Mechanical, optical and thermal in-situ test sample stage for atomic force microscope

Abstract

The invention discloses a mechanical, optical and thermal in-situ test sample table for an atomic force microscope. The mechanical, optical and thermal in-situ test sample table comprises a magnetic attraction base, a module mounting rack, a mechanical module, an optical module, a thermal module and a sample to be tested. The module mounting frame is arranged on the magnetic attraction base; the mechanical module drives the optical module to move up and down along the vertical direction by controlling the screw-in and screw-out of the micrometer head, so that the to-be-tested sample above the thermal module is driven to generate arc-shaped strain; the optical module shapes light of the light source through an optical component and then vertically enters the bottom of a to-be-tested sample through the thermal module; and the thermal module is used for regulating and controlling the temperature of the to-be-tested sample. The device is small and compact in structure, can be combined with various atomic force microscopes for use, simultaneously applies stress and vertical illumination to a sample and changes the temperature, realizes multi-physical field in-situ simultaneous characterization of mechanical, optical and thermal properties of a nano material, and accurately quantifies the change of an external physical field.

Description

Technical Field

[0001] The invention relates to the technical field of advanced atomic force microscopy, and in particular to a mechanical, optical and thermal in-situ test sample platform for an atomic force microscope. Background Art

[0002] Low-dimensional materials refer to materials that have at least one dimension at the nanoscale (1-100nm) in three-dimensional space and exhibit quantum confinement effects. Various low-dimensional materials represented by zero-dimensional, one-dimensional, and two-dimensional materials such as quantum dots, carbon nanotubes, and graphene, and their heterogeneous structures have gradually shown unique physical properties in the fields of condensed matter physics such as mechanics, optics, and thermals. For example, quantum dots have extremely narrow emission linewidths and high luminescence efficiency, and the emission wavelength can be adjusted by changing their size. Carbon nanotubes and graphene have extremely high mechanical strength, electron mobility, and thermal conductivity. These physical properties make low-dimensional materials have rich and amazing application prospects in the preparation of functional nanodevices such as nanoscale field-effect transistors, flexible optoelectronic devices, and low-power spintronics devices.

[0003] Atomic force microscopy (AFM) and its various advanced atomic force microscopy techniques such as mechanics, optics, electricity, and magnetism are widely used as a scanning probe microscopy technique with atomic-level resolution to characterize the novel physical properties of low-dimensional materials at the nanoscale. AFM uses a nano-scale needle tip to scan and image the sample surface, and by applying an external physical field to the probe and sample surface, it can obtain the mechanical, optical, electrical, magnetic and other physical property information of low-dimensional materials at the nanoscale, which greatly promotes the development of micro-nano optoelectronic devices and quantum devices prepared based on the novel physical properties of low-dimensional materials.

[0004] In order to deeply study the changes in the physical properties of low-dimensional materials under different stresses, different lighting, and different temperatures, and thus develop micro-nano optoelectronic devices with better working performance, the use of atomic force microscopy to in situ characterize the physical properties of materials under multiple physical fields has become an urgent need in the nanodevice industry.

[0005] Existing solutions use the method of changing the atomic force microscope test sample stage to apply an external physical field, but most of the current design solutions can only apply a single physical field at the same time, such as applying stress to the sample, irradiating it with light, or changing the temperature, etc., which cannot meet the in-situ simultaneous characterization under multiple physical fields. At the same time, in terms of mechanical testing, existing design solutions are often unable to change the sample strain in situ under an atomic force microscope, and accurately quantify the strain, thereby reducing the credibility of the sample strain test; in terms of optical testing, existing solutions are often unable to ensure that the light is incident vertically on the sample, which increases the difficulty and uncertainty of analyzing the optical properties of the sample. In addition, the existing atomic force microscope test sample stage also has the disadvantages of being too large to use and having a complex structure that is difficult to transplant.

[0006] In view of the above shortcomings of the prior art, the present invention has found an innovative solution under the support of the National Natural Science Foundation of China (No.12374357). Summary of the invention

[0007] The main purpose of the present invention is to provide a mechanical, optical and thermal in-situ test sample stage for an atomic force microscope, aiming to solve the technical problems that the existing sample stage cannot simultaneously perform in-situ testing of the mechanical, optical and thermal properties of nanomaterials and the testing cannot be accurately quantified.

