Heating equipment for vacuum coating and using method thereof

Abstract

The invention relates to the technical field of vacuum coating, and discloses heating equipment for vacuum coating and a using method thereof.The heating equipment comprises a coating box, a vacuum pump is fixedly installed at the top of the coating box, a circular cavity is formed in the coating box, an inverted-cone-shaped arc groove is formed in the coating box, the inverted-cone-shaped arc groove is communicated with the circular cavity, and the circular cavity is communicated with the vacuum pump; the device further comprises a collecting mechanism, the collecting mechanism comprises a collecting drawer installed in the coating box in a sliding mode, the collecting drawer communicates with the inverted-cone-shaped arc groove, a circular barrel is fixedly installed on the inner wall of the bottom of the circular cavity, an annular plate is rotationally arranged on the outer wall of the circular barrel, and a plurality of L-shaped cleaning plates are fixedly installed at the bottom of the annular plate. Dust and impurities on the inner wall of the bottom of the circular cavity can be swept into the inverted-cone-shaped arc groove through centrifugal force, the impurities can enter the collecting drawer along the inverted-cone-shaped arc groove, the effect of cleaning the dust and impurities in the circular cavity is achieved, and the defect problem that due to the dust and impurities in the circular cavity, the thickness of a film is not uniform, and the defect exists is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to a heating equipment for vacuum coating and a use method thereof. Background Art

[0002] Physical vapor deposition (PVD) technology is a process that uses physical methods to bombard or vaporize the surface of a material source (solid or liquid) into gaseous atoms or molecules under vacuum conditions, and deposits a thin film with certain special functions on the surface of the substrate through the action of an electric field, a magnetic field or plasma. Common vacuum winding coating equipment is a process that coats multiple layers of thin films on the surface of a flexible substrate through vacuum winding coating technology. When a metal wire is brought into contact with an evaporation boat, the metal wire melts and sublimates into metal vapor. When the substrate to be coated is passed over the evaporation boat, the metal vapor is deposited on the surface of the substrate as a thin metal layer.

[0003] When placing the substrate and target material into the coating box, the coating box is in an open state, and dust and impurities in the air will enter the coating box. The vacuum pump cannot remove larger particle impurities during exhaust, so that some particle impurities remain in the coating box. During vacuum coating, the particle impurities will cause uneven film and defects. Summary of the invention

[0004] The object of the present invention is to provide a heating device for vacuum coating and a method of using the same, so as to solve the problem that the vacuum pump cannot remove larger granular impurities during exhaust, so that granular impurities remain in the coating box, and the granular impurities will cause uneven film and defects during vacuum coating.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] The present invention is a heating device for vacuum coating, comprising a coating box, a vacuum pump is fixedly installed on the top of the coating box, a circular cavity is opened in the coating box, an inverted cone arc groove is opened in the coating box, and the inverted cone arc groove is communicated with the circular cavity, and further comprising:

[0007] A collecting mechanism, the collecting mechanism includes a collecting drawer slidably installed in the coating box, the collecting drawer is communicated with the inverted cone arc groove, a circular cylinder is fixedly installed on the bottom inner wall of the circular cavity, and a circular plate is rotatably installed on the outer wall of the circular cylinder, a plurality of L-shaped cleaning plates are fixedly installed on the bottom of the circular plate, and the bottom ends of the plurality of L-shaped cleaning plates are in contact with the bottom inner wall of the circular cavity, a plurality of transmission rectangular plates are fixedly installed on the top of the circular plate, a strip box is arranged in the circular cavity, a transmission spring is fixedly installed on the top inner wall of the strip box, an isosceles trapezoidal block is fixedly installed on the bottom end of the transmission spring, and the bottom end of the isosceles trapezoidal block extends outside the strip box.

[0008] Further, a circular block is rotatably installed in the circular cavity. A conical surface is arranged at the top of the circular block. A plurality of leakage grooves are formed in the circular block. An annular fixing block is fixedly installed at the bottom of the circular block. An L-shaped arc plate is fixedly installed at the bottom of the annular fixing block. A cleaning plate is fixedly installed on the outer wall of the L-shaped arc plate. The cleaning plate is in contact with the inner wall of the circular cavity. The bottom of the L-shaped arc plate is fixedly connected to the strip-shaped box.

[0009] Further, a sealing mechanism is arranged on the coating box. The sealing mechanism includes a sealing block slidably installed on the coating box. A limiting groove is formed in the inner wall of the sealing block. A trapezoidal strip is slidably installed in the circular cylinder. The front end of the trapezoidal strip extends into the limiting groove. A rectangular fixing sleeve is fixedly sleeved on the trapezoidal strip. A sealing spring is sleeved on the trapezoidal strip. The front end of the sealing spring is fixedly connected to the rectangular fixing sleeve. The end of the sealing spring is fixedly connected to the circular cylinder. The end of the trapezoidal strip is hingedly installed with a transmission rod.

