Ultra-precision optical measurement machine tool

Abstract

The invention discloses an ultra-precision optical measurement machine tool which comprises a rack, a laser system arranged on the rack, a measurement seat driving mechanism, a measuring head and a measurement seat, the measuring head comprises an outer cylinder and an inner cylinder located in the outer cylinder, a floating rod is arranged in the inner cylinder, a probe is arranged on the floating rod, and the probe is arranged on the outer cylinder. The outer cylinder and the inner cylinder are provided with air floating structures, the floating rod can float in an inner hole of the inner cylinder through the air floating structures, a first reflecting mirror is installed on the floating rod, and a limiting structure for limiting rotation of the floating rod and a positioning structure for supporting the floating rod are arranged between the floating rod and the inner cylinder. The measuring base comprises a lower base plate and an upper base plate, a second reflecting mirror is arranged on the upper base plate, a base plate adjusting structure is arranged between the upper base plate and the lower base plate, and the second reflecting mirror can be perpendicular to a laser beam irradiated to the reflecting mirror by the laser system through adjustment of the base plate adjusting structure. The measuring seat is arranged on the measuring seat driving mechanism and is driven by the measuring seat driving mechanism to move; and laser emitted by the laser system can respectively irradiate the reflecting mirror I and the reflecting mirror II and is reflected back to the laser system.

Description

Technical Field

[0001] The invention relates to an optical measuring device, in particular to an ultra-precision optical measuring machine tool. Background Art

[0002] In the ultra-precision machining production process, measurement is an important process. Whether the machined workpiece meets the requirements needs to be checked by measurement. However, for some workpieces with special shapes, the surface of the workpiece is a non-spherical free-form surface. If ordinary measuring equipment (such as micrometer measurement, etc.) is used for manual measurement, not only the measurement process is time-consuming but also the measurement accuracy is difficult to meet the requirements. Therefore, the applicant uses the current advanced laser system to design an ultra-precision optical measuring machine to measure the above structure. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides an ultra-precision optical measuring machine tool.

[0004] The technical solution adopted by the present invention to solve its technical problem is:

[0005] An ultra-precision optical measuring machine tool comprises a frame, a laser system arranged on the frame, and a measuring seat driving mechanism, characterized in that it also comprises a probe and a measuring seat, the probe comprises an outer cylinder and an inner cylinder located in the outer cylinder, a floating rod is arranged in the inner cylinder, a probe is arranged on the floating rod, an air flotation structure is arranged on the outer cylinder and the inner cylinder, the floating rod can float in the inner hole of the inner cylinder through the air flotation structure, a first reflector is installed on the floating rod, and a limiting structure for limiting the rotation of the floating rod and a positioning structure for supporting the floating rod are arranged between the floating rod and the inner cylinder, the measuring seat comprises a lower seat plate and an upper seat plate, a second reflector is arranged on the upper seat plate, a seat plate adjusting structure is arranged between the upper seat plate and the lower seat plate, the second reflector can be perpendicular to the laser beam irradiated on the reflector by the laser system through the adjustment of the seat plate adjusting structure, the measuring seat is arranged on the measuring seat driving mechanism and is moved by the measuring seat driving mechanism, and the laser emitted by the laser system can irradiate the first reflector and the second reflector respectively and reflect back to the laser system.

[0006] The air flotation structure comprises an outer air inlet hole arranged on the outer cylinder, an annular air channel arranged on the inner cylinder and a plurality of inner air inlet holes arranged in the annular air channel, wherein the outer air inlet hole is communicated with the annular air channel, and the inner air inlet hole is communicated with the inner hole.

[0007] The positioning structure comprises a reference plate fixed on the floating rod and a reference ball arranged on the inner cylinder. Both ends of the reference plate can contact with the reference ball to support the floating rod.

[0008] The limiting structure includes limiting posts that are arranged opposite to each other, and the end of the reference plate is located between two corresponding limiting posts.

[0009] It also includes a probe lifting mechanism, the probe is arranged on the probe lifting mechanism and is lifted and lowered by the probe lifting mechanism, the probe lifting mechanism includes a lifting movable plate, a lifting air flotation guide rail and a lifting motor, the lifting motor is connected to the lifting air flotation guide rail, the lifting movable plate is installed on the lifting air flotation guide rail, and the outer cylinder is connected to the lifting movable plate through a connecting flange.