[0008] The technical solution adopted by the present invention is:

[0009] Provided is a mechanical, optical and thermal in-situ test sample platform for an atomic force microscope, comprising a base and a module mounting frame arranged thereon, a thermal module is installed on the top of the module mounting frame, and a sample to be tested is fixed on the thermal module; a mechanical module and an optical module are installed from bottom to top in the module mounting frame; wherein:

[0010] The mechanical module includes a micrometer head, which drives the optical module to move up and down in a vertical direction by controlling the advance and retreat of the micrometer head, thereby driving the sample to be tested above the thermal module to generate arc strain;

[0011] The optical module shapes the light from the light source through optical components and then transmits it vertically to the bottom of the sample to be tested through the thermal module;

[0012] Thermal module, used to control the temperature of the sample to be tested.

[0013] Following the above technical solution, the base is a magnetic base.

[0014] Following the above technical solution, the mechanics module also includes a micrometer mounting frame fixed to the module mounting frame, on which the micrometer is fixed.

[0015] Following the above technical solution, a horizontal plate is provided in the middle of the module mounting frame, and the micrometer head is installed on the horizontal plate; and an optical module limit plate with scale lines is provided above the horizontal plate, and the optical module is arranged in the optical module limit plate.

[0016] According to the above technical solution, the optical module includes an optical module base, a light source, an optical module tube wall and a lens group which are arranged in sequence from bottom to top, wherein the upper surface of the optical module base is flush with the zero scale line on the optical module limit plate, and a circuit for controlling the light source is arranged inside the optical module base and is connected to an external light source controller; the light source is arranged at the center of the upper surface of the optical module base and is placed inside the optical module tube wall.

[0017] In accordance with the above technical solution, the lens group includes a lens mounting frame, a first cylindrical lens and a second cylindrical lens, wherein the lens mounting frame is fixed in the barrel wall of the optical module; the first cylindrical lens and the second cylindrical lens are respectively mounted at the center of the two lens mounting frames, and by adjusting the height positions of the two lens mounting frames in the barrel wall of the optical module, the focal lines of the first cylindrical lens and the second cylindrical lens coincide with the light source.

[0018] According to the above technical solution, the inner wall of the optical module tube wall is provided with threads, and the outer wall of the lens mounting frame is provided with threads matching with the optical module tube wall.

[0019] According to the above technical solution, the thermal module includes a flexible transparent insulation board, a flexible transparent heating board and a thermal module buckle which are arranged in sequence from bottom to top, wherein the flexible transparent insulation board and the flexible transparent heating board have the same size; the flexible transparent heating board is integrated with a thermocouple temperature sensor and a resistance heater, and the thermocouple temperature sensor and the resistance heater are respectively connected to an external heater temperature controller; the thermal module buckle is connected to the module mounting frame, and clamps the flexible transparent insulation board and the flexible transparent heating board therebetween.

[0020] According to the above technical solution, the size of the sample to be tested is smaller than the flexible transparent heating plate.

[0021] Following the above technical solution, the sample to be tested is pasted on the thermal module.

[0022] The beneficial effects of the present invention are as follows: the present invention can perform in-situ testing on the test sample on the sample stage under an atomic force microscope, and simultaneously change the sample strain, change the light intensity and change the sample temperature, so as to simultaneously obtain the change relationship of the nanoscale physical properties of the sample under the change of mechanical, optical and thermal environment, and meet the characterization requirements of nanomaterials in the field of micro-nano optoelectronic devices under multi-physical fields. At the same time, in terms of mechanical testing, the present invention uses a micrometer head to control the distance of the sample's up and down displacement to achieve the strain of the sample, so that the sample strain can be accurately quantified without moving the sample position, which is conducive to using an atomic force microscope to perform an accurate comparison experiment before and after in-situ strain on the same area of ​​the sample; in terms of optical testing, the present invention uses optical components to shape the light source and then vertically irradiate the bottom of the sample to be tested through a thermal module, and illuminate the sample from the back, so as to accurately and quantitatively analyze the optical properties of the sample. In addition, the present invention has a small and compact structure, which is convenient for integration and parallel use with various types of atomic force microscopes.

[0023] Furthermore, the present invention uses two cylindrical lenses with different focal lengths to collimate the light beam of the light source. By adjusting the height positions of the two cylindrical lenses so that the focal lines of both coincide with the position of the light source, the light beam emitted from the light source will be emitted as parallel light after passing through the lens group to illuminate the sample from behind, thereby enabling accurate quantitative analysis of the optical properties of the sample.

