Sensor

Abstract

The present invention is provided to be thinner and softer to detect force, pressure, or vibration with higher sensitivity. The sensor includes: a first film and a second film that generate a voltage when applied with a force, pressure, or vibration; a plurality of film-like first electrodes provided on one surface of the first film at predetermined intervals from each other; a film-like second electrode provided on one surface of the second film; and a dielectric member which is molded from a dielectric rubber into a thin plate shape in which holes are formed, the other surface of the first film is attached to a first surface, which is a predetermined surface, and the other surface of the second film is attached to a second surface, which faces the first surface, in which an electricity storage agent for assisting the accumulation of charges is placed in the holes formed in the dielectric member. A voltage corresponding to the force, pressure, or vibration applied partially or entirely is generated between the second electrode and any one or all of the first electrodes.

Description

Technical Field

[0001] The present invention relates to sensors, and more particularly to sensors that convert applied force, pressure or vibration into electrical voltage. Background Art

[0002] Haptic feedback and force feedback are important for surgical systems and teleoperation tasks. For haptic feedback and force feedback, the applied force, pressure or vibration needs to be detected.

[0003] In addition, Someya et al. are working on realizing a system that can measure biological information without interfering with the movement of the organism by sticking it to human tissues and body surfaces. By forming an organic device on an extremely thin polymer film with a thickness of about 1 micron, surprisingly, a strong and flexible organic device was successfully realized despite being ultra-thin. The world's lightest and thinnest soft organic transistor integrated circuit produced maintains electrical performance and does not damage the mechanical structure even if the film is bent and crushed to a curvature radius of 5 microns. Someya et al. used this organic transistor integrated circuit to successfully trial-produce a soft touch sensor system.

[0004] Furthermore, Stanford University has also studied similar sensors (for example, see Non-Patent Document 1).

[0005] Prior art literature

[0006] Patent Literature

[0007] Non-patent literature 1: WeichenWang,..ZhenanBao,Strain-insensitiveintrinsicallystretchabletransistorsandcircuits,NatureElectronicsvolume4,pages143-150(2021) Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, if they are made thin and flexible, it is difficult to maintain the sensitivity to detect force, pressure or vibration.

[0010] The present invention has been made in view of such a situation, and can be made thinner and softer, and can detect force, pressure or vibration with higher sensitivity.

[0011] Means for solving problems

[0012] A sensor according to one aspect of the present invention includes: a first film that generates a voltage when a force, pressure or vibration is applied; a plurality of first film-shaped electrodes that are arranged at predetermined intervals on one surface of the first film; a second film that generates a voltage when a force, pressure or vibration is applied; a second film-shaped electrode that is arranged on one surface of the second film; and a dielectric member that is formed of a dielectric rubber into a thin plate with holes, the other surface of the first film being attached to a first surface that is a predetermined surface, and the other surface of the second film being attached to a second surface that is opposite to the first surface; wherein a storage agent that assists in the accumulation of electric charges is placed in the holes formed in the dielectric member, and a voltage corresponding to the force, pressure or vibration applied partially or entirely is generated between the second electrode and any or all of the first electrodes.

[0013] The interval between the plurality of first electrodes provided on one surface of the first film can be set smaller than a two-point discrimination threshold of human skin.

[0014] The dielectric member can be pre-charged by applying a predetermined voltage to the dielectric member.

[0015] The hole formed in the dielectric member can be made to penetrate from the first surface to the second surface.

[0016] Any one of the plurality of first electrodes and the second electrode can be arranged so as to sandwich the first film and the second film and sandwich a portion in which the hole is formed in the portion of the dielectric member.

[0017] The shape of the cross section of the hole formed in the dielectric member on the first surface can be made the same as the shape of the surface of the film-shaped first electrode.

[0018] The first electrode can be arranged on a cross section of the first surface that is a cross section of the hole formed in the dielectric member, with the first film interposed therebetween.

[0019] Any first electrode and second electrode among the plurality of first electrodes can be arranged so as to sandwich the first film and the second film and sandwich a portion of the dielectric member that is away from the portion in which the hole is formed.

[0020] A pressing unit may be further provided to clamp and press the first film, the second film, and the end portions of the dielectric member.

[0021] A plurality of second electrodes may be provided, and each of the plurality of second electrodes is provided at a position opposite to each of the plurality of first electrodes.

[0022] It is also possible to further provide a pressing unit which displaces the first film, the first electrode, the second film, the second electrode, and the dielectric member and presses them toward the skin when detecting the shape or texture of the surface of the target or the force of the contact target object.

[0023] The pressing unit can displace the first film, the first electrode, the second film, the second electrode, and the dielectric member and press them toward the skin by the pressure of gas or liquid.

[0024] The first film, the first electrode, the second film, the second electrode, and the dielectric member can be pressed toward the skin by causing the pressing unit to displace them using a cam.

[0025] The pressing unit can displace the first film, the first electrode, the second film, the second electrode, and the dielectric member by pulling with the wire via a pulley and press them toward the skin.

[0026] Effects of the Invention

[0027] As described above, according to the present invention, it is possible to make it thinner and softer and detect force, pressure or vibration with higher sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a block diagram of a tactile sensing system 11 including a tactile sensing pad as an example of a sensor.

[0029] Figure 2 2 is a diagram showing an example of the structure of the tactile sensor pad group 21 .

[0030] Figure 3 2 is a diagram showing another example of the structure of the tactile sensor pad group 21 .

[0031] Figure 4 2 is a diagram showing still another example of the structure of the tactile sensor pad group 21 .

[0032] Figure 5 2 is a plan view showing a configuration example of the tactile sensor pad 73 .

[0033] Figure 6 Yes means Figure 5 FIG. 2 is a cross-sectional view of a cross section of the touch sensing pad 73 taken along line AA′ in FIG.

[0034] Figure 7 2 is a cross-sectional view showing a cross section of the touch sensor pad 251 .

[0035] Figure 8 2 is a cross-sectional view showing a cross section of the touch sensor pad 301 .

[0036] Fig. 9 2 is a cross-sectional view showing a cross section of the touch sensor pad 351 .

[0037] Fig.10 2 is a cross-sectional view showing a cross section of the touch sensor pad 401 .

[0038] Fig.11 1 is a diagram showing a state of the tactile sensor pad 73 attached to the fingertip. DETAILED DESCRIPTION

[0039] Below, refer to Figures 1 to 11 , a sensor according to an embodiment of the present invention is described.

[0040] Figure 1 The tactile sensing system 11 includes a tactile sensing pad as an example of a sensor. The tactile sensing system 11 converts force, pressure, or vibration that causes a person to feel touch or pressure into information. For example, the tactile sensing system 11 detects the concavity and convexity, texture, and force of contact with the object when the object is touched by a human finger, palm, or robot. In addition, the object touched by the human finger, palm, or robot can be a physical object, and can be a natural person or an object.

[0041] The tactile sensing system 11 includes a tactile sensing pad group 21 , a robot system 22 , a tactile / pressure driving information calculation system 41 , a virtual reality computer system / remote robot manipulation system 42 , and an image processing system 43 .

[0042] The tactile sensing pad group 21 is configured to include a plurality of tactile generating pads and an actuator for pressing a predetermined tactile generating pad against the skin. The tactile sensing pad group 21 detects force, pressure, or vibration. The tactile sensing pad group 21 can also be said to detect the tactile sense of the object.

[0043] The tactile sensing pad group 21 is manufactured using MEMS (Micro Electro Mechanical Systems), ultra-precision cutting, 3D printing technology (three-dimensional modeling technology) and precision bonding technology. The tactile sensing pad group 21 is attached to the body, such as fingers, palms, backs of hands, wrists, elbows, shoulders, chests, backs or waists, through fixing belts, harnesses, gloves or clothes. For example, the shape of the tactile sensing pad group 21 is a surface shape corresponding to the palm side of the distal phalanx of the second finger (index finger), and has a thickness of 0.2 mm or more and less than 0.5 mm. For example, the shape of the tactile sensing pad group 21 is a surface shape corresponding to the palm side of the right hand, and has a thickness of 0.2 mm or more and less than 0.5 mm. For example, when the tactile sensing pad group 21 is attached to the palm, when a person touches an object such as a human body or an object with the palm, the tactile sensing pad group 21 will sense the force, pressure or vibration generated when pressing on an object such as a person or an object. The touch sensing pad set 21 outputs the detected force, pressure or vibration as a voltage.

[0044] In other words, the tactile sensing pad group 21 detects the force, pressure or vibration that generates the tactile, pressure or vibration sensation and outputs the detected force, pressure or vibration as a voltage. In other words, the tactile sensing pad group 21 detects the tactile, pressure or vibration sensation of the object.

