Vacuum sintering furnace with dust filtering function

Abstract

The invention relates to the technical field of vacuum sintering furnaces, and particularly discloses a vacuum sintering furnace with a dust filtering function, which comprises a furnace body, a vacuumizing system, a heating system, a heat exchange system and a control system, a graphite box is arranged in the furnace body, and the graphite box is used for accommodating a vacuum sintering product; the vacuumizing system is communicated with the graphite box and is used for creating a vacuum environment and absorbing impurities volatilized in the sintering process of the product; the heating system is used for heating the graphite box so as to sinter the product; the heat exchange system communicates with the furnace body and is used for cooling the furnace body and a product; the control system is electrically connected to the vacuumizing system, the heating system and the heat exchange system. Therefore, impurities volatilized by a product in the sintering process can be cooled to form solid dust and collected, so that pollution caused by impurity diffusion to the interior of the vacuum sintering furnace is avoided, the cleaning time is shortened, and the service life of the vacuum sintering furnace is prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum sintering furnaces, and in particular to a vacuum sintering furnace with a dust filtering function. Background Art

[0002] Silicon carbide ceramics are a kind of high-end ceramics. They not only have excellent mechanical properties at room temperature, such as high bending strength, high oxidation resistance, high corrosion resistance, high wear resistance and low friction coefficient, but also have excellent high-temperature mechanical properties, such as high strength, high creep resistance, etc., which are the best among known ceramic materials. Therefore, silicon carbide ceramics are very suitable for manufacturing various high-temperature resistant insulation equipment, and are used in aerospace, national defense and military industries. Firing silicon carbide ceramics requires a relatively high temperature, and a large amount of impurities will volatilize during the sintering process. When the temperature is lowered, these impurities form solid dust, which sticks to various parts of the sintering furnace, causing pollution to the sintering furnace, greatly increasing the time to clean the sintering furnace, and affecting the service life of the sintering furnace. Summary of the invention

[0003] In view of this, the present invention provides a vacuum sintering furnace with a dust filtering function, which can cool the impurities volatilized by the product during the sintering process to form solid dust and collect it, thereby preventing the impurities from diffusing and polluting the interior of the vacuum sintering furnace, thereby reducing the cleaning time and increasing the service life of the vacuum sintering furnace.

[0004] An embodiment of the present invention provides a vacuum sintering furnace with a dust filtering function, comprising a furnace body, a vacuum pumping system, a heating system, a heat exchange system and a control system. A graphite box is arranged inside the furnace body, and the graphite box is used to accommodate vacuum sintering products; the vacuum pumping system is connected to the graphite box, and the vacuum pumping system is used to create a vacuum environment and absorb impurities volatilized from the product during the sintering process; the heating system is used to heat the graphite box to facilitate sintering of the product; the heat exchange system is connected to the furnace body, and the heat exchange system is used to cool the furnace body and the product; the control system is electrically connected to the vacuum pumping system, the heating system and the heat exchange system.

[0005] Furthermore, a front furnace door and a rear furnace door are arranged opposite to each other on the furnace body; a graphite furnace bed is arranged inside the furnace body, and a graphite box is arranged above the graphite furnace bed.

[0006] Furthermore, the vacuum system includes a graphite tube, a cooling tank, a dust filter tank, an oil-containing filter tank and a vacuum pump. An exhaust port is opened on the graphite box, and the inlet of the graphite tube is connected to the exhaust port. The graphite tube is penetrated through the furnace body and extends to the outside of the furnace body; the inlet of the cooling tank is connected to the outlet of the graphite tube, and a cooling core is arranged inside the cooling tank; the inlet of the dust filter tank is connected to the outlet of the cooling tank, and a dust filter element is arranged inside the dust filter tank; the inlet of the oil-containing filter tank is connected to the outlet of the dust filter tank, and a liftable oil-containing filter element is arranged inside the oil-containing filter tank; the vacuum pump is connected to the outlet of the oil-containing filter tank, and a vacuum valve is arranged between the vacuum pump and the oil-containing filter tank.

[0007] Furthermore, the heating system includes a graphite heater, an electrode and a heating power supply, the graphite heater is sleeved on the outside of the graphite box; the electrode is connected to the graphite heater, the electrode is penetrated through the furnace body and extends to the outside of the furnace body; the heating power supply is connected to the electrode, and the heating power supply is used to power the graphite heater.

