Rotating disc type chip conveying device

By designing a chip pickup assembly with limit slots and magnetic suction blocks in the rotary chip transport device, the problem of disengagement and rotation of the suction nozzle rod caused by rotation is solved, and the stable clamping and precise position of the suction rod is achieved, and the processing is improved Efficiency and precision.

CN119297129AActive Publication Date: 2025-01-10STELIGHT INSTR CO LTD
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Patent Information

Application Number
CN202311022830.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-08-15
Publication Date
2025-01-10
Estimated Expiration
2043-08-15

AI Technical Summary

Technical Problem

In a rotary chip transport device, centrifugal force generated by rotation causes the nozzle rod to disengage and rotate, affecting processing efficiency and accuracy, and increasing the clamping force will lead to rapid wear.

Method used

A chip pickup assembly including a vertical support frame, a base, a suction rod, a clamping bar, a limit slot, a magnetic suction block and a magnetic suction column is designed. The suction rod is ensured by a combination of a limit slot and a magnetic suction block. The clamping strip does not rotate in the vertical direction, and the stability of the clamping strip is maintained with the magnetic suction block and magnetic suction column, and the limit bearing and spring provide a stable and uniform clamping force.

Benefits of technology

It effectively avoids interference from the rotation of the turntable to the suction rod, maintains the stable state and position accuracy of the suction rod, improves clamping force, and reduces wear of the components.

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Abstract

The invention discloses a rotating disc type chip conveying device which comprises a rotating disc and chip picking assemblies installed on the edge of the rotating disc at equal intervals in the circumferential direction. The chip picking assembly further comprises a vertical supporting frame, a base installed on the front side of the vertical supporting frame, a suction rod vertically installed on the side, away from the vertical supporting frame, of the base and a clamping strip horizontally arranged above the base, and a limiting groove extending vertically is formed in the front end face of the base. The left side and the right side of the limiting groove allowing the suction rod to be embedded are provided with a left inclined face and a right inclined face respectively, a containing groove is formed in the surface of one side of the rear end of the clamping strip, a magnetic suction block is installed in the containing groove in an embedded mode, and a magnetic suction column matched with the magnetic suction block is installed on the portion, located on the outer side of the magnetic suction block, of the upper surface of the base. According to the invention, the bad interference of the rotation of the turntable on the suction rod can be effectively avoided while the displacement of the suction rod in the vertical direction is not influenced, so that the suction rod is always kept in a stable state and the position precision is accurate.
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Description

Technical Field

[0001] The invention relates to a turntable chip conveying device, belonging to the technical field of semiconductor chip pasting and testing. Background Art

[0002] In the semiconductor industry, both the production and use of chips require chip testing and chip mounting. During these two processes, a chip sorting machine is needed to move the chips to the appropriate location for testing or mounting.

[0003] The invention patent CN116344432A previously applied for by the applicant discloses a chip picking and placing mechanism, a mounting hole is provided on the front end surface of the main body, one end of a horizontally arranged pressure holding seat is embedded in the mounting hole, the other end of the pressure holding seat is located outside the main body and a pressure holding bearing is vertically installed thereon, a through hole is provided on the upper surface of the pressure holding seat and between the pressure holding bearing and the main body for a vertically arranged suction nozzle rod to pass through, one end of the pressure holding seat located in the mounting hole is connected to the main body by a pressure holding spring in a stretched state, so that the outer ring surface of the pressure holding bearing is tightly fitted with the suction nozzle rod, thereby realizing the clamping of the suction nozzle rod.

[0004] However, when the chip pick-and-place mechanism is used in a turntable chip transport device, the following problems are likely to occur when the turntable rotates: (1) The centrifugal force generated by the rotation will cause the nozzle rod to tend to detach outward, and it will take a long time for the nozzle rod to return to a stable state after the rotation stops, affecting the efficiency and accuracy of the processing; (2) The potential energy of the rotation will also cause the clamping bar to tend to rotate, thereby affecting the state stability of the nozzle rod installed thereon. In addition, if the centrifugal force is overcome by increasing the clamping force on the nozzle rod, it will interfere with the vertical movement of the nozzle rod, resulting in rapid wear of various components. Summary of the invention

