Rotary lifting workbench

Abstract

The invention provides a rotary lifting workbench, and relates to the field of semiconductor test equipment. According to the rotary lifting workbench, the rotating mechanism, the lifting mechanism and the detection mechanism are assembled into a whole through the base; the first moving assembly can be driven to move through the first driving assembly, then the stirring piece can be driven to rotate, the stirring piece is fixedly connected with the rotary table, and in other words, the rotation of the stirring piece can drive the rotary table to rotate synchronously; according to the workbench, the second moving assembly can be driven to ascend and descend relative to the rotary table through the second driving assembly, in this way, the rotating action and the ascending and descending action of the workbench can be achieved through the simple and compact structure, the assembling and maintaining cost of the workbench is effectively reduced, and the size and the weight of the workbench are effectively reduced. In addition, the top end of the second moving assembly is provided with a placing table, and the placing table can be stably connected with a slide holder (on which a semiconductor is placed). And the detection mechanism can be used for measuring the positions of the working table after the rotating action and the lifting action.

Description

Technical Field

[0001] The present application relates to the field of semiconductor testing equipment, and in particular to a rotary lifting workbench. Background Art

[0002] With the advancement of science and technology and the continuous development of society, semiconductor testing equipment is developing towards high efficiency, precision and intelligence. Semiconductors need to complete vertical and rotational movements during testing and other process processing. The vertical movement can achieve contact and separation between the wafer and the test probe to achieve wafer testing; the rotational movement can achieve the scanning of semiconductor devices before the testing process to meet the needs of testing and other process processing.

[0003] However, in the existing rotary lifting workbench, in order to ensure the accuracy of transmission, a relatively complex transmission structure is usually adopted, which will lead to a high assembly and maintenance cost, and will make the volume and weight of the workbench larger. Summary of the invention

[0004] In view of this, the purpose of the present application is to provide a rotary lifting worktable to solve the problems of the existing rotary lifting worktable having a complex structure and large weight and volume.

[0005] According to the above purpose, the present invention provides a rotary lifting worktable, wherein the rotary lifting worktable comprises:

[0006] Pedestal;

[0007] The rotating mechanism is provided with a turntable rotatably connected to the base, a first driving assembly, a first moving assembly and a toggle member, wherein both ends of the toggle member are respectively connected to the turntable and the first moving assembly; the first driving assembly can drive the first moving assembly to move, so as to drive the toggle member and the turntable to rotate synchronously;

[0008] a lifting mechanism connected to the turntable; the lifting mechanism is provided with a second driving assembly and a second moving assembly, the second driving assembly can drive the second moving assembly to rise and fall relative to the turntable, and a placement platform is formed at the top of the second moving assembly; and

[0009] Testing agency.

[0010] Preferably, a step hole is formed inside the base, and along the axial direction of the step hole, the step hole forms a first section, a second section and a third section connected in sequence, and the inner diameters of the first section, the second section and the third section decrease in sequence; the first section and the third section respectively pass through the top end and the bottom end of the base.

[0011] Preferably, the second section is provided with a cross roller shaft ring, the third section is provided with an inner pressure ring, and the inner pressure ring is connected to the bottom end of the cross roller shaft ring and the bottom end of the turntable; the first section is provided with an outer pressure ring, and the outer pressure ring is connected to the top end of the cross roller shaft ring; the turntable is arranged at the inner wall of the cross roller shaft ring and extends to the outside of the base through the step hole.

[0012] Preferably, a cavity is formed inside the base, the cavity is located at a side of the step hole, and the first moving assembly and the toggle member are both located inside the cavity.

[0013] Preferably, the first drive assembly includes a first drive motor connected to the outer side wall of the base, the drive shaft of the first drive motor extends into the cavity and is connected to the first end of the first lead screw through a coupling; the first end of the first lead screw is also provided with a first limit portion.

[0014] Preferably, the first moving assembly includes a first slide rail disposed at the bottom of the cavity, and the extension direction of the first slide rail is the same as the extension direction of the first lead screw; the first moving assembly also includes a first connecting seat and a second connecting seat correspondingly connected to the first slide rail in a sliding manner; the second connecting seat is threadedly connected to the first lead screw via a first nut;

[0015] The driving shaft drives the first lead screw to rotate synchronously, so that the first connecting seat and the second connecting seat move synchronously along the first slide rail.

