Vacuum transmission device and gas path control method

Abstract

The present invention provides a vacuum transmission device and an air path control method, wherein the vacuum transmission device comprises: a housing having a transmission chamber that can be in a vacuum state; a driving assembly and a first magnetic coupling member, both of which are arranged outside the transmission chamber; the driving assembly is connected to the first magnetic coupling member to drive the first magnetic coupling member to rotate; a second magnetic coupling member is arranged in the transmission chamber; the second magnetic coupling member and the first magnetic coupling member are mutually coupled to generate a magnetic attraction force, so that the first magnetic coupling member drives the second magnetic coupling member to rotate; a transmission assembly is arranged in the transmission chamber; the transmission assembly is transmission-connected to the second magnetic coupling member and comprises a transmission part, so that when the second magnetic coupling member rotates, the transmission part is driven to move along a preset straight line direction; the transmission part is used to connect with the material to drive the material to move. In this way, it is beneficial to ensure the sealing effect of the transmission chamber; at the same time, the motion structure and motion space outside and inside the vacuum transmission device are simplified and reduced.

Description

Technical Field

[0001] The present invention relates to the field of wafer transmission technology, and in particular to a vacuum transmission device and a gas path control method. Background Art

[0002] With the rapid development of semiconductor equipment manufacturing technology, the requirements for miniaturization, high efficiency and high yield of semiconductor equipment have further increased. In the field of semiconductor manufacturing, manipulators are usually used to complete the transfer of wafers between vacuum chambers, and the vacuum transfer device equipped with manipulators also has the same requirements for miniaturization, high efficiency and high yield.

[0003] In the prior art, the drive motor is entirely arranged in the vacuum transmission device to achieve the wafer transmission effect, but the drive motor completely arranged in the vacuum transmission device will cause the chamber volume to be too large, which is not conducive to the connection with other vacuum chambers. In the conventional method, the drive motor is partially arranged in the vacuum transmission device and partially arranged outside the vacuum transmission device, and is sealed by a seal; however, the seal is not completely fixed when the drive device moves, and the sealing effect is limited after long-term operation, and the motor needs to take into account the design inside and outside the vacuum chamber, resulting in a complex structure.

[0004] In addition, the vacuum air path of the wafer transfer device between the vacuum chambers is simple. Each time the vacuum transfer device replaces the wafer from the atmosphere side, it needs to wait for the start and stop of the molecular pump, which takes a long time to start and stop, resulting in low yield. Summary of the invention

[0005] The main purpose of the present invention is to provide a vacuum transmission device and an air path control method to ensure the sealing effect of the transmission cavity.

[0006] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, a vacuum transmission device is provided, which includes: a shell, a transmission chamber that can be in a vacuum state is provided in the shell; a driving assembly and a first magnetic coupling member, both of which are arranged outside the transmission chamber; the driving assembly is connected to the first magnetic coupling member to drive the first magnetic coupling member to rotate around a first axis; a second magnetic coupling member is arranged in the transmission chamber; the second magnetic coupling member is coupled to the first magnetic coupling member to generate a magnetic attraction force, so that the first magnetic coupling member drives the second magnetic coupling member to rotate around a second axis; the second axis is parallel to or coincides with the first axis; a transmission assembly is arranged in the transmission chamber; the transmission assembly is transmission-connected to the second magnetic coupling member and includes a transmission part, so that when the second magnetic coupling member rotates around the second axis, the transmission part is driven to move along a preset linear direction; the preset linear direction is parallel to or the same as the second axis; the transmission part is used to connect with the material to drive the material to move; wherein the driving assembly includes a rotating part and a fixing part, the rotating part is sleeved on the outer peripheral side of the first magnetic coupling member, and the fixing part is connected to the shell.

[0007] Furthermore, the vacuum transmission device also includes a bearing component arranged in the transmission chamber, the bearing component is used to bear the material and is connected to the transmission part so that the transmission part drives the bearing component to move.

[0008] Furthermore, the transmission chamber is used to be openable and disconnectable with an external chamber that can be in a vacuum state, so that when the transmission chamber is connected to the external chamber, the material on the supporting component is transported to the external chamber in a vacuum state; the vacuum transmission device is hung on the side wall of the external chamber.

[0009] Furthermore, the transmission chamber includes a first chamber section and a second chamber section, the shell includes a first shell portion and a second shell portion, the first chamber section is arranged on the first shell portion, and the second chamber section is arranged on the second shell portion; the first shell portion and the second shell portion are detachably connected to connect the first chamber section and the second chamber section; wherein the second magnetic coupling component is arranged in the first chamber section, and the driving assembly and the first magnetic coupling component are both arranged on the outer peripheral side of the first chamber section; a part of the transmission assembly is arranged in the first chamber section, and the other part is arranged in the second chamber section; the second chamber section is used to place materials.

[0010] Furthermore, the driving assembly is a torque motor and includes a stator and a mover that cooperate with each other; the mover is connected to the first magnetic coupling component to drive the first magnetic coupling component to rotate; the rotation axis of the mover is parallel to or coincides with the first axis; the mover is the rotating part.

[0011] Furthermore, the driving assembly includes a worm wheel and a worm that mesh with each other, so that the worm drives the worm wheel to rotate; the worm wheel is connected to the first magnetic coupling component to drive the first magnetic coupling component to rotate; the central axis of the worm wheel is parallel to or coincides with the first axis; and the worm wheel is the rotating part.

[0012] Furthermore, the first magnetic coupling member includes a plurality of first coupling portions arranged at circumferential intervals around the first axis, and the magnetic properties of any two adjacent first coupling portions are opposite; the second magnetic coupling member includes a plurality of second coupling portions arranged at circumferential intervals around the first axis; the plurality of first coupling portions and the plurality of second coupling portions are arranged in one-to-one correspondence, and each first coupling portion is coupled to the corresponding second coupling portion.

[0013] Furthermore, each first coupling part and the corresponding second coupling part form a coupling unit; in the coupling unit, the first coupling part includes one or multiple first coupling segments spaced apart along a preset straight line direction, the second coupling part includes one or multiple second coupling segments spaced apart along a preset straight line direction, all the first coupling segments of the first coupling part and all the second coupling segments of the second coupling part are arranged one-to-one correspondingly, and each first coupling segment is coupled to the corresponding second coupling segment; wherein, the magnetic properties of any two adjacent first coupling segments among the multiple first coupling segments of the first coupling part are opposite.

[0014] Furthermore, the first magnetic coupling component also includes a magnetic conductive component, and the multiple first coupling parts are all connected to the magnetic conductive component, and the magnetic conductive component is connected to the rotating part of the driving component, so that the rotating part of the driving component drives the multiple first coupling parts to rotate together through the magnetic conductive component; the rotation axis centerline of the rotating part of the driving component is parallel to or coincides with the first axis.

[0015] Furthermore, the transmission assembly also includes a transmission shaft; the second magnetic coupling is connected to the transmission shaft to drive the transmission shaft to rotate around its central axis, and the central axis of the transmission shaft is parallel to or coincides with the second axis; the transmission shaft and the transmission part are threadedly connected so that the transmission shaft drives the transmission part to move axially along the transmission shaft.

[0016] Furthermore, the vacuum transmission device also includes a primary vacuum pumping component and a secondary vacuum pumping component; the air suction port of the primary vacuum pumping component is connected to the transmission chamber; the air suction port of the secondary vacuum pumping component and the transmission chamber can be set to be openable and discontinuous, and the air outlet of the secondary vacuum pumping component can be set to be openable and closable, so that when the vacuum in the transmission chamber is broken, the air suction port of the secondary vacuum pumping component is disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component is in a closed state.

