Excess material detection device and method based on near-space sublimation deposition system

Abstract

The invention discloses an excess material detection device and method based on a near-space sublimation deposition system. The excess material detection device comprises laser ranging equipment, data processing equipment and sublimation deposition equipment, when the device works, the laser ranging device emits laser to the sublimation deposition device, laser beams can be reflected on the upper surface of a material placed in the sublimation deposition device, and needed distance information is obtained by receiving the reflected light beams and carrying out related calculation; the laser ranging device sends obtained distance information to the data processing device through the communication end, the data processing device processes the received distance information and visually displays a processing result, and a worker can know the remaining condition of materials in the crucible through the remaining height displayed by the data processing device when using the device. Therefore, the residual amount of the material in the crucible is detected and monitored, and the problems of material waste or production interruption and the like are avoided.

Description

Technical Field

[0001] The invention relates to the field of thin film preparation and close-space sublimation deposition system, and in particular to a residual material detection device and method based on the close-space sublimation deposition system. Background Art

[0002] As a cutting-edge thin film preparation method, near-space sublimation technology is increasingly widely used in the semiconductor industry, mainly due to its unique advantages: the prepared semiconductor films are of excellent quality, not only with high purity and few defects, but also with excellent electrical and optical properties; at the same time, this technology can achieve extremely high deposition rates, up to 5000mm / h at peak, which is much faster than traditional thin film deposition methods, greatly shortening the production cycle and improving production efficiency. In addition, the near-space sublimation deposition system is relatively simple to build, and does not require complex and expensive equipment support, which effectively reduces production costs, making this technology highly competitive in large-scale industrial production.

[0003] However, despite the many advantages of the near-space sublimation deposition system, it also faces challenges that cannot be ignored in practical applications, especially the problem of material monitoring. At present, the mainstream near-space sublimation system generally uses a graphite crucible as the material source system. This design shows good stability and durability under high temperature environment. But precisely because of its high temperature working environment (usually up to hundreds or even thousands of degrees Celsius), it becomes extremely difficult or even impossible to install a material detection device directly inside the crucible. The high temperature environment will not only damage general sensors, but also interfere with the accuracy of the detection signal, making it difficult to achieve the goal of real-time and accurate monitoring of the amount of remaining material in the crucible.

[0004] This technical bottleneck directly leads to the "black box" phenomenon in the production process, that is, operators can only rely on empirical formulas or historical data to make rough material estimates, but cannot obtain immediate and accurate material feedback information. This not only increases the uncertainty in the production process, which may lead to premature depletion of materials and interruption of production, or waste caused by excess materials, but also affects the stability and consistency of product quality. In modern industrial production that relies heavily on precise control and efficient management, this lack of real-time monitoring capability is undoubtedly a significant shortcoming.

[0005] Therefore, there is a need to provide a residual material detection device and method that can effectively detect and monitor the residual material in the crucible in a close-space sublimation deposition system. Summary of the invention

[0006] In order to solve the problems raised in the above background technology, the present invention provides a residual material detection device and method based on a close-space sublimation deposition system, which solves the problem that the residual material in the crucible cannot be detected and monitored in the current close-space sublimation deposition system field.

[0007] To achieve the above object, the present invention provides the following technical solutions: In a first aspect, a residual material detection device based on a close-space sublimation deposition system includes a laser ranging device, a data processing device and a sublimation deposition device.

[0008] The sublimation deposition equipment comprises a crucible, wherein materials are stored in the crucible and a laser incident port is arranged on the crucible.

[0009] The laser ranging device is communicatively connected to the data processing device, and is used to emit laser to the laser incident port on the crucible after the thin film preparation of at least one workpiece to be processed is completed in the close-space sublimation deposition system, so as to obtain corresponding first distance information after the thin film preparation of at least one workpiece to be processed is completed, and send a plurality of first distance information to the data processing device, wherein any first distance information is used to characterize the distance between the laser generating end of the laser ranging device and the upper surface of the material in the crucible.