[0010] Further, the end of the transmission rod is hingedly installed with a connecting plate. Two round rods are fixedly installed at the top of the connecting plate. The top ends of the two round rods both extend outside the circular cylinder and are both slidably connected to the circular cylinder. The top ends of the two round rods are respectively fixedly installed with U-shaped fixing plates.

[0011] Further, a fixing mechanism is arranged at the top of the circular cylinder. The fixing mechanism includes a placing table fixedly installed at the top of the circular cylinder. A substrate is arranged in the placing table. Two U-shaped fixing rods are fixedly installed on the outer wall of the circular cylinder. A hollow placing table is fixedly installed at one end of the two U-shaped fixing rods close to each other. A target is arranged in the hollow placing table. The two U-shaped fixing plates both penetrate through the hollow placing table and are both slidably connected to the hollow placing table.

[0012] Further, a rotating mechanism is arranged in the circular cavity. The rotating mechanism includes a limiting box fixedly installed in the circular cavity. An L-shaped plate is slidably installed in the limiting box. The left side of the L-shaped plate extends outside the limiting box. A plurality of clamping grooves are formed in the front surface of the L-shaped plate. A rotating shaft is fixedly installed at the top of the circular block. A gear is fixedly sleeved on the outer wall of the rotating shaft. The gear is engaged with a plurality of clamping grooves.

[0013] Further, a reciprocating screw rod is rotatably installed at the bottom of the vacuum pump. The bottom end of the reciprocating screw rod extends into the circular cavity and is rotatably connected to the coating box. A strip-shaped screw plate is threadedly sleeved on the reciprocating screw rod. The two ends of the strip-shaped screw plate respectively extend into the coating box and are slidably connected to the coating box. An L-shaped transmission plate is fixedly installed on the back surface of the strip-shaped screw plate. The bottom end of the L-shaped transmission plate is hingedly installed with an inclined rod. The bottom end of the inclined rod is hingedly connected to the L-shaped plate.

[0014] Further, the method of a heating device for vacuum coating is as follows:

[0015] S1: Before use, the sealing block is slidably mounted on the coating chamber. During the descent of the sealing block, the sealing block will contact the trapezoidal strip, and the trapezoidal strip will move towards the circular cylinder. At this time, the sealing spring will undergo compressive deformation. When the sealing block is installed, the trapezoidal strip will also slide into the limiting groove. Due to the compressive deformation of the sealing spring, the elastic force generated by the sealing spring will hold the sealing block to make the sealing block more firm, improving the airtightness of the coating chamber and preventing dust from entering the circular cavity. During the movement of the trapezoidal strip, it will drive the transmission rod to descend, the transmission rod will drive the connecting plate to descend, the connecting plate will drive the round rod to descend, and the round rod will drive the U-shaped fixing plate to descend. The U-shaped fixing plate will simultaneously fix the target and the substrate;

[0016] S2: Then start the vacuum pump. During the process of the vacuum pump extracting air from the circular cavity, it will drive the reciprocating screw to rotate. The reciprocating screw will drive the strip-shaped screw plate to rotate. The strip-shaped screw plate will reciprocate up and down on the reciprocating screw. When the strip-shaped screw plate descends, it will drive the L-shaped transmission plate to descend. The L-shaped transmission plate will drive the inclined rod to descend. The inclined rod will drive the L-shaped plate to move towards the position close to the rotating shaft. The rotating shaft will rotate under the action of the gear and several card slots. The rotating shaft will drive the circular block to rotate. The circular block will drive the annular fixing block to rotate. The annular fixing block will drive the L-shaped arc plate to rotate. The L-shaped arc plate will drive the cleaning plate to rotate;

[0017] S3: During the operation of the vacuum pump, smaller dust in the circular cavity will be sucked out and discharged, and larger particulate impurities will fall onto the circular block. Due to the repeated reciprocating up and down movement of the strip-shaped screw plate, the corresponding circular block will continuously rotate counterclockwise and clockwise. Since the movement of the strip-shaped screw plate depends on the rotation of the reciprocating screw, at this time, the movement speed of the strip-shaped screw plate is less than the rotation speed of the reciprocating screw. At this time, the rotation speed of the circular block will be less than the rotation speed of the reciprocating screw. At this time, the impurities on the circular block will shake during the continuous slow rotation of the circular block, and the shaken impurities will fall from the surface of the conical surface and along the leakage groove to the inner wall of the bottom of the circular cavity;

