Preparation method of AlSc alloy target material

Abstract

The invention provides a preparation method of an AlSc alloy target material, which comprises the following steps: smelting an Al raw material and an Sc raw material to obtain a cylindrical Al-Sc cast ingot; the obtained cylindrical Al-Sc cast ingot is subjected to scaling treatment and then subjected to gas atomization powder making, and powder is obtained; and after the obtained powder is screened, cold isostatic pressing forming and hot isostatic pressing sintering are sequentially conducted, and the AlSc alloy target material is obtained. According to the preparation method provided by the invention, firstly, a cylindrical Al-Sc cast ingot is obtained by adopting a smelting method, so that high purity is ensured; then, crucible gas atomization powder making is conducted, alloy powder is obtained, and increase of the oxygen content is effectively avoided; and finally, the AlSc alloy target material is obtained through cold isostatic pressing forming and hot isostatic pressing sintering which are sequentially carried out, plastic processing is not needed, and the risk of target material cracking is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetron sputtering and relates to a method for preparing an alloy target material, in particular to a method for preparing an AlSc alloy target material. Background Art

[0002] Film bulk acoustic resonator (FBAR) has been increasingly used in the field of 5G mobile communications due to its high quality factor, small size, low loss and excellent temperature stability. One of the important indicators for evaluating FBAR performance is the electromechanical coupling coefficient (kt 2 ), which is the energy transfer efficiency between the electrode and the piezoelectric material. Generally speaking, the higher the electromechanical coupling coefficient, the better. kt 2 Influenced by piezoelectric materials, AlN films have high acoustic wave velocity and high Q value, and are often used as piezoelectric materials for FBAR. However, the electromechanical coupling coefficient of AlN is 6.5%, which cannot meet the use requirements of FBAR.

[0003] At present, the improvement of piezoelectric material kt 2 The main method to increase the value is to add the rare earth element Sc to the AlN film to form a ScAlN film. The ScAlN film can be made of AlSc alloy target on N 2 High-quality AlSc alloy target is the prerequisite for preparing high-quality ScAlN film.

[0004] The general preparation methods of AlSc alloy targets are smelting and powder metallurgy. The AlSc alloy targets prepared by smelting have high purity and low impurity content, but they have defects such as uneven composition and easy shrinkage holes. In addition, the AlSc intermediate alloy phase formed is a brittle phase, and subsequent plastic processing is prone to cracking of the target.

[0005] CN115537746A discloses an aluminum-scandium alloy target material and its preparation method and application. The disclosed method comprises mixing aluminum powder, scandium powder and a binder, granulating the mixture, performing a vacuum sintering step, and then crushing the mixture to obtain a mixed powder of 50-150 μm. The mixed powder is used as a raw material for cold isostatic pressing, pre-sintering and hot isostatic pressing, and finally the aluminum-scandium alloy target material is obtained by processing the mixture.

[0006] CN116396081A discloses a method for preparing high-strength aluminum nitride ceramics by low-temperature sintering, which comprises classifying the particle size of the original powder to obtain aluminum nitride powder with a particle size range of 0.1-1.2 μm and an average particle size of less than 0.5 μm, and then coating and modifying the sintering aid and the ceramic powder by combining a coating method.

[0007] However, the AlSc alloy target prepared by powder metallurgy has uniform composition and can be sintered in one step. However, since Al powder and Sc powder are easily oxidized in the air, the purity of the obtained target will be reduced.

[0008] Therefore, it is necessary to provide a method for preparing an AlSc alloy target material that ensures the purity of the target material and reduces the risk of target material cracking. Summary of the invention

[0009] In view of the shortcomings of the prior art, the object of the present invention is to provide a method for preparing an AlSc alloy target material. The AlSc alloy target material obtained by the preparation method has high purity, avoids the increase of oxygen content during the preparation process, and does not require plastic processing during the preparation process, which can effectively reduce the risk of target cracking.

