Pressure sensor and method of fabrication

Abstract

The application relates to a pressure sensor and relates to the technical field of pressure sensors.The pressure sensor comprises a shell enclosing an installation cavity, a pressure measurement assembly, a sealing ring, a first pressing part formed by extending a pressure interface into the installation cavity and a glue injection channel.The shell comprises an end knob and a pressure interface combined in an up-down mode.The pressure interface defines a pressure introduction channel which is connected to the installation cavity at an inner side end.The pressure measurement assembly is arranged in the installation cavity and comprises a substrate and a pressure sensitive element fixed to the upper side surface or the lower side surface of the substrate.The sealing ring is pressed downward by the substrate to the pressure interface, and the sealing ring, the lower side of the substrate and the pressure interface enclose a pressure cavity located at the inner side of the sealing ring and a filling cavity located at the outer side of the sealing ring.The pressure sensitive element is connected to the pressure cavity.The first pressing part applies a pressing force to the first sealing ring through the substrate.The glue injection channel is used for injecting sealing glue into the filling cavity.The application has the effect of good sealing.

Description

Technical Field

[0001] This application relates to the field of pressure sensor technology, and in particular to a pressure sensor and its manufacturing method. Background Technology

[0002] A pressure sensor is a device that converts pressure signals into measurable electrical signals. It is widely used in various industrial and scientific fields for monitoring and controlling pressure. Pressure sensors can detect the pressure exerted on the sensor by gases, liquids, or solids and convert it into electrical signals such as voltage, current, or frequency. Based on different types of pressure being measured, pressure sensors can be classified as gauge pressure sensors, differential pressure sensors, and absolute pressure sensors.

[0003] Pressure sensors typically include a pressure port with a pressure inlet channel for connecting to a container containing the medium to be measured. The pressure measuring component needs to be securely connected to the inner end of the pressure inlet channel to prevent leakage of the medium into the sensor. There are two sealing methods between the pressure measuring component and the pressure port: one is adhesive bonding, and the other is pressure sealing using a sealing ring. The sealing performance of pressure sensors using these methods still has room for improvement. Summary of the Invention

[0004] The purpose of this application is to provide a pressure sensor and a method for manufacturing it, which can further improve the sealing performance of the pressure sensor to ensure the measurement accuracy of the pressure sensor.

[0005] Firstly, the pressure sensor provided in this application adopts the following technical solution:

[0006] A pressure sensor includes: a housing forming a mounting cavity, a pressure measuring component, a sealing ring, a first clamping part extending from a pressure interface into the mounting cavity, and an adhesive injection channel. The housing includes an upper and lower assembled end button and a pressure interface, the pressure interface defining a pressure introduction channel with one end connected to the mounting cavity.

[0007] The pressure measuring assembly is disposed in the mounting cavity and includes a substrate and a pressure-sensitive element fixed to the upper or lower surface of the substrate; the sealing ring is pressed down by the substrate to the pressure interface, and it surrounds the lower side of the substrate and the pressure interface to form a pressure cavity located inside the sealing ring and a filling cavity located outside the sealing ring, and the pressure-sensitive element is connected to the pressure cavity; the first pressing part applies a pressing force to the first sealing ring through the substrate; the glue injection channel is used to inject sealant into the filling cavity.

[0008] By adopting the above technical solution, sealant is injected into the filling cavity through the injection channel to form a mating sealing ring and thus a double seal. Furthermore, the first pressing part is riveted onto the pressure measuring component to prevent the cured sealant and sealing ring from loosening. The combination of the double sealing process and the riveting process gives the pressure sensor better sealing performance and ensures measurement accuracy.

[0009] Optionally, the first pressing part is directly pressed onto the substrate, and the dispensing channel includes a hole or notch provided on the edge of the substrate, the lower end of the hole or notch being connected to the filling cavity; the first pressing part is provided with a relief part that exposes the hole or notch upward.

[0010] By adopting the above technical solution, the first pressing part provides a pressing effect while providing a clearance part for the sealant to pass through, so that the sealant can pass through the first pressing part and the substrate in sequence and enter the filling cavity to achieve sealing and filling.