[0010] The data processing device is used to obtain first initial distance information and second initial distance information, and determine the remaining height of the material in the crucible after the close-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed based on the first initial distance information, the second initial distance information and a plurality of first distance information, and visualize the remaining height, wherein the first initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the bottom of the crucible; the second initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the upper surface of the material in the crucible when not processed.

[0011] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, it also includes a workpiece conveying device, which is horizontally arranged between the laser ranging device and the sublimation deposition device, and a plurality of workpieces to be processed are arranged on the workpiece conveying device, and a light-transmitting gap corresponding to the laser generating end of the laser ranging device is arranged on the workpiece conveying device.

[0012] When the workpiece conveying device drives the workpiece to be processed to move and exposes the light-transmitting slit, the light beam emitted by the laser distance measuring device passes through the light-transmitting slit and is incident into the crucible through the laser incident port.

[0013] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, the workpiece transporting equipment includes multiple groups of roller assemblies for driving the workpieces to be processed placed thereon; wherein each group of the roller assemblies is evenly arranged in the same horizontal plane.

[0014] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, the crucible includes a crucible body and a crucible cover, the crucible body is used to store and heat materials, the crucible cover covers the opening of the crucible body, and the crucible cover is provided with the laser incident port, wherein the laser incident port is arranged corresponding to the light-transmitting slit, for providing a path for the laser emitted by the laser ranging device to enter the crucible body.

[0015] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, the sublimation deposition equipment also includes a drive motor, which is fixedly connected to the crucible body through a screw rod and is used to drive the crucible body to complete lifting and positioning.

[0016] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, the laser ranging equipment includes a signal modulator, a laser sensor and a distance calculator, and the signal modulator is electrically connected to the laser sensor; wherein the laser sensor is provided with the laser generating end, which is used to send the modulated laser modulated by the signal modulator after the close-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed, and is used to collect the reflected laser through the laser receiving end, and convert the reflected laser into an electrical signal for transmission to the distance calculator.

[0017] The distance calculator is used to obtain corresponding first distance information based on the electrical signal and send the first distance information to the data processing device.

[0018] The distance calculator includes a phase detector, a counter and a controller, and the controller is electrically connected to the phase detector and the counter respectively.

[0019] The phase detector measures the phase difference between the modulated light and the reflected laser and sends it to the first input end of the controller. The controller sends the phase difference information to the counter. The counter obtains the corresponding number of sine wave cycles based on the phase difference information and returns the number of sine wave cycles to the second input end of the controller.

[0020] The controller is used for obtaining first distance information according to the number of received sinusoidal wave cycles, and sending the first distance information to the data processing device.

[0021] Based on the above-mentioned residual material detection device based on the near-space sublimation deposition system, in a feasible design, a plurality of the laser sensors and the laser incident ports are provided, and each laser sensor is provided corresponding to the laser incident port.

[0022] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, the data processing device includes a host computer and a display, the host computer is communicatively connected with the laser ranging device through a distance information input terminal, and the host computer generates a corresponding function image according to the received first distance information, and displays it visually through the display.

[0023] Based on the above-mentioned residual material detection device based on the close-space sublimation deposition system, in a feasible design, the laser ranging device is also communicatively connected to an alarm device, and when the distance information obtained by the laser ranging device is less than a preset value, the alarm device is controlled to output an alarm signal.

[0024] In a second aspect, a residual material detection method based on a close-space sublimation deposition system is implemented based on a data processing device in a residual material detection device based on a close-space sublimation deposition system as described in any one of the above, wherein the method comprises the following steps: Acquire first initial distance information and second initial distance information transmitted by a laser ranging device, wherein the first initial distance information and the second initial distance information are both measured by the laser ranging device at an initial position, the first initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the bottom of the crucible; the second initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the upper surface of the material in the crucible before entering the working process; Acquire a plurality of first distance information transmitted by the laser ranging device, wherein any first distance information is obtained by collecting reflected laser light when the laser ranging device emits laser light to the sublimation deposition device after the close-space sublimation deposition system completes thin film preparation of at least one workpiece to be processed; According to the first initial distance information, the second initial distance information and a plurality of first distance information, the remaining height of the material in the crucible after the close-space sublimation deposition system completes the film preparation of at least one workpiece to be processed is determined, and the remaining height is visually displayed.

