular filter core sleeve 6.

[0053] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, a partition column 115 is fixedly connected at the inner center position of the sealing sleeve 111, and the partition plates 112 on both sides of the inner wall of the sealing sleeve 111 are fixedly connected to the outer surface position of the partition column 115. The side of the partition column 115 facing the first circular partition chamber 113 is in a cavity sealing state, and an automatic heating module is arranged in the cavity. The side of the partition column 115 facing the second circular partition chamber 114 is a permeable mask 116. The cavity enclosed by the partition column 115 and the first circular partition chamber 113, and the cavity enclosed by the permeable mask 116 and the second circular partition chamber 114 are respectively used for inserting two groups of circular filter core sleeves 6.

[0054] Among them, the side of the configured partition column 115 facing the first circular partition chamber 113 is in a cavity sealing state in order to close the opening on the side of the first circular partition chamber 113. When working, the incoming oil mist will not enter this side, so that this side can be stably cleaned, and the automatic heating module is configured in the cavity on this side in order to dry the cleaned circular filter core sleeve 6 at high temperature after cleaning to avoid residual moisture affecting its filtering effect. The cavity enclosed by the partition column 115 and the first circular partition chamber 113, and the cavity enclosed by the permeable mask 116 and the second circular partition chamber 114 are respectively used for inserting two groups of circular filter core sleeves 6, specifically, the partition column 115 and The cavity enclosed by the first annular separator 113 can be used for inserting a group of annular filter core sleeves 6, and the cavity enclosed by the permeable mask 116 and the second annular separator 114 can be used for inserting another group of annular filter core sleeves 6. After the annular filter core sleeves 6 are inserted, they are completely fitted into the inner wall of the cavity. Overall, after the sealing cover 111 is completely buckled on the upper surface of the tray base 57, its partition column 115 is just stuck on the inner side of the two annular filter core sleeves 6, and due to the action of the partition plate 112, the annular filter core sleeves 6 on both sides are just separated. Correspondingly, a permeable mask 116 is set on the side of the partition column 115 facing the second annular separator 114 to facilitate the passage of oil mist.

[0055] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, a top cylinder 117 is fixedly installed at the bottom of the partition column 115, and the top cylinder 117 is communicated with one side of the second circular ring partition chamber 114. A plurality of leakage holes 118 are sequentially opened on the bottom circular ring edge of the top cylinder 117. A sealing block module 12 aligned with the top cylinder 117 is arranged at the center position of the bottom circle of the tray base 57. The sealing block module 12 includes a through-port pipe 121. The through-port pipe 121 is a circular cavity structure as a whole, and a plurality of tightening spring rods 122 are sequentially fixedly installed in the cavity. A sealing cover 123 is fixedly installed on the outer side of the tightening spring rod 122. The sealing cover 123 always keeps in close contact with the lower bottom surface of the through-port pipe 121 under the tightening force of the tightening spring rod 122, and sealing rings 124 are fixedly installed on the contact ends of the sealing cover 123 and the lower bottom surface of the through-port pipe 121.

[0056] Among them, the top cylinder 117 is used in conjunction with the sealing block module 12, because during the working process, when the annular filter core sleeve 6 needs to be switched for filtering on each side, the electric servo telescopic rod 58 will be lifted upward, and the sealing sleeve cover 111 will be lifted upward, and then the driving mechanism 7 will be rotated to insert the adsorption saturated annular filter core sleeve 6 into one side of the first annular separation chamber 113. In the process of performing this step, in order to prevent the bottom of the protective outer shell 51 from continuing to enter the oil mist, the sealing block module 12 is configured so that the bottom of the sealing sleeve cover 111 is automatically closed during the upward lifting process to prevent the oil mist from entering at this time. Its working principle is as follows:

[0057] Because the sealing cover 123 is installed on the bottom of the through-port pipe 121 through a plurality of tightening spring rods 122, and the sealing cover 123 always keeps in close contact with the lower bottom surface of the through-port pipe 121 under the tightening force of the tightening spring rods 122, the sealing cover 123 will be closed in the absence of the downward push force of the top cylinder 117. Only when the sealing sleeve 111 covers the upper surface of the tray base 57, the sealing cover 123 is pushed downward by the top cylinder 117. At this time, the oil mist can enter the interior of the sleeve 56 through the leakage hole 118 on the top cylinder 117 for adsorption and filtration treatment. The configured sealing ring 124 is to further improve the sealing performance of the interface in the sealed state.

