Magnetic control Czochralski single crystal device

Abstract

The invention belongs to the technical field of single crystal furnaces, and particularly relates to a magnetic control Czochralski single crystal device which comprises a superconducting magnet, the superconducting magnet is arranged in the single crystal furnace; the periphery of the superconducting magnet is sleeved with a cooling unit; the cooling unit comprises two mounting ring plates arranged at the top and the bottom of the outer ring of the superconducting magnet; two annular water pipes are fixedly connected to the surfaces, close to each other, of the two mounting annular plates; a plurality of pairs of cooling pipes are arranged between the two mounting ring plates in a surrounding manner; the two ends of one cooling pipe in each pair are communicated with the two annular water pipes of the inner ring; the two ends of the other cooling pipe in each pair are communicated with the two annular water pipes of the outer ring; the flowing directions of cooling liquid in each pair of annular water pipes are opposite; the cooling liquid in each pair of cooling pipes flows relatively, and the superconducting magnet is uniformly surrounded by the plurality of pairs of cooling pipes, so that the temperature difference condition generated when the superconducting magnet is cooled is reduced, and the production quality of monocrystalline silicon is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnaces, in particular to a magnetically controlled Czochralski single crystal device. Background Art

[0002] A magnetron Czochralski single crystal pulling furnace is a device that uses an additional strong magnetic field in an inert gas environment to suppress the thermal convection of the melt, reduce the impurity content of the crystal, and improve the uniformity of the longitudinal and radial impurity distribution to obtain high-quality single crystals. With the development of superconducting magnet technology, more and more superconducting magnets have replaced traditional conventional electromagnets, which can generate stronger magnetic fields and have a more obvious effect on suppressing the thermal convection of the melt. In conjunction with the corresponding crystal pulling process, larger or higher-quality single crystal silicon can be produced. The superconducting magnet system is one of the key components of a single crystal silicon pulling furnace.

[0003] A patent application with publication number CN110129890A discloses a coil structure for magnetically controlled Czochralski single crystals and a method for magnetically controlled Czochralski single crystals, comprising a first coil and a second coil coaxially arranged above and below, an auxiliary coil arranged in the middle of the first coil and the second coil, and the auxiliary coil is coaxially arranged with the first coil; when power is turned on, the currents in the first coil and the second coil are reversed; the invention adds an auxiliary coil between the first coil and the second coil, and on the basis of a pair of coaxial reverse coils, the magnetic field generated by the auxiliary coil is superimposed on the magnetic field generated by the pair of reverse coils, thereby enhancing the strength of the magnetic field and improving the quality of the single crystal silicon; in addition, by setting the auxiliary coil to adjust and optimize the magnetic field, the uniformity of the magnetic field can be adjusted, so that the suppression of the melt heat convection in the single crystal furnace is consistent, so that the obtained single crystal silicon has a high purity, and the weight of the magnet is reduced at the same time.

[0004] The existing magnetron CZ single crystal furnace uses a cooling liquid in a cold screen arranged on the outer wall of the furnace body for circulating cooling. However, since the cooling liquid temperature at the liquid inlet end of the cold screen is lower than the cooling liquid temperature at the liquid outlet end of the cold screen, the cooling effect of the cold screen near the liquid inlet end is higher than that of the liquid outlet end of the cold screen, causing a temperature difference in the superconducting magnet in the magnetron CZ single crystal furnace, resulting in a reduction in the production quality of single crystal silicon.

[0005] To this end, the present invention provides a magnetically controlled Czochralski single crystal device. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problems is: a magnetically controlled CZ-pull single crystal device described in the present invention comprises a superconducting magnet; the superconducting magnet is arranged in a single crystal furnace; a cooling unit is sleeved on the outer periphery of the superconducting magnet; the cooling unit comprises two mounting ring plates arranged at the top and bottom of the outer ring of the superconducting magnet; two annular water pipes are fixedly connected to the adjacent sides of the two mounting ring plates; a plurality of pairs of cooling pipes are arranged around the two mounting ring plates; the two ends of one cooling pipe in each pair are connected to the two annular water pipes of the inner ring; the two ends of the other cooling pipe in each pair are connected to the two annular water pipes of the outer ring; the cooling pipes are connected to an external cooling system through pipelines; the flow directions of the coolant in each pair of the two annular water pipes are opposite; the coolant in each pair of cooling pipes flows relative to each other, and the plurality of pairs of cooling pipes uniformly surround the superconducting magnet, thereby reducing the temperature difference generated when the superconducting magnet is cooled and the production quality of single crystal silicon is improved.

