Mobile device

Abstract

A mobile device is provided with a position and distance monitoring function, can avoid complexity and enlargement of the structure, and can avoid great increase of the weight of a mobile body and deterioration of weight balance. A moving body (2) is suspended by air injection with respect to a fixed body (1) in which magnetic segments (11) are provided on the upper surface at a fixed pitch (p), and electromagnets (31, 32) disposed within the moving body (2) at a disposition interval offset from the pitch (p) are energized by an energization control unit (81), causing magnetic force to sequentially act on the magnetic segments (11), and moving the moving body (2). The magnetic cores (5) of the electromagnets (31, 32) constituting the one electromagnet group (3) are electrically insulated from each other by an insulating sheet (52), and the magnetic core protrusions (51) of the magnetic cores (5) together with the magnetic segments (11) form a capacitor, and a detection means (82) detects a change in capacitance of the capacitor, thereby detecting a post-movement position or movement distance.

Description

Technical Field

[0001] The invention of the present application relates to a moving device that moves an object in at least one-dimensional direction, and to a moving device that has a function of determining a position or a moving distance of the object after movement in the one-dimensional direction. Background Art

[0002] A moving device that moves an object in at least one dimension is indispensable in various fields of industry, and various moving devices have been developed for use. In some fields, it is sometimes necessary to move an object while determining the position or movement distance of the object after the movement. For example, when the object is a precision-machined workpiece (processed object), such a moving device is often required.

[0003] For example, in a device that performs cutting or drilling at a predetermined position on a workpiece, a processing tool (cutting tool or drilling tool) that performs such processing is sometimes moved relative to the workpiece to perform processing at the predetermined position. On the other hand, sometimes, due to problems such as the weight of the processing tool, a structure is adopted in which the position of the processing tool is fixed and the workpiece is processed at a predetermined position relative to the processing tool. In these cases, a moving device that moves a support holding the processing tool or the workpiece is installed in the processing machine.

[0004] In such a moving device, it is sometimes required to have a function of monitoring the position or moving distance of a processing tool or workpiece after it has moved. A processing machine that performs the above-mentioned precision processing is one example, and in order to confirm whether the accuracy of the processing position is ensured, it is required to have a function of monitoring the position or moving distance of a processing tool or workpiece after it has moved (hereinafter referred to as a position distance monitoring function).

[0005] Regarding this position distance monitoring function, a structure using a laser rangefinder is often used. One side of the object to be moved (moving body) is set as a surface (reflecting surface) that reflects the laser light, and the laser light is directed in the direction consistent with the moving direction and irradiated to the reflecting surface. Since the reflected light of the laser returns from the reflecting surface, the position of the reflecting surface can be detected by detecting the phase difference between it and the incident light, and the moving distance can be calculated based on its change.

[0006] On the other hand, in a moving device that causes a moving body to float relative to a fixed object (fixed body) and move the moving body on the fixed body, the following structure is sometimes adopted: electrodes are provided on the surface of the fixed body opposite to the moving body and the surface of the moving body opposite to the fixed body to form a capacitor, and position information is obtained based on the change in the electrostatic capacitance of the capacitor. An example of such a moving device is disclosed in Patent Document 1. In Patent Document 1, a structure of an electromagnetic linear motor that moves by utilizing the magnetism between the fixed body and the moving body is adopted, and in addition to the electromagnet constituting the electromagnetic linear motor, a capacitor electrode for a position distance monitoring function is provided on the moving body.

[0007] In addition, Patent Document 2 discloses a structure of a position distance monitoring function in a moving device that also uses an electromagnetic linear motor. In the structure of Patent Document 2, a magnetic flux sensor is fixed on the side of the moving body. The magnetic flux sensor includes a magnetic flux generating unit including an electromagnet, and is configured to capture the change of the generated magnetic flux due to the interaction with the ferromagnetic body on the fixed body side and calculate the moving distance.

[0008] Prior art literature

[0009] Patent Literature

[0010] Patent Document 1: Japanese Patent Application Publication No. 2013-024702

[0011] Patent Document 2: Japanese Patent Application Publication No. 2008-145140 Summary of the invention

[0012] Problems to be solved by the invention

[0013] In the structure of the prior art using a laser rangefinder, if the moving distance becomes longer, the measuring range of the rangefinder also becomes longer accordingly, and a large structure is required. In many cases, the movement is performed in two-dimensional directions (X and Y directions), so a structure using a laser to measure the distance in two directions is required, which cannot avoid the complexity and large size of the structure.

[0014] In addition, even in a structure in which a capacitor electrode for position distance monitoring function is further provided to a moving body having an electromagnetic linear motor built therein as in Patent Document 1, there is a problem of structural complexity and enlargement. In order to obtain position information (or moving distance) based on the change in electrostatic capacitance, a certain electrostatic capacitance is required, and therefore, the capacitor electrode has to be enlarged to a certain extent. On the other hand, in the case of an electromagnetic linear motor, at least two electromagnets with a phase difference are required, and if these are built into the moving body, the structural complexity and enlargement of the moving body cannot be avoided.

[0015] Moreover, in a structure in which a magnetic flux sensor is added to a moving body as in Patent Document 2, the magnetic flux sensor including an electromagnet significantly increases the overall weight (weight to be moved), and there is a problem that the driving capability of the electromagnetic linear motor must be increased accordingly. In addition, since an additional unit is provided on the side, there is a problem that the weight balance may be deteriorated and the movable range of the moving body may be limited depending on the situation.

[0016] The invention of the present application is made to solve the above-mentioned problems when realizing the position distance monitoring function in a mobile device, and its purpose is to avoid the complexity and enlargement of the structure, and to avoid a significant increase in the weight of the mobile body and a deterioration in weight balance.

[0017] Means for solving problems

[0018] In order to solve the above-mentioned problems, the mobile device of the invention disclosed in this specification comprises a fixed body, a mobile body and a separation unit, wherein the fixed body is extended in at least one-dimensional direction, the mobile body is opposite to the fixed body and can move in the one-dimensional direction relative to the stationary fixed body, the separation unit separates the mobile body from the fixed body at least in the part where the propulsion force is applied, and the mobile device moves the mobile body in the one-dimensional direction and locates it at an arbitrary position.

[0019] In this moving device, on the surface of the fixed body opposite to the moving body, there are provided a plurality of magnetic segments composed of ferromagnetic material arranged at a certain interval in the one-dimensional direction, and on the surface of the moving body opposite to the fixed body, at least two electromagnets for generating magnetic flux are arranged in the one-dimensional direction in a state facing any one of the magnetic segments.

[0020] The separation unit is a unit for moving the movable body in the one-dimensional direction by utilizing the attractive force or repulsive force generated by causing the magnetic force formed by each electromagnet to act on each magnetic body segment, and separating the movable body from the fixed body while maintaining the separation distance of the magnetic force acting on each magnetic body segment.

[0021] The electromagnets are arranged at intervals offset by a natural number of times the pitch of the arrangement of the magnetic segments, and an energization control unit is provided for moving the moving body in the one-dimensional direction by controlling energization of the electromagnets.

[0022] Moreover, each magnetic segment is formed by a conductor, the part of the magnetic core of each electromagnet that is opposite to the moving body, that is, the front end of the magnetic core is a conductor, the front ends of the magnetic cores in each electromagnet are electrically insulated from each other, and a detection unit is provided for detecting the position of the moving body in the one-dimensional direction or the moving distance based on the value of the static capacitance of the capacitor formed by each magnetic segment and the front end of each magnetic core.