[0024] Furthermore, the mechanical module controls the advancement and retreat of the micrometer head, so that the optical module moves up and down in the vertical direction under the restriction of the optical module limit plate, and utilizes the second cylindrical lens at the top of the optical module to push the center lines of the flexible transparent insulation plate and the flexible transparent heating plate to move upward, thereby driving the sample to be tested above the thermal module to produce arc strain. Since the upward displacement of the center line of the sample can be accurately controlled by the micrometer head, the strain of the sample can be accurately converted. At the same time, the strain of the sample is controlled by controlling the advancement and retreat of the micrometer head, and the situation of scanning different micro-areas of the sample after moving the sample stage will not occur. Therefore, the present invention can change the sample strain in situ under the atomic force microscope and accurately quantify the strain.

[0025] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic structural diagram of a sample stage for in-situ testing of mechanics, optics and thermal properties of an atomic force microscope according to an embodiment of the present invention;

[0028] Figure 2 This is a schematic structural diagram of a module mounting frame according to an embodiment of the present invention;

[0029] Figure 3 This is a schematic diagram of the structure of a mechanical module according to an embodiment of the present invention;

[0030] Figure 4 This is a schematic diagram of the structure of an optical module according to an embodiment of the present invention;

[0031] Figure 5 It is a structural schematic diagram of a lens assembly according to an embodiment of the present invention;

[0032] Figure 6 This is a schematic diagram of the structure of a thermal module and a sample to be tested according to an embodiment of the present invention;

[0033] In the figure: 1. magnetic base; 2. module mounting frame; 2-1. micrometer mounting frame mounting hole; 2-2. micrometer limit hole; 2-3. optical module limit plate; 3. mechanical module; 3-1. micrometer; 3-2. micrometer mounting frame; 4. optical module; 4-1. optical module base; 4-2. light source; 4-3. optical module barrel wall; 4-4. lens group; 4-4-1. lens mounting frame; 4-4-2. first cylindrical lens; 4-4-3. second cylindrical lens; 5. thermal module; 5-1. flexible transparent insulation board; 5-2. flexible transparent heating board; 5-3. thermal module buckle; 6. sample to be tested. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0035] It should be noted that the illustrations provided in the embodiments of the present invention are only used to illustrate the basic concept of the present invention in a schematic manner. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout type may also be more complicated.

[0036] In the present invention, it is also necessary to explain that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first" and "second" appear, they are only used for description and distinction purposes, and cannot be understood as indicating or implying relative importance.

[0037] See also Figure 1 An embodiment of the present invention provides a mechanical, optical and thermal in-situ test sample stage for an atomic force microscope, comprising a base 1 and a module mounting frame 2 arranged thereon, a thermal module 5 is installed on the top of the module mounting frame 2, and a sample 6 to be tested is fixed on the thermal module 5; a mechanical module 3 and an optical module 4 are installed from bottom to top in the module mounting frame 2.

[0038] Among them, the mechanical module 3 includes a micrometer head 3-1, which drives the optical module 4 to move up and down in the vertical direction by controlling the rotation of the micrometer head 3-1, thereby driving the sample to be tested 6 above the thermal module 5 to produce arc strain; the optical module 4 shapes the light of the light source through optical components and then transmits the light through the thermal module 5 vertically to the bottom of the sample to be tested 6; the thermal module 5 is used to control the temperature of the sample to be tested 6.

[0039] Specifically, a magnetic base 1 is provided below the module mounting frame 2, so as to facilitate the overall adsorption and fixation of the present invention on the magnetic base of the atomic force microscope.

[0040] See also Figure 2 The module mounting frame 2 is cylindrical as a whole, with a horizontal plate in the middle, and two micrometer mounting frame mounting holes 2-1 and a micrometer limit hole 2-2 in the center of the horizontal plate, wherein the micrometer mounting frame mounting hole 2-1 is a threaded hole for fixing the micrometer mounting frame 3-2; the micrometer limit hole 2-2 runs through the middle horizontal plate for inserting the micrometer 3-1. An optical module limit plate 2-3 is provided above the horizontal plate to limit the position of the optical module 4 so that it can only move vertically under the push of the micrometer 3-1, thereby ensuring the uniqueness of the strain direction of the sample. The optical module limit plate 2-3 has a 0-5mm scale, which is convenient for visualizing the vertical displacement of the optical module 4. In addition, four threaded holes are provided at the top of the module mounting frame 2 to fix the thermal module buckle 5-3 to the module mounting frame 2.

