A method and system for processing the curved surface electrode of a resonant gyroscope based on femtosecond laser

Abstract

The present invention relates to the technical field of laser beam processing, and particularly to a method and system for processing a curved surface electrode of a resonant gyroscope based on femtosecond laser. The method includes the following steps: clamping an electrode base on a femtosecond laser galvanometer five-axis linkage processing platform; making the central axis of the curved surface electrode and the laser beam coincide with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform, and determining the precise coordinates of the laser beam in the machine tool coordinate system; performing spherical specific modeling on the electrode base to obtain control codes; inputting the control codes into the machine tool control system, and after adjusting the control parameters, performing femtosecond laser five-axis linkage processing on the electrode base. During the processing, the reflected light signal is transmitted to a computer through a real-time observer. The method and system provided by the present invention solve the technical problems that the processing accuracy and quality of the curved surface electrode are difficult to meet the requirements due to film flanging, recasting, and substrate cracking caused by thermal effects.

Description

Technical Field

[0001] The present invention relates to the technical field of laser beam processing, and particularly to a method and system for processing a curved surface electrode of a resonant gyroscope based on femtosecond laser processing. Background Art

[0002] A resonant gyroscope is a solid wave gyroscope based on the Coriolis effect, including a quartz hemispherical resonant gyroscope, a metal cylindrical resonant gyroscope, a nested ring gyroscope, a micro-hemispherical gyroscope, etc. Among them, the quartz hemispherical resonant gyroscope is considered by the international academic community to be the most ideal device for the strapdown inertial navigation system of various carriers in the 21st century. The quartz hemispherical resonant gyroscope is composed of a resonator, an electrode base, and other accessories. As the only channel for sensing the vibration of the resonator and transmitting capacitance signals, the electrode base is usually composed of a fused quartz glass substrate matching the resonator and an outer heterogeneous metal film, and finally forms a base electrode that meets the capacitance reading requirements of the hemispherical resonant gyroscope through patterning means. The curved surface electrode base has a large capacitance area and is more likely to obtain a better output signal under the same control level. However, the position error and fractal accuracy of the curved surface electrode will directly affect the excitation and detection circuit loops of the hemispherical resonant gyroscope system, increasing the electrode error of the hemispherical resonant gyroscope and resulting in a decrease in system accuracy. Therefore, the electrode patterning requires processing circumferentially evenly distributed curved surface sector electrodes on the composite film without damaging the substrate. Existing lithography techniques are difficult to obtain good processing accuracy and quality on curved surfaces, with high technical difficulty and cumbersome processes; the mask patterning coating method has a dispersion effect, and the patterning accuracy depends on the mask processing accuracy, with high costs and poor adaptability, which has become a technical bottleneck in the research, development, manufacturing, and mass production of resonant gyroscopes. Existing technologies are difficult to support the high precision and future mass production applications of resonant gyroscopes.

[0003] As an advanced manufacturing method that has developed rapidly in recent years, the laser processing method forms a specified sample by removing or modifying materials on the surface of the sample according to design requirements through laser focusing. It has attracted much attention because of its high precision, high speed, non-contact, no need to introduce foreign pollutants and harsh experimental conditions. However, the traditional laser relies on the photothermal effect to instantaneously heat the material above the melting point for melting or evaporation removal mechanism, resulting in film edge flipping, recasting, and substrate cracking caused by thermal effects during the processing, making it difficult to meet the requirements of the processing accuracy and quality of the curved surface electrode, which severely restricts the rapid development of resonant gyroscopes. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a method and system for processing a curved surface electrode of a resonant gyroscope based on femtosecond laser processing, which realizes non-thermal removal, ensures that the processing result has no burrs, no warping, does not damage the substrate, does not generate additional debris, and can process a curved surface electrode base for a resonant gyroscope with high geometric accuracy and surface quality, significantly reducing the electrode error of the resonant gyroscope assembled by the electrode base.