[0011] Optionally, the first pressing part is directly pressed onto the substrate, and the dispensing channel includes a hole or notch provided on the first pressing part, the lower end of the hole or notch being connected to the filling cavity.

[0012] By adopting the above technical solution, the sealant passes through the first pressing part and enters the filling cavity.

[0013] Optionally, it also includes a pressure seat disposed on the substrate, with the first pressing part facing downward, and indirectly applying a pressing force to the edge of the substrate through the pressure seat.

[0014] By adopting the above technical solution, the pressure base can better fix the pressure measuring component and provide installation space for the pressure sensor; furthermore, the first clamping part is then riveted onto the pressure base, thereby improving the protection effect of the pressure measuring component by separating the first clamping part and the base plate through the pressure base.

[0015] Optionally, the dispensing channel includes a hole or notch provided on the pressure seat.

[0016] By adopting the above technical solution, the filling cavity is injected with glue through the glue injection channel on the pressure seat.

[0017] Optionally, the upper edge of the hole or notch may be provided with an upwardly protruding dam or a sunken enclosure.

[0018] By adopting the above technical solution, the setting of the enclosure or dam can prevent the sealant from overflowing onto the pressure measuring component when the sealant is injected from the inlet of the injection channel, thereby providing better protection for the pressure measuring component and ensuring that the pressure measuring component can operate normally after the sealing action is performed.

[0019] Optionally, the pressure base is provided with multiple retaining holes, each of which holds a spring terminal. The pressure measuring assembly also includes a processing circuit disposed on the upper side of the substrate and electrically connected to the pressure-sensitive element.

[0020] The lower end of the spring terminal is electrically connected to the processing circuit via electrical contact, and the upper end of the spring terminal passes through the pressure seat upwards to lead out the electrical signal processed by the processing circuit.

[0021] By adopting the above technical solution, the pressure measurement component leads the signal to the outside of the pressure sensor through the spring terminal, while the retaining hole on the pressure base can initially fix the spring terminal.

[0022] Optionally, the pressure port is provided with a boss or annular groove around one end of the pressure inlet channel; the inner side of the compressed sealing ring is supported on the inner wall of the boss, which is the radially outward side of the annular groove.

[0023] By adopting the above technical solution, in the form of annular grooves or bosses, the sealing ring can be positioned to prevent it from moving and ensure that the sealing ring is installed in place.

[0024] Optionally, the outer edge of the upper end of the pressure port extends upward to form a cylinder, and the upper end of the cylinder forms a second clamping part that presses the end button downward to the pressure port.

[0025] By adopting the above technical solution, the second clamping part is crimped onto the end button, thereby connecting the end button to the pressure interface.

[0026] Secondly, the method for manufacturing a pressure sensor provided in this application adopts the following technical solution:

[0027] S1. A pressure port with a pressure inlet channel is provided, and a cylinder is provided on the pressure port surrounding one end of the inner side of the pressure inlet channel.

[0028] S2. Position a sealing ring around one end of the pressure inlet channel;

[0029] S3. A pressure measuring assembly is provided, the pressure measuring assembly includes a substrate, a processing circuit disposed on the substrate and a pressure-sensitive element, and the substrate is covered onto the sealing ring;

[0030] S4. Press the upper end of the cylinder downward to form a first pressing part to press the base plate and the sealing ring downward, and make the base plate and the pressure interface surround to form a pressure cavity located inside the sealing ring and a filling cavity located outside the sealing ring.

[0031] S5. Inject sealant into the filling cavity through an injection channel formed by the first pressing part or the substrate or the combination of the two, and allow the sealant to cure.

[0032] S6. Install the end button with the terminal onto the pressure port, and simultaneously or before doing so, electrically connect the terminal to the processing circuit.

[0033] By adopting the above technical solution, the pressure sensor produced has good sealing performance, ensuring measurement accuracy.

[0034] In summary, this application includes at least one of the following beneficial technical effects:

[0035] 1. In this application, the sealing ring pressed against the pressure port provides a primary seal for the mounting cavity; the sealing ring, the substrate, and the pressure port enclose the cavity to form a filling cavity on the outside, and a double seal is formed by injecting sealant into the filling cavity in conjunction with the sealing ring.

