A polishing apparatus with controllable pressure distribution

Abstract

The present application relates to a kind of controllable pressure distribution polishing device, belong to optical element ultra-precision manufacturing technical field, solve the technical problems such as transmission of polishing device is not stable, complex structure, large motion inertia, it includes from bottom to top sequentially connected composite tool module, composite grinder module, pressure output module.Composite tool module is connected with the optical element to be polished, and pressure output module is connected with external equipment.Composite tool module is disc type, including abrasive layer, grinding disc, No.1 bearing, adapter plate.Composite grinder module includes pressure regulating mechanism, rotating shaft, composite grinder module frame, No.2 bearing, No.1 motor.The present application is used for the polishing processing of optical element.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of optical element ultra-precision manufacturing, and particularly relates to a polishing device with controllable pressure distribution. BACKGROUND

[0002] In the prior art of the field of optical element ultra-precision manufacturing, single-rotation disc polishing devices and planetary motion disc polishing devices are commonly used in the precision polishing of optical elements and are important devices indispensable in the polishing process. The single-rotation disc polishing device is simple in structure, but its removal function (the three-dimensional distribution of the material removal amount of the contact surface between the polishing disc and the optical element per unit time) is ring-shaped, deviating from the ideal Gaussian shape. Therefore, the industry personnel further proposed the planetary motion disc polishing device on the basis of the single-rotation disc polishing device, increased the orbiting motion shaft on the basis of the single-rotation motion shaft of the polishing disc, changed the polishing speed distribution through the compound motion of the polishing disc, and changed the removal function shape to approach the Gaussian shape. However, the planetary motion polishing device has defects such as unstable transmission, complex structure, and large motion inertia. Moreover, the polishing device needs to be quickly moved in the working process, the speed distribution of the compound motion will be affected by the polishing moving speed and changed, which will cause the removal function shape to be unstable and affect the polishing effect. SUMMARY

[0003] In order to overcome the defects of the polishing device such as unstable transmission, complex structure, and large motion inertia, the application provides a polishing device with controllable pressure distribution.

[0004] The application solves the technical problems by adopting the technical scheme of:

[0005] A polishing device with controllable pressure distribution comprises a compound tool module, a compound grinding machine module, and a pressure output module.

[0006] The compound tool module, the compound grinding machine module, and the pressure output module are connected in sequence from bottom to top. The compound tool module is in contact with the optical element to be polished, and the pressure output module is connected with external equipment.

[0007] The compound tool module is disc-shaped and comprises a grinding layer, a grinding disc, a No. 1 bearing, and an adapter plate.

[0008] The grinding layer is fixedly connected with the grinding disc and is located at the bottom surface of the grinding disc and in contact with the optical element to be polished. The grinding disc is fixedly connected with the outer ring of the No. 1 bearing, and the inner ring of the No. 1 bearing is fixedly connected with the adapter plate. The grinding disc and the adapter plate can rotate relative to each other through the No. 1 bearing. The adapter plate is fixedly connected with the pressure adjusting mechanism. The grinding disc is matchedly connected with a rotating shaft, and the rotating shaft drives the grinding disc to rotate.

[0009] The composite grinder module comprises a pressure regulating mechanism, a rotating shaft, a composite grinder module rack, a second bearing, a first motor and a bearing nut.

[0010] The pressure regulating mechanism and the first motor are installed on the composite grinder module rack. The second bearing is installed on the pressure regulating mechanism, and the composite grinder module rack is connected with a pressure output module. The first motor drives the rotating shaft to rotate, and the rotating shaft is installed on the second bearing through the bearing nut.

[0011] The pressure output module is a gas cylinder type constant force output device or a guide rail self-weight type constant force output device. An installation hole is arranged at the upper end of the pressure output module, and the installation hole is used for fixed connection with external equipment.

[0012] The polishing device, the external equipment is an industrial robot or a numerical control machine tool.