[0016] Preferably, the first connecting seat and the second connecting seat are connected by bolts, the extending direction of the bolts is the same as the extending direction of the first lead screw, the outer side of the bolts is sleeved with a spring and the spring abuts against the outer side wall of the first connecting seat;

[0017] A first cam guide and a second cam guide are respectively disposed on the top of the first connecting seat and the second connecting seat, and the first end of the toggle member is located between the first cam guide and the second cam guide; the compression amount of the spring can be correspondingly adjusted by adjusting the screwing degree of the bolt, so that the toggle member always keeps in contact with the first cam guide and the second cam guide;

[0018] The second end of the toggle member is fixedly connected to the turntable, and when the first connecting seat and the second connecting seat move, the toggle member and the turntable can be driven to rotate synchronously.

[0019] Preferably, the second drive assembly includes a second drive motor and a second lead screw, and the second drive motor and the second lead screw are connected via a synchronous pulley set; an extension direction of the second lead screw is the same as an axial direction of the step hole.

[0020] Preferably, the turntable is formed with a connecting hole and the connecting hole passes through the top of the turntable, the second moving assembly includes a second slide rail arranged at the inner wall of the connecting hole, and the second slide rail extends along the axial direction of the connecting hole; the second moving assembly also includes a lifting platform slidably connected to the second slide rail, and the lifting platform is threadedly connected to the second lead screw via a second nut;

[0021] The placing platform is arranged at the top of the lifting platform.

[0022] Preferably, the detection mechanism includes multiple gratings and multiple reading heads.

[0023] According to the rotary lifting workbench of the present invention, the rotating mechanism, the lifting mechanism and the detection mechanism are assembled in one body through the base; the first driving component can drive the first moving component to move, and then can drive the toggle member to rotate, and the toggle member is fixedly connected to the turntable, that is, the rotation of the toggle member can drive the turntable to rotate synchronously; the second driving component can drive the second moving component to rise and fall relative to the turntable, so that the rotation and lifting actions of the workbench can be realized through a relatively simple and compact structure, which effectively reduces the assembly and maintenance costs of the workbench, and effectively reduces the volume and weight of the workbench.

[0024] In addition, a placement table is provided at the top of the second moving component, which can stably connect the wafer carrier (with the semiconductor placed thereon). The position of the worktable after the rotation and lifting actions can be measured by the detection mechanism.

[0025] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 is a schematic diagram of a rotary lifting workbench according to an embodiment of the present invention;

[0028] Figure 2is another schematic diagram of a rotary lifting workbench according to an embodiment of the present invention;

[0029] Figure 3 is a cross-sectional view of a rotary lifting workbench according to an embodiment of the present invention;

[0030] Figure 4 is a partial schematic diagram of a rotary lifting workbench according to an embodiment of the present invention;

[0031] Figure 5 is another cross-sectional view of the rotary lifting workbench according to an embodiment of the present invention;

[0032] Figure 6 is another cross-sectional view of the rotary lifting workbench according to an embodiment of the present invention;

[0033] Figure 7 It is a schematic diagram of the assembly part of the base and the turntable according to an embodiment of the present invention.

[0034] Icons: 1-base; 200-first drive motor; 201-coupling; 202-first locking nut; 203-first sleeve ring; 204-first bearing cover; 205-first bearing; 206-screw seat; 207-first screw; 208-first screw nut; 210-turntable; 211-shifter; 212-inner pressure ring; 213-outer pressure ring; 214-cross roller shaft ring; 22-support seat; 230-first slide rail; 231-first connecting seat; 232-second connecting seat; 233-first cam guide; 234 -second cam guide; 235-bolt; 236-spring; 300-second drive motor; 301-first pulley; 302-second pulley; 303-transmission belt; 304-second limiting part; 305-second lead screw; 306-second nut; 310-second slide rail; 311-slider; 312-lifting platform; 313-fixed seat; 314-placing table; 40-rotating grating; 41-first reading head fixed seat; 42-rotating reading head; 43-lifting grating; 44-second reading head fixed seat; 45-lifting reading head. DETAILED DESCRIPTION

[0035] The following specific embodiments are provided to help the reader obtain a comprehensive understanding of the methods, devices and / or systems described herein. However, after understanding the disclosure of the present application, various changes, modifications and equivalents of the methods, devices and / or systems described herein will be apparent. For example, the order of operations described herein is merely an example, and is not limited to the order set forth herein, but in addition to the operations that must occur in a particular order, changes that will be apparent after understanding the disclosure of the present application may be made. In addition, in order to improve clarity and brevity, descriptions of features known in the art may be omitted.