[0018] S4: During the rotation of the L-shaped arc plate, it will drive the strip-shaped box to rotate. The strip-shaped box will drive the transmission spring to rotate. The transmission spring will drive the isosceles trapezoidal block to rotate. During the rotation of the isosceles trapezoidal block, it will contact the transmission rectangular plate. The isosceles trapezoidal block will also pass through the transmission rectangular plate through the inclined surface of the isosceles trapezoidal block. At the moment when the isosceles trapezoidal block rotates and contacts the transmission rectangular plate, it will impact the transmission rectangular plate and drive the transmission rectangular plate to rotate. The transmission rectangular plate will drive the annular plate to rotate. The rotation of the annular plate will generate centrifugal force. The centrifugal force will sweep the dust and impurities on the inner wall of the bottom of the circular cavity into the inverted conical arc groove, and the impurities will enter the collection drawer along the inverted conical arc groove.

[0019] The present invention has the following beneficial effects:

[0020] (1) A heating device for vacuum coating according to the present invention. During the rotation of the L-shaped arc plate, the strip-shaped box will be driven to rotate. The strip-shaped box will drive the transmission spring to rotate, and the transmission spring will drive the isosceles trapezoidal block to rotate. During the rotation of the isosceles trapezoidal block, it will contact the transmission rectangular plate. The isosceles trapezoidal block will also pass through the transmission rectangular plate through the inclined surface of the isosceles trapezoidal block. At the moment when the isosceles trapezoidal block rotates and contacts the transmission rectangular plate, it will impact the transmission rectangular plate and drive the transmission rectangular plate to rotate. The transmission rectangular plate will drive the annular plate to rotate. The rotation of the annular plate will generate centrifugal force, and the centrifugal force will sweep the dust and impurities on the inner wall of the bottom of the circular cavity into the inverted conical arc groove. The impurities will enter the collection drawer along the inverted conical arc groove, achieving the effect of cleaning the dust and impurities in the circular cavity, and avoiding problems such as uneven film thickness and defects caused by dust and impurities in the circular cavity;

[0021] (2) A heating device for vacuum coating according to the present invention. Before use, the sealing block is slidably installed on the coating box. During the descent of the sealing block, the sealing block will contact the trapezoidal strip. The trapezoidal strip will move towards the direction close to the circular cylinder. At this time, the sealing spring undergoes compressive deformation. When the installation of the sealing block is completed, the trapezoidal strip will also slide into the limiting groove. Due to the compressive deformation of the sealing spring, the elastic force generated by the sealing spring will顶住 the sealing block to make the sealing block more firm, improving the airtightness of the coating box and avoiding dust from entering the circular cavity. During the movement of the trapezoidal strip, it will drive the transmission rod to descend. The transmission rod drives the connecting plate to descend, the connecting plate drives the round rod to descend, and the round rod drives the U-shaped fixing plate to descend. The U-shaped fixing plate will simultaneously fix the target and the substrate, avoiding the position deviation or dropping of the substrate and the target during the coating process, resulting in unsuccessful coating;

[0022] (3) A heating device for vacuum coating according to the present invention. Then start the vacuum pump. During the process of the vacuum pump extracting the air in the circular cavity, it will drive the reciprocating screw to rotate. The reciprocating screw will drive the strip-shaped screw plate to rotate. The strip-shaped screw plate will move up and down reciprocally on the reciprocating screw. When the strip-shaped screw plate descends, it will drive the L-shaped transmission plate to descend. The L-shaped transmission plate drives the inclined rod to descend, and the inclined rod drives the L-shaped plate to move towards the position close to the rotating shaft. The rotating shaft will rotate under the action of the gear and several card slots. The rotating shaft drives the circular block to rotate, and the circular block will drive the annular fixing block to rotate. The annular fixing block will drive the L-shaped arc plate to rotate, and the L-shaped arc plate will drive the cleaning plate to rotate. The cleaning plate will clean and scrape the dust and impurities on the inner wall of the circular cavity;

[0023] (4) The present invention provides a heating device for vacuum coating. During the operation of the vacuum pump, smaller dust in the circular cavity will be sucked out and discharged, and larger granular impurities will fall onto the circular block. As the strip screw plate repeatedly reciprocates in lifting and lowering, the corresponding circular block will also continuously rotate counterclockwise and clockwise. Since the movement of the strip screw plate depends on the rotation of the reciprocating screw, the movement speed of the strip screw plate is lower than the rotation speed of the reciprocating screw. At this time, the rotation speed of the circular block will be lower than the rotation speed of the reciprocating screw. At this time, the impurities on the circular block will shake during the continuous and slow rotation of the circular block. The shaking impurities will fall from the surface of the conical surface and along the leakage groove to the bottom inner wall of the circular cavity.

