Vacuum pump with high pumping rate

Abstract

The invention relates to the technical field of vacuum pumps, in particular to a vacuum pump with a high air exhaust rate, which comprises a vacuum pump body and further comprises a buffer assembly arranged below the vacuum pump body, a supporting cushion block used for placing the vacuum pump body is arranged at the upper end of the buffer assembly, and a cooling assembly is arranged on the outer side of the vacuum pump body. Through the arrangement of the heat dissipation fins, the heat dissipation area can be increased, heat dissipation can be accelerated, the transverse heat dissipation fan is arranged to conduct air cooling heat dissipation on the heat dissipation fins on the upper side, the two vertical heat dissipation fans are arranged to conduct air cooling heat dissipation on the heat dissipation fins on the three faces of the U-shaped plate, and the heat dissipation effect is better; by arranging the transverse buffer structure and the vertical buffer structure, partial vibration caused when the vacuum pump body works is absorbed, the vibration amplitude of the vacuum pump body is reduced, the vacuum pump body is protected, aging damage of sealing parts on equipment is reduced, the air tightness of the equipment is guaranteed, and the air exhaust performance of the vacuum pump body is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum pumps, and in particular to a vacuum pump with a high pumping rate. Background Art

[0002] The vacuum pump is a rotary variable displacement vacuum pump that must be used with a fore pump in a wide pressure range. It has a high pumping speed and is insensitive to dust and water vapor in the gas being pumped. Vacuum pumps are widely used in plastic machinery, pesticide chemicals, dye chemicals, brick and tile machinery, cryogenic equipment, papermaking machinery, pharmaceutical chemicals, food machinery, industrial electric furnaces, electronics industry, vacuum equipment, fertilizers, metallurgy, petroleum, mining, foundation treatment and other fields.

[0003] In the prior art, the vacuum pump's vacuum performance is positively correlated with its rotation speed. When the rotation speed is higher, the vacuum pumping speed is greater and the vacuum pumping effect is better. When the rotation speed decreases, the vacuum pumping performance will drop significantly. In order to meet the demand for high vacuum performance, the market is currently pursuing vacuum pumps with high vacuum pumping rates.

[0004] However, existing high-speed vacuum pumps are unable to ensure their own working reliability while maintaining high-speed rotation of the screw. The main reason is that the internal temperature of the vacuum pump is easily increased due to friction when the vacuum pump moves at high speed. When the surface temperature of the vacuum pump increases, thermal expansion and contraction will cause wear of its internal components, thereby causing a decrease in the air extraction performance. In addition, high-speed movement will also cause greater vibrations and cause aging and damage to the sealing components on the equipment, thereby affecting the air tightness of the equipment and causing a decrease in the air extraction performance. Summary of the invention

[0005] In view of the above-mentioned shortcomings of the prior art, the present invention provides a vacuum pump with a high pumping rate, which can effectively solve the problem that the internal part of the prior art vacuum pump is easily heated up due to friction when moving at high speed. In addition, high-speed movement will also cause large vibrations and aging damage to the sealing components on the equipment.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: The present invention provides a vacuum pump with a high pumping rate, comprising a vacuum pump body, and also comprising a buffer assembly arranged below the vacuum pump body, wherein a support pad for placing the vacuum pump body is arranged at the upper end of the buffer assembly, and a cooling assembly is arranged on the outer side of the vacuum pump body: The buffer assembly comprises a base, a buffer cavity is formed at the upper end of the base, a buffer plate is slidably connected to the buffer cavity, and a transverse buffer structure and a vertical buffer structure are arranged in the buffer cavity; The cooling component includes a cooling plate arranged on the outer side of the vacuum pump body. The cooling plate is composed of a U-shaped plate and a plurality of heat dissipation fins. A让位槽 is provided on the cabinet body of the U-shaped plate and the plurality of heat dissipation fins. The shape of the U-shaped plate is adapted to the shape of the vacuum pump body, and the U-shaped plate is sleeved on the outer side of the vacuum pump body. The plurality of heat dissipation fins are all arranged at intervals and parallel to each other on the three outer side walls of the cooling plate. An auxiliary structure for accelerating the heat dissipation of the heat dissipation fins is also provided on the cooling plate.

