An automated scanning device for the appearance defects of a quartz diffusion tube

Abstract

The present invention relates to the field of optical detection technologies, and particularly to an automated scanning device for appearance defects of a quartz diffusion tube. Its film-type reflective device includes a film covering mechanism, a guiding mechanism, and a film pasting mechanism that are sequentially arranged along the advancing direction of the moving axis. The film covering mechanism includes a plurality of winding rollers and a guiding roller group that are fixed on the periphery of the moving axis and are evenly distributed. The winding rollers wind a reflective film, and one end of the reflective film passes through the guiding roller group and is fixed with an arc-shaped chuck. The present invention solves the problems that when the existing quartz diffusion tube is subjected to laser scanning, the coated reflective powder is difficult to remove, and it will cause contamination and damage to the tube body.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection, and particularly to an automatic scanning device for appearance defects of a quartz diffusion tube. Background Art

[0002] In the semiconductor manufacturing industry, quartz diffusion tubes are widely used as important components. However, during the production process, defects such as cracks and scratches may occur on the surface of the quartz diffusion tube due to various reasons, and these defects will affect the quality and performance of the product. Traditional detection methods are manual visual inspection or laser scanning for appearance defect detection. With the development of the industry, the laser scanning method has taken the leading position.

[0003] Existing laser scanning has relatively strict environmental requirements and often encounters reflection and scattering problems caused by the material of the quartz diffusion tube during operation. In the prior art, special coatings, reflective powders, reflective stickers, etc. are added to the quartz diffusion tube to improve the environment. Also, because the quartz diffusion tube is relatively small, a mixture of glue and reflective powder is often used and attached to the inner wall of the diffusion tube by the dipping method or spraying method. However, this method is difficult to remove after use, so it is easy to cause pollution and damage to the diffusion tube. Summary of the Invention

[0004] The object of the present invention is to propose an automatic scanning device for appearance defects of a quartz diffusion tube aiming at the problems in the background art.

[0005] The technical solution of the present invention: An automatic scanning device for appearance defects of a quartz diffusion tube includes positioning sleeves and moving shafts respectively arranged on both sides of a frame body, and further includes a light-shielding device installed on the frame body. A quartz diffusion tube body to be detected is sleeved on the positioning sleeve, and a film-type reflective device that can enter the quartz diffusion tube body is arranged on the moving shaft. The film-type reflective device includes a film covering mechanism, a guiding mechanism, and a film pasting mechanism arranged in sequence along the advancing direction of the moving shaft;

[0006] The film covering mechanism includes a plurality of winding rollers and guiding roller groups that are fixed on the periphery of the moving shaft and are evenly distributed. The winding rollers wind a reflective film, and one end of the reflective film passes through the guiding roller group and is fixed with an arc-shaped chuck. The guiding mechanism includes a guiding disk fixed on the moving shaft, and a plurality of rubber wheels that are rotatably installed in a circular distribution are arranged in the guiding disk;

[0007] The film applying mechanism includes an installation cylinder with the center and the moving shaft coinciding, and also includes a plurality of rubber air bags arranged in a circular distribution and fixed on the outer side of the installation cylinder. A power assembly for driving the installation cylinder to rotate and inflating the rubber air bags is arranged inside the film applying mechanism. The light shielding device includes two light shielding covers respectively arranged on both sides of the moving shaft, and also includes a driving mechanism for driving the two light shielding covers to close and surround the film applying mechanism. A detection mechanism and an electric heating plate are arranged on the two light shielding covers, and the driving mechanism operates when the moving shaft moves;

[0008] The light shielding cover is provided with a moving groove. The detection mechanism includes a reciprocating lead screw installed in the moving groove. A motor is installed in the moving groove, and the reciprocating lead screw is fixedly connected to the output end of the motor. Moving seats are threadedly installed on both of the reciprocating lead screws. A laser scanner and a detection lamp are respectively installed on the two moving seats. The detection mechanism also includes a supplementary light lamp fixed inside the light shielding cover, and a micro industrial camera installed on the push plate.