[0010] To achieve this object, the present invention adopts the following technical solutions:

[0011] The present invention provides a method for preparing an AlSc alloy target, the preparation method comprising the following steps:

[0012] (1) smelting Al raw material and Sc raw material to obtain a cylindrical Al-Sc ingot;

[0013] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0014] (3) After the powder obtained in step (2) is screened, cold isostatic pressing and hot isostatic pressing are performed in sequence to obtain the AlSc alloy target.

[0015] The preparation method provided by the present invention first adopts a smelting method to obtain a cylindrical Al-Sc ingot, thereby ensuring high purity; then, alloy powder is obtained by crucible gas atomization powder making, thereby effectively avoiding an increase in oxygen content; finally, an AlSc alloy target material is obtained by sequentially performing cold isostatic pressing and hot isostatic pressing sintering, without the need for plastic processing, thereby reducing the risk of target cracking.

[0016] Preferably, taking the total atomic percentage of the Al raw material and the Sc raw material in step (1) as 100 at%, the atomic percentage of the Sc raw material is 10-43 at% of the total amount of the Al raw material and the Sc raw material, for example, it can be 10 at%, 15 at%, 20 at%, 25 at%, 30 at%, 35 at%, 40 at% or 43 at%, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0017] Preferably, the diameter of the cylindrical Al-Sc ingot in step (1) is 53-57 mm, for example, 53 mm, 54 mm, 55 mm, 56 mm or 57 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0018] Preferably, the depth of the peeling process in step (2) is 4-6 mm, for example, 4 mm, 4.5 mm, 5 mm, 5.5 mm or 6 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0019] Preferably, the temperature of the aerosol powder making in step (2) is 1200-1400°C, for example, it can be 1200°C, 1250°C, 1300°C, 1350°C or 1400°C, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0020] Preferably, the holding time of the aerosolized powder making in step (2) is 8-12 min, for example, 8 min, 9 min, 10 min, 11 min or 12 min, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0021] Preferably, the aerosol powder making in step (2) is carried out using a protective gas.

[0022] Preferably, the protective gas comprises any one of nitrogen, argon or helium or a combination of at least two of them. Typical but non-limiting combinations include a combination of nitrogen and argon, a combination of argon and helium, a combination of nitrogen and helium, or a combination of nitrogen, argon and helium.

[0023] Preferably, the gas pressure of the aerosolized powder making in step (2) is 1.5-3.5 MPa, for example, 1.5 MPa, 2 MPa, 2.5 MPa, 3 MPa or 3.5 MPa, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0024] Preferably, the screening in step (3) includes dividing the powder into a first powder, a second powder and a third powder;

[0025] Preferably, the particle size range of the first powder is n 1 15μm≤n 1 <50 μm;

[0026] Preferably, the particle size range of the second powder is n 2 50μm≤n 2 <80μm;

[0027] Preferably, the particle size range of the third powder is n3 80μm≤n 3 <120μm.

[0028] The present invention screens the powder to obtain first powder, second powder and third powder of three particle size ranges to be suitable for AlSc alloy targets with different requirements. The obtained first powder, second powder and third powder are independently subjected to subsequent cold isostatic pressing and hot isostatic pressing sintering.

[0029] The particle size range of the first powder of the present invention is n 1 15μm≤n 1 <50 μm means that the first powder can pass through a sieve with a pore size of 50 μm, but cannot pass through a sieve with a pore size of 15 μm.

[0030] The particle size range of the second powder of the present invention is n 2 50μm≤n 2 <80 μm means that the second powder can pass through a sieve with a pore size of 80 μm, but cannot pass through a sieve with a pore size of 50 μm.

[0031] The particle size range of the third powder of the present invention is n 3 80μm≤n 3 <120 μm means that the third powder can pass through a sieve with a pore size of 120 μm, but cannot pass through a sieve with a pore size of 80 μm.