[0017] Furthermore, the air suction port of the primary vacuum pumping component is connected to the transmission chamber through a first pipeline, a connection point is provided on the first pipeline, and the air outlet of the secondary vacuum pumping component is connected to the connection point through a second pipeline; the second pipeline can be set to be on and off, so that the air outlet of the secondary vacuum pumping component can be set to be opened and closed; the connection point divides the first pipeline into a first pipe section and a second pipe section, and an end of the second pipe section away from the first pipe section is connected to the transmission chamber; the second pipe section can be set to be on and off.

[0018] According to another aspect of the present invention, a gas path control method is provided, which is applicable to the above-mentioned vacuum transmission device, and the gas path control method comprises: step S1: when the transmission chamber is initially evacuated, the secondary vacuum pumping component is controlled to be in a closed state, and the primary vacuum pumping component is controlled to be in an open state, so that the primary vacuum pumping component evacuates the transmission chamber, so that the vacuum degree in the transmission chamber reaches a preset value; step S2: when the vacuum degree in the transmission chamber reaches a preset value, the secondary vacuum pumping component is controlled to be in an open state, and the suction port and the gas outlet of the secondary vacuum pumping component are opened, so that the secondary vacuum pumping component evacuates the transmission chamber; step S3 ... is broken, the secondary vacuum pumping component is controlled to be in an open state, and the suction port and the gas outlet of the secondary vacuum pumping component are opened, so that the secondary vacuum pumping component evacuates the transmission chamber; step S4: when the vacuum degree in the transmission chamber is broken, the secondary vacuum pumping component is controlled to be in an open state, and the suction port and the gas outlet of the secondary vacuum pumping component are opened, so that the secondary vacuum pumping component evacuates the transmission chamber; step S5: when the vacuum degree in the transmission chamber is broken, the secondary vacuum pumping component is controlled to be in an open state, and the suction port and the gas outlet of the secondary vacuum pumping component are opened, so that the secondary vacuum pumping component evacuates the transmission chamber; step S6: when the vacuum degree in the transmission chamber is broken, the secondary vacuum pumping component is controlled to be in an open state, and the suction port and the gas outlet of the secondary vacuum pumping component are opened, so that the secondary vacuum pumping component evacuates the transmission chamber; step S7: when the vacuum degree in the When the transmission chamber is emptied for material replacement, the primary vacuum pumping component is controlled to be in a closed state, and the secondary vacuum pumping component is controlled to be in an open state, and the suction port of the secondary vacuum pumping component is controlled to be disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component is controlled to be closed to break the vacuum of the transmission chamber; step S4: when the transmission chamber is vacuumed again after the material is replaced, the primary vacuum pumping component is controlled to be in an open state, so that the primary vacuum pumping component vacuumizes the transmission chamber; at the same time, the secondary vacuum pumping component is kept in an open state, the suction port of the secondary vacuum pumping component is controlled and kept disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component is controlled and kept closed; repeat steps S2 to S4.

[0019] Furthermore, in step S2, the gas outlet of the secondary vacuum pumping component is connected to the gas outlet of the primary vacuum pumping component, and the primary vacuum pumping component is controlled to be in an open state so that the primary vacuum pumping component vacuumizes the gas outlet of the secondary vacuum pumping component.

[0020] According to the technical solution of the present invention, a vacuum transmission device includes a shell, a driving component, a first magnetic coupling component, a second magnetic coupling component and a transmission component; the shell has a transmission chamber that can be in a vacuum state; the driving component and the first magnetic coupling component are both arranged outside the transmission chamber; the driving component is connected to the first magnetic coupling component so that the driving component drives the first magnetic coupling component to rotate around a first axis; the second magnetic coupling component and the transmission component are both arranged in the transmission chamber; the second magnetic coupling component and the first magnetic coupling component are coupled to each other to generate a magnetic attraction force so that the first magnetic coupling component and the second magnetic coupling component are relatively stationary, thereby causing the first magnetic coupling component to drive the second magnetic coupling component to rotate around the second axis; the second axis is parallel to or coincides with the first axis; the transmission component is transmission-connected to the second magnetic coupling component, and the transmission component includes a transmission part, so that when the second magnetic coupling component rotates around the second axis, the transmission part is driven to move along a preset straight line direction; the preset straight line direction is parallel to or the same as the second axis; the transmission part is used to connect with the material to drive the material to move.

[0021] Through the magnetic coupling of the second magnetic coupling member and the first magnetic coupling member, a magnetic attraction force is generated between the first magnetic coupling member located outside the transmission chamber and the second magnetic coupling member located inside the transmission chamber, that is, in the absence of a mechanical connection, the two can also achieve relative stillness, thereby causing the first magnetic coupling member to drive the second magnetic coupling member to rotate; this is conducive to ensuring the sealing effect of the transmission chamber. In addition, the first magnetic coupling member, the second magnetic coupling member and the transmission assembly are used to convert the external rotational motion into the linear motion in the transmission chamber; at the same time, the external and internal motion structures of the vacuum transmission device are simplified, and the external and internal motion spaces of the vacuum transmission device are reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0023] Figure 1 It shows a schematic structural diagram of a vacuum transmission device according to the present invention;

[0024] Figure 2 A schematic diagram of the structure of the second shell portion of the vacuum transmission device according to the present invention is shown;

[0025] Figure 3 A schematic diagram showing the structure of a chamber cover of a vacuum transmission device according to the present invention is shown;

[0026] Figure 4 It shows a schematic structural diagram of a torque motor, a bearing component, a transmission shaft, and a transmission part of a vacuum transmission device according to the present invention;

[0027] Figure 5 Shows Figure 4 A longitudinal cross-sectional view of the structure in FIG.

[0028] Figure 6 A schematic diagram of the structure inside and outside of the first cavity section of the vacuum transmission device according to the present invention is shown; wherein the driving assembly includes a stator and a mover;

[0029] Figure 7 A schematic diagram of the structure inside and outside of the first cavity section of the vacuum transmission device according to the present invention is shown; wherein the driving assembly includes a worm gear and a worm;

[0030] Figure 8 It shows a schematic structural diagram of a worm gear, a bearing component, a transmission shaft, and a transmission part of a vacuum transmission device according to the present invention;

[0031] Fig. 9 A schematic structural diagram of a plurality of first coupling parts and a plurality of second coupling parts of a vacuum transmission device according to the present invention is shown;

[0032] Fig.10 A schematic structural diagram showing a plurality of first coupling sections of a first coupling part and a plurality of second coupling sections of a second coupling part of a vacuum transmission device according to the present invention is shown;

[0033] Fig.11 It shows a schematic structural diagram of a primary vacuum pumping component and a secondary vacuum pumping component of a vacuum transmission device according to the present invention;

[0034] Fig.12 A schematic structural diagram of a support assembly of a vacuum transmission device according to the present invention is shown.