[0007] According to the above-mentioned vacuum pump with a high pumping rate, the vacuum pump body includes a pump body. A connecting flange is arranged on the outer side of the pump body. The other end of the connecting flange is connected to a main pipeline. The pipe body of the main pipeline is successively communicated with a first docking branch pipe and a second docking branch pipe.

[0008] According to the above-mentioned vacuum pump with a high pumping rate, two guiding grooves are symmetrically opened on the inner side wall of the base. Two guiding blocks are symmetrically and fixedly connected to both sides of the buffer plate, and the guiding blocks are slidably connected to the guiding grooves.

[0009] According to the above-mentioned vacuum pump with a high pumping rate, the limiting groove is arranged with a narrow upper part and a wide lower part, and the shape of the sliding block is adapted to the shape of the limiting groove.

[0010] According to the above-mentioned vacuum pump with a high pumping rate, the transverse buffer structure includes two limiting grooves symmetrically opened in the base and communicated with the lower side of the buffer cavity. A sliding block is slidably connected to the limiting groove. A transverse buffer spring is fixedly connected between the sliding block and the limiting groove. The upper end of the sliding block is rotatably connected to a hinge rod. The upper end of the hinge rod is rotatably connected to the lower end of the buffer plate, and the two hinge rods are hinged to each other.

[0011] According to the above-mentioned vacuum pump with a high pumping rate, the vertical buffer structure includes a plurality of fixed cylinders fixedly connected to the inner bottom wall of the buffer cavity. A sliding cavity is opened at the upper end of each fixed cylinder. A sliding rod is slidably connected to the sliding cavity. The upper end of the sliding rod is fixedly connected to the lower end of the buffer plate. A plurality of vertical buffer springs are fixedly connected between the fixed cylinder and the buffer plate, and the plurality of vertical buffer springs are all arranged on the outer side of the sliding rod.

[0012] According to the above-mentioned vacuum pump with a high pumping rate, the auxiliary structure includes two connecting rods symmetrically and fixedly connected to the C-shaped plate. The other ends of the two connecting rods are fixedly connected together with a vertical plate. Two vertical sliding grooves are symmetrically formed on the vertical plate. A vertical reciprocating screw rod is rotatably connected in the vertical sliding groove. The vertical reciprocating screw rod is threadedly connected to a vertical sliding block. A vertical cooling fan is fixedly installed on the vertical sliding block. A horizontal sliding groove is also formed on the vertical plate. A horizontal reciprocating screw rod is rotatably connected in the horizontal sliding groove. The horizontal reciprocating screw rod is threadedly connected to a horizontal sliding block. A horizontal cooling fan is fixedly installed on the horizontal sliding block. A driving component is arranged on the vertical plate for driving the horizontal reciprocating screw rod and the two vertical reciprocating screw rods to rotate.

[0013] According to the above-mentioned vacuum pump with a high pumping rate, the driving component includes an installation box fixedly connected to the vertical plate. One end of the horizontal reciprocating screw rod passes through the side wall of the installation box and extends into the installation box. A rotary motor is fixedly installed outside the installation box, and the output end of the rotary motor is coaxially and fixedly connected to the horizontal reciprocating screw rod. A driving bevel gear is rotatably connected to the inner side wall of the installation box, and the driving bevel gear is fixedly sleeved on the outside of the horizontal reciprocating screw rod. A driven bevel gear meshing with the driving bevel gear is also rotatably connected to the inner side wall of the installation box. The driven bevel gear is coaxially fixedly connected with a connecting shaft, and the connecting shaft passes through the top wall of the installation box. The upper ends of the two vertical reciprocating screw rods both extend outside the vertical plate. Chain wheels are fixedly arranged on the outside of the connecting shaft and the two vertical reciprocating screw rods. A chain is rotatably sleeved on the outside of the plurality of chain wheels.