[0032] Preferably, the pressure of the cold isostatic pressing in step (3) is 240-270 MPa, for example, 240 MPa, 245 MPa, 250 MPa, 255 MPa, 260 MPa, 265 MPa or 270 MPa, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0033] Preferably, the cold isostatic pressing time in step (3) is 12-16 min, for example, 12 min, 13 min, 14 min, 15 min or 16 min, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0034] Preferably, the temperature of the hot isostatic pressing sintering in step (3) is 700-1000°C, for example, it can be 700°C, 750°C, 800°C, 850°C, 900°C, 950°C or 1000°C, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0035] Preferably, the hot isostatic pressing sintering pressure in step (3) is 90-120 MPa, for example, 90 MPa, 95 MPa, 100 MPa, 105 MPa, 110 MPa, 115 MPa or 120 MPa, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0036] Preferably, the hot isostatic pressing sintering time in step (3) is 3-5 h, for example, 3 h, 3.5 h, 4 h, 4.5 h or 5 h, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0037] As a preferred technical solution of the preparation method of the present invention, the preparation method comprises the following steps:

[0038] (1) Al raw material and Sc raw material are placed in a crucible according to a certain proportion, heated and melted, and cast to obtain a cylindrical Al-Sc ingot with a diameter of 53-57 mm after alloying treatment;

[0039] Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 10-43 at % of the total amount of the Al raw material and the Sc raw material;

[0040] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0041] The depth of the peeling process is 4-6 mm;

[0042] The gas atomization powder making is as follows: heating to 1200-1400°C, keeping the temperature for 8-12 minutes, and then spraying with protective gas at a gas pressure of 1.5-3.5MPa;

[0043] (3) After the powder obtained in step (2) is screened, cold isostatic pressing and hot isostatic pressing are performed in sequence to obtain the AlSc alloy target;

[0044] The screening includes dividing the powder into a first powder, a second powder and a third powder;

[0045] The particle size range of the first powder is n 1 15μm≤n 1 <50 μm;

[0046] The particle size range of the second powder is n 2 50μm≤n 2 <80μm;

[0047] The particle size range of the third powder is n 3 80μm≤n 3<120 μm;

[0048] The cold isostatic pressing pressure is 240-270 MPa and the time is 12-16 min;

[0049] The hot isostatic pressing sintering is carried out at a temperature of 700-1000° C., a pressure of 90-120 MPa and a time of 3-5 hours.

[0050] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0051] Compared with the prior art, the present invention has the following beneficial effects:

[0052] The preparation method provided by the present invention first adopts a smelting method to obtain a cylindrical Al-Sc ingot, thereby ensuring high purity; then, alloy powder is obtained by crucible gas atomization powder making, thereby effectively avoiding an increase in oxygen content; finally, an AlSc alloy target material is obtained by sequentially performing cold isostatic pressing and hot isostatic pressing sintering, without the need for plastic processing, thereby reducing the risk of target cracking. DETAILED DESCRIPTION

[0053] The technical solution of the present invention is further illustrated below through specific implementation methods.

[0054] Example 1

[0055] This embodiment provides a method for preparing an AlSc alloy target, the preparation method comprising the following steps:

[0056] (1) placing an Al raw material with a purity of 99.99 wt% and a Sc raw material with a purity of 99.95 wt% in a crucible according to a certain ratio, heating and melting them, and casting them after alloying to obtain a cylindrical Al-Sc ingot with a diameter of 55 mm;

[0057] Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 25 at % of the total amount of the Al raw material and the Sc raw material;

[0058] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0059] The depth of the peeling process is 5 mm;

[0060] The gas atomization powder making is carried out in an electrode induction melting gas atomization device, including: heating to 1300° C., keeping the temperature for 10 minutes, and then spraying with argon gas at a gas pressure of 2.5 MPa;

[0061] (3) After the powder obtained in step (2) is screened, the first powder is sequentially subjected to cold isostatic pressing and hot isostatic pressing to obtain the AlSc alloy target;

[0062] The screening includes dividing the powder into a first powder, a second powder and a third powder;

[0063] The particle size range of the first powder is n 1 15μm≤n 1 <50 μm;

[0064] The cold isostatic pressing process was performed at a pressure of 250 MPa and a time of 14 min.