[0035] The above drawings include the following reference numerals:

[0036] 11. first magnetic coupling member; 110. first coupling portion; 1101. first coupling section; 111. magnetic conductive member; 12. second magnetic coupling member; 120. second coupling portion; 1201. second coupling section;

[0037] 21, first cavity section; 22, second cavity section; 221, third cavity section; 222, fourth cavity section;

[0038] 31. Transmission shaft; 311. Support block; 32. Transmission unit; 33. Linear guide rail; 34. Photoelectric limiter;

[0039] 40, bearing member; 41, receiving groove; 411, through opening; 412, first opening; 413, rubber pad;

[0040] 5. torque motor; 50. stator; 51. mover; 521. worm wheel; 522. worm; 523. fixing part;

[0041] 61. primary vacuum pumping component; 62. secondary vacuum pumping component; 63. first pipeline; 6311. tee; 6312. clamp; 6313. first on-off valve; 6314. second on-off valve; 632. first pipe section; 633. second pipe section; 64. second pipeline; 651. connector; 652. gate valve;

[0042] 71. first shell; 72. second shell; 721. connecting flange; 722. second opening; 723. first sealing ring; 724. trapezoidal groove; 725. transfer valve; 726. shell handle; 73. cavity cover; 731. nitrogen spring; 732. rotating shaft; 733. shaft sleeve; 734. first retaining spring; 735. observation window; 7351. second sealing ring; 7352. observation window cover; 7353. pad; 7354. installation opening; 736. cavity cover handle;

[0043] 81. Vacuum gauge; 82. Air release valve; 83. Spring buckle;

[0044] 90. Support assembly; 91. Triangular support rod; 92. Support beam; 93. Screw rod;

[0045] 200. Materials. DETAILED DESCRIPTION

[0046] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0047] It should be noted that the following detailed descriptions are illustrative and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

[0048] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0049] The present invention provides a vacuum transmission device, please refer to Figures 1 to 12 The vacuum transmission device includes a shell, a driving assembly, a first magnetic coupling member 11, a second magnetic coupling member 12 and a transmission assembly; the shell has a transmission chamber that can be in a vacuum state; the driving assembly and the first magnetic coupling member 11 are both arranged outside the transmission chamber; the driving assembly is connected to the first magnetic coupling member 11 so that the driving assembly drives the first magnetic coupling member 11 to rotate around a first axis; the second magnetic coupling member 12 and the transmission assembly are both arranged in the transmission chamber; the second magnetic coupling member 12 is coupled to the first magnetic coupling member 11 to generate a magnetic attraction force so that the first magnetic coupling member 11 and the second magnetic coupling member 12 are relatively stationary, and then the first magnetic coupling member 11 drives the second magnetic coupling member 12 to rotate around a second axis; the second axis is parallel to or coincides with the first axis; the transmission assembly is connected to the second magnetic coupling member 12 in a transmission manner, and the transmission assembly includes a transmission part 32, so that when the second magnetic coupling member 12 rotates around the second axis, the transmission part 32 is driven to move along a preset straight line direction; the preset straight line direction is parallel to or the same as the second axis; the transmission part 32 is used to connect with the material 200 to drive the material 200 to move.

[0050] Specifically, the driving assembly includes a rotating part and a fixing part. The rotating part is sleeved on the outer peripheral side of the first magnetic coupling part 11, and the fixing part is connected to the housing.

[0051] Through the magnetic coupling of the second magnetic coupling member 12 and the first magnetic coupling member 11, a magnetic attraction force is generated between the first magnetic coupling member 11 located outside the transmission cavity and the second magnetic coupling member 12 located inside the transmission cavity, that is, in the absence of a mechanical connection, the two can also achieve relative stillness, thereby enabling the first magnetic coupling member 11 to drive the second magnetic coupling member 12 to rotate; this is conducive to ensuring the sealing effect of the transmission cavity. In addition, the drive component is arranged outside the transmission cavity, which can effectively reduce the size of the vacuum transmission device, and the drive component does not need to be vacuum treated, reducing the design difficulty; thereby making the vacuum transmission device compact in structure and small in overall volume, so that the vacuum transmission device can be hung at the external cavity.

[0052] In the prior art, the volume of the vacuum transmission chamber is relatively large, and it needs to be set on the ground or in a chassis through a bracket or an outer frame, and then connected to the external chamber through a bellows. During the transmission process, due to the influence of ground or other environmental vibration factors, the vibration amplitudes of the vacuum transmission chamber and the external chamber may be inconsistent, thereby affecting the transmission accuracy. The vacuum transmission device of the present application can be directly connected to the external chamber, that is, the vacuum transmission device is hung on the side wall of the external chamber. On the one hand, the relevant structure of the bellows can be omitted; on the other hand, by hanging the vacuum transmission device on the external chamber, the influence of ground vibration factors can be avoided, which is conducive to ensuring that the vibration amplitudes of the vacuum transmission chamber and the external chamber are consistent, thereby ensuring the transmission accuracy.

[0053] Optionally, the material 200 is a wafer.

[0054] Optionally, the first magnetic coupling member 11 is a permanent magnet or a magnet, and the second magnetic coupling member 12 is a permanent magnet or a magnet.

[0055] In this application, if Figure 4 and Figure 8 As shown, the vacuum transmission device also includes a bearing component 40 arranged in the transmission chamber, the bearing component 40 is used to carry the material 200, and the bearing component 40 is connected to the transmission part 32, so that when the transmission part 32 moves along a preset straight line direction, the transmission part 32 drives the bearing component 40 to move, and then drives the material 200 on the bearing component 40 to move.

[0056] Specifically, a receiving groove 41 for receiving the material 200 is provided on the bearing component 40 , that is, the material 200 is placed in the receiving groove 41 , so that the bearing component 40 carries the material 200 .

[0057] Optionally, the accommodating groove 41 is a circular groove.

[0058] Optionally, a through opening 411 is formed on the bottom wall of the accommodating groove 41 to reduce the overall weight of the bearing component 40 and facilitate the transmission part 32 to drive the bearing component 40 to move.

[0059] Optionally, a first opening 412 is provided on the side wall of the accommodating groove 41 along the circumference of the accommodating groove 41; thus, on the one hand, it is convenient to put the material 200 into the accommodating groove 41 or take the material 200 out of the accommodating groove 41; on the other hand, the overall weight of the bearing component 40 can be reduced.

[0060] Optionally, a rubber pad 413 is provided at the bottom of the receiving groove 41, so that the material 200 is placed on the rubber pad 413 to increase the friction between the material 200 and the bottom wall of the receiving groove 41. For example, the rubber pad 413 is a fluorine rubber pad.

[0061] Optionally, there are one or more rubber pads 413 , and the multiple rubber pads 413 are distributed along the circumference of the receiving groove 41 .

[0062] Optionally, the bearing component 40 is connected to the transmission part 32 by screws.

[0063] In the present application, the transmission chamber is used to be connected and disconnected with the external chamber that can be in a vacuum state. When the transmission chamber is connected with the external chamber, both the transmission chamber and the external chamber are in a vacuum state, and the material 200 on the supporting component 40 can be transported to the external chamber. When the transmission chamber is evacuated or broken, the transmission chamber is disconnected from the external chamber.

[0064] Specifically, when the transmission chamber needs to be opened to place the material 200 to be transmitted into the transmission chamber, the vacuum of the transmission chamber needs to be broken.

[0065] Specifically, the vacuum transmission device is hung on the side wall of the external cavity.

[0066] In this application, if Figure 2 , Figure 6 and Figure 7 As shown, the transmission cavity includes a first cavity section 21 and a second cavity section 22, and the shell includes a first shell portion 71 and a second shell portion 72. The first cavity section 21 is arranged on the first shell portion 71, and the second cavity section 22 is arranged on the second shell portion 72; the first shell portion 71 and the second shell portion 72 are detachably connected; when the first shell portion 71 and the second shell portion 72 are connected, the first cavity section 21 and the second cavity section 22 are connected.

[0067] Specifically, the second magnetic coupling member 12 is disposed in the first cavity section 21; the driving assembly and the first magnetic coupling member 11 are both disposed on the outer circumference of the first cavity section 21. A portion of the transmission assembly is disposed in the first cavity section 21, and another portion is disposed in the second cavity section 22; the second cavity section 22 is used to place the material 200, that is, the bearing member 40 is disposed in the second cavity section 22.

[0068] Specifically, the second magnetic coupling member 12 is rotatably disposed relative to the first shell portion 71 , and the second magnetic coupling member 12 and the inner wall of the first shell portion 71 are spaced apart.

[0069] Specifically, the first shell portion 71 is smaller than the second shell portion 72; the first shell portion 71 is used to set a separate cavity for the second magnetic coupling member 12, so that the first shell portion 71 and the first cavity section 21 of matching sizes can be set according to the size of the second magnetic coupling member 12, and the gap between the second magnetic coupling member 12 and the first shell portion 71 can be minimized, so as to facilitate improving the coupling and fit between the second magnetic coupling member 12 and the first magnetic coupling member 11.

