Flexible temperature sensor for submarine hot spring in-situ monitoring and preparation method thereof

Abstract

The invention discloses a flexible temperature sensor for submarine hot spring in-situ monitoring and a preparation method thereof, and belongs to the field of temperature sensors. The flexible temperature sensor comprises a flexible substrate, a temperature sensitive layer and a waterproof layer, the temperature sensitive layer is arranged on the surface of one side of the flexible substrate, and the waterproof layer covers the temperature sensitive layer; the temperature sensitive layer comprises a positive electrode sensitive layer and a negative electrode sensitive layer, the positive electrode sensitive layer and the negative electrode sensitive layer are arranged in a snake shape, the same end parts of the positive electrode sensitive layer and the negative electrode sensitive layer are contacted, and the other end parts of the positive electrode sensitive layer and the negative electrode sensitive layer are connected with the data acquisition end through leads. The flexible temperature sensor or the flexible thermocouple is ultrathin, can be cut, bent and even curled at will, is good in flexibility, can achieve the temperature measurement range of-50.0-350.0 + / -0.3 DEG C, can achieve the sensitivity of 100-120 [mu] V.DEG C <-1 >, and can effectively meet the temperature measurement requirements of the flexible temperature sensor for the deep sea hot spring.

Description

Technical Field

[0001] The present invention relates to the field of temperature sensors, and in particular to a flexible temperature sensor for in-situ monitoring of submarine hot springs, and a method for preparing the flexible temperature sensor. Background Art

[0002] With the development of modern science and technology, the importance of deep-sea hydrothermal vents to the fields of earth science, life science and energy science has become increasingly prominent. Deep-sea hydrothermal vents refer to hydrothermal vents located on the seabed, which can spray high-temperature, high-pressure hot water and gas. They also contain a large number of minerals and microorganisms and are the habitats of many biological communities. These special environmental conditions provide humans with unique research and development opportunities, and are of great significance to the understanding and research of the earth's ecosystem.

[0003] However, the research and development of submarine hydrothermal vents also faces a series of technical challenges. One of them is how to monitor the temperature, pressure and other parameters of deep-sea hydrothermal vents in real time and accurately. Due to the extremely harsh and complex environment of deep-sea hydrothermal vents, the difficulty of non-in-situ monitoring is extremely great, and the ecological environment is also extremely fragile. Traditional monitoring technology often cannot meet the requirements.

[0004] Flexible temperature sensors have the advantages of flexibility and suitability for in-situ monitoring. However, existing flexible temperature sensors have problems such as narrow temperature measurement range and low temperature measurement resolution. They are also prone to breakage, aging, corrosion and interference, which results in poor long-term in-situ monitoring capabilities and limits their application in deep-sea environments. Summary of the invention

[0005] Based on the above technical problems, the present invention proposes a flexible temperature sensor for in-situ monitoring of submarine hot springs, and a method for preparing the flexible temperature sensor.

[0006] The technical solution adopted by the present invention is:

[0007] A flexible temperature sensor for in-situ monitoring of submarine hot springs, comprising a flexible substrate, a temperature sensitive layer and a waterproof layer, wherein the temperature sensitive layer is arranged on one side surface of the flexible substrate, and the waterproof layer covers the temperature sensitive layer;

[0008] The temperature sensitive layer includes a positive electrode sensitive layer and a negative electrode sensitive layer, both of which are arranged in a serpentine shape, with the same ends of the positive electrode sensitive layer and the negative electrode sensitive layer in contact, and the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer connected to the data acquisition end through leads.

[0009] Preferably, the flexible substrate is made of polyimide material, and the flexible substrate is rectangular, square, curved, annular, circular or elliptical; the thickness of the flexible substrate is 0.05-0.07 mm.

[0010] Preferably, the positive electrode sensitive layer comprises a transverse serpentine structure, the transverse serpentine structure extends along the length direction of the flexible substrate, one end of the transverse serpentine structure is sequentially connected to the longitudinal serpentine structure, and the other end of the transverse serpentine structure is connected to the lead contact end;

[0011] The positive electrode sensitive layer and the negative electrode sensitive layer are arranged symmetrically; the ends of the longitudinal serpentine structures of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact;

[0012] The thickness of the temperature sensitive layer is 0.05-0.1 mm.