[0045] The robot system 22 is provided with a robot hand that performs actions such as touching, grasping, and carrying objects such as people or objects. The tactile sensing pad group 21 is attached to the robot hand of the robot system 22. The tactile sensing pad group 21 detects force, pressure, or vibration. That is, when the robot hand of the robot system 22 touches an object such as a person or an object, or grasps an object, the tactile sensation of the object is detected as force, pressure, or vibration. For example, the tactile sensing pad group 21 and the robot system 22 track the surface of the object and detect the tactile sensation corresponding to the shape of the object such as bumps and textures. The tactile / pressure drive information calculation system 41 obtains a signal of force, pressure, or vibration representing the feeling of the object detected by the tactile sensing pad group 21.

[0046] Hereinafter, the object touched by the tactile sensing pad assembly 21 to detect force, pressure or vibration, that is, the object such as a person or an object is referred to as a contact object.

[0047] The image processing system 43 includes a camera device, an image processing device, etc., which estimates the convexity and concavity, texture and force of contact of an object based on an image obtained by photographing an object such as a person or an object, and supplies information representing the convexity and concavity, texture and force of contact of the object to the tactile / pressure drive information calculation system 41.

[0048] The tactile / pressure drive information calculation system 41 is composed of an analog signal processing device and a computer system, which converts the data of the force, pressure or vibration representing the feeling of the contact object detected by the tactile sensing pad group 21 into information that can be processed and calculated by a computer. For example, the tactile / pressure drive information calculation system 41 applies signal processing such as noise removal and dynamic range conversion to the signal of the force, pressure or vibration representing the feeling of the contact object obtained from the tactile sensing pad group 21, and performs analog / digital conversion. In addition, for example, the tactile / pressure drive information calculation system 41 converts the data of the force, pressure or vibration as digital data into data in a predetermined format. For example, the tactile / pressure drive information calculation system 41 converts the data of the force, pressure or vibration into data in a format configured so that the value representing the force or pressure represents a spatial or temporal position.

[0049] In addition, the tactile / pressure drive information calculation system 41 converts information indicating the unevenness, texture, and force of contact of the object estimated by the image processing system 43 into data of force, pressure, or vibration in a predetermined format.

[0050] In addition, for example, the tactile / pressure drive information calculation system 41 may also associate the object's unevenness, texture, and contact force estimated by the image processing system 43 with data representing the tactile force, pressure, or vibration of the contact object detected by the tactile sensing pad group 21.

[0051] The tactile / pressure driving information calculation system 41 provides force, pressure or vibration data in a predetermined format to the virtual reality computer system / remote robot manipulation system 42.

[0052] The virtual reality computer system / telerobotic manipulation system 42 uses the data of force, pressure or vibration in a predetermined format for presenting the control of touch and pressure, for example, in the communication in the metaverse (virtual reality) and in the tasks using the telerobotics. For example, the virtual reality computer system / telerobotic manipulation system 42 calculates the contact, contact or collision of the avatar with other avatars in the virtual space or the target in the virtual space in response to the movement of the avatar in the virtual space. For example, when the avatar contacts or collides with other avatars or targets in the virtual space, the virtual reality computer system / telerobotic manipulation system 42 calculates the tactile information of the other avatars or targets, such as the tactile, pressure or vibration sensation.

[0053] Hereinafter, the tactile sensing pad group 21 will be described.

[0054] Figure 2 2 is a diagram showing an example of the structure of the tactile sensing pad group 21. The tactile sensing pad group 21 is configured to include about 3 to 10 tactile sensing pads 73. Each of the tactile sensing pads 73 has 10 to 50 detection points. The detection points in the tactile sensing pads 73 are arranged at Figure 2 The left and right directions in Figure 2 That is, the detection points are arranged two-dimensionally on the surface of the tactile sensor pad 73 at predetermined intervals on the surface that contacts the contact object.

[0055] In addition, in the following description, a part of the detection points of the tactile sensing pad 73 is used as an example. When a predetermined tactile sensing pad 73 among the arranged plurality of tactile sensing pads 73 contacts a contact object to detect force, pressure or vibration, the tactile sensing pad group 21 moves the predetermined tactile sensing pad 73 toward the contact object in a manner of contacting a predetermined portion of the contact object.

[0056] Hereinafter, for example, when the tactile sensing pad group 21 includes four tactile sensing pads 73 , the tactile sensing pads 73 are respectively referred to as tactile sensing pads 73 - 1 to 73 - 4 and the like when distinguishing the tactile sensing pads 73 .

[0057] Figure 2 An example of the configuration of the tactile sensing pad group 21 in the case of including four tactile sensing pads 73-1 to 73-4 is shown. Each of the tactile sensing units 71-1 to 71-4 is configured to include each of the air actuators 72-1 to 72-4 and each of the tactile sensing pads 73-1 to 73-4. The tactile sensing units 71-1 to 71-4 act independently to detect force, pressure or vibration.

[0058] In the tactile sensing pad 73-1, a plurality of electrodes are formed on the surface of the tactile sensing pad 73-1 on the side in contact with the contact object 101, which will be described in detail later. Similarly, with respect to each of the tactile sensing pads 73-2 to 73-4, a plurality of electrodes are formed on the surface of each of the tactile sensing pads 73-2 to 73-4 on the side in contact with the contact object 101, which will be described in detail later.

[0059] In each of the tactile sensing pads 73-1 to 73-4, a plurality of electrodes formed on the surface of the side in contact with the contact object 101 are respectively detection points for detecting force, pressure or vibration. The intervals between the plurality of electrodes respectively formed on the tactile sensing pads 73-1 to 73-4 are smaller than the two-point discrimination threshold of human skin. That is, the distance between the electrodes is smaller than the two-point discrimination threshold of human skin. For example, the two-point discrimination threshold of human skin is 1 mm to 6 mm at the fingertips and 15 mm to 20 mm at the palm or the sole of the foot. For example, the two-point discrimination threshold of human skin is 2 mm to 3 mm at the lips and 30 mm in the back of the hand or the back of the foot.

[0060] Thus, it is possible to detect a force, pressure or vibration at an interval smaller than the two-point discrimination threshold of human skin. By using the information (signal) obtained by the tactile sensing pad group 21 to apply a device that causes a tactile, pressure or vibration sensation at an interval smaller than the two-point discrimination threshold of human skin, it is possible to reproduce the tactile, pressure or vibration sensation applied to human skin.

[0061] In addition, the two-point discrimination threshold of human skin is 2 mm-3 mm at the lips, which is the shortest in the body. Therefore, by making the distance between electrodes less than 2 mm, the information obtained by the tactile sensing pads 73-1-73-4 can be used in any part of the body.

[0062] The tactile sensing pads 73-1 to 73-4 are respectively moved in the direction of the contact object 101 by the air actuators 72-1 to 72-4 so as to contact with a predetermined portion of the contact object 101. The air actuators 72-1 to 72-4 are pneumatic actuators composed of a cylinder and a piston. When compressed air of a predetermined pressure is supplied to each of the air actuators 72-1 to 72-4, the piston protrudes relative to the cylinder, so that any of the tactile sensing pads 73-1 to 73-4 fixed to the piston is displaced, thereby moving in the direction of the contact object 101. For example, at a predetermined moment, compressed air of a predetermined pressure is supplied to the air actuator 72-2, so that the tactile sensing pad 73-2 is displaced, thereby moving toward the contact object 101, and the actuators 72-1, 72-3 and 72-4 are not supplied with compressed air of a predetermined pressure, so that the tactile sensing pads 73-1, 73-3 and 73-4 are not moved toward the contact object 101. At this time, the tactile sensing pad 73 - 2 detects force, pressure or vibration. That is, at this time, the tactile sensing pad 73 - 2 detects the concavoconvexity or texture of the contact object 101 or the force, pressure or vibration applied to the contact object 101.

[0063] At a predetermined moment, all the tactile sensing pads 73-1 to 73-4 or any one or more of the tactile sensing pads 73-1 to 73-4 move toward the contact object 101 in a manner of contacting a predetermined portion of the contact object 101 through each of the air actuators 72-1 to 72-4, or the tactile sensing pads 73-1 to 73-4 move away from the contact object 101.

[0064] Hereinafter, when it is not necessary to distinguish the tactile sensing units 71-1 to 71-4, they are simply referred to as tactile sensing units 71. Hereinafter, when it is not necessary to distinguish the air actuators 72-1 to 72-4, they are simply referred to as air actuators 72.

[0065] Figure 3 1 is a diagram showing another example of the structure of the tactile sensing pad group 21 in the case of including four tactile sensing pads 73-1 to 73-4. The tactile sensing units 121-1 to 121-4 are configured to include each of the tactile sensing pads 73-1 to 73-4, each of the cams 122-1 to 122-4, and each of the motors 123-1 to 123-4, respectively. The tactile sensing units 121-1 to 121-4 act independently to detect force, pressure, or vibration.

[0066] Figure 3The tactile sensing pads 73-1 to 73-4 are moved toward the contact object 101 in a manner of contacting a predetermined portion of the contact object 101 through each of the cams 122-1 to 22-4 and each of the motors 123-1 to 123-4. For example, the cams 122-1 to 122-4 are respectively rotary plate cams. For example, the cams 122-1 to 122-4 are respectively composed of eccentric circular plates. For example, the motors 123-1 to 123-4 are respectively electric motors. That is, the cams 122-1 to 122-4 are respectively rotated by the motors 123-1 to 123-4, and the tactile sensing pads 73-1 to 73-4 are respectively pushed toward the contact object 101 side when they are respectively at predetermined angular positions relative to the tactile sensing pads 73-1 to 73-4.