[0041] See also Figure 3The mechanical module 3 includes a micrometer 3-1 and a micrometer mounting frame 3-2, wherein the micrometer 3-1 is fixed to the micrometer mounting frame 3-2 by tightening the locking screws on the micrometer mounting frame 3-2; in addition, the micrometer mounting frame 3-2 is also provided with two countersunk holes, whose positions correspond to the micrometer mounting frame mounting holes 2-1, and the micrometer mounting frame 3-2 can be fixed to the horizontal plate in the middle of the module mounting frame 2 by screws.

[0042] The working principle of the mechanical module 3 is to control the advance and retreat of the micrometer head 3-1 so that the optical module 4 moves up and down in the vertical direction under the restriction of the optical module limit plate 2-3, and use the second cylindrical lens 4-4-3 at the top of the optical module 4 to push the center line of the flexible transparent insulation plate 5-1 and the flexible transparent heating plate 5-2 to move upward, thereby driving the sample to be tested 6 pasted on the top of the thermal module 5 to produce arc strain. Since the upward displacement of the center line of the sample can be accurately controlled by the micrometer head 3-1, the strain of the sample can be accurately converted; at the same time, the semi-open design of the module mounting frame 2 allows the experimenter to control the strain of the sample by controlling the advance and retreat of the micrometer head 3-1 without moving the overall position of the present invention, and there will be no situation where the position of the sample micro-area is different after moving the sample stage. Therefore, the present invention can change the sample strain in situ under the atomic force microscope and accurately quantify the strain.

[0043] Specifically, the sample undergoes uniform arc deformation for calculation. When the distance between the two thermal module buckles 5-3 is l, and the upward displacement of the optical module is h, the linear strain of the sample along the long side of the flexible transparent heating plate 5-2 is:

[0044]

[0045] Preferably, the displacement stroke of the micrometer head 3-1 can be selected to be 5 mm (millimeter), and the minimum displacement distance is 10 μm (micrometer). At this time, the above formula is used for calculation. In this embodiment, the distance between the two thermal module buckles 5-3 is 15 mm, and the minimum linear strain accuracy of the sample can reach about 1.0×10 -3 %, and the maximum linear strain is 27.4%.

[0046] See also Figure 4The optical module 4 is arranged in the optical module limit plate 2-3, and includes an optical module base 4-1, a light source 4-2, an optical module barrel wall 4-3 and a lens group 4-4 which are arranged in sequence from bottom to top, wherein the upper surface of the optical module base 4-1 is flush with the zero scale line on the optical module limit plate 2-3, a circuit for controlling the light source 4-2 is arranged inside the optical module base 4-1, and is electrically connected to an external light source controller through two wires, a groove is provided at the bottom of the optical module base 4-1 which matches the top of the micrometer head 3-1, and is used to limit the movement of the top of the micrometer head 3-1; the light source 4-2 is arranged at the center of the upper surface of the optical module base 4-1 and is placed inside the optical module barrel wall 4-3; the inner wall of the optical module barrel wall 4-3 is provided with a thread for installing the lens group 4-4.

[0047] See also Figure 5 The lens group 4-4 includes two lens mounting frames 4-4-1, a first cylindrical lens 4-4-2 and a second cylindrical lens 4-4-3, wherein the outer wall of the lens mounting frame 4-4-1 is provided with a thread matching with the optical module barrel wall 4-3 and can be fixed in the optical module barrel wall 4-3; the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 are respectively mounted at the center of the two lens mounting frames 4-4-1, and by adjusting the height position of the two lens mounting frames 4-4-1 in the optical module barrel wall 4-3, the focal lines of the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 are made to coincide with the light source 4-2.

[0048] Specifically, the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 can adopt wear-resistant and high-temperature resistant optical materials, such as liquid optical silicone, etc.; the focal length of the first cylindrical lens 4-4-2 should be smaller than that of the second cylindrical lens 4-4-3, and the second cylindrical lens 4-4-3 should be a positive meniscus cylindrical lens, the highest point of which is used to push the center line of the flexible transparent insulation plate 5-1 and the flexible transparent heating plate 5-2 to move upward.

