A vacuum pump unit

Abstract

The present invention discloses a vacuum pump unit, which relates to the technical field of vacuum pumps, and comprises an upper vacuum pump and a lower vacuum pump which are arranged in series, the upper vacuum pump having an upper air inlet and an upper exhaust port, the lower vacuum pump having a lower air inlet and a lower exhaust port, the upper exhaust port being connected to the lower air inlet; the lower vacuum pump is provided with a purge assembly, and the purge assembly is used to spray nitrogen into the lower vacuum pump. The present invention can greatly improve the air extraction efficiency and realize rapid air extraction by using two vacuum pumps arranged in series, and provide cooling and temperature reduction effect through the purge assembly, thereby extending the service life.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum pumps, and in particular to a vacuum pump unit. Background Art

[0002] ‌Roots vacuum pump refers to a variable displacement vacuum pump that has two blade-shaped rotors rotating synchronously in opposite directions, with a small gap between the rotors and between the rotors and the inner wall of the pump casing, but they do not touch each other. The current Roots vacuum pump structure, such as the Roots vacuum pump with a composite rotor structure disclosed in Patent No. CN114458599A, mainly consists of a casing, a front end cover and a rear end plate located at both ends of the casing, a gear box installed on the front end cover, a rotor, and a motor. A single pump body is usually used, and the air extraction efficiency of a single pump body is limited, making it difficult to meet specific rapid air extraction requirements. Summary of the invention

[0003] The present invention aims to avoid the deficiencies of the prior art and provides a vacuum pump unit with fast air extraction and good cooling effect.

[0004] The present invention solves the technical problem by adopting the following technical scheme: a vacuum pump unit, comprising an upper vacuum pump and a lower vacuum pump which are arranged in series, the upper vacuum pump having an upper air inlet and an upper exhaust port, the lower vacuum pump having a lower air inlet and a lower exhaust port, the upper exhaust port being communicated with the lower air inlet; a purge assembly is arranged on the lower vacuum pump, and the purge assembly is used to spray nitrogen into the lower vacuum pump.

[0005] In several embodiments, a connecting plate is provided between the upper vacuum pump and the lower vacuum pump, and an upper interface and a lower interface are provided on the connecting plate, the upper interface surrounds the lower interface, the upper interface is connected to the upper exhaust port, and the lower interface is connected to the lower air inlet.

[0006] In several embodiments, the lower vacuum pump includes a housing and a motor and a gear box respectively arranged on both sides of the housing. The housing includes an upper housing and a lower housing arranged opposite to each other, and the upper housing is connected to a connecting plate.

[0007] In several embodiments, cooling channels are provided in the upper shell and the lower shell, and the purge assembly is provided on the lower shell and communicated with the cooling channels.

[0008] In several embodiments, the purge assembly includes a main blowing plate, a first air inlet channel is arranged on one side of the main blowing plate, and a plurality of first air outlet channels are arranged at intervals on the main blowing plate, the first air inlet channel is connected to an adjacent first air outlet channel, and one end of the first air outlet channel is connected to the cooling channel.

[0009] In several embodiments, the other end of the first air outlet channel is connected to a flow limiting orifice.

[0010] In several embodiments, the purge assembly also includes a sub-plate body, which is connected to the main blowing plate and located on a side close to the flow limiting orifice. An air inlet pipe is provided on the sub-plate body, and a plurality of air supply channels are provided in the sub-plate body. The air inlet pipe is connected to the air supply channel, and the position of the air supply channel corresponds to and is connected to the position of the flow limiting orifice.

[0011] The beneficial effects of the present invention are:

[0012] The present invention can greatly improve the air extraction efficiency and realize rapid air extraction by using two vacuum pumps arranged in series above and below, and realize stable ventilation between the two vacuum pumps by docking the two vacuum pumps through a connecting plate.

[0013] The present invention can be directly installed on the pump casing for use through the structure of the purge assembly to achieve cooling purge by introducing external nitrogen. The present invention stabilizes the spray flow rate through the combination of the main blowing plate, the auxiliary plate body and the flow limiting orifice, and can achieve multi-mode ventilation use to adapt to different usage requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings described herein are for illustrative purposes only of selected embodiments and do not represent all possible implementations, and should not be considered to limit the scope of the present invention.