[0008] Preferably, the cooling tube is a corrugated structure; each pair of two cooling tubes are arranged in parallel; thereby not only the superconducting magnet can be cooled comprehensively, but also the uniformity of cooling is improved and the temperature difference is reduced.

[0009] Preferably, a storage ring box is fixedly connected to the outer ring of the bottom surface of the mounting ring plate at the top; granular abrasives are filled inside the storage ring box; a No. 1 three-way valve is connected between the top of the cooling tube and the annular water pipe at the top; the middle of the No. 1 three-way valve is connected to the bottom discharge port of the storage ring box; the top of the No. 1 three-way valve is connected to a high-pressure air pump through an air pipe; a recovery ring box is fixedly connected to the outer ring of the top surface of the mounting ring plate at the bottom; a No. 2 three-way valve is connected between the bottom of the cooling tube and the annular water pipe at the bottom; the No. 2 three-way valve The middle part is connected with the recovery ring box through a pipeline; the abrasive inside the storage ring box enters into the No. 1 three-way valve, and at the same time, the high-pressure air pump conveys the high-pressure gas into the No. 1 three-way valve, and the high-pressure gas carries the granular abrasive through the cooling pipe, and the granular abrasive hits the impurities and dirt in the cooling pipe, so that the impurities and dirt are separated from the inner wall of the cooling pipe and move to the interior of the recovery ring box along with the airflow; thereby completing the unblocking and cleaning of the cooling pipe, reducing the possibility of blockage of the cooling pipe, and ensuring the cooling effect of the superconducting magnet.

[0010] Preferably, an annular air nozzle is fixedly connected to the top outer ring of the No. 1 three-way valve; a plurality of nozzles are arranged around the inner ring of the annular air nozzle, and the wind direction of the nozzles is inclined downward; a plurality of through holes are opened around the top outer ring of the No. 1 three-way valve; the annular air nozzle is sleeved on the outer periphery of the through hole; the nozzle passes through the through hole; the annular air nozzle is connected to the high-pressure air pump; a plurality of nozzles are blown into the interior of the No. 1 three-way valve, so that the airflow and the abrasive are fully mixed, thereby improving the cleaning effect of the abrasive on the inner wall of the cooling pipe.

[0011] Preferably, the bottom discharge port of the storage ring box is connected with a connector; a connecting pipe is connected between the connector and the No. 1 three-way valve; an air cavity is opened inside the connector at one end away from the connecting pipe; the air cavity is connected with a diverter pipe at one end away from the connecting pipe; the other end of the diverter pipe is connected to the annular air nozzle through an air pipe; an annular air pipe is arranged on the outer side of the bottom of the storage ring box; the diverter pipe is connected to the annular air pipe; the annular air pipe is connected to the high-pressure air pump.

[0012] Preferably, a plurality of groups of dispersing blades are fixedly connected around the interior of the connecting tube; each group of dispersing blades are staggered; the sticking of the abrasive is reduced, thereby facilitating the cleaning of the abrasive through the cooling tube.

[0013] Preferably, a rotating ring is slidably installed in front of the inner cavity of the storage ring box; a plurality of push plates are bolted to the bottom surface of the rotating ring; the bottom of the push plate is in sliding contact with the bottom of the inner cavity of the storage ring box; the push plate is arranged at an angle; a plurality of notches are evenly arranged on the bottom of the push plate; a driving assembly is arranged on the outside of the storage ring box, and the driving assembly drives the rotating ring to rotate.

