Supply conveying device of high-purity chemicals for semiconductor chip manufacturing

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and discloses a high-purity chemical supply conveying device for semiconductor chip manufacturing, which comprises a middle through pipe and three groups of liquid storage tanks positioned on the outer side of the middle through pipe, the bottom ends of the three groups of liquid storage tanks are respectively provided with a communicating pipe I, a communicating pipe II and a communicating pipe III, and are respectively provided with a chemical conveying pump; the device further comprises multiple sets of supports located below the middle through pipe, drainage pipes are fixedly installed at the tops of the supports, and a third sealing cylinder is fixedly installed at one end of each drainage pipe. The device is used for receiving chemicals, the outer surface of the device is sleeved with a set of first sealing cylinders in a sealing mode, multiple sets of liquid inlets are formed in the outer surfaces of the first sealing cylinders and are connected with a first communicating pipe, a second communicating pipe and a third communicating pipe correspondingly, the liquid inlets correspond to multiple sets of liquid storage tanks, and a through pipe is rotated to drive a second coincidence opening to coincide or intersect with the three sets of liquid inlets correspondingly; therefore, the efficient function that one pipe has multiple purposes is achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor manufacturing, and in particular relates to a supply and delivery device for high-purity chemicals used in semiconductor chip manufacturing. Background Art

[0002] Semiconductor chips refer to semiconductor devices that can achieve certain functions by etching and wiring on semiconductor sheet materials. Common ones are silicon chips, computer chips and photovoltaic panels. Various high-purity chemicals are required for processing semiconductor chips, such as etching liquid, polishing liquid and cleaning liquid. This requires the use of a special high-purity chemical delivery device for manufacturing semiconductor chips to achieve the delivery of each high-purity chemical. The specific working method is to use a pump and a pipeline to pump different high-purity chemicals located in different liquid storage tanks into the output end of the pipeline to ensure the etching, grinding or cleaning of the semiconductor chip. These processes need to be carried out separately, that is, different high-purity chemicals cannot be mixed together. In the prior art, different pipelines are used to separately deliver various high-purity chemicals, but if these liquids adhere to the inner wall of the delivery pipeline for a long time, it will cause corrosion damage to the pipeline, because some impurities will remain in the high-purity chemicals, which will assist in destroying the inner wall of the pipeline. Therefore, the separately set pipeline delivery significantly increases the delivery cost of high-purity chemicals and increases the cleaning cost of the inner wall of the pipeline. The present invention is committed to designing a high-purity chemical supply and delivery device with multiple uses in one tube to overcome the above defects. Summary of the invention

[0003] The object of the present invention is to provide a supply and delivery device for high-purity chemicals used in semiconductor chip manufacturing to solve the problems raised in the above-mentioned background technology.

[0004] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a supply and delivery device for high-purity chemicals used in semiconductor chip manufacturing, comprising a central tube and three groups of liquid storage tanks located outside the central tube, the bottom ends of the three groups of liquid storage tanks are respectively installed with connecting pipes 1, 2 and 3, and all are installed with chemical delivery pumps, and also includes multiple groups of brackets located below the central tube, the top of the brackets are fixedly installed with drainage pipes, one end of the multiple groups of drainage pipes is fixedly installed with sealing cylinders 3, the sealing sleeve of the sealing cylinder 3 is arranged at the bottom end of the central tube, and provides rotation support for the central tube, A sealing cylinder 1 is fixedly installed at one end of the connecting pipe 1, the connecting pipe 2 and the connecting pipe 3, and the sealing sleeve of the sealing cylinder 1 is arranged at the middle and upper part of the outer surface of the central tube. A liquid storage ring is fixedly installed on the top of the connecting pipe 1, the connecting pipe 2 and the connecting pipe 3, and a top plate and a motor are installed on the top of the sealing cylinder 2, and the output shaft of the motor is drivingly connected to the central tube. A liquid medicine delivery pump is installed on the outer side of the liquid storage ring, and a plurality of connecting pipes are fixedly connected to the inner side of the liquid storage ring. A sealing cylinder 2 is fixedly connected to one end of the connecting pipe, and the sealing sleeve of the sealing cylinder 2 is arranged on the top of the outer surface of the central tube.