[0058] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, a shock absorbing ring 59 is fixedly installed on the bottom of the circular sleeve frame 510 and the output end of the electric servo telescopic rod 58, the circular filter core sleeve 6 as a whole is two groups of independent circular filter core structures, two groups of spring buckles 76 separated by 180° are fixedly installed on the circular edge of the circular sleeve frame 510, a circular sleeve plate 75 is fixedly installed at the side position of the upper surface of the circular plate 74, and the circular mouth on the surface of the circular sleeve plate 75 corresponds to the spring buckle head 76, a sealing bolt sleeve 52 that is rotatably fitted with the bolt sleeve on the outer surface of the oil mist treatment chamber 2 is fixedly installed at the bottom center position of the protective outer shell 51, and two groups of detachable maintenance shell plates 54 are fitted on the outer side of the protective outer shell 51.

[0059] Among them, the configured spring buckle head 76 and the circular mouth sleeve plate 75 are a matching structure, which is to further improve the positioning effect of the circular ring plate 74 during the 180-degree reciprocating rotation. The two sets of detachable maintenance shell plates 54 are convenient for the subsequent disassembly of the protective outer shell 51 to maintain the interior and replace the circular filter core sleeve 6 that cannot be cleaned but can continue to be put into use. The circular filter core sleeve 6 as a whole is two sets of independent circular filter core structures, and the distance between them is just used to insert the partition plate 112 for separation.

[0060] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, the upper surface of the annular plate 74 is located at a position on the same side of the second annular separator 114, and an external hose 10 is fixedly installed thereon, which passes into the cavity enclosed between the permeable cover 116 and the second annular separator 114, and the other end of the external hose 10 extends outward and is fixedly installed with a second magnetic sealing sleeve 8, and the inner bottom of the protective outer shell 51 is fixedly installed with two groups of return pipes 53 that are respectively aligned with the bottom of the first annular separator 113 and the second annular separator 114, and each group of return pipes 53 is fixedly installed with a first magnetic sealing sleeve 55 that corresponds to the adsorption of the second magnetic sealing sleeve 8, and the outer side surface of the oil mist treatment chamber 2 is fixedly installed with two groups of interfaces connected to the return pipe 53.

[0061] Among them, the configured external hose 10 is L-shaped as a whole, and its longer end is a pull tube structure that can only be stretched up and down. It has a certain rigidity to cooperate with the extension and contraction of the electric servo telescopic rod 58 each time. The first magnetic sealing sleeve 55 and the second magnetic sealing sleeve 8 are joint duct structures equipped with magnetic rings, so that they can be adsorbed when close to better ensure the connection effect.

[0062] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9As shown, the cleaning agent replenishing mechanism 9 includes a fixedly mounted annular casing 91, a first storage box 92 and a second storage box 93 are fixedly mounted at the internal axial position of the annular casing 91, an annular sleeve frame 94 is fixedly mounted on the outer surface of the first storage box 92 and the second storage box 93, an annular gear sleeve 95 is movably mounted on the surface of the annular sleeve frame 94, a second servo motor 96 is fixedly mounted at the middle position of the upper surface of the first storage box 92 and the second storage box 93, a gear head 97 is fixedly mounted on the output end of the second servo motor 96, and a tooth opening corresponding to the gear head 97 is opened on the inner ring edge of the annular gear sleeve 95.