[0049] The working principle of the optical module 4 is to adjust the relative positions of the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 and the light source 4-2 so that the focal lines of the two lenses coincide with the light source 4-2, so that the light emitted from the light source 4-2 is shaped by the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 and then emitted as parallel light, and the parallel light passes through the flexible transparent insulation plate 5-1 and the flexible transparent heating plate 5-2 to illuminate the sample from the back, and at the same time, the output power of the light source 4-2 is controlled by an external light source controller, so that the atomic force microscope can be used to achieve accurate quantitative analysis of the optical properties of the sample while ensuring vertical incidence of light.

[0050] See also Figure 6The thermal module 5 includes a flexible transparent insulation board 5-1, a flexible transparent heating board 5-2 and a thermal module buckle 5-3 which are arranged in sequence from bottom to top, wherein the flexible transparent insulation board 5-1 and the flexible transparent heating board 5-2 have the same size; the flexible transparent heating board 5-2 is integrated with a thermocouple temperature sensor and a resistance heater, and the thermocouple temperature sensor and the resistance heater are respectively electrically connected to an external heater temperature controller by two wires to achieve heating and temperature control of the heating board; the thermal module buckle 5-3 is provided with four countersunk holes, and its position corresponds to the four threaded holes at the top of the module mounting frame 2, and the thermal module buckle 5-3 is connected to the module mounting frame 2 by countersunk screws, and the flexible transparent insulation board 5-1 and the flexible transparent heating board 5-2 are clamped therebetween.

[0051] Specifically, the material of the flexible transparent insulation board 5-1 should be a flexible material with high light transmittance and low thermal conductivity, such as transparent organic polymer sheets such as PVC (polyvinyl chloride); the material of the flexible transparent heating plate 5-2 should be a flexible material with high light transmittance and high thermal conductivity, and various types of polymer composite materials filled with optically transparent thermal conductive fillers can be selected, such as nano-composite materials such as PVA (polyvinyl alcohol) sheets filled with cellulose nanoparticles; the thermal module buckle 5-3 should be made of insulating materials, such as PEEK (polyetheretherketone) or PTFE (polytetrafluoroethylene).

[0052] The working principle of the thermal module 5 is to control and detect the temperature of the flexible transparent heating plate 5-2 by adjusting the external heater temperature controller, thereby regulating the temperature of the sample. At the same time, a flexible transparent insulation plate 5-1 is added under the flexible transparent heating plate 5-2, the purpose of which is to reduce the heat exchange between the thermal module 5 and the optical module 4, improve the temperature control accuracy and reduce the impact on the working performance of other modules; the flexible transparent insulation plate 5-1 and the flexible transparent heating plate 5-2 are both made of materials with high light transmittance, the purpose of which is to facilitate the use with the optical module 4 to simultaneously measure the optical and thermal properties of the sample.

[0053] In this embodiment, the sample to be tested 6 is arranged above the flexible transparent heating plate 5-2, and its size is smaller than the flexible transparent heating plate 5-2. The sample to be tested 6 can be adhered to the flexible transparent heating plate 5-2 by using a high temperature resistant adhesive with strong adhesion and good thermal conductivity such as PI (polyimide) double-sided pressure sensitive adhesive.

[0054] The present invention provides a mechanical, optical and thermal in-situ test sample stage for an atomic force microscope, which can solve the technical problems that the existing sample stage cannot simultaneously perform in-situ tests on mechanical, optical and thermal properties and the tests cannot be accurately quantified. The present invention can test the sample in-situ under an atomic force microscope and simultaneously change the sample strain, change the light intensity and change the sample temperature, so as to simultaneously obtain the change relationship of the nanoscale physical properties of the sample under the change of mechanical, optical and thermal environment, and meet the characterization requirements of nanomaterials in the field of micro-nano optoelectronic devices under multi-physical fields. At the same time, in terms of mechanical testing, the present invention uses a micrometer head to control the distance of the upward displacement of the sample center to realize the strain of the sample, so that the sample strain can be accurately quantified without moving the sample position, which is conducive to using an atomic force microscope to perform an accurate comparison experiment before and after in-situ strain on the same area of ​​the sample; in terms of optical testing, the present invention uses two cylindrical lenses with different focal lengths to collimate the light beam of the light source, and by adjusting the height position of the two cylindrical lenses, the focal lines of both coincide with the position of the light source. At this time, the light beam emitted from the light source will be emitted as parallel light after passing through the lens group to illuminate the sample from the back, so that the optical properties of the sample can be accurately quantitatively analyzed. In addition, the present invention has a small and compact structure and is convenient for integration and parallel use with various modes of various atomic force microscopes.