[0010] The probe also includes a connecting flange, which is connected to the probe lifting mechanism. Two elastic rings are provided at the bottom end of the connecting flange. A connecting plate is provided on the elastic ring. A locking screw hole is provided on the connecting plate. The locking rod cooperates with the locking screw hole. The end of the outer tube is located in the two elastic rings and is fixed to the connecting flange by the elastic rings.

[0011] The seat plate adjustment structure includes at least three adjustment screws, which are threadedly connected to the upper seat plate. The adjustment screws can abut against the lower seat plate to achieve position angle adjustment of the upper seat plate, and the upper seat plate and the lower seat plate are locked by a locking member.

[0012] The upper seat plate is provided with a positioning groove, the lower seat plate is provided with a positioning platform that can be located in the positioning groove, the adjusting screw can be against the positioning platform, a plurality of steel balls are arranged between the upper seat plate and the lower seat plate, the steel balls are arranged around the positioning platform, and the steel balls are fixed by clamping the upper seat plate and the lower seat plate.

[0013] The lower seat plate is provided with a plurality of lower pads, the lower pads are provided with positioning grooves, the upper seat plate is provided with a plurality of upper pads, the steel balls are located in the corresponding positioning grooves and are fixed by clamping the upper pads and the lower pads.

[0014] The bottom surface of the lower seat plate is provided with a lower groove, and a precision displacement sensor is arranged in the lower groove.

[0015] The beneficial effects of the present invention are as follows: the probe and the measuring seat of the present invention are designed around the laser system, the measuring seat cooperates with the measuring seat driving mechanism to realize precise plane movement, and the probe realizes a floating rod through an air floating structure to drive the reflector 1 to stably rise and fall along with the curve change of the object surface, so that the reflector 1 can accurately reflect the laser beam back to the laser system, and the measuring seat can be adjusted by the seat plate adjustment structure to be perpendicular to the laser beam irradiated to the reflector 2 by the laser system, thereby also ensuring the accuracy of the reflected laser beam returning to the laser system, thereby realizing the accuracy of measurement using the laser system, realizing ultra-precision automatic measurement, and greatly improving the efficiency of measurement, thereby correspondingly improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0017] Figure 1 It is the overall structural view of the present invention;

[0018] Figure 2 This is a structural view of the part behind the hidden metal frame;

[0019] Figure 3 This is a structural view of the part in the other direction behind the hidden metal frame;

[0020] Figure 4 It is a structural view that hides the metal rack, marble table, and marble slab.

[0021] Figure 5 It is the structural view of the probe;

[0022] Figure 6 It is a cross-sectional structural view of the probe;

[0023] Figure 7 This is the internal structure view of the probe;

[0024] Figure 8 Structural view of the connecting flange;

[0025] Fig. 9 This is the structural view of the measuring seat;

[0026] Fig.10 This is the structural view of the measuring seat from another direction;

[0027] Fig.11 It is the exploded structural view of the lower seat plate and the upper seat plate;

[0028] Fig.12 This is a structural view of the lower seat plate and the upper seat plate exploded from another direction. DETAILED DESCRIPTION

[0029] The advantages and features of the present disclosure and its implementation methods will be explained by the following embodiments described with reference to the accompanying drawings. However, the present disclosure can be embodied in different forms and should not be interpreted as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present disclosure will be comprehensive and complete, and will fully convey the scope of the present disclosure to those skilled in the art. In addition, the present disclosure is limited only by the scope of the claims.

[0030] The shapes, sizes, ratios, angles and numbers disclosed in the drawings for describing the embodiments of the present disclosure are only examples, and therefore the present disclosure is not limited to the details shown. Throughout this specification, the same reference numerals refer to the same elements. In the following description, when the detailed description of the relevant known functions or configurations is determined to be unnecessary to blur the focus of the present disclosure, the detailed description will be omitted. In the case of using "including", "having" and "comprising" described in this specification, other parts may be added unless "only" is used. Unless otherwise indicated, the terms in the singular may include plural forms.

[0031] When explaining an element, although not explicitly described, the element is understood to include a range of error.

[0032] When describing a positional relationship, for example, when the positional relationship is described as "on," "above," "below," and "adjacent to," unless "immediately" or "directly" is used, one or more parts may be arranged between two other parts.

[0033] When describing a time relationship, for example, when a time sequence is described as “after,” “subsequently,” “next,” and “before,” discontinuous cases may be included unless “just” or “directly” is used.