[0023] In addition, a moving device of another invention disclosed in the present specification comprises a fixed body, a moving body and a separation unit, wherein the fixed body is extended in two-dimensional directions, the moving body is opposite to the fixed body and can move in the two-dimensional directions relative to the stationary fixed body, the separation unit separates the moving body from the fixed body at least in the part where the propulsion force is applied, and the moving device moves the moving body in the two-dimensional directions and locates it at an arbitrary position.

[0024] In the moving device, a plurality of magnetic segments composed of ferromagnetic materials are arranged at a certain interval in the two-dimensional directions on the surface of the fixed body opposite to the moving body, and at least two electromagnets for generating magnetic flux are arranged in each of the two-dimensional directions in a state facing each magnetic segment on the surface of the moving body opposite to the fixed body.

[0025] Moreover, the separation unit is a unit for moving the movable body in the two-dimensional directions by utilizing the attractive force or repulsive force generated by causing the magnetic force formed by each electromagnet to act on each magnetic segment, while maintaining the separation distance of the magnetic force acting on each magnetic segment, so as to separate the movable body from the fixed body. Each electromagnet is arranged at an interval that deviates from the natural number of times the spacing of the arrangement of each magnetic segment, and is provided with a power control unit that controls the power supply to each electromagnet so as to move the movable body in any direction of the two dimensions.

[0026] Moreover, each magnetic segment is a conductor, the part of the magnetic core of each electromagnet that is opposite to the moving body, that is, the front end of the magnetic core is a conductor, the front ends of the magnetic cores in each electromagnet are electrically insulated from each other, and a detection unit is provided for detecting the position or moving distance of the moving body in any direction of the two-dimensional directions according to the value of the static capacitance of the capacitor formed by each magnetic segment and the front end of each magnetic core.

[0027] In order to solve the above-mentioned problem, the moving device of the above-mentioned other invention may have a configuration in which the two-dimensional directions are directions within a horizontal plane, and the separation unit is a unit that floats the moving body from the fixed body by injecting air.

[0028] In addition, in order to solve the above-mentioned problems, the mobile device of each of the above-mentioned inventions may have the following structure:

[0029] The cores of the electromagnets are provided with a yoke on the side opposite to the front end of the cores so as to be magnetically connected to each other.

[0030] An insulating portion is provided to insulate the front end of the magnetic core of each electromagnet from being electrically conductive via the yoke.

[0031] The insulating portion does not prevent the magnetic force generated by each electromagnet from acting on each magnetic body segment.

[0032] Furthermore, in order to solve the above-mentioned problem, in the mobile device of each of the above-mentioned inventions, the insulating portion may be an insulating layer having a thickness of 10 μm or more and 100 μm or less.

[0033] In addition, in order to solve the above-mentioned problems, the mobile device of the above-mentioned invention may have the following structure:

[0034] On the surface of the moving body facing the fixed body, three electromagnets for generating magnetic flux are arranged in a state of facing each magnetic body segment in the one-dimensional direction.

[0035] When the three electromagnets in the one-dimensional direction are set in adjacent order as the first electromagnet, the second electromagnet, and the third electromagnet, and the arrangement spacing of each magnetic segment is set to p, the second electromagnet is configured relative to the first electromagnet in a manner that deviates from p / 3 by a natural number multiple of the spacing p, and the third electromagnet is configured relative to the first electromagnet in a manner that deviates from 2p / 3 by a natural number multiple of the spacing p.

[0036] In addition, the mobile device of the above another invention may have the following structure:

[0037] On the surface of the moving body facing the fixed body, three electromagnets for generating magnetic flux are arranged in a state of facing each magnetic body segment in each direction of the two-dimensional.

[0038] When the three electromagnets in each direction are set in adjacent order as the first electromagnet, the second electromagnet, and the third electromagnet, and the arrangement spacing of each magnetic segment is set to p, the second electromagnet is arranged relative to the first electromagnet in a manner that deviates from p / 3 by a natural number multiple of the spacing p, and the third electromagnet is arranged relative to the first electromagnet in a manner that deviates from 2p / 3 by a natural number multiple of the spacing p.

[0039] Effects of the Invention

[0040] As described below, according to the moving device of each disclosed invention, since the core of any electromagnet is configured to also serve as a capacitor electrode in the position distance monitoring function, a moving device having a position distance monitoring function can be provided while avoiding complication and enlargement of the structure.

[0041] In addition, in the moving device of another disclosed invention, if the separation unit is constructed so that the moving body is suspended from the fixed body by injecting air, the following effect can be obtained: because it is not magnetic suspension, there is no problem of interference with the action of the magnetic force used for movement. In addition, there is no need to fill in the space between the magnetic segments to make the opposing surface of the fixed body opposite to the moving body a flat surface, which is relatively simple.

[0042] In addition, in the moving devices of the disclosed inventions, if the magnetic core of each electromagnet is constructed so that a yoke is provided on the side opposite to the front end of the magnetic core, and an insulating portion is provided for insulating the front end of the magnetic core of each electromagnet to prevent electrical conduction through the yoke, the magnetic core can be used also as a capacitor electrode for position distance monitoring while generating a higher propulsion force through a small excitation current.

[0043] In addition, three electromagnets are arranged in one-dimensional direction or in each of two-dimensional directions. When the three electromagnets are set as the first electromagnet, the second electromagnet, and the third electromagnet in adjacent order, and the arrangement pitch of each magnetic segment is set to p, the second electromagnet is arranged relative to the first electromagnet in a manner that deviates from p / 3 by a natural number multiple of the pitch p, and the third electromagnet is arranged relative to the first electromagnet in a manner that deviates from 2p / 3 by a natural number multiple of the pitch p. According to the above structure, the moving body can be effectively propelled with large power. Therefore, the power efficiency is high, and the effect of increasing the propulsion force or reducing the power consumption can be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic perspective view of the moving device according to the first embodiment.

[0045] Figure 2 yes Figure 1 A schematic front view and cross-sectional view of the main parts of the mobile device.

[0046] Figure 3 It is a schematic cross-sectional plan view showing the arrangement of the electromagnets in the moving body.

[0047] Figure 4 This is a schematic diagram showing the structure inside the control panel.

[0048] Figure 5 This is a schematic front view showing the structure of a wire harness.

[0049] Figure 6 It is a front cross-sectional schematic diagram showing a more detailed structure of the electromagnet group in the moving device of the first embodiment.

[0050] Figure 7 The figure shows the positional relationship between each core protrusion and each magnetic body segment in one electromagnet group.

[0051] Figure 8 This is a diagram showing changes in the electrostatic capacitance of a capacitor formed by each core head of one electromagnet group and the magnetic body segment facing the core head.

[0052] Fig. 9 It is a front schematic diagram showing the arrangement of each electromagnet group according to the second embodiment.

[0053] Fig.10It is a schematic cross-sectional plan view showing the arrangement of the electromagnets in the moving body.

[0054] Fig.11 This is a schematic diagram showing an example of the exciting current of each electromagnet constituting one electromagnet group in the second embodiment.