[0063] Among them, the first storage box 92 and the second storage box 93 are installed in pairs, and each storage end stores different reagents. The first storage box 92 is used to store enzyme cleaning agents, and the second storage box 93 is used to store surfactants. The surfactant can reduce the surface tension of the cleaning agent, improve its wettability and permeability, make it easier for the enzyme to contact and decompose pollutants, and can emulsify pollutants that are difficult to dissolve in water, such as grease, so that they are easier to be taken away by the cleaning agent. It is equivalent to an auxiliary reagent for the enzyme cleaning agent, which is used to further improve the cleaning effect of the enzyme cleaning agent. It is interspersed in the cleaning process of the enzyme cleaning agent. The inner ring edge of the annular gear sleeve 95 is provided with a tooth opening corresponding to the gear head 97, which is used to control the annular gear sleeve 95 to rotate 360 ​​degrees under the rotation of the gear head 97 at the output end of the second servo motor 96.

[0064] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, a bevel gear ring 98 is fixedly connected to the outer ring edge of the annular gear sleeve 95, and a reciprocating extrusion module 99 is configured at the positions on both sides of the second servo motor 96 on the outer side surfaces of the first storage box 92 and the second storage box 93. The reciprocating extrusion module 99 includes a truncated cone gear head 991 movably mounted on the outer side surfaces of the first storage box 92 and the second storage box 93, and the truncated cone gear heads 991 on both sides are meshed and correspond to the bevel gear ring 98.

[0065] Among them, the configured bevel gear ring 98 is an overall 180° ring structure, so only half of the outer surface of the annular gear sleeve 95 has the bevel gear ring 98, and the other half does not have the bevel gear ring 98. That is to say, during the 360-degree rotation of the annular gear sleeve 95, the meshing frustum-shaped gear heads 991 on both sides rotate intermittently, and when the frustum-shaped gear head 991 on one side rotates, the frustum-shaped gear head 991 on the other side does not rotate.

[0066] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, a reciprocating threaded rod 992 is fixedly installed on one side of the truncated cone gear head 991 extending into the interior of the first storage box 92 and the second storage box 93, a sealing card plate 993 is meshingly installed on the outer surface of the reciprocating threaded rod 992, and a sliding groove 994 for the sealing card plate 993 to engage is opened on the inner side surface of the first storage box 92 and the second storage box 93.

[0067] Among them, the reciprocating threaded rod 992 is configured to drive the outer meshing sealing card plate 993 to reciprocate along the slide groove 994 inside the first storage box 92 and the second storage box 93, simulating the injection and aspiration actions of the injection needle in the prior art. In order to ensure the relative sealing of the injection and aspiration actions, the threads of the reciprocating threaded rod 992 are relatively shallow to reduce the opening at the meshing end with the sealing card plate 993. The outer surface of the sealing card plate 993 is tightly attached to the inner wall of the first storage box 92 and the second storage box 93. The length of the reciprocating threaded rod 992 is just enough to control the sealing card plate 993 to reciprocate once when the annular gear sleeve 95 rotates one circle, that is, to just squeeze out and then suck back the liquid stored inside.

[0068] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9As shown, the upper surfaces of the first storage box 92 and the second storage box 93 are fixedly installed with injection sleeves 995, the upper side of the annular shell 91 is movably installed with an outward hinge plate 910, and both sides of the bottom of the annular shell 91 are fixedly installed with extended catheter bins 911, and the bottom of the first storage box 92 and the second storage box 93 is fixedly installed with an extended catheter 912 on one side close to the center of the annular shell 91, and the extended catheter 912 is extended into the semi-circular cavity surrounded by the first annular separation bin 113 and the sealing cover 111 through the extended catheter bin 911.

[0069] The configured extended catheter compartment 911 is communicated with the cavity on one side of the first annular partition compartment 113 to facilitate the extended catheter 912 to extend therein.

