Multi-modal field negative hydrogen ion source and method of conditioning thereof

Abstract

The application provides a multi-peak field negative hydrogen ion source and a regulating method thereof, a filtering magnet is connected to a ring rotating flange, the built-in and external modes of the filtering magnet are flexibly adjusted by adjusting the ring rotating flange, the filtering magnet can be replaced by replacing the ring rotating flange, the intensity and brightness of the extracted beam of the multi-peak field negative hydrogen ion source are greatly improved under the condition that other structures and parameters remain unchanged, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion source, in particular to a multi-peak field negative hydrogen ion source and a method for adjusting the same. BACKGROUND

[0002] The existing ion source has three main negative hydrogen ion extinction channels when generating negative hydrogen ions, namely mutual neutralization, electron desorption and recombination desorption process. The ion source in the related art can inhibit the "electron desorption" process to a certain extent by using the filtering magnetic field of the extraction zone, but there is no good solution to the above three extinction processes, which becomes a bottleneck restricting the further development of the current ion source extraction beam intensity and brightness, and is also a disadvantage of the existing ion source. SUMMARY

[0003] The present application aims to at least solve one of the technical problems in the related art. To this end, the present application provides a multi-peak field negative hydrogen ion source and a method for adjusting the same.

[0004] In order to achieve the above object, in a first aspect, the present application provides a multi-peak field negative hydrogen ion source, the multi-peak field negative hydrogen ion source comprising a discharge cavity assembly and a particle extraction assembly, the discharge cavity assembly being connected with the particle extraction assembly through a first insulator; one end of the discharge cavity assembly away from the particle extraction assembly is provided with an ion source filament, the ion source filament being connected with a voltage source, the ion source filament emitting electrons under the action of the voltage source, the electrons being used to bombard hydrogen gas in the discharge cavity to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen gas molecules and high-speed hydrogen gas molecules; one end of the discharge cavity assembly close to the particle extraction assembly is provided with an annular rotating flange, an inner ring of the annular rotating flange being detachably provided with a filtering magnet, the filtering magnet being used to form a filtering magnetic field, the filtering magnetic field being used to make the motion of the high-temperature electrons and the low-speed hydrogen gas molecules deviate and then be filtered out, and to extract the low-temperature electrons and the high-speed hydrogen gas molecules; wherein the annular rotating flange is configured to rotate in a tangential direction of the discharge cavity assembly, and the filtering magnet is configured to be adjusted in position in the inner ring of the annular rotating flange; the low-temperature electrons and the high-speed hydrogen gas molecules form a negative hydrogen ion beam in the process of being extracted; the extraction assembly comprises an extraction partition plate and an extraction electrode, the extraction partition plate and the extraction electrode being connected through a second insulator, the extraction partition plate being provided with a first extraction hole, the extraction electrode being provided with a second extraction hole, the first extraction hole and the second extraction hole being coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode.

[0005] In addition, the multi-peak field negative hydrogen ion source according to the above embodiments of the present application can also have the following additional technical features:

[0006] As an optional embodiment, the size of the annular rotating flange and the filtering magnet can be adjusted.

[0007] As an optional embodiment, the discharge cavity assembly further comprises:

[0008] The cylindrical chamber wall comprises an inner cavity wall, an outer cavity wall, and a permanent magnet array arranged between the inner cavity wall and the outer cavity wall;

[0009] The permanent magnet array is used to form a confinement magnetic field for spatially confining the high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules, and high-speed hydrogen molecules generated in the discharge cavity.

[0010] As an optional embodiment, the cylindrical chamber wall further comprises:

[0011] The water circulation inner cavity is arranged around the permanent magnet array and is used to contain cooling water to cool the permanent magnet array.

[0012] As an optional embodiment, the discharge cavity assembly further comprises:

[0013] The cover plate is arranged at the end of the discharge cavity assembly away from the particle extraction assembly, and the ion source filament is arranged on the side of the cover plate facing the discharge cavity.

[0014] As an optional embodiment, the cover plate is further provided with an air inlet channel for providing hydrogen gas for the discharge cavity.

[0015] As an optional embodiment, the filtering magnets are arranged at the inner ring of the annular rotating flange plate at a predetermined interval, and the polarities of any two filtering magnets symmetrically arranged about the center of the annular rotating flange plate are opposite.

[0016] As an optional embodiment, the extraction electrode is used to adsorb the high-temperature electrons and low-speed hydrogen molecules whose motion has deviated, and accelerate the extraction negative hydrogen ion beam.

[0017] In a second aspect, the present application provides a method for adjusting a multi-peak field negative hydrogen ion source, which is applied to the multi-peak field negative hydrogen ion source as described above, and the method comprises:

[0018] Adjusting the size of the annular rotating flange plate according to the target requirement;

[0019] Or / and, adjusting the position of the annular rotating flange plate;

[0020] Or / and, adjusting the position of the filtering magnets arranged on the annular rotating flange plate.

[0021] In addition, the method for adjusting the multi-peak field negative hydrogen ion source according to the above-mentioned embodiments of the present application can further have the following additional technical features:

[0022] As an optional embodiment, adjusting the position of the annular rotating flange plate further comprises:

[0023] The annular rotating flange is rotated in the tangential direction of the discharge chamber component to change the position of the filter magnet relative to the discharge chamber, thereby adjusting the magnetic field direction of the filter magnetic field.