[0013] The polishing device, the grinding layer is asphalt, damping cloth, polyurethane or fixed abrasive.

[0014] The polishing device, the fixed connection between the grinding disc and the outer ring of the first bearing can be screw connection, welding, gluing or buckle connection.

[0015] The polishing device, the fixed connection between the inner ring of the first bearing and the adapter plate can be screw connection, welding, gluing or buckle connection.

[0016] The polishing device, the composite grinder module further comprises an electric slip ring, a second motor and a drive gear.

[0017] The upper ring of the electric slip ring is fixedly connected with the composite grinder module rack, and the lower ring of the electric slip ring is fixedly connected with the shell of the pressure regulating mechanism. The second motor is installed on the composite grinder module rack, the drive gear is installed on the output shaft of the second motor, and the drive gear is matched with the pressure regulating mechanism.

[0018] The polishing device, the pressure regulating mechanism comprises a pressure regulating mechanism shell, a cross-shaped pressure shaft, an extension motor and a positioning shaft.

[0019] The second bearing is installed in the inner cavity of the pressure regulating mechanism shell, the cross-shaped pressure shaft is matched with the cross-shaped groove on the pressure regulating mechanism shell, and the telescopic motor is installed in the cross-shaped groove on the pressure regulating mechanism shell. The telescopic motor telescopic shaft end is fixed on the cross-shaped pressure shaft, drives the cross-shaped pressure shaft to slide in the cross-shaped groove, and the lower end of the cross-shaped pressure shaft is provided with a ball head, the ball head extends into the waist-shaped groove on the adapter plate, the ball head end is in point contact with the bottom surface of the waist-shaped groove, and the ball head and the bottom surface of the waist-shaped groove are the control points of the polishing pressure. The ball head and the bottom surface of the waist-shaped groove are synchronously moved while the telescopic motor drives the cross-shaped pressure shaft to slide in the cross-shaped groove. The lower end of the pressure regulating mechanism shell is also provided with a positioning shaft, the positioning shaft is a cylinder, and the end thereof extends into the circular groove on the adapter plate to form cooperation. The cross-shaped pressure shaft is matched with the waist-shaped groove on the adapter plate, and is used for fixing the relative position of the composite tool module and the composite grinding machine module.

[0020] The polishing device, the pressure regulating mechanism further comprises a driven gear.

[0021] The driven gear is installed on the composite grinding machine module rack, and the driven gear is engaged with the driving gear.

[0022] The polishing device adopts a wheel type, an air bag or a magneto-rheological composite tool module to replace a disc type composite tool module, so that the polishing pressure is actively controlled, and a removal function form is further optimized.

[0023] The polishing device has the advantages that:

[0024] A polishing device with controllable pressure distribution separates a pressure output shaft from a rotating output shaft (the pressure distribution peak point is separated from the rotating speed distribution minimum point, and the pressure distribution peak point and the rotating speed distribution minimum point of a traditional device are coincident), controls a polishing pressure distribution by controlling a pressure application point position, and obtains a stable Gaussian type removal function. Compared with existing schemes, the device proposed in the polishing device has a more stable removal function, and movement of the device in a machining process does not affect the form of the removal function.

[0025] A polishing device with controllable pressure distribution can obtain a removal function with a smaller half-width.

[0026] A polishing device with controllable pressure distribution has a simpler structure, and all modules of the device are coaxial, so that the device has smaller rotational inertia compared with existing schemes.