[0036] The features described herein may be implemented in different forms and should not be interpreted as being limited to the examples described herein. Rather, the examples described herein have been provided only to illustrate some of the many possible ways of implementing the methods, devices and / or systems described herein that will be apparent after understanding the disclosure of the present application.

[0037] Throughout the specification, when an element (such as a layer, a region, or a substrate) is described as being “on”, “connected to”, “bound to”, “over”, or “covering” another element, it may be directly “on”, “connected to”, “bound to”, “over”, or “covering” another element, or one or more other elements may be present between them. In contrast, when an element is described as being “directly on”, “directly connected to”, “directly bound to”, “directly over”, or “directly covering” another element, there may be no other elements present between them.

[0038] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or more items.

[0039] Although terms such as "first," "second," and "third" may be used herein to describe various members, components, regions, layers, or portions, these members, components, regions, layers, or portions are not limited by these terms. Rather, these terms are only used to distinguish one member, component, region, layer, or portion from another member, component, region, layer, or portion. Therefore, without departing from the teachings of the examples described herein, the first member, component, region, layer, or portion referred to may also be referred to as the second member, component, region, layer, or portion.

[0040] For ease of description, spatial relational terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another element as shown in the accompanying drawings. Such spatial relational terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, an element described as being "above" or "upper" relative to another element will subsequently be "below" or "lower" relative to the other element. Therefore, the term "above" includes both "above" and "below" orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relational terms used herein will be interpreted accordingly.

[0041] The terms used herein are only used to describe various examples and are not used to limit the present disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms "include", "comprise" and "have" list the stated features, quantities, operations, components, elements and / or their combinations that exist, but do not exclude the existence or addition of one or more other features, quantities, operations, components, elements and / or their combinations.

[0042] Variations in the shapes shown in the drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the drawings but include variations in shapes that occur during manufacturing.

[0043] The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application.

[0044] The present invention provides a rotary lifting worktable, such as Figures 1 to 6 As shown, the rotary lifting workbench in this embodiment includes a base 1, a rotating mechanism, a lifting mechanism and a detection mechanism, which are integrated into one body through the base 1, and can realize the rotation and lifting of the wafer stage (on which the semiconductor device to be detected is placed). In the following, the specific connection relationship and position relationship of the above-mentioned various mechanisms of the rotary lifting workbench according to the present invention will be described in detail.

[0045] In this embodiment, the base 1 can play the role of supporting and connecting the following mechanisms, and its structure, size, etc. are not specifically limited. For example, the base 1 in this embodiment is formed into a rectangular parallelepiped structure with steps (such as Figure 1 As shown). Furthermore, since the components in the following mechanisms are all assembled inside the base 1, the base 1 is formed into a split structure, that is, a cover plate with detachable threads is formed, so as to facilitate maintenance and replacement of the components arranged inside the base 1.

[0046] In this embodiment, if Figure 1 and Figure 6 As shown, the rotating mechanism is provided with a turntable 210 rotatably connected to the base 1. Specifically, as Figures 5 to 7As shown, a stepped hole is formed inside the base 1, and along the axial direction of the stepped hole, the stepped hole is formed with a first section, a second section and a third section connected in sequence, and the inner diameters of the first section, the second section and the third section decrease in sequence; in addition, the first section and the third section respectively penetrate the top and bottom ends of the base 1, and the second section is formed into a stepped structure. Furthermore, the second section is provided with a cross roller shaft ring 214, and the third section is provided with an inner pressure ring 212, and the inner pressure ring 212 is connected to the bottom end of the cross roller shaft ring 214 and the bottom end of the turntable 210 (essentially abutted), and the inner pressure ring 212 can prevent the axial movement of the inner ring of the cross roller shaft ring 214; the first section is provided with an outer pressure ring 213, and the outer pressure ring 213 is connected to the step surface of the first section by bolts, so that the outer pressure ring 213 is connected to the top end of the cross roller shaft ring 214 (essentially abutted), so that the outer pressure ring 213 can prevent the axial movement of the outer ring of the cross roller shaft ring 214.

[0047] In this way, the outer pressure ring 213 and the inner pressure ring 212 can further improve the assembly stability of the cross roller shaft ring 214, thereby ensuring the steering accuracy of the turntable 210. There is no specific limitation on the connection method between the three and the step hole, for example, a stable connection can be achieved by screws, bonding, welding, etc.

[0048] In addition, the turntable 210 is arranged on the inner wall of the cross roller collar 214 and extends to the outside of the base 1 through the step hole, that is, the cross roller collar 214 is correspondingly sleeved on the outer side of the turntable 210. There is no specific limitation on the specific size and shape of the turntable 210, as long as it can be driven (compared to the base 1) to rotate stably.