[0067] For example, at a predetermined time, the cam 122-2 is rotated by the motor 123-2, and when the side protruding from the rotation axis of the cam 122-2 moves toward the tactile sensing pad 73-2, the tactile sensing pad 73-2 is pushed out to be displaced, thereby moving toward the contact object 101. Since the motors 123-1, 123-3, and 123-4 do not rotate, the cams 122-1, 122-3, and 122-4 do not move the tactile sensing pad 73-1, 73-3, and 73-4 toward the contact object 101. At this time, the tactile sensing pad 73-2 detects force, pressure, or vibration. That is, at this time, the tactile sensing pad 73-2 detects the unevenness or texture of the contact object 101, or the force, pressure, or vibration of contact with the contact object 101.

[0068] At a predetermined moment, all the tactile sensing pads 73-1 to 73-4 or any one or more of the tactile sensing pads 73-1 to 73-4 move toward the contact object 101 in a manner of contacting a predetermined portion of the contact object 101 through each of the cams 122-1 to 122-4, or the tactile sensing pads 73-1 to 73-4 move away from the contact object 101.

[0069] In addition, for example, the touch sensor pads 73 - 1 to 73 - 4 are urged away from the contact object 101 by a spring or the like (not shown).

[0070] In addition, the cams 122-1 to 122-4 are described as plate cams, but they are not limited to this, and they can also be groove cams or solid cams. In addition, the motors 123-1 to 123-4 are described as electric motors, but they are not limited to this, and they can also be pressure motors, molecular motors, or ultrasonic motors that utilize the pressure of the fluid.

[0071] Hereinafter, when it is not necessary to distinguish the tactile sensing units 121-1 to 121-4, they are simply referred to as tactile sensing units 121. Hereinafter, when it is not necessary to distinguish the cams 122-1 to 122-4, they are simply referred to as cams 122. In addition, when it is not necessary to distinguish the motors 123-1 to 123-4, they are simply referred to as motors 123.

[0072] Figure 4 1 is a diagram showing another example of the configuration of the tactile sensing pad group 21 in the case of including four tactile sensing pads 73-1 to 73-4. Each of the tactile sensing units 151-1 to 151-4 is configured to include each of the tactile sensing pads 73-1 to 73-4, each of the wires 152-1 to 152-4, each of the pulleys 153-1 to 153-4, each of the pulleys 154-1 to 154-4, and each of the motors 155-1 to 155-4. The tactile sensing units 151-1 to 151-4 act independently to detect force, pressure, or vibration.

[0073] Figure 4 The tactile sensing pads 73-1 to 73-4 in the embodiment are moved toward the contact object 101 through each of the wires 152-1 to 152-4, each of the pulleys 153-1 to 153-4, each of the pulleys 154-1 to 154-4, and each of the motors 155-1 to 155-4, so as to contact a predetermined portion of the contact object 101. One end of each of the wires 152-1 to 152-4 is fixed to each of the tactile sensing pads 73-1 to 73-4, and the other end of each of the wires 152-1 to 152-4 is wound around each of the pulleys 154-1 to 154-4. The pulleys 153-1 to 153-4 are supported to be rotatable. The wires 152-1 to 152-4 are suspended on the pulleys 153-1 to 153-4, respectively, and the extending directions of the wires 152-1 to 152-4 are changed. The pulleys 154-1 to 154-4 are rotated by motors 155-1 to 155-4, respectively. Each of the motors 155-1 to 155-4 is an electric motor. When the motors 155-1 to 155-4 rotate the pulleys 154-1 to 154-4, respectively, the lengths of the wires 152-1 to 152-4 respectively wound around the pulleys 154-1 to 154-4 are changed, causing the touch sensing pads 73-1 to 73-4 fixed to one end of each of the wires 152-1 to 152-4 to be pulled and displaced, respectively.

[0074] That is, the pulleys 154 - 1 to 154 - 4 are rotated by the motors 155 - 1 to 155 - 4 , respectively, and the wires 152 - 1 to 152 - 4 are respectively wound up, and the wires 152 - 1 to 152 - 4 respectively pull each of the touch sensor pads 73 - 1 to 73 - 4 to press them toward the contact object 101 .

[0075] For example, at a predetermined time, the pulley 154-2 is rotated by the motor 155-2, and when the wire 152-2 is wound, the wire 152-2 pulls the tactile sensing pad 73-2 to displace it, thereby moving it toward the contact object 101. Since the motors 155-1, 155-3, and 155-4 do not rotate, the pulleys 154-1, 154-3, and 154-4 do not move the tactile sensing pad 73-1, 73-3, and 73-4 toward the contact object 101. At this time, the tactile sensing pad 73-2 detects force, pressure, or vibration. That is, at this time, the tactile sensing pad 73-2 detects the unevenness or texture of the contact object 101, or the force, pressure, or vibration of contact with the contact object 101.

[0076] At a predetermined moment, all the tactile sensing pads 73-1 to 73-4 or any one or more of the tactile sensing pads 73-1 to 73-4 are pulled by the wires 152-1 to 152-4 respectively via each of the pulleys 153-1 to 153-4 and the pulleys 154-1 to 154-4, so as to move toward the contact object 101 in a manner of contacting a predetermined portion of the contact object 101, or the tactile sensing pads 73-1 to 73-4 are all moved in a manner of moving away from the contact object 101.

[0077] In addition, for example, the touch sensor pads 73 - 1 to 73 - 4 are urged away from the contact object 101 by a spring or the like (not shown).

[0078] For example, the tactile sensing pad set 21 including the tactile sensing units 151 - 1 to 151 - 4 may be implemented as a glove type device.

[0079] In addition, although the motors 155 - 1 to 155 - 4 are described as electric motors, they are not limited to this and may be pressure motors, molecular motors, or ultrasonic motors that utilize the pressure of a fluid.

[0080] Hereinafter, when it is not necessary to distinguish the tactile sensing units 151-1 to 151-4 separately, they are simply referred to as the tactile sensing units 151. Hereinafter, when it is not necessary to distinguish the wires 152-1 to 152-4 separately, they are simply referred to as the wires 152. In addition, when it is not necessary to distinguish the pulleys 153-1 to 153-4 separately, they are simply referred to as the pulleys 153. In addition, when it is not necessary to distinguish the pulleys 154-1 to 154-4 separately, they are simply referred to as the pulleys 154. In addition, when it is not necessary to distinguish the motors 155-1 to 155-4 separately, they are simply referred to as the motors 155.

[0081] Next, an example of a detailed structure of the tactile sensor pad 73 will be described. Figure 5 1 is a plan view showing an example of the structure of the touch sensor pad 73 . Figure 6 Yes means Figure 5The tactile sensing pad 73 includes a film 201, electrodes 202-1 to 202-12, a dielectric member 203, a film 204, and an electrode 205. The thickness of the tactile sensing pad 73 is 0.2 mm or more and less than 0.5 mm.

[0082] The tactile sensing pad 73 detects force, pressure or vibration. For example, the tactile sensing pad 73 generates a signal of a voltage corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0083] Electrodes 202-1 to 202-12 are provided on one surface of the film 201. Electrode 205 is provided on one surface of the film 204. Figure 6 The upper surface of the dielectric member 203 is the other surface of the first surface adhesive film 201. Figure 6 The lower surface of the film 201 (hereinafter also referred to as the lower surface) is attached to the other surface of the film 204. That is, the film 201 and the film 204 are attached together in a manner of sandwiching the dielectric component 203. For example, the planar shape of the film 201, the planar shape of the dielectric component 203, and the planar shape of the film 204 are the same. For example, the planar shape of the film 201, the planar shape of the dielectric component 203, and the planar shape of the film 204 are rectangular. For example, the film 201, the dielectric component 203, and the film 204 are attached in an overlapping manner when viewed from above. The electrodes 202-1 to 202-12 are arranged on the outer surface of the film 201, and the film 201 is attached to the film 204 by sandwiching the dielectric component 203. The electrode 205 is arranged on the outer surface of the film 204, and the film 204 is attached to the film 201 by sandwiching the dielectric component 203.

[0084] The membrane 201 is an example of a first membrane, and is a membrane formed of a polymer material in a film shape. When force, pressure, or vibration is applied, the membrane 201 generates a voltage. The membrane 204 is an example of a second membrane, and is a membrane formed of a polymer material in a film shape. When force, pressure, or vibration is applied, the membrane 204 generates a voltage. The membrane 201 and the membrane 204 are respectively piezoelectric membranes such as PVDF (Poly Vinylidene Di Fluoride) or fluorine resin membranes such as FEP (Fluorinated Ethylene Propylene), PTFE (Poly Tetra Fluoro Ethylene), PFA (Per Fluoro Alkoxy polymer), ETFE (Ethylene Tetra Fluoro Ethylen copolymer), PVDF, PCTFE (Poly Chloro Tri Fluoro Ethylene) or ECTFE (Ethylene Chloro Tri Fluoro Ethylene copolymer). The material of the membrane 204 may be the same as or different from that of the membrane 201.