[0014] According to the above-mentioned vacuum pump with a high pumping rate, the shapes of the vertical sliding groove and the horizontal sliding groove are both square, and the vertical sliding block and the horizontal sliding block are respectively slidably connected to the vertical sliding groove and the horizontal sliding groove.

[0015] The technical solution provided by the present invention has the following beneficial effects compared with the known prior art: 1. Through the setting of the heat dissipation fins, the present invention can increase the heat dissipation area and accelerate heat dissipation. By setting a horizontal cooling fan to perform air-cooled heat dissipation on the upper heat dissipation fins, and two vertical cooling fans to perform air-cooled heat dissipation on the three-sided heat dissipation fins of the C-shaped plate, the heat dissipation effect is better, and the heat dissipation efficiency is further improved, reducing the component wear caused by the temperature rise inside the vacuum pump body and ensuring the pumping performance of the vacuum pump body.

[0016] 2. The present invention sets a transverse buffer structure and a vertical buffer structure. When the vacuum pump vibrates, multiple vertical buffer springs and transverse buffer springs are continuously compressed and reset. During the continuous compression and reset process of the multiple vertical buffer springs and transverse buffer springs, part of the vibration caused by the operation of the vacuum pump body is absorbed, the vibration amplitude of the vacuum pump body is reduced, the vacuum pump body is protected, the aging damage of the sealing components on the equipment is reduced, the airtightness of the equipment is ensured, and the exhaust performance of the vacuum pump body is ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a schematic structural diagram of a vacuum pump with a high pumping rate proposed by the present invention; Figure 2 for Figure 1 A schematic diagram of the structure of the buffer component; Figure 3 for Figure 2 The structural diagram of the enlarged part A in the middle; Figure 4 for Figure 1 Schematic diagram of the structure of the vacuum pump body; Figure 5 for Figure 1 A schematic diagram of the structure of the cooling assembly; Figure 6 for Figure 5 Schematic diagram of the structure inside the installation box.

[0019] Figure numerals: 1, buffer assembly; 11, base; 12, guide groove; 13, buffer plate; 14, limit groove; 15, sliding block; 16, transverse buffer spring; 17, hinge rod; 18, fixed cylinder; 19, sliding cavity; 110, sliding rod; 111, vertical buffer spring; 2, support pad; 3, vacuum pump body; 31, pump body; 32, connecting flange; 33, main pipeline; 34, first docking branch pipe; 35, second docking branch pipe; 4, cooling assembly; 41, Cooling plate; 411, shaped plate; 412, cooling fins; 413, give way groove; 42, auxiliary structure; 421, vertical plate; 422, vertical slide groove; 423, horizontal slide groove; 424, vertical reciprocating screw rod; 425, horizontal reciprocating screw rod; 426, vertical cooling fan; 427, horizontal cooling fan; 428, installation box; 429, driving bevel gear; 430, driven bevel gear; 431, connecting shaft; 432, sprocket; 433, chain; 434, rotating motor. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] The present invention will be further described below in conjunction with the embodiments.

[0022] Example: Refer to Figures 1 to 6 A vacuum pump with a high pumping rate includes a vacuum pump body 3, the vacuum pump body 3 includes a pump body 31, a connecting flange 32 is arranged on the outer side of the pump body 31, the other end of the connecting flange 32 is connected to a main pipeline 33, the pipe body of the main pipeline 33 is connected with a first docking branch pipe 34 and a second docking branch pipe 35 in sequence, the vacuum pump body 3 is an existing well-known technology, and its specific structure and principle are not elaborated in detail here.