[0005] The top of the outer surface of the central through tube is provided with three groups of liquid inlets distributed at equal angles, the outer surface of the sealing tube No. 2 is provided with three groups of overlapping openings distributed at equal angles, the liquid inlet and the overlapping opening No. 1 form an angle of 60°, the upper and middle part of the central through tube is provided with overlapping opening No. 2, the outer surface of the sealing tube No. 1 is provided with three groups of liquid inlets distributed at equal angles, the overlapping opening No. 2 overlaps with the liquid inlet located on the front side, the outer surface of the sealing tube No. 3 is fixedly connected with three groups of liquid outlet pipes distributed at equal angles, the liquid outlet pipe forms an angle of 60° with the drain pipe, and the bottom end of the liquid outlet pipe is fixedly connected with a liquid outlet tube.

[0006] As a preferred solution of the present invention, the top of the inner wall of the through tube is elastically connected with a spring, and the sealing sleeve is provided with a piston located below the spring, the top of the piston is elastically connected to the spring, the top of the piston is provided with a slot, the inner wall of the slot is provided with a drainage hole extending through to the outside of the piston, the bottom of the piston is fixedly connected with a scraper ring abutting against the inner wall of the through tube, the piston is located below the liquid inlet and above the overlap port 2, a drainage port is provided at the bottom of the front side of the through tube, and three groups of liquid receiving ports and liquid discharge ports are provided on the outer surface of the sealing tube 3.

[0007] As a preferred solution of the present invention, the drainage holes are arranged in two groups, upper and lower. Each group of drainage holes is arranged with eight holes at equal angles, and the drainage holes are designed to be inclined downward.

[0008] As a preferred solution of the present invention, a limiting column is fixedly installed at the bottom of the inner wall of the slot, the axial cross-section of the limiting column is "T" shaped, and the top diameter of the limiting column is greater than the inner diameter of the slot.

[0009] As a preferred solution of the present invention, the diameter value of the liquid inlet is greater than the diameter value of the overlap port 1, the overlap port 1 is connected to the connecting pipe, the liquid inlet is located at 0°, 120° and 240° of the top of the outer surface of the middle tube, and the overlap port 1 corresponds to the positions of 60°, 180° and 300° of the top of the outer surface of the middle tube.

[0010] As a preferred solution of the present invention, the overlap port 2 is located at 180° in the middle and upper part of the outer surface of the middle tube, and the liquid inlet corresponds to the positions of 60°, 180° and 300° in the middle and upper part of the outer surface of the middle tube, and the three groups of liquid inlets are respectively connected to connecting tube 1, connecting tube 2 and connecting tube 3.

[0011] As a preferred solution of the present invention, the drain outlet is located at 180° of the bottom of the outer surface of the central tube, the drainage outlet corresponds to the positions of 0°, 120° and 240° of the bottom of the outer surface of the central tube, and the drain outlet corresponds to the positions of 60°, 180° and 300° of the bottom of the outer surface of the central tube.

[0012] As a preferred solution of the present invention, the bottom of the inner ring surface of the scraper ring is designed to be inclined and maintains a sealed contact with the inner wall of the central through pipe.

[0013] The beneficial effects of the present invention are as follows:

[0014] 1. The device can realize the multi-purpose functions of a set of central tubes, and respectively correspond to different high-purity chemicals connected by connecting tube 1, connecting tube 2 and connecting tube 3. A bracket, a drain pipe and a sealing cylinder 3 are provided to provide sealing and rotating support for the central tube. At the same time, multiple groups of liquid outlet pipes are installed on the outer surface of the sealing cylinder 3, and the connecting liquid outlet cylinder is used as the output end of the chemical. A group of overlapping ports 2 are opened in the middle and upper part of the outer surface of the central tube for receiving chemicals. A group of sealing cylinder 1 is provided on the sealing sleeve of its outer surface. Multiple groups of liquid inlets are opened on the outer surface of the sealing cylinder 1, and are respectively connected to connecting tube 1, connecting tube 2 and connecting tube 3, corresponding to multiple groups of liquid storage tanks. By rotating the central tube, the overlapping port 2 is driven to overlap or interlace with the three groups of liquid inlets respectively, so as to realize the connection with connecting tube 1, connecting tube 2 or connecting tube 3, thereby realizing the high-efficiency function of one tube for multiple purposes.