[0009] Preferably, the film covering mechanism further includes a plurality of first mounting frames and second mounting frames respectively fixed on the periphery of the moving shaft and distributed at equal intervals. The winding roller is rotatably installed on the first mounting frame, and the guiding roller group is rotatably installed on the second mounting frame. The guiding roller group is composed of two guiding rollers rotatably installed on the second mounting frame. A support rod is fixedly installed on the second mounting frame, and an arc-shaped clamping plate is fixedly installed on the arc-shaped clamping head.

[0010] Preferably, the guiding mechanism further includes a circular groove opened on the guiding disk. A plurality of partition plates are equidistantly installed in the circular groove, and a rotating shaft is rotatably installed between adjacent partition plates. The rubber wheel is fixedly installed on the rotating shaft.

[0011] Preferably, the power assembly includes a gear sleeve fixed inside the installation cylinder, and also includes a reduction motor fixed on the moving shaft. A gear is fixed to the output end of the reduction motor, and the gear meshes with the gear sleeve. A hollow column is fixed on the gear, and a corrugated wheel is fixedly installed on the hollow column. The power assembly further includes a micro air cylinder fixed below the moving shaft. The micro air cylinder includes an air injection head cooperating with the corrugated wheel. The moving shaft includes a trachea, and the micro air cylinder further includes an air delivery pipe communicated with the trachea. One end of a hollow pipe is fixedly connected and communicated with the hollow column, and the other end of the hollow pipe is rotatably installed in the trachea and communicated with it. An air delivery pipe is fixedly connected and communicated between the corrugated wheel and the rubber air bag. Stabilizing sleeves are installed on both sides of the installation cylinder, and the stabilizing sleeves are rotatably sleeved on the moving shaft.

[0012] Preferably, the reflective film sequentially includes a reflective powder adhesive layer, a high-temperature resistant flexible layer, and a first smooth layer from top to bottom. The reflective powder adhesive layer is adhered to the high-temperature resistant flexible layer. A second smooth layer and a heat insulation layer are sequentially arranged on the rubber air bag from outside to inside.

[0013] Preferably, a shielding plate is fixedly installed on the moving shaft, a pushing plate is slidably installed on the positioning sleeve, cylinders are installed on both sides of the frame body, and the pushing ends of the two cylinders are fixedly connected to the moving shaft and the pushing plate respectively.

[0014] Preferably, the driving mechanism includes a housing fixed to the frame body. An adjusting column and an adjusting gear are rotatably installed in the housing. The light-shielding cover is fixedly installed on the adjusting column. A driven bevel gear is fixedly installed on the adjusting column. A driving bevel gear is fixedly installed on the adjusting gear. The driven bevel gear and the driving bevel gear are engaged. A movable moving rod is provided in the housing. A toothed plate engaged with the adjusting gear is fixedly installed on the moving rod. The moving rod is fixedly connected to the shielding plate.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: By attaching the reflective powder adhesive layer to the high-temperature resistant flexible layer to form a reflective film, and automatically attaching the reflective film to the inner wall of the quartz reaction tube through the film type reflective device, and then using the heat generated by the electric heating plate through the film attaching mechanism, the reflective powder adhesive layer can be semi-melted and evenly coated on the inner wall of the quartz reaction tube, thereby avoiding the problems of refraction and reflection during the operation of the laser scanner, improving the scanning effect, and after the operation, the reflective powder adhesive layer can be torn off through the reflective film, without causing pollution and damage to the quartz reaction tube. Description of the Drawings

[0016] Figure 1 is the structural schematic diagram of the present invention;

[0017] Figure 2 is the side view structural schematic diagram of the present invention;

[0018] Figure 3 is the structural schematic diagram of the film coating mechanism and the guiding mechanism of the present invention;

[0019] Figure 4 is the structural schematic diagram of the reflective film of the present invention;

[0020] Figure 5 is the side view sectional structural schematic diagram of the film attaching mechanism of the present invention;

[0021] Figure 6 is Figure 5 the enlarged structural schematic diagram at A in

[0022] Figure 7 is the structural schematic diagram of the power assembly of the present invention;

[0023] Figure 8 is the front view sectional structural schematic diagram of the film attaching mechanism of the present invention;

[0024] Figure 9 is the structural schematic diagram of the driving mechanism of the present invention.