[0005] The present invention is realized through the following technical solutions:

[0006] A method for processing a curved surface electrode of a resonant gyroscope based on femtosecond laser, comprising the following steps:

[0007] S1: Clamp the coated resonant gyroscope with the curved surface electrode base on the femtosecond laser galvanometer five-axis linkage processing platform;

[0008] S2: Align the central axis of the curved surface electrode of the resonant gyroscope and the laser beam emitted by the femtosecond laser with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform, and determine the precise coordinates of the laser beam in the machine tool coordinate system;

[0009] S3: Perform spherical specific modeling on the coated resonant gyroscope with the curved surface electrode base according to the geometric parameters of the curved surface electrode pattern, create the processing procedure for the coated resonant gyroscope with the curved surface electrode base based on the computer-aided manufacturing system, determine the focal point movement trajectory of the laser beam, and process it using the precise coordinates of the laser beam in the machine tool coordinate system to obtain the five-axis linkage machine tool control code based on focal point tracking;

[0010] S4: Input the five-axis linkage machine tool control code based on focal point tracking into the machine tool control system. After adjusting the control parameters, perform femtosecond laser five-axis linkage processing on the coated resonant gyroscope with the curved surface electrode base. During the processing, the reflected light signal of the illumination light source irradiating the sample surface is transmitted to the computer through the real-time observer to perform real-time observation and feedback on the sample surface.

[0011] Preferably, in step S1, first fix the coated resonant gyroscope with the curved surface electrode base on the clamping tool, and then fixedly install the clamping tool on the femtosecond laser galvanometer five-axis linkage processing platform.

[0012] Preferably, in step S2, the laser beam is aligned with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform by using the circular arc centering method.

[0013] Furthermore, in step S2, use a laser rangefinder to adjust the offset distance between the central axis of the curved surface electrode of the resonant gyroscope and the laser beam and the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform according to the negative feedback mechanism until the offset distance is less than or equal to 1 micron.

[0014] Preferably, in step S3, the spherical specific modeling of the coated resonant gyroscope with the curved surface electrode base is performed by the projection method.

[0015] Furthermore, when performing femtosecond laser five-axis linkage processing on the coated resonant gyroscope with the curved surface electrode base in step S4, control the electron and lattice temperatures of the coated resonant gyroscope with the curved surface electrode base according to formula (1):

[0016] (1);

[0017] Wherein: represents the electron temperature of the coating film, represents the electron temperature of the coating film of the electron heat capacity thereunder, represents time, represents the divergence of the composite term of the gradient and thermal conductivity of the electron temperature of the coating film, represents the electron temperature of the coating film of the electron thermal conductivity thereunder, represents the gradient of the electron temperature of the coating film, represents the lattice temperature of the coating film, represents the lattice temperature of the coating film of the lattice heat capacity thereunder, represents the femtosecond laser light source term, represents the processing depth of the coating film.

[0018] Furthermore, the control parameters described in step S4 include the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform and the femtosecond laser energy and femtosecond laser scanning speed in the femtosecond laser light source term. The femtosecond laser energy is adjusted and controlled by a laser energy regulator, and the femtosecond laser scanning speed is controlled by a laser galvanometer.

[0019] Furthermore, the control parameters are calculated according to formula (2):

[0020] (2);

[0021] Wherein: represents the laser fluence, represents the surface reflectivity of the material at time represents the distance from the sample surface at time is the absorption coefficient of the material, represents the exponential function with the natural constant as the base, represents the pulse width, represents the femtosecond laser energy, represents the femtosecond laser repetition rate, represents the laser beam waist radius, represents the femtosecond laser scanning speed, represents the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform.

[0022] Preferably, the moving speed of the femtosecond laser galvanometer five-axis linkage processing platform is 100 mm / min, the femtosecond laser energy is 12 μJ, and the femtosecond laser scanning speed is 500 mm / s.