[0070] Specifically, the first cavity section 21 is smaller than the second cavity section 22 .

[0071] Optionally, a connecting flange 721 is provided on the second shell portion 72 , and the first shell portion 71 is detachably connected to the connecting flange 721 .

[0072] Optionally, the connecting flange 721 and the second shell portion 72 are connected by screws.

[0073] Optionally, a first sealing member is provided between the connecting flange 721 and the second shell portion 72 .

[0074] In the present application, the second cavity section 22 includes a third cavity section 221 and a fourth cavity section 222 which are connected to each other. The third cavity section 221 is used to communicate with the first cavity section 21, and the fourth cavity section 222 is used to accommodate the material 200. The fourth cavity section 222 is used to be connected and disconnected with the external cavity.

[0075] Specifically, the accommodating groove 41 is located in the fourth cavity section 222 , that is, the portion of the bearing component 40 where the accommodating groove 41 is formed is located in the fourth cavity section 222 .

[0076] Optionally, the third cavity segment 221 is a strip-shaped cavity segment, and an extension direction of the third cavity segment 221 is parallel to or the same as a preset straight line direction.

[0077] Optionally, the width of the fourth cavity segment 222 is greater than the width of the third cavity segment 221 ; the width direction of the fourth cavity segment 222 is perpendicular to the preset straight line direction, and the width direction of the third cavity segment 221 is perpendicular to its extension direction.

[0078] Specifically, Figures 1 to 3 As shown, the second shell 72 is provided with a second opening 722 communicating with the fourth cavity section 222; the vacuum transmission device further comprises a cavity cover 73, which is closably provided at the second opening 722 to open or close the second opening 722. When the cavity cover 73 is in an open state, the material 200 is placed into the fourth cavity section 222 through the second opening 722.

[0079] Optionally, the second shell portion 72 is made of aluminum alloy.

[0080] Specifically, a first sealing ring 723 is disposed at the second opening 722 ; when the cavity cover 73 is in a closed state, the cavity cover 73 and the second shell portion 72 are sealed by the first sealing ring 723 .

[0081] Optionally, at least one trapezoidal groove 724 is disposed at the second opening 722 , and a first sealing ring 723 is disposed at each trapezoidal groove 724 .

[0082] Specifically, the vacuum transmission device further includes a nitrogen spring 731 for driving the chamber cover 73 to open, and the nitrogen spring 731 supports the chamber cover 73 in the open state.

[0083] Specifically, the fixed end of the nitrogen spring 731 is connected to the second shell portion 72 , and the movable end of the nitrogen spring 731 is connected to the cavity cover 73 .

[0084] Optionally, the rotating shaft of the fixed end of the nitrogen spring 731 is connected to the second shell 72 through a retaining spring; and the movable end of the nitrogen spring 731 is connected to the cavity cover 73 through a retaining spring.

[0085] Specifically, the chamber cover 73 is rotatably disposed on the second shell portion 72 around the fourth axis to switch between its open state and closed state.

[0086] Specifically, the vacuum transmission device further includes a rotating shaft 732 connected to the chamber cover 73 , and the central axis of the rotating shaft 732 is the fourth axis; the rotating shaft 732 and the second shell 72 are connected via a shaft sleeve 733 .

[0087] Optionally, the shaft sleeve 733 is embedded in a shaft sleeve hole on the second shell portion 72 .

[0088] Optionally, a first retaining spring 734 is provided between the rotating shaft 732 and the sleeve hole.

[0089] Specifically, a fourth opening connected to the fourth cavity section 222 is provided on the second shell portion 72, and the external cavity is connected to the fourth opening. A transmission valve 725 is provided at the fourth opening to control the opening or closing of the fourth opening through the transmission valve 725, thereby controlling the connection and disconnection between the fourth cavity section 222 and the external cavity.

[0090] Specifically, the transfer valve 725 is connected to the second housing portion 72 through a positioning pin and a thread.

[0091] Specifically, a shell handle 726 is provided on the outer wall of the second shell portion 72. When the second shell portion 72 is carried, the shell handle 726 facilitates operation. The shell handle 726 is connected and fixed to the second shell portion 72 by screws.

[0092] Specifically, the vacuum transmission device further includes a spring buckle 83; one of the fixed portion and the movable portion of the spring buckle 83 is connected to the second shell 72, and the other is connected to the chamber cover 73; when the chamber cover 73 is in a closed state, the fixed portion and the movable portion of the spring buckle 83 are buckled to ensure the locking state between the chamber cover 73 and the second shell 72. The chamber cover 73 is opened by unlocking the buckled fixed portion and the movable portion of the spring buckle 83.

[0093] Optionally, the spring buckle 83 is connected to the second shell portion 72 via screws; the spring buckle 83 is connected to the cavity cover 73 via screws.

[0094] In the present application, the vacuum transmission device further includes a vacuum gauge 81 , so as to detect the vacuum degree of the transmission chamber in real time through the vacuum gauge 81 .

[0095] Specifically, a first flange interface communicating with the fourth chamber section 222 is provided on the second shell portion 72 , and the vacuum gauge 81 is connected to the first flange interface of the second shell portion 72 through a second sealing member.

[0096] In the present application, an observation window 735 is provided on the cavity cover 73 , so that the interior of the fourth cavity segment 222 can be observed through the observation window 735 .

[0097] Specifically, a mounting opening 7354 is provided on the cavity cover 73 , and the observation window 735 is installed at the mounting opening 7354 .

[0098] Specifically, a second sealing ring 7351 is disposed between the cavity cover 73 and the observation window 735 .

[0099] Specifically, the observation window 735 is fixed to the cavity cover 73 by the observation window cover 7352 ; a pad 7353 is provided between the observation window cover 7352 and the observation window 735 , and the pad 7353 acts as a buffer to prevent the observation window cover 7352 from crushing the observation window 735 .

[0100] Optionally, the pad 7353 is a Teflon pad.

[0101] Optionally, the observation window cover 7352 is fixed to the cavity cover 73 by screws.

[0102] Specifically, a cavity cover handle 736 is provided on the cavity cover 73; the cavity cover handle 736 is fixed to the cavity cover 73 by screws.

[0103] In this application, the first configuration of the drive assembly is: Figure 6 As shown, the driving component is a torque motor 5, which includes a stator 50 and a mover 51 that cooperate with each other; the mover 51 is connected to the first magnetic coupling member 11 to drive the first magnetic coupling member 11 to rotate; the rotation axis of the mover 51 is parallel to or coincides with the first axis.

[0104] Specifically, the stator 50 is a coil assembly, and the mover 51 is a permanent magnet assembly.

[0105] Optionally, the outer shell of the stator 50 is detachably connected to the second shell portion 72 ; when the first shell portion 71 and the second shell portion 72 are connected, the outer shell of the stator 50 is connected to the second shell portion 72 .

[0106] Optionally, the housing of the stator 50 is detachably connected to the connecting flange 721 .

[0107] In this application, the second configuration mode of the drive assembly is: Figure 7 and Figure 8 As shown, the driving assembly includes a worm wheel 521 and a worm 522 that mesh with each other, so that the worm 522 drives the worm wheel 521 to rotate; the worm wheel 521 is connected to the first magnetic coupling member 11 to drive the first magnetic coupling member 11 to rotate; the central axis of the worm wheel 521 is parallel to or coincides with the first axis.

[0108] Specifically, the driving assembly is a worm gear motor.

[0109] In this application, if Fig. 9 As shown, the first magnetic coupling member 11 includes a plurality of first coupling portions 110 circumferentially spaced around a first axis, and the magnetic properties of any two adjacent first coupling portions 110 are opposite; the second magnetic coupling member 12 includes a plurality of second coupling portions 120 circumferentially spaced around the first axis; the plurality of first coupling portions 110 and the plurality of second coupling portions 120 are arranged in one-to-one correspondence, and each first coupling portion 110 is coupled to the corresponding second coupling portion 120.