[0023] It also includes a buffer component 1 arranged below the vacuum pump body 3. Specifically, the buffer component 1 includes a base 11. A buffer cavity is provided at the upper end of the base 11. A buffer plate 13 is slidably connected to the buffer cavity. Two guide grooves 12 are symmetrically provided on the inner wall of the base 11. Two guide blocks are symmetrically fixedly connected on both sides of the buffer plate 13, and the guide blocks are slidably connected to the guide grooves 12. By setting the guide blocks slidably connected to the guide grooves 12, guidance can be provided for the sliding of the buffer plate 13 to ensure stable movement of the buffer plate 13.

[0024] A transverse buffer structure and a vertical buffer structure are arranged in the buffer cavity. By arranging the transverse buffer structure and the vertical buffer structure, the buffer plate 13 is buffered. The buffer plate 13 is buffered both transversely and vertically at the same time, thereby further increasing the buffering effect. When the vacuum pump body 3 vibrates, the transverse buffer structure and the vertical buffer structure can absorb part of the vibration, thereby reducing the vibration amplitude of the vacuum pump body 3 and protecting the vacuum pump body 3.

[0025] The transverse buffer structure includes two limiting grooves 14 symmetrically opened in the base 11 and connected to the lower side of the buffer cavity. The limiting groove 14 is slidably connected with a sliding block 15. A transverse buffer spring 16 is fixedly connected between the sliding block 15 and the limiting groove 14. The upper end of the sliding block 15 is rotatably connected with a hinged rod 17. The upper end of the hinged rod 17 is rotatably connected to the lower end of the buffer plate 13, and the two hinged rods 17 are hingedly arranged. When the vacuum pump body 3 vibrates during operation, the buffer plate 13 is displaced in the vertical direction, and the angle between the two hinged rods 17 changes, which pushes the sliding block 15 to move horizontally, driving the multiple transverse buffer springs 16 to be continuously compressed and reset. During the continuous compression and reset process of the multiple transverse buffer springs 16, part of the vibration caused by the operation of the vacuum pump body 3 is absorbed.

[0026] The limiting groove 14 is narrow at the top and wide at the bottom, and the shape of the sliding block 15 is matched with the shape of the limiting groove 14 to ensure that the sliding block 15 will not separate from the limiting groove 14 .

[0027] The vertical buffer structure includes a plurality of fixed cylinders 18 fixedly connected to the inner bottom wall of the buffer cavity, and a sliding cavity 19 is opened at the upper end of the fixed cylinder 18. The sliding cavity 19 is slidably connected to a sliding rod 110. The upper end of the sliding rod 110 is fixedly connected to the lower end of the buffer plate 13, and a plurality of vertical buffer springs 111 are fixedly connected between the fixed cylinder 18 and the buffer plate 13, and the plurality of vertical buffer springs 111 are all arranged on the outer side of the sliding rod 110. The vacuum pump body 3 will cause large vibration when working. When vibrating, the sliding rod 110 is driven to slide in the sliding cavity 19 as the buffer plate 13 vibrates, driving the plurality of vertical buffer springs 111 to be continuously compressed and reset. In the process of continuous compression and reset of the plurality of vertical buffer springs 111, the lateral buffer structure is cooperated to further absorb part of the vibration caused by the vacuum pump body 3 when working, further reducing the aging damage of the sealing components on the equipment, ensuring the air tightness of the equipment, and ensuring the air extraction performance.

[0028] A supporting pad 2 for placing a vacuum pump body 3 is provided at the upper end of the buffer assembly 1, and a cooling assembly 4 is provided on the outside of the vacuum pump body 3. Specifically, the cooling assembly 4 includes a cooling plate 41 provided on the outside of the vacuum pump body 3, and the cooling plate 41 is composed of a molded plate 411 and a plurality of cooling fins 412. The addition of the cooling fins 412 can increase the heat dissipation area and accelerate the heat dissipation.

