A ceramic substrate degreasing rack

Abstract

This invention relates to the field of semiconductor manufacturing technology and discloses a ceramic substrate degreasing rack having intersecting first, second, and third directions. The rack includes a frame body; the frame body has multiple placement cavities spaced apart in the third direction; each placement cavity has a limiting post at one end and a door frame at the other end in the first direction; a support frame, the same number and position as the placement cavities, is slidably connected to the frame body and supports the ceramic substrate; a locking assembly is used to limit the rotational connection between the door frame and the frame body; and multiple limiting assemblies are evenly distributed on the support frame. The advantages of this invention are: easy placement and removal of ceramic substrates; and the ability to fix the position of the ceramic substrate in the placement cavities, preventing collisions with the degreasing rack during sliding, improving the yield of finished ceramic substrates, and reducing production costs.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a degreasing rack for ceramic substrates. Background Technology

[0002] After ceramic powder is converted into green ceramic tape by tape casting, the ceramic substrate needs to undergo degreasing treatment after processes such as cutting and hot pressing. This involves placing the ceramic substrate in a degreasing rack and removing organic matter from the formed ceramic substrate by heating or other physical methods to avoid defects during subsequent sintering.

[0003] The existing degreasing rack has multiple stacked placement cavities. The ceramic substrate is not easy to put in or take out in the placement cavity, and the position of the ceramic substrate in the placement cavity is not easy to fix. During the process of handling the degreasing rack as a whole, the ceramic substrate is easy to slide in the placement cavity and collide with the degreasing rack, which affects the yield of the finished ceramic substrate and the production cost is high. Summary of the Invention

[0004] The purpose of this invention is to provide a ceramic substrate degreasing rack that facilitates the placement and removal of ceramic substrates. Simultaneously, it can fix the position of the ceramic substrate within the placement cavity, preventing collisions between the ceramic substrate and the degreasing rack during sliding, thereby improving the yield rate of finished ceramic substrates and reducing production costs.

[0005] To achieve the above objectives, the present invention provides a ceramic substrate degreasing rack having intersecting first, second, and third directions, comprising:

[0006] The frame has multiple placement cavities spaced apart in the third direction. Each placement cavity has a limiting post at one end and a door frame at the other end in the first direction. The limiting post is fixedly connected to the frame, and the door frame is rotatably connected to the frame.

[0007] The number of support frames is the same as the number of placement cavities and their positions correspond to those of the frame, and the support frames are slidably connected to the frame. The support frames are used to support the ceramic substrate.

[0008] A locking assembly is used to limit the rotatable connection between the door frame and the frame body;

[0009] Multiple limiting components are evenly distributed on the support frame to limit the ceramic substrate in the first direction and the second direction;

[0010] The ceramic substrate is fixedly mounted on the support frame by the limiting component. The support frame is located in the placement cavity. One end of the support frame in the first direction abuts against the limiting post. The door frame is rotated and fixed to the frame position by the locking component. The other end of the support frame in the first direction abuts against the door frame.

[0011] Furthermore, the support frame includes a frame body and support rods. The support rods are arranged inside the frame body along the first direction and the second direction, and the limiting components are symmetrically arranged on the diagonal of the frame body.

[0012] Furthermore, the limiting assembly includes an adjusting screw, a limiting plate, two guide rods, and two first springs. The end of the adjusting screw extends through the frame and into the frame, connecting to the limiting plate. The adjusting screw is threadedly connected to the frame. The two guide rods are connected to one end of the limiting plate facing the adjusting screw, and the end of the limiting plate away from the adjusting screw abuts against the side wall of the ceramic substrate. The two guide rods are symmetrically arranged on both sides of the adjusting screw and are slidably connected to the frame. The first springs are sleeved on the guide rods, with one end abutting against the limiting plate and the other end abutting against the frame. The first springs have a tendency to push the limiting plate away from the frame.

[0013] Furthermore, the limiting plate is provided with a limiting groove corresponding to the shape of the ceramic substrate, the bottom surface of the limiting groove is attached to the bottom surface of the ceramic substrate, and the side wall of the limiting groove is attached to the side wall of the ceramic substrate.

[0014] Furthermore, the frame is provided with first handles at both ends in the first direction.

[0015] Furthermore, the frame is provided with second handles at both ends in the second direction.

[0016] Furthermore, the bottom of the frame is provided with support legs, and the top of the frame is provided with limiting holes corresponding to the positions of the support legs.

[0017] Furthermore, the door frame has mounting holes at both ends in the third direction, and the frame has insertion holes corresponding to the mounting holes. The locking assembly includes a second spring and a pin. The second spring is located in the mounting hole, and the pin is located above the second spring. One end of the second spring abuts against the bottom surface of the mounting hole, and the other end abuts against the bottom surface of the pin. The second spring has a tendency to push the pin upward.