[0013] Preferably, the positive electrode sensitive layer and the negative electrode sensitive layer are both made by screen printing technology, the positive electrode sensitive layer is positive electrode indium tin oxide, and the negative electrode sensitive layer is negative electrode indium oxide; the waterproof layer is a PET waterproof layer; the thickness of the PET waterproof layer is 0.1mm-0.12mm; and a PDMS packaging layer is also wrapped on the outside of the connecting lead.

[0014] The present invention also provides a method for preparing the above-mentioned flexible temperature sensor for in-situ monitoring of submarine hot springs, comprising the following steps:

[0015] S1, selecting a polyimide flexible substrate, performing ultrasonic cleaning on the substrate, and then bombarding the surface of the polyimide flexible substrate with gas plasma to obtain a pretreated polyimide flexible substrate;

[0016] S2, using epoxy resin, polyetheramine and indium tin oxide to prepare positive electrode printing paste, and using epoxy resin, polyetheramine and indium oxide to prepare negative electrode printing paste;

[0017] S3, firstly printing the positive electrode printing paste on the surface of the treated polyimide flexible substrate by screen printing process, and then heating and curing to obtain positive electrode indium tin oxide, that is, positive electrode sensitive layer;

[0018] S4, printing the negative electrode printing paste on the surface of the polyimide flexible substrate by screen printing, and then heating and curing to obtain negative electrode indium oxide, i.e., negative electrode sensitive layer;

[0019] The positive electrode sensitive layer and the negative electrode sensitive layer are both arranged in a serpentine shape, the same end of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact, and the positive electrode sensitive layer and the negative electrode sensitive layer are symmetrically distributed;

[0020] S5, placing the polyimide flexible substrate with the positive electrode sensitive layer and the negative electrode sensitive layer screen-printed thereon into a tube furnace for sintering treatment;

[0021] S6. After sintering, a waterproof protective layer is printed on the positive electrode sensitive layer and the negative electrode sensitive layer by screen printing, and then heated and cured; leads are connected to the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer, the leads are packaged, and the ends of the leads are connected to the data acquisition end.

[0022] Preferably, in step S1: firstly, ultrasonically clean the polyimide flexible substrate with alcohol for 10-15 minutes, ultrasonically clean the polyimide flexible substrate with acetone for 5-7 minutes, and after completely air-drying, bombard the polyimide flexible substrate with gas plasma for 100-120 seconds.

[0023] Preferably, in step S2: the epoxy resin used is epoxy resin E51, the polyetheramine is polyetheramine D-400; the indium tin oxide and indium oxide used are both powders with a particle size of 1-1.2 microns;

[0024] When preparing the positive electrode printing paste, the mass ratio of epoxy resin E51, polyetheramine D-400 and indium tin oxide powder is 10:2-4:5-7; when preparing the negative electrode printing paste, the mass ratio of epoxy resin E51, polyetheramine D-400 and indium oxide powder is 10:2-4:7-8;

[0025] The prepared positive electrode printing paste and negative electrode printing paste are stirred before screen printing, and the stirring temperature is controlled to be 45-60° C., the stirring speed is 1200-1500 rpm, and the stirring time is 60-90 minutes.

[0026] Preferably, in steps S3 and S4: the heating curing temperature is controlled to be 80-100°C, the heating curing time is 20-30 minutes; the screen printing plate is 300 mesh; in step S6, the heating curing temperature is controlled to be 130-150°C, the heating curing time is 20-30 minutes; the screen printing plate is 200 mesh.

[0027] Preferably, in step S5: an inert gas is introduced during the sintering process; the sintering process is as follows: first increase the temperature to 200°C at a rate of 8°C / min, then increase the temperature to 350°C at a rate of 5°C / min, maintain at 350°C for 30 minutes, and then decrease to room temperature at an annealing rate of 5°C / min.

[0028] Preferably, the data acquisition terminal is a data acquisition card with cold-end compensation and voltage data storage functions.

[0029] The beneficial technical effects of the present invention are as follows:

[0030] The flexible temperature sensor or flexible thermocouple of the present invention is ultra-thin and can be arbitrarily cut, bent or even curled. It has good flexibility, a temperature measurement range of -50.0 to 350.0 ± 0.3 ° C, and a sensitivity of 100-120 μV·° C. -1, which can effectively meet the temperature measurement needs of flexible temperature sensors for deep-sea hydrothermal springs.