[0025] Based on the above-mentioned residual material detection method based on the near-space sublimation deposition system, in a feasible design, the laser ranging device can continuously emit laser, and includes the following steps: Acquire a plurality of second distance information transmitted by the laser ranging device, wherein any second distance information is obtained by collecting reflected laser light when the laser ranging device emits laser light to the workpiece to be processed and the workpiece to be processed is prepared as a thin film in the close-space sublimation deposition system; According to the first initial distance information, the second initial distance information, the plurality of first distance information and the plurality of second distance information, the flatness of the workpiece to be processed is determined and visually displayed.

[0026] Beneficial effects: (1) The residual material detection device disclosed in the present invention comprises a laser distance measuring device, a data processing device and a sublimation deposition device. When the device is working, the laser distance measuring device emits a laser to the sublimation deposition device, and the laser beam is reflected on the surface of the material placed in the sublimation deposition device. The required distance information is obtained by receiving the reflected light beam and performing relevant calculations. The laser distance measuring device sends the obtained distance information to the data processing device through a communication terminal. The data processing device processes the received distance information and displays the processing result visually. When using the device, the staff can judge the residual situation of the material through the information displayed by the data processing device, thereby realizing the detection and monitoring of the residual material in the crucible, avoiding problems such as material waste or production interruption.

[0027] (2) The residual material detection method disclosed in the present invention is implemented based on the residual material detection device, specifically, firstly, obtaining the first initial distance information and the second initial distance information transmitted by the laser distance measuring device, which is to confirm that the material has not been consumed before entering the processing process, and the distance between the laser generating end and the upper surface of the material and the bottom of the crucible body at this time, so as to facilitate the subsequent judgment and calculation of the material remaining amount and the material consumption rate; secondly, obtaining a plurality of first distance information transmitted by the laser distance measuring device, that is, the distance information corresponding to the upper surface of the material in the crucible body when the interval between the workpieces to be processed appears, and each time the distance information is obtained, the material remaining amount information at these moments can be calculated; then, according to the first initial distance information, the second initial distance information and the plurality of first distance information, determining the remaining height of the material in the crucible after the near-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed, and visually displaying the remaining height for the staff to monitor, and repeating this step continuously during the working process until the working process is completed or the remaining material in the crucible body is insufficient, thereby ensuring that the material is detected and monitored throughout the working process. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Schematic diagram of the structure of the residual material detection device in Example 1 of the present invention; Figure 2 Schematic diagram of the process of the residual material detection method in Example 2 of the present invention; Figure 3 It is a partial schematic diagram of a ts function image about the first distance information generated in Embodiment 2 of the present invention; Figure 4 It is a partial schematic diagram of the ts function image about the first distance information and the second distance information generated in Embodiment 2 of the present invention.

[0029] In the figure, 1. laser ranging equipment; 2. data processing equipment; 3. workpiece transporting equipment; 4. sublimation deposition equipment; 5. roller assembly; 6. workpiece to be processed; 7. crucible body; 8. crucible cover. DETAILED DESCRIPTION

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the present invention will be briefly introduced below in combination with the drawings and the description of the embodiments or the prior art. Obviously, the following description of the structure of the drawings is only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0031] It should be understood that although the terms first, second, etc. may be used herein to describe various units, these units should not be limited by these terms. These terms are only used to distinguish one unit from another unit. For example, a first unit can be referred to as a second unit, and similarly, a second unit can be referred to as a first unit without departing from the scope of the exemplary embodiments of the present invention.

[0032] It should be understood that the term "and / or" that may appear in this article is merely a description of the association relationship between associated objects, indicating that three relationships may exist. For example, A and / or B can represent three situations: A exists alone, B exists alone, and A and B exist at the same time. The term " / and" that may appear in this article describes another type of association object relationship, indicating that two relationships may exist. For example, A / and B can represent two situations: A exists alone, and A and B exist alone. In addition, the character " / " that may appear in this article generally indicates that the previous and next associated objects are in an "or" relationship.