[0005] The purpose of the present invention is to provide a turntable chip transport device, which can effectively avoid the adverse interference of the turntable rotation on the suction rod without affecting the vertical displacement of the suction rod, so that the suction rod always maintains a stable state and accurate position accuracy.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a turntable chip transport device, comprising: a turntable and a chip picking assembly installed at the edge of the turntable at equal intervals along the circumferential direction, the chip picking assembly further comprising: a vertical support frame, a base installed on the front side of the vertical support frame, a suction rod installed vertically on the side of the base away from the vertical support frame, and a clamping bar horizontally arranged above the base, the front end of the clamping bar extends to the side away from the vertical support frame and is clamped and connected with the upper end of the suction rod; The front end surface of the base is provided with a vertically extending limit groove, and the left and right sides of the limit groove for the suction rod to be embedded in are respectively provided with a left inclined surface and a right inclined surface, and the symmetrically arranged left inclined surface and right inclined surface each extend forward away from one end of the limit groove, and the left inclined surface is provided with two left bearings arranged at intervals in the vertical direction, and the right inclined surface is provided with two right bearings symmetrically arranged with the left bearing. The front end surface of the base is provided with a horizontally extending mounting groove, and a movable block is embedded in the mounting groove and slidably cooperates with the inner side wall of the mounting groove, and a limit bearing is vertically installed at the front end of the movable block, and a spring in an extrusion state is connected between the rear end of the movable block and the bottom surface of the mounting groove, so that the suction rod embedded in the limit groove is in extrusion contact with the limit bearing, the left bearing and the right bearing; A accommodating groove is provided on one side surface of the rear end of the clamping strip, and a magnetic block is embedded and installed in the accommodating groove. A magnetic column cooperating with the magnetic block is installed on the upper surface of the base and located on the outer side of the magnetic block. The outer surface of the magnetic block is flush with the side surface of the clamping strip, and a gap is set between the magnetic column and the magnetic block. A second limit bearing is installed on the rear end surface of the clamping strip, and a first limit column and a second limit column are respectively arranged on both sides of the second limit bearing. The first limit column located on the same side as the magnetic column is in close contact with the second limit bearing, and the second limit column located on the other side is spaced apart from the second limit bearing.

[0007] The further improved scheme in the above technical scheme is as follows: 1. In the above solution, the gap between the magnetic block and the magnetic column is 0.1~0.5mm.

[0008] 2. In the above solution, the gap between the second limit column and the second limit bearing is 0.2~1.0mm.

[0009] 3. In the above solution, a groove is provided on the rear end surface of the movable block for the front end of the spring to be embedded in.

[0010] 4. In the above solution, a pin is installed on the movable block, and a strip hole for the pin to be embedded is provided on the base, and the strip hole extends back and forth in the horizontal direction.

[0011] 5. In the above solution, a suction nozzle is installed at the lower end of the suction rod.

[0012] 6. In the above solution, the rear surface of the vertical support frame is installed on a connecting seat through at least one set of slide rails and sliders, and the lower part of the connecting seat is installed on the upper surface of the turntable.

[0013] 7. In the above solution, the vertically extending slide rail is fixedly installed on the connecting seat, and the sliding block slidably matched with the slide rail is fixedly connected to the rear surface of the vertical support frame.

[0014] 8. In the above scheme, a horizontal support plate is installed on the top of the connecting seat, one end of the horizontal support plate is connected to the connecting seat, and the other end of the horizontal support plate extends to the top of the vertical support frame. A return spring is installed on each of the left and right sides of the horizontal support plate, and the upper end of the vertically extended return spring is connected to the horizontal support plate, and the lower end thereof is connected to the vertical support frame.