[0018] Furthermore, the sidewall of the mounting hole is provided with a strip groove along the first direction, the long side of the strip groove is in the same direction as the third direction, and the pin is provided with a pressure rod, the pressure rod is arranged along the first direction and passes through the strip groove.

[0019] Furthermore, the top of the frame is provided with reinforcing bars along the diagonal.

[0020] Compared with existing technologies, the ceramic substrate degreasing rack of this invention has the following advantages: It includes a support frame that is slidably connected to the frame body. When a ceramic substrate needs to be placed, the support frame is moved out of the placement cavity to facilitate placement. Then, a limiting component fixes the ceramic substrate onto the support frame. Moving the support frame and ceramic substrate together into the placement cavity facilitates easy loading and unloading of the ceramic substrate, improving production efficiency. Furthermore, it includes a limiting post and a door frame. After the support frame is moved into the placement cavity, one end of the support frame in a first direction abuts against the limiting post. The door frame is rotated and fixed to the frame body by a locking component, while the other end of the support frame in the first direction abuts against the door frame, preventing the support frame from sliding out of the placement cavity. This also fixes the position of the support frame, preventing the ceramic substrate from sliding and colliding, thus improving the yield of finished ceramic substrates and reducing production costs. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the ceramic substrate degreasing rack according to an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of the ceramic substrate degreasing material holder according to an embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the limiting component of the ceramic substrate degreasing rack in an embodiment of the present invention;

[0024] Figure 4 This is a cross-sectional view of the locking assembly of the ceramic substrate degreasing material holder according to an embodiment of the present invention.

[0025] In the diagram, 1. Frame; 11. Placement cavity; 12. Support leg; 13. Limiting hole; 14. Insertion hole; 15. Reinforcing rod; 2. Limiting post; 3. Door frame; 31. Mounting hole; 311. Strip groove; 4. Support frame; 41. Frame body; 42. Support rod; 5. Locking assembly; 51. Second spring; 52. Pin; 53. Pressure rod; 6. Limiting assembly; 61. Adjusting screw; 62. Limiting plate; 621. Limiting groove; 63. Guide rod; 64. First spring; 7. First handle; 8. Second handle; X, First direction; Y, Second direction; Z, Third direction; a, Ceramic substrate. Detailed Implementation

[0026] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0027] In the description of this invention, it should be understood that the terms "upper," "lower," "front," "rear," "inner," and "outer," etc., used in this invention to indicate orientation or positional relationships are based on the positional relationships shown in the accompanying drawings and are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device and element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0028] In the description of this invention, it should be understood that the terms "first," "second," etc., are used to describe various types of information, but these terms are not limited to them; they are only used to distinguish information of the same type from one another. For example, without departing from the scope of this invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.

[0029] like Figures 1 to 4 As shown, a preferred embodiment of the present invention provides a ceramic substrate degreasing rack with intersecting first directions X, second directions Y, and third direction Z. It includes: a frame 1, a support frame 4, limiting posts 2, a door frame 3, a locking assembly 5, and multiple limiting assemblies 6. The frame 1 has multiple placement cavities 11 spaced apart along the third direction Z. To facilitate the placement and removal of ceramic substrates, a support frame 4 is provided. The number of support frames 4 is the same as the number of placement cavities 11, and their positions correspond to each other. The support frames 4 are slidably connected to the frame 1. The support frames 4 are used to support the ceramic substrates; that is, when it is necessary to place or remove the ceramic substrates, the support frames 4 can be pulled out from the placement cavities 11, avoiding collisions when directly placing or removing the ceramic substrates from the placement cavities 11. Figure 1 As shown, the placement cavity 11 has a limiting post 2 at one end in the first direction X and a door frame 3 at the other end. The limiting post 2 is fixedly connected to the frame 1, and the door frame 3 is rotatably connected to the frame 1. Rotating the door frame 3 closes or opens the placement cavity 11, facilitating the sliding out of the support frame 4. To facilitate fixing the position of the ceramic substrate on the support frame 4 and prevent the ceramic substrate from moving, multiple limiting components 6 are evenly distributed on the support frame 4 to limit the ceramic substrate in the first direction X and the second direction Y. When placing the ceramic substrate a, rotating the door frame 3 slides out the support frame 4, and the ceramic substrate a is fixedly mounted on the support frame 4 by the limiting components 6. To facilitate fixing the position of the support frame 4, one end of the support frame 4 in the first direction X abuts against the limiting post 2, and rotating the door frame 3 fixes its position to the frame 1 by the locking component 5. The other end of the support frame 4 in the first direction X abuts against the door frame 3. This achieves the fixation of the position of the ceramic substrate a in each placement cavity 11.