[0031] In the present invention, the positive electrode sensitive layer and the negative electrode sensitive layer are arranged in a serpentine shape along the stretching direction of the substrate, and the positive electrode sensitive layer and the negative electrode sensitive layer are symmetrically distributed. This arrangement ensures the overall flexibility of the sensor and has good measurement sensitivity, and the sensor has a large internal stress when it is stretched laterally and longitudinally.

[0032] The present invention designs and prepares a flexible temperature sensor for in-situ monitoring of submarine hot springs with long-term in-situ monitoring capability and eco-friendly. The sensor uses epoxy resin E51 and polyetheramine D-400 as curing agent and adhesive, and uses indium tin oxide for the positive electrode and indium oxide for the negative electrode to prepare positive and negative electrode slurries, and then uses screen printing, curing and sintering process to obtain a temperature sensitive layer, and the structural arrangement of the temperature sensitive layer is limited. This design method enables the sensor to have a wide temperature measurement range, which can be applied to submarine hot springs with higher temperatures, and has high temperature measurement sensitivity. At the same time, the temperature sensor has high flexibility and excellent durability, can work stably in the submarine hot spring environment for a long time, and has no pollution to the environment and will not damage the fragile submarine hot spring ecological environment.

[0033] The present invention can further improve the waterproof effect and durability of the sensor by providing a PET waterproof protective layer and PDMS packaged leads, thereby ensuring that the sensor can be used for long-term and stable in-situ monitoring of submarine hot springs.

[0034] The present invention selects a polyimide flexible substrate, performs pretreatment on it, and then coordinates the preparation of positive and negative electrode slurries, screen printing, curing, sintering and other process conditions to enable the prepared flexible temperature sensor to achieve long-term in-situ temperature measurement underwater, and has extremely low manufacturing costs. It can measure the temperature of surfaces with small surface gaps and non-planar measurement surfaces, and has extremely high temperature measurement resolution and dynamic response, and can measure temperatures from sub-zero to 350°C and transient temperatures. The characteristics of flexibility and thin film make the temperature sensor also eco-friendly, which is particularly important in the development of ecological resources and environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a schematic diagram of the overall structure of the flexible temperature sensor for in-situ monitoring of submarine hot springs according to the present invention;

[0036] Figure 2 A schematic diagram of the arrangement of the temperature sensitive layer on the flexible substrate in the flexible temperature sensor of the present invention;

[0037] Figure 3It is a schematic diagram of the decomposed structure of the temperature sensitive layer and the flexible substrate in the flexible temperature sensor of the present invention;

[0038] Figure 4 It is a schematic flow chart of a method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs according to the present invention;

[0039] Figure 5 This is a simulation comparison diagram of the maximum internal stress when the temperature sensitive layer in the flexible temperature sensor of the present invention is an L-shaped electrode and a serpentine electrode;

[0040] Figure 6 This is a temperature rise test diagram of the flexible temperature sensor of the present invention in seawater;

[0041] Figure 7 This is a temperature rise test diagram of the flexible temperature sensor of the present invention in silicone oil.

[0042] In the figure: 1-flexible substrate, 2-temperature sensitive layer, 3-waterproof layer, 4-lead, 5-data acquisition terminal, 6-PDMS packaging layer; 201-positive electrode sensitive layer, 202-negative electrode sensitive layer; 2011-lateral serpentine structure, 2012-longitudinal serpentine structure, 2013-lead contact terminal, 2014-contact point. DETAILED DESCRIPTION

[0043] The present invention provides a flexible temperature sensor for in-situ monitoring of submarine hot springs and a preparation method thereof. The flexible temperature sensor comprises a polyimide flexible substrate, a temperature sensitive layer and a PET waterproof layer from bottom to top. The temperature sensitive layer is connected to a lead wire of a PDMS package, and the lead wire is connected to a data acquisition card that receives a voltage signal. The flexible temperature sensor is ultra-thin and can be cut, bent or even curled at will. It has good flexibility, a temperature measurement range of -50.0 to 350.0 ± 0.3 °C, and a sensitivity of 100-120 μV•°C. -1 , meeting the temperature measurement needs of flexible temperature sensors in deep-sea hydrothermal springs.