[0029] The U-shaped plate 411 and multiple heat dissipation fins 412 are provided with a relief groove 413 on the cabinet body. The shape of the U-shaped plate 411 is adapted to the shape of the vacuum pump body 3, and the U-shaped plate 411 is sleeved on the outside of the vacuum pump body 3. The multiple heat dissipation fins 412 are all arranged at intervals and parallel to each other on the three outer side walls of the cooling plate 41. An auxiliary structure 42 for accelerating the heat dissipation of the heat dissipation fins 412 is also provided on the cooling plate 41. Specifically, the auxiliary structure 42 includes two connecting rods symmetrically and fixedly connected to the U-shaped plate 411. The other ends of the two connecting rods are commonly fixedly connected to a vertical plate 421. Two vertical sliding grooves 422 are symmetrically formed on the vertical plate 421. A vertical reciprocating screw rod 424 is rotatably connected in the vertical sliding groove 422. The vertical reciprocating screw rod 424 is threadedly connected to a vertical sliding block. A vertical heat dissipation fan 426 is fixedly installed on the vertical sliding block. A horizontal sliding groove 423 is also formed on the vertical plate 421. A horizontal reciprocating screw rod 425 is rotatably connected in the horizontal sliding groove 423. The horizontal reciprocating screw rod 425 is threadedly connected to a horizontal sliding block. A horizontal heat dissipation fan 427 is fixedly installed on the horizontal sliding block. The horizontal heat dissipation fan 427 is arranged to blow towards the heat dissipation fins 412, accelerating the heat dissipation of the heat dissipation fins 412. Due to the principle of heat transfer, heat always transfers from high to low, accelerating the heat dissipation of the vacuum pump body 3 and ensuring an appropriate temperature for the working environment of the vacuum pump body 3.

[0030] The shapes of the vertical sliding groove 422 and the horizontal sliding groove 423 are both square, and the vertical sliding block and the horizontal sliding block are respectively slidably connected to the vertical sliding groove 422 and the horizontal sliding groove 423, ensuring that when the horizontal reciprocating screw rod 425 and the vertical reciprocating screw rod 424 rotate, the vertical sliding block and the horizontal sliding block can displace along the directions of the vertical reciprocating screw rod 424 and the horizontal reciprocating screw rod 425 on the rod bodies of the vertical sliding groove 422 and the horizontal sliding groove 423.

[0031] A driving assembly for driving the horizontal reciprocating screw rod 425 and the two vertical reciprocating screw rods 424 to rotate is provided on the vertical plate 421. Specifically, the driving assembly includes an installation box 428 fixedly connected to the vertical plate 421. One end of the horizontal reciprocating screw rod 425 passes through the side wall of the installation box 428 and extends into the installation box 428. A rotating motor 434 is fixedly installed on the outer side of the installation box 428, and the output end of the rotating motor 434 is coaxially fixedly connected to the horizontal reciprocating screw rod 425. An active bevel gear 429 is rotatably connected to the inner side wall of the installation box 428, and the active bevel gear 429 is fixedly sleeved on the outer side of the horizontal reciprocating screw rod 425. The inner wall of the box 428 is also rotatably connected to the driven bevel gear 430 meshing with the active bevel gear 429. The driven bevel gear 430 is coaxially fixedly connected with a connecting shaft 431, and the connecting shaft 431 is arranged through the top wall of the installation box 428. The upper ends of the two vertical reciprocating screw rods 424 extend to the outside of the vertical plate 421. The connecting shaft 431 and the outer sides of the two vertical reciprocating screw rods 424 are fixedly provided with sprockets 432. The outer sides of multiple sprockets 432 are rotatably sleeved with chains 433. By arranging multiple sprockets 432 and chains 433, the rotation of the connecting shaft 431 can drive the two vertical reciprocating screw rods 424 to rotate together.