[0085] The dielectric component 203 is formed into a thin plate shape by a soft material that serves as a dielectric and an insulator. For example, the dielectric component 203 is formed by a rubber such as silicone rubber, PDMS (dimethylpolysiloxane), fluororubber, acrylic rubber, or polyurethane rubber. The dielectric component 203 is provided with a hole 221-1 (not shown), a hole 221-2 (not shown), a hole 221-3, a hole 221-4 (not shown) to a hole 221-6 (not shown), a hole 221-7, a hole 221-8 (not shown) to a hole 221-10 (not shown), a hole 221-11, and a hole 221-12 (not shown). The holes 221-1 to 221-12 penetrate from the surface of the dielectric component 203 on the membrane 201 side to the surface on the membrane 204 side. That is, the holes 221-1 to 221-12 penetrate from the upper surface of the dielectric component 203 to the lower surface. The upper surface of the dielectric member 203 is an example of the first surface. The lower surface of the dielectric member 203 is an example of the second surface.

[0086] The electrodes 202-1 to 202-12 are formed into a film shape by a conductor. For example, the electrodes 202-1 to 202-12 are a film or a carbon nanotube (CNT) electrode film made of a metal material such as gold (Au), platinum (Pt), titanium (Ti) or aluminum (Al). The electrodes 202-1 to 202-12 are formed softly. The electrodes 202-1 to 202-12 are insulated from each other. For example, the electrodes 202-1 to 202-12 are respectively formed into a circular thin film on one surface of the film 201. For example, the electrodes 202-1 to 202-12 are respectively formed into a circle with a diameter of 1 mm.

[0087] Electrodes 202-1 to 202-12 are detection points for detecting force, pressure or vibration, respectively. The interval between electrodes 202-1 to 202-12 is less than the two-point discrimination threshold of human skin. For example, when the tactile sensing pad 73 is used for fingertips, the interval between electrodes 202-1 to 202-12 is less than 2 mm. In this case, the interval between electrodes 202-1 to 202-12 refers to the distance from the center to the center of each of the circular electrodes 202-1 to 202-12 or the distance from the outer edge to the outer edge of each of the circular electrodes 202-1 to 202-12.

[0088] The terminals 212-1 to 212-12 are terminals for outputting voltages from the electrodes 202-1 to 202-12 through the wiring portions 211-1 to 211-12, respectively. The terminals 212-1 to 212-12 and the wiring portions 211-1 to 211-12 are formed of the same material as the electrodes 202-1 to 202-12.

[0089] The terminals 212-1 to 212-12 are each formed in a circular thin film shape. The wiring portions 211-1 to 211-12 are each formed of a flat film connecting the terminals 212-1 to 212-12 to the electrodes 202-1 to 202-12, or are each formed of a plurality of flat films connected to each other.

[0090] For example, along one side of the film 201 having a rectangular shape on the upper surface, terminals 212-1, 212-2, 212-5, 212-6, 212-9, and 212-10 are arranged. Along the side opposite to the side of the film 201 having terminals 212-1, 212-2, 212-5, 212-6, 212-9, and 212-10, terminals 212-3, 212-4, 212-7, 212-8, 212-11, and 212-12 are arranged. For example, the terminals 212-1 to 212-12 are respectively wire-bonded and electrically connected to the outside.

[0091] That is, in each of the electrodes 202-1 to 202-12, a voltage is generated due to pressure on the touch sensing pad 73 or deformation of the touch sensing pad 73. The voltages respectively generated in the electrodes 202-1 to 202-12 are transmitted to each of the terminals 212-1 to 212-12.

[0092] The electrode 205 is formed into a film shape by a conductor. For example, the electrode 205 is a film or a carbon nanotube (CNT) electrode film made of a metal material such as gold (Au), platinum (Pt), titanium (Ti) or aluminum (Al). The electrode 205 is formed softly. The electrode 205 is formed in a rectangular film shape on one surface of the film 204. The electrode 205 is formed in a manner opposite to all the electrodes 202-1 to 202-12. That is, the electrode 205 is formed in a manner that sandwiches the film 201, the dielectric component 203 and the film 204 with all the electrodes 202-1 to 202-12. In other words, the electrode 205 is formed to overlap with all the electrodes 202-1 to 202-12 in the thickness direction of the film 201, the dielectric component 203 and the film 204.

[0093] The hole 221-3 is formed in a columnar shape with a circular cross section so that the upper and lower surfaces of the dielectric member 203 are circular. The end of the upper surface of the dielectric member 203 of the hole 221-3 is consistent with the outer periphery of the electrode 202-3. The electrode 205 covers the end of the lower surface of the dielectric member 203 of the hole 221-3 on one surface of the film 204.

[0094] The hole 221-7 is formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of the dielectric member 203. The end of the upper surface of the dielectric member 203 of the hole 221-7 is aligned with the outer periphery of the electrode 202-7. The electrode 205 covers the end of the lower surface of the dielectric member 203 of the hole 221-7 on one surface of the film 204.

[0095] Furthermore, the hole 221-11 is formed in a columnar shape with a circular cross section so that the upper surface and the lower surface of the dielectric member 203 are circular. The end of the upper surface of the dielectric member 203 of the hole 221-11 coincides with the outer periphery of the electrode 202-11. The electrode 205 covers the end of the lower surface of the dielectric member 203 of the hole 221-11 on one surface of the film 204.

[0096] Similarly, the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12 are formed in a columnar shape with a circular cross section so as to be circular on the upper surface and the lower surface of the dielectric member 203. The ends of the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12 on the upper surface of the dielectric member 203 are aligned with the outer peripheries of the electrodes 202-1 and 202-2, the electrodes 202-4 to 202-6, the electrodes 202-8 to 202-10, and the electrode 202-12, respectively. The electrode 205 covers the end portions of the lower surfaces of the dielectric member 203 of the holes 221 - 1 and 221 - 2 , the holes 221 - 4 to 221 - 6 , the holes 221 - 8 to 221 - 10 , and the hole 221 - 12 on one surface of the film 204 .

[0097] In this way, any of the electrodes 202 - 1 to 202 - 12 and the electrode 205 are arranged to sandwich the films 201 and 204 and to sandwich a portion of the dielectric member 203 where any of the holes 221 - 1 and 221 - 12 are formed.

[0098] The cross-sectional shape of the upper surface of the dielectric member 203 of each of the holes 221 - 1 to 221 - 12 formed in the dielectric member 203 is the same as the shape of the surface of each of the film-like electrodes 202 - 1 to 202 - 12 .

[0099] In addition, the electrodes 202 - 1 to 202 - 12 are arranged on the cross sections of the upper surface of the dielectric member 203 in the holes 221 - 1 to 221 - 12 of the dielectric member 203 , respectively, with the film 201 interposed therebetween.

[0100] Before use, a voltage of 100 V to 15 kV is applied to the touch sensing pad 73 to precharge the charge. When a voltage is applied between the electrodes 202-1 to 202-12 and the electrode 205 as precharge, charges are accumulated between the membranes 201 and 204, particularly in the holes 221-1 to 221-12 of the dielectric member 203. If the charge is precharged, the touch sensing pad 73 generates a larger voltage under a smaller force, pressure, or vibration.

[0101] When force, pressure, or vibration is applied to a predetermined portion or the entirety, the tactile sensing pad 73 generates a voltage corresponding to the applied force, pressure, or vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined portion or the entirety, the tactile sensing pad 73 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0102] Since the tactile sensing pad 73 is mainly made of resin or silicone rubber, it can be easily deformed and fit the contact object 101 to detect the force, pressure or vibration generated by the movement of the contact object 101 or the force, pressure or vibration applied to the contact object 101 .

[0103] In the case where the ratio of the area of ​​the holes 221 - 1 to 221 - 12 to the entire area of ​​the dielectric member 203 is 10% to 40%, the touch sensing pad 73 generates a greater voltage under a smaller force, pressure, or vibration.

[0104] In addition, the holes 221-1 to 221-12 are described as penetrating from the upper surface to the lower surface of the dielectric component 203, but it is also possible that the holes do not penetrate from the upper surface to the lower surface of the dielectric component 203, but are recessed from the upper surface or the lower surface of the dielectric component 203, and further, bubble-shaped holes can be formed inside the dielectric component 203.

[0105] Furthermore, although the electrodes 202-1 to 202-12 are described as being formed in a circular film shape on one surface of the film 201, they may also be in an elliptical shape, an oblong shape, or a polygonal shape such as a triangle or a quadrilateral.

[0106] As described above, it is possible to detect force, pressure, or vibration applied to all or any electrode portion of the electrodes 202-1 to 202-12.

[0107] Hereinafter, when it is not necessary to distinguish the electrodes 202-1 to 202-12, they are simply referred to as electrodes 202. Hereinafter, when it is not necessary to distinguish the holes 221-1 to 221-12, they are simply referred to as holes 221.