[0034] It should be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from other elements. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of the present disclosure.

[0035] As those skilled in the art can fully understand, the features of the different embodiments of the present disclosure can be coupled or combined with each other in part or in whole, and can cooperate with each other in various ways and be driven technically. The embodiments of the present disclosure can be performed independently of each other, or can be performed together in a mutually dependent relationship.

[0036] Reference Figures 1 to 4The present invention discloses an ultra-precision optical measuring machine tool, comprising a frame 100, a laser system 200 arranged on the frame 100, a probe 300 and a measuring seat 400. The frame 100 of the present application comprises three parts, namely, a metal frame 1 at the bottom, a marble table 2 arranged on the metal frame 1, and a marble plate 3 vertically arranged on the marble table 2. Such a structure can minimize the deformation of the frame 100 affecting the measurement. The workpiece to be measured (not shown in the figure) is placed on the measuring seat 400. The measuring seat 400 drives the workpiece to be measured to move left and right and forward and backward so that different positions on the surface of the workpiece contact with the probe in the probe 300, and the probe moves up and down with the height change of different positions on the surface of the workpiece. Because the probe 300 has a reflector 1, and the measuring seat 400 has two reflectors 2 arranged perpendicular to each other, the laser emitted by the laser system 200 can irradiate the reflector 1 and the reflector 2 respectively and reflect back to the laser system 200, so that the displacement change can be fed back to the laser system 200 through the laser beam, so that the software program can measure the precise size data of the workpiece surface. The laser system 200 of the present application includes a laser transmitter, a laser receiver, a beam splitter and a reflector. The laser beam emitted by the laser transmitter is divided into multiple laser beams by the beam splitter, and the light path is guided by the reflector to illuminate the reflector one and the reflector two respectively. Of course, the laser system 200 in the present application is a purchased product of the prior art, so its specific structure and principle are not described in detail.

[0037] like Figures 5 to 8As shown, the probe 300 includes an outer cylinder 1 and an inner cylinder 2 located in the outer cylinder 1. The outer cylinder 1 and the inner cylinder 2 are both cylindrical cylinders. The outer cylinder 1 has a mounting hole, and the inner cylinder 2 is located in the mounting hole. The outer cylinder 1 and the inner cylinder 2 can be fixed as a whole by pins. A floating rod 3 is provided in the inner cylinder 2. The floating rod 3 is a cylindrical rod and is made of a lightweight magnesium alloy, so as to minimize the contact pressure during measurement. Of course, a probe (not shown in the figure) is provided on the floating rod 3. The end face of the probe is in contact with the workpiece to be measured. When the measuring seat 400 moves, the floating rod has a slight rise and fall change with the height change of the workpiece surface. A reflector 17 is installed on the floating rod 3. The reflector 17 is generally installed on the floating rod 3 by pasting. When the laser of the laser system 200 irradiates the reflector 17, the reflector 17 will reflect the laser beam back to the laser system 200. The laser system 200 can calculate the reflected laser beam data to know the precise size data of the workpiece surface. Of course, the laser system 200 and the reflector 17 are purchased equipment, and they are not components of this structure. Therefore, their specific structure and principle are not described in detail. The probe 300 structure adopts a combination of an air flotation structure and laser detection for precise measurement. The floating rod of the probe 300 structure can float in the inner hole of the inner cylinder through the air flotation structure, thereby greatly avoiding the interference of friction resistance. The outer cylinder 1 and the inner cylinder 2 are provided with an air flotation structure. The floating rod 3 can float in the inner hole of the inner cylinder 2 through the air flotation structure, and a limiting structure for limiting the rotation of the floating rod 3 and a positioning structure for supporting the floating rod 3 are provided between the floating rod 3 and the inner cylinder 2. Of course, in this application, the position when the floating rod 3 contacts the positioning structure is the reference position for measurement, which is convenient for subsequent calculations.