[0015] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art: The turntable chip transport device of the present invention has a vertically extending limit groove on the front end surface of the base, and the left and right sides of the limit groove for the suction rod to be embedded in are respectively provided with a left inclined surface and a right inclined surface, and the symmetrically arranged left inclined surface and right inclined surface each extend forward away from one end of the limit groove, and two left bearings arranged at intervals in the vertical direction are installed on the left inclined surface, and two right bearings symmetrically arranged with the left bearing are installed on the right inclined surface, and a horizontally extending installation groove is provided on the front end surface of the base, and a movable block is embedded in the installation groove and slidably cooperates with the inner side wall of the installation groove, and a limit bearing is vertically installed at the front end of the movable block, and a spring in an extrusion state is connected between the rear end of the movable block and the bottom surface of the installation groove, so that the suction rod embedded in the limit groove is in extrusion contact with the limit bearing, the left bearing and the right bearing, and one side of the rear end of the clamping strip A accommodating groove is provided on the surface, and a magnetic block is embedded and installed in the accommodating groove. A magnetic column matching the magnetic block is installed on the upper surface of the base and on the outer side of the magnetic block. The outer surface of the magnetic block is flush with the side surface of the clamping strip, and a gap is set between the magnetic column and the magnetic block. A second limiting bearing is installed on the rear end surface of the clamping strip, and a first limiting column and a second limiting column are respectively arranged on both sides of the second limiting bearing. The first limiting column located on the same side as the magnetic column is in close contact with the second limiting bearing, and the second limiting column located on the other side is spaced apart from the second limiting bearing. The clamping strip and the suction rod installed on the clamping strip are limited from both ends, which can effectively avoid the adverse interference of the turntable rotation on the suction rod without affecting the vertical displacement of the suction rod, so that the suction rod always maintains a stable state and accurate position accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Attached Figure 1 It is a schematic diagram of the overall structure of the turntable chip conveying device of the present invention; Attached Figure 2 It is a structural schematic diagram of a chip picking assembly of a turntable chip transport device of the present invention; Attached Figure 3 For attachment Figure 2 Schematic diagram of the cross section along AA; Attached Figure 4 It is a partial structural schematic diagram of the turntable chip conveying device of the present invention; Attached Figure 5 For attachment Figure 4 Schematic diagram of the cross section along BB; Attached Figure 6 It is a schematic structural diagram of the base of the turntable chip transport device of the present invention.

[0017] In the above drawings: 1. base; 2. suction rod; 3. clamping strip; 4. limiting groove; 51. left inclined surface; 52. right inclined surface; 61. left bearing; 62. right bearing; 7. mounting groove; 8. movable block; 9. limiting bearing; 10. spring; 11. pin; 12. bar hole; 13. suction nozzle; 14. turntable; 15. chip picking assembly; 16. vertical support frame; 171. slide rail; 172. slider; 18. connecting seat; 19. horizontal support plate; 20. reset spring; 21. connecting column; 22. accommodating groove; 231. magnetic suction block; 232. magnetic suction column; 24. second limiting bearing; 251. first limiting column; 252. second limiting column; 26. vertical spring. Implementation

[0018] The present invention can be further understood through the specific embodiments given below, but they are not intended to limit the present invention.

[0019] Embodiment 1: A turntable chip transport device comprises: a turntable 14 and a chip pickup assembly 15 installed at an edge of the turntable 14 at equal intervals along the circumferential direction, wherein the chip pickup assembly 15 further comprises: a vertical support frame 16, a base 1 installed on the front side of the vertical support frame 16, a suction rod 2 vertically installed on the side of the base 1 away from the vertical support frame 16, and a clamping bar 3 horizontally arranged above the base 1, wherein the front end of the clamping bar 3 extends to the side away from the vertical support frame 16 and is clamped and connected with the upper end of the suction rod 2; A vertically extending limiting groove 4 is provided on the front end surface of the base 1, and the left and right sides of the limiting groove 4 for the suction rod 2 to be embedded in are respectively provided with a left inclined surface 51 and a right inclined surface 52, and the symmetrically arranged left inclined surface 51 and right inclined surface 52 each extend forward away from one end of the limiting groove 4, and the left inclined surface 51 is provided with two left bearings 61 arranged at intervals in the vertical direction, and the right inclined surface 52 is provided with two right bearings 62 symmetrically arranged with the left bearing 61. A horizontally extending mounting groove 7 is provided on the front end surface of the base 1, and a movable block 8 is embedded in the mounting groove 7 and slidably cooperates with the inner side wall of the mounting groove 7, and a limiting bearing 9 is vertically installed at the front end of the movable block 8, and a spring 10 in an extrusion state is connected between the rear end of the movable block 8 and the bottom surface of the mounting groove 7, so that the suction rod 2 embedded in the limiting groove 4 is in extrusion contact with the limiting bearing 9, the left bearing 61 and the right bearing 62; A receiving groove 22 is provided on one side surface of the rear end of the clamping bar 3, and a magnetic block 231 is embedded and installed in the receiving groove 22. A magnetic column 232 cooperating with the magnetic block 231 is installed on the upper surface of the base 1 and located on the outer side of the magnetic block 231. The outer surface of the magnetic block 231 is flush with the side surface of the clamping bar 3, and a gap is set between the magnetic column 232 and the magnetic block 231. A second limiting bearing 24 is installed on the rear end surface of the clamping bar 3, and a first limiting column 251 and a second limiting column 252 are respectively arranged on both sides of the second limiting bearing 24. The first limiting column 251 located on the same side as the magnetic column 232 is in close contact with the second limiting bearing 24, and the second limiting column 252 located on the other side is spaced apart from the second limiting bearing 24. Under the action of the magnetic column and the magnetic block, the second limit bearing on the clamping bar can always maintain a close fit with the first limit column, avoiding rotational deviation of the clamping bar as a whole, and rolling contact can be achieved between the second limit bearing and the first limit column, so it will not affect the vertical movement of the suction rod installed on the clamping bar.