[0024] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0026] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0027] Figure 2 It is a partial cross-sectional structural schematic diagram of the present invention;

[0028] Figure 3 It is a front cross-sectional structural schematic diagram of the present invention;

[0029] Figure 4 For the present invention Figure 3 A is a schematic diagram of the enlarged structure of the middle part;

[0030] Figure 5 It is a schematic diagram of the internal structure of the present invention;

[0031] Figure 6 For the present invention Figure 3 Schematic diagram of the enlarged structure of B;

[0032] Figure 7 For the present invention Figure 3 Schematic diagram of the enlarged structure of C;

[0033] Figure 8 It is a schematic diagram of the method steps of the present invention.

[0034] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0035] In the figure: 1, coating chamber; 2, vacuum pump; 3, circular cavity; 4, inverted conical arc groove; 5, collection mechanism; 501, collection drawer; 502, circular cylinder; 503, L-shaped cleaning plate; 504, annular plate; 505, driving rectangular plate; 506, strip box; 507, driving spring; 508, isosceles trapezoidal block; 509, circular block; 510, conical surface; 511, leakage groove; 513, annular fixing block; 514, L-shaped arc plate; 515, cleaning plate; 6, sealing mechanism; 601, sealing block; 602, limiting groove; 603, trapezoidal strip; 604, rectangular fixing sleeve; 605, sealing spring; 606, driving rod; 607, connecting plate; 608, round rod; 609, C-shaped fixing plate; 7, fixing mechanism; 701, placing table; 702, substrate; 703, C-shaped fixing rod; 704, hollow placing table; 705, target; 8, rotating mechanism; 801, limiting box; 802, L-shaped plate; 803, card slot; 804, rotating shaft; 805, gear; 806, reciprocating screw rod; 807, strip-shaped screw plate; 808, L-shaped driving plate; 809, inclined rod. Detailed implementation mode

[0036] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the protection scope of the present invention.

[0037] Please refer to Figure 1 - Figure 8 As shown in the figure, the present invention is a heating device for vacuum coating, including a coating chamber 1. A vacuum pump 2 is fixedly installed on the top of the coating chamber 1. A circular cavity 3 is opened in the coating chamber 1. An inverted conical arc groove 4 is opened in the coating chamber 1. The inverted conical arc groove 4 communicates with the circular cavity 3. It further includes:

[0038] A collection mechanism 5. The collection mechanism 5 includes a collection drawer 501 slidably installed in the coating chamber 1. The collection drawer 501 communicates with the inverted conical arc groove 4. A circular cylinder 502 is fixedly installed on the bottom inner wall of the circular cavity 3. An annular plate 504 is rotatably installed on the outer wall of the circular cylinder 502. A plurality of L-shaped cleaning plates 503 are fixedly installed on the bottom of the annular plate 504. The bottom ends of the plurality of L-shaped cleaning plates 503 are all in contact with the bottom inner wall of the circular cavity 3. A plurality of driving rectangular plates 505 are fixedly installed on the top of the annular plate 504. A strip box 506 is arranged in the circular cavity 3. A driving spring 507 is fixedly installed on the top inner wall of the strip box 506. The bottom end of the driving spring 507 is fixedly installed with an isosceles trapezoidal block 508. The bottom end of the isosceles trapezoidal block 508 extends outside the strip box 506.

[0039] As Figure 3 , Figure 4 and Figure 5 As shown in Figure 3 , Figure 4 and Figure 5 , a circular block 509 is rotatably installed in a circular cavity 3. A conical surface 510 is provided at the top of the circular block 509. A plurality of leakage grooves 511 are formed in the circular block 509. An annular fixing block 513 is fixedly installed at the bottom of the circular block 509. An L-shaped arc plate 514 is fixedly installed at the bottom of the annular fixing block 513. A cleaning plate 515 is fixedly installed on the outer wall of the L-shaped arc plate 514. The cleaning plate 515 is in contact with the inner wall of the circular cavity 3. The bottom of the L-shaped arc plate 514 is fixedly connected to a strip-shaped box 506.

[0040] The circular block 509 will drive the annular fixing block 513 to rotate. The annular fixing block 513 will drive the L-shaped arc plate 514 to rotate. The L-shaped arc plate 514 will drive the cleaning plate 515 to rotate. The cleaning plate 515 will clean and scrape the dust and impurities on the inner wall of the circular cavity 3.