[0024] As can be seen from the above, the present invention provides a multi-peak field negative hydrogen ion source and a regulation method thereof, the multi-peak field negative hydrogen ion source includes a discharge chamber component and a particle extraction component, the discharge chamber component and the particle extraction component are connected by a first insulator; an ion source filament is provided at one end of the discharge chamber component away from the particle extraction component, the ion source filament is externally connected to a voltage source, and the ion source filament emits electrons under the action of the voltage source, and the electrons are used to bombard the hydrogen in the discharge chamber to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; an annular rotating flange is provided at one end of the discharge chamber component close to the particle extraction component, and a filtering magnet is detachably provided on the inner ring of the annular rotating flange, and the filtering magnet is used to form a filtering magnetic field, and the filtering magnetic field is used to filter the magnetic field. The invention is used to deviate the motion of high-temperature electrons and low-speed hydrogen molecules and filter them out, and to extract low-temperature electrons and high-speed hydrogen molecules; wherein, the annular rotating flange is constructed to allow the tangential direction of the extended discharge chamber assembly to rotate, and the filtering magnet is constructed to allow the setting position to be adjusted on the inner ring of the annular rotating flange; the low-temperature electrons and high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction component includes an extraction partition and an extraction electrode, the extraction partition and the extraction electrode are connected by a second insulator, a first extraction hole is provided on the extraction partition, a second extraction hole is provided on the extraction electrode, and the first extraction hole and the second extraction hole are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode. The multi-peak field negative hydrogen ion source proposed in the present invention connects the filtering magnet to an annular rotating flange. The internal and external positioning of the filtering magnet can be flexibly adjusted by adjusting the annular rotating flange. The filtering magnet can also be replaced by replacing the annular rotating flange. When other structures and parameters remain unchanged, the intensity and brightness of the beam extracted by the multi-peak field negative hydrogen ion source are greatly improved, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

[0025] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 A cross-sectional structure schematic diagram of a multi-peak field negative hydrogen ion source provided for an embodiment of the present application.

[0028] Figure 2 A schematic diagram of a ring-shaped rotating flange provided for an embodiment of the present application.

[0029] Figure 3 A functional area schematic diagram of a multi-peak field negative hydrogen ion source provided for an embodiment of the present application.

[0030] Figure 4 A flowchart of a regulating method of a multi-peak field negative hydrogen ion source provided for an embodiment of the present application.

[0031] Reference signs:

[0032] The discharge cavity assembly 1, the particle extraction assembly 2, the first insulator 3, the cylindrical chamber wall 4, the inner cavity wall 4-1, the outer cavity wall 4-2, the permanent magnet array 4-3, the cover plate 5, the ion source filament 6, the gas inlet channel 7, the voltage source 8, the discharge cavity 9, the ring-shaped rotating flange 10, the filtering magnet 11, the extraction partition 12, the first extraction hole 12-1, the second insulator 13, the extraction electrode 14, the second extraction hole 14-1, the high-temperature area a, the filtering area b, and the low-temperature area c. DETAILED DESCRIPTION

[0033] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application is further described in detail below with reference to specific embodiments and the accompanying drawings.

[0034] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present application should be understood as the common meanings understood by those with ordinary skills in the art to which the present application belongs. The terms "first", "second", and similar terms used in the present application do not represent any order, number, or importance, but are only used to distinguish different components. The terms "include" or "contain" and similar terms mean that the elements or objects before the terms encompass the elements or objects listed after the terms and their equivalents, without excluding other elements or objects. The terms "connect" or "connected" and similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms "upper", "lower", "left", "right", and the like only represent relative positional relationships, which can change when the absolute positions of the described objects change.

[0035] As described in the background section, there are three main channels for the loss of negative hydrogen ions in the existing ion source, namely mutual neutralization, electron desorption and recombination desorption processes. The ion source in the related art has no good solution to the above three loss processes except that the filtering magnetic field of the extraction region can inhibit the "electron desorption" process to some extent, which becomes a bottleneck restricting the further development of the extraction beam intensity and brightness of the current ion source, and is also a disadvantage of the existing ion source. In order to solve the damage of high-energy electrons to the formed negative hydrogen ions, a transverse filtering magnetic field is usually arranged in the extraction region of the multi-peak field negative hydrogen ion source, which can allow low-temperature electrons to diffuse through while preventing high-temperature electrons from diffusing to the extraction region. The structure of the multi-peak magnet is very compact, which is conducive to improving the plasma confinement effect of the magnetic field, but due to its compactness, the space left for the design of the transverse filtering magnetic field is limited. Moreover, this structure usually needs to maintain the relative position between the fan-shaped magnetic blocks by some means, such as bonding or adding fixtures, and it is difficult to adjust the structure once it is assembled.

[0036] The applicant found in the process of implementing the present application that the electron binding energy of the negative hydrogen ions is very small (about 0.75 eV) during the operation of the multi-peak field negative hydrogen ion source, so it is very easy to be damaged by high-energy electrons. In order to reduce the electron temperature, reduce the loss of negative hydrogen ions and reduce the accompanying electrons, a filtering magnetic field needs to be introduced. The filtering magnet can be built-in or external, the main problem of the built-in type is the cooling and damage of the magnet, and the main difficulty of the external type is the design and processing of the magnetic field.

[0037] There is no certain technical solution for the selection of the built-in or external filtering magnetic field in the related art. Some related technologies use a built-in filtering magnetic field, and the arc current intensity extracted from the ion source outlet can reach 41 mA. The advantages of this scheme are simple and compact structure, and the magnet is closer to the reaction ions, which can better inhibit low-energy electrons, but the magnet is severely damaged by ion impact and needs better water cooling design. Some related technologies place the filtering magnet side by side near the Cusp field type magnet, which has the advantages that the external magnet is not affected by ion impact, and the position of the magnet can be relatively easily adjusted to change the magnetic field distribution, but the external magnet needs more space, which may increase the volume of the entire device, the magnetic field generated by the external magnet decays faster in space, and the uniformity problem in space distribution gradually appears, resulting in that the magnetic field at the center of the extraction region is too small, and the extraction beam density of the negative hydrogen ions is reduced.