[0015] Figure 1 The overall structure of the vacuum pump unit in this embodiment is schematically shown;

[0016] Figure 2 Schematically shows Figure 1 Partially enlarged structure;

[0017] Figure 3 Schematically shows Figure 2 The overlooking structure;

[0018] Figure 4 Schematically shows Figure 3 The cross-sectional structure in the AA direction;

[0019] Figure 5 Schematically shows Figure 1 The enlarged structure of the middle connecting plate;

[0020] Figure 6 Schematically shows Figure 2 A top view of the main blowing plate combined with the middle and lower shells;

[0021] Figure 7 Schematically shows Figure 6 The cross-sectional structure in the middle BB direction;

[0022] Figure 8 Schematically shows Figure 1 A magnified structure of the middle purge assembly;

[0023] Fig. 9 Schematically shows Figure 8 Explosion structure;

[0024] Fig.10 Schematically shows Fig. 9 Structure from another perspective.

[0025] Reference numerals:

[0026] Upper vacuum pump 10, housing 11, upper air inlet 101, upper air outlet 102;

[0027] Lower vacuum pump 20, lower air inlet 201, lower air outlet 202, housing 21, motor 22, gear box 23, cooling channel 24;

[0028] The purge assembly 30, the main blowing plate 31, the first air inlet channel 311, the first air outlet channel 312, the flow limiting orifice 313, the auxiliary plate body 32, the air inlet pipe 321, and the air delivery channel 322;

[0029] Connecting plate 40 , upper interface 41 , lower interface 42 . DETAILED DESCRIPTION

[0030] Below, embodiments of the present invention are described in detail with reference to the accompanying drawings. To make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0031] Therefore, the following detailed description of the embodiments of the present invention provided in conjunction with the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. All other embodiments obtained by ordinary technicians in the field based on the embodiments of the present invention without making any creative work are within the scope of protection of the present invention.

[0032] like Figure 1-Figure 10 As shown, the vacuum pump unit in this embodiment is mainly composed of an upper vacuum pump 10 and a lower vacuum pump 20 which are arranged in series, a connecting plate 40 arranged between the upper vacuum pump 10 and the lower vacuum pump 20, and a purge assembly 30 arranged on the lower vacuum pump 20.

[0033] The lower vacuum pump 20 includes a shell 21 and a motor 22 and a gear box 23 respectively arranged on both sides of the shell 21. The shell 21 includes an upper shell 211 and a lower shell 212 arranged opposite to each other. The upper shell 211 is connected to the connecting plate 40. The upper vacuum pump 10 has the same structure as the lower vacuum pump 20 and also has a shell 11. The shell 11 has an upper air inlet 101 and an upper exhaust port 102. The shell 21 has a lower air inlet 201 and a lower exhaust port 202, and the upper exhaust port 102 is communicated with the lower air inlet 201.

[0034] Furthermore, an upper interface 41 and a lower interface 42 are connected on the connecting plate 40 , wherein the upper interface 41 surrounds the lower interface 42 , the upper interface 41 is connected to the upper exhaust port 102 , and the lower interface 42 is connected to the lower air inlet 201 .

[0035] Among them, a connected cooling channel 24 is arranged in the upper shell 211 and the lower shell 212. The cooling channel 24 generally surrounds the outer side of the rotor chamber formed by the upper shell 211 and the lower shell 212. The purge assembly 30 is arranged on the lower shell 212 and is connected to the cooling channel 24.

[0036] In addition, the purge assembly 30 includes a main blowing plate 31 and a sub-plate body, a first air inlet channel 311 is arranged on one side of the main blowing plate 31, and a plurality of first air outlet channels 312 are arranged at intervals on the main blowing plate 31, the first air inlet channel 311 is connected with an adjacent first air outlet channel 312, one end of each of the first air outlet channels 312 is connected with the cooling channel 24, and the other end of the first air outlet channel 312 is connected with a limiting flow orifice 313, and the flow rate is limited by the limiting flow orifice 313.