[0036] Furthermore, the first clamping part presses the substrate to prevent the cured sealant and sealing ring from loosening. The combination of the dual sealing process and the riveting process gives the pressure sensor better sealing performance and ensures measurement accuracy.

[0037] 2. In this application, a pressure seat is provided, which presses and fixes the pressure measuring component in the circumferential positive direction to improve the fixing effect; furthermore, the first pressing part is then pressed and riveted onto the pressure seat, and the pressure seat separates the first pressing part and the substrate to improve the protection effect of the pressure measuring component.

[0038] 3. In addition to being formed on the first pressing part or the substrate, the glue injection channel in this application can also be formed on the pressing base, and the glue injection channel is provided with a glue collection structure (i.e., a wall or dam) at the inlet of the glue injection channel to prevent the sealant from splashing onto the circuit board and damaging the circuit board during the potting of the sealant.

[0039] 4. The pressure base in this application has a retaining hole, which can initially limit the spring terminal, thereby facilitating the installation of the spring terminal and allowing the pressure signal to be smoothly led out to the outside. Attached Figure Description

[0040] Figure 1 This is a cross-sectional structural schematic diagram of the pressure sensor in this application;

[0041] Figure 2 yes Figure 1 A magnified view of part A in the middle;

[0042] Figure 3 This is a partial structural diagram of the glue injection channel in the first pressing part of this application;

[0043] Figure 4 is a partial structural diagram of the glue injection channel in this application when it is located in other positions.

[0044] In the figure, 1. Outer shell; 11. End button; 111. Through hole; 12. Pressure interface; 121. Pressure introduction channel; 122. Boss; 2. Mounting cavity; 21. Pressure cavity; 22. Filling cavity; 3. Pressure measuring component; 31. Base plate; 311. Pressure through hole; 32. Processing circuit; 33. Pressure sensitive element; 4. Sealing ring; 5. First clamping part; 50. Relief part; 51. Vertical section; 52. Horizontal section; 53. Clamping section; 6. Glue injection channel; 7. Pressure seat; 71. Mating surface; 72. Retaining hole; 8. Spring terminal; 9. Second clamping part; 10. Sealant; 20. Glue collection structure; 30. Connecting part. Detailed Implementation

[0045] The following will be combined with the appendix Figure 1 -4 provides a clear and complete description of the technical solution of this application. The following embodiments are exemplary and are only used to explain this application, and should not be construed as limiting this application. In the following description, the same reference numerals are used to denote the same or equivalent elements, and repeated descriptions are omitted.

[0046] In the description of this application, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this application and to simplify the description, and are not intended to indicate or imply that the equipment or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0047] Furthermore, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0048] It should also be further understood that the term "and / or" as used in this application specification and the corresponding claims refers to any combination of one or more of the listed items and all possible combinations.

[0049] Example 1:

[0050] A pressure sensor, reference Figure 1 and Figure 2The system includes a housing 1 and a pressure measuring assembly 3. The housing 1 includes an upper and lower assembled end cap 11 and a pressure interface 12, with the upper end face of the end cap 11 and the pressure interface 12 forming a mounting cavity 2. The pressure interface 12 defines a pressure inlet channel 121 with one end connected to the mounting cavity 2.

[0051] The pressure measuring component 3 is disposed in the mounting cavity 2. The pressure measuring component 3 may include a substrate 31, a processing circuit 32 (preferably a circuit board) and a pressure-sensitive element 33 fixed to the upper or lower surface of the substrate 31.

[0052] In this embodiment, the pressure-sensitive element 33 is specifically fixed to the upper surface of the substrate 31. The substrate 31 is provided with a pressure through hole 311 (not marked) that communicates with the pressure chamber 21, and the pressure-sensitive element 33 blocks the upper end of the pressure through hole 311.

[0053] Furthermore, the processing circuit 32 may be located on the upper surface of the substrate 31, and the processing circuit 32 is electrically connected to the pressure-sensitive element 33. After the medium enters the mounting cavity 2 from the pressure introduction channel 121, the pressure-sensitive element 33 senses the pressure of the medium entering the pressure cavity 21 and generates a pressure signal. Subsequently, the processing circuit 32 converts the pressure signal into an electrical signal, thereby measuring the pressure of the medium.