[0038] As described above, good filtering magnetic field parameters can not only increase the extraction beam density of the negative hydrogen ion source, but also effectively inhibit the electrons extracted together, so it is necessary to optimize the design of the structure of the filtering magnetic field.

[0039] The technical solutions of the present application are further described in detail below through specific examples.

[0040] Ion source refers to a device or apparatus that can convert neutral matter into charged ions. These ions are commonly used in laboratory instruments such as ion beam processing, electron microscopes, mass spectrometers, etc. The role of the ion source is to generate a highly directional, high-energy ion beam, which has characteristics that make it very widely used in the fields of materials science, surface physics, chemistry, biology, etc.

[0041] The multi-peak field negative hydrogen ion source, also known as the Cusp ion source, is a special form of magnetic field distribution. In a static magnetic field, the motion of electrons is affected by the magnetic field, while the CUSP magnetic field has a unique magnetic field distribution characteristic, which makes the magnetic field strength or direction in certain areas have a specific rule. This magnetic field is usually generated by a specific magnet configuration or electromagnetic device.

[0042] The negative hydrogen ion extinction channel mainly includes mutual neutralization, electron desorption and recombination desorption processes, among which mutual neutralization is one of the main ways of negative hydrogen ion extinction. The mutual neutralization process refers to the process in which negative hydrogen ions collide with positive ions (such as H+) and change into neutral particles (such as H2) through charge exchange. In this process, the negative hydrogen ions and positive ions capture each other's opposite charges, thereby changing into an electrically neutral state. The electron desorption process refers to the process in which negative hydrogen ions collide with electrons, causing the negative hydrogen ions to lose electrons and change into neutral hydrogen atoms. In this process, the collision of negative hydrogen ions with electrons leads to charge separation, and the negative hydrogen ions lose negative charges and become neutral. The recombination desorption process refers to the process in which negative hydrogen ions collide with hydrogen atoms or other neutral particles, and change into other neutral substances through charge transfer or chemical reaction. In this process, the collision of negative hydrogen ions with neutral particles leads to charge redistribution or the formation of chemical bonds, thereby changing into new neutral substances.

[0043] Reference Figure 1 is a schematic diagram of the cross-sectional structure of the multi-peak field negative hydrogen ion source.

[0044] The multi-peak field negative hydrogen ion source 100 provided by the embodiment of the present application comprises: a discharge cavity assembly 1 and a particle extraction assembly 2, the discharge cavity assembly 1 and the particle extraction assembly 2 are connected through a first insulator 3; the discharge cavity assembly 1 is provided with an ion source filament 6 at one end away from the particle extraction assembly 2, the ion source filament 6 is connected with a voltage source 8, the ion source filament 6 emits electrons under the action of the voltage source 8, the electrons are used for bombarding hydrogen in a discharge cavity 9 to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; the discharge cavity assembly 1 is provided with an annular rotating flange 10 at one end close to the particle extraction assembly 2, an inner ring of the annular rotating flange 10 is detachably provided with a filtering magnet 11, the filtering magnet 11 is used for forming a filtering magnetic field, the filtering magnetic field is used for causing the movement of the high-temperature electrons and the low-speed hydrogen molecules to be deviated and then filtered out, and the low-temperature electrons and the high-speed hydrogen molecules are extracted; wherein the annular rotating flange 10 is configured to rotate in the tangential direction of the discharge cavity assembly 1, and the filtering magnet 11 is configured to be adjusted and arranged in the inner ring of the annular rotating flange 10; the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam in the process of being extracted; the extraction assembly 2 comprises an extraction partition plate 12 and an extraction electrode 14, the extraction partition plate 12 and the extraction electrode 14 are connected through a second insulator 13, the extraction partition plate 12 is provided with a first extraction hole 12-1, the extraction electrode 14 is provided with a second extraction hole 14-1, and the first extraction hole 12-1 and the second extraction hole 14-1 are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole 12-1 and the second extraction hole 14-1 under the action of the extraction electrode 14.

[0045] The discharge cavity assembly 1 and the particle extraction assembly 2 are connected through the first insulator 3. This connection mode ensures the electrical isolation between the discharge cavity assembly 1 and the particle extraction assembly 2, prevents the direct conduction of the current, and thus guarantees the normal operation and safety of the multi-peak field negative hydrogen ion source 100.

[0046] Reference Figure 2 The annular rotating flange provided by the embodiment of the present application is shown in the figure.

[0047] In the embodiment of the present application, the annular rotating flange 10 is usually made of high-strength and corrosion-resistant materials to ensure its stable operation in a harsh plasma environment. The structure mainly comprises an annular body, and a plurality of mounting holes or slots are arranged on the inner ring of the body for mounting and fixing the filtering magnet 11. In addition, the annular rotating flange 10 also has a rotating mechanism to allow it to rotate in the tangential direction of the discharge cavity assembly 1, so as to adjust the relative position of the filtering magnet. The tangential direction of the discharge cavity assembly 1 is perpendicular to the axial direction of the discharge cavity assembly 1.