[0065] The hot isostatic pressing sintering was performed at a temperature of 850° C., a pressure of 105 MPa, and a time of 4 hours.

[0066] Example 2

[0067] This embodiment provides a method for preparing an AlSc alloy target, the preparation method comprising the following steps:

[0068] (1) placing an Al raw material with a purity of 99.99 wt% and a Sc raw material with a purity of 99.95 wt% in a crucible according to a certain ratio, heating and melting them, and casting them after alloying to obtain a cylindrical Al-Sc ingot with a diameter of 53 mm;

[0069] Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 25 at % of the total amount of the Al raw material and the Sc raw material;

[0070] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0071] The depth of the peeling process is 4 mm;

[0072] The gas atomization powder making is carried out in an electrode induction melting gas atomization device, including: heating to 1200° C., keeping the temperature for 12 minutes, and then spraying with argon gas at a gas pressure of 1.5 MPa;

[0073] (3) After the powder obtained in step (2) is screened, the first powder is sequentially subjected to cold isostatic pressing and hot isostatic pressing to obtain the AlSc alloy target;

[0074] The screening includes dividing the powder into a first powder, a second powder and a third powder;

[0075] The particle size range of the first powder is n 1 15μm≤n 1 <50 μm;

[0076] The cold isostatic pressing pressure is 240 MPa and the time is 16 min;

[0077] The hot isostatic pressing sintering is performed at a temperature of 700° C., a pressure of 90 MPa, and a time of 5 hours.

[0078] Example 3

[0079] This embodiment provides a method for preparing an AlSc alloy target, the preparation method comprising the following steps:

[0080] (1) placing an Al raw material with a purity of 99.99 wt% and a Sc raw material with a purity of 99.95 wt% in a crucible according to a certain ratio, heating and melting them, and casting them after alloying to obtain a cylindrical Al-Sc ingot with a diameter of 57 mm;

[0081] Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 25 at % of the total amount of the Al raw material and the Sc raw material;

[0082] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0083] The depth of the peeling process is 6 mm;

[0084] The gas atomization powder making is carried out in an electrode induction melting gas atomization device, including: heating to 1400° C., keeping the temperature for 8 minutes, and then spraying with argon gas at a gas pressure of 3.5 MPa;

[0085] (3) After the powder obtained in step (2) is screened, the first powder is sequentially subjected to cold isostatic pressing and hot isostatic pressing to obtain the AlSc alloy target;

[0086] The screening includes dividing the powder into a first powder, a second powder and a third powder;

[0087] The particle size range of the first powder is n 1 15μm≤n 1 <50 μm;

[0088] The cold isostatic pressing pressure is 270 MPa and the time is 12 min;

[0089] The hot isostatic pressing sintering is carried out at a temperature of 1000° C., a pressure of 120 MPa and a time of 3 hours.

[0090] Example 4

[0091] This embodiment provides a method for preparing an AlSc alloy target, the preparation method comprising the following steps:

[0092] (1) placing an Al raw material with a purity of 99.99 wt% and a Sc raw material with a purity of 99.95 wt% in a crucible according to a certain ratio, heating and melting them, and casting them after alloying to obtain a cylindrical Al-Sc ingot with a diameter of 55 mm;

[0093] Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 25 at % of the total amount of the Al raw material and the Sc raw material;

[0094] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0095] The depth of the peeling process is 5 mm;

[0096] The gas atomization powder making is carried out in an electrode induction melting gas atomization device, including: heating to 1300° C., keeping the temperature for 10 minutes, and then spraying with argon gas at a gas pressure of 2.5 MPa;

[0097] (3) After the powder obtained in step (2) is screened, the second powder is sequentially subjected to cold isostatic pressing and hot isostatic pressing to obtain the AlSc alloy target;

[0098] The screening includes dividing the powder into a first powder, a second powder and a third powder;

[0099] The particle size range of the second powder is n 2 50μm≤n 2 <80μm;

[0100] The cold isostatic pressing process was performed at a pressure of 250 MPa and a time of 14 min.