[0033] Embodiment 1: like Figure 1 As shown, this embodiment provides a residual material detection device based on a close-space sublimation deposition system, which adopts a laser ranging device 1 instead of a general sensor, and calculates the residual material by processing the distance information of the upper surface of the material obtained by laser ranging, thereby realizing real-time detection and monitoring of the material.

[0034] The present embodiment provides a residual material detection device and detection method based on a near-space sublimation deposition system, including a laser ranging device 1, a data processing device 2 and a sublimation deposition device 4. The laser ranging device 1 is used to emit laser light and receive reflected laser light, and to process and calculate the information of the emitted laser light and the reflected laser light to obtain the required distance information, and output the distance information; the data processing device 2 is used to receive the distance information output by the laser ranging device 1, and to display and output the information required for monitoring the residual material after data processing again, so as to achieve the purpose of material detection and monitoring, and the data processing device 2 will process and display the distance information obtained in real time at the corresponding time, thus achieving the effect of real-time monitoring; the sublimation deposition device 4 is used to complete the sublimation of materials in the near-space sublimation deposition system to prepare thin films for the workpiece 6 to be processed. These devices work together to achieve the detection and monitoring of material information in the near-space sublimation deposition system.

[0035] It should be noted that the near-space sublimation deposition system mentioned in this embodiment is a coating system that uses physical vapor deposition technology to deposit high-quality thin films on the workpiece substrate. It is necessary to place the coating material (material) in a vacuum or low vacuum environment, place the solid coating material on a heating device, sublimate it into a gaseous state by heating, and diffuse the sublimated gaseous material in a vacuum or inert gas atmosphere, and after a short distance of transportation, reach the surface of the workpiece substrate for deposition and solidification to form the required film. The detection device provided in this embodiment realizes the detection of the remaining amount of the material based on this system, so the specific implementation method of this system and the required component models are not limited, as long as it can support the technical effect of detecting and monitoring the remaining amount of the material of this device.

[0036] The present embodiment provides a residual material detection device based on a close-space sublimation deposition system, as a preferred implementation, further comprising a workpiece conveying device 3, which is used to place and drive the workpiece 6 to be processed in the close-space sublimation deposition system, and enable the workpiece 6 to be processed to complete thin film preparation during the working process. During the working process, the workpieces 6 to be processed will be placed thereon at equal distances, and the workpiece conveying device 3 will drive these workpieces to be processed 6 at a uniform speed, so that they can complete thin film preparation during the transportation process. The workpiece conveying device 3 will work in coordination with the laser ranging device 1, and whenever there is a gap between the workpiece 6 to be processed and the position of the laser ranging device 1 on the workpiece conveying device 3, the laser ranging device 1 will emit a laser and complete the above work through the light-transmitting gap on the workpiece conveying device 3.

[0037] The present embodiment provides a residual material detection device based on a close-space sublimation deposition system. As a preferred implementation, a laser distance measuring device 1 includes a signal modulator, a laser sensor and a distance calculator, and the signal modulator and the laser sensor are electrically connected; the laser generating end of the laser sensor sends the modulated light modulated by the signal modulator, and collects the reflected laser through the laser receiving end of the laser sensor and converts it into an electrical signal and inputs it into the distance calculator. The distance calculator processes the obtained electrical signal to obtain distance information, and sends the distance information to the data processing device 2; wherein the distance calculator includes a phase detector, a counter and a controller, and the phase detector and the counter are both communicatively connected to the controller; the phase detector measures the phase difference between the modulated light and the reflected laser and sends it to the first input end of the controller, the controller sends the phase difference information to the counter, the counter obtains the corresponding number of sinusoidal wave cycles according to the phase difference, and returns it to the second input end of the controller, the controller processes the received number of cycles information into distance information, and sends it to the data processing device 2. The laser ranging device 1 here determines the distance by modulating the frequency of the emitted laser and measuring the phase difference between the reflected light beam and the emitted light beam; and because its distance calculation involves the wavelength and phase delay of the modulated light, a phase-type laser rangefinder can be preferably used, which can integrate the above-mentioned components and realize the above-mentioned various functions, and has the advantage of high measurement accuracy, and is particularly suitable for the working environment of a near-space sublimation deposition system. Its accuracy can reach the millimeter level, and it can fully realize the accurate measurement of the change in material remainder.