[0025] Reference Signs: 1, film covering mechanism; 2, guiding mechanism; 3, film pasting mechanism; 4, power assembly; 5, light shielding device; 6, reflective film; 7, pushing plate; 8, shielding plate; 9, detection mechanism; 11, winding roller; 12, first mounting bracket; 13, second mounting bracket; 14, guiding roller set; 15, support rod; 21, guiding disc; 22, rotating shaft; 23, rubber wheel; 24, circular groove; 25, partition board; 31, mounting cylinder; 32, rubber airbag; 33, stabilizing sleeve; 41, gear sleeve; 42, reduction motor; 43, gear; 44, micro air cylinder; 45, air injection head; 46, corrugated wheel; 47, hollow column; 48, hollow pipe; 49, air supply pipe; 51, light shielding cover; 52, driving mechanism; 53, moving groove; 521, adjusting column; 522, driven bevel gear; 523, driving bevel gear; 524, adjusting gear; 525, moving rod; 526, toothed plate; 527, housing; 61, arc chuck; 62, arc clamping plate; 63, first smooth layer; 64, high temperature resistant flexible layer; 65, reflective powder adhesive layer; 91, reciprocating lead screw; 92, laser scanner; 93, detection lamp; 94, micro industrial camera; 95, fill light; 100, moving shaft; 101, air guide pipe; 200, quartz diffusion tube body; 300, second smooth layer; 400, electric heating plate; 500, gas transmission pipe; 600, positioning sleeve; 700, heat insulation layer. Detailed Embodiment

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0027] Referring to the attached Figures 1-9 , an automatic scanning device for the appearance defects of a quartz diffusion tube, including positioning sleeves 600 and a moving shaft 100 respectively arranged on both sides of the frame body, and further including a light shielding device 5 installed on the frame body. A quartz diffusion tube body 200 to be detected is sleeved on the positioning sleeve 600, and a film type reflective device that can enter the quartz diffusion tube body 200 is arranged on the moving shaft 100. The film type reflective device includes a film covering mechanism 1, a guiding mechanism 2, and a film pasting mechanism 3 arranged in sequence along the advancing direction of the moving shaft 100;

[0028] The film covering mechanism 1 includes a plurality of winding rollers 11 and a guiding roller set 14 that are fixed on the periphery of the moving shaft 100 and are evenly distributed. The winding roller 11 winds a reflective film 6. One end of the reflective film 6 passes through the guiding roller set 14 and is fixed with an arc chuck 61. The guiding mechanism 2 includes a guiding disc 21 fixed on the moving shaft 100, and a plurality of rubber wheels 23 that are rotatably installed in the guiding disc 21 and are circularly distributed;

[0029] The film pasting mechanism 3 includes an installation cylinder 31 with its center of circle coinciding with the moving shaft 100, and also includes a plurality of rubber air bags 32 that are circularly distributed and fixed on the outer side of the installation cylinder 31. A power assembly 4 for driving the rotation of the installation cylinder 31 and inflating the rubber air bags 32 is provided inside the film pasting mechanism 3. The light shielding device 5 includes two light shielding covers 51 respectively arranged on both sides of the moving shaft 100, and also includes a driving mechanism 52 for driving the two light shielding covers 51 to close and surround the film pasting mechanism 3. A detection mechanism 9 and an electric heating plate 400 are provided on the two light shielding covers 51, and the driving mechanism 52 operates when the moving shaft 100 moves.