[0101] The hot isostatic pressing sintering was performed at a temperature of 850° C., a pressure of 105 MPa, and a time of 4 hours.

[0102] Example 5

[0103] This embodiment provides a method for preparing an AlSc alloy target, the preparation method comprising the following steps:

[0104] (1) placing an Al raw material with a purity of 99.99 wt% and a Sc raw material with a purity of 99.95 wt% in a crucible according to a certain ratio, heating and melting them, and casting them after alloying to obtain a cylindrical Al-Sc ingot with a diameter of 55 mm;

[0105] Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 25 at % of the total amount of the Al raw material and the Sc raw material;

[0106] (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder;

[0107] The depth of the peeling process is 5 mm;

[0108] The gas atomization powder making is carried out in an electrode induction melting gas atomization device, including: heating to 1300° C., keeping the temperature for 10 minutes, and then spraying with argon gas at a gas pressure of 2.5 MPa;

[0109] (3) After the powder obtained in step (2) is screened, the third powder is sequentially subjected to cold isostatic pressing and hot isostatic pressing to obtain the AlSc alloy target;

[0110] The screening includes dividing the powder into a first powder, a second powder and a third powder;

[0111] The particle size range of the third powder is n 3 80μm≤n 3 <120 μm;

[0112] The cold isostatic pressing process was performed at a pressure of 250 MPa and a time of 14 min.

[0113] The hot isostatic pressing sintering was performed at a temperature of 850° C., a pressure of 105 MPa, and a time of 4 hours.

[0114] Example 6

[0115] This embodiment provides a method for preparing an AlSc alloy target, which is the same as that of Embodiment 1 except that the total atomic percentage of the Al raw material and the Sc raw material is 100 at %, and the atomic percentage of the Sc raw material is 10 at % of the total amount of the Al raw material and the Sc raw material.

[0116] Example 7

[0117] This embodiment provides a method for preparing an AlSc alloy target, which is the same as that of Embodiment 1 except that the total atomic percentage of the Al raw material and the Sc raw material is 100 at %, and the atomic percentage of the Sc raw material is 43 at % of the total amount of the Al raw material and the Sc raw material.

[0118] Example 8

[0119] This embodiment provides a method for preparing an AlSc alloy target, which is the same as that of Embodiment 1 except that the pressure of the cold isostatic pressing in step (3) is 220 MPa.

[0120] Example 9

[0121] This embodiment provides a method for preparing an AlSc alloy target, which is the same as that of Embodiment 1 except that the pressure of the cold isostatic pressing in step (3) is 290 MPa.

[0122] Comparative Example 1

[0123] This comparative example provides a method for preparing an AlSc alloy target, which is the same as Example 1 except that no peeling treatment is performed.

[0124] Performance Characterization

[0125] The density, average grain size and purity of the AlSc alloy targets obtained in the above examples and comparative examples were measured. The density was measured by the water displacement method, the average grain size was measured by the intercept method, and the purity was measured by GDMS (glow discharge mass spectrometry). The results are shown in Table 1.

[0126] Table 1

[0127]

[0128]

[0129] In summary, the preparation method provided by the present invention first adopts a smelting method to obtain a cylindrical Al-Sc ingot, thereby ensuring high purity; then, the alloy powder is obtained by crucible atomization powder making, thereby effectively avoiding the increase of oxygen content; finally, the AlSc alloy target material is obtained by sequentially performing cold isostatic pressing and hot isostatic pressing sintering, without the need for plastic processing, thereby reducing the risk of target cracking.