[0030] In some embodiments, to facilitate the design of the support frame 4 while maintaining a certain structural strength, see [reference needed]. Figure 3 The support frame 4 includes a frame body 41 and a support rod 42. The support rod 42 is provided inside the frame body 41 along the first direction X and the second direction Y. It is used to provide auxiliary support for the ceramic substrate and improve the overall structural strength of the support frame 4. Since the ceramic substrate is generally circular or rectangular, in order to facilitate the upper limit of the ceramic substrate in the first direction X and the second direction Y, in this embodiment, the limiting component 6 is symmetrically provided on the diagonal of the frame body 41. The position of the limiting component 6 can also be adjusted according to actual needs.

[0031] In some embodiments, the limiting assembly 6 includes an adjusting screw 61, a limiting plate 62, two guide rods 63, and two first springs 64, wherein, see reference Figure 3 The end of the adjusting screw 61 extends through the frame 41 and into the frame 41, connecting to the limiting plate 62. The adjusting screw 61 is threadedly connected to the frame 41. Two guide rods 63 are connected to the end of the limiting plate 62 facing the adjusting screw 61. When the adjusting screw 61 is rotated, the end of the limiting plate 62 away from the adjusting screw 61 abuts against the side wall of the ceramic substrate. In order to facilitate the movement of the limiting plate 62 and ensure the strength of the limiting plate 62 in fixing the ceramic substrate, the two guide rods 63 are symmetrically arranged on both sides of the adjusting screw 61 and are slidably connected to the frame 41 respectively. The first spring 64 is sleeved on the guide rod 63, with one end abutting against the limiting plate 62 and the other end abutting against the frame 41. The first spring 64 has a tendency to push the limiting plate 62 away from the frame 41, thereby ensuring that the ceramic substrate is always in a fixed state. Due to this design of the limiting component 6, it can be used to fix ceramic substrates of different specifications.

[0032] Furthermore, to facilitate the positioning of the limiting plate 62 and the ceramic substrate, a limiting groove 621 corresponding to the shape of the ceramic substrate is formed on the limiting plate 62. The bottom surface of the limiting groove 621 is attached to the bottom surface of the ceramic substrate, and the side wall of the limiting groove 621 is attached to the side wall of the ceramic substrate. Even further, to prevent the surface of the limiting groove 621 from scratching the ceramic substrate, felt can be attached inside the limiting groove 621, or the limiting plate 62 can be made of a soft material such as rubber or silicone.

[0033] Furthermore, to facilitate the sliding of the entire support frame 4 out of the placement cavity 11, the frame 41 is provided with first handles 7 at both ends in the first direction X. To facilitate the handling of the entire degreasing rack, the frame 1 is provided with second handles 8 at both ends in the second direction Y. In some embodiments, to enhance the structural strength of the frame 1, reinforcing rods 15 are provided diagonally along the top of the frame 1.

[0034] In some embodiments, in order to reduce the space occupied by the degreasing rack in the horizontal direction, multiple racks 1 can be stacked together. Specifically, in this embodiment, the bottom of the rack 1 is provided with a support leg 12, and the top of the rack 1 is provided with a limiting hole 13 corresponding to the position of the support leg 12.

[0035] Furthermore, to facilitate quick fixation of the door frame 3 after rotation, in this embodiment, the door frame 3 has mounting holes 31 at both ends in the third direction Z, and the frame 1 has insertion holes 14 corresponding to the positions of the mounting holes 31. (See reference...) Figure 4 The locking assembly 5 includes a second spring 51 and a pin 52. The second spring 51 is located inside the mounting hole 31, and the pin 52 is located above the second spring 51. One end of the second spring 51 abuts against the bottom surface of the mounting hole 31, and the other end abuts against the bottom surface of the pin 52. The second spring 51 has a tendency to push the pin 52 upward. To facilitate the automatic sliding of the pin 52 into the insertion hole 14 when it contacts the side wall of the frame 1, thereby fixing the position between the door frame 3 and the frame 1, a guide slope is provided on the top of the pin 52 facing the frame 1. Furthermore, to facilitate the release of the lock between the door frame 3 and the frame 1, a strip groove is provided on the side wall of the mounting hole 31 along the first direction X. The long side of the strip groove is in the same direction as the third direction Z. A pressure rod 53 is provided on the pin 52. The pressure rod 53 is set along the first direction X and passes through the strip groove 311. The pressure rod 53 and the pin 52 can be welded together. When it is necessary to engage the locking state between the door frame 3 and the frame 1, press the lever 53 to compress the second spring 51, which will disengage the pin 52 from the socket 14. The overall structure is simple.