[0038] As shown in the figure, the air flotation structure includes an outer air inlet hole (not shown in the figure) arranged on the outer cylinder 1, an annular air channel 4 arranged on the inner cylinder 2, and a plurality of inner air inlet holes 5 arranged in the annular air channel 4. The inner air inlet holes 5 are evenly arranged around the inner hole of the inner cylinder 2. The outer air inlet hole is connected to the annular air channel 4, and the inner air inlet hole 5 is connected to the inner hole. The outer air inlet hole is connected to the external compressed air source through an air joint and an air pipe. The high-pressure gas enters the annular air channel 4 from the outer air inlet hole, and then enters the inner air inlet hole 5. In this way, a multi-point air intake structure can be formed in the inner hole of the inner cylinder 2, and the annular air channel 4 is provided with two upper and lower ones. Of course, the outer cylinder 1 is provided with an outer air channel connected to the annular air channel 4, and the outer air inlet hole is connected to the outer air channel, so that a relatively uniform high-pressure air film is formed in the inner hole, which helps to prevent eccentric micro-movement of the floating rod 3, thereby improving the measurement accuracy. As a further preferred structure, the inner air inlet hole 5 is a conical hole, and the aperture gradually decreases from the air inlet end hole to the air outlet end hole of the inner air inlet hole 5. By reducing the aperture, we can gradually increase the pressure of the gas entering the inner hole of the inner tube 2, thereby forming an air film with higher pressure, which helps to prevent eccentric micro-movement of the floating rod 3, thereby improving the measurement accuracy.

[0039] As shown in the figure, the positioning structure includes a reference plate 6 fixed on the floating rod 3 and a reference ball 7 arranged on the inner tube 2. The reference plate 6 is also a magnesium alloy plate and is relatively thin. The two ends of the reference plate 6 can contact with the reference ball 7 to support the floating rod 3. The reference ball 7 is a steel sphere. The position where the reference plate 6 contacts the steel sphere is the reference point position. The limiting structure includes relatively arranged limit columns 8. The end of the reference plate 6 is located between two corresponding limit columns 8. The limit columns 8 are made of ceramic and have a very smooth surface. The reference plate 6 can prevent the floating rod 3 from rotating and affecting the accuracy through the action of the limit columns 8, and the smooth surface of the ceramic can avoid affecting the lifting and lowering of the floating rod 3. Moreover, the limit columns 8 cooperate with the reference ball 7 to make the reference plate 6 contact with the reference ball 7 horizontally.

[0040] As shown in the figure, a connecting screw hole is provided in the floating rod 3, and a connecting thread matching the connecting screw hole is provided at the end of the probe, so that the installation and disassembly of the probe is relatively convenient, and it is convenient for later replacement. Furthermore, a weight-reducing hole that passes through the connecting screw hole is provided on the floating rod 3. The floating rod 3 needs a lightweight design, which is beneficial to improving the measurement accuracy.

[0041] As a preferred structure, an end plate 9 is provided at the end of the floating rod 3, and a plate hole is provided between the end plate 9 and the floating rod 3. The reference plate 6 is fixed to the end plate 9 through the plate hole because the weight reduction hole just passes through the plate hole, and the reference plate 6 is also fixed by bonding. In this way, the contact area between the reference plate 6 and the end face of the floating rod 3 is small, so the reference plate 6 and the end plate 9 are bonded as one. Of course, the end plate 9 is also a magnesium alloy and is bonded as one with the floating rod 3.

[0042] As shown in the figure, it also includes a connecting flange, and the outer cylinder 1 is connected to the probe lifting mechanism through the connecting flange. Two elastic rings 11 are provided at the bottom end of the connecting flange, and the end of the outer cylinder 1 is located in the two elastic rings 11 and is fixed to the connecting flange by the elastic rings 11, and the elastic ring 11 is locked by the clamp 12, and the clamp 12 is a purchased part. The above structure is simple and easy to assemble and disassemble, so that it is easy to realize the maintenance and replacement of the probe structure in the later stage. The specific structure of the connecting flange of the present application is: it includes a flange plate 14 and a connecting cylinder 15, and an annular transverse slit 16 and a vertical incision 13 are cut on the connecting cylinder 15. One end of the vertical incision 13 is connected to the transverse slit 16, and the other end of the vertical incision 13 is connected to the outside world. The elastic ring 11 is formed by the division of the transverse slit 16 and the vertical incision 13. The above structure is simple to process and has low cost.