[0108] In addition, in the material of the molded dielectric component 203, adding about 0.1 wt % to 30 wt % of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 and other MOF (Metal Organic Frameworks) materials can assist in the storage of charges in the dielectric component 203.

[0109] In addition, 0.5 volume % to 50 volume % of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, or MOF material can be placed in the pores 221 to assist in the storage of charges.

[0110] In addition, when a storage agent such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 or other MOF materials is mixed in the dielectric component 203 and placed in the hole 221, the tactile sensing pad 73 can be used even without charging the electric charge in advance.

[0111] In addition, when the dielectric member 203 is molded, 0.1 wt % to 5 wt % of a foaming agent may be mixed to create bubbles inside and form the pores 221 in the dielectric member 203 .

[0112] Human skin has many receptors for sensing vibration, shape, and shear force. The tactile sensing pad 73 contacts the contact object 101 and detects force, pressure, or vibration, thereby generating a voltage corresponding to the force, pressure, or vibration that activates the receptors on the human skin, that is, generating a voltage corresponding to the sense of touch and pressure. In other words, the tactile sensing pad 73 can detect the force, pressure, or vibration on the contact object 101, which activates the receptors on the human skin. In addition, it can also be said that the tactile sensing pad 73 can detect the force, pressure, or vibration that generates the sense of touch and pressure.

[0113] By using the voltage obtained by the tactile sensing pad 73 as a signal representing the force, pressure or vibration that activates the receptors of the human skin, the tactile, pressure or vibration sensation applied to the human skin can be reproduced by applying a device that causes the tactile, pressure or vibration sensation.

[0114] As reference Figures 2 to 4 As described, when the tactile sensing pad 73 is pushed toward the contact object 101 by the air actuator 72, the cam 122 and the motor 123, or the wire 152, the pulley 153, the pulley 154 and the motor 155, when force, pressure or vibration is applied to all or any part of the electrodes 202-1 to 202-12, the tactile sensing pad 73 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure or the amplitude of the vibration between all or any part of the electrodes 202-1 to 202-12 and the electrode 205.

[0115] Next, a detailed example of the configuration of the tactile sensing pad 251 constituting the tactile sensing pad group 21 will be described. The tactile sensing pad 251 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73 . Figure 7 2 is a cross-sectional view showing a cross section of the touch sensing pad 251. Figure 7 In, with Figure 6 The same parts as those shown are denoted by the same reference numerals, and description thereof will be omitted.

[0116] The tactile sensing pad 251 detects force, pressure, or vibration. For example, the tactile sensing pad 251 generates a signal of a voltage corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0117] The touch sensing pad 251 is configured to include a film 201, electrodes 202-1 to 202-12, a film 204, an electrode 205, and a dielectric member 261. The thickness of the touch sensing pad 251 is greater than or equal to 0.2 mm and less than 0.5 mm.

[0118] In the surface of the dielectric member 261, Figure 7 The upper surface of the dielectric member 261 (hereinafter also referred to as the upper surface) is the other surface of the first surface adhesive film 201. Figure 7 The lower surface of the film 201 (hereinafter also referred to as the lower surface) is attached to the other surface of the film 201. That is, the film 201 and the film 204 are attached together in a manner of sandwiching the dielectric component 261. For example, the planar shape of the film 201, the planar shape of the dielectric component 261, and the planar shape of the film 204 are the same. For example, the planar shape of the film 201, the planar shape of the dielectric component 261, and the planar shape of the film 204 are rectangular. For example, the film 201, the dielectric component 261, and the film 204 are attached in a manner of overlapping when viewed from above.

[0119] The dielectric component 261 is formed into a thin plate shape by a soft material that is a dielectric and an insulator. For example, the dielectric component 261 is formed by a rubber such as silicone rubber, PDMS, fluororubber, acrylic rubber, or polyurethane rubber. The dielectric component 261 is formed with holes 271-1 to 271-9. The holes 271-1 to 271-9 penetrate from the upper surface to the lower surface of the dielectric component 261. Figure 7 The cross-sections of electrodes 202-3, 202-7 and 202-11 are shown, but holes similar to holes 271-1 to 271-9 are also formed in the portion of the dielectric component 261 between electrodes 202-1, 202-5 and 202-9, electrodes 202-2, electrodes 202-6 and 202-10, electrodes 202-4, electrodes 202-8 and 202-12 and electrode 205.

[0120] The electrode 205 is formed so as to overlap all of the electrodes 202 - 1 to 202 - 12 in the thickness direction of the film 201 , the dielectric member 261 , and the film 204 .

[0121] The holes 271-1 to 271-9 are formed in a cylindrical shape with a circular cross section in a circular manner on the upper surface and the lower surface of the dielectric member 261. The diameter of the bottom surface of each of the holes 271-1 to 271-9 is smaller than the diameter of each of the electrodes 202-3, 202-7, and 202-11. The electrode 202-3 is arranged on one surface of the membrane 201 in a manner covering the hole 271-2 and the hole 271-3. The electrode 202-7 is arranged on one surface of the membrane 201 in a manner covering the hole 271-5. The electrode 202-11 is arranged on one surface of the membrane 201 in a manner covering the hole 271-7 and the hole 271-8. That is, the electrode 202-3, the electrode 202-7, and the electrode 202-11 are arranged on one surface of the membrane 201 in a manner covering any one or two of the holes 271-1 to 271-9. The electrode 205 covers the end portions of the lower surface of the dielectric member 261 of the holes 271 - 1 to 271 - 9 on one face of the film 204 .

[0122] In addition, the hole 271 - 1 , the hole 271 - 4 , the hole 271 - 6 , and the hole 271 - 9 are formed in a portion of the dielectric member 261 that is offset from a portion sandwiched by the electrodes 202 - 1 to 202 - 12 and the electrode 205 .

[0123] In this way, the electrodes 202-3, 202-7, and 202-11 are arranged to cover any one or two of the holes 271-1 to 271-9, respectively. That is, the electrodes 202-3, 202-7, and 202-11 are arranged on the cross section of the upper surface of the dielectric member 261 formed in the holes 271-2, 271-3, 271-5, 271-7, and 271-8 of the dielectric member 261 via the film 201.

[0124] Before use, a voltage of 100V to 15kV is applied to the touch sensing pad 251 to precharge the charge. When a voltage is applied between the electrodes 202-1 to 202-12 and the electrode 205 as precharge, charges are accumulated between the membrane 201 and the membrane 204, particularly in the holes 271-1 to 221-9 of the dielectric member 261 and the same holes as the holes 271-1 to 271-9. If the charge is precharged, the touch sensing pad 251 generates a larger voltage under a smaller force, pressure or vibration.

[0125] When force, pressure, or vibration is applied to a predetermined part or the whole, the tactile sensing pad 251 generates a voltage corresponding to the force, pressure, or vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined part or the whole, the tactile sensing pad 251 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0126] Since the tactile sensing pad 251 is mainly made of resin or silicone rubber, it can be easily deformed and fit the contact object 101 to detect the force, pressure or vibration generated by the movement of the contact object 101 or the force, pressure or vibration applied to the contact object 101 .

[0127] In the case where the ratio of the area of ​​the holes 271 - 1 to 271 - 9 and the holes identical to the holes 271 - 1 to 271 - 9 to the entire area of ​​the dielectric member 261 is 10% to 40%, the touch sensing pad 251 generates a greater voltage under a smaller force, pressure, or vibration.

[0128] In addition, although the holes 271-1 to 271-9 and the holes similar to the holes 271-1 to 271-9 are described as penetrating from the upper surface to the lower surface of the dielectric component 261, it is also possible that the holes do not penetrate from the upper surface to the lower surface of the dielectric component 261, but the holes may be recessed from the upper surface or the lower surface of the dielectric component 261, and further, the holes may be formed as bubble-shaped holes inside the dielectric component 261.

[0129] Hereinafter, when there is no need to distinguish the holes 271 - 1 to 271 - 9 respectively, they are simply referred to as the hole 271 .

[0130] In addition, in the material of the molded dielectric component 261, adding about 0.1 wt % to 30 wt % of graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 and other MOF (Metal Organic Frameworks) materials and other storage agents can assist in the storage of charges in the dielectric component 261.

[0131] In addition, 0.5 volume % to 50 volume % of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, or MOF material can be placed in the pores 271 to assist in the storage of charges.

[0132] In addition, when a storage agent such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 or other MOF materials is mixed in the dielectric component 261 and placed in the hole 271, the tactile sensing pad 251 can be used even without pre-charging the charge.

[0133] In addition, when the dielectric member 261 is molded, 0.1 wt % to 5 wt % of a foaming agent may be mixed to create bubbles inside and form the pores 271 in the dielectric member 261 .

[0134] Next, a detailed example of the configuration of the tactile sensing pad 301 constituting the tactile sensing pad group 21 will be described. The tactile sensing pad 301 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73 . Figure 8 is a cross-sectional view showing a cross section of the touch sensing pad 301. Figure 8 In, with Figure 6 The same parts as those shown are denoted by the same reference numerals, and description thereof will be omitted.

