Waste heat utilization device of semiconductor constant-temperature and constant-humidity air supply device

Abstract

The invention relates to the technical field of waste heat utilization of constant-temperature equipment for semiconductor production, in particular to a waste heat utilization device of a semiconductor constant-temperature and constant-humidity air supply device. According to the technical scheme, the waste heat utilization device of the semiconductor constant-temperature and constant-humidity air supply device comprises a waste heat recycling type constant-temperature and constant-humidity assembly and further comprises an air purification assembly; an air purification assembly is arranged at the rear end of the waste heat recycling type constant-temperature and constant-humidity assembly. The radiator and the heat pipe are connected and then are arranged behind the condensation dehumidifier, so that heat generated by the radiator heats dehumidified cold air, the waste heat utilization rate of air heating is effectively increased, the energy utilization efficiency is greatly improved, and the situation that additional electric heating equipment is additionally arranged, so that the machining cost and the equipment size are increased is avoided; the overall energy consumption of the device is reduced;

Description

Technical Field

[0001] The invention belongs to the technical field of waste heat utilization of constant temperature equipment in semiconductor production, and in particular relates to a waste heat utilization device of a semiconductor constant temperature and humidity air supply device. Background Art

[0002] Constant temperature and humidity devices can provide semiconductor products with a precisely controlled temperature and humidity environment, simulating their conditions in different usage scenarios, which is crucial to ensuring the stability of the production environment and product quality.

[0003] However, existing temperature and humidity air conditioning devices for semiconductor production usually use independent electric heaters for heating, which consumes a lot of energy. At the same time, since condensing dehumidifiers generate a lot of waste heat during operation, and this waste heat is often unable to be reused, this also leads to a further increase in the energy consumption of air dehumidification and heating devices.

[0004] Therefore, with regard to the above-mentioned existing temperature and humidity air conditioning devices for semiconductor production, because they usually use independent electric heaters, and because the waste heat generated by the condensing dehumidifier cannot be reused, resulting in high energy consumption of the air dehumidification and heating device, a waste heat utilization device for the semiconductor constant temperature and humidity air supply device can be designed. Summary of the invention

[0005] In order to overcome the problem of high energy consumption of the air dehumidification and heating device, the existing temperature and humidity air conditioning device for semiconductor production usually uses an independent electric heater and the waste heat generated by the condensing dehumidifier cannot be reused.

[0006] The technical solution of the present invention is: a waste heat utilization device of a semiconductor constant temperature and humidity air supply device, including a waste heat recycling constant temperature and humidity component, and also including an air purification component; an air purification component is arranged at the rear end of the waste heat recycling constant temperature and humidity component; the waste heat recycling constant temperature and humidity component includes a shell, a fan, a condensation dehumidifier, a radiator, a refrigerant compressor module, an exhaust pipe, a condensate collection box, a heat pipe, a dustproof net, and a reinforced vertical beam plate.

[0007] Preferably, by connecting the radiator to the heat pipe and placing it behind the condensing dehumidifier, the heat generated by the radiator can heat the dehumidified cold air, thereby effectively improving the utilization rate of waste heat from air heating, greatly improving energy utilization efficiency, avoiding the increase in processing costs and equipment volume by adding additional electric heating equipment, reducing the overall energy consumption of the device and saving energy, and solving the problem of high energy consumption of the air dehumidification and heating device caused by the existing temperature and humidity air conditioning device for semiconductor production, because it usually uses an independent electric heater, and the waste heat generated by the condensing dehumidifier cannot be reused.

[0008] Preferably, an exhaust pipe is provided at the front end of the shell; and a fan is provided inside the shell.

[0009] Preferably, a reinforcing vertical beam plate is provided at the central symmetry axis of the fan, and the reinforcing vertical beam plate is bolted to the mounting shell and the inner wall of the shell of the fan.

[0010] Preferably, a condensing dehumidifier is provided at the front end of the fan, and the condensing dehumidifier has a built-in expansion valve module; a condensing water collection box is provided at the lower end of the condensing dehumidifier; a refrigerant compressor module is provided below the condensing water collection box, and the refrigeration end of the refrigerant compressor module is connected to the internal refrigerant pipe of the condensing dehumidifier.