[0041] As Figure 4 and Figure 6 shown in Figure 4 and Figure 6 , a sealing mechanism 6 is provided on the coating box 1. The sealing mechanism 6 includes a sealing block 601 slidably installed on the coating box 1. A limiting groove 602 is formed in the inner wall of the sealing block 601. A trapezoidal strip 603 is slidably installed in a circular cylinder 502. The front end of the trapezoidal strip 603 extends into the limiting groove 602. A rectangular fixing sleeve 604 is fixedly sleeved on the trapezoidal strip 603. A sealing spring 605 is sleeved on the trapezoidal strip 603. The front end of the sealing spring 605 is fixedly connected to the rectangular fixing sleeve 604. The end of the sealing spring 605 is fixedly connected to the circular cylinder 502. The end of the trapezoidal strip 603 is hingedly installed with a transmission rod 606.

[0042] During the downward movement of the sealing block 601, the sealing block 601 will contact the trapezoidal strip 603. The trapezoidal strip 603 will move towards the direction close to the circular cylinder 502. At this time, the sealing spring 605 undergoes a compressive deformation. When the sealing block 601 is installed, the trapezoidal strip 603 will also slide into the limiting groove 602. Due to the compressive deformation of the sealing spring 605, the elastic force generated by the sealing spring 605 will hold the sealing block 601 to make the sealing block 601 more firm, improving the airtightness of the coating box 1 and avoiding dust from entering the circular cavity 3 at the same time.

[0043] As Figure 4 and Figure 7 shown in Figure 4 and Figure 7 , the end of the transmission rod 606 is hingedly installed with a connecting plate 607. Two round rods 608 are fixedly installed at the top of the connecting plate 607. The top ends of the two round rods 608 both extend outside the circular cylinder 502 and are both slidably connected to the circular cylinder 502. The top ends of the two round rods 608 are respectively fixedly installed with U-shaped fixing plates 609.

[0044] During the movement of the trapezoidal bar 603, the transmission rod 606 will be driven to descend. The transmission rod 606 drives the connecting plate 607 to descend, the connecting plate 607 drives the round rod 608 to descend, and the round rod 608 drives the U-shaped fixing plate 609 to descend.

[0045] As Figure 7 shown, a fixing mechanism 7 is provided at the top of the circular cylinder 502. The fixing mechanism 7 includes a placement table 701 fixedly installed at the top of the circular cylinder 502. A base material 702 is provided inside the placement table 701. Two U-shaped fixing rods 703 are fixedly installed on the outer wall of the circular cylinder 502. A hollow placement table 704 is fixedly installed at one end of the two U-shaped fixing rods 703 close to each other. A target material 705 is provided inside the hollow placement table 704. Both U-shaped fixing plates 609 penetrate through the hollow placement table 704 and are slidably connected to the hollow placement table 704.

[0046] The U-shaped fixing plate 609 will fix the target material 705 and the base material 702 at the same time, preventing the position deviation or dropping of the base material 702 and the target material 705 during the coating process, which may cause the coating to fail.

[0047] As Figure 5 shown, a rotating mechanism 8 is provided inside the circular cavity 3. The rotating mechanism 8 includes a limiting box 801 fixedly installed inside the circular cavity 3. An L-shaped plate 802 is slidably installed inside the limiting box 801. The left side of the L-shaped plate 802 extends outside the limiting box 801. A number of card slots 803 are provided on the front surface of the L-shaped plate 802. A rotating shaft 804 is fixedly installed at the top of the circular block 509. A gear 805 is fixedly sleeved on the outer wall of the rotating shaft 804. The gear 805 meshes with a number of card slots 803.

[0048] The rotating shaft 804 will rotate under the action of the gear 805 and a number of card slots 803. The rotating shaft 804 drives the circular block 509 to rotate. The circular block 509 will drive the annular fixing block 513 to rotate, and the annular fixing block 513 will drive the L-shaped arc plate 514 to rotate. The L-shaped arc plate 514 will drive the cleaning plate 515 to rotate, and the cleaning plate 515 will clean and scrape the dust and impurities on the inner wall of the circular cavity 3.

[0049] As Figure 5 shown, a reciprocating screw rod 806 is rotatably installed at the bottom of the vacuum pump 2. The bottom end of the reciprocating screw rod 806 extends into the circular cavity 3 and is rotatably connected to the coating box 1. A strip-shaped screw plate 807 is threadedly sleeved on the reciprocating screw rod 806. Both ends of the strip-shaped screw plate 807 extend into the coating box 1 and are slidably connected to the coating box 1. An L-shaped transmission plate 808 is fixedly installed on the back surface of the strip-shaped screw plate 807. The bottom end of the L-shaped transmission plate 808 is hingedly installed with an inclined rod 809. The bottom end of the inclined rod 809 is hinged to the L-shaped plate 802.