[0032] The specific working principle of the present invention is as follows: When dissipating heat, the molded plate 411 is sleeved from top to bottom on the outer side of the vacuum pump body 3. The stability of the cooling assembly 4 on the vacuum pump body 3 is ensured by the opening of the clearance groove 413, and the cooling assembly 4 is easy to be removed from the vacuum pump body 3. The heat dissipation area can be increased and the heat dissipation can be accelerated by the setting of the heat dissipation fins 412. By setting a transverse heat dissipation fan 427, the upper heat dissipation fins 412 are cooled by air, and the heat dissipation effect is significant, and the heat dissipation efficiency is improved. The rotating motor 434 drives the transverse reciprocating screw rod 425 to rotate. On the one hand, it drives the transverse heat dissipation fan 427 to move back and forth horizontally, increases the blowing range of the transverse heat dissipation fan 427, and performs full-range air cooling on the upper heat dissipation fins 412, and the heat dissipation effect is better. On the other hand, it drives the active bevel gear 429 to engage the driven bevel gear 430, and drives the vertically arranged connecting shaft 431 to rotate. By setting a plurality of sprockets 432 and chains 433, the rotation of the connecting shaft 431 can drive the two vertical reciprocating screw rods 424 to rotate together, drive the two vertical reciprocating screw rods 424 to rotate, and drive the two vertical heat dissipation fans 426 to move back and forth vertically, so as to blow air to the heat dissipation fins 412 on both sides, and the heat dissipation effect is better, and the heat dissipation efficiency is further improved. The vacuum pump body 3 will cause greater vibration when working. During the vibration, the angle between the two hinged rods 17 changes, pushing the sliding block 15 to move horizontally, driving multiple transverse buffer springs 16 to be continuously compressed and reset. During the continuous compression and reset of multiple transverse buffer springs 16, part of the vibration caused by the vacuum pump body 3 when working is absorbed. At the same time, as the buffer plate 13 vibrates, the sliding rod 110 is driven to slide in the sliding cavity 19, driving multiple vertical buffer springs 111 to be continuously compressed and reset. During the continuous compression and reset of multiple vertical buffer springs 111, the vibration caused by the vacuum pump body 3 when working is further absorbed.

[0033] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum pump with a high pumping rate, comprising a vacuum pump body (3), characterized in that: It further includes a buffer assembly (1) arranged below the vacuum pump body (3). A support pad (2) for placing the vacuum pump body (3) is arranged at the upper end of the buffer assembly (1), and a cooling assembly (4) is arranged outside the vacuum pump body (3). The buffer assembly (1) includes a base (11). A buffer cavity is formed at the upper end of the base (11). A buffer plate (13) is slidably connected to the buffer cavity. A horizontal buffer structure and a vertical buffer structure are arranged in the buffer cavity. The cooling assembly (4) includes a cooling plate (41) arranged outside the vacuum pump body (3). The cooling plate (41) is composed of a U-shaped plate (411) and a plurality of heat dissipation fins (412). A让位槽 (413) is formed in the U-shaped plate (411) and the plurality of heat dissipation fins (412). The shape of the U-shaped plate (411) is adapted to the shape of the vacuum pump body (3), and the U-shaped plate (411) is sleeved outside the vacuum pump body (3). The plurality of heat dissipation fins (412) are all arranged at three outer side walls of the cooling plate (41) at intervals and in parallel. An auxiliary structure (42) for accelerating the heat dissipation of the heat dissipation fins (412) is further arranged on the cooling plate (41).

2. A vacuum pump with a high pumping rate according to claim 1, characterized in that: The vacuum pump body (3) includes a pump body (31). A connecting flange (32) is arranged outside the pump body (31). The other end of the connecting flange (32) is connected to a main pipeline (33). A first docking branch pipe (34) and a second docking branch pipe (35) are sequentially communicated on the pipe body of the main pipeline (33).

3. A vacuum pump with a high pumping rate according to claim 1, characterized in that: Two guide grooves (12) are symmetrically formed on the inner side wall of the base (11). Two guide blocks are symmetrically and fixedly connected to both sides of the buffer plate (13), and the guide blocks are slidably connected to the guide grooves (12).