[0020] The gap between the magnetic block 231 and the magnetic column 232 is 0.2 mm.

[0021] The gap between the second limiting column 252 and the second limiting bearing 24 is 0.4 mm.

[0022] The rear end surface of the movable block 8 is provided with a groove for the front end of the spring 10 to be embedded.

[0023] The rear surface of the vertical support frame 16 is mounted on a connecting seat 18 through at least one set of slide rails 171 and sliders 172 , and the lower portion of the connecting seat 18 is mounted on the upper surface of the turntable 14 .

[0024] The vertically extending slide rail 171 is fixedly mounted on the connecting seat 18 , and the slider 172 slidably matched with the slide rail 171 is fixedly connected to the rear surface of the vertical support frame 16 .

[0025] A horizontal support plate 19 is installed on the top of the above-mentioned connecting seat 18, and one end of the horizontal support plate 19 is connected to the connecting seat 18, and the other end of the horizontal support plate 19 extends to the top of the vertical support frame 16. A return spring 20 is installed on each of the left and right sides of the horizontal support plate 19. The upper end of the vertically extended return spring 20 is connected to the horizontal support plate 19, and the lower end thereof is connected to the vertical support frame 16.

[0026] Embodiment 2: A turntable chip transport device, comprising: a turntable 14 and a chip pickup assembly 15 installed at an edge of the turntable 14 at equal intervals along the circumferential direction, the chip pickup assembly 15 further comprising: a vertical support frame 16, a base 1 installed on the front side of the vertical support frame 16, a suction rod 2 vertically installed on the side of the base 1 away from the vertical support frame 16, and a clamping bar 3 horizontally arranged above the base 1, the front end of the clamping bar 3 extends to the side away from the vertical support frame 16 and is clamped and connected with the upper end of the suction rod 2; A vertically extending limiting groove 4 is provided on the front end surface of the base 1, and the left and right sides of the limiting groove 4 for the suction rod 2 to be embedded in are respectively provided with a left inclined surface 51 and a right inclined surface 52, and the symmetrically arranged left inclined surface 51 and right inclined surface 52 each extend forward away from one end of the limiting groove 4, and the left inclined surface 51 is provided with two left bearings 61 arranged at intervals in the vertical direction, and the right inclined surface 52 is provided with two right bearings 62 symmetrically arranged with the left bearing 61. A horizontally extending mounting groove 7 is provided on the front end surface of the base 1, and a movable block 8 is embedded in the mounting groove 7 and slidably cooperates with the inner side wall of the mounting groove 7, and a limiting bearing 9 is vertically installed at the front end of the movable block 8, and a spring 10 in an extrusion state is connected between the rear end of the movable block 8 and the bottom surface of the mounting groove 7, so that the suction rod 2 embedded in the limiting groove 4 is in extrusion contact with the limiting bearing 9, the left bearing 61 and the right bearing 62; The limit bearing exerts a forward squeezing force on the suction rod at the rear under the action of the spring, so that the suction rod fits tightly with the left bearing and the right bearing located on the left and right sides in front of it. Thus, the limit bearing, the left bearing and the right bearing arranged in an isosceles triangle continuously exert a stable and uniform elastic force on the suction nozzle rod, thereby achieving stable clamping of the suction rod. The centrifugal force of rotation can further enhance the clamping force on the suction rod, so that the suction rod always maintains a stable state and accurate position accuracy. A receiving groove 22 is provided on one side surface of the rear end of the clamping bar 3, and a magnetic block 231 is embedded in the receiving groove 22. A magnetic column 232 cooperating with the magnetic block 231 is installed on the upper surface of the base 1 and located on the outer side of the magnetic block 231. The outer surface of the magnetic block 231 is flush with the side surface of the clamping bar 3, and a gap is set between the magnetic column 232 and the magnetic block 231. A second limiting bearing 24 is installed on the rear end surface of the clamping bar 3, and a first limiting column 251 and a second limiting column 252 are respectively arranged on both sides of the second limiting bearing 24. The first limiting column 251 located on the same side as the magnetic column 232 is in close contact with the second limiting bearing 24, and the second limiting column 252 located on the other side is spaced apart from the second limiting bearing 24.