[0038] The present embodiment provides a residual material detection device based on a close-space sublimation deposition system. As a preferred implementation, the crucible includes a crucible body 7 and a crucible cover 8. The crucible body 7 is used to place materials and heat them. The crucible cover 8 is used to cover the opening of the crucible body 7 and help to complete uniform thin film preparation. A laser incident port is provided on the crucible cover 8 corresponding to the light-transmitting gap to provide a path for the laser to enter the crucible body 7, so that the laser beam constitutes an optical path from the laser generating end of the laser ranging device 1 to the material surface in the sublimation deposition device 4 and returns.

[0039] The present embodiment provides a residual material detection device and detection method based on a near-space sublimation deposition system. As a preferred implementation, multiple laser sensors are provided, and each laser sensor is evenly arranged, and the laser generating end of each laser sensor is arranged corresponding to the laser incident port. The multiple laser sensors are provided here to achieve a more comprehensive detection of the material surplus. This is because in the working environment of the near-space sublimation deposition system, the sublimation consumption of the material is often uneven, with slow consumption on both sides and fast consumption in the middle, which will cause the material surface in the crucible body 7 to often appear uneven, and generally present a "U" shape, which will cause a single material surplus detection result to cause the staff to misjudge the material surplus. Therefore, by setting multiple groups of laser sensors, multiple groups of values ​​on the material surface can be obtained, so as to complete the material surplus detection more accurately; and when there are enough laser sensors, the data processing device 2 can establish a material surplus surface model at the corresponding moment according to the distance information returned by the laser ranging device 1, so as to achieve extremely high-precision material surplus monitoring.

[0040] This embodiment provides a residual material detection device and detection method based on a near-space sublimation deposition system. As a preferred implementation, the workpiece conveying equipment 3 includes multiple groups of roller assemblies 5 for driving the workpieces to be processed 6 placed thereon; wherein each group of roller assemblies 5 is evenly arranged in the same horizontal plane to facilitate the smooth and uniform transportation of the workpieces to be processed 6.

[0041] This embodiment provides a residual material detection device and detection method based on a near-space sublimation deposition system. As a preferred implementation, the laser distance measuring device 1 is also connected to an alarm device in communication. When the distance information obtained by the laser distance measuring device 1 is less than a preset value, the alarm device outputs an alarm signal. The preset value referred to here exists in a numerical range where the distance between the upper surface of the material and the laser generating end is close to the distance between the bottom of the crucible body 7 and the laser generating end. The preset value can be set within this range. When the distance information obtained by the laser distance measuring device 1 is less than the preset value set at this time, a start signal will be output to the alarm device. The alarm device receives this start signal and starts working, and issues an alarm to remind the staff to stop heating and replenish materials.

[0042] Embodiment 2: like Figure 2-4 As shown, the residual material detection method based on the close-space sublimation deposition system provided in this embodiment is implemented based on the residual material detection device based on the close-space sublimation deposition system in any one of Embodiment 1. The residual material detection method provided in this embodiment may include but is not limited to the following steps: S100. Obtain first initial distance information and second initial distance information transmitted by the laser ranging device, wherein the first initial distance information and the second initial distance information are both measured by the laser ranging device before entering the working process, the first initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the bottom of the crucible, and the second initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the upper surface of the material in the crucible before entering the working process.

[0043] In step S100, the first initial distance information and the second initial distance information are obtained by using a laser distance measuring device, which serves as a reference in subsequent work processes and provides an initial numerical basis for subsequent detection and calculation.

[0044] S200. Acquire a plurality of first distance information transmitted by the laser ranging device, wherein any first distance information is obtained by collecting reflected laser light after the near-space sublimation deposition system completes thin film preparation of at least one workpiece to be processed, when the laser ranging device emits laser light to the sublimation deposition device.