[0044] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0045] Example 1

[0046] like Figure 1-3As shown, a flexible temperature sensor for in-situ monitoring of submarine hot springs includes a flexible substrate 1, a temperature sensitive layer 2 and a waterproof layer 3. The temperature sensitive layer 2 is arranged on one side surface of the flexible substrate 1, and the waterproof layer 3 covers the temperature sensitive layer 2. The temperature sensitive layer 2 includes a positive electrode sensitive layer 201 and a negative electrode sensitive layer 202, and the positive electrode sensitive layer 201 and the negative electrode sensitive layer 202 are arranged in a serpentine shape, and the same end of the positive electrode sensitive layer 201 and the negative electrode sensitive layer 202 are in contact, and the other ends of the positive electrode sensitive layer 201 and the negative electrode sensitive layer 202 are connected to the data acquisition terminal 5 through the lead 4. The temperature signal detected by the temperature sensitive layer 2 is transmitted to the data acquisition terminal 5 through the lead 4 and stored by the data acquisition terminal 5.

[0047] The flexible substrate 1 is made of polyimide material, that is, a polyimide flexible substrate. The flexible substrate 1 is rectangular, and can also be set to a square, curved, annular, circular or elliptical shape. The thickness of the flexible substrate 1 is 0.05mm. The thickness of the temperature sensitive layer 2 is 0.05-0.1mm, and the thickness of the waterproof layer 3 is 0.1mm-0.12mm.

[0048] The positive electrode sensitive layer 201 and the negative electrode sensitive layer 202 are both made by screen printing. The main material used in the positive electrode sensitive layer is positive electrode indium tin oxide, and the main material used in the negative electrode sensitive layer is negative electrode indium oxide. The waterproof layer 3 is a PET waterproof layer. The outside of the lead 4 is also wrapped with a PDMS encapsulation layer 6.

[0049] The flexible temperature sensor of the present invention is a high-temperature sensor that can be used in a high-temperature hot spring environment. The flexible temperature sensor is ultra-thin and can be arbitrarily cut, bent, or even curled. It has good flexibility, a temperature measurement range of -50.0 to 350.0 ± 0.3 °C, and a sensitivity of 100-120 μV·°C. -1 , which can effectively meet the demand for flexible temperature sensors to measure temperature in deep-sea hydrothermal springs. Moreover, the characteristics of flexibility and thin film make the temperature sensor also eco-friendly, which is particularly important in the development of ecological resources and environment.

[0050] Example 2

[0051] The basic structure is the same as that of Embodiment 1, except that: the positive electrode sensitive layer 201 includes a transverse serpentine structure 2011, which extends along the length direction of the flexible substrate 1, and a longitudinal serpentine structure 2012 is sequentially connected at one end of the transverse serpentine structure 2011, and the longitudinal serpentine structure extends toward the negative electrode sensitive layer 202. A lead contact terminal 2013 is connected at the other end of the transverse serpentine structure 2011. The positive electrode sensitive layer 201 and the negative electrode sensitive layer 202 are arranged symmetrically; the ends of the longitudinal serpentine structures of the positive electrode sensitive layer 201 and the negative electrode sensitive layer 202 are in contact with each other to form a contact point 2014.

[0052] This arrangement ensures the overall flexibility of the sensor and has good measurement sensitivity, and also has a large internal stress when the sensor is stretched horizontally and longitudinally. Figure 5 This is a simulation comparison diagram of the maximum internal stress when the temperature sensitive layer in the flexible temperature sensor of the present invention is a serpentine electrode and an L-shaped electrode. It can be seen from the figure that compared with the L-shaped electrode, the serpentine electrode has a better stress dispersion effect, and has better ductility and flexibility, which is more conducive to the flexible temperature sensor to perform in-situ detection in non-planar areas.

[0053] In summary, the present invention designs a new type of eco-friendly flexible temperature sensor with long-term in-situ monitoring capability. This temperature sensor has high flexibility and durability, can work stably in the submarine hydrothermal environment for a long time, and is pollution-free and will not damage the fragile submarine hydrothermal ecological environment. Compared with traditional temperature sensors, the present invention will bring new possibilities for the research and development of deep-sea hydrothermal vents, and will further promote scientific development and application in related fields.