[0037] Among them, the auxiliary plate body 32 is connected to the main blowing plate 31 and is located on a side close to the flow limiting orifice 313. An air inlet pipe 321 is arranged on the auxiliary plate body 32. A plurality of air supply channels 322 are arranged in the auxiliary plate body 32. The air inlet pipe 321 is connected to the air supply channels 322. The positions of the air supply channels 322 correspond to and are connected to the positions of the flow limiting orifice 313.

[0038] When in use, the air inlet pipe 321 can be connected to the external pipe body, and a valve is arranged on the pipe body, which is in a normally closed state. Nitrogen is mainly input through the first air inlet channel 311, and the nitrogen enters an adjacent first air outlet channel 312, and flows back to the air inlet pipe 321 from the limiting orifice 313 at the end, and then flows to the other two air delivery channels 322 through the air inlet pipe 321 and enters the other two first air outlet channels 312 after passing through two corresponding limiting orifices 313. Thus, nitrogen flows with different flow rates are formed in the three first air outlet channels 312, and all enter the cooling channel 24 for spray cooling. When the flow rate needs to be increased, nitrogen can be introduced into both the air inlet pipe 321 and the first air inlet channel 311, and the superimposed nitrogen amount enters the cooling channel 24 for spray cooling.

[0039] All methods described herein can be performed in any suitable order. The use of any and all examples, or exemplary language (eg, "such as") provided herein is intended merely to better illustrate the invention and is not intended to limit the scope of the invention.

Claims

1. A vacuum pump unit, characterized in that: The invention comprises an upper vacuum pump (10) and a lower vacuum pump (20) which are arranged in series from top to bottom, the upper vacuum pump (10) having an upper air inlet (101) and an upper air outlet (102), the lower vacuum pump (20) having a lower air inlet (201) and a lower air outlet (202), the upper air outlet (102) being in communication with the lower air inlet (201); the lower vacuum pump (20) being provided with a purge assembly (30), the purge assembly (30) being used for blowing nitrogen into the lower vacuum pump (20); The purge assembly (30) comprises a main blowing plate (31), a first air inlet channel (311) being arranged on one side of the main blowing plate (31), a plurality of first air outlet channels (312) being arranged at intervals on the main blowing plate (31), the first air inlet channel (311) being connected to an adjacent first air outlet channel (312), and one end of each of the first air outlet channels (312) being connected to a cooling channel (24); The other end of the first air outlet channel (312) is connected to a flow limiting orifice (313), and the purge assembly (30) further comprises a sub-plate body (32), the sub-plate body (32) being connected to the main blowing plate (31) and being located on a side close to the flow limiting orifice (313), an air inlet pipe (321) being arranged on the sub-plate body (32), a plurality of air delivery channels (322) being arranged in the sub-plate body (32), the air inlet pipe (321) being connected to the air delivery channels (322), and the positions of the air delivery channels (322) corresponding to and connected to the positions of the flow limiting orifice (313).

2. A vacuum pump unit according to claim 1, characterized in that: A connecting plate (40) is provided between the upper vacuum pump (10) and the lower vacuum pump (20); an upper interface (41) and a lower interface (42) are provided on the connecting plate (40) for communication; the upper interface (41) surrounds the lower interface (42); the upper interface (41) is connected to an upper exhaust port (102); and the lower interface (42) is connected to a lower air inlet (201).

3. A vacuum pump unit according to claim 2, characterized in that: The lower vacuum pump (20) comprises a housing (21) and a motor (22) and a gear box (23) respectively arranged on both sides of the housing (21); the housing (21) comprises an upper housing (211) and a lower housing (212) arranged opposite to each other; the upper housing (211) is connected to a connecting plate (40).

4. A vacuum pump unit according to claim 3, characterized in that: The upper shell (211) and the lower shell (212) are provided with cooling channels (24), and the purge assembly (30) is arranged on the lower shell (212) and is in communication with the cooling channels (24).

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