[0048] Furthermore, one of the main functions of the annular rotating flange 10 is to support and fix the filter magnet. Through reasonable design and layout, the filter magnet 11 can be firmly mounted on the inner ring of the annular rotating flange 10 to ensure that it will not loosen or fall off during operation. Since the annular rotating flange 10 can rotate along the tangential direction of the discharge chamber assembly 1, the relative position of the filter magnet 11 can be easily adjusted, thereby changing the distribution and intensity of the filter magnetic field. This adjustment capability is crucial for optimizing the generation and confinement process of ions. During the extraction process of the negative hydrogen ion beam, the annular rotating flange 10 and the extraction assembly 2 work together to ensure that the negative hydrogen ion beam can efficiently pass through the extraction holes (first extraction hole 12-1, second extraction hole 14-1) and be extracted. By adjusting the position and angle of the annular rotating flange 10, the purpose of optimizing the extraction efficiency and directionality of the ions is achieved.

[0049] In addition to supporting the filter magnet 11, the annular rotating flange 10 can also be designed with other features as needed to achieve additional functions. For example, an adjustment mechanism (not shown) can be provided on the annular rotating flange 10 to adjust the position and angle of the filter magnet 11 to optimize the ion filtering effect. Alternatively, a sensor and monitoring device (not shown) can be provided on the annular rotating flange 10 to monitor the ion status and filtering effect in real time.

[0050] As an optional embodiment, the filtering magnets 11 are arranged on the inner ring of the annular rotating flange 10 at preset intervals, and the polarities of any two filtering magnets 11 that are symmetrical about the center of the annular rotating flange 10 are opposite.

[0051] Specifically, the filtering magnets 11 are arranged at predetermined intervals and polarities on the annular rotating flange 10. This arrangement can form a specific magnetic field distribution, thereby effectively confining and filtering the negative hydrogen ion beam.

[0052] In addition, when adapting the discharge chamber component 1 and the particle extraction component 2, the size, quantity, position and polarity of the annular rotating flange 10 can be set according to actual needs. Similarly, the configuration and effect of the filtering magnetic field can be further optimized by adjusting the size, quantity, position and polarity of the filtering magnet 11.

[0053] As an optional embodiment, the discharge chamber assembly 1 also includes: a cylindrical chamber wall 4, the cylindrical chamber wall 4 includes an inner chamber wall 4-1, an outer chamber wall 4-2, and a permanent magnet array 4-3 arranged around the inner chamber wall 4-1 and the outer chamber wall 4-2; the permanent magnet array 4-3 is used to form a confining magnetic field, and the confining magnetic field is used to spatially confine high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules generated in the discharge chamber 9.

[0054] In the design of the multi-modal field negative hydrogen ion source 100 of the embodiments of the present application, the structure of the discharge cavity assembly 1 plays a crucial role in the processes of ion generation, confinement, and extraction. It is shaped like a "barrel". The cylindrical chamber wall 4 of the discharge cavity assembly 1 is the main part of the discharge cavity, which provides the physical space required for ion generation and confinement. The cylindrical chamber wall 4 is composed of multiple parts, including the inner cavity wall 4-1, the outer cavity wall 4-2, and the permanent magnet array 4-3 arranged between the inner cavity wall 4-1 and the outer cavity wall 4-2. Among them, the inner cavity wall 4-1 is the inner surface of the cylindrical chamber wall 4, which directly faces the inner space of the discharge cavity 9. The material selection and design of the inner cavity wall 4-1 have important influence on the efficiency of ion generation and confinement. In specific implementations, the inner cavity wall 4-1 usually adopts materials with high electrical conductivity and high corrosion resistance to ensure that excessive impurities and pollutants are not generated during the discharge process. The outer cavity wall 4-2 is the outer surface of the cylindrical chamber wall 4, which mainly plays the role of protection and support. The material and structure of the outer cavity wall 4-2 are usually more solid and durable than those of the inner cavity wall 4-1 to withstand the high temperature and high pressure environment generated during the discharge process. The permanent magnet array 4-3 is a key component in the discharge cavity assembly 1, which is arranged around the inner cavity wall 4-1 and the outer cavity wall 4-2. The main role of the permanent magnet array 4-3 is to generate a confinement magnetic field, which spatially confines the high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules, and high-speed hydrogen molecules generated in the discharge cavity. The confinement magnetic field generated by the permanent magnet array 4-3 can affect the motion trajectory of the particles in the discharge cavity 9, so that these particles are limited within a certain spatial range under the action of the confinement magnetic field. This confinement effect helps to reduce the loss and escape of ions, and improves the efficiency and stability of ion generation.

[0055] In addition, each permanent magnet in the permanent magnet array 4-3 has a clear magnetic pole direction. In the embodiment of the present application, these magnetic pole directions are usually designed to alternate with each other to form a specific magnetic field distribution. For example, adjacent permanent magnets can have opposite magnetic pole directions, thereby generating a magnetic field gradient between them. This magnetic field gradient helps to guide the movement trajectory of ions within the discharge cavity 9 and enhances the confinement of ions. The number and spacing of permanent magnets in the permanent magnet array 4-3 can be determined according to the size and shape of the discharge cavity and the required magnetic field strength. Increasing the number of permanent magnets or reducing the spacing between them can enhance the strength and uniformity of the magnetic field. The permanent magnets in the permanent magnet array 4-3 need to be firmly fixed within the cylindrical chamber wall 4 of the discharge cavity assembly 1, which can be achieved through specific mounting structures or clamps. These mounting structures or clamps need to be able to withstand the high temperature and high pressure environment generated during the discharge process and ensure that the permanent magnets do not loosen or fall off during long-term operation. Further, the permanent magnet array 4-3 can also have a magnetic field adjustment function, which can be achieved by changing the relative position of the permanent magnets, the magnetic pole direction, or adding additional magnetic field adjustment elements. By adjusting the confinement magnetic field distribution and strength, the ion generation and confinement process can be further optimized, and the ion generation efficiency and stability can be improved.