[0030] When the film type reflection device enters the quartz diffusion tube body 200, the arc-shaped chuck 61 is hung on one end of the quartz diffusion tube body 200. As the quartz diffusion tube body 200 moves, the winding roller 11 and the guide roller group 14 release the reflective film 6 along the inner wall of the quartz diffusion tube body 200. The rubber wheel 23 pushes the reflective film 6 against the inner wall of the quartz diffusion tube body 200. The film pasting mechanism 3 makes the reflective film 6 tightly adhere to the inner wall of the quartz diffusion tube body 200, forming an anti-laser reflection and scattering coating through heating. And as the quartz diffusion tube body 200 moves, the two light shielding covers 51 close and surround the quartz diffusion tube body 200 to form a detection environment. Subsequently, the film pasting mechanism 3 drives the quartz diffusion tube body 200 to rotate and scan through the detection mechanism 9.

[0031] Furthermore, the film covering mechanism 1 also includes a plurality of first mounting frames 12 and second mounting frames 13 that are respectively fixed on the circumferential side of the moving shaft 100 and are equally spaced. The winding roller 11 is rotatably mounted on the first mounting frame 12, and the guide roller group 14 is rotatably mounted on the second mounting frame 13. The guide roller group 14 is composed of two guide rollers rotatably mounted on the second mounting frame 13. A support rod 15 is fixedly mounted on the second mounting frame 13, and an arc-shaped clamping plate 62 is fixedly mounted on the arc-shaped chuck 61.

[0032] When the reflective film 6 is in a wound state, the support rod 15 is stuck between the arc-shaped chuck 61 and the arc-shaped clamping plate 62, so that the arc-shaped chuck 61 is supported.

[0033] Furthermore, the guiding mechanism 2 also includes a circular groove 24 opened on the guiding disk 21. A plurality of partition plates 25 are equally spaced and installed in the circular groove 24. A rotating shaft 22 is rotatably installed between adjacent partition plates 25, and the rubber wheel 23 is fixedly installed on the rotating shaft 22.

[0034] When the winding roller 11 unwinds the reflective film 6, the rubber wheel 23 contacts the reflective film 6. As the moving shaft 100 moves, the frictional force generated by the contact of the rubber wheel 23 will cause it to rotate, thereby squeezing and pushing the reflective film 6 against the inner wall of the quartz diffusion tube body 200.

[0035] Furthermore, as Figure 5 and Figure 7As shown in the figure, the power assembly 4 includes a gear sleeve 41 fixed inside the mounting cylinder 31, and further includes a reduction motor 42 fixedly installed on the moving shaft 100. A gear 43 is fixed to the output end of the reduction motor 42. The gear 43 meshes with the gear sleeve 41. A hollow column 47 is fixed to the gear 43. A corrugated wheel 46 is fixedly installed on the hollow column 47. The power assembly 4 further includes a micro air cylinder 44 fixed below the moving shaft 100. The micro air cylinder 44 includes an air injection head 45 that cooperates with the corrugated wheel 46. The moving shaft 100 includes an air guide pipe 101. The micro air cylinder 44 further includes an air delivery pipe 500 that communicates with the air guide pipe 101. One end of a hollow pipe 48 is fixedly connected to and communicates with the hollow column 47. The other end of the hollow pipe 48 is rotatably installed in the air guide pipe 101 and communicates with it. A gas delivery pipe 49 is fixedly connected and communicates between the corrugated wheel 46 and the rubber airbag 32. Stabilizing sleeves 33 are installed on both sides of the mounting cylinder 31. The stabilizing sleeves 33 are rotatably sleeved on the moving shaft 100.

[0036] Starting the reduction motor 42 will drive the mounting cylinder 31 to rotate, and continuously squeeze the air injection head 45 through the rotation of the corrugated wheel 46, so that the micro air cylinder 44 delivers air to the rubber airbag 32, causing the rubber airbag 32 to expand and press on the reflective film 6, so that the reflective film 6 is supported and tightly adheres to the inner wall of the quartz diffusion tube body 200, and drives the quartz diffusion tube body 200 to rotate for detection, thus completing the entire installation of the reflective film 6.