[0015] 2. Then, the liquid storage ring, connecting pipe, sealing cylinder 2 and liquid delivery pump located on the top of the outer surface of the middle tube are used to introduce high-pressure cleaning liquid, so that each time the middle tube is transported from the liquid storage tank, it can be consumed, flushed and cleaned in time for chemical reaction. Specifically, the liquid inlet is divided into three groups and opened on the top of the outer surface of the middle tube, and the sealing cylinder 2 is put on. The outer surface of the sealing cylinder 2 is provided with three groups of overlapping ports 1 staggered with the liquid inlet. After the middle tube completes the first rotation, it continues to rotate, so that the overlapping port 2 is just closed, and the overlapping port 1 is connected to the liquid inlet. At the same time, at the bottom of the central tube, the distribution of the drain port and the liquid collection port is the same as that of the liquid inlet and the overlap port, thereby forming a complete high-pressure cleaning liquid flow channel. The high-pressure cleaning liquid flushes the inner wall of the central tube from top to bottom, reacts with and consumes the chemical residues attached to the inner wall of the central tube to form a reaction liquid mixture, and then flushes the inner wall of the central tube under the pressure of the mixed liquid, which can prevent the impurities of different high-purity chemicals and their mixtures from remaining in the central tube for a long time, effectively protect the inner wall of the central tube, and extend the service life of the device.

[0016] 3. The device also has a piston installed on the top of the inner wall of the through tube, so that the high-pressure cleaning liquid from the liquid delivery pump can continuously push the piston downward with the assistance of the limit column, and generate a restoring elastic force by stretching the spring. During the downward movement of the piston, the scraper ring can be driven to scrape the inner wall of the through tube, so as to remove the residual chemicals on the surface of the inner wall of the through tube and the mixture produced by the reaction of the chemicals and the high-pressure cleaning liquid. At the same time, by opening a plurality of groups of downwardly inclined drainage holes on the outer surface of the piston, the high-pressure cleaning liquid can increase its flow rate by reducing its passing area and be obliquely injected toward the inner wall of the through tube. This design can assist the scraper ring to first perform high-pressure flushing on the inner wall of the through tube, and then combine with the rigid scraping of the scraper ring to thoroughly clean the impurities remaining on the inner wall of the through tube, effectively improving the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the front appearance of the structure of the present invention;

[0018] Figure 2 It is a three-dimensional schematic diagram of the structure of the present invention;

[0019] Figure 3 It is a partial structural schematic diagram of the through pipe, connecting pipe 1, connecting pipe 2, connecting pipe 3, sealing cylinder 1, liquid storage ring, connecting pipe, sealing cylinder 2, top plate, motor, bracket, drain pipe, sealing cylinder 3, liquid outlet pipe and liquid outlet cylinder in the present invention;

[0020] Figure 4 It is a partial cutaway schematic diagram of the front side of the structure of the present invention;

[0021] Figure 5It is a side partial cutaway schematic diagram of the structure of the present invention;

[0022] Figure 6 It is a top view schematic cross-sectional view of the through pipe, liquid storage ring and connecting pipe in the present invention;

[0023] Figure 7 It is a top view and cross-sectional schematic diagram of the through pipe, the connecting pipe 1, the connecting pipe 2, the connecting pipe 3 and the sealing cylinder 1 in the present invention;

[0024] Figure 8 It is a top view cross-sectional schematic diagram of the through pipe, the drain pipe, the sealing cylinder and the liquid outlet pipe in the present invention;

[0025] Fig. 9 It is a schematic diagram of the separation of the through pipe, the bracket, the drain pipe, the sealing cylinder 3, the liquid outlet pipe and the liquid outlet cylinder in the present invention;

[0026] Fig.10 It is a schematic diagram of the separation of the through pipe, connecting pipe 1, connecting pipe 2, connecting pipe 3, sealing cylinder 1, liquid storage ring, connecting pipe, sealing cylinder 2, top plate, motor, spring, piston, limit column and scraper ring in the present invention.