[0055] It should be pointed out that, according to the needs of implementation, the various steps / components described in this application can be split into more steps / components, and two or more steps / components or partial operations of steps / components can be combined into new steps / components to achieve the purpose of the present invention.

[0056] The order of execution of each step in the above embodiment does not mean the order of execution. The order of execution of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application.

[0057] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. A mechanical, optical and thermal in-situ test sample stage for an atomic force microscope, characterized in that: The invention comprises a base (1) and a module mounting frame (2) arranged thereon, a thermal module (5) being installed on the top of the module mounting frame (2), and a sample to be tested (6) being fixed on the thermal module (5); a mechanical module (3) and an optical module (4) being installed from bottom to top in the module mounting frame (2); wherein: The mechanical module (3) comprises a micrometer head (3-1), and by controlling the advance and retreat of the micrometer head (3-1), the optical module (4) is driven to move up and down in a vertical direction, thereby driving the sample to be tested (6) above the thermal module (5) to generate arc strain; The optical module (4) shapes the light from the light source through optical components and then transmits the light through the thermal module (5) to the bottom of the sample to be tested (6) vertically; The thermal module (5) is used to control the temperature of the sample to be tested (6).

2. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The base (1) is a magnetic base.

3. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The mechanics module (3) also includes a micrometer mounting frame (3-2) fixed on the module mounting frame (2), and the micrometer (3-1) is fixed on the micrometer mounting frame (3-2).

4. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: A transverse plate is provided in the middle of the module mounting frame (2), and a micrometer head (3-1) is mounted on the transverse plate; an optical module stop plate (2-3) with scale marks is provided above the transverse plate, and the optical module (4) is arranged in the optical module stop plate (2-3).

5. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 4, characterized in that: The optical module (4) comprises an optical module base (4-1), a light source (4-2), an optical module tube wall (4-3) and a lens group (4-4) which are arranged in sequence from bottom to top, wherein the upper surface of the optical module base (4-1) is flush with the zero scale line on the optical module limit plate (2-3), a circuit for controlling the light source (4-2) is arranged inside the optical module base (4-1) and is connected to an external light source controller; the light source (4-2) is arranged at the center of the upper surface of the optical module base (4-1) and is placed inside the optical module tube wall (4-3).

6. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 5, characterized in that: The lens group (4-4) comprises a lens mounting frame (4-4-1), a first cylindrical lens (4-4-2) and a second cylindrical lens (4-4-3), wherein the lens mounting frame (4-4-1) is fixed in an optical module barrel wall (4-3); the first cylindrical lens (4-4-2) and the second cylindrical lens (4-4-3) are respectively mounted at the center of two lens mounting frames (4-4-1), and by adjusting the height positions of the two lens mounting frames (4-4-1) in the optical module barrel wall (4-3), the focal lines of the first cylindrical lens (4-4-2) and the second cylindrical lens (4-4-3) are both overlapped with the light source (4-2).

7. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 6, characterized in that: The inner wall of the optical module barrel wall (4-3) is provided with a thread, and the outer wall of the lens mounting frame (4-4-1) is provided with a thread matching the optical module barrel wall (4-3).

8. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The thermal module (5) comprises a flexible transparent insulation board (5-1), a flexible transparent heating board (5-2) and a thermal module buckle (5-3) which are arranged in sequence from bottom to top, wherein the flexible transparent insulation board (5-1) and the flexible transparent heating board (5-2) have the same size; the flexible transparent heating board (5-2) is integrated with a thermocouple temperature sensor and a resistance heater, and the thermocouple temperature sensor and the resistance heater are respectively connected to an external heater temperature controller; the thermal module buckle (5-3) is connected to a module mounting frame (2) and clamps the flexible transparent insulation board (5-1) and the flexible transparent heating board (5-2) therebetween.

9. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 8, characterized in that: The size of the sample to be tested (6) is smaller than that of the flexible transparent heating plate (5-2).

10. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The sample to be tested (6) is pasted on the thermal module (5).

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