[0011] Preferably, a dustproof net is provided on the rear end face of the condensing dehumidifier, and the dustproof net is fixedly connected to the rear end face shell of the condensing dehumidifier by bolts. The dustproof net is used to further improve the filtering effect of dust in the air and prevent dust from adhering to the condensing dehumidifier and causing pollution.

[0012] Preferably, a radiator is provided at the front end of the condensing dehumidifier; a heat pipe is provided on the inner side of the radiator, and the heat pipe is connected to the radiator for thermal conduction, and the radiator is connected to the heat dissipation end pipeline of the refrigerant compressor module. Due to the low-temperature condensation effect of the condensing dehumidifier, the moisture in the air is condensed into liquid and separated from the air. The separated liquid water falls into the condensed water collection box for collection and discharge. After that, when the dehumidified air passes through the radiator, the radiator dissipates heat due to the working principle of the condensing dehumidification equipment. The heat dissipated by the radiator is fully conducted through the heat pipe and dissipated into the air to heat the air, thereby realizing the waste heat recycling function of the radiator.

[0013] Preferably, a radiator is provided at the front end of the condensing dehumidifier; a heat pipe is provided on the inner side of the radiator, and the heat pipe is connected to the radiator by thermal conduction, and the radiator is connected to the heat dissipation end pipeline of the refrigerant compressor module; by connecting the radiator to the heat pipe and placing it behind the condensing dehumidifier, the heat generated by the radiator heats the dehumidified cold air, thereby effectively improving the utilization rate of waste heat from air heating, greatly improving energy utilization efficiency, avoiding the addition of additional electric heating equipment to increase processing costs and equipment volume, reducing the overall energy consumption of the device and saving energy.

[0014] Preferably, an air intake grille is provided at the rear end of the air purification filter element, and the air intake grille is fixedly connected to the outer shell of the air purification filter element by bolts. The air intake grille is used to block foreign matter in the air and improve the air filtration efficiency.

[0015] Preferably, filter element installation handles are provided on both sides of the rear end of the air intake grille, and the filter element installation handles are fixedly connected to both sides of the outer shell of the air intake grille. The filter element installation handles are used as portable handles when replacing the air purification filter element, thereby improving the convenience of replacing the air purification filter element.

[0016] Beneficial effects of the present invention:

[0017] 1. The existing temperature and humidity air conditioning device for semiconductor production usually uses an independent electric heater, and the waste heat generated by the condensing dehumidifier cannot be reused, resulting in high energy consumption of the air dehumidification and heating device. By connecting the radiator to the heat pipe and placing it behind the condensing dehumidifier, the heat generated by the radiator can heat the dehumidified cold air, thereby effectively improving the waste heat utilization rate of air heating, greatly improving the energy utilization efficiency, avoiding the increase of processing costs and equipment volume by adding additional electric heating equipment, reducing the overall energy consumption of the device and saving energy; solving the problem that the existing temperature and humidity air conditioning device for semiconductor production usually uses an independent electric heater, and the waste heat generated by the condensing dehumidifier cannot be reused, resulting in high energy consumption of the air dehumidification and heating device;

[0018] 2. Through the setting of fans, condensation dehumidifiers, radiators, condensation water collection boxes, and air purification components, the fan is started to send the external air into the condensation dehumidifier after being filtered through the air intake grille and the air purification filter element. Due to the low-temperature condensation effect of the condensation dehumidifier, the moisture in the air is condensed into liquid and separated from the air. The separated liquid water falls into the condensation water collection box for collection and discharge. After that, when the dehumidified air passes through the radiator, due to the working principle of the condensation dehumidification equipment, the radiator dissipates heat. The heat dissipated by the radiator is fully conducted through the heat pipe and dissipated into the air to heat the air, thereby realizing the waste heat recycling function of the radiator. Finally, the dehumidified clean air is discharged from the exhaust pipe into the semiconductor processing equipment environment, effectively improving the stability of the working environment of the semiconductor processing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure shows the overall rear-view stereoscopic structure diagram of the waste heat utilization device of the semiconductor constant temperature and humidity air supply device of the present invention;

[0020] Figure 2 The diagram shows the overall front perspective structure of the waste heat utilization device of the semiconductor constant temperature and humidity air supply device of the present invention;

[0021] Figure 3 The figure shows the overall side view of the internal stereoscopic structure of the waste heat utilization device of the semiconductor constant temperature and humidity air supply device of the present invention;

[0022] Figure 4Shown is a schematic diagram of the combined three-dimensional structure of a condensation dehumidifier and a condensed water collection box of a waste heat utilization device of a semiconductor constant temperature and humidity air supply device of the present invention;

[0023] Figure 5 Shown is a schematic diagram of the three-dimensional structure of the heat sink and heat pipe combination of the waste heat utilization device of the semiconductor constant temperature and humidity air supply device of the present invention;

[0024] Figure 6 Shown is a schematic diagram of the three-dimensional structure of the fan of the waste heat utilization device of the semiconductor constant temperature and humidity air supply device of the present invention;.