[0008] Furthermore, the heat exchange system includes an inflation valve, a heat exchanger and a fan. The inflation valve is arranged on the furnace body, and the inflation valve is used to connect to the inflation system; an air outlet and an air inlet are opened on the furnace body, and the inlet of the heat exchanger is connected to the air outlet through an air outlet duct; the inlet of the fan is connected to the outlet of the heat exchanger, and the outlet of the fan is connected to the air inlet through an air inlet duct.

[0009] Furthermore, the vacuum sintering furnace with dust filtering function also includes a heat preservation system, which is arranged inside the furnace body and sleeved on the outside of the graphite box and the graphite heater, and is used to keep the graphite box warm and insulate.

[0010] Furthermore, the insulation system includes a heating chamber insulation layer, a front insulation screen and a rear insulation screen. The heating chamber insulation layer is sleeved on the outside of the graphite box and the graphite heater; the front insulation screen is connected to the front furnace door, and the rear insulation screen is connected to the rear furnace door, so that when the front furnace door and the rear furnace door are closed, the heating chamber insulation layer, the front insulation screen and the rear insulation screen are combined to form an insulated closed space.

[0011] Furthermore, the vacuum sintering furnace with dust filtering function also includes a temperature measuring system, which is arranged on the furnace body and is used to measure and control the temperature inside the furnace body.

[0012] Furthermore, the temperature measurement system includes a temperature measuring thermocouple and an infrared thermometer. A telescopic part is provided on the furnace body, and the temperature measuring thermocouple is passed through the telescopic part and extends to the inside of the furnace body; the infrared thermometer is provided on the furnace body; wherein, the temperature measuring thermocouple, the telescopic part and the infrared thermometer are electrically connected to the control system.

[0013] The beneficial effects of the technical solution provided by the embodiment of the present invention include at least: a vacuum sintering furnace with dust filtering function, including a furnace body, a vacuum pumping system, a heating system, a heat exchange system and a control system, a graphite box is arranged inside the furnace body, and the graphite box is used to accommodate vacuum sintering products; the vacuum pumping system is connected to the graphite box, and the vacuum pumping system is used to create a vacuum environment and absorb impurities volatilized by the product during the sintering process; the heating system is used to heat the graphite box to facilitate sintering of the product; the heat exchange system is connected to the furnace body, and the heat exchange system is used to cool the furnace body and the product; the control system is electrically connected to the vacuum pumping system, the heating system and the heat exchange system. Thus, the impurities volatilized by the product during the sintering process can be cooled to form solid dust and collected, thereby avoiding the diffusion of impurities to pollute the interior of the vacuum sintering furnace, thereby reducing the cleaning time and increasing the service life of the vacuum sintering furnace.

[0014] Among them, the vacuum system includes a graphite tube, a cooling tank, a dust filter tank, an oil-containing filter tank and a vacuum pump which are connected in sequence. A cooling core is arranged inside the cooling tank for cooling the gas passing through the cooling tank; a dust filter element is arranged inside the dust filter tank for capturing larger dust particles formed after the impurities are cooled; a liftable oil-containing filter element is arranged inside the oil-containing filter tank for capturing small-particle dust pollutants in the impurities; thereby, the solid dust formed by the cooling of the impurities is collected to avoid contaminating the inside of the furnace body and the vacuum pump.

[0015] Among them, the vacuum sintering furnace with dust filtering function also includes a heat preservation system, which is used to insulate the graphite box during the vacuum sintering process. During the vacuum sintering process, the heat preservation system encloses the outside of the graphite box and the graphite heater to form an insulated closed space, which has a good heat preservation and heat insulation effect; during the air-filled cooling process, the front heat preservation screen, the rear heat preservation screen and the heating chamber insulation layer are separated from each other, providing a channel for the circulation of cooling gas, which has a good air cooling effect.

[0016] Among them, the vacuum sintering furnace with dust filtration function also includes a temperature measurement system, which is used to measure and control the temperature inside the furnace during the vacuum sintering process. When the sintering temperature is low, the temperature measuring thermocouple extends into the insulation layer of the heating chamber for temperature measurement and control; when the sintering temperature is high, the temperature measuring thermocouple shrinks to the outside of the insulation layer of the heating chamber, and the infrared thermometer is used for temperature measurement and control.