[0135] The tactile sensing pad 301 detects force, pressure, or vibration. For example, the tactile sensing pad 301 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0136] The touch sensing pad 301 includes a film 201, electrodes 202-1 to 202-12, a film 204, an electrode 205, and a dielectric member 311. The thickness of the touch sensing pad 301 is 0.2 mm or more and less than 0.5 mm.

[0137] In the surface of the dielectric member 311, Figure 8 The upper surface of the dielectric component 311 (hereinafter also referred to as the upper surface) is the other surface of the first surface adhesive film 201. Figure 8 The lower surface of the film 201 is attached to the other surface of the film 204 (hereinafter also referred to as the lower surface). That is, the film 201 and the film 204 are attached together in a manner of sandwiching the dielectric component 311. For example, the planar shape of the film 201, the planar shape of the dielectric component 311, and the planar shape of the film 204 are the same. For example, the planar shape of the film 201, the planar shape of the dielectric component 311, and the planar shape of the film 204 are rectangular. For example, the film 201, the dielectric component 311, and the film 204 are attached in a manner of overlapping when viewed from a top view.

[0138] The dielectric component 311 is formed into a thin plate shape by a soft material that is a dielectric and an insulator. For example, the dielectric component 311 is formed by a rubber such as silicone rubber, PDMS, fluororubber, acrylic rubber, or polyurethane rubber. The dielectric component 311 is formed with holes 321-1 to 321-4. The holes 321-1 to 321-4 penetrate from the upper surface to the lower surface of the dielectric component 311. Figure 8 The cross-sections of electrodes 202-3, 202-7 and 202-11 are shown, but holes similar to holes 321-1 to 321-4 are also formed in the portion of the dielectric component 311 between electrodes 202-1, 202-5, 202-9, 202-2, 202-6, 202-10, 202-4, 202-8 and 202-12 and electrode 205.

[0139] The electrode 205 is formed so as to overlap all of the electrodes 202 - 1 to 202 - 12 in the thickness direction of the film 201 , the dielectric member 311 , and the film 204 .

[0140] The holes 321-1 to 321-4 are formed in a cylindrical shape with a circular cross section so as to be circular on the upper surface and the lower surface of the dielectric member 311. The hole 321-1 is formed on the upper surface of the dielectric member 311. Figure 8 The hole 321-2 is formed between the portion sandwiched by the electrode 202-3 and the electrode 205 and the portion sandwiched by the electrode 202-7 and the electrode 205. The hole 321-3 is formed between the portion sandwiched by the electrode 202-7 and the electrode 205 and the portion sandwiched by the electrode 202-11 and the electrode 205. The hole 321-4 is formed between the portion sandwiched by the electrode 202-7 and the electrode 205 and the dielectric member 311. Figure 8 Between the end sides on the right side.

[0141] Thus, the electrodes 202-3, 202-7, and 202-11 are arranged with the electrode 205 so as to sandwich a portion of the dielectric member 311 that is offset from the portion where the holes 321-1 to 321-4 are formed. In other words, the electrodes 202-3, 202-7, and 202-11 are arranged with the electrode 205 so as to sandwich a portion of the dielectric member 311 where the holes 321-1 to 321-4 are not formed.

[0142] The holes 321 - 1 to 321 - 4 are formed in portions of the dielectric member 311 that are deviated from a portion sandwiched by the electrodes 202 - 1 to 202 - 12 and the electrode 205 .

[0143] Before use, a voltage of 100V to 15kV is applied to the touch sensing pad 301 to precharge the charge. When a voltage is applied between the electrodes 202-1 to 202-12 and the electrode 205 as precharge, charges are accumulated between the membranes 201 and 204, particularly in the holes 321-1 to 321-4 of the dielectric member 311 and the holes identical to the holes 321-1 to 321-4. If the charge is precharged, the touch sensing pad 301 generates a larger voltage under a smaller force, pressure, or vibration.

[0144] When force, pressure, or vibration is applied to a predetermined part or the whole, the tactile sensing pad 301 generates a voltage corresponding to the force, pressure, or vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined part or the whole, the tactile sensing pad 301 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0145] Since the tactile sensing pad 301 is mainly made of resin or silicone rubber, it can be easily deformed, fit the contact object 101 , and detect the force, pressure or vibration generated by the movement of the contact object 101 , or the force, pressure or vibration applied to the contact object 101 .

[0146] In the case where the ratio of the area of ​​the holes 321 - 1 to 321 - 4 and the holes identical to the holes 321 - 1 to 321 - 4 to the entire area of ​​the dielectric member 311 is 10% to 40%, the touch sensing pad 301 generates a greater voltage under a smaller force, pressure, or vibration.

[0147] In addition, although the holes 321-1 to 321-4 and the holes similar to the holes 321-1 to 321-4 are described as penetrating from the upper surface to the lower surface of the dielectric component 311, it is also possible that the holes do not penetrate from the upper surface to the lower surface of the dielectric component 311, but are recessed from the upper surface or the lower surface of the dielectric component 311, and further, the holes may be formed as bubble-shaped holes inside the dielectric component 311.

[0148] Hereinafter, when there is no need to distinguish the holes 321 - 1 to 321 - 4 respectively, they are simply referred to as holes 321 .

[0149] In addition, in the material of the molded dielectric component 311, adding about 0.1 wt% to 30 wt% of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 and other MOF (Metal Organic Frameworks) materials can assist in the storage of charges in the dielectric component 311.

[0150] In addition, 0.5 volume % to 50 volume % of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, or MOF material can be placed in the pores 321 to assist in the storage of charges.

[0151] In addition, when a storage agent such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 or other MOF materials is mixed in the dielectric component 311 and placed in the hole 321, the tactile sensing pad 301 can be used even without charging the electric charge in advance.

[0152] In addition, when the dielectric member 311 is molded, 0.1 wt % to 5 wt % of a foaming agent may be mixed to create bubbles inside and form the pores 321 in the dielectric member 311 .

[0153] Next, a detailed example of the configuration of the tactile sensing pad 351 constituting the tactile sensing pad group 21 will be described. The tactile sensing pad 351 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73 . Fig. 9 is a cross-sectional view showing a cross section of the touch sensing pad 351. Fig. 9 In, with Figure 6 The same parts as those shown are denoted by the same reference numerals, and description thereof will be omitted.

[0154] The tactile sensing pad 351 detects force, pressure, or vibration. For example, the tactile sensing pad 351 generates a signal of a voltage corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0155] The touch sensing pad 351 includes a film 201, electrodes 202-1 to 202-12, a dielectric member 203, a film 204, and electrodes 361-1 to 361-12. The thickness of the touch sensing pad 351 is 0.2 mm or more and less than 0.5 mm.

[0156] In addition, Fig. 9 2 shows cross sections of the electrodes 202-3, 202-7, and 202-11, and the electrodes 361-3, 361-7, and 361-7, but a hole 321-1 is formed in a portion of the dielectric member 311 between the electrode 202-1 and the electrode 361-1 (not shown), and a hole 321-2 is formed in a portion of the dielectric member 311 between the electrode 202-2 and the electrode 361-2 (not shown). Similarly, holes 321-2 are formed in a portion of the dielectric member 311 between the electrodes 202-4 to 202-6 and the electrodes 361- Holes 321-4 to 321-4 are formed in portions of the dielectric member 311 between electrodes 202-8 to 202-10 and electrodes 361-8 (not shown) to 361-10 (not shown), respectively. Holes 321-12 are formed in portions of the dielectric member 311 between electrodes 202-12 and 361-13 (not shown).

[0157] The electrodes 361-1 to 361-12 are formed into a film shape by a conductor. For example, the electrodes 361-1 to 361-12 are respectively formed of a film or a carbon nanotube (CNT) electrode film made of a metal material such as gold (Au), platinum (Pt), titanium (Ti) or aluminum (Al). The electrodes 361-1 to 361-12 are formed softly. The electrodes 361-1 to 361-12 are insulated from each other. For example, the electrodes 361-1 to 361-12 are respectively formed into a circular thin film on one surface of the film 204. For example, the electrodes 361-1 to 361-12 are respectively formed into a circle with a diameter of 1 mm. In each of the electrodes 361-1 to 361-12, a wiring portion and a terminal are respectively provided in the same manner as the electrodes 202-1 to 202-12.

[0158] The electrodes 361-1 to 361-12 are formed to face the electrodes 202-1 to 202-12, respectively. Each of the electrodes 361-1 to 361-12 is formed to sandwich the film 201, the dielectric member 203, and the film 204 with each of the electrodes 202-1 to 202-12. The electrode 361-1 is arranged at a position opposite to the electrode 202-1 with the film 201, the dielectric member 203, and the film 204 sandwiched therebetween. The electrode 361-2 is arranged at a position opposite to the electrode 202-2 with the film 201, the dielectric member 203, and the film 204 sandwiched therebetween. Similarly, the electrodes 361-3 to 361-12 are formed at positions opposite to the electrodes 202-3 to 202-12, respectively, with the film 201, the dielectric member 203, and the film 204 sandwiched therebetween.