[0054] A sealing ring 4 may be provided between the substrate 31 and the pressure interface 12. The sealing ring 4 is pressed downward by the substrate 31 to the upper end face of the pressure interface 12 and surrounds one end of the pressure introduction channel 121 (i.e., the upper end in the figure). In this embodiment, a first pressing part 5 extends into the mounting cavity 2 on the pressure interface 12. The first pressing part 5 applies a downward pressing force to the first sealing ring 4 through the substrate 31. After the sealing ring 4 is pressed by the first pressing part 5, the sealing ring 4, the lower side of the substrate 31, and the upper end face of the pressure interface 12 form a pressure cavity 21 located inside the sealing ring 4 and a filling cavity 22 located outside the sealing ring 4. The filling cavity 22 may be filled with sealant 10. The pressure interface 12 may be made of metal.

[0055] Specifically, in this embodiment, the first clamping part 5 can be pressed and riveted onto the substrate 31, thereby indirectly providing the aforementioned downward clamping force to the sealing ring 4 through the substrate 31. The first clamping part 5 clamps the substrate 31, enabling the sealing ring 4 to perform its sealing function effectively and preventing the medium from flowing out of the mounting cavity 2. After passing through the pressure introduction channel 121, the medium enters the pressure chamber 21, and the pressure measuring component 3 measures the pressure of the medium. The filling cavity 22 can be filled with sealant 10, and the sealant 10 and the sealing ring 4 combine to form a double seal.

[0056] Furthermore, in order to better position the sealing ring 4 and achieve higher installation accuracy, the pressure port 12 may be provided with a boss 122 or an annular groove surrounding one end of the inner side of the pressure inlet channel 121. In this embodiment, the pressure port 12 is preferably provided with a boss 122, and the inner side of the compressed sealing ring 4 is supported on the outer wall of the boss 122, thereby positioning the sealing ring 4.

[0057] It should be noted that in other embodiments, an annular groove can also be provided on the pressure port 12, in which case the outer wall of the compressed sealing ring 4 is supported by the annular wall of the annular groove.

[0058] Furthermore, a pressure seat 7 is provided on the substrate 31. The first pressing part 5 faces downward, and the aforementioned pressing force is indirectly applied to the edge of the substrate 31 through the pressure seat 7. After the sealing ring 4 and the pressure measuring component 3 are sequentially positioned and installed around one end of the pressure inlet channel 121, the pressure seat 7 is pressed onto the substrate 31 to further fix the substrate 31. The first pressing part 5 is riveted to the pressure seat 7, and the pressure measuring component 3 is better protected by the pressure seat 7 separating the first pressing part 5 and the pressure seat 7. At the same time, the risk of short circuit to the processing circuit 32 caused by the metal first pressing part 5 directly pressing against the upper side of the substrate 31 can be avoided.

[0059] It should be noted that in this embodiment, the first pressing part 5 is a vertical cylinder before pressing, and the end of the cylinder away from the pressure port 12 is pressed downward to form the first pressing part 5.

[0060] Furthermore, the end of the pressure base 7 facing away from the substrate 31 is provided with a mating surface 71 (specifically, a conical surface), and the mating surface 71 is provided along the outer edge of the pressure base 7. The first pressing part 5 is pressed and riveted to the wall surface of the mating surface 71, so that the first pressing part 5 does not need to be bent at an excessive angle, and can fit well with the pressure base 7, ensuring the sealing performance of the sensor.

[0061] Correspondingly, in this embodiment, the pressure base 7 is provided with a glue injection channel 6, which is meandering and connected to the filling cavity 22. The sealant 10 is injected into the filling cavity 22 through the inlet of the glue injection channel 6. Furthermore, a glue collecting structure 20 is provided at the inlet of the glue injection channel 6, which can prevent the sealant 10 from splashing onto the circuit board during the injection process.

[0062] It should be noted that the form of the injection channel 6 can be various (e.g., hole, notch). This application does not impose specific restrictions on the form of the injection channel 6, as long as the injection channel 6 can be connected to the filling cavity 22 and the sealant 10 can be smoothly injected into the filling cavity 22.

[0063] The glue collection structure 20 can be a wall, a dam, or other form. For example, the inlet of the glue injection channel 6 is recessed toward the pressure port 12 to form a wall around it, or the inlet of the glue injection channel 6 extends toward the end button 11 to form a dam.