[0027] A polishing device with controllable pressure distribution can realize real-time control of a removal function distribution in a machining process, and can realize more flexible polishing processes compared with existing schemes. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a perspective view of the polishing device according to an embodiment of the present application;

[0029] Figure 2 is a schematic diagram of the cross-sectional position of the polishing device according to an embodiment of the present application;

[0030] Figure 3 is Figure 2 is a cross-sectional view of the A section in FIG. 1;

[0031] Figure 4 is a schematic diagram of the structure of the pressure regulating mechanism;

[0032] Figure 5 is Figure 4 is a cross-sectional view of the B section in FIG. 1;

[0033] Figure 6 is a schematic diagram of the structure of the composite tool module;

[0034] Figure 7 is a schematic diagram of the polishing device according to an embodiment of the present application used for polishing a grid-like track;

[0035] Figure 8 is a schematic diagram of the polishing device according to an embodiment of the present application used for polishing a circumferential track.

[0036] The reference signs are as follows:

[0037] 1. composite tool module, 2. composite grinder module, 3. pressure output module, 4. polishing device with controllable pressure distribution, 5. optical element, 6. grid-like track, 7. circumferential track;

[0038] 101. grinding layer, 102. grinding disc, 103. first bearing, 104. adapter plate;

[0039] 201. pressure regulating mechanism, 202. electric slip ring, 203. rotating shaft, 204. frame of the composite grinder module, 205. second bearing, 206. first motor, 207. second motor, 208. drive gear, 209. bearing nut;

[0040] 2011. housing of the pressure regulating mechanism, 2012. cross-shaped pressure shaft, 2013. telescopic motor, 2014. positioning shaft, 2015. driven gear. DETAILED DESCRIPTION

[0041] The present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0042] Embodiment 1

[0043] A polishing device with controllable pressure distribution is described. By separating the pressure output shaft from the rotation output shaft and designing a rotational translation mechanism for the pressure output shaft, the polishing pressure distribution is altered to achieve a stable, quasi-Gaussian removal function (a removal function is defined as the three-dimensional distribution of material removal per unit time within the contact surface between the polishing disk and the optical element). Compared to existing solutions, the device proposed in this invention achieves a more stable removal function; movement of the device during processing does not affect the shape of the removal function. Furthermore, compared to existing solutions, the device proposed in this invention achieves a smaller half-width at half-maximum (FWHM) of the removal function. Furthermore, compared to existing solutions, the device proposed in this invention has a smaller moment of inertia and a simpler structure. Furthermore, the device proposed in this invention enables real-time control of the removal function distribution during processing, providing a more flexible process than existing solutions.

[0044] The invention belongs to the field of ultra-precision manufacturing of optical elements, in particular to a polishing device with controllable pressure distribution, in particular to a disc-type polishing device with controllable pressure distribution.

[0045] In view of the shortcomings of the existing technical means, the present invention proposes a polishing device with controllable pressure distribution. The overall view of the device is as follows: Figure 1 、 Figure 2 As shown, the device consists of the following three modules: a composite tool module 1 , a composite grinder module 2 , and a pressure output module 3 .

[0046] The composite tool module 1, the composite grinding machine module 2, and the pressure output module 3 are coaxially arranged.

[0047] like Figure 3 、 Figure 6 As shown, the composite tool module 1 is composed of the following parts: a grinding layer 101 , a grinding disc 102 , a No. 1 bearing 103 , and an adapter plate 104 .

[0048] Among them, the grinding layer 101 is arranged on the bottom surface of the grinding disc 102, and its material can be asphalt, damping cloth, polyurethane, fixed abrasive (when working, the polishing grinding disc 101 and the surface of the optical element move relative to each other under the action of pressure, and the surface material of the optical element is removed under the action of polishing pressure); the upper end of the polishing grinding disc 102 is provided with a square groove feature, which cooperates with the end feature of the rotating shaft 203 to transmit rotational motion; the polishing grinding disc 102 is fixed to the outer ring of the No. 1 bearing 103 ( Figure 3 The inner ring of the No. 1 bearing 103 is fixed with an adapter plate 104 ( Figure 3 The fixing method is screw connection (in the figure), and other fixing methods such as welding, gluing, snap fastening, etc. can be used.

[0049] The adapter plate 104 is provided with a waist-shaped groove and a circular groove.