[0027] In the figure: 1, central tube; 2, liquid storage tank; 3, connecting tube 1; 4, connecting tube 2; 5, connecting tube 3; 6, sealing tube 1; 7, liquid storage ring; 8, connecting tube; 9, sealing tube 2; 10, liquid delivery pump; 11, top plate; 12, motor; 13, bracket; 14, drain pipe; 15, sealing tube 3; 16, liquid outlet pipe; 17, liquid outlet tube; 18, chemical delivery pump; 19, spring; 20, piston; 21, slot; 22, drain hole; 23, limit column; 24, scraper ring; 25, liquid inlet; 26, overlap port 1; 27, liquid inlet; 28, overlap port 2; 29, liquid collection port; 30, drain port; 31, liquid discharge port. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figures 1 to 10As shown, an embodiment of the present invention provides a supply and delivery device for high-purity chemicals used in semiconductor chip manufacturing, including a central tube 1 and three groups of liquid storage tanks 2 located outside the central tube 1, the bottom ends of the three groups of liquid storage tanks 2 are respectively installed with connecting pipes 1 3, connecting pipes 2 4 and connecting pipes 3 5, and each is installed with a chemical delivery pump 18, and also includes multiple groups of brackets 13 located below the central tube 1, the top of the brackets 13 is fixedly installed with drainage pipes 14, one end of the multiple groups of drainage pipes 14 is fixedly installed with sealing cylinders 3 15, the sealing sleeve of the sealing cylinder 3 15 is arranged at the bottom end of the central tube 1, and provides rotation support for the central tube 1, the connecting pipes 14 are connected to the central tube 1, and the connecting pipes 14 are connected to the central tube 1. A sealing cylinder 6 is fixedly installed at one end of the pipe 1, the connecting pipe 2, 4 and the connecting pipe 3, and the sealing sleeve of the sealing cylinder 6 is arranged at the middle and upper part of the outer surface of the middle tube 1. A liquid storage ring 7 is fixedly installed on the top of the connecting pipe 1, the connecting pipe 2, 4 and the connecting pipe 3, and a top plate 11 and a motor 12 are installed on the top of the sealing cylinder 29. The output shaft of the motor 12 is connected to the middle tube 1 in a transmission connection. A liquid medicine delivery pump 10 is installed on the outer side of the liquid storage ring 7. A plurality of connecting pipes 8 are fixedly connected to the inner side of the liquid storage ring 7. A sealing cylinder 29 is fixedly connected at one end of the connecting pipe 8. The sealing sleeve of the sealing cylinder 29 is arranged at the top of the outer surface of the middle tube 1.

[0030] The top of the outer surface of the central through tube 1 is provided with three groups of liquid inlets 25 distributed at equal angles, the outer surface of the sealing cylinder 29 is provided with three groups of overlapping ports 1 26 distributed at equal angles, the liquid inlet 25 and the overlapping ports 1 26 are at an angle of 60°, the middle and upper part of the central through tube 1 is provided with overlapping ports 28, the outer surface of the sealing cylinder 1 6 is provided with three groups of liquid inlets 27 distributed at equal angles, the overlapping ports 28 overlap with the liquid inlet 27 located at the front, the outer surface of the sealing cylinder 3 15 is fixedly connected with three groups of liquid outlet pipes 16 distributed at equal angles, the liquid outlet pipes 16 are at an angle of 60° with the drain pipe 14, and the bottom end of the liquid outlet pipe 16 is fixedly connected with the liquid outlet cylinder 17;

[0031] The present device can realize the multi-purpose functions of a set of central through tubes 1, and respectively correspond to different high-purity chemicals connected to connecting tubes one 3, connecting tubes two 4 and connecting tubes three 5. A bracket 13, a drain pipe 14 and a sealing cylinder three 15 are provided to provide sealing and rotating support for the central through tube 1. At the same time, multiple groups of liquid outlet pipes 16 are installed on the outer surface of the sealing cylinder three 15, and the connecting liquid outlet cylinder 17 is used as the output end of the chemical. A group of overlapping ports two 28 are opened in the middle and upper part of the outer surface of the central through tube 1 for receiving chemicals. A group of sealing cylinders one 6 is provided on the sealing sleeve of the outer surface thereof. Multiple groups of liquid inlets 27 are opened on the outer surface of the sealing cylinder one 6, and are respectively connected to connecting tubes one 3, connecting tubes two 4 and connecting tubes three 5, corresponding to multiple groups of liquid storage tanks 2. By rotating the central through tube 1, the overlapping ports two 28 are driven to overlap or interlace with the three groups of liquid inlets 27 respectively, so as to realize the connection with connecting tube one 3, connecting tube two 4 or connecting tube three 5, thereby realizing the high-efficiency function of one tube for multiple purposes.