[0050] During the process of the vacuum pump 2 extracting the air in the circular cavity 3, the reciprocating screw 806 will be driven to rotate. The reciprocating screw 806 will drive the strip-shaped screw plate 807 to rotate. The strip-shaped screw plate 807 will move up and down reciprocally on the reciprocating screw 806. When the strip-shaped screw plate 807 descends, it will drive the L-shaped transmission plate 808 to descend. The L-shaped transmission plate 808 drives the inclined rod 809 to descend. The inclined rod 809 drives the L-shaped plate 802 to move towards the position closer to the rotating shaft 804.

[0051] As Figure 1-8 shown, a method for a heating device used in vacuum coating is as follows:

[0052] S1: Before use, the sealing block 601 is slidably installed on the coating box 1. During the process of the sealing block 601 descending, the sealing block 601 will contact the trapezoidal strip 603. The trapezoidal strip 603 will move towards the direction closer to the circular cylinder 502. At this time, the sealing spring 605 undergoes a compressive deformation. When the installation of the sealing block 601 is completed, the trapezoidal strip 603 will also slide into the limiting groove 602. Due to the compressive deformation of the sealing spring 605, the elastic force generated by the sealing spring 605 will hold against the sealing block 601 to make the sealing block 601 more firm, improving the airtightness of the coating box 1 and at the same time preventing dust from entering the circular cavity 3. During the movement of the trapezoidal strip 603, it will drive the transmission rod 606 to descend. The transmission rod 606 drives the connecting plate 607 to descend. The connecting plate 607 drives the round rod 608 to descend. The round rod 608 drives the U-shaped fixing plate 609 to descend. The U-shaped fixing plate 609 will simultaneously fix the target 705 and the substrate 702.

[0053] S2: Then start the vacuum pump 2. During the process of the vacuum pump 2 extracting the air in the circular cavity 3, the reciprocating screw 806 will be driven to rotate. The reciprocating screw 806 will drive the strip-shaped screw plate 807 to rotate. The strip-shaped screw plate 807 will move up and down reciprocally on the reciprocating screw 806. When the strip-shaped screw plate 807 descends, it will drive the L-shaped transmission plate 808 to descend. The L-shaped transmission plate 808 drives the inclined rod 809 to descend. The inclined rod 809 drives the L-shaped plate 802 to move towards the position closer to the rotating shaft 804. The rotating shaft 804 will rotate under the action of the gear 805 and several card slots 803. The rotating shaft 804 drives the circular block 509 to rotate. The circular block 509 will drive the annular fixing block 513 to rotate. The annular fixing block 513 will drive the L-shaped arc plate 514 to rotate. The L-shaped arc plate 514 will drive the cleaning plate 515 to rotate.

[0054] S3: During the operation of the vacuum pump 2, the smaller dust in the circular cavity 3 will be sucked out and discharged, and the larger particle impurities will fall onto the circular block 509. As the strip screw plate 807 repeatedly reciprocates and lifts, the corresponding circular block 509 will also continuously rotate counterclockwise and clockwise. Since the movement of the strip screw plate 807 depends on the rotation of the reciprocating screw 806, the movement speed of the strip screw plate 807 is lower than the rotation speed of the reciprocating screw 806. At this time, the rotation speed of the circular block 509 is lower than the rotation speed of the reciprocating screw 806. At this time, the impurities on the circular block 509 will shake during the continuous and slow rotation of the circular block 509. The shaking impurities will fall from the surface of the conical surface 510 and along the leakage groove 511 onto the bottom inner wall of the circular cavity 3;

[0055] S4: During the rotation of the L-shaped arc plate 514, the strip box 506 will be driven to rotate, and the strip box 506 will drive the transmission spring 507 to rotate, and the transmission spring 507 will drive the isosceles trapezoidal block 508 to rotate. During the rotation, the isosceles trapezoidal block 508 will contact the transmission rectangular plate 505, and the isosceles trapezoidal block 508 will also pass through the transmission rectangular plate 505 through the inclined surface of the isosceles trapezoidal block 508. At the moment when the isosceles trapezoidal block 508 rotates and contacts the transmission rectangular plate 505, it will hit the transmission rectangular plate 505 and drive the transmission rectangular plate 505 to rotate, and the transmission rectangular plate 505 will drive the annular plate 504 to rotate. The rotation of the annular plate 504 will generate centrifugal force, and the centrifugal force will sweep the dust and impurities on the bottom inner wall of the circular cavity 3 into the inverted conical arc groove 4, and the impurities will enter the collection drawer 501 along the inverted conical arc groove 4.