[0064] In this embodiment, the adhesive collection structure 20 is in the form of a wall.

[0065] In addition, refer to Figure 1 and Figure 2 The pressure base 7 may also have multiple retaining holes 72, each retaining a spring terminal 8. Specifically, the spring terminal 8 may include a large-diameter portion and a small-diameter portion, with the large neck and small-diameter portion integrally formed. The large neck is oriented towards the circuit board, and both ends of the large-diameter portion have tapered surfaces. One end of the spring terminal 8 is electrically connected to the circuit board via electrical contact, and the other end of the spring terminal 8 extends out of the pressure base 7 to lead out the electrical signal processed by the circuit board.

[0066] The end button 11 has a through hole 111 through which the spring terminal 8 passes. The cross-section of the through hole 111 is tapered. The tapered surface at the large diameter end of the spring terminal 8 fits tightly with the tapered surface at the through hole 111, thereby limiting the spring terminal 8 and preventing the spring terminal 8 from shifting.

[0067] After the sealing ring 4, pressure measuring assembly 3, and pressure base 7 are installed in place, the spring terminal 8 is inserted into the retaining hole 72 and connected to the processing circuit 32. The retaining hole 72 initially limits the spring terminal 8. At this time, the through hole 111 on the end button 11 is aligned with the spring terminal 8, so that the small diameter part of the spring terminal 8 passes through the through hole 111, while a conical surface of the large diameter part of the spring terminal 8 (located at the waist of the spring terminal 8) is tightly fitted with the wall surface of the through hole 111, thereby being retained in the retaining hole 72.

[0068] It should be noted that in some other embodiments, the spring terminal 8 may not extend through the button 11. Specifically, a pin is fixed on the button 11, and another circuit board is provided on the side of the button 11 near the substrate 31; the pin passes through the button 11 and is soldered to one side of the circuit board, while the spring terminal 8 forms electrical contact with the other side of the circuit board.

[0069] Furthermore, in this embodiment, the end button 11 is fixedly connected to the pressure interface 12 by means of press riveting. Specifically, a cylindrical body is further provided on the pressure interface 12. When the end button 11 is engaged with the pressure interface 12, the upper end of the cylindrical body is pressed downward to form a second pressing part 9 that is press riveted to the end button 11.

[0070] In this embodiment, the two cylindrical bodies forming the first pressing part 5 and the second pressing part 9 can be integrally formed. Specifically, refer to... Figure 1 A ring-shaped connecting portion 30 is provided between the first clamping portion 5 and the second clamping portion 9. The connecting portion 30 is fixed to the pressure port 12, with its inner ring connected to the first clamping portion 5 and its outer ring connected to the second clamping portion 9. The connecting portion 30 can be welded to the upper end face of the metal pressure port 12 or molded within the plastic pressure port 12.

[0071] In other embodiments, the two cylindrical bodies forming the first clamping part 5 and the second clamping part 9 can be separately configured, that is, the two cylindrical bodies are integrally connected to the pressure port 12. This application does not specifically limit the specific form of the first clamping part 5 and the second clamping part 9, as long as the riveting function can be performed.

[0072] Furthermore, this embodiment also discloses a method for manufacturing a pressure sensor, including the following steps:

[0073] S1. A pressure port 12 with a pressure inlet channel 121 is provided, and a cylinder is provided on the pressure port 12 surrounding one end of the inner side of the pressure inlet channel 121.

[0074] S2. Position a sealing ring 4 around one end of the pressure inlet channel 121;

[0075] S3. A pressure measuring component 3 is provided. The pressure measuring component 3 includes a substrate 31, a processing circuit 32 disposed on the substrate 31, and a pressure sensing element 33. The substrate 31 is covered onto the sealing ring 4.

[0076] S4. Press the upper end of the cylinder downward to form a first pressing part 5 to press the base plate 31 and the sealing ring 4 downward, and make the base plate 31 and the pressure interface 12 surround to form a pressure cavity 21 located inside the sealing ring 4 and a filling cavity 22 located outside the sealing ring 4.