[0017] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. Among them:

[0019] Figure 1 A schematic structural diagram of a vacuum sintering furnace with a dust filtering function provided by an embodiment of the present invention from a first viewing angle is shown;

[0020] Figure 2 Shows Figure 1 A schematic structural diagram of the vacuum sintering furnace with dust filtering function in the illustrated embodiment from a second viewing angle;

[0021] Figure 3 Shows Figure 1 A schematic structural diagram of the vacuum sintering furnace with dust filtering function in the third viewing angle of the embodiment shown.

[0022] in, Figures 1 to 3 The corresponding relationship between the reference numerals and the component names is as follows:

[0023] 1 furnace body, 11 graphite box, 12 front furnace door, 13 rear furnace door, 14 graphite furnace bed, 21 graphite tube, 22 cooling tank, 221 cooling core, 23 dust filter tank, 231 dust filter element, 24 oil filter tank, 241 oil filter element, 25 vacuum pump, 251 vacuum valve, 31 graphite heater, 32 electrode, 33 heating power supply, 41 charging valve, 42 heat exchanger, 421 air outlet duct, 43 fan, 431 air inlet duct, 5 control system, 61 heating chamber insulation layer, 62 front insulation screen, 63 rear insulation screen, 71 temperature measuring thermocouple, 711 telescopic part, 72 infrared thermometer. DETAILED DESCRIPTION

[0024] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0026] Refer to the following Figures 1 to 3 A vacuum sintering furnace with a dust filtering function is described according to some embodiments of the present invention.

[0027] like Figures 1 to 3 As shown, a vacuum sintering furnace with dust filtering function provided according to an embodiment of the present invention includes a furnace body 1, a vacuum pumping system, a heating system, a heat exchange system and a control system 5. The furnace body 1 is fixed above the ground and is used as a vacuum sintering chamber. A graphite box 11 is arranged inside the furnace body 1. The graphite box 11 is used to accommodate vacuum sintered products, such as silicon carbide ceramics. Placing the vacuum sintered products inside the graphite box 11 can greatly reduce the diffusion of impurities volatilized by the products to the outside of the graphite box 11 during the sintering process. The vacuum pumping system is connected to the graphite box 11, and the vacuum pumping system is used to create a vacuum environment and absorb impurities volatilized by the products during the sintering process, thereby protecting the inside of the furnace body 1 from being polluted by solid dust; the heating system is used to heat the graphite box 11 to facilitate sintering of the products; the heat exchange system is connected to the furnace body 1, and the heat exchange system is used to cool the furnace body 1 and the products; the control system 5 is electrically connected to the vacuum pumping system, the heating system and the heat exchange system, and is used to automatically control the vacuum pumping, heating and gas-filled cooling process of the vacuum sintering furnace; it can be understood that the control system 5 can also be switched to manual operation. In this way, the impurities volatilized by the product during the sintering process can be cooled to form solid dust and collected, thereby preventing the diffusion of impurities and contaminating the interior of the vacuum sintering furnace, thereby reducing cleaning time and increasing the service life of the vacuum sintering furnace.

[0028] Among them, the graphite material has the property of uniform heat conduction, so that the temperature of the graphite box 11 processed by the graphite material can be more evenly distributed when heated by the heating system; and then when the heating system heats the effective heating area inside the graphite box 11, the heating temperature uniformity of the vacuum sintered product placed in the effective heating area is better. Specifically, after actual measurement, the temperature change of different parts inside the graphite box 11 can be controlled within ±3°C.

[0029] like Figures 2 to 3 As shown, the furnace body 1 is relatively provided with a front furnace door 12 and a rear furnace door 13. The front furnace door 12 is opened and closed at the front of the furnace body 1, and the vacuum sintered products can be put in or taken out when it is opened; the rear furnace door 13 is opened and closed at the rear of the furnace body 1, and the rear structure in the vacuum sintering furnace can be maintained when it is opened; the front furnace door 12 and the rear furnace door 13 are closed at the same time, and a closed cavity is formed inside the furnace body 1. A graphite furnace bed 14 is fixedly provided inside the furnace body 1 for supporting a graphite box 11, and the graphite box 11 is arranged above the graphite furnace bed 14.