[0032] Then, a high-pressure cleaning liquid is introduced by using a liquid storage ring 7, a connecting pipe 8, a sealing cylinder 2 9 and a liquid delivery pump 10 located on the top of the outer surface of the central tube 1, so that each time the central tube 1 is transported from the liquid storage tank 2, it can be consumed, flushed and cleaned in a timely manner by chemical reaction. Specifically, the liquid inlet 25 is divided into three groups and opened on the top of the outer surface of the central tube 1, and a sealing cylinder 2 9 is put on. The outer surface of the sealing cylinder 2 9 is provided with three groups of overlapping ports 1 26 staggered 60° with the liquid inlet 25. After the central tube 1 completes the first 60° rotation, it continues to rotate 60°, thereby just closing the overlapping port 28, and the overlapping port 1 26 and the liquid inlet 25 are staggered 60°. The liquid inlet 25 is connected, and at the same time, at the bottom end of the middle tube 1, the distribution of the drain port 30 and the liquid receiving port 29 is also the same as the distribution of the liquid inlet 25 and the overlap port 26, thereby forming a complete high-pressure cleaning liquid flow channel. The high-pressure cleaning liquid flushes the inner wall of the middle tube 1 from top to bottom, reacts with and consumes the chemical residues attached to the inner wall of the middle tube 1 to form a reaction liquid mixture, and then flushes the inner wall of the middle tube 1 under the pressure of the mixed liquid, which can prevent the impurities of different high-purity chemicals and their mixtures from remaining in the middle tube 1 for a long time, effectively protects the inner wall of the middle tube 1, and extends the service life of the device.

[0033] Note: Chemicals used in semiconductor manufacturing generally have special cleaning solutions to react chemically with them and consume them to eliminate the corrosive function of the chemicals. In this case, it is reasonable to use chemical solutions for auxiliary cleaning. The chemical reaction formula and related principles between chemicals and cleaning solutions can be learned by technicians through existing technologies, so they will not be repeated in this case.

[0034] Among them, the top of the inner wall of the through tube 1 is elastically connected with a spring 19, and the sealing sleeve is provided with a piston 20 located below the spring 19, the top of the piston 20 is elastically connected to the spring 19, the top of the piston 20 is provided with a card slot 21, the inner wall of the card slot 21 is provided with a drainage hole 22 that penetrates to the outside of the piston 20, the bottom of the piston 20 is fixedly connected with a scraper ring 24 that abuts against the inner wall of the through tube 1, the piston 20 is located below the liquid inlet 25 and above the overlap port 28, the bottom of the front of the through tube 1 is provided with a drainage port 30, and the outer surface of the sealing cylinder 3 15 is provided with three groups of liquid receiving ports 29 and drainage ports 31;

[0035] The device also has a piston 20 installed on the top of the inner wall of the central tube 1, so that the high-pressure cleaning liquid from the liquid delivery pump 10 can continuously push the piston 20 downward with the assistance of the limit column 23, and generate a restoring elastic force by stretching the spring 19. During the downward movement of the piston 20, the scraper ring 24 can be driven to scrape the inner wall of the central tube 1, so as to remove the residual chemicals on the surface of the inner wall of the central tube 1 and the mixture produced by the reaction of the chemicals and the high-pressure cleaning liquid. At the same time, by providing a plurality of groups of downwardly inclined drainage holes 22 on the outer surface of the piston 20, the high-pressure cleaning liquid can increase its flow rate by reducing its passing area, and be obliquely injected toward the inner wall of the central tube 1. This design can assist the scraper ring 24 to first perform high-pressure flushing on the inner wall of the central tube 1, and then combine with the rigid scraping of the scraper ring 24, so that the impurities remaining on the inner wall of the central tube 1 can be thoroughly cleaned, effectively improving the practicality of the device.