[0049] More specifically, the rotation of the turntable 210 is achieved by the first driving assembly, the first moving assembly and the toggle member 211. Figures 3 to 5 As shown, a cavity is formed inside the base 1 and the cavity is located at the side of the above-mentioned step hole, and the first moving assembly and the toggle member 211 are both located inside the cavity. In this embodiment, the first driving assembly includes a first driving motor 200 connected to the outer wall of the base 1, and the driving shaft of the first driving motor 200 (through a through hole connected to the cavity) extends into the cavity and is connected to the first end of the first lead screw 207 through a coupling 201; further, the first end of the first lead screw 207 is also provided with a first limiting portion, which can axially limit the first lead screw 207 to ensure that the first lead screw 207 rotates stably and accurately and prevents its axial movement.

[0050] like Figure 4As shown, the first limiting part includes a screw seat 206, which is fixed to the top of the support seat 22 fixedly connected to the bottom of the cavity; the screw seat 206 is formed with a stepped limiting hole, in which a first bearing 205 is arranged, and the first end of the first screw 207 passes through the inner ring of the first bearing 205, so that the first screw 207 can rotate relative to the screw seat 206. Further, the first limiting part also includes a first sleeve ring 203 and a first locking nut 202, which are sequentially sleeved on the first end of the first screw 207 and the first sleeve ring 203 abuts against the inner ring end face of the first bearing 205; further, the outer side of the first sleeve ring 203 is sleeved with a first bearing cover 204, and the first bearing cover 204 is fixed to the screw seat 206 by screws, and abuts against the outer ring end face of the first bearing 205 and forms a gap with the first sleeve ring 203. In this way, under the action of the first limiting portion, the axial movement of the first lead screw 207 is effectively avoided, and when the first lead screw 207 rotates, the first collar 203 and the first locking nut 202 rotate synchronously with the first lead screw 207 .

[0051] In addition, the first moving assembly is connected to the first lead screw 207 so that the first driving assembly drives the first moving assembly to move. Figure 4 As shown, the first moving assembly includes a first slide rail 230 disposed on the top of the support seat 22, and the extension direction of the first slide rail 230 is the same as the extension direction of the first lead screw 207; in addition, the first moving assembly also includes a first connecting seat 231 and a second connecting seat 232 that are slidably connected to the first slide rail 230; the second connecting seat 232 is threadedly connected to the first lead screw 207 via a first nut 208 (i.e., the first nut 208 is threadedly connected to the first lead screw 207, and the second connecting seat 232 is fixedly connected to the first nut 208 via a screw). Further, the first connecting seat 231 and the second connecting seat 232 are connected via a bolt 235, so that when the first driving motor 200 drives the first lead screw 207 to rotate, the first nut 208 drives the second connecting seat 232 and the first connecting seat 231 to move synchronously along the first slide rail 230.

[0052] In this embodiment, the bolt 235 is inserted into the first connection seat 231 and the second connection seat 232 in sequence (through the corresponding through holes and threaded holes formed at the first connection seat 231 and the second connection seat 232 respectively) from the end surface of the first connection seat 231 close to the first limiting portion, so as to firmly connect the first connection seat 231 and the second connection seat 232, and the extension direction of the bolt 235 is the same as the extension direction of the first lead screw 207. In addition, a spring 236 is sleeved on the outer side of the bolt 235 and the spring 236 abuts against the outer side wall of the first connection seat 231. Figure 3As shown, the tops of the first connection seat 231 and the second connection seat 232 are also provided with the first cam guide 233 and the second cam guide 234, respectively. The first end of the above-mentioned toggle member 211 is located between the first cam guide 233 and the second cam guide 234, and the second end of the toggle member 211 is fixedly connected to the turntable 210 by a screw. In this way, when the first connection seat 231 and the second connection seat 232 drive the first cam guide 233 and the second cam guide 234 to move synchronously, the toggle member 211 and the turntable 210 can rotate synchronously. In order to ensure the accuracy of the rotation of the turntable 210 to ensure the detection effect of the semiconductor, the toggle member 211 should always maintain a state of abutting with the first cam guide 233 and the second cam guide 234, that is, the toggle member 211 should always be clamped to ensure stable force, and this technical effect can be achieved by screwing the bolt 235 to adjust the compression amount of the spring 236.