[0030] like Figure 1As shown, the vacuum system includes a graphite tube 21, a cooling tank 22, a dust filter tank 23, an oil-containing filter tank 24 and a vacuum pump 25. An exhaust port is provided on the top of the graphite box 11. The inlet of the graphite tube 21 is connected to the exhaust port. The graphite tube 21 is penetrated through the furnace body 1 and extends to the outside of the furnace body 1. The inlet of the cooling tank 22 is connected to the outlet of the graphite tube 21. A cooling core 221 is provided inside the cooling tank 22. When the furnace body 1 is vacuumed, the cooling core 221 can cool the gas passing through the cooling tank 22. The inlet of the dust filter tank 23 is connected to the outlet of the cooling tank 22. A dust filter element 231 is provided inside the dust filter tank 23. When the furnace body 1 is vacuumed, the dust filter element 231 can capture larger dust particles formed after impurities are cooled. The inlet of the oil-containing filter tank 24 is connected to the outlet of the dust filter tank 23. A liftable oil-containing filter element 241 is provided inside the oil-containing filter tank 24. The vacuum pump 25 is connected to the outlet of the oil-containing filter tank 24, and is used to provide the vacuum environment required for sintering products inside the vacuum sintering furnace; a vacuum valve 251 is provided between the vacuum pump 25 and the oil-containing filter tank 24, and the vacuum valve 251 is used to control the opening and closing of the pipeline between the vacuum pump 25 and the furnace body 1.

[0031] That is to say, the gas inside the graphite box 11 and the impurities volatilized by the sintered products can pass through the graphite tube 21, and under the action of the vacuum pump 25, pass through the cooling tank 22, the dust filter tank 23 and the oil-containing filter tank 24 in sequence, thereby collecting the solid dust formed by the cooling of the impurities and avoiding pollution to the interior of the furnace body 1 and the vacuum pump 25.

[0032] A certain amount of vacuum oil is contained in the lower part of the oil-containing filter tank 24. When the furnace body 1 is vacuumed, the oil-containing filter element 241 rises above the oil level, so that the oil-containing filter element 241 can capture small dust particles; after the vacuuming is completed, the oil-containing filter element 241 descends to be immersed in the vacuum oil, so that the small dust particles adhering to the oil-containing filter element 241 can be cleaned.

[0033] Among them, the cooling tank 22, the dust filter tank 23 and the oil-containing filter tank 24 are provided with a switchable upper cover, so as to facilitate the replacement of the cooling core 221 inside the cooling tank 22, the dust filter element 231 inside the dust filter tank 23 and the oil-containing filter element 241 inside the oil-containing filter tank 24, and facilitate the cleaning of the vacuum oil inside the oil-containing filter tank 24.

[0034] like Figures 1 to 3As shown, the heating system includes a graphite heater 31, an electrode 32 and a heating power supply 33. The graphite heater 31 is sleeved on the outside of the graphite box 11, fixedly connected to the furnace body 1, and a certain gap is set between the graphite heater 31 and the graphite box 11; the graphite heater 31 heats the graphite box 11 by vacuum thermal radiation, and can heat the vacuum sintered product to a higher temperature for sintering. The electrode 32 is connected to the graphite heater 31, and the electrode 32 is penetrated through the furnace body 1 and extends to the outside of the furnace body 1. The heating power supply 33 is connected to the electrode 32, and the heating power supply 33 is used to supply power to the graphite heater 31 through the electrode 32, thereby increasing the sintering temperature. Preferably, the sintering temperature of the graphite heater 31 can reach up to 1900°C.

[0035] like Figure 1 and Figure 3 As shown, the heat exchange system includes an inflation valve 41, a heat exchanger 42 and a fan 43. The inflation valve 41 is arranged on the furnace body 1, and is used to be connected to the inflation system, so as to fill the furnace body 1 with inert gas; an air outlet and an air inlet are provided on the furnace body 1, and the inlet of the heat exchanger 42 is connected to the air outlet through an air outlet duct 421; the inlet of the fan 43 is connected to the outlet of the heat exchanger 42, and the outlet of the fan 43 is connected to the air inlet through an air inlet duct 431, thereby realizing the circulation of the inert gas between the furnace body 1, the heat exchanger 42 and the fan 43.

[0036] Specifically, when the furnace body 1 and the sintered product need to be cooled, the vacuum valve 251 is closed, and the inert gas is charged into the furnace body 1 through the charging valve 41; then the fan 43 and the heat exchanger 42 are turned on, so that the inert gas is blown to the graphite box 11 and cooled; then the inert gas with increased temperature flows to the heat exchanger 42 through the air outlet for cooling, and under the action of the fan 43, the cooled inert gas enters the furnace body 1 again through the air inlet. The above cycle is repeated until the sintered product is cooled to the furnace discharge temperature.