[0025] The markings in the attached drawings are: 1. Waste heat recycling constant temperature and humidity component; 2. Air purification component; 101. Shell; 102. Fan; 103. Condensation dehumidifier; 104. Radiator; 105. Refrigerant compressor module; 106. Exhaust pipe; 107. Condensate collection box; 108. Heat pipe; 109. Dustproof net; 110. Reinforced vertical beam plate; 201. Air purification filter element; 202. Air intake grille; 203. Filter element installation handle. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0027] See also Figure 1-6 The present invention provides an embodiment: a waste heat utilization device of a semiconductor constant temperature and humidity air supply device, including a waste heat recycling constant temperature and humidity component 1, and also including an air purification component 2; the rear end of the waste heat recycling constant temperature and humidity component 1 is provided with an air purification component 2; the waste heat recycling constant temperature and humidity component 1 includes a shell 101, a fan 102, a condensation dehumidifier 103, a radiator 104, a refrigerant compressor module 105, an exhaust pipe 106, a condensed water collection box 107, a heat pipe 108, a dustproof net 109, and a reinforced vertical beam plate 110.

[0028] See also Figure 1-6In this embodiment, an exhaust pipe 106 is provided at the front end of the shell 101; a fan 102 is provided inside the shell 101; a reinforcing vertical beam plate 110 is provided at the central symmetric axis of the fan 102, and the reinforcing vertical beam plate 110 is bolted to the mounting shell of the fan 102 and the inner wall of the shell 101; a condensation dehumidifier 103 is provided at the front end of the fan 102, and the condensation dehumidifier 103 is built-in with an expansion valve module; a condensation water collection box 107 is provided at the lower end of the condensation dehumidifier 103; a refrigerant compressor module 105 is provided below the condensation water collection box 107, and the refrigeration end of the refrigerant compressor module 105 is connected to the internal refrigerant pipe of the condensation dehumidifier 103; a dustproof net 109 is provided on the rear end face of the condensation dehumidifier 103, and the dustproof net 109 is fixedly connected to the rear end face shell of the condensation dehumidifier 103 by bolts; the condensation dehumidifier A radiator 104 is provided at the front end of 103; a heat pipe 108 is provided on the inner side of the radiator 104, and the heat pipe 108 is connected to the radiator 104 by thermal conduction, and the radiator 104 is connected to the heat dissipation end pipeline of the refrigerant compressor module 105; a radiator 104 is provided at the front end of the condensing dehumidifier 103; a heat pipe 108 is provided on the inner side of the radiator 104, and the heat pipe 108 is connected to the radiator 104 by thermal conduction, and the radiator 104 is connected to the heat dissipation end pipeline of the refrigerant compressor module 105; an air intake grille 202 is provided at the rear end of the air purification filter element 201, and the air intake grille 202 is fixedly connected to the outer shell of the air purification filter element 201 by bolts; filter element mounting handles 203 are provided on both sides of the rear end of the air intake grille 202, and the filter element mounting handles 203 are fixedly connected to both sides of the outer shell of the air intake grille 202.

[0029] When working, the fan 102 starts to send the external air into the condensation dehumidifier 103 after being filtered through the air intake grille 202 and the air purification filter element 201. Due to the low-temperature condensation effect of the condensation dehumidifier 103, the moisture in the air is condensed into liquid and separated from the air. The separated liquid water falls into the condensation water collection box 107 for collection and discharge. After that, when the dehumidified air passes through the radiator 104, due to the working principle of the condensation dehumidification equipment, the radiator 104 dissipates heat. The heat dissipated by the radiator 104 is fully conducted through the heat pipe 108 and dissipated into the air to heat the air, thereby realizing the waste heat recycling function of the radiator 104. Finally, the dehumidified clean air is discharged from the exhaust pipe 106 into the environment of the semiconductor processing equipment, effectively improving the stability of the working environment of the semiconductor processing equipment.