[0043] As shown in the figure, as a further structure, it also includes a probe lifting mechanism, which is installed on the marble plate 3 on the frame 100. The probe lifting mechanism includes a lifting and moving plate 19, a lifting and floating guide rail and a lifting motor. The lifting motor is connected to the lifting and floating guide rail. The lifting and moving plate 19 is installed on the lifting and floating guide rail. The connecting flange is connected to the lifting and moving plate 19. Through the above structure, we can realize that the inner cylinder 2 and the outer cylinder 1 can make compensatory corresponding movements with the movement of the floating rod 3. Because the pressure of the air film formed around the floating rod 3 in the inner cylinder 2 is not absolutely uniform, when the floating rod 3 moves and rises and falls during the measurement process, the pressure of the air film will change, which will affect the measurement accuracy. Therefore, in order to ensure that the pressure of the air film on the floating rod 3 during the measurement process is consistent, the probe lifting mechanism will follow the data changes of the probe in real time, and make compensatory corresponding movements with the movement of the probe, so that the position of the probe and the floating rod 3 relative to the inner cylinder 2 and the outer cylinder 1 remains unchanged, thereby ensuring that the measurement position remains unchanged, thereby ensuring that the contact pressure during measurement remains unchanged. Thereby improving the accuracy of measurement, the above-mentioned lifting motor can be a linear servo motor. Of course, the lifting motor and the lifting air-floating guide rail are existing technology products, so the specific structure and connection relationship are not described in detail.

[0044] As shown in the figure, a lens adjustment mechanism is provided between the connecting flange and the lifting and moving plate 19. The lens adjustment mechanism is used to adjust the angle of the reflector 17. The lens adjustment mechanism includes an adjustment spring (not shown in the figure), a plurality of adjustment screw holes provided on the connecting flange, and an adjustment screw 20 matched with the adjustment screw holes. In the present application, there are three adjustment screw holes and three adjustment screws 20 matched with the adjustment screw holes, which are evenly arranged around the inner cylinder 2. The adjustment screw 20 can be pressed against the lifting and moving plate 19 to control the relative angle between the connecting flange and the lifting and moving plate 19. After adjustment, the connecting flange and the lifting and moving plate 19 are locked by screws to maintain the angle. In order to facilitate adjustment, the connecting flange and the adjusting screw 20 are always kept in close contact. One end of the adjustment spring is against the connecting flange and the other end is against the lifting and moving plate 19, so that adjustment is more convenient and accurate.

[0045] As shown in the figure, from 9 to Fig.12As shown, the measuring seat 400 described in the present application includes a measuring seat driving mechanism 21, a lower seat plate 22 and an upper seat plate 23. The lower seat plate 22 and the upper seat plate 23 are driven to move by the measuring seat driving mechanism 21, so that the workpiece placed on the upper seat plate 23 can be moved forward, backward, left and right. The measuring seat driving mechanism 21 is a prior art product, which is mainly composed of two sets of servo motors and two sets of precision air-floating guide rails and other components. It can realize unidirectional movement in the X direction or Y direction, or planar movement in the X direction and the Y direction. The servo motor and the air-floating guide rail are both prior art, so their specific structure and installation method are not described in detail.

[0046] As shown in the figure, a reflector 24 is provided on the upper seat plate 23. Of course, for the convenience of installation, a mirror seat 25 is provided on the upper seat plate 23, and the reflector 24 is installed on the mirror seat 25. An adjustment structure is provided between the upper seat plate 23 and the lower seat plate 22. The reflector 24 can be adjusted perpendicular to the laser beam irradiated on the reflector 24 by the laser system 200 through the adjustment of the adjustment structure. In the above structure, the precision drive mechanism 1 adopts two servo motors and two sets of precision air-floating guide rails, which can realize unidirectional movement in the X direction or Y direction, or planar movement in the X direction and the Y direction. The servo motor and the air-floating guide rail are both existing technologies, so their specific structure and installation method are not described in detail. Of course, the laser system 200 is also an externally purchased equipment, so the specific structure and installation method of the laser system 200 are not described in detail.

[0047] As shown in the figure, the adjustment structure includes at least three adjustment screws (not shown in the figure), and three are preferred in the present application. The adjustment screws are threadedly connected to the upper seat plate 23. Of course, there are adjustment screw holes 26 on the upper seat plate that cooperate with the adjustment screws. The adjustment screws can abut against the lower seat plate 22 to achieve position angle adjustment of the upper seat plate 23. The three adjustment screws are evenly arranged around the center of the upper seat plate 23. The adjustment screws are screwed in and abut against the lower seat plate 22, thereby lifting the corresponding side of the upper seat plate 23 to achieve the adjustment of the angular position of the upper seat plate 23, so that the reflector 24 is perpendicular to the laser beam to ensure accurate measurement. After the adjustment is completed, the upper seat plate 23 and the lower seat plate 22 are locked by a locking member, which is also a screw.