[0159] In other words, the electrodes 361 - 1 to 361 - 12 are respectively formed at positions opposing the electrodes 202 - 1 to 202 - 12 in the thickness direction of the film 201 , the dielectric member 203 , and the film 204 .

[0160] The end of the lower surface of the dielectric member 203 of the hole 221-3 is consistent with the outer periphery of the electrode 361-3. The electrode 361-3 covers the end of the lower surface of the dielectric member 203 of the hole 221-3 on one surface of the film 204. In addition, the end of the lower surface of the dielectric member 203 of the hole 221-7 is consistent with the outer periphery of the electrode 361-7. The electrode 361-7 covers the end of the lower surface of the dielectric member 203 of the hole 221-7 on one surface of the film 204. In addition, the end of the lower surface of the dielectric member 203 of the hole 221-11 is consistent with the outer periphery of the electrode 361-11. The electrode 361-11 covers the end of the lower surface of the dielectric member 203 of the hole 221-11 on one surface of the film 204.

[0161] The ends of the lower surface of the dielectric member 203 of the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12 are respectively aligned with the outer peripheries of the electrodes 361-1 and 361-2, the electrodes 361-4 to 361-6, the electrodes 361-8 to 361-10, and the electrode 361-12. The electrodes 361-1 and 361-2, the electrodes 361-4 to 361-6, the electrodes 361-8 to 361-10, and the electrode 361-12 cover the ends of the lower surface of the dielectric member 203 of the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12 on one surface of the film 204.

[0162] In this way, the electrodes 202-1 to 202-12 and the electrodes 361-1 to 361-12 are arranged so as to sandwich the films 201 and 204 and the portions of the dielectric member 203 where the holes 221-1 and 221-12 are formed.

[0163] Before use, a voltage of 100V to 15kV is applied to the touch sensing pad 351 to precharge the charge. When a voltage is applied between the electrodes 202-1 to 202-12 and the electrodes 361-1 to 361-12 as precharge, charges are accumulated between the membranes 201 and 204, particularly in the holes 221-1 to 221-12 of the dielectric member 203. If the charge is precharged, the touch sensing pad 351 generates a larger voltage under a smaller force, pressure, or vibration.

[0164] When force, pressure or vibration is applied to a predetermined part or the whole, the tactile sensing pad 351 generates a voltage corresponding to the force, pressure or vibration between all or any number of electrodes between the electrode 202-1 and the electrode 361-1 and between the electrode 202-12 and the electrode 361-12. For example, when force, pressure or vibration is applied to a predetermined part or the whole, the tactile sensing pad 351 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure or the amplitude of the vibration between all or any number of electrodes between the electrode 202-1 and the electrode 361-1 and between the electrode 202-12 and the electrode 361-12.

[0165] Since the tactile sensing pad 351 is mainly made of resin or silicone rubber, it can be easily deformed and fit the contact object 101 to detect the force, pressure or vibration generated by the movement of the contact object 101 or the force, pressure or vibration applied to the contact object 101 .

[0166] In the case where the ratio of the area of ​​the holes 221 - 1 to 221 - 12 to the entire area of ​​the dielectric member 203 is 10% to 40%, the touch sensing pad 351 generates a greater voltage under a smaller force, pressure, or vibration.

[0167] Hereinafter, when there is no need to distinguish the electrodes 361 - 1 to 361 - 12 respectively, they are simply referred to as the electrode 361 .

[0168] In addition, when a storage agent such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 or other MOF materials is mixed in the dielectric component 203 and placed in the hole 221, the tactile sensing pad 351 can be used without charging the electric charge in advance.

[0169] Next, a detailed example of the configuration of the tactile sensing pad 401 constituting the tactile sensing pad group 21 will be described. The tactile sensing pad 401 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73 . Fig.10 4 is a cross-sectional view showing a cross section of the touch sensing pad 401. Fig.10 In, with Figure 6 The same parts as those shown are denoted by the same reference numerals, and description thereof will be omitted.

[0170] The tactile sensing pad 401 detects force, pressure, or vibration. For example, the tactile sensing pad 401 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0171] The tactile sensing pad 401 is composed of a film 201, electrodes 202-1 to 202-12, a dielectric member 203, a film 204, an electrode 205, and springs 411-1 and 411-2. The thickness of the tactile generating pad 411 is greater than 0.2 mm and less than 0.5 mm. The springs 411-1 and 411-2 are formed of a spring material and have a U-shaped cross section. The spring 411-1 clamps and presses the film 201, the dielectric member 203, and the film 204 with a force of 10 mN to 0.5 N. Fig.10 The spring 411-2 is at the left end with a force of 10mN-0.5N. Fig.10 The film 201, the dielectric member 203 and the film 204 are clamped and pressed in the direction indicated by F in FIG. Fig.10 If the spring 411 - 1 and the spring 411 - 2 sandwich the opposite ends of the film 201 , the dielectric member 203 , and the film 204 , a preload can be uniformly applied to the entirety of the film 201 , the dielectric member 203 , and the film 204 .

[0172] In this way, the spring 411-1 and the spring 411-2 clamp and press the end portions of the film 201, the dielectric member 203, and the film 204. Thus, a larger voltage can be generated with a smaller force, pressure, or vibration.

[0173] In addition, the spring 411-1 and the spring 411-2 can be formed of metal material or resin. In addition, the spring 411-1 and the spring 411-2 are described as clamping the opposite ends of the film 201, the dielectric component 203 and the film 204, but it is not limited to this, and a structure that can clamp and press can be adopted, such as a bolt and a nut, a screw, a clamp, etc.

[0174] Before use, a voltage of 100V to 15kV is applied to the touch sensing pad 401 to precharge the charge. When a voltage is applied between the electrodes 202-1 to 202-12 and the electrode 205 as precharge, charges are accumulated between the membranes 201 and 204, particularly in the holes 221-1 to 221-12 of the dielectric member 203. When the charge is precharged, the touch sensing pad 401 generates a larger voltage under a smaller force, pressure, or vibration.

[0175] When force, pressure, or vibration is applied to a predetermined part or the whole, the tactile sensing pad 401 generates a voltage corresponding to the force, pressure, or vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined part or the whole, the tactile sensing pad 401 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0176] Since the tactile sensing pad 401 is mainly made of resin or silicone rubber, it can be easily deformed and fit the contact object 101 to detect the force, pressure or vibration generated by the movement of the contact object 101 or the force, pressure or vibration applied to the contact object 101 .

[0177] In the case where the ratio of the area of ​​the holes 221 - 1 to 221 - 12 to the entire area of ​​the dielectric member 203 is 10% to 40%, the touch sensing pad 401 generates a greater voltage under a smaller force, pressure, or vibration.

[0178] In addition, when a storage agent such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67 or other MOF materials is mixed in the dielectric component 203 and placed in the hole 221, the tactile sensing pad 401 can be used even without charging the electric charge in advance.

[0179] Next, a usage example of the tactile sensing pad 73 as a sensor worn on a fingertip will be described. Fig.11 1 is a diagram showing a state of the tactile sensing pad 73 worn on the fingertips. The tactile sensing pad 73 is attached to the finger 501 via the fixing belt 511 in such a manner that the surface on the electrode 205 side contacts the fingertips of the finger 501 and the surfaces on the electrodes 202-1 to 202-12 side contact the contact object 101. Alternatively, the tactile sensing pad 73 may be attached to the finger 501 in such a manner that the surfaces on the electrodes 202-1 to 202-12 side contact the fingertips of the finger 501 and the surface on the electrode 205 side contact the contact object 101.

[0180] For example, the tactile sensor pad 73 as a device worn on the fingertips is set to be substantially the same size as the finger 501 , and its thickness is set to be greater than 0.2 mm and less than 0.5 mm. The tactile sensor pad 73 is thin and flexible, and thus fits the shape of the finger 501 .

[0181] The tactile sensing pad 73 is pressed toward the contact object 101 by the finger 501. When force, pressure, or vibration is applied to a predetermined part or the whole, a voltage corresponding to the force, pressure, or vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205. In this way, the tactile sensing pad 73 can detect the force, pressure, or vibration applied to the contact object 101.

[0182] In this way, the touch sensing pad 73 can be used alone as a sensor.

[0183] Alternatively, potassium may be doped into thin flat glass to charge the dielectric member 203, dielectric member 261, or dielectric member 311, and film 201 and film 204. Alternatively, potassium may be doped into silica beads of 0.01 mm to 0.05 mm, and the silica beads may be mixed with silicone rubber to charge the dielectric member 203, dielectric member 261, or dielectric member 311.

[0184] In addition, it is described that the hole 221, the hole 271 or the hole 321 is formed into a cylindrical shape with a circular cross-section, but it is not limited to this. It can also be an elliptical cylinder, an oblong cylinder, a triangular prism, a quadrangular prism or other polyhedral prism or any other shape, and the cross-sectional shape can also change in the thickness direction of the dielectric component 203, the dielectric component 261 or the dielectric component 311.