[0045] In step S200, a number of first distance information are obtained by using a laser ranging device, and are compared and calculated with the initial distance information obtained in S100 as variable data in a working process, so as to obtain the first distance information of the upper surface of the material after the near-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed, the material remaining at this time, the material consumption rate and other information, and are recorded and visualized by a data processing device, so that the residual material detection method provided in this embodiment can ensure that the detection and monitoring of the material remaining can be completed at all times.

[0046] The first distance information will be updated each time after the film preparation of at least one workpiece to be processed is completed, and information such as the material consumption rate can be calculated based on the previous first distance information combined with the current first distance information; the first distance information is continuously updated until the working process is completed or there is insufficient material remaining in the crucible body.

[0047] S300. According to the first initial distance information, the second initial distance information and a plurality of first distance information, determine the remaining height of the material in the crucible after the close-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed, and visualize the remaining height.

[0048] In step S300, the first initial distance information can be used as a reference value, and the second initial distance information can be used as an initial value. At this time, the close-space sublimation deposition system has not started working, and this state is defined as the initial position. This moment is the initial moment. The material consumption height at this time can be calculated based on the first distance information and the reference value obtained after the close-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed, and the remaining height of the material in the crucible at this time can be calculated based on the initial value and the material consumption height.

[0049] During the working process of the close-space sublimation deposition system, the first distance information obtained each time is recorded by the data processing device, and after the working process is completed, a ts function image about the first distance information can be generated based on these data, so that the staff can make an overall judgment and obtain information about the working process. Among them, it is defined that: the first initial distance information is s1, the second initial distance information is s2, the first distance information is s3, the initial time is t0, and the time after the close-space sublimation deposition system completes the film preparation of at least one workpiece to be processed is t1-tn.

[0050] In an achievable design, the laser ranging device can continuously emit laser light. Based on this point, the residual material detection method provided in this embodiment can also include: Acquire a plurality of second distance information transmitted by the laser ranging device, wherein any second distance information is obtained by collecting reflected laser light when the laser ranging device emits laser light to the workpiece to be processed and the workpiece to be processed is prepared as a thin film in the close-space sublimation deposition system; According to the first initial distance information, the second initial distance information, the plurality of first distance information and the plurality of second distance information, the flatness of the workpiece to be processed is determined and visually displayed.

[0051] The second distance information is used to characterize the distance information between the laser generating end of the laser ranging device and the upper surface of the workpiece to be processed.

[0052] During the operation of the near-space sublimation deposition system, each time the second distance information is obtained, it is recorded by the data processing equipment, and after the operation is completed, a ts function image of the first distance information and the second distance information can be generated based on these data. In its function image, it is defined that the second distance information is s4. On this function image, s4 is displayed at the disconnection point at each moment of t0-tn, so that the function image forms a continuous piecewise function, and under normal circumstances, the function image corresponding to s4 should form a piecewise horizontal line with a fixed s value. If its s value changes, it means that the surface of the workpiece to be processed is uneven and has defects. The staff can judge the surface flatness of the workpiece to be processed based on this image, and choose to stop the system, perform inspection and replacement, etc.

[0053] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A residual material detection device based on a close-space sublimation deposition system, characterized in that: Including laser ranging equipment, data processing equipment and sublimation deposition equipment; The sublimation deposition equipment comprises a crucible, wherein a material is stored in the crucible and a laser incident port is arranged on the crucible; The laser distance measuring device is communicatively connected to the data processing device, and is used to emit a laser to the laser inlet on the crucible after the thin film preparation of at least one workpiece to be processed is completed in the close-space sublimation deposition system, so as to obtain corresponding first distance information after the thin film preparation of at least one workpiece to be processed is completed, and send a plurality of first distance information to the data processing device, wherein any first distance information is used to characterize the distance between the laser generating end of the laser distance measuring device and the upper surface of the material in the crucible; The data processing device is used to obtain first initial distance information and second initial distance information, and determine the remaining height of the material in the crucible after the close-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed based on the first initial distance information, the second initial distance information and a plurality of first distance information, and visualize the remaining height, wherein the first initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the bottom of the crucible; the second initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the upper surface of the material in the crucible when the working process has not yet begun.