[0027] The gap between the magnetic block 231 and the magnetic column 232 is 0.4 mm.

[0028] The gap between the second limiting column 252 and the second limiting bearing 24 is 0.8 mm.

[0029] A pin 11 is installed on the movable block 8, and a strip hole 12 for the pin 11 to be embedded is provided on the base 1, and the strip hole 12 extends back and forth in the horizontal direction.

[0030] A suction nozzle 13 is installed at the lower end of the suction rod 2.

[0031] The rear surface of the vertical support frame 16 is mounted on a connecting seat 18 through at least one set of slide rails 171 and sliders 172 , and the lower portion of the connecting seat 18 is mounted on the upper surface of the turntable 14 .

[0032] A horizontal support plate 19 is installed on the top of the above-mentioned connecting seat 18, and one end of the horizontal support plate 19 is connected to the connecting seat 18, and the other end of the horizontal support plate 19 extends to the top of the vertical support frame 16. A return spring 20 is installed on each of the left and right sides of the horizontal support plate 19. The upper end of the vertically extended return spring 20 is connected to the horizontal support plate 19, and the lower end thereof is connected to the vertical support frame 16.

[0033] A connecting column 21 is installed on the upper surface of the vertical support frame 16 .

[0034] A vertical spring 26 is connected between the clamping strip 3 and the lower part of the base 1 to buffer the force applied by the nozzle on the chip to prevent the chip from being damaged by excessive force, especially for thinner chips that are easily crushed; Furthermore, the conveying device of the present invention is used in the last step of chip processing. If the chip is damaged by pressure, it will cause great losses and easily lead to a substantial increase in production costs.

[0035] The working principle of the present invention is as follows: Under the action of the magnetic column and the magnetic block, the second limit bearing on the clamping bar can always maintain a close fit with the first limit column, avoiding the overall rotational deviation of the clamping bar, and the second limit bearing and the first limit column can achieve rolling contact, so it will not affect the vertical movement of the suction rod installed on the clamping bar; Under the action of the spring, the limit bearing applies a forward squeezing force to the suction rod from the rear, so that the suction rod fits tightly with the left bearing and the right bearing located on the left and right sides in front of it. The limit bearing, left bearing and right bearing arranged in an isosceles triangle continuously apply a stable and uniform elastic force to the suction nozzle rod, thereby achieving stable clamping of the suction rod. The centrifugal force of rotation can further enhance the clamping force on the suction rod, so that the suction rod always maintains a stable state and accurate position accuracy.

[0036] When the above-mentioned turntable chip transport device is used, the clamping bar and the suction rod installed on the clamping bar are limited from both ends. Without affecting the vertical displacement of the suction rod, the adverse interference of the turntable rotation on the suction rod can be effectively avoided, so that the suction rod always maintains a stable state and accurate position accuracy.