[0048] As shown in the figure, the upper seat plate 23 is provided with a positioning groove 27, and the lower seat plate 22 is provided with a positioning platform 28 that can be located in the positioning groove 27, and the adjusting screw can be against the positioning platform 28. Through the cooperation of the positioning platform 28 and the positioning groove 27, we can achieve preliminary positioning during assembly. In the present application, the positioning groove 27 is preferably a cylindrical groove, and the positioning platform 28 is a cylindrical platform, and the diameter of the positioning groove 27 is slightly larger than the positioning platform 28. The two can be loosely matched, and the height value of the cylindrical platform is also larger than the depth value of the positioning groove 27. In this way, there is a gap between the upper seat plate 23 and the lower seat plate 22, so that there is adjustment space. As a preferred structure, the positioning platform 28 is provided with three positioning holes (not shown in the figure), and the end of the adjusting screw is located in the positioning hole, so that the adjusting screw will not shift during and after the adjustment, thereby ensuring the adjustment accuracy.

[0049] As shown in the figure, a plurality of steel balls 29 are arranged between the upper seat plate 23 and the lower seat plate 22. The steel balls 29 are arranged around the positioning platform 28, and the steel balls 29 are fixed by clamping the upper seat plate 23 and the lower seat plate 22. With the support of the steel balls 29, we can more easily adjust the angle of the upper seat plate 23, and the contact between the steel balls 29 and the upper seat plate 23 and the lower seat plate 22 is always point contact, so it does not affect the adjustment of the upper seat plate 23, and after the upper seat plate 23 and the lower seat plate 22 are locked, the suspended area of ​​the upper seat plate 23 is supported and is not easy to bend and deform.

[0050] As a further structure, the lower seat plate 22 is provided with a plurality of lower pads 30, the lower pads 30 are provided with positioning grooves 27, and the upper seat plate 23 is provided with a plurality of upper pads 31. The steel balls 29 are located in the corresponding positioning grooves 27 and are fixed by clamping the upper pads 31 and the lower pads 30. The positioning grooves 27 not only facilitate the installation and positioning of the steel balls 29 during assembly, but also facilitate processing through the setting of the pads.

[0051] As a further structure, an upper groove 32 is provided on the upper seat plate 23 , and the pad and the steel ball 29 are located in the corresponding upper groove 32 , so that the thickness of the measuring seat 400 can be reduced as a whole.

[0052] As shown in the figure, a lower groove 33 is provided on the bottom surface of the lower seat plate 22, and a precision displacement sensor 34 is provided in the lower groove 33. The precision displacement sensor 34 is preferably an ultra-precision capacitive displacement sensor. The precision displacement sensor 34 can detect a small upward and downward displacement of the upper seat plate 23, thereby providing it to the laser system 200 as a correction compensation value for the measurement value in this direction.

[0053] In summary, the probe 300 and the measuring seat 400 are specially designed for precision measurement. The floating rod of the probe 300 structure can float in the inner hole of the inner cylinder through the air flotation structure, thereby greatly avoiding the interference of friction resistance. A reflector is installed on the floating rod, and then the reflector cooperates with the laser system 200, so that the slight lifting and lowering changes of the floating rod can be detected and calculated by the laser system 200, thereby realizing precise measurement; the measuring seat 400 includes a lower seat plate and an upper seat plate, the upper seat plate is provided with a reflector, and an adjustment structure is provided between the upper seat plate and the lower seat plate. The reflector can be precisely matched with the laser system 200 through the adjustment of the adjustment structure, so that the measuring seat 400 is well adapted to the laser system 200, thereby realizing precise measurement of the workpiece.