2. The residual material detection device based on the close-space sublimation deposition system according to claim 1 is characterized in that: It also includes a workpiece conveying device, which is horizontally arranged between the laser ranging device and the sublimation deposition device, and a plurality of workpieces to be processed are arranged on the workpiece conveying device, and a light-transmitting slit corresponding to the laser generating end of the laser ranging device is arranged on the workpiece conveying device; When the workpiece conveying device drives the workpiece to be processed to move and exposes the light-transmitting slit, the light beam emitted by the laser distance measuring device passes through the light-transmitting slit and is incident into the crucible through the laser incident port.

3. The residual material detection device based on the close-space sublimation deposition system according to claim 2 is characterized in that: The workpiece conveying device includes a plurality of roller assemblies for driving the workpieces to be processed placed thereon; Wherein, each group of roller assemblies is evenly arranged in the same horizontal plane.

4. The residual material detection device based on the close-space sublimation deposition system according to claim 2 is characterized in that: The crucible comprises a crucible body and a crucible cover, wherein the crucible body is used to store and heat materials, and the crucible cover covers the opening of the crucible body, wherein the crucible cover is provided with the laser incident port, and the laser incident port is provided corresponding to the light-transmitting slit.

5. The residual material detection device based on the close-space sublimation deposition system according to claim 4 is characterized in that: The sublimation deposition equipment also includes a driving motor, which is fixedly connected to the crucible body through a screw rod and is used to drive the crucible body to complete lifting and positioning.

6. The residual material detection device based on the close-space sublimation deposition system according to claim 1, characterized in that: The laser distance measuring device comprises a signal modulator, a laser sensor and a distance calculator, wherein the signal modulator is electrically connected to the laser sensor; The laser sensor is provided with the laser generating end, which is used to send the modulated laser modulated by the signal modulator after the near-space sublimation deposition system completes the thin film preparation of at least one workpiece to be processed, and to collect the reflected laser through the laser receiving end, and convert the reflected laser into an electrical signal and transmit it to the distance measuring device; The distance calculator is used to obtain corresponding first distance information based on the electrical signal and send the first distance information to the data processing device.

7. The residual material detection device based on the close-space sublimation deposition system according to claim 6, characterized in that: The laser sensor and the laser incident port are both provided in plurality, and each laser sensor is provided correspondingly to the laser incident port.

8. The residual material detection device based on the close-space sublimation deposition system according to claim 1 is characterized in that: The data processing device includes a host computer and a display. The host computer is communicatively connected to the laser ranging device via a distance information input terminal. The host computer generates a corresponding function image according to the received first distance information, and displays it visually via the display.

9. The residual material detection device based on the close-space sublimation deposition system according to claim 1, characterized in that: The laser distance measuring device is also communicatively connected to an alarm device, and when the first distance information obtained by the laser distance measuring device is greater than a preset value, the alarm device is controlled to output an alarm signal.

10. A method for detecting residual material based on a close-space sublimation deposition system, implemented based on a data processing device in a residual material detection device based on a close-space sublimation deposition system according to any one of claims 1 to 9, characterized in that: The method comprises the following steps: Acquire first initial distance information and second initial distance information transmitted by the laser ranging device, wherein the first initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the bottom of the crucible; the second initial distance information is used to characterize the distance between the laser generating end of the laser ranging device and the upper surface of the material in the crucible when the working process is not entered; Acquire a plurality of first distance information transmitted by the laser ranging device, wherein any first distance information is obtained by collecting reflected laser light when the laser ranging device emits laser light to the sublimation deposition device after the close-space sublimation deposition system completes thin film preparation of at least one workpiece to be processed; According to the first initial distance information, the second initial distance information and a plurality of first distance information, the remaining height of the material in the crucible after the close-space sublimation deposition system completes the film preparation of at least one workpiece to be processed is determined, and the remaining height is visually displayed.

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