[0037] like Figures 1 to 3 As shown, the vacuum sintering furnace with dust filtering function also includes a heat preservation system, which is fixedly arranged inside the furnace body 1 and is sleeved on the outside of the graphite box 11 and the graphite heater 31. The heat preservation system is used to keep the graphite box 11 insulated during the sintering process.

[0038] like Figures 1 to 3 As shown, the insulation system includes a heating chamber insulation layer 61, a front insulation screen 62 and a rear insulation screen 63. The heating chamber insulation layer 61 is sleeved on the outside of the graphite box 11 and the graphite heater 31; the front insulation screen 62 is fixedly connected to the front furnace door 12, and the rear insulation screen 63 is fixedly connected to the rear furnace door 13, so that when the front furnace door 12 and the rear furnace door 13 are closed, the heating chamber insulation layer 61, the front insulation screen 62 and the rear insulation screen 63 are combined to form an insulated closed space.

[0039] Specifically, during the sintering process, the front furnace door 12 and the rear furnace door 13 are closed at the same time, so that the front insulation screen 62 and the rear insulation screen 63 are respectively attached to the front and rear openings of the heating chamber insulation layer 61, thereby enclosing an insulated closed space with good thermal insulation effects; during the air-filled cooling process, the front furnace door 12 and the rear furnace door 13 are opened at the same time, so that the front insulation screen 62, the rear insulation screen 63 and the heating chamber insulation layer 61 are separated from each other, providing a channel for the circulation of cooling gas, with good air cooling effects.

[0040] Among them, when the furnace body 1 and the sintered product need to be cooled, the front insulation screen 62 and the rear insulation screen 63 are opened, and the inert gas is blown to the inside of the insulation layer 61 of the heating chamber through the rear insulation screen 63. After cooling the graphite box 11, the inert gas is blown out through the front insulation screen 62, enters the heat exchanger 42 through the air outlet, and is blown to the rear insulation screen 63 again through the air inlet under the action of the fan 43.

[0041] like Figure 1 As shown, the vacuum sintering furnace with dust filtering function also includes a temperature measuring system, which is arranged on the furnace body 1 and is used to measure and control the temperature inside the furnace body 1.

[0042] like Figure 1 As shown, the temperature measurement system includes a temperature measuring thermocouple 71 and an infrared thermometer 72. A telescopic member 711 is fixedly provided on the furnace body 1. The temperature measuring thermocouple 71 is inserted into the telescopic member 711 so that the temperature measuring thermocouple 71 can be telescopic relative to the furnace body 1. The temperature measuring thermocouple 71 extends into the interior of the furnace body 1 and is used to measure and control the temperature inside the furnace body 1 when the sintering temperature is low. The infrared thermometer 72 is fixedly provided on the furnace body 1 and is used to measure and control the temperature inside the furnace body 1 when the sintering temperature is high. Among them, the temperature measuring thermocouple 71, the telescopic member 711 and the infrared thermometer 72 are electrically connected to the control system 5, so that the control system 5 can automatically control the temperature measurement and control process of the vacuum sintering furnace.

[0043] Specifically, when the sintering temperature is below 1000°C, the temperature measuring thermocouple 71 extends into the interior of the heating chamber insulation layer 61 to measure and control the temperature; when the sintering temperature is higher than 1000°C, the control system 5 controls the telescopic part 711 to drive the temperature measuring thermocouple 71 to shrink to the outside of the heating chamber insulation layer 61, and the infrared thermometer 72 is used to measure and control the temperature.

[0044] In the description of the present invention, the term "plurality" refers to two or more than two. Unless otherwise clearly defined, the orientation or positional relationship indicated by the terms "upper" and "lower" is based on the orientation or positional relationship of the drawings. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention. The terms "connection", "installation", "fixation", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In the description of the present invention, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In the present invention, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum sintering furnace with dust filtering function, characterized in that: include: A furnace body (1), wherein a graphite box (11) is arranged inside the furnace body (1), and the graphite box (11) is used to accommodate vacuum sintered products; A vacuum pumping system, the vacuum pumping system being connected to the graphite box (11), the vacuum pumping system being used to create a vacuum environment and absorb impurities volatilized from the product during the sintering process; A heating system, the heating system being used to heat the graphite box (11) so as to facilitate sintering of the product; a heat exchange system, the heat exchange system being connected to the furnace body (1), the heat exchange system being used to cool the furnace body (1) and the product; A control system (5), wherein the control system (5) is electrically connected to the vacuum system, the heating system and the heat exchange system.