[0056] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A heating device for vacuum coating, comprising a coating box (1), a vacuum pump (2) fixedly mounted on the top of the coating box (1), a circular cavity (3) provided in the coating box (1), an inverted conical arc groove (4) provided in the coating box (1), the inverted conical arc groove (4) communicating with the circular cavity (3), characterized in that: Further included are: A collecting mechanism (5), the collecting mechanism (5) includes a collecting drawer (501) slidably installed in the coating box (1), the collecting drawer (501) communicates with the inverted conical arc groove (4), a circular cylinder (502) is fixedly installed on the bottom inner wall of the circular cavity (3), an annular plate (504) is rotatably installed on the outer wall of the circular cylinder (502), a plurality of L-shaped cleaning plates (503) are fixedly installed on the bottom of the annular plate (504), the bottom ends of the plurality of L-shaped cleaning plates (503) are all in contact with the bottom inner wall of the circular cavity (3), a plurality of driving rectangular plates (505) are fixedly installed on the top of the annular plate (504), a strip-shaped box (506) is arranged in the circular cavity (3), a driving spring (507) is fixedly installed on the top inner wall of the strip-shaped box (506), an isosceles trapezoidal block (508) is fixedly installed at the bottom end of the driving spring (507), and the bottom end of the isosceles trapezoidal block (508) extends outside the strip-shaped box (506).

2. The heating device for vacuum coating according to claim 1, characterized in that: A circular block (509) is rotatably installed in the circular cavity (3), a conical surface (510) is arranged on the top of the circular block (509), a plurality of leakage grooves (511) are formed in the circular block (509), an annular fixing block (513) is fixedly installed at the bottom of the circular block (509), an L-shaped arc plate (514) is fixedly installed at the bottom of the annular fixing block (513), a cleaning plate (515) is fixedly installed on the outer wall of the L-shaped arc plate (514), the cleaning plate (515) is in contact with the inner wall of the circular cavity (3), and the bottom of the L-shaped arc plate (514) is fixedly connected to the strip-shaped box (506).

3. The heating device for vacuum coating according to claim 2, characterized in that: A sealing mechanism (6) is arranged on the coating box (1), the sealing mechanism (6) includes a sealing block (601) slidably installed on the coating box (1), a limiting groove (602) is formed in the inner wall of the sealing block (601), a trapezoidal strip (603) is slidably installed in the circular cylinder (502), the front end of the trapezoidal strip (603) extends into the limiting groove (602), a rectangular fixing sleeve (604) is fixedly sleeved on the trapezoidal strip (603), a sealing spring (605) is sleeved on the trapezoidal strip (603), the front end of the sealing spring (605) is fixedly connected to the rectangular fixing sleeve (604), the end of the sealing spring (605) is fixedly connected to the circular cylinder (502), and the end of the trapezoidal strip (603) is hingedly installed with a transmission rod (606).

4. The heating device for vacuum coating according to claim 3, characterized in that: The end of the transmission rod (606) is hingedly installed with a connecting plate (607), two round rods (608) are fixedly installed on the top of the connecting plate (607), the top ends of the two round rods (608) both extend outside the circular cylinder (502) and are both slidably connected to the circular cylinder (502), and U-shaped fixing plates (609) are respectively fixedly installed at the top ends of the two round rods (608).

5. The heating device for vacuum coating according to claim 4, characterized in that: A fixing mechanism (7) is provided at the top of the circular cylinder (502). The fixing mechanism (7) includes a placement table (701) fixedly installed at the top of the circular cylinder (502). A base material (702) is arranged in the placement table (701). Two U-shaped fixing rods (703) are fixedly installed on the outer wall of the circular cylinder (502). A hollow placement table (704) is fixedly installed at one end of the two U-shaped fixing rods (703) close to each other. A target material (705) is arranged in the hollow placement table (704). Both of the two U-shaped fixing plates (609) penetrate through the hollow placement table (704) and are slidably connected to the hollow placement table (704).

6. The heating device for vacuum coating according to claim 5, characterized in that: A rotating mechanism (8) is arranged in the circular cavity (3). The rotating mechanism (8) includes a limit box (801) fixedly installed in the circular cavity (3). An L-shaped plate (802) is slidably installed in the limit box (801). The left side of the L-shaped plate (802) extends outside the limit box (801). A plurality of card slots (803) are formed in the front surface of the L-shaped plate (802). A rotating shaft (804) is fixedly installed at the top of the circular block (509). A gear (805) is fixedly sleeved on the outer wall of the rotating shaft (804). The gear (805) is engaged with the plurality of card slots (803).