[0055] Description of Reference Numerals

[0056] 1 Fixed body

[0057] 11 Magnetic Segments

[0058] 2 Mobile body

[0059] 20 separation units

[0060] 21 jet nozzle

[0061] 3X direction electromagnet set

[0062] 31 Electromagnet

[0063] 32 electromagnet

[0064] 33 Electromagnet

[0065] 4Y direction electromagnet group

[0066] 41 Electromagnet

[0067] 42 Electromagnet

[0068] 43 Electromagnet

[0069] 5 core

[0070] 51 core convex part

[0071] 52 Insulation sheet

[0072] 6 coils

[0073] 7. Permanent magnet

[0074] 71 yoke

[0075] 8 Control Panel

[0076] 80 Main control unit

[0077] 81 Power supply control unit

[0078] 82 detection units

[0079] 821 high frequency application circuit

[0080] 822 capacitance detection circuit

[0081] 823 pitch position detection circuit

[0082] 824 peak counting circuit DETAILED DESCRIPTION

[0083] Next, a mode for carrying out the present invention (hereinafter referred to as an embodiment) will be described.

[0084] Figure 1 It is a schematic perspective view of the moving device according to the first embodiment. Figure 2 yes Figure 1 A schematic front view and cross-sectional view of the main parts of the mobile device.

[0085] The moving device of the present invention is a device that moves a moving body 2 relative to a stationary fixed body 1. The moving direction is at least one-dimensional, and in this embodiment, two-dimensional. The two-dimensional direction is two orthogonal directions (X and Y directions) in a horizontal plane. Figure 1 As shown, the fixed body 1 is a square disc-shaped component, and the moving body 2 is also a square plate-shaped component.

[0086] The moving device of the embodiment is configured such that the moving body 2 is separated from the fixed body 1 at least in the portion where the propulsion force acts, and the moving body 2 is moved while maintaining this state. Figure 2 As shown, a separation unit 20 is provided. In this embodiment, since the movement is in the direction within the horizontal plane, the suspension of the movable body 2 refers to the suspension from the fixed body 1, and the movable body 2 is completely separated from the fixed body 2. Therefore, the separation unit 20 is a suspension unit. As the suspension unit, that is, the separation unit 20, an air suspension structure is adopted in this embodiment.

[0087] like Figure 2 As shown in FIG. 1 , a plurality of injection ports 21 are provided at the end of the surface of the mobile body 2 that faces the fixed body 1. The injection ports 21 are terminal openings of a pressurizing path 22 provided on a side plate portion of a housing 200 constituting the mobile body 2. Figure 2 The pressure hose not shown in the figure is connected to a pressure source such as a compressor. When the pressure source is activated, the pressure path 22 becomes high pressure, and a high-pressure airflow is ejected from the ejection port 21. As a result, the mobile body 2 becomes suspended from the fixed body 1. In addition, a plurality of ejection ports 21 are evenly arranged along the square outline of the mobile body 2. For example, they are arranged at the four corners.

[0088] In this embodiment, an electromagnetic linear motor is used as a method for moving the air-suspended movable body 2. In this embodiment, a driving electromagnet is provided on the movable body 2 side, and a ferromagnetic body is provided on the fixed body 1 side.

[0089] like Figure 2As shown, on the surface of the fixed body 1 facing the movable body 2 (hereinafter referred to as the facing surface), a plurality of magnetic body segments 11 composed of ferromagnetic bodies are arranged at a certain interval. Figure 1 As shown in , each magnetic body segment 11 is a low-height square column. The cross-sectional shape in the horizontal direction is a square, and each side is along the X and Y directions. The size of each magnetic body segment 11 is the same, so the width in the X and Y directions is also the same in each magnetic body segment 11.

[0090] In the present embodiment, each magnetic segment 11 is formed by processing the surface of one side of a flat plate-shaped component made of a ferromagnetic body such as iron. A plate (hereinafter referred to as a segment plate) 12 having each magnetic segment 11 formed on one side of the surface is fixed to the upper surface of a base 13 to form a fixed body 1. In this example, a recess is formed on the upper surface of the base 13 for the segment plate 12 to be embedded, and the segment plate 12 is embedded and fixed in the recess. In addition, sometimes a non-magnetic material (such as a resin material) is buried between each magnetic segment 11 to make the upper surface of the fixed body 1 an overall flat surface. In addition, sometimes a tiny component made of a rectangular ferromagnetic body is fixed to one side of a plate-shaped component by brazing or bonding to form each magnetic segment 11.

[0091] The spacing between the magnetic segments 11 (in Figure 2 The spacing g of the arrangement is the same in both the X direction and the Y direction. Figure 2 The distance obtained by adding the distance (denoted by w in the figure) and the interval g is set as the pitch. Figure 2 In this embodiment, w=g, and therefore, w=g=p / 2.

[0092] Next, refer to Figure 2 The structure of the moving body 2 is described in more detail. When implementing the present invention, at least two electromagnets are sufficient, but in the present invention, two electromagnets are set as one group, and multiple groups (hereinafter referred to as electromagnet groups) are set. One electromagnet group is a driving source that generates a propulsion force to move in the X direction or the Y direction. Therefore, an electromagnet group 3 for the X direction and an electromagnet group 4 for the Y direction are provided.

[0093] exist Figure 2 In the figure, the two electromagnets 31 and 32 on the right side form an electromagnet group 3. Figure 2 The left and right directions in the figure are the X directions, so the electromagnet group 3 is an electromagnet group for the X direction. The two electromagnets 42, 42 on the left and the electromagnets (not shown) adjacent in the direction (Y direction) through the paper respectively constitute the electromagnet groups 4, 4. As for these electromagnet groups 4, 4, since the electromagnets are arranged in the Y direction, they are electromagnet groups for the Y direction.

[0094] like Figure 2 As shown, each electromagnet 31, 32, 42 is composed of a columnar magnetic core 5 and a coil 6 wound around the magnetic core 5. Insulating paper (illustration mark omitted) is sandwiched between each magnetic core 5 and each coil 6 for electrical insulation. Each electromagnet 31, 32, 42 is arranged in such a way that the long side direction of the magnetic core 5 is the up-down direction. Therefore, if the coil 6 is energized, a magnetic field that diverges on the upper and lower sides is formed. Because the lower surface of the coil 6 is opposite to the fixed body 1, the magnetic field that diverges on the lower side is in a state of being directed toward any magnetic segment 11, so that the magnetic force acts on the magnetic segment 11. At this time, the propulsion force in the X direction or the Y direction is generated by controlling the spatial arrangement of the electromagnets constituting the electromagnet group 3, 4 and the timing of energization.

[0095] In each of the electromagnets 31, 32, 42, the lower surface of the magnetic core 5 (the surface facing the fixed body 1) is as follows: Figure 2 The figure shows a comb-tooth-like concave-convex shape. In the present embodiment, the width of the convex portion 51 in the concave-convex is substantially the same as the width of the magnetic body segment 11 of the opposing moving body 2, and the width of the concave portion is substantially the same as the separation interval g of the magnetic body segment 11. In addition, the convex portion 51 is a shape (protrusion) elongated in the horizontal direction perpendicular to the direction in which the propulsion force is generated. That is, each convex portion 51 on the opposing surface of the magnetic core 5 in each electromagnet 31, 32 of the X-direction electromagnet group 3 is in the Y direction ( Figure 2 The Y direction is extended in the direction perpendicular to the paper surface) by the convex portion 51 of the core 5 in each electromagnet 42 of the electromagnet group 4 in the X direction ( Figure 2 Each protrusion 51 is hereinafter referred to as a core protrusion. In addition, each core protrusion 51 is sometimes formed into a square column shape like the magnetic body segment 11.

[0096] Such electromagnets are arranged at intervals that are offset from the intervals of the arrangement of the magnetic segments 11. Figure 2 In the figure, the arrangement pitch of the two electromagnets 31 and 32 constituting the X-direction electromagnet group 3 is referred to as the electromagnet pitch. Figure 2 In addition, for the sake of distinction, the pitch p of the magnetic body segments 11 is hereinafter referred to as the segment pitch.