[0036] The drainage holes 22 are arranged in two groups, each group of drainage holes 22 is arranged in eight equal angles, and the drainage holes 22 are designed to be tilted downward;

[0037] The downwardly inclined drainage hole 22 can guide the high-pressure cleaning liquid to the inner wall of the central tube 1, and by reducing the flow area, increase the liquid flow rate, and improve the spray force of the high-pressure cleaning liquid on the inner wall of the central tube 1.

[0038] A limiting column 23 is fixedly installed at the bottom of the inner wall of the slot 21. The axial cross-section of the limiting column 23 is in a "T" shape. The top diameter of the limiting column 23 is greater than the inner diameter of the slot 21.

[0039] The “T”-shaped limit column 23 can provide a certain degree of obstruction to the high-pressure cleaning liquid flowing from top to bottom, thereby assisting the pressure of the high-pressure cleaning liquid to act on the piston 20, assisting the piston 20 to move downward synchronously, and completing the cleaning work of the inner wall of the through tube 1.

[0040] Among them, the diameter value of the liquid inlet 25 is greater than the diameter value of the coincidence port 26, the coincidence port 26 is connected to the connecting pipe 8, the liquid inlet 25 is located at 0°, 120° and 240° of the top of the outer surface of the middle through tube 1, and the coincidence port 26 corresponds to the positions of 60°, 180° and 300° of the top of the outer surface of the middle through tube 1;

[0041] The high-pressure cleaning liquid from the liquid delivery pump 10 enters the middle tube 1 through the liquid inlet 25. When the middle tube 1 rotates 0°, 120° or 240°, the liquid inlet 25 and the overlap port 1 26 are interlaced and sealed. At this time, the high-pressure cleaning liquid cannot enter the middle tube 1. However, when the middle tube 1 passes through the gaps between the connecting tube 1 3, the connecting tube 2 4 and the connecting tube 3 5 at 60°, 180° and 300°, the liquid inlet 25 will overlap with the overlap port 1 26, opening the liquid inlet 25 to realize the liquid inlet function of the cleaning mode.

[0042] Among them, the second overlap port 28 is located at 180° in the middle and upper part of the outer surface of the middle through tube 1, and the liquid inlet 27 corresponds to the positions of 60°, 180° and 300° in the middle and upper part of the outer surface of the middle through tube 1. The three groups of liquid inlet ports 27 are respectively connected to the connecting tube 1 3, the connecting tube 2 4 and the connecting tube 3 5;

[0043] There is only one group of overlapped ports 28, so that the central through pipe 1 can only be connected to one group of liquid storage tanks 2 at a time, so that a dedicated pipe is used for a specific state.

[0044] The drain port 30 is located at 180° of the bottom of the outer surface of the central tube 1, the drain port 31 corresponds to the positions of 0°, 120° and 240° of the bottom of the outer surface of the central tube 1, and the drain port 30 corresponds to the positions of 60°, 180° and 300° of the bottom of the outer surface of the central tube 1;

[0045] The drain port 30 has only two connection states: connecting with the liquid receiving port 29 to release the mixed liquid formed by the high-pressure cleaning liquid and the chemical reaction consumption, or connecting with the drain port 31 to release the high-purity chemical from the liquid storage tank 2.

[0046] The bottom of the inner ring surface of the scraper ring 24 is designed to be inclined, and is in sealed contact with the inner wall of the central through pipe 1;

[0047] The scraper ring 24 cooperates with the high-pressure liquid jet from the drainage hole 22, so that the inner wall of the central tube 1 can be completely renewed after each cleaning, which not only reduces the cost problem caused by the separate setting of the pipeline, but also improves the working efficiency of the device.