[0056] As can be seen, the ion generation process can be further optimized by adjusting parameters such as the arrangement of the permanent magnet array 4-3, the magnetic pole direction, and the magnetic field strength. For example, by increasing the strength of the confinement magnetic field and changing the magnetic pole direction of the permanent magnet array 4-3, the confinement of ions can be enhanced, thereby improving the ion generation density and purity.

[0057] As an optional embodiment, the cylindrical chamber wall 4 further comprises a water circulation inner cavity 4-4, which is arranged around the permanent magnet array 4-3 and is used to contain cooling water to cool the permanent magnet array 4-3.

[0058] Specifically, in the design of the discharge chamber assembly 1, in order to ensure that the permanent magnet array 4-3 can maintain stable performance during long-term operation, especially in the case of high load or continuous work, effective temperature control of the permanent magnet array 4-3 is crucial. Therefore, in the embodiment of the present application, the cylindrical chamber wall 4 is further designed to contain a water circulation inner cavity 4-4, which is designed to reduce the temperature of the permanent magnet array 4-3 by circulating cooling water. The water circulation inner cavity 4-4 is arranged around the permanent magnet array 4-3, forming a cooling channel around the permanent magnet array. This design ensures that the cooling water can uniformly flow through each part of the permanent magnet array 4-3, effectively removing the heat generated during the generation and maintenance of the magnetic field. The cooling water circulates in the water circulation inner cavity 4-4, which mainly absorbs and removes the heat generated by the permanent magnet array 4-3. By keeping the temperature of the permanent magnet array 4-3 within a suitable range, the stability of its magnetic properties can be ensured, preventing performance degradation or damage due to overheating. In addition, a stable temperature environment also helps to improve the overall performance and reliability of the discharge chamber assembly.

[0059] Further, the water circulation system can include a cooling water source, a water pump, a radiator (or heat exchanger), and connecting pipes and other components (not shown in the figure). After being pumped by the water pump, the cooling water is pressurized and sent into the water circulation inner cavity 4-4. After flowing through the permanent magnet array 4-3, the cooling water that has absorbed heat is guided to the radiator for cooling, and then returns to the water source through the pipe, forming a complete circulation.

[0060] It should be noted that when designing the water circulation inner cavity 4-4, the size, shape and cooling effect of the permanent magnet array can be considered according to actual needs. At the same time, the sealing and reliability of the water circulation system need to be ensured to prevent cooling water leakage from damaging the discharge chamber assembly.

[0061] As an optional embodiment, the discharge chamber assembly 1 further comprises a cover plate 5, which is arranged at the end of the discharge chamber assembly 1 away from the particle extraction assembly 2, and the ion source filament 6 is arranged on the side of the cover plate 5 facing the discharge chamber 9.

[0062] Specifically, the cover plate 5 is arranged at the end of the discharge chamber assembly 1 away from the particle extraction assembly 2, which mainly serves to close one end of the discharge chamber 9, preventing external impurities and pollutants from entering the interior of the discharge chamber. At the same time, the cover plate 5 also provides a platform for mounting and fixing other components (such as the ion source filament 6).

[0063] When the discharge chamber assembly 1 begins operation, the ion source filament 6 is heated, generating electrons. These electrons are accelerated by the electric field and injected into the discharge chamber 9. Within the discharge chamber, the electrons collide with hydrogen molecules, ionizing them and generating negative hydrogen ions. These negative hydrogen ions are then confined within the discharge chamber by a confining magnetic field until they are effectively extracted by the particle extraction assembly 2.

[0064] It should be noted that when designing the cover plate 5 and ion source filament 6, the size and shape of the discharge chamber, as well as the desired ion generation efficiency, must be comprehensively considered. Furthermore, it is necessary to ensure the sealing and insulation between the cover plate 5 and the ion source filament 6 to prevent arcing and short circuiting during the discharge process.

[0065] As an optional embodiment, the cover plate 5 is further provided with an air inlet channel 7 , and the air inlet channel 7 is used to provide hydrogen to the discharge chamber 9 .

[0066] Specifically, in the design of the discharge chamber assembly 1, in order to ensure that ions can be continuously and stably generated in the discharge chamber, it is necessary to provide sufficient reaction gas (such as hydrogen) in the discharge chamber 9. In an embodiment of the present invention, the cover plate 5 is further designed to include an air inlet channel 7. This design is intended to optimize the supply method of hydrogen and improve the generation efficiency of ions. Through the air inlet channel 7, hydrogen can be continuously and stably introduced into the discharge chamber 9. This supply method can ensure that a suitable hydrogen concentration is always maintained in the discharge chamber 9, thereby optimizing the generation efficiency of ions. In actual applications, hydrogen can be supplied by external equipment such as gas cylinders and gas pipelines (not shown in the figure) and enters the discharge chamber through the air inlet channel 7.

[0067] In addition to providing hydrogen to the discharge chamber 9, the gas inlet channel 7 may also be designed with other features based on actual needs to achieve additional functions. For example, a filter device (not shown) may be provided in the gas inlet channel 7 to remove impurities and contaminants in the hydrogen; or a flow control device (not shown) may be provided to regulate the flow of hydrogen entering the discharge chamber.