[0110] Optionally, when the driving component is a torque motor 5 and when the mover 51 is a permanent magnet component, the first magnetic coupling component 11 and the mover 51 which is a permanent magnet component can be an integrated structure or the same structure, which can simplify the design difficulty and cost of the driving component and the first magnetic coupling component 11.

[0111] Specifically, each first coupling portion 110 and the corresponding second coupling portion 120 form a coupling unit. Fig.10As shown, in the coupling unit, the first coupling part 110 includes one or multiple first coupling segments 1101 spaced apart along a preset straight line direction, and the second coupling part 120 includes one or multiple second coupling segments 1201 spaced apart along a preset straight line direction; all the first coupling segments 1101 of the first coupling part 110 and all the second coupling segments 1201 of the second coupling part 120 are arranged in a one-to-one correspondence, and each first coupling segment 1101 is coupled to the corresponding second coupling segment 1201; wherein, the magnetic properties of any two adjacent first coupling segments 1101 among the multiple first coupling segments 1101 of the first coupling part 110 are opposite, and the magnetic properties of any two adjacent second coupling segments 1201 among the multiple second coupling segments 1201 of the second coupling part 120 are opposite.

[0112] Specifically, the first magnetic coupling member 11 also includes a magnetic conductive member 111, and multiple first coupling parts 110 are all connected to the magnetic conductive member 111, and the magnetic conductive member 111 is connected to the rotating part of the driving component, so that the rotating part of the driving component can drive the multiple first coupling parts 110 to rotate together through the magnetic conductive member 111; the rotation axis centerline of the rotating part of the driving component is parallel to or coincides with the first axis.

[0113] When the driving assembly is a torque motor 5, the rotating part of the driving assembly is the mover 51, and the fixed part of the driving assembly is the stator 50. When the driving assembly includes a worm gear 521 and a worm 522, the rotating part of the driving assembly is the worm gear 521, and the worm 522 is connected to the fixed part 523.

[0114] It should be noted that the magnetic conductive member 111 can play a good role in magnetic conductivity, strengthen the magnetic field between the first magnetic coupling member 11 and the second magnetic coupling member 12, and improve the coupling efficiency. In particular, when the driving component is a torque motor 5, and the motor magnetic field does not match the magnetic field of the first magnetic coupling member 11, the magnetic field between the two can be effectively blocked so that they do not interfere with each other.

[0115] Optionally, the magnetic conductive member 111 is a back iron.

[0116] In this application, if Figures 4 to 9 As shown, the transmission assembly also includes a transmission shaft 31; the second magnetic coupling member 12 is connected to the transmission shaft 31 to drive the transmission shaft 31 to rotate around its central axis, and the central axis of the transmission shaft 31 is parallel to or coincides with the second axis; the transmission shaft 31 and the transmission part 32 are threadedly connected so that the transmission shaft 31 drives the transmission part 32 to move along the axial direction of the transmission shaft 31, that is, the axial direction of the transmission shaft 31 is the same as the preset straight line direction.

[0117] Specifically, the transmission part 32 is sleeved on the transmission shaft 31 and is threadedly connected to the transmission shaft 31 .

[0118] Optionally, the transmission shaft 31 includes a screw segment.

[0119] Specifically, the vacuum transmission device also includes two support blocks 311 fixedly arranged in the transmission chamber, the two support blocks 311 are arranged at intervals along a preset straight line direction, the transmission shaft 31 passes through the two support blocks 311, and the transmission shaft 31 is rotatably arranged around the central axis relative to each support block 311.

[0120] Specifically, a bearing is provided between the transmission shaft 31 and the support block 311 .

[0121] Optionally, the transmission assembly also includes a first connecting part, on which a plurality of first slots are arranged, and a plurality of second coupling parts 120 of the second magnetic coupling member 12 are arranged one by one in the plurality of first slots; the first connecting part is connected to the transmission shaft 31 so that the second magnetic coupling member 12 drives the transmission shaft 31 to rotate through the first connecting part.

[0122] Optionally, the vacuum transmission device further comprises a second connection portion, on which a plurality of second slots are arranged, and a plurality of first coupling portions 110 of the first magnetic coupling member 11 are arranged in the plurality of second slots in a one-to-one correspondence. The second connection portion is connected to the rotating portion of the driving assembly; or, the second connection portion is a part of the rotating portion of the driving assembly; or, the second connection portion is connected to the magnetic conductive member 111; or, the second connection portion is a part of the magnetic conductive member 111.

[0123] Specifically, the vacuum transmission device also includes a linear guide rail 33 and a slider. The linear guide rail 33 is fixedly connected to the inner wall of the transmission chamber. The slider is slidably arranged on the linear guide rail 33. The extension direction of the linear guide rail 33 is parallel to or the same as the preset linear direction. The slider is fixedly connected to the transmission part 32 or the bearing part 40. When the transmission part 32 moves along the preset linear direction, the slider slides along the linear guide rail 33 to play a guiding role to ensure the linearity of the movement of the material 200.

[0124] By configuring the first magnetic coupling member 11, the second magnetic coupling member 12, and the transmission assembly, the rotational motion outside the vacuum transmission chamber is converted into the linear motion inside the transmission chamber, while simplifying the motion structure inside and outside the transmission chamber and reducing the volume occupied by the motion structure inside and outside the transmission chamber.

[0125] Optionally, the linear guide rail 33 is fixed to the inner wall of the transmission cavity by screws and positioning pins.

[0126] Specifically, the vacuum transmission device also includes a photoelectric limiter 34 arranged in the transmission chamber; along the preset straight line direction, the photoelectric limiter 34 is located on one side of the preset straight line direction path to determine the position of the material 200 in the transmission chamber, and then perform in-place detection of the material 200.

[0127] Specifically, there are two photoelectric limiters 34, which are spaced apart along a preset straight line direction; the two photoelectric limiters 34 respectively detect the transmission position and the handover position of the material 200; the transmission position is the position before transmission, and the handover position is the position after transmission.

[0128] In the present application, the vacuum transmission device further includes a support assembly 90 , and the second shell portion 72 is disposed on the support assembly 90 , so that the support assembly 90 supports the second shell portion 72 .

[0129] Specifically, the support assembly 90 includes a triangular support rod 91, a support beam 92 and a screw 93; the screw 93 is fixed to the triangular support rod 91, and the support beam 92 is fixed to the screw 93, and the screw 93 is locked to the triangular support rod 91 by nuts and gaskets; the second shell 72 is fixed to the support beam 92 by screws; the setting height and horizontality of the second shell 72 can also be adjusted by the threaded cooperation of the nut and the screw 93.

[0130] In the present application, the vacuum transmission device also includes a primary vacuum pumping component 61 and a secondary vacuum pumping component 62; the vacuum port of the primary vacuum pumping component 61 is connected to the transmission chamber; the vacuum port of the secondary vacuum pumping component 62 can be set to be switched with the transmission chamber, and the air outlet of the secondary vacuum pumping component 62 can be set to be opened and closed.

[0131] Specifically, the transmission cavity has a venting opening, which can be opened and closed; when the venting opening is in an open state, the transmission cavity is connected to the outside atmosphere through the venting opening. It should be noted that the venting opening may not be directly provided on the transmission cavity, but may be provided on a pipeline connected to the primary vacuum pumping component 61 or the secondary vacuum pumping component 62, but the venting opening is located on the side of the on-off position of the pipeline close to the transmission cavity, and the pipeline realizes the switching of the on-off state at the passing position thereof.