[0048] Working principle:

[0049] When the device is working, the three groups of liquid storage tanks 2 are respectively filled with different high-purity chemicals, such as etching liquid, polishing liquid and cleaning liquid, and are respectively connected to the connecting pipe 1 3, connecting pipe 2 4 and connecting pipe 3 5 and then flow into the central pipe 1;

[0050] First, the device transports the etching liquid, starts the chemical delivery pump 18 located on the outer surface of the connecting pipe 3, and draws the etching liquid in a group of liquid storage tanks 2 out of the connecting pipe 3. Figure 7 As shown, the etching liquid enters the middle through pipe 1 along the connecting pipe 1 3, the liquid inlet 27 and the coincidence port 2 28, and then flows downstream. At this time, the liquid receiving port 29 is connected with the drain port 30. The etching liquid passes through a group of drain ports 30 and the liquid receiving port 29, and then enters the liquid outlet cylinder 17 along the liquid outlet pipe 16 to complete the transportation;

[0051] Then, the chemical delivery pump 18 is turned off, the etching liquid supply is cut off, the cleaning mode is executed, the motor 12 is started, and the central tube 1 is driven to rotate 60° clockwise, as shown in FIG. Figures 6 to 8 As shown, the liquid inlet 25 rotates to a position where it overlaps and communicates with the overlap port 1 26, and the overlap port 28 rotates to a position that intersects with the liquid storage ring 7. At this time, the overlap port 28 is in a sealed state, and the drain port 30 rotates to a position where it overlaps and communicates with the drain port 31. The cleaning channel is opened, the liquid delivery pump 10 is turned on, and high-pressure cleaning liquid is introduced into the inner cavity of the liquid storage ring 7. The high-pressure cleaning liquid enters the central tube 1 through the connecting pipe 8, the overlap port 1 26 and the liquid inlet 25, and begins to generate a downward thrust on the limit column 23 and the piston 20. At the same time, the high-pressure cleaning liquid The cleaning liquid is sprayed downwardly toward the outside of the piston 20 through the card slot 21 and the drain hole 22, while flushing the inner wall of the through tube 1, and reacting with the chemical residues attached to the inner wall of the through tube 1, consuming the chemicals, and the piston 20 moves downward as a whole, and continuously stretches the spring 19. The piston 20 also drives the scraper ring 24 to scrape the inner wall of the through tube 1 downward, so that the mixed liquid formed by the reaction of the high-pressure cleaning liquid and the chemicals is discharged along the drain port 30, the drain port 31 and the drain pipe 14, thereby completing the cleaning of the inner wall of the through tube 1;

[0052] Then, the liquid medicine delivery pump 10 is turned off, the cleaning mode is stopped, the motor 12 is started again, and the central tube 1 is driven to rotate clockwise for another 60°. Figures 6 to 8 As shown, the liquid inlet 25 is re-interlaced with the overlap port 1 26, and the liquid inlet 25 is blocked, the overlap port 28 is rotated to a position overlapping with the second group of liquid inlet 27, and is connected with the connecting pipe 2 4, and the drain port 30 is rotated to a position overlapping with the liquid receiving port 29 again. At this time, the second group of chemical delivery pumps 18 are started, and the polishing liquid in the second group is delivered to the middle through pipe 1 through the connecting pipe 2 4;

[0053] Finally, the central tube 1 is rotated 60° in the clockwise direction to execute the cleaning mode, and then is rotated 60° further to connect the overlap port 28 with the third group of liquid inlets 27 to deliver the cleaning liquid from the third group.