[0185] Thus, by making it thinner and softer, it is possible to detect force, pressure or vibration with higher sensitivity. In addition, in a wearable device, it is possible to detect force, pressure or vibration with higher sensitivity.

[0186] For example, it is possible to detect the force, pressure or vibration of the shape and vibration mode of an object such as vibration, impact feeling, force pressure, edge or bump shape, and generate a voltage corresponding thereto.

[0187] In this way, the tactile sensing pad group 21 uses one or more tactile sensing pads 73, tactile sensing pads 251, tactile sensing pads 301, tactile sensing pads 351 or tactile sensing pads 401, and the tactile sensing pads 73, tactile sensing pads 251, tactile sensing pads 301, tactile sensing pads 351 or tactile sensing pads 401 are respectively composed of piezoelectric films or fluorine films and silicone rubber, etc., and electrodes of a predetermined pattern for outputting a voltage corresponding to an applied force, pressure or vibration are formed on the piezoelectric film or fluorine film, and voltage is output independently from each electrode. In order to have piezoelectricity, in the tactile sensing pads 73, tactile sensing pads 251, tactile sensing pads 301, tactile sensing pads 351 or tactile sensing pads 401, a voltage is charged between the piezoelectric film or fluorine film to maintain static electricity, and a voltage of a bias frequency is added thereto to generate a voltage corresponding to an applied force, pressure or vibration.

[0188] As described above, the tactile sensing pad 73 is a sensor. When a force, pressure or vibration is applied, the film 201 generates a voltage. A plurality of electrodes 202 are provided in a film shape on one surface of the film 201. The plurality of electrodes 202 are provided separately from each other at predetermined intervals. When a force, pressure or vibration is applied, the film 204 generates a voltage. The electrode 205 is provided in a film shape on one surface of the film 204. The dielectric component 203 is formed into a thin plate shape with holes formed therein by dielectric rubber. The dielectric component 203 is attached to the other surface of the film 201 on the first surface as a predetermined surface, and to the other surface of the film 204 on the second surface opposite to the first surface. A storage agent for accumulating auxiliary charges is placed in the holes 221-1 to 221-12 formed in the dielectric component 203. The tactile sensing pad 73 generates a voltage corresponding to the force, pressure or vibration applied to part or the whole between any one or all of the electrodes 202 and the electrode 205.

[0189] The interval between the plurality of electrodes 202 provided on one surface of the film 201 can be made smaller than the two-point discrimination threshold of the human contact object 101 .

[0190] A predetermined voltage can be applied to the dielectric member 203 to precharge the electric charge.

[0191] The hole formed in the dielectric member 203 can be made to penetrate from the first surface to the second surface.

[0192] Any electrodes among the plurality of electrodes 202 and the electrode 205 can be arranged so as to sandwich the film 201 and the film 204 and to sandwich the portion of the dielectric member 203 where the hole is formed.

[0193] The cross-sectional shape of the first surface of the hole formed in the dielectric member 203 can be made the same as the shape of the surface of the film-shaped electrode 202 .

[0194] The electrode 202 can be arranged on the cross section of the first surface, which is the cross section of the hole formed in the dielectric member 203 , with the film 201 interposed therebetween.

[0195] Any of the plurality of electrodes 202 and the electrode 205 may be arranged so as to sandwich the film 201 and the film 204 and a portion of the dielectric member 311 that is offset from the portion where the hole is formed.

[0196] A spring 411 - 1 and a spring 411 - 2 may be provided to sandwich and press the end portions of the film 201 , the film 204 , and the dielectric member 203 .

[0197] A plurality of electrodes 361 may be provided, and the plurality of electrodes 361 may be provided at positions respectively facing the plurality of electrodes 202 .

[0198] When detecting the shape or texture of the surface of the contact object 101 or the force of contact with the contact object 101 , an air actuator 72 can also be provided to displace the membrane 201 , the electrode 202 , the membrane 204 , and the electrode 205 with the dielectric component 203 and press the contact object 101 .

[0199] The air actuator 72 can displace the membrane 201 , the electrode 202 , the membrane 204 , the electrode 205 , and the dielectric member 203 and press them against the contact object 101 by the pressure of gas or liquid.

[0200] The cam 122 as a pressing mechanism can displace the film 201 , the electrode 202 , the film 204 , the electrode 205 , and the dielectric member 203 to press against the contact object 101 .

[0201] As the pressing unit, the film 201 , the electrode 202 , the film 204 , the electrode 205 , and the dielectric member 203 can be displaced and pressed against the contact object 101 by pulling the lead wire 152 via the pulley 153 .

[0202] In addition, the embodiment of the present invention is not limited to the above-mentioned embodiment, and various changes can be made without departing from the scope of the present invention.

[0203] Explanation of symbols

[0204] 11: tactile sensing system; 21: tactile sensing pad group; 22: robot system; 41: tactile / pressure driven information computing system; 42: virtual reality computer system / remote robot manipulation system; 43: image processing system; 71, 71-1 to 71-4: tactile sensing unit; 72, 72-1 to 72-4: air actuator; 73, 73-1 to 73-4: tactile sensing pad; 101: contact object; 121, 121-1 to 121-4: tactile sensing unit; 122, 122-1 to 122-4: cam; 123 and 123-1 to 123-4: motor; 151 and 151-1 to 151-4: tactile sensing unit; 152 and 152-1 to 152-4: line; 153, 153- 1 to 153-4, 154 and 154-1 to 154-4: pulleys; 155 and 155-1 to 155-4: motors; 201: membrane; 202, 202-1 to 202-12: electrodes; 203: dielectric member; 204: membrane; 205: electrode; 221, 221-1 to 221-12: holes; 251: tactile sensing pad; 261: dielectric member; 271, 271-1 to 271-9: holes; 301: tactile sensing pad; 311: dielectric member; 321, 321-1 to 321-4: holes; 351: tactile sensing pad; 361, 361-1 to 361-12: electrodes; 401: tactile sensing pad; 411-1 and 411-2: springs; 501: finger; 511: fixing belt

Claims

1. A sensor, comprising: The first membrane generates a voltage when force, pressure or vibration is applied; A plurality of first film-shaped electrodes are provided on one surface of the first film at predetermined intervals from each other; a second membrane that generates a voltage when force, pressure, or vibration is applied; a film-shaped second electrode disposed on one surface of the second film; and A dielectric member is formed of dielectric rubber into a thin plate with holes, the other side of the first film is attached to the first side as the predetermined side, and the other side of the second film is attached to the second side opposite to the first side; wherein a storage agent for assisting the accumulation of electric charges is placed in the holes formed in the dielectric member; A voltage corresponding to a force, pressure or vibration applied partially or entirely is generated between the second electrode and any one or all of the first electrodes.

2. The sensor according to claim 1, wherein: The interval between the plurality of first electrodes provided on one surface of the first film is set to be smaller than a two-point discrimination threshold of the skin of a human body.

3. The sensor according to claim 1, wherein: A predetermined voltage is applied to the dielectric member to pre-charge the dielectric member.

4. The sensor according to claim 1, wherein: The hole formed in the dielectric member penetrates from the first surface to the second surface.

5. The sensor according to claim 1, wherein: Any one of the plurality of first electrodes and the second electrode are arranged to sandwich the first film and the second film and to sandwich a portion of the dielectric member in which the hole is formed.

6. The sensor according to claim 5, wherein: The shape of the cross section of the hole formed in the dielectric member on the first surface is set to be the same as the shape of the surface of the film-shaped first electrode.

7. The sensor according to claim 6, wherein: The first electrode is arranged on a cross section of the first surface that is a cross section of a hole formed in the dielectric member, with the first film interposed therebetween.

8. The sensor according to claim 1, wherein: Any one of the plurality of first electrodes and the second electrode are arranged to sandwich the first film and the second film and to sandwich a portion of the dielectric member that is away from the portion where the hole is formed.

9. The sensor according to claim 1, wherein: The sensor further includes a pressing unit that clamps and presses the first film, the second film, and an end portion of the dielectric member.

10. The sensor according to claim 1, wherein: The sensor is provided with a plurality of the second electrodes, The plurality of second electrodes are respectively arranged at positions opposite to the plurality of first electrodes.

11. The sensor according to claim 1, wherein: The sensor further includes a pressing unit which displaces the first film, the first electrode, the second film, the second electrode, and the dielectric member and presses them toward the object when detecting a shape or texture of a surface of the object or a force of an object contacting the object.

12. The sensor according to claim 11, wherein: The pressing unit displaces the first film, the first electrode, the second film, the second electrode, and the dielectric member using pressure of gas or liquid and presses them toward the object.

13. The sensor according to claim 11, wherein: The pressing unit displaces the first film, the first electrode, the second film, the second electrode, and the dielectric member using a cam and presses them toward the object.

14. The sensor according to claim 11, wherein: The pressing unit displaces the first film, the first electrode, the second film, the second electrode, and the dielectric member by pulling with a wire via a pulley and presses them toward the object.

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