[0097] like Figure 2 As shown, the electromagnet pitch p' deviates from the segment pitch p. Deviation refers to the length that is inconsistent with the natural number multiple of the segment pitch p. More specifically, in this embodiment, the electromagnet pitch p' deviates from the natural number multiple of the segment pitch p by a distance of p / 4. In this example, it is longer by p / 4 (p' = np + p / 4, n is a natural number).

[0098] In addition, if Figure 2As shown, permanent magnets 7, yokes 71 and bridge plates 72 are provided in the electromagnet groups 3 and 4. The permanent magnets 7 are fixed to the upper ends of the magnetic cores 5 of the electromagnets 31, 32, and 42. Each permanent magnet 7 is a plate-shaped component having a shape roughly the same as the upper end surface of the magnetic core 5. The magnetic poles of each permanent magnet 7 exist on the upper surface and the lower surface, for example, the upper side is the N pole and the lower side is the S pole (it can also be the opposite). In each permanent magnet 7, the magnetic poles exist in the same manner. In the above example, the upper side of all permanent magnets 7 is the N pole and the lower side is the S pole. The yoke 71 is connected to the upper side of each permanent magnet 7, connecting each permanent magnet 7 to form a magnetic circuit. Each bridge plate 72 is a component used to connect each magnetic core 5 to stabilize each electromagnet 31, 32, and 42, and is formed of a material with high magnetic permeability such as iron.

[0099] Reference Figure 3 The arrangement of the X-direction electromagnet group 3 and the Y-direction electromagnet group 4 composed of the electromagnets 31 , 32 , and 42 in the horizontal direction will be described. Figure 3 It is a schematic cross-sectional plan view showing the arrangement of the electromagnets in the moving body 2 .

[0100] exist Figure 3 In the figure, for convenience, the horizontal area in the internal structure of the moving body 2 is divided into four areas. The four areas are set as the first quadrant, the second quadrant, the third quadrant, and the fourth quadrant in the clockwise direction from the upper right. Two (a total of four) X-direction electromagnet groups 3 are respectively arranged in the second quadrant and the fourth quadrant, and two (a total of four) Y-direction electromagnet groups 4 are respectively arranged in the first quadrant and the third quadrant. In each X-direction electromagnet group 3, two X-direction electromagnets 31 and 32 are arranged in the X direction, and in each Y-direction electromagnet group 4, two Y-direction electromagnets 41 and 42 are arranged in the Y direction. In each X-direction electromagnet group 3, as described above, the electromagnet pitch p' deviates from the segment pitch p by p / 4. In each Y-direction electromagnet group 4, the electromagnet pitch p' also deviates from the segment pitch p by p / 4.

[0101] like Figure 1 As shown, a control panel 8 is fixed on the side of the fixing body 1 . Figure 4 : is a schematic diagram showing the structure in the control panel 8. In the control panel 8, there is provided an energization control unit 81 for generating a propulsion force in the X direction and a propulsion force in the Y direction by controlling the energization of each coil 6 of each electromagnet 31, 32, 41, 42 arranged as described above. Figure 4 Only two electromagnet groups 3 and 4 are shown in the figure, and the remaining electromagnet groups 3 and 4 are also connected to the power supply control unit 81 in the same manner.

[0102] The magnetomotive force generated by energizing each coil 6 weakens or strengthens the magnetic force generated by each permanent magnet 7 while controlling the magnetic flux generated by each electromagnet 31, 32, 41, 42, thereby generating a propulsive force. Figure 2 The X direction is described as an example.

[0103] exist Figure 2 In the X-direction electromagnet group 3 shown, the electromagnets 31 whose core protrusions 51 face the magnetic body segments 11 are energized in such a manner as to generate a magnetomotive force (magnetomotive force in the opposite direction) that weakens the magnetic force generated by the permanent magnet 7 and makes it substantially zero, and the electromagnets 32 whose core protrusions 51 do not face the magnetic body segments 11 are energized in such a manner as to generate a magnetomotive force (magnetomotive force in the same direction) that strengthens the magnetic force generated by the permanent magnet 7. Thus, a force that attracts the magnetic body segments 11 to the core protrusions 51 of the electromagnets 32 that strengthen the magnetic force is exerted, and since the fixed body 1 is fixed, a propulsive force is relatively generated on the movable body 2. At the timing when each core protrusion 51 faces each magnetic body segment 11, the energization of each electromagnet 31, 32 is switched, and the electromagnet that each core protrusion 51 is no longer facing is energized to increase the magnetic force, and the electromagnet that each core protrusion 51 faces is energized to make the magnetic force substantially zero. By repeating the above process, the moving body 2 moves in the X direction. The same is true for the Y direction. Regarding the more detailed structure of the energization control, since it can be the same as that of a conventional electromagnetic linear motor, a more detailed description is omitted.

[0104] In addition, Figure 3 In the electromagnet groups 3 and 4 shown, when moving in the X direction, the electromagnets 31 and 32 of the four X-direction electromagnet groups 3 are energized simultaneously as described above. When moving in the Y direction, the electromagnets 41 and 42 of the four Y-direction electromagnet groups 4 are energized simultaneously as described above.

[0105] like Figure 1 As shown, the control panel 8 is fixed to the side of the fixed body 1. The control panel 8 and the movable body 2 are connected by a harness 9, and the harness 9 includes electric wires 23 for each electromagnet 31, 32, 41, 42 and a pressure supply hose 24. Figure 5 This is a schematic front view showing the structure of a wire harness. Figure 5 (1) is a schematic diagram of a partial cross-section of the main view, Figure 5 (2) is a schematic top view.

[0106] like Figure 5As shown, a pair of upper and lower brackets 91 are fixed to the side plate of the housing 200. A bracket 92 is installed between the pair of brackets 91. The bracket 92 is installed via a vertical rotation axis pin 93 and can rotate. The wiring harness 90 is a structure that connects a pair of upper and lower connecting hoops 94 in the length direction. The front end edge of each connecting hoop 94 is arc-shaped, and a step is formed at the rear end for the front end edge of the connecting hoop 94 on the rear side to fall into. The shape of the edge of the step is also arc-shaped, matching the shape of the arc of the front end edge. The front end edge of the connecting hoop 94 on the rear side falls into the step, and the two are connected by a rotation axis pin 95. Each rotation axis pin 95 is a pin with a vertical direction as the rotation axis. Moreover, in this structure, it is symmetrical from top to bottom, and the electric wire 23, the pressure hose 24, etc. are inserted into the hollow space therein.

[0107] The harness 9 can be bent or stretched in the horizontal plane with the movement of the moving body 2 by the above-mentioned structure. On the other hand, the harness 9 cannot be bent in the vertical direction by the connection of each connection hoop 94, and the harness 9 does not contact the fixed body 1. In addition, the harness 9 has a length that is sufficiently longer than the distance when the moving body 2 is located at the farthest position from the control panel 8.

[0108] The mobile device of this embodiment is equipped with a position distance monitoring function. While the mobile device of this embodiment is equipped with a position distance monitoring function, it is designed to avoid the complexity and enlargement of the structure, the significant increase in the weight of the mobile body 2, and the deterioration of the weight balance. Figure 6 This point will be explained. Figure 6 It is a front cross-sectional schematic diagram showing a more detailed structure of the electromagnet group in the moving device of the first embodiment.