[0054] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0055] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A supply and delivery device for high-purity chemicals used in semiconductor chip manufacturing, comprising a central through pipe (1) and three groups of liquid storage tanks (2) located outside the central through pipe (1), the bottom ends of the three groups of liquid storage tanks (2) are respectively equipped with a connecting pipe 1 (3), a connecting pipe 2 (4) and a connecting pipe 3 (5), and each of the three groups of liquid storage tanks (2) is equipped with a chemical delivery pump (18), characterized in that: It also includes a plurality of brackets (13) located below the central through pipe (1), a drainage pipe (14) being fixedly mounted on the top of the brackets (13), a sealing sleeve (15) being fixedly mounted on one end of the plurality of drainage pipes (14), the sealing sleeve (15) being sealed and sleeved at the bottom end of the central through pipe (1) and providing rotation support for the central through pipe (1), a sealing sleeve (6) being fixedly mounted on one end of the connecting pipe (3), the connecting pipe (4) and the connecting pipe (5), the sealing sleeve (6) being sealed and sleeved at the middle and upper part of the outer surface of the central through pipe (1), the connecting pipe (3), the connecting pipe (4) and the connecting pipe (5). A liquid storage ring (7) is fixedly installed on the top of the first tube (3), the second connecting tube (4) and the third connecting tube (5); a top plate (11) and a motor (12) are installed on the top of the second sealing tube (9); the output shaft of the motor (12) is drivingly connected to the middle tube (1); a liquid medicine delivery pump (10) is installed on the outer side of the liquid storage ring (7); a plurality of connecting tubes (8) are fixedly connected on the inner side of the liquid storage ring (7); one end of the connecting tube (8) is fixedly connected to the second sealing tube (9); the second sealing tube (9) is sealingly sleeved on the top of the outer surface of the middle tube (1); The top of the outer surface of the central through tube (1) is provided with three groups of liquid inlets (25) distributed at equal angles, the outer surface of the second sealing tube (9) is provided with three groups of overlapping openings (26) distributed at equal angles, the liquid inlet (25) and the overlapping opening (26) are at an angle of 60°, the upper middle portion of the central through tube (1) is provided with overlapping openings (28), the outer surface of the first sealing tube (6) is provided with three groups of liquid inlets (27) distributed at equal angles, the overlapping openings (28) overlap with the liquid inlet (27) located at the front, the outer surface of the third sealing tube (15) is fixedly connected with three groups of liquid outlet pipes (16) distributed at equal angles, the liquid outlet pipes (16) are at an angle of 60° with the drain pipe (14), and the bottom end of the liquid outlet pipe (16) is fixedly connected with the liquid outlet tube (17).

2. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 1, characterized in that: The top of the inner wall of the through tube (1) is elastically connected to a spring (19), and the sealing sleeve is provided with a piston (20) located below the spring (19). The top of the piston (20) is elastically connected to the spring (19). The top of the piston (20) is provided with a slot (21). The inner wall of the slot (21) is provided with a drainage hole (22) penetrating to the outside of the piston (20). The bottom of the piston (20) is fixedly connected with a scraper ring (24) abutting against the inner wall of the through tube (1). The piston (20) is located below the liquid inlet (25) and above the second overlap port (28). The bottom of the front of the through tube (1) is provided with a drainage port (30). The outer surface of the third sealing cylinder (15) is provided with three groups of liquid receiving ports (29) and liquid discharge ports (31).

3. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 2, characterized in that: The drainage holes (22) are arranged in two groups, one above the other. Each group of drainage holes (22) is arranged with eight holes at equal angles, and the drainage holes (22) are designed to be inclined downward.

4. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 3, characterized in that: A limiting column (23) is fixedly mounted on the bottom of the inner wall of the slot (21); the axial cross-section of the limiting column (23) is in a "T" shape; and the top diameter of the limiting column (23) is greater than the inner diameter of the slot (21).

5. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 4, characterized in that: The diameter of the liquid inlet (25) is greater than the diameter of the overlap port 1 (26), the overlap port 1 (26) is connected to the connecting pipe (8), the liquid inlet (25) is located at positions of 0°, 120° and 240° on the top of the outer surface of the central tube (1), and the overlap port 1 (26) corresponds to positions of 60°, 180° and 300° on the top of the outer surface of the central tube (1).

6. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 5, characterized in that: The second overlap port (28) is located at a position of 180° in the middle and upper part of the outer surface of the central through tube (1), and the liquid inlet ports (27) correspond to positions of 60°, 180° and 300° in the middle and upper part of the outer surface of the central through tube (1). The three groups of liquid inlet ports (27) are respectively connected to the connecting tube one (3), the connecting tube two (4) and the connecting tube three (5).

7. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 6, characterized in that: The drain port (30) is located at a position of 180° to the bottom of the outer surface of the central tube (1), the drainage port (31) corresponds to positions of 0°, 120° and 240° to the bottom of the outer surface of the central tube (1), and the drain port (30) corresponds to positions of 60°, 180° and 300° to the bottom of the outer surface of the central tube (1).

8. The supply and delivery device for high-purity chemicals for semiconductor chip manufacturing according to claim 7, characterized in that: The bottom of the inner ring surface of the scraper ring (24) is designed to be inclined and maintains sealing contact with the inner wall of the central through pipe (1).

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