[0023] A system for processing a resonant gyroscope curved surface electrode based on femtosecond laser is used to execute the method for processing a resonant gyroscope curved surface electrode based on femtosecond laser described in any one of the above. It includes a femtosecond laser five-axis linkage processing platform, a femtosecond laser, a diaphragm, a laser energy regulator, an optical switch, a reflector, a dual-wavelength lens, an illumination light source, a convex lens, a real-time observer, a laser galvanometer, and a computer. The laser beam emitted by the femtosecond laser enters the laser energy regulator through the diaphragm for energy adjustment, and then is reflected by the reflector and focused on the coated curved surface electrode base for the resonant gyroscope mounted on the femtosecond laser five-axis linkage processing platform through the laser galvanometer. The illumination light emitted by the illumination light source located above the reflector passes through the convex lens, the dual-wavelength lens, the reflector, and the laser galvanometer and shines on the coated curved surface electrode base for the resonant gyroscope for reflection. The reflected illumination light then returns through the laser galvanometer and the reflector, and reaches the real-time observer after being reflected by the dual-wavelength lens. The computer is respectively connected to the real-time observer, the controller of the femtosecond laser, and the femtosecond laser five-axis linkage processing platform, controls the parameter changes of the femtosecond laser and the movement of the femtosecond laser five-axis linkage processing platform, and receives the surface quality feedback of the real-time observer. The optical switch is connected to the laser energy regulator and is controlled by the laser energy regulator to be turned on and off.

[0024] Advantages of the invention:

[0025] The method and system for processing a resonant gyroscope curved surface electrode based on femtosecond laser provided by the present invention have the following advantages:

[0026] 1. With the femtosecond laser five-axis linkage processing platform, the metal film of the curved surface electrode for the resonant gyroscope is processed non-contactly by the femtosecond laser. Finally, a curved surface electrode base for the resonant gyroscope with high geometric accuracy and surface quality can be processed, thereby supporting a high-performance resonant gyroscope.

[0027] 2. Utilize the interaction mechanism between the femtosecond laser and the heterogeneous metal film to achieve non-thermal removal, ensure that the processing result has no chipping, no warping, does not damage the substrate, and does not generate additional debris.

[0028] 3. This method also has the characteristics of flexible patterning, non-contact, and pollution-free, etc., which can meet the demanding morphology accuracy and quality requirements pursued by the design and manufacture of the electrode base. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance. Description of the drawings

[0029] Figure 1 It is a schematic flow chart of the present invention.

[0030] Figure 2 It is a schematic diagram of the test results of the electrode error of the present invention.

[0031] Figure 3 It is a schematic diagram of the system of the present invention.

[0032] In the figure: 1. Femtosecond laser; 2. Diaphragm; 3. Laser energy regulator; 4. Optical switch; 5. Real-time observer; 6. Illumination light source; 7. Dual-wavelength lens; 8. Reflector; 9. Laser galvanometer; 10. Curved electrode base for coated resonator gyro; 11. Femtosecond laser five-axis linkage processing platform; 12. Computer; 13. Convex lens. Specific embodiments

[0033] A method for processing the curved electrode of a resonator gyro based on femtosecond laser, the flowchart of which is as Figure 1 shown, and specifically includes the following steps:

[0034] S1: Clamp the curved electrode base for the coated resonator gyro on the femtosecond laser galvanometer five-axis linkage processing platform;

[0035] Preferably, the curved electrode base for the coated resonator gyro can be first fixed on the clamping tool, and then the clamping tool is fixedly installed on the femtosecond laser galvanometer five-axis linkage processing platform.

[0036] S2: Align the central axis of the curved electrode for the resonator gyro and the laser beam emitted by the femtosecond laser with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform, and determine the precise coordinates of the laser beam in the machine tool coordinate system;

[0037] Specifically, the laser beam can be aligned with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform by using the circular arc centering method, and the circular arc centering method is an existing technology.

[0038] During the adjustment process, a laser rangefinder can be used to adjust the offset distance between the central axis of the curved electrode for the resonator gyro and the laser beam and the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform according to the negative feedback mechanism until the offset distance is less than or equal to 1 micron to meet the coaxial accuracy requirements for the processing of the coated fractal pattern.

[0039] S3: Perform spherical specific modeling on the curved electrode base for the coated resonator gyro according to the geometric parameters of the curved electrode pattern, create a processing procedure for the curved electrode base for the resonator gyro based on the computer-aided manufacturing system, determine the focal point movement trajectory of the laser beam, and process it using the precise coordinates of the laser beam in the machine tool coordinate system to obtain the five-axis linkage machine tool control code based on focal point tracking;

[0040] Specifically, the projection method, which is a prior art, can be used to perform spherical specific modeling on the curved surface electrode base for the coated resonant gyroscope.