[0132] When the transmission chamber is initially evacuated, the primary vacuum pumping component 61 is switched to an open state, and the air release opening is closed, so that the primary vacuum pumping component 61 performs primary evacuation of the transmission chamber; if the secondary vacuum pumping component 62 has not been opened before, the secondary vacuum pumping component 62 is kept closed to evacuate first; if the secondary vacuum pumping component 62 has been opened before, the air suction port of the secondary vacuum pumping component 62 is disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component 62 is closed, so that there is no need to close the secondary vacuum pumping component 62. Since it takes a long time to open the secondary vacuum pumping component 62 after closing it, keeping the secondary vacuum pumping component 62 in an open state can save time.

[0133] When the transfer chamber is subjected to secondary vacuuming, the venting opening is closed; the secondary vacuuming component 62 is opened, and the suction port of the secondary vacuuming component 62 is connected to the transfer chamber, and the air outlet of the secondary vacuuming component 62 is opened, so that the secondary vacuuming component 62 performs secondary vacuuming on the transfer chamber.

[0134] When the vacuum in the transmission chamber is broken, the primary vacuum pumping component 61 is switched to a closed state, and the air release opening is switched to an open state; at this time, the air suction port of the secondary vacuum pumping component 62 is disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component 62 is in a closed state, so there is no need to close the secondary vacuum pumping component 62.

[0135] Specifically, the primary vacuuming is rough vacuuming, and the secondary vacuuming is fine vacuuming.

[0136] Optionally, the primary vacuum pumping component 61 is a mechanical pump; for example, the primary vacuum pumping component 61 is a dry pump.

[0137] Optionally, the secondary vacuum pumping component 62 is a molecular pump; a conventional molecular pump needs at least 20 minutes to be switched on and off once.

[0138] Optionally, the primary vacuuming time is 1 min to 2 min.

[0139] In the present application, the first connection mode of the primary vacuum pumping component 61, the secondary vacuum pumping component 62 and the transmission chamber is: the air suction port of the primary vacuum pumping component 61 is connected to the transmission chamber through a third pipeline, and the air suction port of the secondary vacuum pumping component 62 is connected to the transmission chamber through a fourth pipeline, and the fourth pipeline can be set on and off; that is, the primary vacuum pumping component 61 and the secondary vacuum pumping component 62 are set in parallel. The primary vacuum pumping component 61 and the secondary vacuum pumping component 62 are set in parallel, and the primary vacuum pumping component 61 and the secondary vacuum pumping component 62 can work independently of each other without affecting each other, and the pipeline design is simple.

[0140] When the transmission chamber is initially evacuated, the primary vacuum pumping component 61 is switched to an open state, and the air release opening is closed, so that the primary vacuum pumping component 61 performs primary vacuum pumping on the transmission chamber; if the secondary vacuum pumping component 62 has not been opened before, the secondary vacuum pumping component 62 is kept in a closed state for evacuation; if the secondary vacuum pumping component 62 has been in an open state before, the fourth pipeline is disconnected, and the air outlet of the secondary vacuum pumping component 62 is closed, so that there is no need to close the secondary vacuum pumping component 62.

[0141] When the transmission chamber is subjected to secondary vacuuming, the deflation opening is closed; the secondary vacuuming component 62 is opened, the fourth pipeline is connected, and the gas outlet of the secondary vacuuming component 62 is opened, so that the secondary vacuuming component 62 performs secondary vacuuming on the transmission chamber; at this time, the primary vacuuming component 61 can be closed or still opened. If the primary vacuuming component 61 is closed, the gas inlet or gas outlet of the primary vacuuming component 61 can be closed as appropriate, depending on whether the equipment of the primary vacuuming component 61 has a gas backflow prevention function.

[0142] When the transmission chamber is vacuumed, the primary vacuum pumping component 61 is switched to a closed state, and the venting opening is switched to an open state; at this time, the fourth pipeline is disconnected, and the air outlet of the secondary vacuum pumping component 62 is closed, so there is no need to close the secondary vacuum pumping component 62.

[0143] In the present application, the second connection method of the primary vacuum pumping component 61, the secondary vacuum pumping component 62 and the transmission chamber is: the air suction port of the primary vacuum pumping component 61 is connected to the transmission chamber through a first pipeline 63, a connection point is provided on the first pipeline 63, and the air outlet of the secondary vacuum pumping component 62 is connected to the connection point through a second pipeline 64; the second pipeline 64 can be set to be on and off, so that the air outlet of the secondary vacuum pumping component 62 can be set to be opened and closed; that is, at this time, the primary vacuum pumping component 61 is not only set in series with the secondary vacuum pumping component 62, but also connected to the transmission chamber; in this way, when the secondary vacuum pumping component 62 is working, the primary vacuum pumping component 61 can vacuum the secondary vacuum pumping component 62 to further improve the overall vacuum pumping effect.

[0144] When the transmission chamber is initially evacuated, the primary vacuum pumping component 61 is switched to an open state, and the air release opening is closed, so that the primary vacuum pumping component 61 performs primary vacuum pumping on the transmission chamber; if the secondary vacuum pumping component 62 has not been opened before, the secondary vacuum pumping component 62 is kept in a closed state for evacuation; if the secondary vacuum pumping component 62 has been in an open state before, the air suction port of the secondary vacuum pumping component 62 is disconnected from the transmission chamber, and the second pipeline 64 is disconnected, so that there is no need to close the secondary vacuum pumping component 62.

[0145] When the transmission chamber is subjected to secondary vacuuming, the vent opening is closed, the secondary vacuuming component 62 is opened, and the suction port of the secondary vacuuming component 62 is connected to the transmission chamber, and the second pipeline 64 is connected, so that the secondary vacuuming component 62 performs secondary vacuuming on the transmission chamber; at this time, the primary vacuuming component 61 is opened to evacuate the gas outlet of the secondary vacuuming component 62.

[0146] When the transmission chamber is vacuumed, the primary vacuum pumping component 61 is switched to a closed state, and the venting opening is switched to an open state; at this time, the suction port of the secondary vacuum pumping component 62 is disconnected from the transmission chamber, and the second pipeline 64 is disconnected, so there is no need to close the secondary vacuum pumping component 62.

[0147] In the present application, when the primary vacuum pumping component 61, the secondary vacuum pumping component 62 and the transmission chamber are connected in the second manner, the vacuum port of the secondary vacuum pumping component 62 is connected to the transmission chamber through a connecting channel, and the connecting channel can be set to be on and off to achieve the on and off setting between the vacuum port of the secondary vacuum pumping component 62 and the transmission chamber.

[0148] Specifically, the vacuum transmission device also includes a connecting piece 651, and a connecting channel is arranged on the connecting piece 651; the connecting piece 651 is connected to the shell so that one end of the connecting channel is connected to the transmission chamber; the connecting piece 651 is connected to the vacuum port of the secondary vacuum pumping component 62 so that the other end of the connecting channel is connected to the vacuum port of the secondary vacuum pumping component 62.

[0149] Specifically, the connecting piece 651 is connected to the second shell portion 72 so that one end of the communication channel is in communication with the second cavity section 22 .

[0150] Specifically, one end of the communication channel is communicated with the fourth cavity section 222 .

[0151] Specifically, the connecting channel has an on-off position between its two ends, and the on-off position of the connecting channel divides the connecting channel into two channel sections; the vacuum transmission device also includes a partition part, which is movably arranged at the on-off position of the connecting channel to have a blocking state and an avoidance state; when the partition part is in the blocking state, the two channel sections of the connecting channel located on both sides of the on-off position are blocked by the partition part, so that the two channel sections are in a disconnected state, that is, the connecting channel is in a disconnected state; when the partition part is in the avoidance state, the partition part makes way between the two channel sections of the connecting channel located on both sides of the on-off position, so that the two channel sections are in a connected state, and thus the connecting channel is in a connected state.