[0109] The moving device of the embodiment adopts the following structure: a capacitor is formed between the moving body 2 and the fixed body 1, and the moving distance and the position after the movement are determined by detecting the change of the electrostatic capacitance accompanying the movement. At this time, in order to avoid the complexity of the structure, the structure in which the magnetic core 5 in the electromagnetic linear motor is also used as the capacitor electrode for the position distance monitoring function is adopted.

[0110] The capacitor for the position distance monitoring function is composed of the mutually opposing parts of the fixed body 1 and the movable body 2. Therefore, these parts become conductive bodies. More specifically, in this embodiment, it is composed of each magnetic core protrusion 51 formed at the lower end of the magnetic core 5 in one of the electromagnets 31, 32, 41, 42 in each electromagnet group 3, 4 and each magnetic body segment 11 on the upper surface of the fixed body 1. They are formed of a ferromagnetic body such as iron and are conductive bodies.

[0111] As described above, the separation unit 20 as a suspension unit separates the movable body 2 from the fixed body 1 by air jetting, but the suspension distance (separation distance) at this time is a very small distance. When the movable body 2 is suspended, the parts closest to the fixed body 1 are the core protrusions 51 of the magnetic core 5. On the other hand, the parts of the fixed body 1 closest to the movable body 2 are the magnetic body segments 11. The separation distance (in Figure 6 The pressure source constituting the suspension unit is controlled to achieve this distance. As a result of separation by distance, each core protrusion 51 and each magnetic body segment 11 form a capacitor. The ratio of the opposing areas of each core protrusion 51 and each magnetic body segment 11 changes periodically with the movement of the moving body 2. Therefore, by applying a voltage to the capacitor and detecting the change in the measured static capacitance, the moving distance and the position after the movement of the moving body 2 can be determined as described later.

[0112] In this structure, it is important to electrically insulate the cores 5 of the electromagnets 31, 32, 41, 42 in the electromagnet groups 3 and 4 from each other. The reason for this is that the position distance monitoring is performed by utilizing the fact that the sinusoidal change in the capacitance of the capacitor formed by the cores of the electromagnets constituting one electromagnet group has a 90° phase difference. This is because if the two are electrically conductive, the phase difference disappears and the position detection within the pitch p becomes impossible. Therefore, it is necessary to detect the change in static capacitance of only one core 5, and it is necessary to insulate each core protrusion 51 of a core 5 from each protrusion 51 of other cores 5. At this time, each core protrusion 51 is a part that generates a propulsive force by applying a magnetic force to each magnetic body segment 11, so it is necessary not to hinder the formation of the magnetic circuit.

[0113] As a means for solving the above-mentioned new technical problem, in the present embodiment, an insulating layer is provided between the electromagnet groups 3 and 4 to insulate the magnetic cores 5 from each other. As the insulating layer, an insulating sheet 52 is used.

[0114] like Figure 6 As shown, the magnetic core 5 is composed of a magnetic core body 50 around which the coil 6 is wound, a magnetic core head 53 at the front end of which each magnetic core protrusion 51 is formed, and an insulating sheet 52 provided in a state of being sandwiched between the magnetic core body 50 and the magnetic core head 53. As the insulating sheet 52, a double-sided tape (a tape with adhesive layers on both sides) with a thickness of about 10 to 100 μm can be preferably used. For example, kapton tape 650S#50 (thickness 50 μm) manufactured by Teraoka Seisakusho Co., Ltd. can be used. In addition, the magnetic core head 53 is equivalent to the front end of the magnetic core in this embodiment.

[0115] The insulating sheet 52 is made of paper or resin and is basically non-magnetic. Therefore, if it is thick, it will hinder the magnetic field and fail to make sufficient magnetic force act on each magnetic body segment 11. Therefore, it is preferably made 100μm or less. If the thickness of the insulating sheet 52 is thinner than 10μm, sufficient insulation cannot be obtained.

[0116] The core head 53 is attached to the core body 50 in a state of being pressed by a frame (not shown). Therefore, the insulating sheet 52 may be a sheet having no adhesiveness.

[0117] In addition, the core head 53 is connected to a wiring for position distance monitoring (hereinafter referred to as monitoring wiring) 54. The monitoring wiring 54 includes a feeder wire for applying a voltage to charge the capacitor formed by each core protrusion 51 and each magnetic body segment 11 and a detection wire for detecting the static capacitance in the capacitor. The monitoring wiring 54 is bundled together with the feeder wires 23 of each electromagnet 31, 32, 41, 42 and the like and included in the wiring harness 9, and is connected to a detection unit 82 for position distance monitoring built into the control board 8.

[0118] Below, refer to Figure 4 , Figure 7 and Figure 8 The structure of the detection unit 82 for position distance monitoring will be described. Figure 7 The figure shows the positional relationship between each core protrusion and each magnetic body segment in one electromagnet group. Figure 8 1 is a diagram showing the change in the electrostatic capacitance of the capacitor formed by each magnetic core head of an electromagnet group and the magnetic body segment 11 facing it. Figure 7 In the embodiment, the core head of one electromagnet 31, 41 constituting one electromagnet group 3, 4 is set to 53a, and the core protrusion is set to 51a, and the core head of the other electromagnet 32, 42 is set to 53b, and the core protrusion is set to 51b.

[0119] The detection unit 82 can be made into the same structure as a resolver that detects the rotation angle of the rotor of the motor. Figure 4 As shown, the detection unit 82 includes a high-frequency application circuit 821 for applying a high-frequency voltage for detection to each core head 53, a capacitance detection circuit 822 for detecting the static capacitance of each core head 53 and the magnetic body segment 11, and an intra-spacing position detection circuit 823 for processing the output of the capacitance detection circuit 822 to detect the position within 1 spacing.

[0120] Figure 7(1) indicates the position of the moving body 2 relative to the fixed body 1 in the initial state before the movement starts. If the X direction is described, for example, in this example, each core protrusion 51a of the core head 53a in one electromagnet 31 is in a state where it is completely opposite to each magnetic body segment 11 (the center is aligned in the vertical direction). Each core protrusion 51b of the core head 53b in the other electromagnet 32 ​​is in a state where it is offset by p / 4 relative to each magnetic body segment 11. In this state, the electrostatic capacitance in one core head 53a is the largest, and the electrostatic capacitance in the other core head 53b is half of it.

[0121] Assume that from this state, the electromagnets are energized by the energization control unit 81 and move a distance of p / 4. Figure 7 In this state, the static capacitance in one core head 53a is reduced from the maximum value to 1 / 2. Since each core protrusion 51b of the other core head 53b is located in the middle of each magnetic body segment 11, the static capacitance is substantially zero.

[0122] from Figure 7 The state shown in (2) is further moved by p / 4. Figure 7 In this state, the electrostatic capacitance in one core head 53a is substantially zero, and the electrostatic capacitance in the other core head 53b is 1 / 2 of the maximum value. If it is further moved by p / 4, as shown in Figure 7 As shown in (4), the electrostatic capacitance in one core head 53a becomes 1 / 2 of the maximum value, and the electrostatic capacitance in the other core head 53b becomes the maximum value. If it moves further by p / 4, it becomes the initial Figure 7 The state shown in (1).

[0123] Thus, the electrostatic capacitance detected by the core head 53 of each electromagnet changes periodically with the movement of the moving body 2. Moreover, the change in electrostatic capacitance detected by the core head 53 of another electromagnet is in a state where the change in electrostatic capacitance detected by the core head 53 of one electromagnet is deviated by just p / 4. Since the movement of the pitch p is one cycle (360 degrees), the deviation is 1 / 4 cycle (90 degrees).