[0070] The working principle of the device provided by the present invention is specifically as follows:

[0071] First, during the operation of the vacuum pump body 1, the oil mist generated enters the oil mist treatment chamber 2, and is firstly treated by the primary oil shield 3 to block the large oil mist impurities at this end, and then enters the secondary oil mist filter 4, and the small oil mist particles are filtered out by the filtering effect of the secondary oil mist filter 4, and the oil mist of the small oil mist particles is transported to the interior of the oil mist reflux mechanism 5 for further oil mist treatment;

[0072] When the oil mist enters the interior of the oil mist reflux mechanism 5, since the electric servo telescopic rod 58 is in a retracted state, the top cylinder 117 at the bottom of the partition column 115 pushes the sealing cover 123 downward, and the entered oil mist enters the interior of the oil mist entry sleeve 56 through the leak hole 118 on the outside of the top cylinder 117, and finally enters the side of the second annular partition chamber 114 through the permeable cover 116 on the side of the partition column 115, and is discharged to the outside of the second annular partition chamber 114 after being filtered by the annular filter core sleeve 6 on this side, and is transported to the reflux pipe 53 by the external hose 10 on the outside of the second annular partition chamber 114, and refluxes to the interior of the oil mist treatment chamber 2 through the reflux pipe 53 to continue lubricating the vacuum pump body 1;

[0073] After the annular filter core sleeve 6 on this side has been adsorbed for a long time, when the surface stains need to be cleaned, the output end of the electric servo telescopic rod 58 is extended upward to lift the annular sleeve frame 510 to the upper side of the annular filter core sleeve 6, and then the servo rotation of the output end of the first servo motor 72 is used to control the annular plate 74 to rotate 180 degrees, and the first annular separation chamber 113 originally sleeved on the other side of the unused annular filter core sleeve 6 is turned to the side of the annular filter core sleeve 6 that needs to be cleaned, and then the annular sleeve frame 510 is retracted by the electric servo telescopic rod 58, so that the sealing sleeve cover 111 is re-covered on the upper surface of the tray base 57, and at this time, the cleaning agent replenishing mechanism 9 is aligned with the side of the annular filter core sleeve 6 that needs to be cleaned;

[0074] Then, through the 360-degree rotation of the gear head 97 at the output end of the second servo motor 96, the annular gear sleeve 95 is controlled to rotate synchronously. During the rotation of the annular gear sleeve 95, its bevel gear sleeve ring 98 will first mesh with the truncated cone gear head 991 on one side of the first storage box 92, so that the truncated cone gear head 991 drives the reciprocating threaded rod 992 to rotate, and controls the sealing card plate 993 on the outer side of the reciprocating threaded rod 992 to move back and forth along the slide groove 994, so that the cleaning reagent stored on this side is squeezed through the extended conduit 912 to the opening side of the first annular partition chamber 113 and squeezed to the first annular partition chamber 113. The annular filter core sleeve 6 on the inner wall of the bin 113 is used to suck the squeezed reagent back. Then, when the conical gear ring 98 detects the truncated cone gear head 991 on the outer side of the second storage box 93, the auxiliary reagent in the second storage box 93 is squeezed into the annular filter core sleeve 6 on the inner wall of the first annular separation bin 113 again. This process is repeated in sequence to make the cleaning reagent and the auxiliary reagent reciprocate to wash the annular filter core sleeve 6. This is different from the immersion cleaning in the prior art and can better improve the cleaning efficiency through the dissolution cleaning effect of the reagent. After cleaning, the heating module inside the separation column 115 is used for high-temperature drying to wait for the next use.

[0075] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, but those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail.