[0068] It should be noted that when designing the air inlet channel 7, the size and shape of the discharge chamber 9 and the required hydrogen flow rate need to be comprehensively considered. At the same time, the air inlet channel 7 needs to be sealed and smooth to prevent hydrogen leakage or blockage.

[0069] As an optional embodiment, the extraction electrode 14 is used to absorb high-temperature electrons and low-speed hydrogen molecules whose motion is deviated, and accelerate and extract the negative hydrogen ion beam.

[0070] Specifically, in the multi-peak field negative hydrogen ion source device, effectively extracting the negative hydrogen ion beam is one of the keys to achieve its high performance. In order to achieve this goal, it is necessary to accurately control the motion trajectory of the ions, and at the same time remove the particles that may have a negative impact on the quality of the ion beam. In the embodiment of the present application, the extraction electrode 14 is designed to adsorb high-temperature electrons whose motion deviates and low-speed hydrogen molecules, and accelerate the extraction of the negative hydrogen ion beam, thereby improving the purity and energy of the ion beam. During the discharge process, a part of high-temperature electrons will be generated, and the energy of these electrons is high, which may interfere with the stability and directionality of the ion beam. The extraction electrode 14 can effectively adsorb these high-temperature electrons through its special material structure and potential configuration, thereby reducing their influence on the ion beam. In addition to ions, there will also be a part of low-speed hydrogen molecules in the discharge cavity. If these molecules are not removed, they may collide with the ions, causing scattering and energy loss of the ion beam. The extraction electrode 14 can exclude this part of low-speed hydrogen molecules from the ion beam through its electric field effect, thereby maintaining the purity of the ion beam. On the basis of completing the above two functions, the extraction electrode 14 also undertakes the task of accelerating the extraction of the negative hydrogen ion beam. The extraction electrode 14 designed in the present application can provide a strong acceleration force for the negative hydrogen ions, so that they can efficiently leave the discharge cavity 9 and enter the subsequent analysis, processing or application link. In order to achieve effective adsorption and exclusion of high-temperature electrons and low-speed hydrogen molecules, the extraction electrode 14 can be made of materials with excellent electrical conductivity and heat resistance.

[0071] In addition, the extraction electrode 14 can also be functionally extended according to actual needs. For example, a sensor (not shown in the figure) can be provided on the extraction electrode 14 to monitor the state and performance of the ion beam in real time; or by adjusting the potential and shape of the extraction electrode 14, further optimization of the directionality and focusing of the ion beam can be achieved.

[0072] As can be seen from the above, the multi-peak field negative hydrogen ion source provided by the application comprises a discharge cavity assembly and a particle extraction assembly, the discharge cavity assembly and the particle extraction assembly are connected through a first insulator; an ion source filament is arranged at one end of the discharge cavity assembly away from the particle extraction assembly, an external voltage source is connected to the ion source filament, the ion source filament emits electrons under the action of the voltage source, the electrons are used to bombard hydrogen in the discharge cavity to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; a ring-shaped rotating flange is arranged at one end of the discharge cavity assembly close to the particle extraction assembly, an inner ring of the ring-shaped rotating flange is detachably provided with a filtering magnet, the filtering magnet is used to form a filtering magnetic field, the filtering magnetic field is used to offset the movement of the high-temperature electrons and the low-speed hydrogen molecules and then filter them out, and the low-temperature electrons and the high-speed hydrogen molecules are extracted; wherein the ring-shaped rotating flange is configured to rotate in the tangential direction of the discharge cavity assembly, and the filtering magnet is configured to be adjusted in position in the inner ring of the ring-shaped rotating flange; the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction assembly comprises an extraction partition plate and an extraction electrode, the extraction partition plate and the extraction electrode are connected through a second insulator, a first extraction hole is arranged on the extraction partition plate, a second extraction hole is arranged on the extraction electrode, and the first extraction hole and the second extraction hole are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode. The multi-peak field negative hydrogen ion source provided by the application connects the filtering magnet to the ring-shaped rotating flange, adjusts the built-in and external modes of the filtering magnet by adjusting the ring-shaped rotating flange, and can replace the filtering magnet by replacing the ring-shaped rotating flange, thereby greatly improving the intensity and brightness of the extracted beam of the multi-peak field negative hydrogen ion source under the condition that other structures and parameters remain unchanged, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

[0073] Corresponding to the above embodiment, the application further provides a method for adjusting the multi-peak field negative hydrogen ion source.

[0074] The method for adjusting the multi-peak field negative hydrogen ion source provided by the application will be specifically described below through specific embodiments.

[0075] Reference Figure 3 The multi-peak field negative hydrogen ion source provided by the application is a functional area schematic diagram.

[0076] According to the above content, the multi-peak field negative hydrogen ion source 100 provided by the application is suitable for generating and extracting high-purity hydrogen negative ions. Among them, in order to facilitate understanding, the unique design of the filtering magnet 11 can be considered to cleverly divide the discharge cavity 9 and the extraction assembly 2 into three functional areas, namely high-temperature area a, filtering area b and low-temperature area c, to realize efficient generation, filtering and extraction of ions.

[0077] Reference Figure 4 The adjustment method flowchart of the multi-peak field negative hydrogen ion source provided by the embodiment of the present application.

[0078] In the process of using the multi-peak field negative hydrogen ion source, the working gas (hydrogen) is introduced into the discharge cavity 9 at the initial part of the discharge cavity 9, i.e. the high-temperature region a. After the voltage source 8 is applied to the ion source filament 6, electrons are released. These electrons collide with H2 molecules, causing them to oscillate rapidly. In this region, there are low-speed H2 molecules, rapidly oscillating H2 molecules, high-temperature electrons e- and low-temperature electrons e- (the influence of other particles at this stage is small and can be ignored).