[0054] Example 3

[0055] like Figure 4 As shown, a method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs comprises the following steps:

[0056] S1. Select a polyimide flexible substrate, first use alcohol ultrasonic cleaning for 10 minutes, then use acetone ultrasonic cleaning for 5 minutes, and after it is completely air-dried, use gas plasma to bombard the surface of the polyimide flexible substrate for 120 seconds to obtain a pretreated polyimide flexible substrate. The thickness of the flexible substrate is 0.05 mm.

[0057] The above cleaning method reduces the damage to the substrate and also performs deep cleaning. The subsequent gas plasma bombardment further cleans the surface of the flexible substrate and improves the hydrophilicity, wettability and adhesion of the substrate.

[0058] S2. Prepare positive electrode printing paste using epoxy resin E51, polyetheramine D-400 and indium tin oxide powder; prepare negative electrode printing paste using epoxy resin E51, polyetheramine D-400 and indium oxide powder.

[0059] The particle size of indium tin oxide powder and indium oxide powder is 1 micron. The ratio of epoxy resin E51, polyetheramine D-400 and positive indium tin oxide powder is 10:3:6, and the ratio of epoxy resin E51, polyetheramine D-400 and negative indium oxide powder is 10:3:7.5. The prepared positive and negative slurries should be stirred on a magnetic stirring table for 60 minutes, the plate temperature is set to 60°C, and the speed is set to 1200rpm.

[0060] The present invention adopts epoxy resin E51 and polyetheramine D-400 as the adhesive and curing agent of the sensitive layer slurry, which greatly improves the stability of the overall performance of the sensor.

[0061] S3, firstly print the positive electrode printing paste on the upper surface of the pretreated polyimide flexible substrate by screen printing process, the screen printing plate is 300 mesh, and then heat and cure at 100°C for 30 minutes to obtain positive electrode indium tin oxide, that is, the positive electrode sensitive layer.

[0062] S4. Print the negative electrode printing paste on the surface of the polyimide flexible substrate using a screen printing process, the screen printing plate is 300 mesh, and then heat and cure at 100° C. for 30 minutes to obtain negative electrode indium oxide, that is, the negative electrode sensitive layer.

[0063] The positive electrode sensitive layer and the negative electrode sensitive layer are both arranged in a serpentine shape, the same end of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact, and the positive electrode sensitive layer and the negative electrode sensitive layer are symmetrically distributed.

[0064] S5. Put the polyimide flexible substrate with the positive electrode sensitive layer and the negative electrode sensitive layer screen-printed thereon into a tube furnace for sintering. Inert gas, specifically argon, is introduced during the sintering process. The sintering process is as follows: first increase the temperature to 200°C at a rate of 8°C / min, then increase the temperature to 350°C at a rate of 5°C / min, maintain at 350°C for 30 minutes, and then decrease the temperature to room temperature at an annealing rate of 5°C / min.

[0065] The present invention adopts precise sintering and annealing temperatures to carbonize the adhesive and the curing agent at high temperature, thereby forming a conductive loop in the sensitive layer of the sensor, and is beneficial to improving the temperature measurement resolution and dynamic response of the sensor.

[0066] S6. After sintering, a waterproof protective layer is printed on the positive electrode sensitive layer and the negative electrode sensitive layer by screen printing, the screen printing plate is 200 mesh, and then heated and cured at 150°C for 30 minutes. Leads are connected to the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer, the leads are packaged, and the ends of the leads are connected to the data acquisition terminal.

[0067] The above heating and curing step can be performed using a digital display heating plate.

[0068] The waterproof protective layer is a PET waterproof protective layer obtained by screen printing of PET slurry; the PET slurry is a purchased finished slurry. The lead is encapsulated with polydimethylsiloxane (PDMS) material.

[0069] The above data acquisition end uses a data acquisition card with functions such as cold end compensation and voltage data storage. The cold end compensation function of the data acquisition card can feedback the temperature of the cold end, thereby improving the accuracy and stability of the hot end temperature measurement. The data acquisition card can also store voltage data, so that the flexible temperature sensor can perform long-term in-situ detection with good stability.