[0050] likeFigure 3 As shown in the figure, the composite grinder module 2 is composed of the following parts: pressure regulating mechanism 201, electric slip ring 202, rotating shaft 203, composite grinder module frame 204, No. 2 bearing 205, No. 1 motor 206, No. 2 motor 207, drive gear 208, bearing nut 209.

[0051] As shown in the figure, the pressure regulating mechanism 201 is composed of the following parts: pressure regulating mechanism housing 2011, cross-shaped pressure shaft 2012, telescopic motor 2013, positioning shaft 2014, driven gear 2015. Figure 3 、 Figure 4 、 Figure 5 As shown in the figure, the pressure regulating mechanism 201 is composed of the following parts: pressure regulating mechanism housing 2011, cross-shaped pressure shaft 2012, telescopic motor 2013, positioning shaft 2014, driven gear 2015.

[0052] The pressure regulating mechanism 201 is fixed to the lower side of the lower ring of the electric slip ring 202, the upper side of the upper ring of the electric slip ring 202 is fixed below the composite grinder module frame 204, the No. 2 bearing 205, the No. 1 motor 206, and the No. 2 motor 207 are installed in the inner cavity of the composite grinder module frame 204, wherein the output shaft end of the No. 1 motor 206 is installed with the rotating shaft 203, the upper end of the rotating shaft 203 is provided with a circular groove feature for fixing with the No. 1 motor 206, the rotating shaft 203 cooperates with the inner ring of the No. 2 bearing 205, the upper end of the rotating shaft 203 is provided with a stepped protrusion, which cooperates with the bearing nut 209 to fix the rotating shaft 203 with the No. 2 bearing 205, the rotating shaft 203 is provided with a square key feature for driving the rotation of the grinding disc 102. The drive gear 208 is installed on the output shaft of the No. 2 motor 207, and the drive gear 208 forms a meshing relationship with the driven gear 2015.

[0053] The driven gear 2015 is arranged on the upper end of the pressure regulating mechanism housing 2011 Figure 3The driven gear 2015 is arranged integrally with the composite grinding machine module frame 204, that is, the gear feature is arranged on the upper end of the composite grinding machine module frame 204, and the driven gear 2015 can also be arranged as a separate part and fixedly installed with the composite grinding machine module frame 204. The middle part of the composite grinding machine module frame 204 is provided with a round hole for the rotating shaft 203 to pass out, and the lower end of the composite grinding machine module frame 204 is provided with a cross-shaped groove, and the cross-shaped pressure shaft 2012 is arranged in the cross-shaped groove and can slide therein. The extension motor 2013 is fixedly installed in the cross-shaped groove, and the extension motor 2013 is fixed at the end of the extension shaft of the cross-shaped pressure shaft 2012, drives the cross-shaped pressure shaft 2012 to slide in the cross-shaped groove, and the lower end of the cross-shaped pressure shaft 2012 is provided with a ball head which extends into the waist-shaped groove on the adapter plate 104, and the end of the ball head is in point contact with the bottom surface of the waist-shaped groove. The contact point between the ball head and the bottom surface of the waist-shaped groove is the control point of the polishing pressure. When the extension motor 2013 drives the cross-shaped pressure shaft 2012 to slide in the cross-shaped groove, the contact point between the ball head and the bottom surface of the waist-shaped groove moves synchronously. The lower end of the pressure adjusting mechanism shell 2011 is also provided with a positioning shaft 2014 which is a cylinder and the end thereof extends into the circular groove on the adapter plate 104 to form a cooperation. The cooperation between the cross-shaped pressure shaft 2012 and the waist-shaped groove on the adapter plate 104 is used to fix the relative position of the composite tool module and the composite grinding machine module 2.

[0054] The composite grinding machine module 2 is fixed below the pressure output module 3. The pressure output module 3 can be a gas cylinder type constant force output device or a guide rail self-weight type constant force output device. The upper end of the pressure output module 3 is provided with a mounting hole for mounting the entire device on the end of the execution shaft of the industrial robot or the numerical control machine tool.