[0036] In summary, this embodiment of the invention provides a ceramic substrate degreasing rack, comprising a support frame 4 slidably connected to the frame body 1. When a ceramic substrate needs to be placed, the support frame 4 is moved out of the placement cavity 11 for easy placement. Subsequently, the ceramic substrate is fixed on the support frame 4 by the limiting component 6. The support frame 4 and the ceramic substrate are then moved into the placement cavity 11 as a whole, facilitating the handling of the ceramic substrate and improving production efficiency. Furthermore, a limiting post 2 and a door frame 3 are provided. After the support frame is moved into the placement cavity 11 as a whole, one end of the support frame 4 in the first direction X abuts against the limiting post 2. The door frame 3 is rotated and fixed in position to the frame body 1 by the locking component 5. The other end of the support frame 4 in the first direction X abuts against the door frame 3, preventing the support frame 4 from sliding out of the placement cavity 11. Simultaneously, the position of the support frame 4 is fixed to prevent the ceramic substrate from sliding and colliding, thus improving the yield of finished ceramic substrates and reducing production costs.

[0037] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A ceramic substrate degreasing rack having a first direction, a second direction, and a third direction that intersect two by two, characterized in that, The utility model relates to a ceramic substrate placing device, including: Frame body, the frame body is provided with a plurality of placement cavities in the third direction, one end of the placement cavity is equipped with the door frame in the first direction and is equipped with the limit post, the limit post is fixedly connected with the frame body, the door frame is rotatably connected with the frame body, Support frame, the same as the placement cavity and the position corresponding, and with the frame body sliding connection, the support frame is used for carrying ceramic substrate, Locking assembly, for the door frame and the frame body rotatable connection limit, A plurality of limiting components, evenly distributed on the support frame, for limiting the ceramic substrate in the first direction and the second direction, Wherein, the ceramic substrate is fixedly arranged on the support frame through the limiting component, the support frame is arranged in the placement cavity, one end of the support frame in the first direction is arranged with the limit post, the door frame is rotatably arranged through the locking assembly and the frame body position fixed, the other end of the support frame in the first direction is arranged with the door frame, The support frame includes a frame body and a support rod, the support rod is arranged inside the frame body along the first direction and the second direction, and the limit component is symmetrically arranged on the diagonal line of the frame body; the limit component includes an adjusting screw, a limit plate, two guide rods and two first springs, the end of the adjusting screw extends through the frame body into the frame body and is connected with the limit plate, the adjusting screw is threadedly connected with the frame body, one end of the limit plate towards the adjusting screw is connected with the two guide rods, and the other end of the limit plate away from the adjusting screw is arranged against the side wall of the ceramic substrate; the two guide rods are symmetrically arranged on the two sides of the adjusting screw and are slidingly connected with the frame body, the first spring is sleeved on the guide rod, one end of the first spring is arranged against the limit plate, and the other end of the first spring is arranged against the frame body, and the first spring has a movement trend of pushing the limit plate away from the frame body.

2. The ceramic substrate strip of claim 1, wherein: A limit groove corresponding to the shape of the ceramic substrate is formed in the limit plate, the bottom surface of the limit groove is attached to the bottom surface of the ceramic substrate, and the side wall of the limit groove is attached to the side wall of the ceramic substrate.

3. The ceramic substrate strip of claim 1, wherein: First handles are arranged at both ends of the frame body in the first direction.

4. The ceramic substrate strip of claim 1, wherein: Second handles are arranged at both ends of the frame body in the second direction.

5. The ceramic substrate strip of claim 1, wherein: The bottom of the frame body is provided with a support leg, and the top of the frame body is provided with a limiting hole corresponding to the support leg.

6. The ceramic substrate strip of claim 1, wherein: Mounting holes are formed at both ends of the door frame in the third direction, and the frame body is provided with a plug hole corresponding to the mounting hole, the locking assembly includes a second spring and a plug, the second spring is arranged in the mounting hole, the plug is arranged above the second spring, one end of the second spring is arranged against the bottom surface of the mounting hole, and the other end of the second spring is arranged against the bottom surface of the plug, and the second spring has a movement trend of pushing the plug upward.

7. The ceramic substrate strip of claim 6, wherein: A strip-shaped groove is formed in the side wall of the mounting hole along the first direction, the long side direction of the strip-shaped groove is the same as the third direction, a pressing rod is arranged on the plug, the pressing rod is arranged along the first direction and penetrates through the strip-shaped groove.

8. The ceramic substrate strip of claim 1, wherein: A reinforcing rod is arranged on the top of the frame body along the diagonal line.

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