[0077] S5. Sealant 10 is injected into the filling cavity 22 through an injection channel 6 formed by the first pressing part 5 or the substrate 31 or the combination of the two, and the sealant 10 is cured.

[0078] S6. Install the end button 11 with the terminal onto the pressure port 12, and simultaneously or before this, electrically connect the terminal to the processing circuit 32.

[0079] In this embodiment, the mounting cavity 2 is first-level sealed by the sealing ring 4 pressed against the pressure interface 12. The pressed sealing ring 4 surrounds the lower side of the substrate 31 and the pressure interface 12, forming a pressure cavity 21 located inside the sealing ring 4 and a filling cavity 22 located outside the sealing ring 4. Sealant 10 can be injected into the filling cavity 22 through the injection channel 6, thereby forming a double seal between the sealant 10 and the sealing ring 4.

[0080] Furthermore, the first pressing part 5 presses the substrate 31. The setting of the first pressing part 5 prevents the cured sealant 10 and sealing ring 4 from loosening. The combination of the double sealing process and the riveting process gives the pressure sensor better sealing performance and ensures measurement accuracy.

[0081] Example 2:

[0082] Reference Figure 3 The difference between this embodiment and Embodiment 1 is that the location of the glue injection channel 6 is different. In this embodiment, the glue injection channel 6 is located on the first pressing part 5, and the specific form of the first pressing part 5 has been adjusted.

[0083] The first pressing part 5 includes a vertical section 51, a horizontal section 52, and a pressing section 53 connected in sequence. The vertical section 51 is connected to the pressure port 12; the pressing section 53 is inclined and pressed against the inclined surface of the mating surface 71; and the glue injection channel 6 is vertically opened on the horizontal section 52.

[0084] When the first pressing part 5 of the cylinder is formed, the glue injection channel 6 is first opened on the end of the cylinder, and then the end of the cylinder is bent twice to form the vertical section 51, the horizontal section 52 and the pressing section 53 connected in sequence.

[0085] In this embodiment, by adjusting the shape of the first pressing part 5, the pressure seat 7 is prevented from blocking the glue injection channel 6 when the glue injection channel 6 is opened on the first pressing part 5, so that the sealant 10 can enter the filling cavity 22 from the glue injection channel 6 on the first pressing part 5.

[0086] Example 3:

[0087] Referring to Figure 4, the difference between this embodiment and the previous embodiment is that the pressure seat 7 is omitted. The first pressing part 5 directly presses against the substrate 31, and the first pressing part 5 includes a vertical section 51 and a horizontal section 52. Correspondingly, the glue injection channel 6 is formed on the substrate 31 or the first pressing part 5. This embodiment lists three forms of the glue injection channel 6. It should be noted that the form of the glue injection channel 6 is not limited to the above three, and all adaptive adjustments to the glue injection channel 6 should be covered within the protection scope of this application.

[0088] Reference Figure 4a At this time, the glue injection channel 6 is opened at the edge of the substrate 31, and the first pressing part 5 is provided with a relief part 50, which avoids the inlet of the glue injection channel 6. When glue is injected, the sealant 10 passes through the relief part 50 and the glue injection channel 6 in sequence and enters the filling cavity 22.

[0089] Furthermore, referring to Figure 4b and Figure 4c At this time, the glue injection channel 6 is opened on the first pressing part 5. When the edge of the substrate 31 abuts against the vertical section 51, the glue injection channel 6 adopts... Figure 4b The form of the injection channel 6 is a meandering arrangement; when the edge of the substrate 31 is in clearance fit with the vertical section 51, the injection channel 6 adopts... Figure 4c In this form, the glue injection channel 6 is directly vertically opened on the transverse section 52.

[0090] This embodiment simplifies the assembly of the pressure sensor by eliminating the pressure seat 7. When filling the filling cavity 22 with sealant 10, it can be done through the injection channel 6 formed on the first pressing part 5 or the substrate 31.

[0091] The embodiments described in this specific description are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Identical components are represented by the same reference numerals. Therefore, all equivalent changes made to the structure, shape, and principle of this application should be covered within the scope of protection of this application.