2. The vacuum sintering furnace with dust filtering function according to claim 1, characterized in that: The furnace body (1) is provided with a front furnace door (12) and a rear furnace door (13) opposite to each other; A graphite furnace bed (14) is arranged inside the furnace body (1), and the graphite box (11) is arranged above the graphite furnace bed (14).

3. The vacuum sintering furnace with dust filtering function according to claim 1, characterized in that: The vacuum system comprises: A graphite tube (21), wherein an exhaust port is provided on the graphite box (11), an inlet of the graphite tube (21) is connected to the exhaust port, and the graphite tube (21) is passed through the furnace body (1) and extends to the outside of the furnace body (1); A cooling tank (22), wherein the inlet of the cooling tank (22) is connected to the outlet of the graphite tube (21), and a cooling core (221) is arranged inside the cooling tank (22); A dust filter tank (23), wherein the inlet of the dust filter tank (23) is connected to the outlet of the cooling tank (22), and a dust filter element (231) is arranged inside the dust filter tank (23); An oil-containing filter tank (24), the inlet of the oil-containing filter tank (24) being connected to the outlet of the dust filter tank (23), and a liftable oil-containing filter element (241) being arranged inside the oil-containing filter tank (24); A vacuum pump (25), the vacuum pump (25) is connected to the outlet of the oil-containing filter tank (24), and a vacuum valve (251) is provided between the vacuum pump (25) and the oil-containing filter tank (24).

4. The vacuum sintering furnace with dust filtering function according to claim 2, characterized in that: The heating system comprises: A graphite heater (31), wherein the graphite heater (31) is sleeved on the outside of the graphite box (11); An electrode (32), the electrode (32) being connected to the graphite heater (31), the electrode (32) being passed through the furnace body (1) and extending to the outside of the furnace body (1); A heating power source (33), the heating power source (33) is connected to the electrode (32), and the heating power source (33) is used to supply power to the graphite heater (31).

5. The vacuum sintering furnace with dust filtering function according to claim 1, characterized in that: The heat exchange system comprises: an air charging valve (41), the air charging valve (41) being arranged on the furnace body (1), and the air charging valve (41) being used for connecting to an air charging system; A heat exchanger (42), wherein an air outlet and an air inlet are provided on the furnace body (1), and the inlet of the heat exchanger (42) is connected to the air outlet through an air outlet duct (421); A fan (43), wherein the inlet of the fan (43) is connected to the outlet of the heat exchanger (42), and the outlet of the fan (43) is connected to the air inlet through an air inlet duct (431).

6. The vacuum sintering furnace with dust filtering function according to claim 4, characterized in that: Also includes: A heat preservation system is arranged inside the furnace body (1), and the heat preservation system is sleeved on the outside of the graphite box (11) and the graphite heater (31), and the heat preservation system is used to keep the graphite box (11) warm and insulate.

7. The vacuum sintering furnace with dust filtering function according to claim 6, characterized in that: The thermal insulation system comprises: A heating chamber insulation layer (61), wherein the heating chamber insulation layer (61) is sleeved on the outside of the graphite box (11) and the graphite heater (31); A front heat-insulating screen (62) and a rear heat-insulating screen (63), wherein the front heat-insulating screen (62) is connected to the front furnace door (12), and the rear heat-insulating screen (63) is connected to the rear furnace door (13), so that when the front furnace door (12) and the rear furnace door (13) are closed, the heating chamber heat-insulating layer (61), the front heat-insulating screen (62) and the rear heat-insulating screen (63) are combined to form an insulated closed space.

8. The vacuum sintering furnace with dust filtering function according to claim 1, characterized in that: Also includes: A temperature measuring system, wherein the temperature measuring system is arranged on the furnace body (1), and the temperature measuring system is used to measure and control the temperature inside the furnace body (1).

9. The vacuum sintering furnace with dust filtering function according to claim 8, characterized in that: The temperature measurement system comprises: a temperature measuring thermocouple (71), wherein a telescopic member (711) is provided on the furnace body (1), and the temperature measuring thermocouple (71) is passed through the telescopic member (711) and extends into the interior of the furnace body (1); an infrared thermometer (72), the infrared thermometer (72) being arranged on the furnace body (1); Wherein, the temperature measuring thermocouple (71), the telescopic member (711) and the infrared thermometer (72) are electrically connected to the control system (5).

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