[0076] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An oil mist treatment device for a vacuum pump, comprising a vacuum pump body (1), characterized in that: An oil mist treatment chamber (2) is fixedly mounted on the oil mist output end of the side of the vacuum pump body (1); a primary oil shield (3) aligned with the oil mist output end and a secondary oil mist filter (4) are arranged inside the oil mist treatment chamber (2); an oil mist reflux mechanism (5) is arranged on the outer surface of the oil mist treatment chamber (2); The oil mist reflux mechanism (5) comprises a protective outer shell (51), the inner bottom of the protective outer shell (51) is provided with an oil mist inlet sleeve (56) connected to the output end of the secondary oil mist filter (4), the upper surface of the oil mist inlet sleeve (56) is fixedly mounted with a tray base (57), the upper surface of the tray base (57) is provided with two groups of annular filter core sleeves (6), two groups of electric servo telescopic rods (58) are fixedly mounted at the outer edge of the upper surface of the tray base (57), an annular sleeve frame (510) is fixedly mounted on the output end of the electric servo telescopic rod (58), the upper side of the annular sleeve frame (510) is provided with a driving mechanism (7), and the output end of the driving mechanism (7) is provided with a separation module (11) facing the annular filter core sleeve (6); The separation module (11) comprises a sealing sleeve (111), the inner wall of the sealing sleeve (111) being fixedly connected to two groups of partition plates (112) spaced 180 degrees apart, an external hose (10) being arranged on the upper surface of the sealing sleeve (111) at a position on one side of the partition plate (112), and a cleaning agent replenishing mechanism (9) being arranged on the other side, the sealing sleeve (111) being integrally covered on the outside of the annular filter core sleeve (6) via an electric servo telescopic rod (58), and utilizing the separation effect of the partition plate (112) to align one group of the annular filter core sleeves (6) with the cleaning agent replenishing mechanism (9) for soaking and cleaning, and another group of the annular filter core sleeves (6) being aligned with the external hose (10) for continued filtering; The driving mechanism (7) comprises a lifting bent rod (71) fixedly mounted at an outer edge position of an upper surface of a sealing sleeve (111); a first servo motor (72) is fixedly mounted on the outer end of the lifting bent rod (71); an embedded ring sleeve (73) is fixedly mounted on the inner wall of the ring of the ring sleeve frame (510); a circular plate (74) is fixedly mounted on the output end of the first servo motor (72); the circular plate (74) is movably clamped inside the embedded ring sleeve (73); the sealing sleeve (111) is fixedly mounted on the bottom of the circular plate (74); a first circular partition chamber (113) is fixedly connected to the interior of the sealing sleeve (111) at a position on one side of the partition plate (112); and a second circular partition chamber (114) is fixedly connected to the interior of the sealing sleeve (111) at a position on the other side of the partition plate (112); and the surfaces of the first circular partition chamber (113) and the second circular partition chamber (114) are both in an open state; A partition column (115) is fixedly connected at the inner center of the sealing sleeve (111); partition plates (112) on both sides of the inner wall of the sealing sleeve (111) are fixedly connected to the outer surface of the partition column (115); the side of the partition column (115) facing the first circular separation chamber (113) is in a cavity sealed state, and an automatic heating module is arranged in the cavity; the side of the partition column (115) facing the second circular separation chamber (114) is a permeable cover (116); the cavity enclosed between the partition column (115) and the first circular separation chamber (113), and the cavity enclosed between the permeable cover (116) and the second circular separation chamber (114) are respectively used for inserting two groups of circular filter core sleeves (6); A top cylinder (117) is fixedly mounted at the bottom of the partition column (115), the top cylinder (117) being in communication with one side of the second annular partition chamber (114), a plurality of leak holes (118) being sequentially provided on the bottom annular edge of the top cylinder (117), a sealing block module (12) aligned with the top cylinder (117) being arranged at the center of the bottom circle of the tray base (57), the sealing block module (12) comprising a through-port pipe (121), the through-port pipe (121) 21) The whole is a circular cavity structure, and a plurality of tightening spring rods (122) are fixedly installed in the cavity in sequence, and a sealing cover (123) is fixedly installed on the outer side of the tightening spring rod (122). The sealing cover (123) always keeps in close contact with the lower bottom surface of the through-port pipe (121) under the tightening force of the tightening spring rod (122), and a sealing ring (124) is fixedly installed on the contact end between the sealing cover (123) and the lower bottom surface of the through-port pipe (121); A shock absorbing ring (59) is fixedly mounted on the bottom of the circular ring frame (510) and the output end of the electric servo telescopic rod (58); the circular ring filter core sleeve (6) as a whole is composed of two groups of independent circular ring filter core structures; two groups of spring buckles (76) separated by 180 degrees are fixedly mounted on the circular edge of the circular ring frame (510); a circular sleeve plate (75) is fixedly mounted on the side edge of the upper surface of the circular ring plate (74); the circular opening on the surface of the circular sleeve plate (75) is correspondingly sleeved with the spring buckle head (76); a sealing bolt sleeve (52) is fixedly mounted at the center of the bottom circle of the protective outer shell (51) and is rotatably sleeved with the bolt sleeve opening on the outer surface of the oil mist treatment chamber (2); and two groups of detachable maintenance shell plates (54) are sleeved on the outer side surface of the protective outer shell (51).