[0030] Next, by connecting the radiator 104 to the heat pipe 108 and placing it behind the condensing dehumidifier 103, the heat generated by the radiator 104 can heat the dehumidified cold air, thereby effectively improving the utilization rate of waste heat from air heating, greatly improving energy utilization efficiency, avoiding the increase in processing costs and equipment volume by adding additional electric heating equipment, reducing the overall energy consumption of the device and saving energy; it solves the problem of high energy consumption of the air dehumidification and heating device caused by the existing temperature and humidity air conditioning device for semiconductor production, because it usually uses an independent electric heater, and the waste heat generated by the condensing dehumidifier cannot be reused.

[0031] Through the above steps, by connecting the radiator 104 and the heat pipe 108 and placing it behind the condensing dehumidifier 103, the heat generated by the radiator 104 can heat the dehumidified cold air, thereby effectively improving the waste heat utilization rate of air heating, greatly improving energy utilization efficiency, avoiding the increase of processing costs and equipment volume by adding additional electric heating equipment, reducing the overall energy consumption of the device and saving energy, and avoiding the existing temperature and humidity air conditioning device for semiconductor production, because it usually uses an independent electric heater, and the waste heat generated by the condensing dehumidifier cannot be reused, resulting in high energy consumption of the air dehumidification and heating device.

[0032] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the spirit of the present invention.

Claims

1. A waste heat utilization device for a semiconductor constant temperature and humidity air supply device, comprising a waste heat recycling type constant temperature and humidity component (1), characterized in that: It also includes an air purification component (2); the air purification component (2) is arranged at the rear end of the waste heat recycling constant temperature and humidity component (1); the waste heat recycling constant temperature and humidity component (1) includes a shell (101), a fan (102), a condensation dehumidifier (103), a radiator (104), a refrigerant compressor module (105), an exhaust pipe (106), a condensate collection box (107), a heat pipe (108), a dustproof net (109), and a reinforced vertical beam plate (110).

2. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 1, characterized in that: An exhaust pipe (106) is arranged at the front end of the housing (101); and a fan (102) is arranged inside the housing (101).

3. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 2, characterized in that: A reinforcing vertical beam plate (110) is provided at the central symmetry axis of the fan (102), and the reinforcing vertical beam plate (110) is bolted to the mounting shell of the fan (102) and the inner wall of the housing (101).

4. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 2, characterized in that: A condensing dehumidifier (103) is arranged at the front end of the fan (102), and the condensing dehumidifier (103) has an expansion valve module built in; a condensing water collecting box (107) is arranged at the lower end of the condensing dehumidifier (103); a refrigerant compressor module (105) is arranged below the condensing water collecting box (107), and the refrigeration end of the refrigerant compressor module (105) is connected to the internal refrigerant pipe of the condensing dehumidifier (103).

5. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 4, characterized in that: A dustproof net (109) is provided on the rear end face of the condensation dehumidifier (103), and the dustproof net (109) is fixedly connected to the rear end face shell of the condensation dehumidifier (103) by bolts.

6. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 4, characterized in that: A radiator (104) is arranged at the front end of the condensing dehumidifier (103); a heat pipe (108) is arranged on the inner side of the radiator (104), and the heat pipe (108) is connected to the radiator (104) by thermal conduction, and the radiator (104) is connected to the heat dissipation end pipeline of the refrigerant compressor module (105).

7. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 2, characterized in that: The air purification component (2) comprises an air purification filter element (201), an air intake grille (202), and a filter element installation handle (203); the air purification filter element (201) is arranged behind the fan (102), and the air purification filter element (201) is sealedly connected to the inner wall groove of the housing (101).

8. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 7, characterized in that: An air intake grille (202) is provided at the rear end of the air purification filter element (201), and the air intake grille (202) is fixedly connected to the outer shell of the air purification filter element (201) by bolts.

9. The waste heat utilization device of the semiconductor constant temperature and humidity air supply device according to claim 8, characterized in that: Filter element installation handles (203) are provided on both sides of the rear end of the air intake grille (202), and the filter element installation handles (203) are fixedly connected to both sides of the outer shell of the air intake grille (202).

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