[0070] The present invention designs and prepares a flexible temperature sensor for in-situ monitoring of submarine hot springs that has the ability of long-term in-situ monitoring and is eco-friendly. The sensor uses epoxy resin E51 and polyetheramine D-400 as curing agent and adhesive, and uses indium tin oxide for the positive electrode and indium oxide for the negative electrode to prepare positive and negative electrode slurries, and then uses screen printing, curing and sintering processes to obtain a temperature sensitive layer, and the structural arrangement of the temperature sensitive layer is limited. This design method enables the sensor to have a wide temperature measurement range, which can be applied to submarine hot springs with higher temperatures, and has high temperature measurement sensitivity. At the same time, the temperature sensor has high flexibility and excellent durability, can work stably in a submarine hot spring environment for a long time, and is pollution-free to the environment and will not damage the fragile submarine hot spring ecological environment.

[0071] Figure 6 This is a temperature rise test diagram of the flexible temperature sensor of the present invention in seawater. Figure 7 This is a temperature rise test diagram of the flexible temperature sensor of the present invention in silicone oil. Figure 6 and Figure 7 It can be seen that the flexible temperature sensor maintains good temperature measurement performance in the high temperature environment of seawater and silicone oil.

[0072] The present invention selects a polyimide flexible substrate, performs pretreatment on it, and then coordinates the preparation of positive and negative electrode slurries, screen printing, curing, sintering and other process conditions to enable the prepared flexible temperature sensor to achieve long-term in-situ temperature measurement underwater, and has extremely low manufacturing costs. It can measure the temperature of surfaces with small surface gaps and non-planar measurement surfaces, and has extremely high temperature measurement resolution and dynamic response, and can measure temperatures from sub-zero to 350°C and transient temperatures. The characteristics of flexibility and thin film make the temperature sensor also eco-friendly, which is particularly important in the development of ecological resources and environment.

[0073] Based on the above embodiments, the present invention also has the following embodiments.

[0074] Example 4

[0075] A method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs comprises the following steps:

[0076] S1. Select a polyimide flexible substrate, first use alcohol ultrasonic cleaning for 15 minutes, then use acetone ultrasonic cleaning for 7 minutes, and after it is completely air-dried, use gas plasma to bombard the surface of the polyimide flexible substrate for 100 seconds to obtain a pretreated polyimide flexible substrate. The thickness of the flexible substrate is 0.07 mm.

[0077] S2. Prepare positive electrode printing paste using epoxy resin E51, polyetheramine D-400 and indium tin oxide powder; prepare negative electrode printing paste using epoxy resin E51, polyetheramine D-400 and indium oxide powder.

[0078] The particle size of indium tin oxide powder and indium oxide powder is 1.2 microns. The ratio of epoxy resin E51, polyetheramine D-400 and positive indium tin oxide powder is 10:2:7, and the ratio of epoxy resin E51, polyetheramine D-400 and negative indium oxide powder is 10:4:8. The prepared positive and negative slurries should be stirred on a magnetic stirring table for 90 minutes, with the plate temperature set to 45°C and the speed set to 1500rpm.

[0079] S3, firstly print the positive electrode printing paste on the upper surface of the pretreated polyimide flexible substrate by screen printing process, the screen printing plate is 300 mesh, and then heat and cure at 100°C for 20 minutes to obtain positive electrode indium tin oxide, that is, positive electrode sensitive layer.

[0080] S4. Print the negative electrode printing paste on the surface of the polyimide flexible substrate using a screen printing process, the screen printing plate is 300 mesh, and then heat and cure at 100° C. for 20 minutes to obtain negative electrode indium oxide, that is, the negative electrode sensitive layer.

[0081] The positive electrode sensitive layer and the negative electrode sensitive layer are both arranged in a serpentine shape, the same end of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact, and the positive electrode sensitive layer and the negative electrode sensitive layer are symmetrically distributed.

[0082] S5. Put the polyimide flexible substrate with the positive electrode sensitive layer and the negative electrode sensitive layer screen-printed thereon into a tube furnace for sintering. Inert gas, specifically argon, is introduced during the sintering process. The sintering process is as follows: first increase the temperature to 200°C at a rate of 8°C / min, then increase the temperature to 350°C at a rate of 5°C / min, maintain at 350°C for 30 minutes, and then decrease the temperature to room temperature at an annealing rate of 5°C / min.

[0083] S6. After sintering, a waterproof protective layer is printed on the positive electrode sensitive layer and the negative electrode sensitive layer by screen printing, and the screen printing plate is 200 mesh, and then heated and cured at 150°C for 20 minutes. Leads are connected to the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer, and the leads are packaged, and the ends of the leads are connected to the data acquisition terminal.