7. The heating device for vacuum coating according to claim 6, characterized in that: A reciprocating screw rod (806) is rotatably installed at the bottom of the vacuum pump (2). The bottom end of the reciprocating screw rod (806) extends into the circular cavity (3) and is rotatably connected to the coating box (1). A strip-shaped screw plate (807) is sleeved on the reciprocating screw rod (806). The two ends of the strip-shaped screw plate (807) respectively extend into the coating box (1) and are slidably connected to the coating box (1). An L-shaped transmission plate (808) is fixedly installed on the back surface of the strip-shaped screw plate (807). An inclined rod (809) is hingedly installed at the bottom end of the L-shaped transmission plate (808). The bottom end of the inclined rod (809) is hinged to the L-shaped plate (802).

8. A method for using a heating device for vacuum coating, using the heating device for vacuum coating as claimed in claim 7, characterized in that: The method steps are as follows: S1: Before use, slide the sealing block (601) onto the coating chamber (1). During the descent of the sealing block (601), the sealing block (601) will come into contact with the trapezoidal bar (603), and the trapezoidal bar (603) will move towards the direction close to the circular cylinder (502). At this time, the sealing spring (605) undergoes compressive deformation. When the installation of the sealing block (601) is completed, the trapezoidal bar (603) will also slide into the limit groove (602). Due to the compressive deformation of the sealing spring (605), the elastic force generated by the sealing spring (605) will hold against the sealing block (601) to make the sealing block (601) more firm, improving the tightness of the coating chamber (1) and preventing dust from entering the circular cavity (3). During the movement of the trapezoidal bar (603), it will drive the transmission rod (606) to descend, the transmission rod (606) drives the connecting plate (607) to descend, the connecting plate (607) drives the round rod (608) to descend, the round rod (608) drives the U-shaped fixing plate (609) to descend, and the U-shaped fixing plate (609) will fix the target material (705) and the substrate (702) simultaneously; S2: Then start the vacuum pump (2). During the process of the vacuum pump (2) extracting the air in the circular cavity (3), it will drive the reciprocating screw rod (806) to rotate. The reciprocating screw rod (806) will drive the strip-shaped screw plate (807) to rotate. The strip-shaped screw plate (807) will reciprocate up and down on the reciprocating screw rod (806). When the strip-shaped screw plate (807) descends, it will drive the L-shaped transmission plate (808) to descend. The L-shaped transmission plate (808) drives the inclined rod (809) to descend. The inclined rod (809) drives the L-shaped plate (802) to move towards the position close to the rotating shaft (804). The rotating shaft (804) will rotate under the action of the gear (805) and several card slots (803). The rotating shaft (804) drives the circular block (509) to rotate. The circular block (509) will drive the annular fixing block (513) to rotate. The annular fixing block (513) will drive the L-shaped arc plate (514) to rotate. The L-shaped arc plate (514) will drive the cleaning plate (515) to rotate; S3: During the operation of the vacuum pump (2), the smaller dust in the circular cavity (3) will be sucked out and discharged, and the larger particulate impurities will fall onto the circular block (509). Due to the repeated reciprocating up and down movement of the strip-shaped screw plate (807), the corresponding circular block (509) will also continuously rotate counterclockwise and clockwise repeatedly. Since the movement of the strip-shaped screw plate (807) depends on the rotation of the reciprocating screw rod (806), at this time, the movement speed of the strip-shaped screw plate (807) is less than the rotation speed of the reciprocating screw rod (806). At this time, the rotation speed of the circular block (509) will be less than the rotation speed of the reciprocating screw rod (806). The impurities on the circular block (509) will shake during the continuous slow rotation of the circular block (509), and the shaking impurities will fall from the surface of the conical surface (510) and along the leakage groove (511) to the bottom inner wall of the circular cavity (3); S4: During the rotation of the L-shaped arc plate (514), the bar box (506) is driven to rotate, the bar box (506) is driven to rotate the transmission spring (507), the transmission spring (507) is driven to rotate the isosceles trapezoidal block (508), the isosceles trapezoidal block (508) is contacted with the transmission rectangular plate (505) during the rotation, and the isosceles trapezoidal block (508) is also passed through the transmission rectangular plate (505) via the inclined surface of the isosceles trapezoidal block (508). When the shaped block (508) rotates and contacts the transmission rectangular plate (505), it will hit the transmission rectangular plate (505) and drive the transmission rectangular plate (505) to rotate. The transmission rectangular plate (505) will drive the annular plate (504) to rotate. The rotation of the annular plate (504) will generate centrifugal force. The centrifugal force will sweep the dust and impurities on the inner wall of the bottom of the circular cavity (3) into the inverted conical arc groove (4). The impurities will enter the collection bin (501) along the inverted conical arc groove (4).

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