[0041] S4: Input the five-axis linkage machine tool control code based on focus tracking into the machine tool control system. After adjusting the control parameters, perform femtosecond laser five-axis linkage machining on the curved surface electrode base for the coated resonant gyroscope. During the machining process, the reflected light signal of the illumination light source irradiating the sample surface is transmitted to the computer through a real-time observer, and real-time observation and feedback of the sample surface are carried out.

[0042] Specifically, when performing femtosecond laser five-axis linkage machining on the curved surface electrode base for the coated resonant gyroscope, the electron and lattice temperatures of the curved surface electrode base for the coated resonant gyroscope can be controlled according to Equation (1):

[0043] (1);

[0044] Where: represents the electron temperature of the coating, represents the electron temperature of the coating of the electron heat capacity, represents time, represents the divergence of the composite term of the gradient and thermal conductivity of the electron temperature of the coating, represents the electron temperature of the coating of the electron thermal conductivity, represents the gradient of the electron temperature of the coating, represents the lattice temperature of the coating, represents the lattice temperature of the coating of the lattice heat capacity, represents the femtosecond laser light source term, represents the machining depth of the coating.

[0045] The method provided by the present invention can realize the control of the electron and lattice temperatures of the curved surface electrode base for the coated resonant gyroscope by adjusting and controlling the femtosecond laser light source term, thereby changing the traditional removal mechanism that relies on the photothermal effect to instantaneously heat the material above the melting point for melting or evaporation, and preventing the problems that the machining accuracy and machining quality of the curved surface electrode are difficult to meet the requirements due to film edge turning, recasting, and substrate cracking caused by the thermal effect during the machining process.

[0046] Specifically, the control parameters include the movement speed of the femtosecond laser galvanometer five-axis linkage machining platform and the femtosecond laser energy and femtosecond laser scanning speed in the femtosecond laser light source term. The femtosecond laser energy is adjusted and controlled through a laser energy regulator, and the femtosecond laser scanning speed is controlled by a laser galvanometer.

[0047] Specifically, the control parameters can be calculated according to Equation (2):

[0048] (2);

[0049] Wherein: represents the laser fluence, represents the reflectivity of the material surface at time represents the absorption coefficient of the material when the distance from the sample surface at time is ; represents the exponential function with the natural constant as the base, represents the pulse width, represents the femtosecond laser energy, represents the femtosecond laser repetition rate, represents the laser beam waist radius, represents the femtosecond laser scanning speed, represents the movement speed of the femtosecond laser galvanometer five-axis linkage machining platform.

[0050] Specifically, the movement speed of the femtosecond laser galvanometer five-axis linkage machining platform can be preferably 100 mm / min, the femtosecond laser energy can be preferably 12 μJ, and the femtosecond laser scanning speed can be preferably 500 mm / s.

[0051] By controlling the above parameters, it is possible to effectively avoid the simultaneous absorption of laser by the metal thin film and the fused silica substrate, that is, the femtosecond laser will only process the metal thin film and will not have any impact on the fused silica substrate. The heat affected zone caused by laser processing is reduced or even eliminated, the metal thin film has no chipping / warping after processing, and the edge is sharp without a recast layer. The fused silica substrate of the electrode base has no cracks, which can meet the demanding shape accuracy and quality requirements pursued by the design and manufacture of the electrode base. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance.

[0052] Assemble the electrode base processed by femtosecond laser with the hemispherical resonator gyroscope resonator, base, and shield, and evacuate it to vacuum to form a hemispherical resonator gyroscope prototype.

[0053] It can be seen from the electrode error test of the hemispherical resonator gyroscope prototype that the electrode base prepared by the method provided by the present invention has an angular error of less than 0.0635°, does not change significantly with time, has good long-term stability, and the electrode error test results are as Figure 2 shown.

[0054] Through the method for processing a curved electrode for a resonant gyroscope provided by the present invention, in combination with a femtosecond laser five-axis linkage processing platform, the metal thin film of the curved electrode for the resonant gyroscope is processed in a non-contact manner by the femtosecond laser, and finally a curved electrode base for the resonant gyroscope with high geometric accuracy and surface quality can be processed, thereby supporting a high-performance resonant gyroscope.