[0053] It should be noted that there is no specific limit to the height of the support seat 22, and it should be determined comprehensively according to the actual situation, such as the structure of the turntable 210, as long as it can facilitate the stable connection between the toggle member 211 and the turntable 210. In addition, there is no specific limit to the shape of the toggle member 211, for example, it can be formed into an L-shaped structure or a rectangular parallelepiped structure. In addition, the thread length of the second lead screw 305 should be determined according to the actual situation, such as the rotation angle range of the turntable 210.

[0054] In this embodiment, if Figures 5 and 6 As shown, the lifting mechanism is connected to the turntable 210, and the lifting mechanism is provided with a second driving component and a second moving component, and the second driving component can drive the second moving component to rise and fall relative to the turntable 210. Specifically, as Figures 5 and 6 As shown, the second drive assembly includes a second drive motor 300 and a second lead screw 305. The second drive motor 300 is fixedly connected to the turntable 210 through a connecting plate and screws, that is, the lifting mechanism can rotate synchronously with the turntable 210. In order to avoid interference between the second drive motor 300 and the base 1, the base 1 is provided with corresponding grooves according to the rotation angle range of the turntable 210 (such as Figure 1 As shown). The driving shaft of the second driving motor 300 extends to the inside of the base 1, and its driving shaft is connected to the second lead screw 305 through a synchronous pulley set (the synchronous pulley set includes a first pulley 301 and a second pulley 302 sleeved on the driving shaft of the second driving motor 300 and the outer side of the second lead screw 305, and the outer side walls of the first pulley 301 and the second pulley 302 are connected by a transmission belt 303). In this way, the second driving motor 300 can transmit power to the second lead screw 305 to drive the second lead screw 305 to rotate synchronously. The use of the synchronous pulley set as described above can accurately transmit power and meet the needs of high load and high-speed movement.

[0055] In this embodiment, the extension direction of the second lead screw 305 is the same as the axial direction of the step hole, and its first end extends to the outside of the turntable 210; similar to the above-mentioned first lead screw 207, the second end of the second lead screw 305 is provided with a second limiting portion 304, and the second limiting portion 304 includes a second bearing, a second bearing cover, a second ring and a second locking nut, so that the axial movement of the second lead screw 305 can be avoided by the second limiting portion 304.

[0056] In addition, if Figure 5 As shown, the turntable 210 is formed with a connecting hole and the connecting hole passes through the top of the turntable 210, and the second movable component is arranged at the "innermost" part of the platform through the connecting hole, so as to reduce the influence of the weight load on the rotation and lifting accuracy. The second movable component includes a second slide rail 310 (through a connecting groove) arranged at the inner wall of the connecting hole, and the second slide rail 310 extends along the axial direction of the connecting hole; the second movable component also includes a lifting platform 312 that is slidably connected to the second slide rail 310 (through a slider 311), and the lifting platform 312 is threadedly connected to the second screw 305 through a second nut 306, that is, the lifting platform 312 is fixedly connected to the second nut 306 through a fixing seat 313, and the second nut 306 is correspondingly sleeved on the outer side of the second screw 305. In addition, as Figure 5 As shown, the placement platform 314 is provided at the center of the top of the lifting platform 312, which is used to connect to the carrier stage.

[0057] In this embodiment, the detection mechanism includes a rotating grating 40, a lifting grating 43, a rotating reading head 42 and a lifting reading head 45. The rotating grating 40 is fixedly connected to the turntable 210, and the lifting grating 43 is connected to the above-mentioned fixing seat 313; the rotating reading head 42 is fixed to the base 1 through the first reading head fixing seat 41, and the lifting reading head 45 is fixed to the turntable 210 through the second reading head fixing seat 44. Through this detection mechanism, the position of the workbench after the rotation action and the lifting action can be measured.

[0058] According to the rotary lifting workbench of the present invention, the rotating mechanism, the lifting mechanism and the detection mechanism are assembled in one body through the base 1; the first driving assembly can drive the first moving assembly to move, and then drive the toggle member 211 to rotate, and the toggle member 211 is fixedly connected to the turntable 210, that is, the rotation of the toggle member 211 can drive the turntable 210 to rotate synchronously; the second driving assembly can drive the second moving assembly to rise and fall relative to the turntable 210, so that the rotation and lifting actions of the workbench can be realized through a relatively simple and compact structure, which effectively reduces the assembly and maintenance costs of the workbench, and effectively reduces the volume and weight of the workbench. In addition, the workbench is provided with guide mechanisms such as slide rails in the lifting mechanism and the rotating mechanism, which effectively improves the accuracy of the workbench.