[0014] Preferably, the driving assembly includes a gear ring fixedly connected to the outer ring of the rotating ring; a motor is fixedly connected to the top surface of the mounting ring plate; a gear is fixedly connected to the bottom of the output shaft of the motor; and the gear is meshed with the gear ring.

[0015] Preferably, a plurality of groups of air outlets are evenly arranged on the top surface of the recovery ring box; the plurality of groups of air outlets are alternately distributed with the plurality of pairs of cooling pipes; a filter assembly is arranged between two adjacent groups of air outlets; a plurality of cleaning ports are arranged around the outer ring of the recovery ring box; the cleaning ports correspond to the cooling pipes; a sealing baffle is bolted to the outside of the cleaning ports.

[0016] Preferably, the filter assembly comprises a shell bolted to the inside of the recovery ring box; filter screens are fixedly connected to both sides of the shell; and a through hole corresponding to the air outlet is opened on the middle top surface of the shell.

[0017] The beneficial effects of the present invention are as follows: 1. A magnetically controlled CZ-type single crystal pulling device according to the present invention comprises an installation ring plate, an annular water pipe and a cooling pipe; the coolant in the cooling system is divided into two paths, one path of the coolant is transported to an annular water pipe at the top, then divided into a plurality of cooling pipes, transported downward to an annular water pipe corresponding to the bottom, and then refluxed into the cooling system; the other path of the coolant is transported to another annular water pipe at the bottom, then divided into another plurality of cooling pipes, transported upward to an annular water pipe corresponding to the top, and then refluxed into the cooling system; the coolant in each pair of cooling pipes flows relative to each other, and the plurality of pairs of cooling pipes uniformly surround the superconducting magnet, thereby reducing the temperature difference generated when the superconducting magnet is cooled and the production quality of single crystal silicon is improved.

[0018] 2. A magnetically controlled CZ single crystal device according to the present invention comprises a storage ring box, a No. 1 three-way valve, a recovery ring box, a No. 2 three-way valve and a high-pressure air pump; the abrasive inside the storage ring box enters the No. 1 three-way valve, and at the same time, the high-pressure air pump conveys high-pressure gas into the No. 1 three-way valve, and the high-pressure gas carries the granular abrasive through the cooling pipe, and the granular abrasive hits the impurities and dirt in the cooling pipe, so that the impurities and dirt are separated from the inner wall of the cooling pipe and move to the inside of the recovery ring box along with the airflow; thereby, the dredging and cleaning of the cooling pipe is completed, the blockage of the cooling pipe is reduced, and the cooling effect of the superconducting magnet is ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 is a stereogram of the present invention; Figure 2 is an exploded view of the present invention; Figure 3 It is a stereoscopic diagram of the annular water pipe and the cooling pipe in the present invention; Figure 4 is a stereogram of a cooling tube in the present invention; Figure 5 It is a stereoscopic diagram of a No. 1 three-way valve, a connector and a connecting pipe in the present invention; Figure 6 It is an exploded view of the No. 1 three-way valve, the connector and the connecting pipe in the present invention; Figure 7 is a cross-sectional view of a No. 1 three-way valve in the present invention; Figure 8 is a cross-sectional view of a connector in the present invention; Fig. 9 is a cross-sectional view of the connecting pipe in the present invention; Fig.10 is a cross-sectional view of a storage ring box in the present invention; Fig.11 is a three-dimensional diagram of the push plate in the present invention; Fig.12 is an exploded view of the storage ring box of the present invention; In the figure: 1. superconducting magnet; 2. mounting ring plate; 3. annular water pipe; 4. cooling pipe; 5. storage ring box; 6. No. 1 three-way valve; 7. recovery ring box; 8. No. 2 three-way valve; 9. annular air nozzle; 10. nozzle; 11. through hole; 12. connector; 13. connecting pipe; 14. air cavity; 15. diverter pipe; 16. annular air pipe; 17. dispersion blade; 18. rotating ring; 19. push plate; 20. notch; 21. gear ring; 22. motor; 23. gear; 24. air outlet; 25. cleaning port; 26. sealing baffle; 27. shell; 28. filter. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0022] like Figures 1 to 4 As shown, a magnetron CZ single crystal device according to an embodiment of the present invention comprises a superconducting magnet 1; the superconducting magnet 1 is arranged in a single crystal furnace; a cooling unit is sleeved on the outer periphery of the superconducting magnet 1; the cooling unit comprises two mounting ring plates 2 arranged at the top and bottom of the outer ring of the superconducting magnet 1; two annular water pipes 3 are fixedly connected to the adjacent sides of the two mounting ring plates 2; a plurality of pairs of cooling pipes 4 are arranged around the two mounting ring plates 2; the two ends of one cooling pipe 4 in each pair are connected to the two annular water pipes 3 of the inner ring; the two ends of the other cooling pipe 4 in each pair are connected to the two annular water pipes 3 of the outer ring; the cooling pipe 4 is connected to an external cooling system through a pipeline; the flow directions of the coolant in each pair of the two annular water pipes 3 are opposite; when working, the coolant in the cooling system is divided into two paths, and the coolant in one path is transported to the top of the cooling pipe 4. The cooling liquid of one path is transported to another annular water pipe 3 at the bottom, and then is divided into multiple cooling pipes 4, transported upward to the annular water pipe 3 corresponding to the top, and then flows back to the cooling system; the cooling liquid of another path is transported to another annular water pipe 3 at the bottom, and then is divided into multiple cooling pipes 4, transported upward to the annular water pipe 3 corresponding to the top, and then flows back to the cooling system; the cooling liquid in each pair of cooling pipes 4 flows relatively, and the multiple pairs of cooling pipes 4 uniformly surround the superconducting magnet 1, thereby reducing the temperature difference generated when the superconducting magnet 1 is cooled, and improving the production quality of single crystal silicon.