[0054] The above is a detailed introduction to an ultra-precision optical measuring machine tool provided by an embodiment of the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. An ultra-precision optical measuring machine tool, comprising a frame and a laser system arranged on the frame, characterized in that: The probe also includes a probe and a measuring seat, wherein the probe includes an outer cylinder and an inner cylinder located in the outer cylinder, a floating rod is provided in the inner cylinder, a probe is provided on the floating rod, an air flotation structure is provided on the outer cylinder and the inner cylinder, the floating rod can float in the inner hole of the inner cylinder through the air flotation structure, a reflector 1 is installed on the floating rod, and a limiting structure for limiting the rotation of the floating rod and a positioning structure for supporting the floating rod are provided between the floating rod and the inner cylinder, the measuring seat includes a measuring seat driving mechanism, a lower seat plate and an upper seat plate, a reflector 2 is provided on the upper seat plate, a seat plate adjustment structure is provided between the upper seat plate and the lower seat plate, the reflector 2 can be adjusted perpendicular to the laser beam irradiated on the reflector by the laser system through the adjustment of the seat plate adjustment structure, the measuring seat is arranged on the measuring seat driving mechanism and is moved by the measuring seat driving mechanism, and the laser emitted by the laser system can irradiate the reflector 1 and the reflector 2 respectively and reflect back to the laser system.

2. The ultra-precision optical measuring machine tool according to claim 1, characterized in that: The air flotation structure comprises an outer air inlet hole arranged on the outer cylinder, an annular air channel arranged on the inner cylinder and a plurality of inner air inlet holes arranged in the annular air channel, wherein the outer air inlet hole is communicated with the annular air channel, and the inner air inlet hole is communicated with the inner hole.

3. The ultra-precision optical measuring machine tool according to claim 1, characterized in that: The positioning structure comprises a reference plate fixed on the floating rod and a reference ball arranged on the inner cylinder. Both ends of the reference plate can contact with the reference ball to support the floating rod.

4. The ultra-precision optical measuring machine tool according to claim 1, characterized in that: The limiting structure includes limiting posts that are arranged opposite to each other, and the end of the reference plate is located between two corresponding limiting posts.

5. The ultra-precision optical measuring machine tool according to claim 1, characterized in that: It also includes a connecting flange, the bottom end of which is provided with two elastic rings and a clamp for locking the two elastic rings, the end of the outer tube is located in the two elastic rings and is fixed to the connecting flange by the elastic rings, the connecting flange includes a flange plate and a connecting tube, a transverse slit and a vertical incision are cut on the connecting tube, one end of the vertical incision is connected to the transverse slit, and the other end of the vertical incision is connected to the outside, and the elastic ring is formed by the division of the transverse slit and the vertical incision.

6. The ultra-precision optical measuring machine tool according to claim 5, characterized in that: It also includes a probe lifting mechanism, which includes a lifting movable plate, a lifting air-floating guide rail and a lifting motor. The lifting motor is connected to the lifting air-floating guide rail, the lifting movable plate is installed on the lifting air-floating guide rail, and the connecting flange is connected to the lifting movable plate.

7. The ultra-precision optical measuring machine tool according to claim 5, characterized in that: A lens adjustment mechanism is provided between the connecting flange and the lifting movable plate, and the lens adjustment mechanism includes an adjustment spring, a plurality of adjustment screw holes provided on the connecting flange, and an adjustment screw matched with the adjustment screw holes. One end of the adjustment spring abuts against the connecting flange and the other end abuts against the lifting movable plate.

8. The ultra-precision optical measuring machine tool according to claim 1, characterized in that: The seat plate adjustment structure includes at least three adjusting screws, the adjusting screws are threadedly connected to the upper seat plate, the adjusting screws can be abutted against the lower seat plate to achieve position angle adjustment of the upper seat plate, and the upper seat plate and the lower seat plate are locked by a locking member, the upper seat plate is provided with a positioning groove, the lower seat plate is provided with a positioning platform that can be located in the positioning groove, the adjusting screws can be abutted against the positioning platform, a plurality of steel balls are provided between the upper seat plate and the lower seat plate, the steel balls are arranged around the positioning platform, and the steel balls are fixed by clamping the upper seat plate and the lower seat plate.

9. The ultra-precision optical measuring machine tool according to claim 8, characterized in that: The lower seat plate is provided with a plurality of lower pads, the lower pads are provided with positioning grooves, the upper seat plate is provided with a plurality of upper pads, the steel balls are located in the corresponding positioning grooves and are fixed by clamping the upper pads and the lower pads.

10. The ultra-precision optical measuring machine tool according to claim 8, characterized in that: The upper seat plate is provided with an upper groove, the pad and the steel ball are located in the corresponding upper groove, the bottom surface of the lower seat plate is provided with a lower groove, and a precision displacement sensor is provided in the lower groove.

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