[0037] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A turntable chip transport device, comprising: A turntable (14) and a chip picking assembly (15) mounted at equal intervals along the circumference at the edge of the turntable (14), the chip picking assembly (15) further comprising: a vertical support frame (16), a base (1) mounted on the front side of the vertical support frame (16), a suction rod (2) vertically mounted on the side of the base (1) away from the vertical support frame (16), and a clamping bar (3) horizontally arranged above the base (1), the front end of the clamping bar (3) extending to the side away from the vertical support frame (16) and clampingly connected to the upper end of the suction rod (2); The invention is characterized in that: a vertically extending limiting groove (4) is provided on the front end surface of the base (1); the limiting groove (4) for the suction rod (2) to be embedded in has a left inclined surface (51) and a right inclined surface (52) on the left and right sides respectively; the symmetrically arranged left inclined surface (51) and right inclined surface (52) each extend forward away from one end of the limiting groove (4); the left inclined surface (51) is provided with two left bearings (61) spaced apart in the vertical direction; the right inclined surface (52) is provided with two right bearings symmetrically arranged with respect to the left bearing (61); The base (1) is provided with a horizontally extending mounting groove (7) on the front end surface thereof, a movable block (8) is embedded in the mounting groove (7) and slidably cooperates with the inner side wall of the mounting groove (7), a limit bearing (9) is vertically installed at the front end of the movable block (8), and a spring (10) in a compression state is connected between the rear end of the movable block (8) and the bottom surface of the mounting groove (7), so that the suction rod (2) embedded in the limit groove (4) is in compression contact with the limit bearing (9), the left bearing (61) and the right bearing (62); A receiving groove (22) is provided on one side surface of the rear end of the clamping bar (3), and a magnetic block (231) is embedded and installed in the receiving groove (22). A magnetic column (232) cooperating with the magnetic block (231) is installed on the upper surface of the base (1) and located outside the magnetic block (231). The outer surface of the magnetic block (231) is flush with the side surface of the clamping bar (3), and a gap is set between the magnetic column (232) and the magnetic block (231). A second limiting bearing (24) is installed on the rear end surface of the clamping bar (3), and a first limiting column (251) and a second limiting column (252) are respectively arranged on both sides of the second limiting bearing (24). The first limiting column (251) located on the same side as the magnetic column (232) is in close contact with the second limiting bearing (24), and the second limiting column (252) located on the other side is spaced apart from the second limiting bearing (24).

2. The turntable chip transport device according to claim 1, characterized in that: The gap between the magnetic attraction block (231) and the magnetic attraction column (232) is 0.1-0.5 mm.

3. The turntable chip transport device according to claim 1, characterized in that: The gap between the second limiting column (252) and the second limiting bearing (24) is 0.2-1.0 mm.

4. The turntable chip transport device according to claim 1, characterized in that: The rear end surface of the movable block (8) is provided with a groove into which the front end of the spring (10) is embedded.

5. The turntable chip transport device according to claim 1, characterized in that: A pin (11) is mounted on the movable block (8), and a strip hole (12) is provided on the base (1) for the pin (11) to be embedded, and the strip hole (12) extends forward and backward in the horizontal direction.

6. The turntable chip transport device according to claim 1, characterized in that: A suction nozzle (13) is installed at the lower end of the suction rod (2).

7. The turntable chip transport device according to claim 1, characterized in that: The rear surface of the vertical support frame (16) is mounted on a connecting seat (18) via at least one set of slide rails (171) and sliders (172), and the lower part of the connecting seat (18) is mounted on the upper surface of the turntable (14).

8. The turntable chip transport device according to claim 5, characterized in that: The vertically extending slide rail (171) is fixedly mounted on the connecting seat (18), and the sliding block (172) slidably matched with the slide rail (171) is fixedly connected to the rear surface of the vertical support frame (16).

9. The turntable chip transport device according to claim 5, characterized in that: A horizontal support plate (19) is installed on the top of the connecting seat (18); one end of the horizontal support plate (19) is connected to the connecting seat (18), and the other end of the horizontal support plate (19) extends above the vertical support frame (16); a return spring (20) is installed on each of the left and right sides of the horizontal support plate (19); the upper end of the vertically extending return spring (20) is connected to the horizontal support plate (19), and the lower end of the return spring (20) is connected to the vertical support frame (16).

Citation Information

Patent Citations

  • Chip taking and placing mechanism and chip testing machine

    CN116344432A

  • Chip conveying mechanism for testing optical device

    CN114615824A

  • Automatic processing device of semiconductor chip

    CN216597539U

  • Suction nozzle mechanism for optical communication chip

    CN216597544U