[0023] like Figures 1 to 4 As shown, the cooling tube 4 is a corrugated structure; each pair of two cooling tubes 4 are arranged in parallel; by arranging the cooling tube 4 into a corrugated shape and arranging each pair of two cooling tubes 4 in parallel, not only can the superconducting magnet 1 be cooled and lowered in an all-round manner, but also the uniformity of cooling is improved and the temperature difference is reduced.

[0024] like Figures 1 to 5 As shown, a storage ring box 5 is fixedly connected to the outer ring of the bottom surface of the mounting ring plate 2 at the top; granular abrasives are filled inside the storage ring box 5; a No. 1 three-way valve 6 is connected between the top of the cooling tube 4 and the annular water pipe 3 at the top; the middle of the No. 1 three-way valve 6 is connected to the bottom discharge port of the storage ring box 5; the top of the No. 1 three-way valve 6 is connected to the high-pressure air pump through an air pipe; a recovery ring box 7 is fixedly connected to the outer ring of the top surface of the mounting ring plate 2 at the bottom; a No. 2 three-way valve 8 is connected between the bottom of the cooling tube 4 and the annular water pipe 3 at the bottom; the middle of the No. 2 three-way valve 8 is connected to the recovery ring box 7 through a pipeline; The coolant flows in the cooling pipe 4 for a long time, which will cause scaling inside the cooling pipe 4, affecting the flow of the coolant in the cooling pipe 4, thereby affecting the cooling effect; therefore, it is necessary to regularly clean the impurities and dirt in the cooling pipe 4; During operation, the coolant in the cooling pipe 4 is discharged, and the No. 1 three-way valve 6 is controlled to switch so that the top of the cooling pipe 4 is connected to the storage ring box 5. At the same time, the No. 2 three-way valve 8 is controlled to switch so that the bottom of the cooling pipe 4 is connected to the recovery ring box 7; the abrasive inside the storage ring box 5 enters the No. 1 three-way valve 6. At the same time, the high-pressure air pump delivers high-pressure gas to the No. 1 three-way valve 6. The high-pressure gas carries the granular abrasive through the cooling pipe 4. The granular abrasive hits the impurities and dirt in the cooling pipe 4, so that the impurities and dirt are separated from the inner wall of the cooling pipe 4 and move to the inside of the recovery ring box 7 along with the airflow; When the impurities and dirt inside the cooling pipe 4 are cleaned, the No. 1 three-way valve 6 is controlled to switch, disconnected from the storage ring box 5, and the conveying of the abrasive is cut off. At this time, the high-pressure gas is continued to be conveyed, so that the high-pressure gas continues to pass through the cooling pipe 4 to remove the residual abrasive in the cooling pipe 4. After that, the conveying of the high-pressure gas is stopped and the No. 2 three-way valve 8 is controlled to switch, disconnected from the recovery ring box 7; finally, the coolant is conveyed to the cooling pipe 4; Thus, the cooling pipe 4 is cleared and cleaned, the blockage of the cooling pipe 4 is reduced, and the cooling effect of the superconducting magnet 1 is ensured.