[0055] The polishing device is installed on the end of the execution shaft of the industrial robot or the numerical control machine tool and is driven only by the industrial robot or the numerical control machine tool. The polishing device is used to polish the surface of the optical element according to the polishing path as shown in the figure. Figure 7 、 Figure 8The setting trajectory movement is shown. The device moves on the surface of the optical element. The first motor 206 drives the rotating shaft 203 to rotate. The rotating shaft 203 further drives the grinding disc 102 and the grinding layer 101 to rotate on the surface of the optical element. The grinding disc 102 and the grinding layer 101 rotate on the surface of the optical element. The grinding disc 102, the grinding layer 101 and the outer ring of the first bearing 103 rotate relative to other parts of the equipment under the driving of the first motor 206. At the same time, the pressure output module 3 applies downward polishing pressure to the composite grinding machine module 2. The polishing pressure is applied to the contact point on the bottom surface of the waist-shaped groove through the composite grinding machine module rack 204, the electric slip ring 202, the ball head end of the cross-shaped pressure shaft 2012 of the pressure adjusting mechanism 201, and is further transmitted downward to the contact surface between the grinding layer 101 and the optical element. The grinding layer 101 realizes the accurate removal of the surface material of the optical element under the action of the rotating motion and the polishing pressure. The position of the ball head and the contact point on the bottom surface of the waist-shaped groove can be changed by driving the cross-shaped pressure shaft 2012 to slide in the cross-shaped groove through the telescopic motor 2013. The position of the contact point can be changed to change the pressure distribution on the contact surface between the grinding layer 101 and the optical element, and then the shape of the removal function is changed.

[0056] Embodiment two

[0057] An alternative solution of the polishing device with controllable pressure distribution is:

[0058] The device proposed in embodiment one of the application is designed simply. The contact point movement adjusting function is omitted, that is, the second motor, the electric slip ring, the driving gear and the driven gear are removed. The polishing pressure adjusting mechanism is simplified, that is, the cross-shaped sliding groove on the polishing pressure adjusting mechanism shell is removed, the telescopic motor is removed, and the cross-shaped pressure shaft is directly used as a feature on the polishing pressure adjusting mechanism shell. The pressure output shaft and the rotating output shaft of the degenerated device are still separated. The removal function shape is an optimized shape, but the active control of the removal function shape in the polishing process cannot be realized.

[0059] Embodiment three

[0060] An alternative solution of the polishing device with controllable pressure distribution is:

[0061] The polishing tool of the device proposed in embodiment one of the application is a disc type polishing tool. The disc type polishing tool can be replaced by a wheel type polishing tool, an air bag polishing tool or a magnetorheological polishing tool. The active control of the polishing pressure can still be realized for the above-mentioned tools, and then the removal function shape is optimized.