[0124] Figure 8 (1) shows the high-frequency voltage applied to each core head 53a, 53b. The high-frequency voltage is applied to each core head 53a, 53b synchronously.

[0125] Figure 8 (2) and (3) show changes in electrostatic capacitance at each core head 53a, 53b when the moving body 2 moves in a state where a high-frequency voltage is applied. Figure 8 (2) is the change of the electrostatic capacitance at the core head 53a, Figure 8(3) is the change in electrostatic capacitance at the other core head 53b. The capacitance detection circuit 822 is configured to discharge the capacitor at the timing of the peak of the high-frequency voltage and detect the electrostatic capacitance during discharge based on the amount of current flowing at this time.

[0126] exist Figure 8 In (2) and (3), the change in the electrostatic capacitance of each capacitor is the change in the electrostatic capacitance detected at the peak of the high-frequency voltage, and the envelope (not shown) drawn along the peak is equivalent to the change. Figure 8 From (2) and (3), it can be seen that, as for the envelope, since the phase is shifted by 90 degrees, if one is set to sinθ, the other is cosθ. Therefore, for the value of θ when a certain static capacitance is detected, tanθ = {(sinθ) / (cosθ)} is calculated, and tan －1 Since θ indicates the position within the pitch p, it means that it is possible to determine which position within the pitch p the stop position after the movement is. The within-pitch position detection circuit 823 is configured to perform the above calculation to determine the position within one pitch p.

[0127] The detection unit 82 includes a circuit 824 for detecting the number of periodic changes in the electrostatic capacitance of one of the core heads 53. For example, the circuit 824 includes a circuit for detecting the number of peaks on the positive side of the envelope sinθ. Hereinafter, the circuit 824 is referred to as a peak counting circuit.

[0128] The detection unit 82 is provided with a moving distance calculation circuit 825 that calculates the moving distance based on the number of peaks counted by the peak counting circuit 824 and the position within the pitch determined by the position within the pitch detection circuit 823. That is, the moving distance calculation circuit 825 calculates the number of peaks × pitch p (distance) + position within the pitch and outputs it as the moving distance. If the position at the time of starting the movement is determined, the position after the movement is determined by calculating the moving distance according to the above description.

[0129] The detection unit 82 has such a structure in both the X direction and the Y direction. Therefore, the movement distance and the position after the movement are determined in both the X direction and the Y direction.

[0130] like Figure 4As shown, the mobile device of the embodiment includes a main control unit 80 in the control panel 8. The main control unit 80 controls each element of each power-on control unit 81 and the detection unit 82. In the main control unit 80, information on the pitch p and the standby position of the mobile body 2 is given as a constant. The main control unit 80 includes an input unit (not shown) to which external instructions related to movement are input. The main control unit 80 is configured to send a control signal for moving in the X direction and / or the Y direction to the power-on control unit 81 based on the information input to the input unit, and monitor the position of the moving mobile body 2 by detecting the detection unit 82.

[0131] For example, when an instruction to move a distance of ○○ from the standby position in the X direction is input from the outside, the main control unit 80 divides the distance by the pitch p to obtain the pitch number, and calculates the remainder (hereinafter also referred to as the remainder distance). Then, an action signal is sent to the power-on control unit 81 and the detection unit 82 is made to perform detection to monitor the moving distance. After the peak counting circuit 824 in the detection unit 82 counts the peak of the pitch number, a stop signal is sent to the power-on control unit 81 to stop the power supply at the stage where the detection value of the position detection circuit 823 in the pitch is consistent with the remainder distance or the nearest stage. The main control unit 80 is configured to perform such control in the Y direction in addition to the X direction.

[0132] Next, a usage example of the moving device of this embodiment will be described. In the following description, an example is given in which the moving device is mounted on a processing device that processes a workpiece and operates.

[0133] The workpiece is placed on the moving body 2 and fixed on the moving body 2 as required so as not to deviate. For example, the moving body 2 is provided with a vacuum adsorption hole on the upper surface to evacuate and fix the workpiece. An electrostatic chuck structure for electrostatic adsorption is sometimes provided on the upper surface of the moving body 2. Alternatively, a workbench is sometimes fixed separately on the moving body 2, and a vacuum adsorption mechanism or an electrostatic chuck is provided on the workbench.

[0134] Before and after the workpiece is placed on the movable body 2, an external instruction related to the movement is input to the main control unit 80. The external instruction contains information about the direction of movement and the distance of movement. The main control unit 80 sends a control signal to the power-on control unit 81 according to the external instruction, so that it moves a specified distance in the X direction and / or the Y direction. At this time, a monitoring signal (a signal indicating the detection result of the position after movement or the moving distance) is always sent from the detection unit 82 to the main control unit 80. If the movement is performed to the distance to reach the position specified by the external instruction, a stop signal is sent to the power-on control unit 81 to stop the movable body 2. In addition, in the stopped state, a control signal is sent to the power-on control unit 81 so that all coils 6 flow an excitation current in a direction that makes the magnetic field generated by the permanent magnet 7 zero.

[0135] After that, the workpiece on the movable body 2 is subjected to the prescribed processing. When it is necessary to process the workpiece after the workpiece is located at another position, an external command is further input to the main control unit 80 to move it. In addition, the main control unit 80 includes a storage unit such as a memory, and includes a module that stores the position (X-direction position and Y-direction position) at the moment of completion of the movement in the storage unit. In the case of the next movement, the moving direction and moving distance are calculated based on the position (XY coordinates) when the movement was completed last time, and a control signal is sent to each power-on control unit 81 according to the signal from the detection unit 82 to move in the direction and distance. In addition, based on the position within the spacing when the movement was completed last time, the electromagnet to be initially excited is selected so that the magnetic force from the core protrusion 51 located in front of the moving direction acts first and starts to move.

[0136] In the operation of the above-mentioned moving device, there are cases where the movement in each direction is performed sequentially, such as the movement in the X direction followed by the movement in the Y direction, or there are cases where the movement is performed simultaneously. In the case of performing the movement simultaneously, the electromagnets 31 and 32 of the electromagnet group 3 for the X direction and the electromagnets 41 and 42 of the electromagnet group 4 for the Y direction are energized at the same time, and the moving body 2 moves in an inclined direction. The inclined direction may be 45 degrees or other angles. In the case of moving at an angle other than 45 degrees, the electromagnets 31 and 32 of the electromagnet group 3 for the X direction and the electromagnets 41 and 42 of the electromagnet group 4 for the Y direction are energized in a manner that the energized current is different.

[0137] The mobile device of this embodiment is a structure in which the magnetic core 5 of the electromagnet group 3, 4 also serves as the capacitor electrode in the position distance monitoring function, so it is a mobile device having the position distance monitoring function while avoiding the complexity and large-scale structure. In addition, in the case where multiple electromagnet groups 3, 4 are respectively provided in the X and Y directions as in the embodiment, it is sufficient to add a structure for capacitor capacitance detection for the position distance monitoring function to only one electromagnet group 3, 4 in each direction. However, it is also possible to perform capacitor capacitance detection in multiple electromagnet groups 3, 4 in each direction, and take the average as the detection result of the position within the spacing.

[0138] In addition, in the structure of the above-mentioned embodiment, the insulating layer is not indispensable. The insulating layer is provided in consideration of the fact that the magnetic cores 5 of the two electromagnets constituting the electromagnet group are electrically connected by the yoke 71 and the bridge plate 72. Therefore, if the magnetic cores 5 of the two electromagnets constituting the electromagnet group are not electrically connected, it is sufficient to connect the high-frequency applying circuit 821, the capacitance detecting circuit 822, etc.