[0037] Moreover, the rubber airbag 32 is provided with air outlet holes, and the air outlet efficiency of the air outlet holes is less than the air delivery efficiency of the gas delivery pipe 49 to the rubber airbag 32. This ensures that when the rubber airbag 32 is in use, it can always be in an inflated state, and when the operation is completed, the gas can be slowly discharged through the air outlet holes. Such a setting facilitates the film applying mechanism 3 to enter and exit the quartz diffusion tube body 200.

[0038] Moreover, the reflective film 6 sequentially includes a reflective powder adhesive layer 65, a high-temperature resistant flexible layer 64, and a first smooth layer 63 from top to bottom. The reflective powder adhesive layer 65 is adhered to the high-temperature resistant flexible layer 64. The rubber airbag 32 is sequentially provided with a second smooth layer 300 and a heat insulation layer 700 from outside to inside.

[0039] The heat insulation layer 700 can isolate the heat during operation and protect the safety of the rubber airbag 32. The second smooth layer 300 can reduce the friction when the film applying mechanism 3 first contacts the reflective film 6, ensuring that the power assembly 4 can drive the film applying mechanism 3 to rotate. Thus, during the process of the film applying mechanism 3 rotating and the rubber airbag 32 inflating and expanding, the reflective film 6 can be completely adhered to the inner wall of the quartz diffusion tube body 200.

[0040] In this embodiment, a shielding plate 8 is fixedly installed on the moving shaft 100, a pushing plate 7 is slidably installed on the positioning sleeve 600, cylinders are installed on both sides of the frame body, and the pushing ends of the two cylinders are fixedly connected to the moving shaft 100 and the pushing plate 7 respectively. The driving mechanism 52 includes a housing 527 fixed to the frame body. An adjusting column 521 and an adjusting gear 524 are rotatably installed in the housing 527. The light shielding cover 51 is fixedly installed on the adjusting column 521. A driven bevel gear 522 is fixedly installed on the adjusting column 521. A driving bevel gear 523 is fixedly installed on the adjusting gear 524. The driven bevel gear 522 meshes with the driving bevel gear 523. A movable moving rod 525 is provided in the housing 527. A tooth plate 526 meshing with the adjusting gear 524 is fixedly installed on the moving rod 525. The moving rod 525 is fixedly connected to the shielding plate 8.

[0041] Through the movement of the shielding plate 8, the tooth plate 526 drives the adjusting gear 524 to rotate, thereby driving the driving bevel gear 523 to mesh with the driven bevel gear 522 to rotate, so that the adjusting column 521 can rotate. Thus, the two light shielding covers 51 can be closed by the movement of the shielding plate 8. And in this embodiment, the length of the tooth plate 526 is only enough for the light shielding cover 51 to move to the closed position.

[0042] In addition, a moving groove 53 is formed in the light shielding cover 51. The detection mechanism 9 includes a reciprocating lead screw 91 installed in the moving groove 53. A motor is installed in the moving groove 53. The reciprocating lead screw 91 is fixedly connected to the output end of the motor. Moving seats are threadedly installed on the two reciprocating lead screws 91. A laser scanner 92 and a detection lamp 93 are respectively installed on the two moving seats. The detection mechanism 9 further includes a supplementary light 95 fixed in the light shielding cover 51, and a micro industrial camera 94 installed on the pushing plate 7.

[0043] Working principle:

[0044] First step, sleeved the quartz diffusion tube body 200 on the positioning sleeve 600. One end of the quartz diffusion tube body 200 abuts against the push plate 7. During operation, the reflective film 6 is wound on the winding roller 11. One end of the reflective film 6 passes through between the guiding roller groups 14. The arc-shaped clamping plate 62 is hung on the support rod 15 to keep the position of the arc-shaped clamping head 61 stable. Start two cylinders to push the moving shaft 100 and the push plate 7 respectively, so that the two approach each other. Thus, the film covering mechanism 1 will first enter into the quartz diffusion tube body 200. As the two continue to move, the arc-shaped clamping head 61 is hung on the tube wall of the orifice of the quartz diffusion tube body 200. Subsequently, the rubber wheel 23 contacts the reflective film 6, and through the frictional force, the rubber wheel 23 rotates during the movement, pushing the reflective film 6 against the inner wall of the quartz diffusion tube body 200. At the same time, as the moving shaft 100 moves, the film pasting mechanism 3 begins to enter into the quartz diffusion tube body 200. At this time, start the reduction motor 42 to drive the gear 43 to rotate, and as the gear 43 rotates, it drives the corrugated wheel 46 to rotate. The corrugations on the corrugated wheel 46 continuously squeeze the air injection head 45, so that the micro air cylinder 44 discharges air. The gas enters into the hollow tube 48 through the air delivery pipe 500, and finally enters into the rubber airbag 32 through the air supply pipe 49, causing the rubber airbag 32 to continuously inflate and expand;

[0045] Second step, and as the moving shaft 100 moves, the baffle plate 8 drives the moving rod 525 to move, and the toothed plate 526 drives the adjusting gear 524 to rotate, thereby causing the adjusting column 521 to rotate, and the two light-shielding covers 51 approach each other. As the push plate 7 and the moving shaft 100 continue to move, the film covering mechanism 1 and the guiding mechanism 2 enter into the positioning sleeve 600, and the film pasting mechanism 3 completely enters into the quartz diffusion tube body 200. At this time, the two light-shielding covers 51 are successfully closed, and the push plate 7 and the baffle plate 8 block both ends thereof, forming a closed environment. At this time, the moving shaft 100 and the push plate 7 stop moving;

[0046] Third step, during this period of time, the reduction motor 42 also drives the mounting cylinder 31 to rotate, so that the rubber airbag 32 also rotates. At this time, the rubber airbag 32 does not contact the reflective film 6. After the moving shaft 100 finishes moving, the rubber airbag 32 is also fully inflated. Through the extrusion force of inflation, the rubber airbag 32 and the reflective film 6 are completed in fitting, and the reflective film 6 is also fully attached to the inner wall of the quartz diffusion tube body 200;

[0047] Specifically, during the continuous inflation process of the rubber airbag 32, the rubber airbag 32 and the reflective film 6 will occasionally contact. The second smooth layer 300 and the first smooth layer 63 can reduce the frictional force to prevent the reflective film 6 from rotating driven by the rotation of the rubber airbag 32 at this time. As the rubber airbag 32 finishes inflating, because the rubber airbag 32 and the reflective film 6 will complete contact, the extrusion force of inflation is greater than the frictional force, causing the rubber airbag 32 to drive the reflective film 6 to rotate;

[0048] Step 4: Start the electric heating plate 400. Set the temperature threshold for the electric heating plate 400, and then it generates high temperature. As the electric heating plate 400 continuously heats up, the reflective powder adhesive layer 65 gradually melts. When the electric heating plate 400 reaches the set temperature value, the reflective powder adhesive layer 65 becomes semi-molten, adheres to the inner wall of the quartz diffusion tube body 200, and as it rotates, the reflective powder adhesive layer 65 will be evenly distributed on the inner wall of the quartz diffusion tube body 200. Then the electric heating plate 400 starts to cool down, so that the reflective powder adhesive layer 65 solidifies on the inner wall of the quartz diffusion tube body 200;

[0049] Step 5: As the reflective powder adhesive layer 65 solidifies, along with the expansion extrusion force of the rubber airbag 32, the rotation of the installation cylinder 31 will also drive the rotation of the quartz diffusion tube body 200. At this time, start the motor of the detection mechanism 9 to drive the reciprocating lead screw 91 to rotate, so that the laser scanner 92 and the detection lamp 93 move synchronously. As the quartz diffusion tube body 200 rotates, the laser scanner 92 conducts a comprehensive scan and detection of the appearance of the quartz diffusion tube body 200. Turning on the detection lamp 93 ensures the ambient brightness, and starting the micro industrial camera � can conduct a shooting and detection of the port of the quartz diffusion tube body 200, and starting the fill light 95 can ensure the light intensity during the shooting of the fill light 95;