[0130] The specific embodiments described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for preparing an AlSc alloy target, characterized in that: The preparation method comprises the following steps: (1) smelting Al raw material and Sc raw material to obtain a cylindrical Al-Sc ingot; (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder; (3) After the powder obtained in step (2) is screened, cold isostatic pressing and hot isostatic pressing are performed in sequence to obtain the AlSc alloy target.

2. The preparation method according to claim 1, characterized in that: Taking the total atomic percentage of the Al raw material and the Sc raw material in step (1) as 100 at %, the atomic percentage of the Sc raw material is 10-43 at % of the total amount of the Al raw material and the Sc raw material.

3. The preparation method according to claim 1 or 2, characterized in that: The diameter of the cylindrical Al-Sc ingot in step (1) is 53-57 mm.

4. The preparation method according to any one of claims 1 to 3, characterized in that The depth of the peeling process in step (2) is 4-6 mm.

5. The preparation method according to any one of claims 1 to 4, characterized in that: The temperature of the aerosol powder making in step (2) is 1200-1400°C; Preferably, the holding time of the aerosol powder making in step (2) is 8-12 minutes.

6. The preparation method according to claim 5, characterized in that: The aerosol powder making in step (2) is carried out using protective gas; Preferably, the protective gas comprises any one of nitrogen, argon or helium, or a combination of at least two thereof; Preferably, the gas pressure of the aerosol powder making in step (2) is 1.5-3.5 MPa.

7. The preparation method according to any one of claims 1 to 6, characterized in that: The screening in step (3) includes dividing the powder into a first powder, a second powder and a third powder; Preferably, the particle size range n1 of the first powder is 15 μm ≤ n1 < 50 μm; Preferably, the particle size range n2 of the second powder is 50 μm ≤ n2 < 80 μm; Preferably, the particle size range n3 of the third powder is 80 μm≤n3<120 μm.

8. The preparation method according to any one of claims 1 to 7, characterized in that: The pressure of the cold isostatic pressing in step (3) is 240-270 MPa; Preferably, the cold isostatic pressing time in step (3) is 12-16 minutes.

9. The preparation method according to any one of claims 1 to 8, characterized in that: The temperature of the hot isostatic pressing sintering in step (3) is 700-1000° C. Preferably, the hot isostatic pressing sintering pressure in step (3) is 90-120 MPa; Preferably, the hot isostatic pressing sintering time in step (3) is 3-5 hours.

10. The preparation method according to any one of claims 1 to 9, characterized in that: The preparation method comprises the following steps: (1) Al raw material and Sc raw material are placed in a crucible according to a certain proportion, heated and melted, and cast to obtain a cylindrical Al-Sc ingot with a diameter of 53-57 mm after alloying treatment; Taking the total atomic percentage of the Al raw material and the Sc raw material as 100 at %, the atomic percentage of the Sc raw material is 10-43 at % of the total amount of the Al raw material and the Sc raw material; (2) The cylindrical Al-Sc ingot obtained in step (1) is subjected to peeling treatment and then subjected to gas atomization pulverization to obtain a powder; The depth of the peeling process is 4-6 mm; The gas atomization powder making is as follows: heating to 1200-1400°C, keeping the temperature for 8-12 minutes, and then spraying with protective gas at a gas pressure of 1.5-3.5MPa; (3) After the powder obtained in step (2) is screened, cold isostatic pressing and hot isostatic pressing are performed in sequence to obtain the AlSc alloy target; The screening includes dividing the powder into a first powder, a second powder and a third powder; The particle size range n1 of the first powder is 15 μm ≤ n1 < 50 μm; The particle size range n2 of the second powder is 50 μm ≤ n2 < 80 μm; The particle size range n3 of the third powder is 80 μm ≤ n3 < 120 μm; The cold isostatic pressing pressure is 240-270 MPa and the time is 12-16 min; The hot isostatic pressing sintering is carried out at a temperature of 700-1000° C., a pressure of 90-120 MPa and a time of 3-5 hours.

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