[0025] like Figures 5 to 7As shown, the top outer ring of the No. 1 three-way valve 6 is fixedly connected with an annular air nozzle 9; the inner ring of the annular air nozzle 9 is surrounded by a plurality of nozzles 10, and the wind direction of the nozzles 10 is inclined downward; the top outer ring of the No. 1 three-way valve 6 is surrounded by a plurality of through holes 11; the annular air nozzle 9 is sleeved on the outer periphery of the through hole 11; the nozzles 10 pass through the through hole 11; the annular air nozzle 9 is connected with the high-pressure air pump; during operation, when the abrasive inside the storage ring box 5 enters the No. 1 three-way valve 6, the high-pressure air pump pumps the high-pressure gas into the interior of the annular air nozzle 9, and then blows it into the interior of the No. 1 three-way valve 6 through the plurality of nozzles 10, so that the airflow and the abrasive are fully mixed, thereby improving the cleaning effect of the abrasive on the inner wall of the cooling pipe 4.

[0026] like Figure 5 , Figure 6 and Figure 8 As shown, the bottom discharge port of the storage ring box 5 is connected with a connector 12; a connecting pipe 13 is connected between the connector 12 and the No. 1 three-way valve 6; an air cavity 14 is provided inside the connector 12 at one end away from the connecting pipe 13; a shunt pipe 15 is connected to one end of the air cavity 14 away from the connecting pipe 13; the other end of the shunt pipe 15 is connected to the annular air nozzle 9 through an air pipe; an annular air pipe 16 is provided on the outer side of the bottom of the storage ring box 5; the shunt pipe 15 is connected to the annular air pipe 16; the annular air pipe 16 is connected to the high-pressure air pump; During operation, the abrasive material inside the storage ring box 5 falls from the discharge port at the bottom to the inside of the connector 12. At this time, the high-pressure air pump transports the high-pressure gas to the inside of the annular air pipe 16, and then diverts it to the diversion pipe 15, and diverts it again. One airflow is transported to the inside of the annular air nozzle 9, and the other airflow is transported to the air cavity 14 of the connector 12. The airflow in the air cavity 14 is transported to the annular air nozzle 9 along the connecting pipe 13. The airflow in the air cavity 14 pushes the abrasive material falling into the inside of the connector 12 into the No. 1 three-way valve 6. At the same time, the airflow in the air cavity 14 will form a low-pressure area below the discharge port of the storage ring box 5, which is beneficial for the abrasive material inside the storage ring box 5 to fall into the connector 12; thereby facilitating the abrasive material to enter the No. 1 three-way valve 6.

[0027] like Figure 5 , Figure 6 and Fig. 9 As shown, a plurality of groups of dispersion blades 17 are fixedly connected around the interior of the connecting tube 13; each group of the dispersion blades 17 are arranged alternately; during operation, when the abrasive passes through the connecting tube 13, the abrasive is dispersed by the plurality of groups of dispersion blades 17, so that the abrasive is fully dispersed, and the abrasive is less likely to be hardened or adhered, thereby facilitating the abrasive to pass through the cooling tube 4 for cleaning.