[0050] Step 6: After the scanning is completed, start the air cylinder again to make the moving shaft 100 return to its original position. At this time, the light shielding cover 51 will also return to its original position. Finally, after the rubber airbag 32 finishes deflating, remove the quartz diffusion tube body 200. At this time, the reflective powder adhesive layer 65 still adheres to the inner wall of the quartz diffusion tube body 200, and it can be torn off by simply pulling the arc-shaped chuck 61, so that all operations are completed without causing difficult-to-clean pollution to the quartz diffusion tube body 200.

[0051] In this embodiment, the reflective powder adhesive layer 65 is made of a mixture of titanium dioxide powder and epoxy resin glue, and the high-temperature resistant flexible layer 64 is made of a flexible ceramic material. It should be noted that using reflective powder to reduce refraction and reflection is a common technical means in this technical field, and in this technical field, the method of adhering to the inner wall of the quartz diffusion tube by mixing glue and reflective powder is also a common technical means.

[0052] The main problem solved by the present invention is how to adhere the reflective powder to the inner wall of the quartz diffusion tube without pollution and damage. The reflective powder adhesive layer 65 is attached to the high-temperature resistant flexible layer by the impregnation method or spraying method in the prior art.

[0053] The above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, making equivalent substitutions or changes, shall be covered by the protection scope of the present invention.

Claims

1. An automated scanning device for the appearance defects of a quartz diffusion tube, characterized in that, It includes a positioning sleeve (600) and a moving shaft (100) respectively arranged on both sides of the frame body, and also includes a light-shielding device (5) installed on the frame body. A quartz diffusion tube body (200) to be detected is sleeved on the positioning sleeve (600). A film type reflective device that can enter the quartz diffusion tube body (200) is arranged on the moving shaft (100). The film type reflective device includes a film covering mechanism (1), a guiding mechanism (2), and a film pasting mechanism (3) arranged in sequence along the advancing direction of the moving shaft (100). The film covering mechanism (1) includes a plurality of winding rollers (11) and a guiding roller group (14) that are fixed on the peripheral side of the moving shaft (100) and are evenly distributed. The winding roller (11) winds a reflective film (6). One end of the reflective film (6) passes through the guiding roller group (14) and is fixed with an arc-shaped chuck (61). The guiding mechanism (2) includes a guiding disk (21) fixed on the moving shaft (100). A plurality of rubber wheels (23) distributed in a circular shape are rotatably installed in the guiding disk (21). The film pasting mechanism (3) includes an installation cylinder (31) whose center coincides with the moving shaft (100), and also includes a plurality of rubber air bags (32) that are fixed on the outer side of the installation cylinder (31) and are distributed in a circular shape. A power assembly (4) for driving the installation cylinder (31) to rotate and inflating the rubber air bags (32) is arranged in the film pasting mechanism (3). The light-shielding device (5) includes two light-shielding covers (51) respectively arranged on both sides of the moving shaft (100), and also includes a driving mechanism (52) for driving the two light-shielding covers (51) to close and surround the film pasting mechanism (3). A detection mechanism (9) and an electric heating plate (400) are arranged on the two light-shielding covers (51). When the moving shaft (100) moves, the driving mechanism (52) operates. A moving groove (53) is formed in the light-shielding cover (51). The detection mechanism (9) includes a reciprocating lead screw (91) installed in the moving groove (53). A motor is installed in the moving groove (53), and the reciprocating lead screw (91) is fixedly connected to the output end of the motor. Moving seats are threadedly installed on the two reciprocating lead screws (91). A laser scanner (92) and a detection lamp (93) are respectively installed on the two moving seats. A push plate (7) is slidably installed on the positioning sleeve (600). The detection mechanism (9) also includes a supplementary light lamp (95) fixed in the light-shielding cover (51), and a micro industrial camera (94) installed on the push plate (7).