[0139] However, the yoke 71 has the effect of preventing the leakage of the magnetic field generated by each permanent magnet 7 and each electromagnet to further increase the magnetic flux acting on each magnetic body segment 11, and has the significance of generating a higher propulsion force with a small excitation current. Therefore, the insulating layer has the significance of generating a higher propulsion force with a small excitation current, and at the same time, allowing the magnetic core 5 to also serve as a capacitor electrode for position distance monitoring.

[0140] In addition, as the insulating layer, in addition to the above-mentioned insulating sheet 52, a layer provided by coating may be used, and an insulating spacer in which a plurality of minute insulating members are dispersed may be used.

[0141] In addition, in the first embodiment, the deviation between the electromagnet pitch p' and the segment pitch p does not need to be p / 4, and may be other deviations. In the case of a deviation other than p / 4, since the difference between the deviation and p / 4 is known (design value), the position within the pitch is calculated based on the difference. That is, when the difference (phase difference) from p / 4 is set to Δθ, Δθ is applied to the periodic change of the electrostatic capacitance of the other party to make it cosθ, and on this basis, it is combined with the periodic change of the electrostatic capacitance of one party sinθ and θ (position within the pitch) is calculated as described above. However, when it is set to p / 4 in advance, the calculation is simplified, so it is more preferred.

[0142] Next, a mobile device according to a second embodiment will be described. Fig. 9 and Fig.10 It is a schematic diagram of the main part of the moving device of the second embodiment, and is a schematic diagram showing the arrangement of each electromagnet group. Fig. 9 2 is a front schematic diagram showing the arrangement of each electromagnet group according to the second embodiment. Fig.10 It is a schematic cross-sectional plan view showing the arrangement of the electromagnets in the moving body.

[0143] In the second embodiment, as the overall horizontal configuration, Fig.10 In the illustrated second and fourth quadrants, two X-direction electromagnet groups 3 are disposed respectively, and in the illustrated first and third quadrants, two Y-direction electromagnet groups 4 are disposed respectively.

[0144] Moreover, in the second embodiment, unlike the first embodiment, one electromagnet group 3, 4 is composed of three electromagnets 31-33, 41-43. Hereinafter, for the sake of convenience, the three electromagnets are referred to as the first electromagnet 31, 41, the second electromagnet 32, 42, and the third electromagnet 33, 43. The three electromagnets 31-33, 41-43 are arranged in a state where the spacing is deviated from p / 3 by a natural number multiple of the pitch p. That is, for example, in the X direction, as Fig. 9As shown, assuming that each core protrusion 51 of the core 5 of the first electromagnet 31 is directly opposite to each magnetic body segment 11, each core protrusion 51 of the core 5 of the second electromagnet 32 ​​is opposite to each other with a deviation of p / 3. Each core protrusion 51 of the core 5 of the third electromagnet 33 is opposite to each other with a deviation of 2p / 3.

[0145] The structure of the three electromagnets 31 to 33, 41 to 43 constituting each electromagnet group 3, 4 is the same as that of the first embodiment. The upper side is fixed to each other by a bridge plate 72 and each permanent magnet 7 is arranged thereon, and a yoke 71 is further provided on the upper side to form a magnetic circuit. In addition, the magnetic core 5 of each electromagnet is composed of a magnetic core body 50 and a magnetic core head 53, and the magnetic core body 50 and the magnetic core head 53 are insulated by an insulating sheet 52 as an insulating layer. The insulating layer is also a relatively thin layer of about 10 to 100 μm, which allows the magnetic flux to pass through sufficiently while providing electrical insulation, so that the intensity of the magnetic field emitted from each magnetic core protrusion 51 is sufficiently high.

[0146] Fig.11 This is a schematic diagram showing an example of the excitation current of each electromagnet constituting an electromagnet group in the second embodiment. This example is an example in which the excitation current of each electromagnet 31 to 33, 41 to 43 changes in a sinusoidal shape. As an example, I1 represents the excitation current of the first electromagnet 31 in the X-direction electromagnet group 3, I2 represents the excitation current of the second electromagnet 32, and I3 represents the excitation current of the third electromagnet 33. Fig.11 As shown in , each of the excitation currents I1, I2, and I3 is a current that becomes a negative peak when the core protrusions 51 of the electromagnet to which the excitation current is applied are directly opposite (coaxial) to the magnetic body segment 11, and becomes a positive peak when the core protrusions 51 are directly opposite to the recessed portion between the magnetic body segment 11. In addition, corresponding to the arrangement of each core 5 in a manner deviated by p / 3, the excitation currents are also shifted by 120 degrees in phase, and become the same applied voltage as the three-phase AC.

[0147] In this way, according to the structure in which an electromagnet group 3, 4 is composed of three electromagnets 31~33, 41~43 and excited by excitation currents with phases shifted by 120 degrees, the movable body 2 can be effectively propelled with large power, just like the case of three-phase AC power transmission. Therefore, the power efficiency is high, and the propulsion force can be increased or the power consumption can be reduced.

[0148] In this embodiment, the position distance monitoring function is also realized by detecting the change in the static capacitance of the capacitor formed by the core head 53 and the magnetic body segment 11 of each electromagnet 31 to 33, 41 to 43 constituting one electromagnet group 3, 4. The in-spacing position detection circuit 823 processes the signal of the three-phase AC to detect the in-spacing position. As a structure used for this, the following structure can be adopted: after converting the three-phase AC into two phases, tanθ={(sinθ) / (cosθ)} is calculated in the same way, and tan －1 θ detects the position within the pitch (for example, refer to the Internet document: http: / / deadsection.image.coocan.jp / dead_sec / conv3-2 / conv3-2.htm). Since the converted two-phase signal is shifted by 30 degrees and 120 degrees respectively with respect to the first phase signal before conversion, the structure is configured to perform calculation processing to determine θ (position within the pitch) in consideration of this.

[0149] In each of the above-mentioned embodiments, an air suspension type suspension unit is used as the separation unit 20, but other separation units may also be used. For example, a separation unit using a tiny rolling body may also be used. In this case, for the surface of the fixed body 1 that is opposite to the movable body 2, a non-magnetic and insulating material (such as resin) is used to fill the space between the magnetic segments 11 to form a flat surface. The rolling body is set as a spherical body like a bearing, and a retaining frame for accommodating the rolling body is set at the four corners of the movable body 2. The rolling body can roll in a state of protruding slightly downward from the retaining frame. In this structure, the part where the rolling body contacts is not the part where the propulsion force acts, but in this part, the movable body is not separated from the fixed body.

[0150] In addition, when a suspension unit is used, a magnetic suspension type is sometimes used instead of an air suspension type. For example, in the case of one-dimensional movement, a guide plate is provided on both sides along the movement direction, and the moving body 2 moves inside the guide plate. In this case, a magnet is arranged between the side surface of the moving body 2 and the guide plate to attract the moving body 2 by exerting a magnetic force. The structure is set to make the attraction generated by the magnetic field on both sides equal and balanced, thereby levitating from the fixed body 1.

[0151] However, in the structure using an air-suspended suspension unit as the separation unit 20, the following effects can be obtained: there is no problem of magnetic interference with the action of the magnetic force used for movement, and in addition, there is no need to fill in the spaces between the magnetic segments to make the opposing surfaces of the fixed body and the movable body flat, which is relatively simple.