[0028] like Figure 1 , Figure 2 , Fig.10 and Fig.11 As shown, a rotating ring 18 is slidably mounted in the inner cavity of the storage ring box 5; a plurality of push plates 19 are bolted to the bottom surface of the rotating ring 18; the bottom of the push plate 19 is in sliding contact with the bottom of the inner cavity of the storage ring box 5; the push plate 19 is arranged obliquely; a plurality of notches 20 are evenly formed at the bottom of the push plate 19; a driving assembly is arranged on the outer side of the storage ring box 5, and the driving assembly drives the rotating ring 18 to rotate; The driving assembly includes a gear ring 21 fixedly connected to the outer ring of the rotating ring 18; a motor 22 is fixedly connected to the top surface of the mounting ring plate 2; a gear 23 is fixedly connected to the bottom of the output shaft of the motor 22; the gear 23 is meshed with the gear ring 21; During operation, when cleaning impurities and dirt in the cooling pipe 4, the motor 22 drives the gear 23 to rotate, drives the ring gear 21 and the rotating ring 18 to rotate inside the storage ring box 5, and drives multiple push plates 19 to move inside the storage ring box 5. The push plates 19 push the abrasive inside the storage ring box 5 to move, so that the abrasive can fully enter the interior of the connecting head 12. At the same time, the push plates 19 can break up the abrasive and reduce the sticking of the abrasive, thereby ensuring the conveying efficiency of the abrasive.

[0029] like Figure 1 , Figure 2 and Fig.12 As shown, the top surface of the recovery ring box 7 is evenly provided with multiple groups of air outlets 24; the multiple groups of air outlets 24 are alternately distributed with the multiple pairs of cooling pipes 4; a filter assembly is arranged between two adjacent groups of air outlets 24; the outer ring of the recovery ring box 7 is surrounded by multiple cleaning ports 25; the cleaning ports 25 correspond to the cooling pipes 4; the outer side of the cleaning ports 25 is bolted with a sealing baffle 26; The filter assembly includes a shell 27 bolted to the inside of the recovery ring box 7; filter screens 28 are fixedly connected to both sides of the shell 27; a through hole corresponding to the air outlet 24 is opened on the top surface of the middle part of the shell 27; During operation, the high-pressure gas carries the granular abrasive through the cooling pipe 4 and enters the interior of the recovery ring box 7. The airflow passes through the filter 28 and enters the interior of the shell 27, and then is discharged from the recovery ring box 7 through the air outlet 24, while the abrasive and impurities and dirt remain in the recovery ring box 7. The staff can remove the sealing baffle 26 and clean it through the cleaning port 25, thereby realizing the recovery of the abrasive and impurities and dirt.