2. The automated scanning device for the appearance defects of a quartz diffusion tube according to claim 1, characterized in that The film covering mechanism (1) also includes a plurality of first mounting frames (12) and second mounting frames (13) that are respectively fixed on the peripheral side of the moving shaft (100) and are evenly distributed. The winding roller (11) is rotatably installed on the first mounting frame (12). The guiding roller group (14) is rotatably installed on the second mounting frame (13). The guiding roller group (14) is composed of two guiding rollers rotatably installed on the second mounting frame (13). A support rod (15) is fixedly installed on the second mounting frame (13). An arc-shaped clamping plate (62) is fixedly installed on the arc-shaped chuck (61).

3. The automated scanning device for the appearance defects of a quartz diffusion tube according to claim 1, characterized in that, The guiding mechanism (2) further includes a circular groove (24) formed in the guiding disc (21). A plurality of partition plates (25) are equidistantly installed in the circular groove (24). A rotating shaft (22) is rotatably installed between adjacent partition plates (25). The rubber wheel (23) is fixedly installed on the rotating shaft (22).

4. The automated scanning device for the appearance defects of a quartz diffusion tube according to claim 1, wherein The power assembly (4) includes a gear sleeve (41) fixed inside the installation cylinder (31), and further includes a reduction motor (42) fixedly installed on the moving shaft (100). A gear (43) is fixed to the output end of the reduction motor (42). The gear (43) meshes with the gear sleeve (41). A hollow column (47) is fixed to the gear (43). A corrugated wheel (46) is fixedly installed on the hollow column (47). The power assembly (4) further includes a micro air cylinder (44) fixed below the moving shaft (100). The micro air cylinder (44) includes an air injection head (45) that cooperates with the corrugated wheel (46). The moving shaft (100) includes an air guide pipe (101). The micro air cylinder (44) further includes an air delivery pipe (500) communicated with the air guide pipe (101). One end of a hollow pipe (48) is fixedly connected and communicated with the hollow column (47). The other end of the hollow pipe (48) is rotatably installed in the air guide pipe (101) and communicated with it. A gas delivery pipe (49) is fixedly connected and communicated between the corrugated wheel (46) and the rubber airbag (32). Stabilizing sleeves (33) are installed on both sides of the installation cylinder (31). The stabilizing sleeves (33) are rotatably sleeved on the moving shaft (100).

5. The automated scanning device for the appearance defects of a quartz diffusion tube according to claim 4, wherein, The reflective film (6) sequentially includes a reflective powder adhesive layer (65), a high-temperature resistant flexible layer (64), and a first smooth layer (63) from top to bottom. The reflective powder adhesive layer (65) is adhered to the high-temperature resistant flexible layer (64). The rubber airbag (32) is sequentially provided with a second smooth layer (300) and a heat insulation layer (700) from outside to inside.

6. The automated scanning device for the appearance defects of a quartz diffusion tube according to claim 1, wherein, A shielding plate (8) is fixedly installed on the moving shaft (100). Cylinders are installed on both sides of the frame body. The pushing ends of the two cylinders are respectively fixedly connected to the moving shaft (100) and the pushing plate (7).

7. The automated scanning device for the appearance defects of a quartz diffusion tube according to claim 6, characterized in that, The driving mechanism (52) includes a housing (527) fixed to the frame body. An adjusting column (521) and an adjusting gear (524) are rotatably installed in the housing (527). The light shielding cover (51) is fixedly installed on the adjusting column (521). The adjusting column (521) is fixedly installed with a driven bevel gear (522). The adjusting gear (524) is fixedly installed with a driving bevel gear (523). The driven bevel gear (522) meshes with the driving bevel gear (523). A movable moving rod (525) is provided in the housing (527). A toothed plate (526) that meshes with the adjusting gear (524) is fixedly installed on the moving rod (525). The moving rod (525) is fixedly connected to the shielding plate (8).

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