Claims

1. A pressure sensor, characterized in that, include: The outer shell (1) that forms a mounting cavity (2) includes an upper and lower combined end button (11) and a pressure port (12), the pressure port (12) defining a pressure inlet channel (121) with one end connected to the mounting cavity (2). The pressure measurement assembly (3) is disposed in the mounting cavity (2) and includes a base plate (31) and a pressure-sensitive element (33) fixed to the upper or lower surface of the base plate (31). The sealing ring (4) is pressed down by the substrate (31) to the pressure port (12), and it surrounds the lower side of the substrate (31) and the pressure port (12) to form a pressure cavity (21) located inside the sealing ring (4) and a filling cavity (22) located outside the sealing ring (4). The pressure sensitive element (33) is connected to the pressure cavity (21). A first clamping part (5) extends from the pressure port (12) into the mounting cavity (2), and applies a clamping force to the sealing ring (4) via the base plate (31); and a glue injection channel (6) for injecting sealant (10) into the filling cavity (22); It also includes a pressure seat (7) disposed on the substrate (31), with the first pressing part (5) facing downward, and the pressure seat (7) indirectly applies a pressing force to the edge of the substrate (31); The outer edge of the upper end of the pressure port (12) extends upward to form a cylinder, and the upper end of the cylinder forms a second pressing part (9) that presses the end button (11) downward to the pressure port.

2. A pressure sensor according to claim 1, characterized in that, The first pressing part (5) is pressed directly onto the substrate (31), and the glue injection channel (6) includes a hole or notch provided on the side of the substrate (31), and the lower end of the hole or notch is connected to the filling cavity (22); the first pressing part (5) is provided with a relief part (50) that exposes the hole or notch upward.

3. A pressure sensor according to claim 1, characterized in that, The first pressing part (5) is directly pressed onto the substrate (31), and the glue injection channel (6) includes a hole or notch provided on the first pressing part (5), and the lower end of the hole or notch is connected to the filling cavity (22).

4. A pressure sensor according to claim 1, characterized in that, The glue injection channel (6) includes a hole or notch provided on the pressure seat (7).

5. A pressure sensor according to claim 4, characterized in that, The upper edge of the hole or notch is provided with an upwardly protruding dam or a sunken enclosure.

6. A pressure sensor according to claim 4, characterized in that, The pressure base (7) is provided with a plurality of holding holes (72), and each of the plurality of holding holes (72) holds a spring terminal (8). The pressure measuring assembly (3) also includes a processing circuit (32) disposed on the upper side of the substrate (31) and electrically connected to the pressure sensitive element (33). The lower end of the spring terminal (8) is electrically connected to the processing circuit (32) in an electrical contact manner, and the upper end of the spring terminal (8) passes through the pressure seat (7) upwards to lead out the electrical signal processed by the processing circuit (32).

7. A pressure sensor according to claim 1, characterized in that, The pressure port (12) is provided with a boss (122) or annular groove around one end of the inner side of the pressure inlet channel (121); the inner side of the compressed sealing ring (4) is supported on the outer wall of the boss (122) on the inner wall of the annular groove facing radially outward.

8. A method for manufacturing a pressure sensor, characterized in that, The method for preparing the pressure sensor according to any one of claims 1-7 comprises the following steps: S1. A pressure port (12) with a pressure inlet channel (121) is provided, and a cylinder is provided on the pressure port (12) surrounding one end of the inner side of the pressure inlet channel (121); S2. Position a sealing ring (4) around one end of the pressure inlet channel (121); S3. A pressure measuring component (3) is provided. The pressure measuring component (3) includes a substrate (31), a processing circuit (32) disposed on the substrate (31) and a pressure sensing element (33). The substrate (31) is covered onto the sealing ring (4). S4. Press the upper end of the cylinder downward to form a first pressing part (5) to press the base plate (31) and the sealing ring (4) downward, and make the base plate (31) and the pressure interface (12) surround to form a pressure cavity (21) located inside the sealing ring (4) and a filling cavity (22) located outside the sealing ring (4). S5. Sealant (10) is injected into the filling cavity (22) through an injection channel (6) formed by the first pressing part (5) or the substrate (31) or between the two, and the sealant (10) is cured. S6. Install the end button (11) with the terminal onto the pressure port (12), and simultaneously or before this, electrically connect the terminal to the processing circuit (32).

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