[0084] Example 5

[0085] A method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs comprises the following steps:

[0086] S1. Select a polyimide flexible substrate, first use alcohol ultrasonic cleaning for 12 minutes, then use acetone ultrasonic cleaning for 6 minutes, and after it is completely air-dried, use gas plasma to bombard the surface of the polyimide flexible substrate for 110 seconds to obtain a pretreated polyimide flexible substrate. The thickness of the flexible substrate is 0.05 mm.

[0087] S2. Prepare positive electrode printing paste using epoxy resin E51, polyetheramine D-400 and indium tin oxide powder; prepare negative electrode printing paste using epoxy resin E51, polyetheramine D-400 and indium oxide powder.

[0088] The particle size of indium tin oxide powder and indium oxide powder is 1 micron. The ratio of epoxy resin E51, polyetheramine D-400 and positive indium tin oxide powder is 10:4:5, and the ratio of epoxy resin E51, polyetheramine D-400 and negative indium oxide powder is 10:2:7. The prepared positive and negative slurries should be stirred on a magnetic stirring table for 70 minutes, with the plate temperature set to 50°C and the speed set to 1300rpm.

[0089] S3, firstly print the positive electrode printing paste on the upper surface of the pretreated polyimide flexible substrate by screen printing process, the screen printing plate is 300 mesh, and then heat and cure at 90°C for 25 minutes to obtain positive electrode indium tin oxide, that is, positive electrode sensitive layer.

[0090] S4. Print the negative electrode printing paste on the surface of the polyimide flexible substrate using a screen printing process, the screen printing plate is 300 mesh, and then heat and cure at 90° C. for 25 minutes to obtain the negative electrode indium oxide, i.e., the negative electrode sensitive layer.

[0091] The positive electrode sensitive layer and the negative electrode sensitive layer are both arranged in a serpentine shape, the same end of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact, and the positive electrode sensitive layer and the negative electrode sensitive layer are symmetrically distributed.

[0092] S5. Put the polyimide flexible substrate with the positive electrode sensitive layer and the negative electrode sensitive layer screen-printed thereon into a tube furnace for sintering. Inert gas, specifically argon, is introduced during the sintering process. The sintering process is as follows: first increase the temperature to 200°C at a rate of 8°C / min, then increase the temperature to 350°C at a rate of 5°C / min, maintain at 350°C for 30 minutes, and then decrease the temperature to room temperature at an annealing rate of 5°C / min.

[0093] S6. After sintering, a waterproof protective layer is printed on the positive electrode sensitive layer and the negative electrode sensitive layer by screen printing, the screen printing plate is 200 mesh, and then heated and cured at 130°C for 30 minutes. Leads are connected to the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer, the leads are packaged, and the ends of the leads are connected to the data acquisition end.

[0094] The parts not mentioned in the above methods can be realized by adopting or drawing on existing technologies.

[0095] As mentioned above, similar technical solutions can be derived from the scheme contents given in the drawings and descriptions. However, any modification, equivalent change and modification of any component shape, size, connection mode and installation structure made to the above description according to the technical essence of the present invention, as well as slight adjustment of the position and structure of each component, which do not deviate from the scheme contents of the structure of the present invention, still fall within the scope of rights of the technical solution of the present invention.

Claims

1. A flexible temperature sensor for in-situ monitoring of submarine hot springs, characterized in that: It includes a flexible substrate, a temperature sensitive layer and a waterproof layer, wherein the temperature sensitive layer is arranged on one side surface of the flexible substrate, and the waterproof layer covers the temperature sensitive layer; The temperature sensitive layer includes a positive electrode sensitive layer and a negative electrode sensitive layer, both of which are arranged in a serpentine shape, with the same ends of the positive electrode sensitive layer and the negative electrode sensitive layer in contact, and the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer connected to the data acquisition end through leads.

2. The flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 1, characterized in that: The flexible substrate is made of polyimide material and is rectangular, square, curved, annular, circular or elliptical in shape; the thickness of the flexible substrate is 0.05-0.07 mm.