[0059] In addition, a placement table 314 is provided at the top of the second moving assembly, which can stably connect the wafer carrier (with the semiconductor placed thereon). The position of the worktable after the rotation and lifting actions can be measured by the detection mechanism.

[0060] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-described embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-described embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be described in the protection scope of the claims.

Claims

1. A rotary lifting workbench, characterized in that: The rotary lifting workbench comprises: Pedestal; The rotating mechanism is provided with a turntable rotatably connected to the base, a first driving assembly, a first moving assembly and a toggle member, wherein both ends of the toggle member are respectively connected to the turntable and the first moving assembly; the first driving assembly can drive the first moving assembly to move, so as to drive the toggle member and the turntable to rotate synchronously; a lifting mechanism connected to the turntable; the lifting mechanism is provided with a second driving assembly and a second moving assembly, the second driving assembly can drive the second moving assembly to rise and fall relative to the turntable, and a placement platform is formed at the top of the second moving assembly; and Testing agency.

2. The rotary lifting workbench according to claim 1, characterized in that: A step hole is formed inside the base, and along the axial direction of the step hole, the step hole forms a first section, a second section and a third section connected in sequence, and the inner diameters of the first section, the second section and the third section decrease in sequence; the first section and the third section respectively penetrate the top end and the bottom end of the base.

3. The rotary lifting workbench according to claim 2, characterized in that: The second section is provided with a cross roller shaft ring, the third section is provided with an inner pressure ring, and the inner pressure ring is connected to the bottom end of the cross roller shaft ring and the bottom end of the turntable; the first section is provided with an outer pressure ring, and the outer pressure ring is connected to the top end of the cross roller shaft ring; the turntable is arranged at the inner wall of the cross roller shaft ring and extends to the outside of the base through the step hole.

4. The rotary lifting workbench according to claim 2, characterized in that: A cavity is formed inside the base, the cavity is located at the side of the step hole, and the first moving component and the toggle member are both located inside the cavity.

5. The rotary lifting workbench according to claim 4, characterized in that: The first drive assembly includes a first drive motor connected to the outer side wall of the base, the drive shaft of the first drive motor extends into the cavity and is connected to the first end of the first lead screw through a coupling; the first end of the first lead screw is also provided with a first limiting portion.

6. The rotary lifting workbench according to claim 5, characterized in that: The first moving assembly includes a first slide rail disposed at the bottom of the cavity, and the extension direction of the first slide rail is the same as the extension direction of the first lead screw; the first moving assembly also includes a first connecting seat and a second connecting seat correspondingly connected to the first slide rail in a sliding manner; the second connecting seat is threadedly connected to the first lead screw via a first nut; The driving shaft drives the first lead screw to rotate synchronously, so that the first connecting seat and the second connecting seat move synchronously along the first slide rail.

7. The rotary lifting workbench according to claim 6, characterized in that: The first connection seat and the second connection seat are connected by bolts, the extension direction of the bolts is the same as the extension direction of the first lead screw, the outer side of the bolts is sleeved with a spring and the spring abuts against the outer side wall of the first connection seat; A first cam guide and a second cam guide are respectively disposed on the top of the first connecting seat and the second connecting seat, and the first end of the toggle member is located between the first cam guide and the second cam guide; the compression amount of the spring can be correspondingly adjusted by adjusting the screwing degree of the bolt, so that the toggle member always keeps in contact with the first cam guide and the second cam guide; The second end of the toggle member is fixedly connected to the turntable, and when the first connecting seat and the second connecting seat move, the toggle member and the turntable can be driven to rotate synchronously.

8. The rotary lifting workbench according to claim 2, characterized in that: The second drive assembly includes a second drive motor and a second lead screw, and the second drive motor and the second lead screw are connected via a synchronous pulley set; the extension direction of the second lead screw is the same as the axial direction of the step hole.

9. The rotary lifting workbench according to claim 8, characterized in that: The turntable is formed with a connecting hole and the connecting hole passes through the top of the turntable, the second moving assembly includes a second slide rail arranged at the inner wall of the connecting hole, and the second slide rail extends along the axial direction of the connecting hole; the second moving assembly also includes a lifting platform slidably connected to the second slide rail, and the lifting platform is threadedly connected to the second lead screw via a second nut; The placing platform is arranged at the top of the lifting platform.

10. The rotary lifting workbench according to claim 1, characterized in that: The detection mechanism includes multiple gratings and multiple reading heads.

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