Claims

1. A controllable pressure distribution polishing apparatus, characterized by, The application relates to a polishing device for optical elements, which comprises a composite tool module (1), a composite grinder module (2) and a pressure output module (3). The composite tool module (1), the composite grinder module (2) and the pressure output module (3) are sequentially connected from bottom to top; the composite tool module (1) is in contact with the optical element to be polished, and the pressure output module (3) is connected with external equipment. The composite grinder module (2) comprises a pressure adjusting mechanism (201), a rotating shaft (203), a composite grinder module rack (204), a No. 2 bearing (205), a No. 1 motor (206) and a bearing nut (209). The pressure adjusting mechanism (201) and the No. 1 motor (206) are coaxially installed on the composite grinder module rack (204); the composite grinder module rack (204) is connected with the pressure output module (3); the No. 2 bearing (205) is installed on the pressure adjusting mechanism (201), and the No. 1 motor (206) drives the rotating shaft (203) to rotate, and the rotating shaft (203) is installed on the No. 2 bearing (205) through the bearing nut (209). The composite tool module (1) is disc-shaped and comprises a grinding layer (101), a grinding disc (102), a No. 1 bearing (103) and a connecting plate (104). The grinding layer (101) is fixedly connected with the grinding disc (102) and is located at the bottom surface of the grinding disc (102) and is in contact with the optical element to be polished; the grinding disc (102) is fixedly connected with the outer ring of the No. 1 bearing (103), the inner ring of the No. 1 bearing (103) is fixedly connected with the connecting plate (104); the grinding disc (102) and the connecting plate (104) can relatively rotate through the No. 1 bearing (103); the connecting plate (104) is fixedly connected with the pressure adjusting mechanism (201); the grinding disc (102) is matchedly connected with the rotating shaft (203), and the rotating shaft (203) drives the grinding disc (102) to rotate. The pressure output module (3) is a cylinder type constant force output device or a guide rail self-weight type constant force output device; the upper end of the pressure output module (3) is provided with a mounting hole which is used for fixedly connecting with external equipment. The pressure adjusting mechanism (201) comprises a pressure adjusting mechanism shell (2011), a cross-shaped pressure shaft (2012), an extension motor (2013) and a positioning shaft (2014); a driving gear (208) is matched with a gear outside the pressure adjusting mechanism shell (2011). The No. 2 bearing (205) is installed in the inner cavity of the pressure adjusting mechanism shell (2011), the cross-shaped pressure shaft (2012) is matched with a cross-shaped groove on the composite grinder module rack (204), and the extension motor (2013) is installed in the cross-shaped groove on the composite grinder module rack (204). The telescopic motor (2013) is fixed at the end of the telescopic shaft and drives the cross-shaped pressure shaft (2012) to slide in the cross-shaped groove. The lower end of the cross-shaped pressure shaft (2012) is provided with a ball head which extends into the waist-shaped groove of the adapter plate (104) and is in point contact with the bottom surface of the waist-shaped groove. The point of contact between the ball head and the bottom surface of the waist-shaped groove is the control point of the polishing pressure. When the telescopic motor (2013) drives the cross-shaped pressure shaft (2012) to slide in the cross-shaped groove, the point of contact between the ball head and the bottom surface of the waist-shaped groove moves synchronously.

2. The polishing apparatus according to claim 1, wherein The external device is an industrial robot or a numerical control machine tool.

3. The polishing apparatus of claim 1, wherein The grinding layer (101) is asphalt, damping cloth, polyurethane or fixed abrasive.

4. The polishing apparatus of claim 1, wherein The outer ring of the grinding disc (102) and the first bearing (103) are fixedly connected by screw connection, welding, gluing or buckle connection.

5. The polishing apparatus of claim 1, wherein The inner ring of the first bearing (103) and the adapter plate (104) are fixedly connected by screw connection, welding, gluing or buckle connection.

6. The polishing apparatus of claim 1, wherein The composite grinding machine module (2) further comprises an electric slip ring (202), a second motor (207) and a drive gear (208). The upper ring of the electric slip ring (202) is fixedly connected with the composite grinding machine module frame (204), and the lower ring of the electric slip ring (202) is fixedly connected with the pressure adjusting mechanism shell (2011). The second motor (207) is installed on the composite grinding machine module frame (204), the drive gear (208) is installed on the output shaft of the second motor (207), and the drive gear (208) is engaged with the gear of the pressure adjusting mechanism (201).

7. The polishing apparatus of claim 1, wherein The pressure adjusting mechanism (201) further comprises a driven gear (2015). The driven gear (2015) is installed on the composite grinding machine module frame (204) and is engaged with the drive gear (208).

8. The polishing apparatus of claim 1, wherein The polishing pressure distribution is actively controlled by changing the position of the contact pressure control point, thereby optimizing the removal function form.

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