3. The flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 1, characterized in that: The positive electrode sensitive layer comprises a transverse serpentine structure, which extends along the length direction of the flexible substrate, is sequentially connected to the longitudinal serpentine structure at one end of the transverse serpentine structure, and is connected to the lead contact end at the other end of the transverse serpentine structure; The positive electrode sensitive layer and the negative electrode sensitive layer are arranged symmetrically; the ends of the longitudinal serpentine structures of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact; The thickness of the temperature sensitive layer is 0.05-0.1 mm.

4. The flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 1, characterized in that: The positive electrode sensitive layer and the negative electrode sensitive layer are both made by screen printing technology. The positive electrode sensitive layer is positive electrode indium tin oxide, and the negative electrode sensitive layer is negative electrode indium oxide. The waterproof layer is a PET waterproof layer. The thickness of the PET waterproof layer is 0.1mm-0.12mm. A PDMS packaging layer is also wrapped on the outside of the connecting lead.

5. The method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs as claimed in any one of claims 1 to 4, characterized in that The following steps are involved: S1, selecting a polyimide flexible substrate, performing ultrasonic cleaning on the substrate, and then bombarding the surface of the polyimide flexible substrate with gas plasma to obtain a pretreated polyimide flexible substrate; S2, using epoxy resin, polyetheramine and indium tin oxide to prepare positive electrode printing paste, and using epoxy resin, polyetheramine and indium oxide to prepare negative electrode printing paste; S3, firstly printing the positive electrode printing paste on the surface of the treated polyimide flexible substrate by screen printing process, and then heating and curing to obtain positive electrode indium tin oxide, that is, positive electrode sensitive layer; S4, printing the negative electrode printing paste on the surface of the polyimide flexible substrate by screen printing, and then heating and curing to obtain negative electrode indium oxide, i.e., negative electrode sensitive layer; The positive electrode sensitive layer and the negative electrode sensitive layer are both arranged in a serpentine shape, the same end of the positive electrode sensitive layer and the negative electrode sensitive layer are in contact, and the positive electrode sensitive layer and the negative electrode sensitive layer are symmetrically distributed; S5, placing the polyimide flexible substrate with the positive electrode sensitive layer and the negative electrode sensitive layer screen-printed thereon into a tube furnace for sintering treatment; S6. After sintering, a waterproof protective layer is printed on the positive electrode sensitive layer and the negative electrode sensitive layer by screen printing, and then heated and cured; leads are connected to the other ends of the positive electrode sensitive layer and the negative electrode sensitive layer, the leads are packaged, and the ends of the leads are connected to the data acquisition end.

6. The method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 5, characterized in that: In step S1: firstly use alcohol ultrasonic cleaning for 10-15 minutes, and acetone ultrasonic cleaning for 5-7 minutes, and after being completely air-dried, the polyimide flexible substrate is bombarded with gas plasma for 100-120 seconds.

7. The method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 5, characterized in that: In step S2: the epoxy resin used is epoxy resin E51, the polyetheramine is polyetheramine D-400; the indium tin oxide and indium oxide used are both powders with a particle size of 1-1.2 microns; When preparing the positive electrode printing paste, the mass ratio of epoxy resin E51, polyetheramine D-400 and indium tin oxide powder is 10:2-4:5-7; when preparing the negative electrode printing paste, the mass ratio of epoxy resin E51, polyetheramine D-400 and indium oxide powder is 10:2-4:7-8; The prepared positive electrode printing paste and negative electrode printing paste are stirred before screen printing, and the stirring temperature is controlled to be 45-60° C., the stirring speed is 1200-1500 rpm, and the stirring time is 60-90 minutes.

8. The method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 5, characterized in that: In steps S3 and S4: the heating curing temperature is controlled to be 80-100°C, the heating curing time is 20-30 minutes; the screen printing plate is 300 mesh; in step S6, the heating curing temperature is controlled to be 130-150°C, the heating curing time is 20-30 minutes; the screen printing plate is 200 mesh.

9. The method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 5, characterized in that: In step S5: inert gas is introduced during the sintering process; the sintering process is as follows: first increase the temperature to 200°C at a rate of 8°C / min, then increase the temperature to 350°C at a rate of 5°C / min, maintain at 350°C for 30 minutes, and then decrease to room temperature at an annealing rate of 5°C / min.

10. The method for preparing a flexible temperature sensor for in-situ monitoring of submarine hot springs according to claim 5, characterized in that: The data acquisition terminal is a data acquisition card with cold end compensation and voltage data storage functions.

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