[0030] Working principle: the coolant in the cooling system is divided into two paths, one path of the coolant is transported to an annular water pipe 3 at the top, then divided into multiple cooling pipes 4, transported downward to an annular water pipe 3 corresponding to the bottom, and then flows back to the cooling system; the other path of the coolant is transported to another annular water pipe 3 at the bottom, then divided into another multiple cooling pipes 4, transported upward to annular water pipe 3 corresponding to the top, and then flows back to the cooling system; the coolant in each pair of cooling pipes 4 flows relative to each other, and multiple pairs of cooling pipes 4 uniformly surround the superconducting magnet 1, thereby reducing the temperature difference generated when the superconducting magnet 1 is cooled and the production quality of single crystal silicon is improved; The coolant flows in the cooling pipe 4 for a long time, which will cause scaling inside the cooling pipe 4, affecting the flow of the coolant in the cooling pipe 4, thereby affecting the cooling effect; therefore, it is necessary to regularly clean the impurities and dirt in the cooling pipe 4; The coolant in the cooling pipe 4 is discharged, and the No. 1 three-way valve 6 is controlled to switch so that the top of the cooling pipe 4 is connected to the storage ring box 5. At the same time, the No. 2 three-way valve 8 is controlled to switch so that the bottom of the cooling pipe 4 is connected to the recovery ring box 7; The motor 22 drives the gear 23 to rotate, drives the gear ring 21 and the rotating ring 18 to rotate inside the storage ring box 5, drives the multiple push plates 19 to move inside the storage ring box 5, and the push plates 19 push the abrasive inside the storage ring box 5 to move, so that the abrasive can fully enter the inside of the connector 12, and at the same time, the push plates 19 can break up the abrasive to reduce the sticking of the abrasive; At the same time, the high-pressure air pump delivers the high-pressure gas to the inside of the annular air pipe 16, and then diverts it to the diversion pipe 15, and diverts it again. One airflow is delivered to the inside of the annular air nozzle 9, and the other airflow is delivered to the air cavity 14 of the connector 12. The airflow in the air cavity 14 is delivered to the annular air nozzle 9 along the connecting pipe 13. The airflow in the air cavity 14 pushes the abrasive falling into the inside of the connector 12 into the No. 1 three-way valve 6. At the same time, the airflow in the air cavity 14 will form a low-pressure area below the discharge port of the storage ring box 5, which is conducive to the abrasive inside the storage ring box 5 falling into the connector 12; when the abrasive passes through the connecting pipe 13, the abrasive is dispersed by multiple groups of dispersing blades 17, so that the abrasive is fully dispersed, reducing the condition of abrasive sticking; The abrasive enters the No. 1 three-way valve 6. At the same time, high-pressure gas is delivered to the No. 1 three-way valve 6. The high-pressure gas carries the granular abrasive through the cooling pipe 4. The granular abrasive hits the impurities and dirt in the cooling pipe 4, so that the impurities and dirt are separated from the inner wall of the cooling pipe 4 and move to the inside of the recovery ring box 7 along with the air flow. The air flow passes through the filter 28 and enters the inside of the housing 27, and then is discharged from the recovery ring box 7 through the air outlet 24, while the abrasive and impurities and dirt remain in the inside of the recovery ring box 7. When the impurities and dirt inside the cooling pipe 4 are cleaned, the No. 1 three-way valve 6 is controlled to switch, disconnected from the storage ring box 5, and the conveying of the abrasive is cut off. At this time, the high-pressure gas is continued to be conveyed, so that the high-pressure gas continues to pass through the cooling pipe 4 to remove the residual abrasive in the cooling pipe 4. After that, the conveying of the high-pressure gas is stopped and the No. 2 three-way valve 8 is controlled to switch, disconnected from the recovery ring box 7; finally, the coolant is conveyed to the cooling pipe 4; Thus, the cooling pipe 4 is cleared and cleaned, the blockage of the cooling pipe 4 is reduced, and the cooling effect of the superconducting magnet 1 is ensured.

[0031] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A magnetically controlled CZ-type single crystal pulling device, comprising a superconducting magnet (1); the superconducting magnet (1) is arranged in a single crystal furnace; and is characterized in that: A cooling unit is provided on the outer periphery of the superconducting magnet (1); the cooling unit comprises two mounting ring plates (2) arranged at the top and bottom of the outer ring of the superconducting magnet (1); two annular water pipes (3) are fixedly connected to the adjacent sides of the two mounting ring plates (2); a plurality of pairs of cooling pipes (4) are arranged around the two mounting ring plates (2); the two ends of one cooling pipe (4) in each pair are connected to the two annular water pipes (3) in the inner ring; the two ends of the other cooling pipe (4) in each pair are connected to the two annular water pipes (3) in the outer ring; the cooling pipe (4) is connected to an external cooling system through a pipeline; and the flow directions of the coolant in the two annular water pipes (3) in each pair are opposite.

2. A magnetically controlled CZ-type single crystal pulling device according to claim 1, characterized in that: The cooling tubes (4) are of a corrugated structure; each pair of two cooling tubes (4) are arranged in parallel.