2. The oil mist treatment device for a vacuum pump according to claim 1, characterized in that: An external hose (10) is fixedly installed on the upper surface of the annular plate (74) at a position on the same side as the second annular partition chamber (114) and passes into the cavity enclosed between the permeable cover (116) and the second annular partition chamber (114), and the other end of the external hose (10) extends outward and is fixedly installed with a second magnetic sealing sleeve (8). Two groups of return pipes (53) are fixedly installed on the inner bottom of the protective outer shell (51) and are aligned with the bottom of the first annular partition chamber (113) and the second annular partition chamber (114), respectively, and each group of return pipes (53) is fixedly installed with a first magnetic sealing sleeve (55) corresponding to the adsorption of the second magnetic sealing sleeve (8). Two groups of interfaces connected to the return pipes (53) are fixedly installed on the outer side surface of the oil mist treatment chamber (2).

3. The oil mist treatment device for a vacuum pump according to claim 2, characterized in that: The cleaning agent replenishing mechanism (9) comprises a fixedly mounted annular casing (91), a first storage box (92) and a second storage box (93) being fixedly mounted at an internal axial position of the annular casing (91), an annular sleeve frame (94) being fixedly mounted on the outer surfaces of the first storage box (92) and the second storage box (93), a annular gear sleeve (95) being movably sleeved on the surface of the annular sleeve frame (94), a second servo motor (96) being fixedly mounted at a middle position of the upper surfaces of the first storage box (92) and the second storage box (93), a gear head (97) being fixedly mounted on the output end of the second servo motor (96), and a tooth opening corresponding to the gear head (97) being meshed is provided on the inner annular edge of the annular gear sleeve (95).

4. The oil mist treatment device for a vacuum pump according to claim 3, characterized in that: A bevel gear sleeve ring (98) is fixedly connected to the outer ring edge of the annular gear sleeve (95), and reciprocating extrusion modules (99) are arranged at positions on both sides of the second servo motor (96) on the outer side surfaces of the first storage box (92) and the second storage box (93), and the reciprocating extrusion modules (99) include a truncated cone gear head (991) movably mounted on the outer side surfaces of the first storage box (92) and the second storage box (93), and the truncated cone gear heads (991) on both sides are meshed and corresponding with the bevel gear sleeve ring (98).

5. The oil mist treatment device for a vacuum pump according to claim 4, characterized in that: A reciprocating threaded rod (992) is fixedly mounted on one side of the truncated cone gear head (991) extending into the interior of the first storage box (92) and the second storage box (93); a sealing clamping plate (993) is meshingly mounted on the outer surface of the reciprocating threaded rod (992); and a sliding groove (994) for the sealing clamping plate (993) to engage is provided on the inner side surfaces of the first storage box (92) and the second storage box (93).

6. The oil mist treatment device for a vacuum pump according to claim 5, characterized in that: The upper surfaces of the first storage box (92) and the second storage box (93) are both fixedly mounted with a material injection sleeve (995); an outward hinge plate (910) is movably mounted on the upper side of the circular ring shell (91); both sides of the bottom of the circular ring shell (91) are both fixedly mounted with an outwardly extending catheter bin (911); and the bottoms of the first storage box (92) and the second storage box (93) are both fixedly mounted with an outwardly extending catheter (912) on one side close to the center of the circular ring shell (91); the outwardly extending catheter (912) extends through the outwardly extending catheter bin (911) into a semicircular ring cavity surrounded by the first circular ring separation bin (113) and the sealing cover (111).

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