4. A vacuum pump with a high pumping rate according to claim 1, characterized in that: The horizontal buffer structure includes two limiting grooves (14) symmetrically formed in the base (11) and communicated with the lower side of the buffer cavity. A sliding block (15) is slidably connected to the limiting groove (14). A horizontal buffer spring (16) is fixedly connected between the sliding block (15) and the limiting groove (14). The upper end of the sliding block (15) is rotatably connected to a hinged rod (17). The upper end of the hinged rod (17) is rotatably connected to the lower end of the buffer plate (13), and the two hinged rods (17) are hinged to each other.

5. A vacuum pump with a high pumping rate according to claim 4, characterized in that: The limiting groove (14) is arranged with a narrow upper part and a wide lower part, and the shape of the sliding block (15) is adapted to the shape of the limiting groove (14).

6. A vacuum pump with a high pumping rate according to claim 5, characterized in that: The vertical buffer structure includes a plurality of fixed cylinders (18) fixedly connected to the inner bottom wall of the buffer cavity. A sliding cavity (19) is formed at the upper end of each fixed cylinder (18). A sliding rod (110) is slidably connected to the sliding cavity (19). The upper end of the sliding rod (110) is fixedly connected to the lower end of the buffer plate (13). A plurality of vertical buffer springs (111) are fixedly connected between the fixed cylinder (18) and the buffer plate (13), and the plurality of vertical buffer springs (111) are all arranged outside the sliding rod (110).

7. A vacuum pump with a high pumping rate according to claim 1, characterized in that: The auxiliary structure (42) includes two connecting rods symmetrically and fixedly connected to the C-shaped plate (411). The other ends of the two connecting rods are commonly and fixedly connected to a vertical plate (421). Two vertical sliding grooves (422) are symmetrically formed in the vertical plate (421). A vertically reciprocating lead screw (424) is rotatably connected in the vertical sliding groove (422). The vertically reciprocating lead screw (424) is threadedly connected to a vertical sliding block. A vertical cooling fan (426) is fixedly installed on the vertical sliding block. A horizontal sliding groove (423) is further formed in the vertical plate (421). A horizontally reciprocating lead screw (425) is rotatably connected in the horizontal sliding groove (423). The horizontally reciprocating lead screw (425) is threadedly connected to a horizontal sliding block. A horizontal cooling fan (427) is fixedly installed on the horizontal sliding block. A driving assembly for driving the horizontally reciprocating lead screw (425) and the two vertically reciprocating lead screws (424) to rotate is provided on the vertical plate (421).

8. A vacuum pump with a high pumping rate according to claim 7, characterized in that: The driving assembly includes an installation box (428) fixedly connected to the vertical plate (421). One end of the horizontally reciprocating lead screw (425) extends through the side wall of the installation box (428) and into the installation box (428). A rotary motor (434) is fixedly installed outside the installation box (428), and the output end of the rotary motor (434) is coaxially and fixedly connected to the horizontally reciprocating lead screw (425). A driving bevel gear (429) is rotatably connected to the inner side wall of the installation box (428), and the driving bevel gear (429) is fixedly sleeved outside the horizontally reciprocating lead screw (425). A driven bevel gear (430) meshing with the driving bevel gear (429) is further rotatably connected to the inner side wall of the installation box (428). The driven bevel gear (430) is coaxially and fixedly connected to a connecting shaft (431), and the connecting shaft (431) passes through the top wall of the installation box (428). The upper ends of the two vertically reciprocating lead screws (424) both extend to the outside of the vertical plate (421). Chain wheels (432) are fixedly arranged on the outer sides of the connecting shaft (431) and the two vertically reciprocating lead screws (424). A chain (433) is rotatably sleeved on the outer sides of the plurality of chain wheels (432).

9. A vacuum pump with a high pumping rate according to claim 8, characterized in that: The shapes of the vertical sliding groove (422) and the horizontal sliding groove (423) are both square, and the vertical sliding block and the horizontal sliding block are respectively slidably connected to the vertical sliding groove (422) and the horizontal sliding groove (423).

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