[0055] At the same time, by utilizing the interaction mechanism between the femtosecond laser and the heterogeneous metal thin film, non-thermal removal is realized, ensuring that the processing result has no burrs, no warping, no damage to the substrate, and no additional debris generated. Moreover, this method also has the characteristics of flexible patterning, non-contact, and pollution-free, and can meet the demanding morphology accuracy and quality requirements pursued in the design and manufacturing of the electrode base. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance.

[0056] A system for processing a curved electrode of a resonant gyroscope based on a femtosecond laser is used to execute the method for processing a curved electrode of a resonant gyroscope based on a femtosecond laser described in any one of the above. The system diagram is as Figure 3 shown, which includes a femtosecond laser five-axis linkage processing platform 11, a femtosecond laser 1, a diaphragm 2, a laser energy regulator 3, an optical switch 4, a mirror 8, a dual-wavelength lens 7, an illumination light source 6, a convex lens 13, a real-time observer 5, a laser galvanometer 9, and a computer 12. The laser beam emitted by the femtosecond laser enters the laser energy regulator through the diaphragm for energy adjustment, and then is reflected by the mirror and focused on the coated curved electrode base 10 for the resonant gyroscope installed on the femtosecond laser five-axis linkage processing platform through the laser galvanometer. The illumination light emitted by the illumination light source located above the mirror passes through the convex lens, the dual-wavelength lens, the mirror, and the laser galvanometer and shines on the coated curved electrode base for the resonant gyroscope for reflection. The reflected illumination light then returns through the laser galvanometer and the mirror, and reaches the real-time observer after being reflected by the dual-wavelength lens. The computer is respectively connected to the real-time observer, the femtosecond laser, and the controller of the femtosecond laser five-axis linkage processing platform, controls the parameter changes of the femtosecond laser and the movement of the femtosecond laser five-axis linkage processing platform, and receives the surface quality feedback from the real-time observer. The optical switch is connected to the laser energy regulator and is controlled to be opened and closed by the laser energy regulator.

[0057] The setting of the convex lens here can convert the light emitted by the illumination light source into parallel illumination light. The reflected illumination light returns through the laser galvanometer and the mirror, and reaches the real-time observer after being reflected by the dual-wavelength lens, which can magnify the surface quality information of the coated curved electrode base for the resonant gyroscope during the processing, making it more convenient to observe the surface quality of the coated curved electrode base for the resonant gyroscope during the processing at all times.

[0058] In summary, the present invention provides a method and system for processing a curved electrode of a resonant gyroscope based on femtosecond laser, which changes the traditional laser removal mechanism that relies on the photothermal effect to instantaneously heat the material above the melting point for melting or evaporation, and solves the technical problems that the processing accuracy and quality of the curved electrode are difficult to meet the requirements due to film flanging, recasting and substrate cracking caused by the thermal effect during the processing. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance.

[0059] The foregoing are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, characterized in that: The steps include: S1: Clamp the coated resonant gyro with a curved electrode base on the five-axis linkage processing platform of the femtosecond laser galvanometer; S2: Align the central axis of the curved electrode for the resonant gyroscope and the laser beam emitted by the femtosecond laser with the rotation axis of the five-axis linkage machining platform of the femtosecond laser galvanometer, and determine the precise coordinates of the laser beam in the machine tool coordinate system; S3: According to the geometric parameters of the curved electrode pattern, the curved electrode base for the resonant gyroscope after coating is spherically modeled, and the processing procedures of the curved electrode base for the resonant gyroscope are created based on the computer-aided manufacturing system. The focus motion trajectory of the laser beam is determined, and the precise coordinates of the laser beam in the machine tool coordinate system are used for processing to obtain the five-axis linkage machine tool control code based on focus tracking; S4: The five-axis linkage machine tool control code based on focus tracking is input into the machine tool control system. After adjusting the control parameters, the curved electrode base of the resonant gyroscope after coating is processed by femtosecond laser five-axis linkage. During the processing, the reflected light signal from the illumination light source to the sample surface is transmitted to the computer through the real-time observer, and the sample surface is observed and fed back in real time.

2. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 1, characterized in that: In step S1, the coated resonant gyroscope is first fixed on a clamping tool with a curved electrode base, and then the clamping tool is fixedly installed on a femtosecond laser galvanometer five-axis linkage processing platform.

3. The method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser according to claim 1, characterized in that: In step S2, the laser beam is aligned with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform by using an arc centering method.

4. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 1, characterized in that: In step S2, a laser rangefinder is used to adjust the offset distance between the center axis of the curved electrode for the resonant gyroscope and the laser beam and the rotating axis of the femtosecond laser galvanometer five-axis linkage processing platform according to a negative feedback mechanism until the offset distance is less than or equal to 1 micron.

5. The method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser according to claim 1, characterized in that: Step S3 uses a projection method to perform spherical-specific modeling on the curved electrode base of the resonant gyroscope after coating.

6. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 1, characterized in that: When the curved surface electrode base for the resonant gyroscope after coating is subjected to femtosecond laser five-axis linkage processing in step S4, the electron and lattice temperature of the curved surface electrode base for the resonant gyroscope after coating is controlled according to formula (1): （1）； in: represents the electron temperature of the coating, Indicates the electron temperature of the coating The electron heat capacity under Indicates time, represents the divergence of the composite term of the electronic temperature gradient and thermal conductivity of the coating, Indicates the electron temperature of the coating The electronic thermal conductivity under represents the gradient of the electron temperature of the coating, represents the lattice temperature of the coating, Indicates the lattice temperature of the coating The lattice heat capacity under represents the femtosecond laser source term, Indicates the processing depth of the coating.

7. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 6, characterized in that: The control parameters described in step S4 include the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform and the femtosecond laser energy and femtosecond laser scanning speed in the femtosecond laser light source item. The femtosecond laser energy is adjusted and controlled by the laser energy regulator, and the femtosecond laser scanning speed is controlled by the laser galvanometer.

8. The method for processing a resonant gyroscope curved surface electrode based on femtosecond laser according to claim 6, characterized in that: The control parameters are calculated according to formula (2): （2）； in: represents the laser flux, express The reflectivity of the material surface at the moment, express The distance from the sample surface at the moment is The absorption coefficient of the material is Indicated by natural constant The exponential function with base , represents the pulse width, represents the femtosecond laser energy, represents the femtosecond laser repetition frequency, is the laser beam waist radius, represents the femtosecond laser scanning speed, Indicates the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform.

9. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 8, characterized in that: The movement speed of the femtosecond laser galvanometer five-axis linkage processing platform is 100 mm / min, the femtosecond laser energy is 12 microjoules, and the femtosecond laser scanning speed is 500 mm / sec.

10. A system for processing resonant gyroscope curved surface electrodes based on femtosecond laser, characterized in that: A method for processing a resonant gyroscope curved electrode based on a femtosecond laser for executing any one of claims 1 to 9, comprising a femtosecond laser five-axis linkage processing platform, a femtosecond laser, an aperture, a laser energy regulator, an optical switch, a reflector, a dual-wavelength lens, an illumination light source, a convex lens, a real-time observer, a laser galvanometer and a computer, wherein the laser beam emitted by the femtosecond laser enters the laser energy regulator through the aperture for energy regulation, and then is reflected by the reflector and focused by the laser galvanometer onto a resonant gyroscope curved electrode base after coating mounted on the femtosecond laser five-axis linkage processing platform, and the illumination light above the reflector is The illumination light emitted by the source is reflected by the curved electrode base of the resonant gyroscope after coating through a convex lens, a dual-wavelength lens, a reflector and a laser galvanometer. The reflected illumination light is then returned through the laser galvanometer and the reflector, and is reflected by the dual-wavelength lens to reach the real-time observer. The computer is respectively connected to the controller of the real-time observer, the femtosecond laser, and the controller of the femtosecond laser five-axis linkage processing platform to control the parameter change of the femtosecond laser and the movement of the femtosecond laser five-axis linkage processing platform, and receives surface quality feedback from the real-time observer. The optical switch is connected to the laser energy regulator and is controlled to be turned on and off by the laser energy regulator.

Images