[0079] The filtering region is the core part of the multi-peak field negative hydrogen ion source. The filtering magnet 11 is connected with the detachable and rotatable annular rotating flange 10, forming a flexible filtering system. The parameters (such as position, thickness, magnetic field strength, etc.) of the filtering magnet 11 are optimized and designed to increase the extracted beam current density of the hydrogen negative ion source and effectively suppress the accompanying electrons.

[0080] In specific implementation, by rotating the annular rotating flange 10, the angle of the filtering magnet 11 can be conveniently adjusted. This is crucial for finding the optimal hydrogen negative ion beam current intensity. The annular rotating flange 10 can be easily detached, facilitating the replacement of the filtering magnet 11 in terms of size, thickness and adjustment of magnetic field strength and other parameters. Through repeated experiments, the magnet parameters that can make the hydrogen negative ion beam current intensity reach the maximum can be found. By using annular rotating flanges 10 of different sizes, the position of the filtering magnet 11 can be further adjusted to be farther away from the central region. Although this will result in a decrease in the magnetic field strength, it can prolong the service life of the filtering magnet and allow more ions to pass through the filtering region. Different intensities of hydrogen negative ion beams can be obtained in this way.

[0081] At the end of the discharge cavity 9, i.e. the low-temperature region, the main particles are low-temperature electrons e- and rapidly oscillating H2 molecules. The two collide in this region to produce the required H- ions. The more H- ions there are, the greater the final hydrogen negative ion beam current intensity will be.

[0082] The structural innovation of the multi-peak field negative hydrogen ion source of the present application lies in the flexible filtering magnet and the detachable annular rotating flange design. This not only makes the adjustment of the parameters of the filtering magnet simple and fast, but also significantly improves the generation and extraction efficiency of H- ions under the premise of ensuring the stable operation of the ion source, thereby enhancing the hydrogen negative ion beam current intensity.

[0083] In the embodiment of the present application, the adjustment method flowchart of the multi-peak field negative hydrogen ion source can be summarized as follows:

[0084] Step S401, first by the inlet channel to the discharge cavity into hydrogen, voltage source ion source lamp emitting electrons, further, step S402, electron bombardment of hydrogen in the discharge cavity, produce high temperature electrons, low temperature electrons, low speed hydrogen molecules and high speed hydrogen molecules, step S403, high temperature electrons, low temperature electrons, low speed hydrogen molecules and high speed hydrogen molecules through the filtering magnetic field, at this time, step S404, according to the passing of the ion beam to determine the filtering effect of the filtering magnet is optimal, step S407, if the filtering effect reaches the preset requirements, then the low temperature electrons and high speed hydrogen molecules form negative hydrogen ion beam, control the extraction of negative hydrogen ion beam, step S405, if the filtering effect does not reach the preset requirements, then execute step S4051, can delay the discharge cavity assembly tangential direction rotation ring rotating flange to change the position of the filtering magnet, or / and, execute step S4052, adjust the size of the filtering magnet and the magnetic field strength, or / and, execute step S4053, adjust the size of the ring rotating flange to change the distance between the filtering magnet and the center area, step S406, further to confirm whether the filtering effect of the filtering magnet is optimal, step S407, if the filtering effect reaches the preset requirements, then the low temperature electrons and high speed hydrogen molecules form negative hydrogen ion beam, step S408, control the extraction of negative hydrogen ion beam.

[0085] It can be seen from the above that the application provides a multi-peak field negative hydrogen ion source adjusting method. The multi-peak field negative hydrogen ion source comprises a discharge cavity assembly and a particle extraction assembly, the discharge cavity assembly is connected with the particle extraction assembly through a first insulator; an ion source filament is arranged at one end of the discharge cavity assembly away from the particle extraction assembly, an external voltage source is connected to the ion source filament, the ion source filament emits electrons under the action of the voltage source, the electrons are used for bombarding hydrogen in the discharge cavity to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; a ring-shaped rotating flange is arranged at one end of the discharge cavity assembly close to the particle extraction assembly, an inner ring of the ring-shaped rotating flange is detachably provided with a filtering magnet, the filtering magnet is used for forming a filtering magnetic field, the filtering magnetic field is used for causing the movement of the high-temperature electrons and the low-speed hydrogen molecules to be deviated and then filtered out, and the low-temperature electrons and the high-speed hydrogen molecules are extracted; wherein the ring-shaped rotating flange is configured to rotate in the tangential direction of the discharge cavity assembly, and the filtering magnet is configured to be adjusted and arranged in the inner ring of the ring-shaped rotating flange; the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam in the process of being extracted; the extraction assembly comprises an extraction partition plate and an extraction electrode, the extraction partition plate and the extraction electrode are connected through a second insulator, the extraction partition plate is provided with a first extraction hole, the extraction electrode is provided with a second extraction hole, and the first extraction hole and the second extraction hole are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode. The multi-peak field negative hydrogen ion source provided by the application connects the filtering magnet to the ring-shaped rotating flange, adjusts the built-in and external modes of the filtering magnet by adjusting the ring-shaped rotating flange, and can replace the filtering magnet by replacing the ring-shaped rotating flange, thereby greatly improving the intensity and brightness of the extracted beam of the multi-peak field negative hydrogen ion source under the condition that other structures and parameters remain unchanged, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

[0086] It should be noted that, unless otherwise defined, technical terms or scientific terms used in the embodiments of the application shall have the usual meaning understood by a person skilled in the art to which the embodiments of the application belong. The terms "first", "second" and similar terms used in the embodiments of the application do not represent any order, number or importance, but are only used to distinguish different components. The terms "include" or "contain" and similar terms mean that the elements or objects before the terms cover the elements or objects listed after the terms and their equivalents, and do not exclude other elements or objects. The terms "connect" or "connected" and similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms "up", "down", "left", "right" and the like only represent relative positional relationships, which can change accordingly when the absolute positions of the described objects change.