[0152] Optionally, the partition portion is movably arranged in a direction perpendicular to the axial direction of the communication passage to switch between a blocking state and an evasive state.

[0153] Specifically, when the partition portion is in the blocking state, the partition portion is inserted on the connecting piece 651 .

[0154] Optionally, a gate valve 652 is provided on the communication channel, and the gate valve 652 includes a partition portion.

[0155] Optionally, the gate valve 652 is connected to each channel section of the communication channel via a third sealing member.

[0156] In the present application, when the primary vacuum pumping component 61, the secondary vacuum pumping component 62 and the transmission chamber are connected in the second manner, the connection point divides the first pipeline 63 into a first pipe segment 632 and a second pipe segment 633, and the end of the second pipe segment 633 away from the first pipe segment 632 is connected to the transmission chamber; the second pipe segment 633 can be set to be on and off.

[0157] Specifically, a tee 6311 is provided at the connection point, and the three interfaces of the tee 6311 are respectively a first interface, a second interface, and a third interface; the first interface is connected to one end of the second pipe segment 633 facing the first pipe segment 632, the second interface is connected to one end of the first pipe segment 632 facing the second pipe segment 633, and the third interface is connected to one end of the second pipeline 64.

[0158] Optionally, a first on-off valve 6313 is provided at the third interface so that the second pipeline 64 can be set to be on and off; a second on-off valve 6314 is provided at the first interface so that the second pipe section 633 can be set to be on and off.

[0159] Optionally, the tee 6311 is fixed to the primary vacuum pumping component 61 via a clamp 6312 .

[0160] Optionally, the first on-off valve 6313 is an angle valve, and the second on-off valve 6314 is an angle valve.

[0161] Optionally, the first on-off valve 6313 is connected to the third interface via a first clamp; the second on-off valve 6314 is connected to the first interface via a second clamp.

[0162] Optionally, the second pipeline 64 is a bellows; the second pipe section 633 is a bellows.

[0163] Optionally, a third sealing ring is provided between the other end of the communication channel and the air suction port of the secondary vacuum pumping component 62 .

[0164] In the present application, the vacuum transmission device further includes an air release valve 82 , which is disposed at the air release opening, so as to control the opening or closing of the air release opening through the air release valve 82 .

[0165] Specifically, the vent opening is a second flange interface, and the vent valve 82 is connected to the second flange interface of the second shell portion 72 through a fourth sealing member.

[0166] The present invention also provides a gas path control method, which is applicable to the above-mentioned vacuum transmission device. The gas path control method comprises:

[0167] Step S1: When the transfer chamber is initially evacuated, the secondary vacuum pumping component 62 is controlled to be in a closed state, and the primary vacuum pumping component 61 is controlled to be in an open state, so that the primary vacuum pumping component 61 evacuates the transfer chamber so that the vacuum degree in the transfer chamber reaches a preset value.

[0168] Step S2: When the vacuum degree in the transmission chamber reaches a preset value, the secondary vacuum pumping component 62 is controlled to be in an open state, and the suction port and the air outlet of the secondary vacuum pumping component 62 are opened, so that the secondary vacuum pumping component 62 can vacuum the transmission chamber.

[0169] Optionally, in step S2, the gas outlet of the secondary vacuum pumping component 62 is connected to the gas suction port of the primary vacuum pumping component 61, and the primary vacuum pumping component 61 is controlled to be in an open state, so that the primary vacuum pumping component 61 vacuumizes the gas outlet of the secondary vacuum pumping component 62. Further, when the primary vacuum pumping component 61, the secondary vacuum pumping component 62 and the transmission chamber adopt the second connection mode, the second pipeline 64 is in a connected state, so that the gas outlet of the secondary vacuum pumping component 62 is connected to the gas suction port of the primary vacuum pumping component 61.

[0170] Step S3: When breaking the vacuum of the transmission chamber to exchange the material 200, the primary vacuum pumping component 61 is controlled to be in a closed state, and the secondary vacuum pumping component 62 is controlled to be in an open state, and the suction port of the secondary vacuum pumping component 62 is controlled to be disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component 62 is controlled to be closed to break the vacuum of the transmission chamber.

[0171] Step S4: When the transmission chamber is vacuumed again after replacing the material 200, the primary vacuum pumping component 61 is controlled to be in an open state so that the primary vacuum pumping component 61 can vacuum the transmission chamber; at the same time, the secondary vacuum pumping component 62 is kept in an open state, the suction port of the secondary vacuum pumping component 62 is controlled and maintained to be disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component 62 is controlled and maintained to be closed; repeat steps S2 to S4.

[0172] Each time the material 200 in the transmission chamber is replaced, the secondary vacuum pumping component 62 of the present application does not need to be started or stopped, thus saving the start and stop time of the secondary vacuum pumping component 62 , thereby improving productivity.

[0173] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects:

[0174] In the vacuum transmission device provided by the present invention, the vacuum transmission device includes a shell, a driving component, a first magnetic coupling member 11, a second magnetic coupling member 12 and a transmission component; the shell has a transmission cavity that can be in a vacuum state; the driving component and the first magnetic coupling member 11 are both arranged outside the transmission cavity; the driving component is connected to the first magnetic coupling member 11 so that the driving component drives the first magnetic coupling member 11 to rotate around the first axis; the second magnetic coupling member 12 and the transmission component are both arranged in the transmission cavity; the second magnetic coupling member 12 is coupled to the first magnetic coupling member 11 to generate The magnetic attraction force makes the first magnetic coupling member 11 and the second magnetic coupling member 12 relatively still, so that the first magnetic coupling member 11 drives the second magnetic coupling member 12 to rotate around the second axis; the second axis is parallel to or coincides with the first axis; the transmission component is in transmission connection with the second magnetic coupling member 12, and the transmission component includes a transmission part 32, so that when the second magnetic coupling member 12 rotates around the second axis, the transmission part 32 is driven to move along a preset straight line direction; the preset straight line direction is parallel to or the same as the second axis; the transmission part 32 is used to connect with the material 200 to drive the material 200 to move.

[0175] Through the magnetic coupling of the second magnetic coupling member 12 and the first magnetic coupling member 11, a magnetic attraction force is generated between the first magnetic coupling member 11 located outside the transmission chamber and the second magnetic coupling member 12 located inside the transmission chamber, that is, in the absence of a mechanical connection, the two can also achieve relative stillness, thereby enabling the first magnetic coupling member 11 to drive the second magnetic coupling member 12 to rotate; this is conducive to ensuring the sealing effect of the transmission chamber. In addition, the first magnetic coupling member 11, the second magnetic coupling member 12 and the transmission assembly are used to convert the external rotational motion into the linear motion in the transmission chamber; at the same time, the external and internal motion structures of the vacuum transmission device are simplified, and the external and internal motion space of the vacuum transmission device is reduced.

[0176] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0177] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0178] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum transmission device, characterized in that: include: A housing having a transmission cavity that can be in a vacuum state; A drive assembly and a first magnetic coupling member (11) are both arranged outside the transmission cavity; the drive assembly is connected to the first magnetic coupling member (11) to drive the first magnetic coupling member (11) to rotate around a first axis; a second magnetic coupling member (12) disposed in the transmission cavity; the second magnetic coupling member (12) and the first magnetic coupling member (11) are coupled to each other to generate a magnetic attraction force, so that the first magnetic coupling member (11) drives the second magnetic coupling member (12) to rotate around a second axis; the second axis is parallel to or coincides with the first axis; A transmission assembly is arranged in the transmission cavity; the transmission assembly is transmission-connected to the second magnetic coupling member (12) and comprises a transmission part (32), so that when the second magnetic coupling member (12) rotates around the second axis, the transmission part (32) is driven to move along a preset linear direction; the preset linear direction is parallel to or the same as the second axis; the transmission part (32) is used to connect with a material to drive the material to move; The driving assembly comprises a rotating part and a fixing part, the rotating part is sleeved on the outer peripheral side of the first magnetic coupling part (11), and the fixing part is connected to the housing; The vacuum transmission device further comprises a primary vacuum pumping component (61) and a secondary vacuum pumping component (62); the air suction port of the primary vacuum pumping component (61) is in communication with the transmission chamber; the air suction port of the secondary vacuum pumping component (62) is arranged to be connected and disconnected with the transmission chamber, and the air outlet of the secondary vacuum pumping component (62) is arranged to be openable and closable, so that when the vacuum of the transmission chamber is broken, the air suction port of the secondary vacuum pumping component (62) is disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component (62) is in a closed state.