3. The magnetically controlled CZ-type single crystal pulling device according to claim 1, characterized in that: The outer ring of the bottom surface of the mounting ring plate (2) at the top is fixedly connected to a storage ring box (5); the interior of the storage ring box (5) is filled with granular abrasives; a No. 1 three-way valve (6) is connected between the top of the cooling tube (4) and the annular water pipe (3) at the top; the middle of the No. 1 three-way valve (6) is connected to the bottom discharge port of the storage ring box (5); the top of the No. 1 three-way valve (6) is connected to a high-pressure air pump through an air pipe; the outer ring of the top surface of the mounting ring plate (2) at the bottom is fixedly connected to a recovery ring box (7); a No. 2 three-way valve (8) is connected between the bottom of the cooling tube (4) and the annular water pipe (3) at the bottom; and the middle of the No. 2 three-way valve (8) is connected to the recovery ring box (7) through a pipeline.

4. The magnetically controlled CZ-type single crystal pulling device according to claim 3, characterized in that: The top outer ring of the No. 1 three-way valve (6) is fixedly connected with an annular air nozzle (9); the inner ring of the annular air nozzle (9) is surrounded by a plurality of nozzles (10), and the wind direction of the nozzles (10) is inclined downward; the top outer ring of the No. 1 three-way valve (6) is surrounded by a plurality of through holes (11); the annular air nozzle (9) is sleeved on the outer circumference of the through hole (11); the nozzles (10) pass through the through hole (11); and the annular air nozzle (9) is connected to the high-pressure air pump.

5. The magnetically controlled CZ-type single crystal pulling device according to claim 4, characterized in that: The bottom discharge port of the storage ring box (5) is connected to a connector (12); a connecting pipe (13) is connected between the connector (12) and the No. 1 three-way valve (6); an air cavity (14) is provided inside the connector (12) at one end away from the connecting pipe (13); a shunt pipe (15) is connected to one end of the air cavity (14) away from the connecting pipe (13); the other end of the shunt pipe (15) is connected to the annular air nozzle (9) through an air pipe; an annular air pipe (16) is provided on the outer side of the bottom of the storage ring box (5); the shunt pipe (15) is connected to the annular air pipe (16); and the annular air pipe (16) is connected to the high-pressure air pump.

6. The magnetically controlled CZ-pull single crystal device according to claim 5, characterized in that: A plurality of groups of dispersing blades (17) are fixedly connected around the interior of the connecting tube (13); the dispersing blades (17) of each group are arranged in an alternating manner.

7. The magnetically controlled CZ-type single crystal pulling device according to claim 3, characterized in that: A rotating ring (18) is slidably mounted in the inner cavity of the storage ring box (5); a plurality of push plates (19) are bolted to the bottom surface of the rotating ring (18); the bottom of the push plate (19) is in sliding contact with the bottom of the inner cavity of the storage ring box (5); the push plate (19) is arranged at an angle; a plurality of notches (20) are evenly arranged on the bottom of the push plate (19); a driving assembly is arranged on the outer side of the storage ring box (5), and the driving assembly drives the rotating ring (18) to rotate.

8. The magnetically controlled CZ-type single crystal pulling device according to claim 7, characterized in that: The driving assembly comprises a gear ring (21) fixedly connected to the outer ring of the rotating ring (18); a motor (22) is fixedly connected to the top surface of the mounting ring plate (2); a gear (23) is fixedly connected to the bottom of the output shaft of the motor (22); and the gear (23) is meshed with the gear ring (21).

9. The magnetically controlled CZ-type single crystal pulling device according to claim 3, characterized in that: The top surface of the recovery ring box (7) is evenly provided with a plurality of groups of air outlets (24); the plurality of groups of air outlets (24) and the plurality of pairs of cooling pipes (4) are alternately distributed; a filter assembly is provided between two adjacent groups of air outlets (24); a plurality of cleaning ports (25) are provided around the outer ring of the recovery ring box (7); the cleaning ports (25) correspond to the cooling pipes (4); and a sealing baffle (26) is bolted to the outer side of the cleaning port (25).

10. The magnetically controlled CZ-pull single crystal device according to claim 9, characterized in that: The filter assembly comprises a shell (27) bolted to the inside of the recovery ring box (7); filter screens (28) are fixedly connected to both sides of the shell (27); and a through hole corresponding to the air outlet (24) is provided on the middle top surface of the shell (27).

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