[0087] While the principles and spirit of the application have been described with reference to several specific embodiments, it is to be understood that the application is not limited to the specific embodiments disclosed, and that the division of the aspects is not meant to imply that features from these aspects cannot be combined to benefit, but is merely for ease of presentation. The application is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the claims appended hereto. The scope of the claims appended is to be construed in the broadest sense to encompass all such modifications and equivalent structures and functions.

Claims

1. A multi-peak field negative hydrogen ion source, characterized in that: It comprises a discharge chamber component (1) and a particle extraction component (2), wherein the discharge chamber component (1) and the particle extraction component (2) are connected via a first insulator (3); An ion source filament (6) is provided at one end of the discharge chamber component (1) away from the particle extraction component (2), and the ion source filament (6) is externally connected to a voltage source (8). Under the action of the voltage source (8), the ion source filament (6) emits electrons, and the electrons are used to bombard hydrogen in the discharge chamber (9) to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules, and high-speed hydrogen molecules; The discharge chamber component (1) is provided with an annular rotating flange (10) at one end close to the particle extraction component (2); the inner ring of the annular rotating flange (10) is detachably provided with a filtering magnet (11); the filtering magnet (11) is used to form a filtering magnetic field, and the filtering magnetic field is used to cause the movement of the high-temperature electrons and the low-speed hydrogen molecules to deviate and be filtered out, and to extract the low-temperature electrons and the high-speed hydrogen molecules; wherein the annular rotating flange (10) is configured to allow rotation along the tangential direction of the discharge chamber component (1), and the filtering magnet (11) is configured to allow adjustment of the setting position on the inner ring of the annular rotating flange (10); the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; The extraction assembly (2) comprises an extraction partition (12) and an extraction electrode (14); the extraction partition (12) and the extraction electrode (14) are connected via a second insulator (13); a first extraction hole (12-1) is provided on the extraction partition (12); a second extraction hole (14-1) is provided on the extraction electrode (14); the first extraction hole (12-1) and the second extraction hole (14-1) are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole (12-1) and the second extraction hole (14-1) under the action of the extraction electrode (14).

2. The multi-peak field negative hydrogen ion source according to claim 1, characterized in that: Also includes: The sizes of the annular rotating flange (10) and the filtering magnet (11) are adjustable.

3. The multi-peak field negative hydrogen ion source according to claim 2, characterized in that: The discharge chamber assembly (1) further comprises: A cylindrical chamber wall (4), the cylindrical chamber wall (4) comprising an inner chamber wall (4-1), an outer chamber wall (4-2), and a permanent magnet array (4-3) disposed between the inner chamber wall (4-1) and the outer chamber wall (4-2); The permanent magnet array (4-3) is used to form a confining magnetic field, and the confining magnetic field is used to spatially confine the high-temperature electrons, the low-temperature electrons, the low-speed hydrogen molecules, and the high-speed hydrogen molecules generated in the discharge chamber (9).

4. The multi-peak field negative hydrogen ion source according to claim 3, characterized in that: The cylindrical chamber wall (4) further comprises: A water circulation inner cavity (4-4) is arranged around the permanent magnet array (4-3) and is used to contain cooling water to cool the permanent magnet array (4-3).

5. The multi-peak field negative hydrogen ion source according to claim 4, characterized in that: The discharge chamber assembly (1) further comprises: A cover plate (5) is provided at one end of the discharge chamber component (1) away from the particle extraction component (2), and the ion source filament (6) is provided on a side of the cover plate (5) facing the discharge chamber (9).

6. The multi-peak field negative hydrogen ion source according to claim 5, characterized in that: The cover plate (5) is further provided with an air inlet channel (7), and the air inlet channel (7) is used to provide hydrogen to the discharge chamber (9).

7. The multi-peak field negative hydrogen ion source according to claim 6, characterized in that: The filtering magnets (11) are arranged on the inner ring of the annular rotating flange (10) at preset intervals, and any two filtering magnets (11) that are symmetrical about the center of the annular rotating flange (10) have opposite polarities.

8. The multi-peak field negative hydrogen ion source according to claim 7, characterized in that: The extraction electrode (14) is used to absorb the high-temperature electrons and the low-speed hydrogen molecules whose motion is deviated, and to accelerate and extract the negative hydrogen ion beam.

9. A method for regulating a multi-peak field negative hydrogen ion source, characterized in that: Applied to the multi-peak field negative hydrogen ion source according to any one of claims 1 to 8, the method comprises: Adjust the size of the annular rotating flange according to target needs; or / and, adjusting the position of the annular rotating flange; Or / and, adjusting the position of the filter magnet on the annular rotating flange.

10. The method for adjusting the multi-peak field negative hydrogen ion source according to claim 9, characterized in that: The adjusting the position of the annular rotating flange further comprises: The annular rotating flange is rotated in a tangential direction extending from the discharge chamber component to change the position of the filtering magnet relative to the discharge chamber, thereby adjusting the magnetic field direction of the filtering magnetic field.

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