2. The vacuum transmission device according to claim 1, characterized in that: The vacuum transmission device further comprises a bearing component (40) arranged in the transmission chamber, the bearing component (40) being used to bear materials and being connected to the transmission component (32) so that the transmission component (32) drives the bearing component (40) to move; and / or The transmission chamber is used to be connected and disconnected with an external chamber that can be in a vacuum state, so that when the transmission chamber is connected with the external chamber, the material on the carrying component (40) is transported to the external chamber in a vacuum state; the vacuum transmission device is hung on the side wall of the external chamber.

3. The vacuum transmission device according to claim 1, characterized in that: The transmission cavity comprises a first cavity section (21) and a second cavity section (22); the housing comprises a first shell portion (71) and a second shell portion (72); the first cavity section (21) is arranged on the first shell portion (71), and the second cavity section (22) is arranged on the second shell portion (72); the first shell portion (71) and the second shell portion (72) are detachably connected so that the first cavity section (21) and the second cavity section (22) are in communication; The second magnetic coupling member (12) is arranged in the first cavity section (21); the driving assembly and the first magnetic coupling member (11) are both arranged on the outer peripheral side of the first cavity section (21); a part of the transmission assembly is arranged in the first cavity section (21), and another part is arranged in the second cavity section (22); and the second cavity section (22) is used to place the material.

4. The vacuum transmission device according to claim 1, characterized in that: The driving assembly is a torque motor (5) and comprises a stator (50) and a mover (51) that cooperate with each other; the mover (51) is connected to the first magnetic coupling member (11) to drive the first magnetic coupling member (11) to rotate; the rotation axis of the mover (51) is parallel to or coincides with the first axis; and the mover (51) is the rotating part.

5. The vacuum transmission device according to claim 1, characterized in that: The driving assembly comprises a worm wheel (521) and a worm (522) meshing with each other, so that the worm (522) drives the worm wheel (521) to rotate; the worm wheel (521) is connected to the first magnetic coupling member (11) to drive the first magnetic coupling member (11) to rotate; the central axis of the worm wheel (521) is parallel to or coincides with the first axis; and the worm wheel (521) is the rotating part.

6. The vacuum transmission device according to claim 1, characterized in that: The first magnetic coupling member (11) comprises a plurality of first coupling parts (110) arranged at intervals in the circumferential direction around the first axis, and any two adjacent first coupling parts (110) have opposite magnetic properties; the second magnetic coupling member (12) comprises a plurality of second coupling parts (120) arranged at intervals in the circumferential direction around the first axis; the plurality of first coupling parts (110) and the plurality of second coupling parts (120) are arranged in a one-to-one correspondence, and each first coupling part (110) is coupled to a corresponding second coupling part (120).

7. The vacuum transmission device according to claim 6, characterized in that: Each of the first coupling parts (110) and the corresponding second coupling part (120) form a coupling unit; In the coupling unit, the first coupling portion (110) comprises one or a plurality of first coupling segments (1101) spaced apart along the preset straight line direction, the second coupling portion (120) comprises one or a plurality of second coupling segments (1201) spaced apart along the preset straight line direction, all the first coupling segments (1101) of the first coupling portion (110) and all the second coupling segments (1201) of the second coupling portion (120) are arranged in a one-to-one correspondence, and each first coupling segment (1101) is mutually coupled with a corresponding second coupling segment (1201); wherein any two adjacent first coupling segments (1101) of the plurality of first coupling segments (1101) of the first coupling portion (110) have opposite magnetic properties.

8. The vacuum transmission device according to claim 6 or 7, characterized in that: The first magnetic coupling member (11) further comprises a magnetic conductive member (111), the plurality of first coupling parts (110) are all connected to the magnetic conductive member (111), and the magnetic conductive member (111) is connected to the rotating part of the driving component, so that the rotating part of the driving component drives the plurality of first coupling parts (110) to rotate together through the magnetic conductive member (111); and the rotation axis centerline of the rotating part of the driving component is parallel to or coincides with the first axis.

9. The vacuum transmission device according to claim 1, characterized in that: The transmission assembly further comprises a transmission shaft (31); the second magnetic coupling member (12) is connected to the transmission shaft (31) to drive the transmission shaft (31) to rotate around its central axis, and the central axis of the transmission shaft (31) is parallel to or coincides with the second axis; the transmission shaft (31) and the transmission part (32) are threadedly connected so that the transmission shaft (31) drives the transmission part (32) to move along the axial direction of the transmission shaft (31).

10. The vacuum transmission device according to claim 1, characterized in that: The air suction port of the primary vacuum pumping component (61) is connected to the transmission chamber via a first pipeline (63); a connection point is provided on the first pipeline (63); the air outlet of the secondary vacuum pumping component (62) is connected to the connection point via a second pipeline (64); the second pipeline (64) can be opened and closed, so that the air outlet of the secondary vacuum pumping component (62) can be opened and closed; The connection point divides the first pipeline (63) into a first pipe section (632) and a second pipe section (633); an end of the second pipe section (633) away from the first pipe section (632) is connected to the transmission cavity; the second pipe section (633) can be set to be on and off.

11. A gas path control method, characterized in that: Applicable to the vacuum transmission device according to any one of claims 1 to 10, the gas path control method comprises: Step S1: when the transmission chamber is initially evacuated, the secondary evacuation component (62) is controlled to be in a closed state, and the primary evacuation component (61) is controlled to be in an open state, so that the primary evacuation component (61) evacuates the transmission chamber, so that the vacuum degree in the transmission chamber reaches a preset value; Step S2: when the vacuum degree in the transmission chamber reaches a preset value, controlling the secondary vacuum pumping component (62) to be in an open state, and opening the air suction port and the air outlet of the secondary vacuum pumping component (62), so that the secondary vacuum pumping component (62) can vacuum the transmission chamber; Step S3: when the vacuum of the transmission chamber is broken to exchange materials, the primary vacuum pumping component (61) is controlled to be in a closed state, and the secondary vacuum pumping component (62) is controlled to be in an open state, and the air suction port of the secondary vacuum pumping component (62) is controlled to be disconnected from the transmission chamber, and the air outlet of the secondary vacuum pumping component (62) is controlled to be closed, so as to break the vacuum of the transmission chamber; Step S4: When the transfer chamber is vacuumed again after replacing the material, the primary vacuum pumping component (61) is controlled to be in an open state, so that the primary vacuum pumping component (61) vacuumizes the transfer chamber; at the same time, the secondary vacuum pumping component (62) is kept in an open state, the air suction port of the secondary vacuum pumping component (62) is controlled and maintained to be disconnected from the transfer chamber, and the air outlet of the secondary vacuum pumping component (62) is controlled and maintained to be closed; and steps S2 to S4 are repeated.

12. The gas path control method according to claim 11, characterized in that: In step S2, the gas outlet of the secondary vacuum pumping component (62) is connected to the gas outlet of the primary vacuum pumping component (61), and the primary vacuum pumping component (61) is controlled to be in an open state, so that the primary vacuum pumping component (61) vacuumizes the gas outlet of the secondary vacuum pumping component (62).

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