[0152] In the above-mentioned embodiments, the front end surface of each magnetic core head 53 is in a concave-convex shape and the structure in which the magnetic core protrusion 51 is formed has the effect of increasing the magnetic flux density and improving the magnetic field efficiency for the magnetic force acting on each magnetic body segment 11. Even if the front end surface of each magnetic core head 53 is a flat surface, the present invention can be implemented, but since the magnetic flux will become a state of being roughly uniformly diverged from the front end surface, a part of it will act on each magnetic body segment 11 to generate a propulsion force, and therefore the magnetic flux that is not used to generate the propulsion force will increase. If the structure is formed with each magnetic core protrusion 51, the magnetic flux will be concentrated in the part with high magnetic permeability, so it will diverge after converging on each magnetic core protrusion 51. Therefore, the magnetic flux density becomes higher, and the propulsion force can be generated more efficiently.

[0153] The width (length in the moving direction) of each core protrusion 51 preferably does not differ greatly from the width of each magnetic segment 11 . For example, the width of each core protrusion 51 is preferably in the range of about 1 / 2 to 2 times the width of each magnetic segment 11 .

[0154] In addition, the arrangement pitch p of each magnetic body segment 11 may be different in the X direction and the Y direction. In this case, the detection unit 82 sets the pitch px in the X direction to a known constant and calculates the moving distance and the position within the pitch, and sets the pitch py in the Y direction to a known constant and calculates the moving distance and the position within the pitch.

[0155] In connection with the above, each magnetic body segment 11 is in the shape of a column with a square cross section, but may also be in the shape of a column with a rectangular cross section.

Claims

1. A mobile device, comprising a fixed body, a mobile body and a separation unit, wherein the fixed body is elongated in at least one-dimensional direction, the mobile body is opposite to the fixed body and can move in the one-dimensional direction relative to the stationary fixed body, the separation unit separates the mobile body from the fixed body at least in the part where the propulsion force is applied, and the mobile device moves the mobile body in the one-dimensional direction and locates it at an arbitrary position, characterized in that: On the surface of the fixed body facing the movable body, a plurality of magnetic body segments composed of ferromagnetic bodies are arranged at a certain interval in the one-dimensional direction. On the surface of the moving body facing the fixed body, at least two electromagnets for generating magnetic flux are arranged in a state of facing any one of the magnetic body segments in the one-dimensional direction. The separation unit is a unit for moving the moving body in the one-dimensional direction by utilizing the attraction or repulsion force generated by causing the magnetic force formed by each electromagnet to act on each magnetic body segment, and separating the moving body from the fixed body while maintaining the separation distance of the magnetic force acting on each magnetic body segment. The electromagnets are arranged at intervals that are offset by a natural number of times the pitch of the arrangement of the magnetic segments, and an energization control unit is provided for controlling energization of the electromagnets to move the moving body in the one-dimensional direction. Each magnetic segment is formed by a conductor. The portion of the magnetic core of each electromagnet that is opposite to the fixed body, that is, the front end of the magnetic core is a conductor, and the front ends of the magnetic cores in each electromagnet are electrically insulated from each other. A detection unit is provided for detecting the position or movement distance of the moving body in the one-dimensional direction based on the value of the electrostatic capacitance of a capacitor formed by each magnetic body segment and each magnetic core front end portion.

2. A mobile device, comprising a fixed body, a mobile body and a separation unit, wherein the fixed body is extended in two-dimensional directions, the mobile body is opposite to the fixed body and can move in the two-dimensional directions relative to the stationary fixed body, the separation unit separates the mobile body from the fixed body at least in the part where the propulsion force is applied, and the mobile device moves the mobile body in the two-dimensional directions and locates it at an arbitrary position, characterized in that: On the surface of the fixed body facing the movable body, a plurality of magnetic segments composed of ferromagnetic bodies are arranged at a certain interval in the two-dimensional direction. On the surface of the moving body facing the fixed body, at least two electromagnets for generating magnetic flux are arranged in each direction of the two-dimensional state so as to face each magnetic body segment. The separation unit is a unit for moving the moving body in any direction of the two dimensions by utilizing the attraction or repulsion force generated by causing the magnetic force formed by each electromagnet to act on each magnetic body segment, and separating the moving body from the fixed body while maintaining the separation distance of the magnetic force acting on each magnetic body segment. The electromagnets are arranged at intervals that are offset by a natural number of times the pitch of the arrangement of the magnetic segments, and an energization control unit is provided for controlling energization of the electromagnets to move the moving body in the two-dimensional directions. Each magnetic body segment is a conductor. The portion of the core of each electromagnet that faces the moving body, that is, the front end of the core, is a conductor, and the front ends of the cores in each electromagnet are electrically insulated from each other. A detection unit is provided for detecting the position or movement distance of the moving body in any one of the two-dimensional directions based on the value of the electrostatic capacitance of the capacitor formed by each magnetic body segment and each magnetic core front end portion.

3. The mobile device according to claim 2, characterized in that The two-dimensional direction is the direction in the horizontal plane, The separation unit is a unit that causes the moving body to float from the fixed body by injecting air.

4. The mobile device according to any one of claims 1 to 3, characterized in that: The cores of the electromagnets are provided with a yoke on the side opposite to the front end of the cores so as to be magnetically connected to each other. An insulating portion is provided to insulate the front end of the magnetic core of each electromagnet from being electrically conductive via the yoke. The insulating portion does not prevent the magnetic force generated by each electromagnet from acting on each magnetic body segment.

5. The mobile device according to claim 4, characterized in that: The insulating portion is an insulating layer having a thickness of 10 μm or more and 100 μm or less.

6. The mobile device according to claim 1, characterized in that On a surface of the movable body facing the fixed body, three electromagnets for generating magnetic flux are arranged in a state of facing the magnetic body segments in the one-dimensional direction. When the three electromagnets in the one-dimensional direction are set in adjacent order as the first electromagnet, the second electromagnet, and the third electromagnet, and the arrangement spacing of the magnetic segments is set to p, the second electromagnet is configured relative to the first electromagnet in a manner that deviates from p / 3 by a natural number multiple of the spacing p, and the third electromagnet is configured relative to the first electromagnet in a manner that deviates from 2p / 3 by a natural number multiple of the spacing p.

7. The mobile device according to claim 2 or 3, characterized in that: On a surface of the movable body facing the fixed body, three electromagnets for generating magnetic flux are arranged in a state of facing the magnetic body segments in each of the two-dimensional directions. When the three electromagnets in each direction are set in adjacent order as the first electromagnet, the second electromagnet, and the third electromagnet, and the spacing of the arrangement of the magnetic segments is set to p, the second electromagnet is configured relative to the first electromagnet in a manner that deviates from p / 3 by a natural number multiple of the spacing p, and the third electromagnet is configured relative to the first electromagnet in a manner that deviates from 2p / 3 by a natural number multiple of the spacing p.

8. The mobile device according to claim 4, characterized in that: On a surface of the movable body facing the fixed body, three electromagnets for generating magnetic flux are arranged in a state of facing the magnetic body segments in each of the two-dimensional directions. When the three electromagnets in each direction are set in adjacent order as the first electromagnet, the second electromagnet, and the third electromagnet, and the spacing of the arrangement of the magnetic segments is set to p, the second electromagnet is configured relative to the first electromagnet in a manner that deviates from p / 3 by a natural number multiple of the spacing p, and the third electromagnet is configured relative to the first electromagnet in a manner that deviates from 2p / 3 by a natural number multiple of the spacing p.

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